CN113340491B - Optical fiber Fabry-Perot pressure sensor and high-consistency preparation method of sensitive unit thereof - Google Patents
Optical fiber Fabry-Perot pressure sensor and high-consistency preparation method of sensitive unit thereof Download PDFInfo
- Publication number
- CN113340491B CN113340491B CN202110769703.0A CN202110769703A CN113340491B CN 113340491 B CN113340491 B CN 113340491B CN 202110769703 A CN202110769703 A CN 202110769703A CN 113340491 B CN113340491 B CN 113340491B
- Authority
- CN
- China
- Prior art keywords
- quartz plate
- optical fiber
- pressure sensor
- hole
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 79
- 238000002360 preparation method Methods 0.000 title claims abstract description 14
- 239000010453 quartz Substances 0.000 claims abstract description 173
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 173
- 238000004519 manufacturing process Methods 0.000 claims abstract description 41
- 238000000034 method Methods 0.000 claims abstract description 15
- 238000005498 polishing Methods 0.000 claims abstract description 14
- 238000009826 distribution Methods 0.000 claims abstract description 13
- 238000005520 cutting process Methods 0.000 claims abstract description 4
- 239000011521 glass Substances 0.000 claims description 26
- 239000000463 material Substances 0.000 claims description 12
- 238000003466 welding Methods 0.000 claims description 10
- 239000000835 fiber Substances 0.000 claims description 9
- 238000007731 hot pressing Methods 0.000 claims 2
- 239000012528 membrane Substances 0.000 description 19
- 230000003287 optical effect Effects 0.000 description 16
- 238000010586 diagram Methods 0.000 description 14
- 238000005516 engineering process Methods 0.000 description 12
- 238000009530 blood pressure measurement Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 230000004927 fusion Effects 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
- G01L11/025—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means using a pressure-sensitive optical fibre
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The disclosure describes a high-consistency preparation method of an optical fiber Fabry-Perot pressure sensor and a sensitive unit thereof, which comprises the following steps: preparing a first quartz plate, a second quartz plate, and a third quartz plate; polishing the upper surface of the first quartz plate, polishing the upper and lower surfaces of the second quartz plate, and polishing the upper surface of the third quartz plate; making a plurality of grooves on the upper surface of the first quartz plate or the upper surface of the second quartz plate in a preset distribution mode; manufacturing a plurality of through holes in a third quartz plate in a preset distribution mode; bonding an upper surface of the first quartz plate with an upper surface of the second quartz plate in a manner of covering the plurality of grooves, and bonding an upper surface of the third quartz plate with a lower surface of the second quartz plate, forming a laminate in which the respective grooves and the respective through holes are coaxial, respectively; and cutting the plurality of grooves to obtain a plurality of sensitive units. According to the method and the device, consistency of the sensitive unit of the optical fiber Fabry-Perot pressure sensor can be improved.
Description
Technical Field
The disclosure relates to a high-consistency preparation method of an optical fiber Fabry-Perot pressure sensor and a sensitive unit thereof.
Background
In recent years, with rapid development of the fields of aerospace, chemical industry, energy sources and the like, higher and higher requirements are being put on the reliability of the pressure sensor in a high-temperature environment, and the conventional piezoresistive or piezoelectric pressure sensor is difficult to be applied to high-precision pressure measurement in the fields due to the problems that, for example, a manufacturing material is not high-temperature resistant, the signal line is heat-conductive and the demodulation system is adversely affected.
Optical fiber type pressure sensors, such as optical fiber Fabry-Perot type pressure sensors, are used for sensing pressure by a sensitive unit based on an optical principle, and have the advantages of small volume, high sensitivity, corrosion resistance, electromagnetic interference resistance and the like. The sensitive unit can be made of high-temperature resistant materials, and the application of the optical principle is not easily affected by high temperature, so that the optical fiber Fabry-Perot type pressure sensor is suitable for pressure measurement in the high-temperature environment. In recent years, technologies for manufacturing an optical fiber fabry-perot pressure sensor are mainly composed of MEMS technology, chemical etching technology, arc discharge technology, laser processing technology, and the like. However, the consistency of the sensors manufactured by the arc discharge technology and the laser processing technology is relatively poor by using the chemical etching technology, for example, the consistency of each sensitive unit is low due to the non-uniform thickness and effective radius of the sensitive membrane of the different sensitive units, and the low-cost batch manufacturing of the sensors is difficult to realize.
In contrast, sensors fabricated using MEMS technology have the advantage of high uniformity of sensitive cells and mass production. At present, a pressure sensor is reported, which realizes batch manufacturing of an optical fiber Fabry-Perot pressure sensor by using a Pyrex glass wafer and a silicon wafer, and can perform pressure measurement in a high-temperature environment of 350 ℃, however, the pressure measurement in a higher-temperature environment is difficult to realize due to the limitation of the characteristics of materials. Moreover, since two materials with different thermal expansion coefficients are used for manufacturing the sensor, the use performance of the sensor is affected due to the mismatch of the thermal expansion coefficients of the different materials when the sensor works in a high-temperature environment, which is one of the reasons for limiting the application of the sensor in a high-temperature environment. In addition, in the connection method of the optical fiber and the sensitive unit, the current common method is to use ultraviolet epoxy resin or high-temperature-resistant adhesive, and the stability and the service life of the sensor at high temperature can be further influenced by introducing the adhesive material into the sensor which needs to work in a high-temperature environment.
Fused silica glass materials have softening points up to about 1730 ℃ and are resistant to acid and alkali corrosion, and have lower coefficients of thermal expansion than materials currently in common use for manufacturing fiber optic fabry-perot pressure sensors, such as metal, pyrex glass, silicon, sapphire, siC, and the like, making them good materials for manufacturing high temperature pressure sensors. In the invention, we use high temperature thermocompression bonding technique and microThe mechanical processing technology is used for manufacturing and verifying an all-quartz optical fiber Fabry-Perot pressure sensor which can be manufactured in batch and utilizes CO 2 The laser welding technology realizes the non-gelling sealing integration of the sensor all-quartz sensitive unit and the signal transmission optical fiber, so that the sensor can stably work in a high-temperature environment.
