CN113328653B - Novel anti-magnetic suspension voltage induction type micro-driver and control method thereof - Google Patents
Novel anti-magnetic suspension voltage induction type micro-driver and control method thereof Download PDFInfo
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- CN113328653B CN113328653B CN202110596671.9A CN202110596671A CN113328653B CN 113328653 B CN113328653 B CN 113328653B CN 202110596671 A CN202110596671 A CN 202110596671A CN 113328653 B CN113328653 B CN 113328653B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
Abstract
The invention discloses a novel anti-magnetic suspension voltage induction type micro-driver, which comprises: the permanent magnet array, the driving system and the suspension platform are sequentially arranged from bottom to top, the permanent magnet array comprises N rectangular magnets, N is an even number, and the permanent magnets are naturally attracted together and symmetrically arranged; the driving system comprises two-phase alternating current, four-phase parallel driving electrodes, two-phase parallel driving electrodes, a first induction electrode and a second induction electrode. The novel anti-magnetic suspension voltage induction type micro-driver solves the problem that the micro-driver is greatly influenced by friction force due to the reduction of size, and is driven under a silent condition, so that the performance and the stability of a micro-system are improved; the micro-driver can be controlled in a programmable mode, can be controlled accurately through digital control, and is high in reliability.
Description
Technical Field
The invention discloses a magnetic suspension voltage induction resistant micro-driver, and belongs to the field of micro-driving.
Background
A Micro-electro-mechanical system (MEMS) is an evolution of microelectronic technology, is a novel Micro device generated based on the common combination of Micro-machining technology and microelectronic technology, and has the advantages of high integration level, high intelligence, high miniaturization, multiple functions, light weight, small volume, capability of realizing mass production, intelligent processing and the like. With the continuous development of the MEMS technology, the micro actuator plays an increasingly important role in the key fields of aerospace, diving, biomedicine, and the like.
The diamagnetic suspension technology utilizes diamagnetism of a substance, can make the diamagnetic substance passively statically and stably suspend without inputting external energy, and particularly, related research achievements of diamagnetic suspension are continuously increased along with the development of a micro-manufacturing technology and a high-intensity magnetic field technology in the last 30 years. The anti-magnetic suspension is not limited by Earnshaws' theorem, and can realize normal-temperature, passive, friction-free and static stable suspension. The gravity ratio of the diamagnetic suspension force to the suspended matter is positively correlated with the surface area of the suspended matter, so that the ratio of the suspension force to the suspended matter is increased along with the reduction of the scale under the scale effect, and the diamagnetic suspension force and the suspended matter have great application prospects in the field of micro-driving. In addition, the surface/volume ratio of the microactuator is extremely large due to the reduction in size, and thus frictional force, viscous resistance, etc. associated with the surface have a more significant effect on the system, and therefore, controlling the state of the microactuator in contact with (rubbing) the surface is an effective way to improve the performance and stability thereof.
The driving principle of the micro-driver can be mainly divided into four types, the first type is used for automatic reclosing, and is based on relay technology driving, phase change technology driving and the like, and the automatic reclosing driving has the problems of large volume, high cost, lower reliability, incapability of being realized in the existing switch and the like; the second one is driven by micro-displacement structure of micro-step motor, which is similar to the principle of step motor, and has higher positioning precision, but complex structure and high cost; the third is to use the piezoelectric ceramic micro-displacement structure for driving, but the total driving quantity of the structure is less, which often cannot meet the requirement of the operation space; the fourth is to use piezoelectric micropump, electrostatic micropump, etc. to drive, which mainly uses different methods of static electricity, piezoelectric, etc. to trigger the movement of mechanical parts, thus providing power source for microfluid.
Disclosure of Invention
The purpose of the invention is as follows: the invention provides a novel anti-magnetic suspension voltage induction type micro-driver aiming at the problems of large friction force, high cost, complex structure, low reliability and the like of the existing micro-driver.