Disclosure of Invention
The present disclosure has been made in view of the above-described conventional circumstances, and an object thereof is to provide a method for manufacturing a sensitive unit of an optical fiber fabry-perot pressure sensor with high uniformity, which can improve the uniformity of the optical fiber fabry-perot pressure sensor.
To this end, a first aspect of the present disclosure provides a method for preparing a sensitive unit of an optical fiber fabry-perot pressure sensor with high consistency, comprising the steps of: preparing a first quartz plate having opposite upper and lower surfaces, a second quartz plate having opposite upper and lower surfaces, and a third quartz plate having opposite upper and lower surfaces; polishing an upper surface of the first quartz plate, polishing upper and lower surfaces of the second quartz plate, and polishing an upper surface of the third quartz plate; manufacturing a plurality of grooves on the upper surface of the first quartz plate or the upper surface of the second quartz plate in a preset distribution mode; manufacturing a plurality of through holes in the third quartz plate in the preset distribution mode; bonding an upper surface of the first quartz plate with an upper surface of the second quartz plate in a manner covering the plurality of grooves, and bonding an upper surface of the third quartz plate with a lower surface of the second quartz plate, forming a stacked body in which the respective grooves and the respective through holes are coaxial, respectively; and cutting the plurality of grooves to obtain a plurality of sensitive units.
In the high-consistency manufacturing method according to the first aspect of the present disclosure, the material consistency of each of the sensitive units can be improved by processing the first quartz piece, the second quartz piece, and the third quartz piece to obtain a plurality of sensitive units; in addition, by bonding the first quartz plate and the second quartz plate in such a manner as to cover the plurality of grooves, and bonding the third quartz plate and the second quartz plate to form a laminated body, and cutting the plurality of grooves of the laminated body to obtain a plurality of sensitive units, the uniformity of the sensitive film sheets of the respective sensitive units can be improved. Thereby, the consistency of the sensitive unit can be improved, and the consistency of the optical fiber Fabry-Perot type pressure sensor can be improved.
In addition, in the high-consistency manufacturing method according to the first aspect of the present disclosure, optionally, the predetermined distribution manner includes at least a wheelbase between the respective grooves. In this case, the plurality of grooves and the plurality of through holes are made based on the same predetermined distribution pattern, whereby it is possible to facilitate the coaxial arrangement of the respective grooves and the respective through holes.
In addition, in the high uniformity manufacturing method according to the first aspect of the present disclosure, optionally, a boss coaxial with each through hole is manufactured on the lower surface of the third quartz plate of the laminated body at a position corresponding to the through hole, the boss is cylindrical, and the diameter of the boss is smaller than 2.5mm. In this case, the welding of the optical fiber to the sensitive unit can be facilitated by the boss.
In addition, in the high-uniformity manufacturing method according to the first aspect of the present disclosure, air holes that communicate with the grooves via the first quartz plate may be optionally manufactured in the laminated body. In this case, the air pressure inside and outside the cavity is balanced by the plurality of air holes, whereby a sensitive unit suitable for sensing sound pressure can be provided.
In addition, in the high-uniformity manufacturing method according to the first aspect of the present disclosure, the air hole may be L-shaped. Thereby, the influence of the air holes on the deformation of the second diaphragm can be reduced.
In addition, in the high-uniformity manufacturing method according to the first aspect of the present disclosure, optionally, the number of the air holes is plural, and the plural air holes are uniformly arranged around the axis of the through hole. In this case, when sensing sound pressure, it can be advantageous to reduce the influence of the air pressure.
The second aspect of the present disclosure provides an optical fiber fabry-perot pressure sensor, which includes a sensing unit and an optical fiber, the sensing unit includes a first diaphragm, a second diaphragm, and a third diaphragm stacked in sequence, a microcavity is formed between the first diaphragm and the second diaphragm, a first reflecting surface and a second reflecting surface which are respectively located at opposite sides of the microcavity and are parallel to each other, a through hole which is coaxial with the microcavity and is not communicated with the microcavity is formed on the third diaphragm, the size of the optical fiber is matched with the size of the through hole, the optical fiber is embedded in the through hole, the axis of the optical fiber is orthogonal to the first reflecting surface and the second reflecting surface, and light entering the microcavity via the optical fiber can be reflected between the first reflecting surface and the second reflecting surface, wherein the sensing unit is prepared according to the high-consistency preparation method of the first aspect of the present disclosure. In this case, the plurality of sensing units and the plurality of optical fiber fabry-perot pressure sensors are prepared by the high consistency manufacturing method according to the first aspect of the present disclosure, whereby consistency of the optical fiber fabry-perot pressure sensors can be improved.
In addition, in the optical fiber fabry-perot pressure sensor according to the second aspect of the present disclosure, optionally, the optical fiber includes a bare fiber and a glass tube having a hollow portion, a size of the glass tube is matched with a size of the through hole and the glass tube is embedded in the through hole, a size of the bare fiber is matched with a size of the hollow portion and the bare fiber is embedded in the hollow portion, an axis of the hollow portion is orthogonal to the first reflecting surface and the second reflecting surface and an end face of one end of the bare fiber embedded in the hollow portion is parallel to the first reflecting surface and the second reflecting surface. In this case, the welding of the optical fiber to the sensitive unit can be facilitated by the glass tube.
In the optical fiber fabry-perot pressure sensor according to the second aspect of the present disclosure, a collimator element configured to collimate light may be provided on an end surface of the optical fiber embedded in one end of the hollow portion.
In addition, in the optical fiber fabry-perot pressure sensor according to the second aspect of the present disclosure, optionally, the first diaphragm has an air hole communicating with the microcavity. In this case, the air holes are used to balance the air pressure inside and outside the cavity, so that an optical fiber Fabry-Perot pressure sensor suitable for sensing the sound pressure can be provided.
According to the high-consistency preparation method of the sensitive unit of the optical fiber Fabry-Perot pressure sensor, consistency of the sensitive unit of the optical fiber Fabry-Perot pressure sensor can be improved, and accordingly consistency of the optical fiber Fabry-Perot pressure sensor can be improved.
Drawings
The present disclosure will now be explained in further detail by way of example only with reference to the accompanying drawings, in which:
fig. 1 is a flowchart diagram illustrating a preparation method according to an embodiment of the present disclosure.
Fig. 2 is a schematic view showing a first quartz plate, a second quartz plate, and a third quartz plate according to an embodiment of the present disclosure.
Fig. 3 is a schematic view illustrating the fabrication of a plurality of grooves and positioning holes in a second quartz plate according to an embodiment of the present disclosure.
Fig. 4 is a schematic view illustrating the fabrication of a plurality of through holes and positioning holes in a third quartz plate according to an embodiment of the present disclosure.
Fig. 5 is a schematic diagram showing a laminate according to an embodiment of the present disclosure.
Fig. 6 is a schematic view showing manufacturing of a plurality of bosses in a laminated body according to an embodiment of the present disclosure.
Fig. 7 is a schematic perspective view illustrating a sensing unit according to an embodiment of the present disclosure.
Fig. 8 is a schematic diagram showing a perspective structure of a first example of a pressure sensor according to an embodiment of the present disclosure.
Fig. 9 is a schematic diagram showing a perspective structure of a second example of the pressure sensor according to the embodiment of the present disclosure.
Fig. 10 is a schematic diagram showing a cross section along AA' of fig. 9.
Fig. 11 is a schematic diagram showing a third example of a pressure sensor of an embodiment of the present disclosure.
Fig. 12 is a schematic diagram showing a fourth example of a pressure sensor of an embodiment of the present disclosure.
Detailed Description
Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In the following description, the same members are denoted by the same reference numerals, and overlapping description thereof is omitted. In addition, the drawings are schematic, and the ratio of the sizes of the components to each other, the shapes of the components, and the like may be different from actual ones.
It should be noted that the terms "comprises" and "comprising," and any variations thereof, in this disclosure, such as a process, method, system, article, or apparatus that comprises or has a list of steps or elements is not necessarily limited to those steps or elements expressly listed or inherent to such process, method, article, or apparatus, but may include or have other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In addition, headings and the like referred to in the following description of the disclosure are not intended to limit the disclosure or scope thereof, but rather are merely indicative of reading. Such subtitles are not to be understood as being used for segmenting the content of the article, nor should the content under the subtitle be limited only to the scope of the subtitle.
The embodiment of the disclosure relates to a high-consistency preparation method of a sensitive unit of an optical fiber Fabry-Perot pressure sensor. In this embodiment, the optical fiber fabry-perot pressure sensor may be simply referred to as a pressure sensor, and the high-consistency manufacturing method may also be referred to as a batch manufacturing method or simply referred to as a manufacturing method. By the preparation method of the embodiment, the consistency of the sensitive unit of the pressure sensor can be improved, so that the consistency of the pressure sensor can be improved.
Fig. 1 is a flowchart diagram illustrating a preparation method according to an embodiment of the present disclosure. Fig. 2 is a schematic view showing a first quartz plate 100, a second quartz plate 200, and a third quartz plate 300 according to an embodiment of the present disclosure. Fig. 3 is a schematic view illustrating the fabrication of a plurality of grooves and positioning holes in the second quartz plate 200 according to the embodiment of the present disclosure. Fig. 4 is a schematic view illustrating the fabrication of a plurality of through holes and positioning holes in the third quartz plate 300 according to the embodiment of the present disclosure. Fig. 5 is a schematic diagram illustrating a laminate 400 according to an embodiment of the present disclosure.
Fig. 6 is a schematic view illustrating fabrication of a plurality of bosses in the laminate 400 according to an embodiment of the present disclosure. Fig. 7 is a schematic perspective view illustrating a sensing unit 10 according to an embodiment of the present disclosure. Fig. 8 is a schematic diagram showing a perspective structure of a first example of the pressure sensor 1 according to the embodiment of the present disclosure. Fig. 9 is a schematic diagram showing a perspective structure of a second example of the pressure sensor 1 according to the embodiment of the present disclosure. Fig. 10 is a schematic diagram showing a cross section along AA' of fig. 9.
In the present embodiment, the pressure sensor 1 may include a sensing unit 10 and an optical assembly 20 (see fig. 8 and 9) connected to the sensing unit 10. The sensing unit 10 can sense pressure, and the optical component 20 and the sensing unit 10 cooperate to obtain a sensing signal for the pressure. In some examples, the optical assembly 20 may be connected to a demodulation device (not shown) for demodulating the sensed signal, and may transmit the sensed signal to the demodulation device, which may demodulate the sensed signal to obtain a measurement of pressure.
In this embodiment, the fp cavity refers to an optical resonator that is formed by two light guiding surfaces that are disposed opposite to each other and parallel to each other with a predetermined distance, and light can be reflected between the two light guiding surfaces of the fp cavity to provide optical feedback. In the Fabry-Perot cavity, optical feedback when light is reflected between the two light guide surfaces has a corresponding relation with the distance between the two light guide surfaces.
In some examples, the sensing cell 10 may include a first membrane 11, a second membrane 12, and a third membrane 13 stacked in sequence (see fig. 7). In some examples, a cavity 101 may be formed between the first diaphragm 11 and the second diaphragm 12, and the third diaphragm 13 may have a through hole 102 (see fig. 7) communicating with the cavity 101. In addition, in some examples, the surface of the first membrane 11 near the cavity 101 may be subjected to polishing treatment, the upper and lower surfaces of the second membrane 12 may be subjected to polishing treatment, and the surface of the third membrane 13 near the cavity 101 may be subjected to polishing treatment.
In some examples, the optical component 20 may be an optical fiber 21 (see fig. 8). In other examples, the optical assembly 20 may include an optical fiber 21 and a glass tube 22 having a hollow portion, and the optical fiber 21 may be embedded within the hollow portion of the glass tube 22 (see fig. 9).
In some examples, one end of the optical fiber 21 may be cut flat, and the end may be placed in the through hole 102 (see fig. 10). In this case, the surface of the first membrane 11 near the cavity 101 may be a first light guiding surface, the surface of the second membrane 102 near the cavity 101 may be a second light guiding surface, and the cavity 101, the first light guiding surface, and the second light guiding surface may form a fabry-perot cavity.