The technical scheme is as follows:
a novel anti-magnetic levitation voltage induced microactuator comprising: the permanent magnet array, the driving system and the suspension platform are sequentially arranged from bottom to top, the permanent magnet array comprises N rectangular magnets, N is an even number, and the permanent magnets are naturally attracted together and symmetrically arranged;
the driving system comprises two-phase alternating current, four-phase parallel driving electrodes, two-phase parallel driving electrodes, a first induction electrode and a second induction electrode; the four-phase parallel driving electrode comprises M driving electrode plates, M is a multiple of 4, each driving electrode plate is rectangular and divided into 4 phases, the driving electrode plates are sequentially arranged in parallel according to the number of phases along a central line formed at the suction position of two cuboid magnets in the middle and are attached to the center of the upper surface of the permanent magnet array, the electrode plates in the same phase are mutually communicated, the electrode plates in different phases are not mutually communicated, and each phase of the four-phase parallel driving electrode is respectively connected with each phase of four-phase alternating current;
the first induction electrode comprises two electrode plates with the same size, the two electrode plates are respectively arranged above the attraction position of the first rectangular magnet and the second rectangular magnet and the attraction position of the Nth rectangular magnet and the N-1 th rectangular magnet in parallel, the two sides of the electrode plates of the four-phase parallel driving electrode are respectively connected with the two phases of the two-phase alternating current, and the four-phase parallel driving electrode and the first induction electrode are separately arranged;
the total number of pole pieces of the two parallel driving electrodes is a multiple of 2, and the two driving electrodes are divided into 2 phases; two second induction electrodes with the same size are distributed on two sides of the two parallel driving electrodes, each electrode plate in the two parallel driving electrodes is integrated with one second induction electrode respectively to form an interdigital electrode and is attached to the center of the lower surface of the suspension platform, wherein the electrode plates in the same phase are communicated with each other, the electrode plates in different phases are not communicated with each other, and the electrode plates of the adjacent two parallel driving electrodes are electrode plates in different phases.
Further, N is 4.
Further, the four-phase parallel driving electrodes have the same electrode spacing p between every two driving electrode plates, and the spacing between every two driving electrode plates of the two-phase parallel driving electrodes is twice as large as that of the four-phase parallel driving electrodes.
Further, the magnetization of the rectangular magnets is equal in magnitude.
Furthermore, the four-phase parallel driving electrode, the two-phase parallel driving electrode, the first induction electrode and the second induction electrode are all prepared by adopting an aluminum-based ultrathin PCB process.
Furthermore, the permanent magnet material is NdFeB, and the suspension platform is prepared from diamagnetic materials such as pyrolytic graphite.
Further, high-voltage amplifiers are arranged between the four-phase alternating current and the four-phase parallel driving electrode and between the two-phase alternating current and the first induction electrode, and the four-phase alternating current and the two-phase alternating current are amplified by the high-voltage amplifiers and then are respectively connected with the four-phase parallel driving electrode and the first induction electrode.
Furthermore, the amplitude of the four-phase alternating current is 1000V, the frequency is 1000Hz, and the phase of each electrode lags behind by 90 degrees in sequence; the amplitude of the two-phase alternating current is 1000V, the frequency is 998Hz, and the phase difference between each electrode is 180 degrees.
Furthermore, the two-phase alternating current and the four-phase alternating current are controlled in a programmable mode through the micro-driver, different frequencies are output, different driving speeds are achieved, accurate control can be achieved through digital control, and reliability is high. The velocity of the suspended platform is proportional to the frequency difference between the drive and sense electrodes.
A control method of a novel diamagnetic suspension voltage induction type micro-driver comprises the steps that two-phase alternating current is firstly supplied to a first induction electrode and then is transmitted to a second induction electrode of a suspension platform through electrostatic induction, two-phase induction voltage is also generated on the surface of a two-phase driving electrode due to the fact that the second induction electrode of each phase is connected with a two-phase driving electrode, four-phase alternating current is supplied to four-phase parallel driving electrodes, electrostatic force can be generated between the four-phase parallel driving electrode and the two-phase parallel driving electrode, and the suspension platform is driven to move.
Has the advantages that:
(1) the problem of the micro-actuator that the friction force influence is big because of the reduction of size is solved to this actuator is driven under silent condition, has improved microsystem's performance and stability.