When the pressure sensor 1 according to the present embodiment is used to measure pressure, the first diaphragm 11 can be deformed by the pressure, so that the distance between the first light guiding surface (i.e., the surface of the first diaphragm 11 close to the cavity 101) and the second light guiding surface (i.e., the surface of the second diaphragm 12 close to the cavity 101) can be changed, and thus the optical feedback when light is reflected between the first light guiding surface and the second light guiding surface can be changed. The demodulation device may obtain the distance between the first light guiding surface and the second light guiding surface based on the changed optical feedback, so as to obtain the deformation generated by the first diaphragm 11, thereby obtaining the measurement result of the pressure sensor 1 on the pressure.
In some examples, the cavity 101 may be cylindrical, elliptical or prismatic in shape, such as a quadrangular prism. In some examples, the through-hole 102 may be a cylindrical through-hole. In some examples, the boss 103 (described later) may have a cylindrical, elliptical or prismatic shape such as a quadrangular prism shape, or the like. In addition, in some examples, the cavity 101, the through hole 102, and the boss 103 may be coaxial.
In some examples, in the sensing unit 10, the through hole 102 may be perpendicular to the surface of the second membrane 12 near the cavity 101. This allows the optical fiber 21 to be collimated, thereby facilitating coupling of the incident light beam emitted from the optical fiber 21 into the first light guide surface and the second light guide surface of the pressure sensor 1, and better coupling of the light beam reflected from the first light guide surface and the second light guide surface of the pressure sensor 10 into the optical fiber 21.
In some examples, the through-hole 102 may have an inner diameter that matches an outer diameter of the glass tube 22, and the glass tube 22 may have an inner diameter that matches an outer diameter of the optical fiber 21. The optical fiber 21 may be placed in the glass tube 22 and fixed in the glass tube 22 via, for example, high temperature welding or the like, and then the glass tube 22 may be placed in the through hole 102 with the flattened end face of the optical fiber 21 attached to the surface of the second diaphragm 12 remote from the cavity 101 and fixed to the boss 103 via, for example, high temperature welding or the like (see fig. 10). In this case, by connecting the optical fiber 21 to the sensing unit 10 using the glass tube 22, the optical fiber 21 can be collimated, so that the incident light beam emitted from the optical fiber 21 can be better coupled into the first light guide surface and the second light guide surface of the pressure sensor 1 and the light beam reflected from the first light guide surface and the second light guide surface of the pressure sensor 1 can be better coupled into the optical fiber.
In some examples, a collimating element (not shown) may also be provided at the end face of the end of the optical fiber 21 where it is cut flat. The collimating element may collimate the light exiting the optical fiber. In some examples, the flattened end of the optical fiber 21 may be embedded in the hollow of the glass tube 22 or in the through hole 102.
The present disclosure may provide a pressure sensor 1, the pressure sensor 1 may include a sensing unit 10, a glass tube 22 having a hollow portion, and an optical fiber 21, the sensing unit 10 may include a first inner surface (i.e., a surface of the first diaphragm 11 near the cavity 101), a second inner surface opposite to the first inner surface (i.e., a surface of the second diaphragm 12 near the cavity 101), the cavity 101 formed between the first inner surface and the second inner surface, and a third diaphragm 13 having a through hole 102, the size of the glass tube 22 may be matched with the size of the through hole 102 and the glass tube 22 may be embedded in the through hole 102, the size of the optical fiber 21 may be matched with the size of the hollow portion of the glass tube 22 and the optical fiber 21 may be embedded in the hollow portion, an end surface of one end of the optical fiber 21 embedded in the hollow portion may be orthogonal to the second light guiding surface and be attached to a surface of the second diaphragm 12 remote from the cavity 101, and light entering the cavity via the optical fiber 21 may be reflected between the first light guiding surface and the second light guiding surface. In this case, the plurality of sensing units 10 are prepared by the high consistency preparation method according to the present disclosure, and the film thickness and the effective sensing diameter of the sensing film layer of each sensing unit are the same, and the fp cavity lengths (i.e., the distance between the first light guiding surface and the second light guiding surface) of every other sensing unit also tend to be consistent, and the plurality of optical fiber fp pressure sensors 1 are further prepared, so that the consistency of the optical fiber fp pressure sensors 1 can be improved.
In some examples, the glass tube 22 may be bonded to the sensing unit 10 via high temperature fusion, such as laser welding. In addition, in some examples, the optical fiber 21 may be bonded to the glass tube 22 via high temperature fusion, such as laser welding.
As described above, in the pressure sensor 1, the first diaphragm 11 is deformed by sensing pressure, so that the distance between the two light guide surfaces in the fabry-perot cavity can be changed, and the distance between the two light guide surfaces can be obtained by optical feedback when light is reflected between the two light guide surfaces. Thereby, the deformation of the first diaphragm 11 due to the pressure can be obtained, and the measurement result of the pressure can be obtained.
As can be seen from this, in the pressure sensor 1, the uniformity of the sensitive unit 10 in the pressure sensor 1 is improved, which contributes to the uniformity of the pressure sensor 1.
In this embodiment, as shown in fig. 1, the preparation method may include the steps of: preparing a first quartz piece 100, a second quartz piece 200, and a third quartz piece 300 (step S100); manufacturing a plurality of grooves 201 and positioning holes 202 on the second quartz plate 200 (step S200); manufacturing a plurality of through holes 301 and positioning holes 302 in the third quartz plate 300 (step S300); the first quartz piece 100, the third quartz piece 300, and the second quartz piece 200 are bonded to form a laminated body 400 (described later) (step S400); manufacturing a plurality of bosses 401 on the laminate 400 (step S500); the laminate 400 is cut (step S600).
In step S100 of the present embodiment, a first quartz plate 100 having opposite upper and lower surfaces is prepared, a second quartz plate 200 having opposite upper and lower surfaces is prepared, and a third quartz plate 300 having opposite upper and lower surfaces is prepared (see fig. 2). It should be understood that terms such as "upper surface," "lower surface," and the like may be used to distinguish between different locations and should not be considered limiting.
In some examples, the upper surface 0 of the first quartz plate 100 may be polished. In some examples, the upper and lower surfaces of the second quartz plate 200 may be polished, and the upper surface of the third quartz plate 300 may be polished. In this case, the bonding between the upper surface of the first quartz piece 100 and the upper surface of the second quartz piece 200 can be facilitated by polishing the upper surface of the first quartz piece 100 and the upper surface of the second quartz piece 200, and the bonding between the lower surface of the second quartz piece 200 and the upper surface of the third quartz piece 300 can be facilitated by polishing the lower surface of the second quartz piece 200 and the upper surface of the third quartz piece 300 so that the bonded compact laminate 400 can be formed.
In some examples, the lower surface of the third quartz plate 300 may be polished. In some examples, the lower surface of the first quartz plate 100 may be roughened. Thereby, the influence of the lower surface of the first quartz plate 100 on the light reflection can be reduced.
In some examples, the thickness of the second quartz piece 200 may be greater than the thickness of the first quartz piece 100, and the thickness of the third quartz piece may be greater than the thickness of the second quartz piece. In some examples, the first, second, and third quartz pieces 100, 200, 300 may be round quartz pieces (see fig. 2). In some examples, the first quartz piece 100 or the second quartz piece 200 or the third quartz piece 300 may be a 2-inch wafer, a 4-inch wafer, or a 6-inch wafer. In some examples, the diameter of the second quartz piece 200 may be equal to the diameter of the first quartz piece 100. In some examples, the diameter of the second quartz piece 200 may be slightly smaller than the diameter of the first quartz piece 100. Thereby, the upper surface of the first quartz plate 100 can cover the upper surface of the second quartz plate 200.
In other examples, the thickness of the second quartz plate 200 may also be equal to or less than the thickness of the first quartz plate 100. The thickness of the third quartz plate 300 may also be equal to or less than the thickness of the second quartz plate 200.
In some examples, the second quartz plate 200 may be a round quartz plate of uniform thickness. In some examples, the thickness of the second quartz plate 200 may be 0.1mm to 2mm. In some examples, the first quartz plate 100 may be a round quartz plate of uniform thickness. In some examples, the first quartz plate 100 may have a thickness of 10 μm to 500 μm. In some examples, the third quartz plate 300 may be a circular quartz plate having a uniform thickness, and the thickness of the third quartz plate 300 may be 0.5 to 2mm.
As described above, in step S200 of the present embodiment, a plurality of grooves 201 may be formed in the upper surface of the second quartz plate 200 (in the example shown in fig. 3, one of the plurality of grooves 201 is marked). In the embodiment shown in fig. 3, the plurality of grooves may be an array of grooves. In some examples, the grooves in the groove array may be uniformly distributed on the upper surface of the second quartz plate 200. In some examples, fabrication of the groove array may be based on a predetermined distribution pattern. The predetermined distribution pattern may at least comprise the wheelbase etc. between the individual grooves.
In some examples, the locating holes 202 of the second quartz plate 200 may be located near an edge of the second quartz plate.
In some examples, the grooves in the groove array may be cylindrical, elliptical cylindrical, or prismatic. In some examples, preferably, the grooves in the groove array may be cylindrical. In some examples, the grooves in the groove array may have the same diameter. In other examples, the grooves in the groove array may also have different diameters. In some examples, the grooves in the groove array may have the same depth.
In some examples, the grooves in the groove array may have a diameter of 80 μm to 10mm. In some examples, the depth of the grooves in the groove array may be 3 μm to 100 μm.
In some examples, the wheelbase between adjacent grooves may be 1.5 to 2 times the diameter of each groove. However, the example of the present embodiment is not limited thereto, and in other examples, the wheelbase between adjacent grooves may be 2 to 4 times the diameter of each groove.
In some examples, the grooves in the groove array may be manufactured on the upper surface of the second quartz plate 200 in batch by using a MEMS technology, so that the grooves in the groove array may have a depth that tends to be uniform, which is beneficial to improving the uniformity of the sensitive unit.
As described above, in step S300 of the present embodiment, a plurality of through holes 301 (in the example shown in fig. 3, one of the plurality of through holes 301 is marked) and positioning holes 302 may be formed in the upper surface of the third quartz plate 300. Specifically, a plurality of through holes and positioning holes may be formed in the upper surface of the third quartz plate 300 at positions corresponding to the respective microcavities and positioning holes of the second quartz plate. In the embodiment shown in fig. 4, the plurality of vias may be an array of vias.
In some examples, the vias in the array of vias may be cylindrical vias or prismatic vias. In some examples, fabrication of the via array may be based on a predetermined distribution pattern. In this case, the groove array and the via hole array are fabricated based on the same predetermined distribution pattern, whereby alignment of the respective grooves with the respective via holes can be facilitated.
In some examples, the vias in the array of vias may have the same aperture. In some examples, the pore size of each through-hole may be smaller than the diameter of each microcavity. In some examples, the apertures of the vias in the array of vias may be 50 μm to 2.4mm.
In some examples, the locating hole 302 of the third quartz piece 300 may be near an edge of the third quartz piece 300.
In some examples, the through holes in the through hole array may be made by a laser cutting process at the upper surface of the third quartz plate 300. For example, through holes having the same pore diameter may be formed in the upper surface of the first quartz plate 100 by computer numerical control machining (CNC machining).
As described above, in step S400 of the present embodiment, the upper surface of the first quartz plate 100 is bonded to the upper surface of the second quartz plate 200 in such a manner as to cover the groove array, and the upper surface through-hole positioning hole defining position of the third quartz plate 300 is bonded to the lower surface of the second quartz plate 200 to form the laminated body 400 (see fig. 5). Wherein in the stacked body 400, the positioning holes of the second quartz plate 200 are coaxial with the positioning holes of the third quartz plate 300, and the respective grooves in the groove array of the second quartz plate 200 are coaxial with the through holes at each corresponding position in the through hole array of the third quartz plate 300, respectively. It is possible to facilitate coaxial of the respective grooves and the respective through holes by aligning the positioning holes of the second quartz plate 200 with the positioning holes of the third quartz plate 300.