(2) The micro-driver can be controlled in a programmable mode, can be controlled accurately through digital control, and is high in reliability.
(3) The anti-magnetic suspension principle is combined with voltage induction, the power consumption of the system is reduced, the structure is simple, the miniaturization of the system is facilitated, the suspension platform is suspended on the magnet, no wire is required for connection, and the constraint of the wire is eliminated.
(4) By using the scale effect of the diamagnetic levitation principle, i.e. the reduction in size, the ratio of levitation force to gravity will increase, thus being very suitable for micro-electro-mechanical systems and capable of on-load motion.
(5) The velocity of the suspended platform is proportional to the frequency difference between the drive and sense electrodes.
Drawings
FIG. 1 is a schematic diagram of a resistive levitating voltage-induced microactuator;
FIG. 2 is a permanent magnet array;
FIG. 3 is a schematic diagram of a resistive levitation voltage sensing microactuator;
FIG. 4 is a four-phase AC waveform;
FIG. 5 is a waveform of two-phase alternating current;
fig. 6 is a programmable control circuit connection diagram.
Detailed Description
The invention is further explained below with reference to the drawings.
As shown in fig. 1, a schematic diagram of a novel diamagnetic suspension voltage induction type micro-driver includes a permanent magnet array 1, a driving system and a suspension platform 2, which are sequentially arranged from bottom to top, wherein the driving system includes a two-phase alternating current 3, a four-phase alternating current 4, a four-phase parallel driving electrode 5, a two-phase parallel driving electrode 6, a first induction electrode 7 and a second induction electrode 8; the four-phase parallel connection sticks the driving electrode 5 and the first induction electrode 7 on the upper surface of the magnet, the two-phase parallel connection driving electrode 6 and the induction electrode 8 are stuck on the lower surface of the suspension platform, and the suspension platform is stably suspended above the magnet.
The permanent magnet array 1 is composed of four same cuboid magnets, the magnetizing directions of the cuboid magnets are shown in figure 2, the permanent magnet array 1 belongs to Opposite 1D type arrangement, the magnetization intensities are equal, the cuboid magnets can be naturally attracted together without external force, and the cuboid magnets are symmetrically arranged. The four-phase parallel driving electrode 5 is positioned in the center of the upper surface of the permanent magnet array, each driving electrode slice is rectangular, the total number of the driving electrode slices is multiple of 4, the driving electrode slices are divided into 4 phases in total, the electrode slices of the same phase are mutually communicated through a lead, and the electrode slices of different phases are not mutually communicated. In the permanent magnet array 1, two first induction electrodes 7 with the same size are arranged on two sides of the four parallel driving electrodes 5, and the four parallel driving electrodes 5 and the first induction electrodes 7 are separated. On the lower surface of the suspension platform, two phases of parallel driving electrodes 6 are attached to the center of the lower surface of the suspension platform, the total number of pole pieces of the two phases of parallel driving electrodes 6 is a multiple of 2, the two phases are divided into 2 phases, and the pole pieces of the adjacent two phases of parallel driving electrodes 6 are different-phase pole pieces; two second sensing electrodes 8 with the same size are distributed on two sides of the two parallel driving electrodes 6. The two parallel driving electrodes 6 and the second sensing electrodes 8 are respectively integrated together to form an interdigital electrode, wherein the electrode plates of the same phase are mutually communicated, and the electrode plates of different phases are not mutually communicated.