In some examples, the first, second, and third quartz pieces 100, 200, 300 may be bonded via thermal bonding. In some examples, the first, second, and third quartz pieces 100, 200, and 300 may be bonded via high temperature thermocompression bonding or low temperature bonding. In other examples, the first, second, and third quartz pieces 100, 200, and 300 may also be bonded via an adhesive.
In some examples, the bonding of the first, second, and third quartz pieces 100, 200, 300 may include the steps of: the first quartz piece 100, the second quartz piece 200, and the third quartz piece 300 are cleaned; performing thermocompression bonding on the first quartz piece 100, the second quartz piece 200 and the third quartz piece 300 in a low-temperature environment; the first, second and third quartz pieces 100, 200 and 300 are thermally and pressure-bonded at high temperature.
In some examples, the cleaning may be RCA standard cleaning or megasonic cleaning, or the like. In some examples, the low temperature environment may be 200 degrees to 500 degrees. In some examples, the air pressure at which the thermocompression bonding is performed may be 1Bar to 50Bar. In some examples, the treatment time for thermocompression bonding may be 5 to 100 minutes. In some examples, the high temperature environment may be 900 degrees to 1200 degrees. In some examples, the treatment time for high temperature anneal strengthening may be 1 hour to 4 hours.
In some examples, in the stack 400, the axes of the grooves in the groove array may be perpendicular to the upper surface of the first quartz plate 100, and the axes of the through holes in the through hole array may be perpendicular to the upper surface of the first quartz plate 100.
As described above, in step S500 of the present embodiment, a plurality of bosses may be formed in the laminated body 400. Specifically, a plurality of bosses 401 may be formed on the lower surface of the third quartz plate 300 of the laminated body 400 at positions corresponding to the respective through holes (in the embodiment shown in fig. 6, one of the bosses 401 is marked). In the embodiment shown in fig. 6, the plurality of bosses may be an array of bosses.
In some examples, the bosses in the boss array may be cylindrical bosses or prismatic bosses. In some examples, each boss in the array of bosses may be coaxial with each corresponding through hole in the array of through holes.
In some examples, the bosses in the boss array may have the same height. In some examples, the height of the lands in the land array may be 0.5mm to 1.5mm.
In some examples, the bosses in the boss array may have the same diameter. In some examples, the diameter of each boss may be smaller than the diameter of each microcavity. In some examples, the diameter of the lands in the land array may be 100 μm to 2.5mm.
In some examples, in the stack 400, a plurality of microcavities and a plurality of bosses are arranged on the side of the upper surface of the second quartz plate 200 and the side of the lower surface of the third quartz plate 300, and respective through holes penetrate the respective bosses.
Specifically, the grooves in the groove array, the through holes in the through hole array and the bosses in the boss array are respectively corresponding and coaxial through the positioning holes and the positioning holes, and the through holes in the through hole array penetrate through the bosses in the boss array;
in some examples, the boss array may be fabricated at the lower surface of the third quartz plate 300 by a laser cutting process. For example, bosses in the boss arrays having the same height and the same diameter may be manufactured by computer numerical control machining (CNC machining) at the lower surface of the third quartz plate 300.
It should be noted that, in some examples, the bosses in the boss array described above may facilitate welding the optical fiber 21 to the sensing unit 10. In other examples, the boss array may not be formed on the lower surface of the third quartz plate 300 (see fig. 5). In this case, the optical fiber 21 may be directly soldered in the through hole 102 of the sensing unit 10.
As described above, in step S600 of the present embodiment, the laminate 400 is cut, thereby obtaining a plurality of sensitive units. The individual sensor heads that are cut out are shown in fig. 7, and in some examples, the predetermined cut diameter is greater than the diameter of each groove and not greater than the wheelbase between adjacent through holes.
In the present embodiment, a plurality of microcavities having the same diameter and depth are formed in the second quartz plate 200, and the microcavities are covered with the first quartz plate 100, so that a plurality of fabry-perot cavities (for example, uniform in shape, uniform in size, and the like) having high uniformity can be formed by covering the lower surface of the second quartz plate 200 with the third quartz plate 300. In addition, the thickness of the first quartz plate 100 is uniform, and thus, a plurality of sensitive membranes (for example, uniform material, uniform shape, uniform size, and uniform deformation due to pressure induction) which are matched with the respective cavities and have high uniformity can be formed. In this case, the stacked body 400 formed by joining the first quartz piece 100, the second quartz piece 200, and the third quartz piece 300 is cut, and a plurality of sensitive units 10 having high uniformity can be obtained.
Fig. 11 is a schematic diagram showing a third example of the pressure sensor 1 of the embodiment of the present disclosure. Fig. 12 is a schematic diagram showing a fourth example of the pressure sensor 1 of the embodiment of the present disclosure.
In some examples, an air hole communicating with the cavity 101 may be made on the first membrane 11 of the sensing unit 10 (see fig. 11 and 12). In this case, the air pressure can be reduced to the effect of the first diaphragm 11 by the air hole communication cavity, and the first diaphragm 11 can still sense the sound pressure. Thereby, a sensing unit 10 for sensing sound pressure can be provided, and the accuracy of sensing sound pressure by the sensing unit 10 can be improved.
In some examples, the number of air holes may be 2 to 12, for example, the number of air holes may be 2, 3, 4, 5, 6, 8, 9, 10, or 12. In the embodiment shown in fig. 11 and 12, the plurality of air holes may be a first air hole 11a, a second air hole 11b, a third air hole (not shown), and a fourth air hole (not shown) (see fig. 11 and 12). In some examples, the first, second, third, and fourth air holes 11a, 11b may be uniformly distributed around the axis of the through hole 102. This can reduce the influence of the air pressure or the hydraulic pressure on the first diaphragm 11 more effectively.
In some examples, a plurality of air holes may extend through the first membrane 11. In some examples, the axes of the plurality of air holes may be orthogonal to the first diaphragm 11 or at a predetermined angle to the first diaphragm 11. In some examples, the axis of the through hole 102 may not pass through any of the plurality of air holes.
In other examples, a plurality of air holes may also penetrate from the edge of the first membrane 11 to the first optical surface of the first membrane 11, and a furrow-like groove communicating with the plurality of air holes of the first membrane 11 may be provided on the side of the second membrane 12 near the cavity 101, thereby forming an air hole communicating with the cavity 101 in an L-shape as a whole (see fig. 12). That is, in the embodiment shown in fig. 12, the air hole 11a (taking the air hole 11a as an example) may include a hole provided on the first diaphragm 11, and a groove provided on the second diaphragm 12 and communicating with the cavity 101, the hole provided on the first diaphragm 11 and the groove provided on the second diaphragm 12 being aligned to communicate with each other when the first diaphragm 11 and the second diaphragm 12 are combined, so that the air hole 11a communicates with the outside and the cavity 101.
That is, in some examples, the air hole 11a may include a first portion (i.e., a hole formed on the first membrane 11) and a second portion (i.e., a groove formed on the second membrane 12) formed in an L-shape, and an axis of the first portion may be orthogonal to the first optical surface, and an axis of the second portion may be parallel to the first optical surface. In this case, the cavity 101 can be made to communicate with the outside, so that a pressure sensor 1 capable of sensing acoustic pressure can be provided.
According to the manufacturing method of the present embodiment, the consistency of the sensitive unit 10 can be improved, thereby improving the consistency of the pressure sensor 1.
While the disclosure has been described in detail in connection with the drawings and examples, it is to be understood that the foregoing description is not intended to limit the disclosure in any way. Modifications and variations of the present disclosure may be made as desired by those skilled in the art without departing from the true spirit and scope of the disclosure, and such modifications and variations fall within the scope of the disclosure.
Claims (9)
1. A high consistency preparation method of a sensitive unit of an optical fiber Fabry-Perot pressure sensor is characterized in that,
the method comprises the following steps:
preparing a first quartz plate having opposite upper and lower surfaces, a second quartz plate having opposite upper and lower surfaces, and a third quartz plate having opposite upper and lower surfaces; polishing an upper surface of the first quartz plate, polishing upper and lower surfaces of the second quartz plate, and polishing an upper surface of the third quartz plate; manufacturing a plurality of grooves on the upper surface of the first quartz plate or the upper surface of the second quartz plate in a preset distribution mode; manufacturing a plurality of through holes in the third quartz plate in the preset distribution mode; bonding an upper surface of the first quartz plate with an upper surface of the second quartz plate in a manner covering the plurality of grooves, and bonding an upper surface of the third quartz plate with a lower surface of the second quartz plate, forming a stacked body in which the respective grooves and the respective through holes are coaxial, respectively; air holes which are communicated with the grooves through the first quartz plate are formed in the laminated body; and cutting the plurality of grooves to obtain a plurality of sensing units with consistent material, shape and size, wherein the first quartz plate, the second quartz plate and the third quartz plate are combined through thermal bonding, and the bonding comprises: performing hot-pressing pre-bonding on the first quartz plate, the second quartz plate and the third quartz plate in a low-temperature environment; and carrying out high-temperature hot-pressing connection on the first quartz plate, the second quartz plate and the third quartz plate in a high-temperature environment.
2. The method for producing a high consistency according to claim 1, wherein,
the predetermined distribution pattern comprises at least the wheelbase between the individual grooves.
3. The method for producing a high consistency according to claim 1, wherein,
and a boss coaxial with each through hole is manufactured on the lower surface of the third quartz plate of the laminated body at a position corresponding to each through hole, the boss is cylindrical, and the diameter of the boss is smaller than 2.5mm.
4. The method for producing a high consistency according to claim 1, wherein,
the air holes are L-shaped.
5. The method for producing a high consistency according to claim 1, wherein,
the number of the air holes is plural, and the plural air holes are uniformly arranged around the axis of the through hole.
6. An optical fiber Fabry-Perot pressure sensor is characterized in that,
comprising a sensitive unit and an optical fiber,
the sensing unit comprises a first diaphragm, a second diaphragm and a third diaphragm which are sequentially laminated, a microcavity, a first reflecting surface and a second reflecting surface which are respectively positioned on two opposite sides of the microcavity and are parallel to each other are formed between the first diaphragm and the second diaphragm, a through hole which is coaxial with the microcavity and is not communicated with the microcavity is formed on the third diaphragm, the size of the optical fiber is matched with that of the through hole, the optical fiber is embedded in the through hole, the end face of the optical fiber is attached to the surface of the second diaphragm far away from the microcavity, the axis of the optical fiber is orthogonal to the first reflecting surface and the second reflecting surface, and the light entering the microcavity through the optical fiber can be reflected between the first reflecting surface and the second reflecting surface, wherein the sensing unit is prepared according to the high-consistency preparation method of any one of claims 1 to 5.
7. The fiber optic Fabry-Perot pressure sensor of claim 6, wherein,
the optical fiber comprises a bare optical fiber and a glass tube with a hollow part, wherein the size of the glass tube is matched with the size of the through hole, the glass tube is embedded in the through hole, the size of the bare optical fiber is matched with the size of the hollow part, the bare optical fiber is embedded in the hollow part, the axis of the hollow part is orthogonal to the first reflecting surface and the second reflecting surface, the bare optical fiber is embedded in the end face of one end of the hollow part, and the first reflecting surface and the second reflecting surface are parallel.
8. The fiber optic Fabry-Perot pressure sensor of claim 7 wherein,
and a collimation element configured to collimate light is arranged on the end face of one end of the optical fiber embedded in the hollow part.