Fig. 3 is a schematic diagram of an anti-magnetic levitation voltage induction type micro-actuator, as shown in the figure, a levitation platform is levitated on a first induction electrode 7 and a four-phase parallel driving electrode 5, wherein a second induction electrode 8 with the same phase is connected with a two-phase parallel driving electrode 6 into a whole, and the second induction electrode 8 is opposite to the first induction electrode 7 in a surface-to-surface manner. The four-phase parallel driving electrode 5, the two-phase parallel driving electrode 6, the first induction electrode 7 and the second induction electrode 8 are all prepared by an aluminum-based ultrathin PCB process. In the process of preparing the four-phase parallel driving electrode 5, the two-phase parallel driving electrode 6, the first induction electrode 7 and the second induction electrode 8 by the PCB technology, the surfaces of all electrode plates are not covered with a protective film, so that copper coated on the electrode plates is in an exposed state. The permanent magnet array 1 is composed of four NdFeB permanent magnets, and the suspension platform is prepared from pyrolytic graphite. In the final two-to-four phase configuration, the four phase parallel drive electrodes 5 have a regular electrode pitch p, while the two phase parallel drive electrodes B have twice the pitch of the four phase parallel drive electrodes a. Four-phase alternating current is introduced into the four-phase parallel driving electrodes 5, the amplitude is 1000V, the frequency is 1000Hz, and the phase of each electrode lags behind by 90 degrees in sequence; two-phase alternating current is introduced into the first induction electrode 7, the amplitude is 1000V, the frequency is 998Hz, and the phase difference between every two electrodes is 180 degrees. The four-phase parallel drive electrodes 5 are directly supplied from a four-phase alternating current power supply through a cable. A two-phase alternating current power is first supplied to the first sensing electrode 7 and then transferred to the second sensing electrode 8 of the floating platform by voltage sensing. Since the second sensing electrode 8 of the same phase is connected to the two parallel driving electrodes 6, two-phase voltage sensing electricity is also generated on the surface of the driving electrodes 6. Therefore, electrostatic force is generated between the four-phase parallel driving electrode 5 and the two-phase parallel driving electrode 6, and the floating platform is driven to move.
As shown in fig. 4 and 5, at any time, the voltage values on the driving electrodes are not equal, so that the charge amounts on the driving electrodes are also not equal, so that the electrostatic forces between each driving electrode and each sensing electrode are also not equal, a frequency difference exists between the sensing electrode and the driving electrode, the resultant force of the electrostatic forces is not zero, and the floating platform is driven to move.
The two-phase alternating current 3 and the four-phase alternating current 4 are controlled by a micro-driver in a programmable mode, and the voltage and the frequency of output can be controlled by programming. Various amplitude values of alternating current can be output by adjusting the input data bits of the DAC chip; the speed of the suspension platform is in direct proportion to the frequency difference between the driving electrode and the induction electrode, and the frequency of the actual output alternating current can be changed by adjusting the frequency in the program, so that the required frequency difference can be obtained, and the effect of adjusting the speed is achieved. Accurate control can be carried out through digital control, and the reliability is high.
As shown in fig. 6, which is a schematic diagram of the principle of the main components of the circuit board, a DSP chip, a DAC chip, an operational amplifier, etc. are integrated on the same circuit board, the DSP chip 28377 transmits digital signals to the DAC7718 chip through an SPI serial interface, the DAC converts the digital signals into analog signals, and outputs the analog signals through output ports such as VOUT1, VOUT2, etc., and the output ports are connected to the input of the operational amplifier TL084D, i.e., the DAC output is amplified for the first time, for example, 6 times, the amplified signals are input to the input of the operational amplifier PA97U for the second time, and are output through six ports OUTA to OUTF, and the output two-phase alternating current and four-phase alternating current are respectively input to the first sensing electrode 7 and the four-phase parallel driving electrode 5, so that the micro-driver can operate.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (9)
1. A magnetic levitation voltage resistant inductive microactuator comprising: the permanent magnet array comprises N rectangular magnets, wherein N is an even number, and the permanent magnet array is naturally attracted together and symmetrically arranged; n is 4;
the driving system comprises two-phase alternating current (3), four-phase alternating current (4), four-phase parallel driving electrodes (5), two-phase parallel driving electrodes (6), a first induction electrode (7) and a second induction electrode (8); the four-phase parallel driving electrode (5) comprises M driving electrode plates, M is a multiple of 4, each driving electrode plate is rectangular and is divided into 4 phases, the driving electrode plates are sequentially arranged in parallel according to the number of phases along a central line formed at the suction position of two cuboid magnets in the middle and are attached to the center of the upper surface of the permanent magnet array, the electrode plates in the same phase are mutually communicated, the electrode plates in different phases are not mutually communicated, and each phase of the four-phase parallel driving electrode (5) is respectively connected with each phase of four-phase alternating current;
the first induction electrode (7) comprises two electrode plates with the same size, the two electrode plates are respectively arranged above the suction position of the first rectangular magnet and the second rectangular magnet and the suction position of the Nth rectangular magnet and the Nth rectangular magnet in parallel, the two sides of the electrode plates of the four-phase parallel driving electrode are respectively connected with the two phases of the two-phase alternating current (3), and the four-phase parallel driving electrode (5) and the first induction electrode (7) are separately arranged;
the total number of pole pieces of the two phases of parallel driving electrodes (6) is a multiple of 2, the two phases are divided into 2 phases, and the pole pieces of the adjacent two phases of parallel driving electrodes (6) are different-phase pole pieces; two second induction electrodes (8) with the same size are distributed on two sides of the two parallel driving electrodes (6), each pole piece in the two parallel driving electrodes (6) is integrated with one second induction electrode (8) to form an interdigital electrode and is attached to the center of the lower surface of the suspension platform, wherein the pole pieces of the same phase are communicated with each other, and the pole pieces of different phases are not communicated with each other.
2. The micro actuator of claim 1, wherein the four-phase parallel driving electrodes (5) have the same electrode pitch p between two driving electrode pieces, and the two-phase parallel driving electrodes (6) have twice the pitch between two driving electrode pieces as the four-phase parallel driving electrodes (5).
3. The micro actuator of claim 1, wherein the rectangular magnets have equal magnetization.
4. The anti-magnetic suspension voltage induction type micro-actuator according to claim 1, wherein the four-phase parallel driving electrode (5), the two-phase parallel driving electrode (6), the first induction electrode (7) and the second induction electrode (8) are all prepared by an aluminum-based ultra-thin PCB process.
5. The anti-magnetic suspension voltage induction type microactuator of claim 1 wherein the permanent magnet material is NdFeB and the suspension platform is made of pyrolytic graphite diamagnetic material.
6. The micro driver of claim 1, wherein a high voltage amplifier (9) is disposed between the four-phase alternating current (4) and the four-phase parallel driving electrode (5) and between the two-phase alternating current (3) and the first sensing electrode (7), and the four-phase alternating current (4) and the two-phase alternating current (3) are amplified by the high voltage amplifier (9) and then respectively connected to the four-phase parallel driving electrode (5) and the first sensing electrode (7).
7. A micro-actuator of anti-levitating voltage-induced type according to claim 1, wherein the four-phase alternating current (4) has an amplitude of 1000V and a frequency of 1000Hz, and the phase of each electrode is sequentially delayed by 90 degrees; the amplitude of the two-phase alternating current (3) is 1000V, the frequency is 998Hz, and the phase difference between each electrode is 180 degrees.
8. The micro-driver of claim 1, wherein the two-phase alternating current (3) and the four-phase alternating current (4) are programmably controlled by the micro-driver to output different frequencies, thereby achieving different driving speeds.
9. A control method of an anti-magnetic suspension voltage induction type micro-driver is characterized in that two-phase alternating current (3) is firstly supplied to a first induction electrode (7), then is transmitted to a second induction electrode (8) of a suspension platform through electrostatic induction, as the second induction electrode (8) of each phase is connected with a two-phase driving electrode (6), two-phase induction voltage is also generated on the surface of the two-phase driving electrode (6), four-phase alternating current (4) is supplied to a four-phase parallel driving electrode (5), and electrostatic force can be generated between the four-phase parallel driving electrode (5) and the two-phase parallel driving electrode (6) so as to drive the suspension platform to move.
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| US5722326A (en) * | 1994-08-01 | 1998-03-03 | The Regents Of The University Of California | Magnetic levitation system for moving objects |
| JP3815750B2 (en) * | 1995-10-09 | 2006-08-30 | キヤノン株式会社 | Stage apparatus, and exposure apparatus and device manufacturing method using the stage apparatus |
| CN1180919C (en) * | 2002-05-21 | 2004-12-22 | 浙江大学 | Magnetic suspension drive system for superfine machining |
| CN100489453C (en) * | 2006-07-06 | 2009-05-20 | 上海交通大学 | Static support suspended electromagnetic induction rotation micro-gyro |
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