9. The fiber optic Fabry-Perot pressure sensor of claim 7 wherein,
the glass tube is bonded to the sensing unit via high temperature welding, and the bare fiber is bonded to the glass tube via high temperature welding.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110769703.0A CN113340491B (en) | 2021-07-07 | 2021-07-07 | Optical fiber Fabry-Perot pressure sensor and high-consistency preparation method of sensitive unit thereof |
| US17/811,094 US20230009271A1 (en) | 2021-07-07 | 2022-07-07 | Fiber-optic fabry-perot pressure sensor and batch preparation method for sensing unit thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110769703.0A CN113340491B (en) | 2021-07-07 | 2021-07-07 | Optical fiber Fabry-Perot pressure sensor and high-consistency preparation method of sensitive unit thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113340491A CN113340491A (en) | 2021-09-03 |
| CN113340491B true CN113340491B (en) | 2024-01-05 |
Family
ID=77482999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110769703.0A Active CN113340491B (en) | 2021-07-07 | 2021-07-07 | Optical fiber Fabry-Perot pressure sensor and high-consistency preparation method of sensitive unit thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113340491B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1089062A1 (en) * | 1998-06-16 | 2001-04-04 | Nauchny Tsentr Volokonnoj Optiki Pri Institute Obschei Fiziki Rossiiskoi Akademii Nauk | Fiber-optic pressure sensor, variants and method for producing a resilient membrane |
| CN102384809A (en) * | 2011-08-09 | 2012-03-21 | 天津大学 | High-stability optical fiber Fabry-Perot pressure sensor packaged without glue and manufacturing method |
| CN103644987A (en) * | 2013-11-25 | 2014-03-19 | 中国航空工业集团公司北京长城计量测试技术研究所 | Optical fiber F-P (Fabry-Perot) cavity pressure sensor with temperature self compensation |
| CN203551100U (en) * | 2013-09-29 | 2014-04-16 | 中国电子科技集团公司第二十七研究所 | Novel Fabry-Perot interference-type MEMS sound wave sensor |
| CN104614104A (en) * | 2015-01-19 | 2015-05-13 | 中北大学 | Optical fiber fabry-perot pressure sensor and manufacturing method thereof |
| CN106197782A (en) * | 2015-05-31 | 2016-12-07 | 成都凯天电子股份有限公司 | Miniature extrinsic Fabry-perot optical fiber pressure transducer |
| CN106323515A (en) * | 2015-07-10 | 2017-01-11 | 成都凯天电子股份有限公司 | Optical fiber F-P cavity stress relief pressure sensor |
| CN112629720A (en) * | 2020-11-30 | 2021-04-09 | 中国航空工业集团公司北京长城计量测试技术研究所 | Low-loss optical fiber pressure sensor and manufacturing method thereof |
-
2021
- 2021-07-07 CN CN202110769703.0A patent/CN113340491B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1089062A1 (en) * | 1998-06-16 | 2001-04-04 | Nauchny Tsentr Volokonnoj Optiki Pri Institute Obschei Fiziki Rossiiskoi Akademii Nauk | Fiber-optic pressure sensor, variants and method for producing a resilient membrane |
| CN102384809A (en) * | 2011-08-09 | 2012-03-21 | 天津大学 | High-stability optical fiber Fabry-Perot pressure sensor packaged without glue and manufacturing method |
| CN203551100U (en) * | 2013-09-29 | 2014-04-16 | 中国电子科技集团公司第二十七研究所 | Novel Fabry-Perot interference-type MEMS sound wave sensor |
| CN103644987A (en) * | 2013-11-25 | 2014-03-19 | 中国航空工业集团公司北京长城计量测试技术研究所 | Optical fiber F-P (Fabry-Perot) cavity pressure sensor with temperature self compensation |
| CN104614104A (en) * | 2015-01-19 | 2015-05-13 | 中北大学 | Optical fiber fabry-perot pressure sensor and manufacturing method thereof |
| CN106197782A (en) * | 2015-05-31 | 2016-12-07 | 成都凯天电子股份有限公司 | Miniature extrinsic Fabry-perot optical fiber pressure transducer |
| CN106323515A (en) * | 2015-07-10 | 2017-01-11 | 成都凯天电子股份有限公司 | Optical fiber F-P cavity stress relief pressure sensor |
| CN112629720A (en) * | 2020-11-30 | 2021-04-09 | 中国航空工业集团公司北京长城计量测试技术研究所 | Low-loss optical fiber pressure sensor and manufacturing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113340491A (en) | 2021-09-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4571405B2 (en) | Manufacturing method of electronic parts | |
| JP4690963B2 (en) | Manufacturing method of multi-channel optical module | |
| US9074957B2 (en) | High stable fiber fabry-perot pressure sensor with glue-free packing and its fabrication method | |
| WO1992021047A1 (en) | Method of connecting optical waveguide to optical fiber | |
| TW200540481A (en) | Light transmitting and receiving module | |
| TW442678B (en) | Connector-type optical transceiver using SOI optical waveguide | |
| US20050031291A1 (en) | Assembly of device components and sub-systems | |
| JP2005122084A (en) | Optical element module | |
| US20070248301A1 (en) | Surface mount optical coupler, method of mounting the same, and method of producing the same | |
| CN113340491B (en) | Optical fiber Fabry-Perot pressure sensor and high-consistency preparation method of sensitive unit thereof | |
| CN113340492A (en) | Batch preparation method of optical fiber Fabry-Perot pressure sensor and sensitive unit thereof | |
| WO1998044369A1 (en) | Sealed fiber array and method for manufacturing a sealed fiber array | |
| CN112629720B (en) | Low-loss optical fiber pressure sensor and manufacturing method thereof | |
| JP2005517966A (en) | High density optical fiber array | |
| JP5244585B2 (en) | OPTICAL TRANSMISSION BOARD, MANUFACTURING METHOD THEREOF, AND OPTICAL TRANSMISSION DEVICE | |
| CN214893786U (en) | Extrinsic optical fiber Fabry-Perot pressure sensor | |
| CN214893787U (en) | Optical fiber Fabry-Perot pressure sensor | |
| JP2006251046A (en) | Optical waveguide substrate, optical surface mounting waveguide element, and their manufacturing method | |
| US20230009271A1 (en) | Fiber-optic fabry-perot pressure sensor and batch preparation method for sensing unit thereof | |
| JP4288604B2 (en) | Optical coupling device | |
| CN115855228A (en) | All-quartz optical fiber Fabry-Perot vibration sensor and preparation method of sensitive unit thereof | |
| JP2003098321A (en) | Optical functional element, optical transmitting- receiving module using the optical functional element and method for manufacturing the optical transmitting- receiving module | |
| JP2006058327A (en) | Optical waveguide device and optical coupling device | |
| JP3140247B2 (en) | Manufacturing method of optical fiber array | |
| JPWO2016181778A1 (en) | Optical fiber array and optical switch |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |