CN113324693B - Manufacturing and packaging method of fish-shaped fiber grating wide-range pressure sensor - Google Patents
Manufacturing and packaging method of fish-shaped fiber grating wide-range pressure sensor Download PDFInfo
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- 239000000835 fiber Substances 0.000 title claims abstract description 45
- 238000000034 method Methods 0.000 title claims abstract description 42
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 34
- 238000004806 packaging method and process Methods 0.000 title claims abstract description 33
- 229910052751 metal Inorganic materials 0.000 claims abstract description 172
- 239000002184 metal Substances 0.000 claims abstract description 172
- 239000013307 optical fiber Substances 0.000 claims abstract description 92
- 239000000945 filler Substances 0.000 claims abstract description 18
- 238000005259 measurement Methods 0.000 claims abstract description 7
- 230000003287 optical effect Effects 0.000 claims description 34
- 238000001514 detection method Methods 0.000 claims description 16
- 239000011261 inert gas Substances 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 10
- 239000004698 Polyethylene Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- -1 polyethylene Polymers 0.000 claims description 8
- 229920000573 polyethylene Polymers 0.000 claims description 8
- 238000007664 blowing Methods 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 6
- 238000004080 punching Methods 0.000 claims description 6
- 238000007667 floating Methods 0.000 claims description 5
- 239000000314 lubricant Substances 0.000 claims description 5
- 239000004636 vulcanized rubber Substances 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 4
- 229920000459 Nitrile rubber Polymers 0.000 claims description 3
- 239000004677 Nylon Substances 0.000 claims description 3
- 240000007817 Olea europaea Species 0.000 claims description 3
- 208000008558 Osteophyte Diseases 0.000 claims description 3
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 201000010934 exostosis Diseases 0.000 claims description 3
- 229920001973 fluoroelastomer Polymers 0.000 claims description 3
- 229920001778 nylon Polymers 0.000 claims description 3
- 239000012053 oil suspension Substances 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 230000003247 decreasing effect Effects 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 241000251468 Actinopterygii Species 0.000 abstract description 20
- 230000010259 detection of temperature stimulus Effects 0.000 abstract description 4
- 239000011664 nicotinic acid Substances 0.000 abstract description 4
- 239000012528 membrane Substances 0.000 abstract 1
- 238000001228 spectrum Methods 0.000 description 8
- 238000009530 blood pressure measurement Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 229920001684 low density polyethylene Polymers 0.000 description 3
- 239000004702 low-density polyethylene Substances 0.000 description 3
- 230000003014 reinforcing effect Effects 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000002706 hydrostatic effect Effects 0.000 description 2
- 231100000252 nontoxic Toxicity 0.000 description 2
- 230000003000 nontoxic effect Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 229920001967 Metal rubber Polymers 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- FPAFDBFIGPHWGO-UHFFFAOYSA-N dioxosilane;oxomagnesium;hydrate Chemical compound O.[Mg]=O.[Mg]=O.[Mg]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O FPAFDBFIGPHWGO-UHFFFAOYSA-N 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 235000001968 nicotinic acid Nutrition 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 231100000956 nontoxicity Toxicity 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
- G01L11/025—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means using a pressure-sensitive optical fibre
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
Abstract
The invention relates to a method for manufacturing and packaging a fish-shaped fiber grating wide-range pressure sensor, which comprises the following steps: s1: making fish-shaped metal sheets, S2: manufacturing a fiber grating, S3: manufacturing an airbag, S4: assembling the sensor body, S5: assembling the optical fiber S6: balance measurement, S7: and (6) integrally packaging. According to the bionic principle of a fish body sub-symmetrical structure, fishbone-shaped metal sheets with different rigidity are designed on the left side and the right side of a fish body, an air bag similar to a fish bubble is arranged in the fish body, elastic fillers are arranged between the air bag and the metal sheets, and fiber gratings are arranged on the inner side and the outer side of a longitudinal central axis (a fish line) of the metal sheets, wherein the fiber gratings on the metal sheets with small rigidity are paired, and the influence of temperature on the gratings is eliminated by utilizing the positive and negative deformation principle of a metal membrane, so that the pressure detection of temperature self-compensation is realized; the fiber grating on the other metal sheet provided with the concave or convex rib groove generates radial elliptical deformation under external pressure, and middle and high pressure is detected by utilizing the resonance wavelength splitting relay of birefringence.
Description
Technical Field
The invention relates to the technical field of optical fiber sensing and hydraulic detection, in particular to a manufacturing and packaging method of a fish-shaped fiber grating wide-range pressure sensor.
Background
The fluid pressure is an important load of a fluid pressure pipeline structure, and as known from bernoulli equation, the fluid pressure in a pipeline is also an energy form, and in a hydraulic transmission system, the flow rate (kinetic energy) of a medium is low, the generated potential energy is relatively low, and the condition that the power is transmitted only by the pressure energy of a working medium can be ignored, namely the so-called hydrostatic transmission. In hydrostatic transmission, fluid pressure in a pipeline can be changed due to opening and closing of a pump or a valve or dynamic change of a load, and particularly, research on distribution and dynamic characteristics of pressure in a spiral pipeline is still a technical blank at present.
The traditional liquid pressure sensing device is mainly a mechanical pressure gauge or a resistance-type pressure sensor, and the detection methods have the advantages of relatively mature measurement theory and technology and low equipment cost, but at present, when the pressure or the temperature in a hydraulic pipeline is detected, a method of forming a detection process hole in the radial direction of the pipeline and mounting a pressure or temperature sensor probe on the radial side wall of the pipeline is generally adopted. However, this method has certain problems: firstly, damaging a pipeline side wall structure; secondly, the probe of the radial sensor destroys the laminar flow form of the liquid flow on the inner wall and increases the internal disturbance of the liquid flow; thirdly, the flow velocity inside and outside the spiral pipeline is different, the pressure state is different, and the method of adopting a fixed pressure sensor probe is difficult to accurately measure the pressure distribution and the change rule in the pipeline. Most of the liquid pressure measurement in the pipeline is carried out by using the fiber grating principle, but when the fiber grating pressure sensor is used for pressure measurement, the problems of small bearing capacity and small measurement pressure range exist. Therefore, the pressure sensor is generally packaged by adopting a cantilever beam amplification principle at present so as to solve the problem of small bearing of the sensor. However, this also causes a problem of increase in the volume of the sensor; and the problem of small pressure measurement range cannot be solved by packaging the sensor, namely the measuring range of the sensor still cannot meet the actual requirement. The existing methods for measuring pressure by using fiber bragg gratings mainly comprise two methods: firstly, a certain linear relation can be established between the wavelength of the fiber bragg grating and the physical quantity to be measured, and the drift value of the wavelength caused by the change of the physical quantity to be measured is converted into a corresponding pressure value by calibrating the linear coefficient in the linear range. For example, when the fiber-optic shed is subjected to an external field (stress field, temperature field, etc.), the grating period or effective refractive index thereof changes to cause the wavelength shift of the reflection (or transmission) of the grating, and most of the fiber-optic grating sensors commonly used in the grating sensing belong to this category. The polarization characteristic of the fiber bragg grating can establish a linear relation with the physical quantity to be measured, the polarization characteristic changes along with the change of the physical quantity to be measured, the fiber bragg grating is subjected to resonant wavelength splitting under the pressure load condition, the external pressure is detected through the offset of the central wavelength of the amplitude spectrum of the x polarized light and the y polarized light or through the collection of stokes parameters s1, s2 and s3 of the transmitted polarized light signals, but when the pressure is lower, the difference of the central wavelengths of two eigenmodes is hardly perceived by the total amplitude spectrum in the method; or the stokes parameters s1, s2 and s3 need to use polarized light of a specific waveband, and the like, so that the detection is difficult.
In summary, because the fiber grating sensor has high sensitivity, whether the birefringence detection method is based on the shift of the central wavelength of the grating or the optical fiber deformation, there are a range that can only detect low voltage and a range that can only detect relatively high voltage, so that the measuring range of the pressure measurement is greatly limited, and the pressure range detectable by the fiber grating sensor is limited at present.
Therefore, a pipeline nondestructive testing system capable of realizing a fiber grating wide-range pressure sensor with higher precision in a hydraulic pipe is needed, and is used for collecting high-precision pressure data of oil pressure in the pipeline. The invention comprehensively utilizes the complementarity of two prominent characteristics that the measurement range of the fiber bragg grating is different along with the pressure change in the longitudinal direction and the radial direction, and mainly innovating a manufacturing method of the bionic fish-shaped fiber bragg grating wide-range pressure sensor.
Disclosure of Invention
The invention provides a method for manufacturing and packaging a fish-shaped fiber grating wide-range pressure sensor, according to the bionics principle of a sub-symmetrical structure of a fish body, fishbone-shaped metal sheets with different rigidity are designed on the left side and the right side of the fish body, an air bag similar to a fish bubble is arranged inside the fish body, elastic fillers are arranged between the air bag and the metal sheets, and grating sensors are arranged on optical fibers on the inner side and the outer side of a central axis of the metal sheets. The metal sheet of the sensor framework is divided into a positive metal sheet and a negative metal sheet, the negative metal sheet can dig through grooves along the upper side and the lower side of the grating, the negative metal sheet plays a role of a strain diaphragm when the pressure is low, the negative metal sheet can quickly deform and respond when the pressure is low, and the fiber bragg gratings on the surface of the negative metal sheet are numbered as 1 and 2 from outside to inside in sequence; in a low-pressure measurement range, the temperature influence is eliminated by utilizing the positive and negative deformation principle of the two grating sensors, so that the pressure detection of temperature self-compensation is realized; the thickness of the metal sheet on the positive side can be thickened relative to one side of the metal sheet on the negative side as required, or convex or concave reinforcing rib grooves are arranged along the surface of the metal sheet on the positive side, so that the deformation resistance of the metal sheet on the positive side is larger than the deformation resistance of the metal sheet on the negative side, the grating on the outermost side is supported to generate radial elliptic deformation under external pressure at first, a polarized light signal with specific wavelength which transmits through the grating generates resonance wavelength splitting under the pressure load condition, the external pressure is detected through the offset or Stokes parameters s1, s2 and s3 of the central wavelength of an x polarized light spectrum and a y polarized light spectrum, and the elliptic deformation is generated when the grating on the inner side of the metal sheet on the positive side is subjected to larger external pressure due to the energy absorption of an elastic part of a sensor main body, so that higher pressure can be detected, and the elliptic deformation of the grating on the inner side and the outer side of the metal sheet on the positive side is not influenced by temperature, therefore, the sensor manufactured by the manufacturing method is suitable for large-range hydraulic pressure detection, and the problems of low detection pressure and small range of the conventional fiber grating sensor are solved.
The technical scheme adopted by the invention for solving the technical problems is as follows: a manufacturing and packaging method of a fish-shaped fiber grating wide-range pressure sensor comprises the following steps:
s1: preparing fish-shaped metal sheets: punching the metal sheet into a fishbone shape, arranging connecting holes at two ends of the metal sheet, and punching the metal sheet into an olive shape with a convex middle part; one of the metal sheets is symmetrically provided with longitudinal grooves along two sides of a longitudinal central axis of the metal sheet and is set as a negative metal sheet; taking another metal sheet, symmetrically forming rib grooves which are convex or concave along the longitudinal direction along two sides of a longitudinal central axis, and setting the rib grooves as male metal sheets; the female metal sheet and the male metal sheet have the same number of bone spur-shaped supporting parts which transversely protrude outwards and are symmetrical along respective longitudinal axes, and the supporting parts between the female metal sheet and the male metal sheet are also arranged symmetrically;
s2: manufacturing the fiber grating: respectively and symmetrically sticking optical fibers on the inner side and the outer side of a female metal sheet and a male metal sheet of the same sensor along a longitudinal axis, ensuring that the specifications of the four optical fibers are the same, engraving gratings on the surface of the optical fiber in the middle of the longitudinal axis, and ensuring that the gratings on the inner side and the outer side of the two metal sheets of each sensor are grids with the same characteristics; after the four optical fibers are numbered, the outer side wall of the negative metal sheet is pasted with a first optical fiber, and the inner side wall of the negative metal sheet is pasted with a second optical fiber; the inner side wall of the male surface metal sheet is adhered with a third optical fiber, and the outer side wall of the male surface metal sheet is adhered with a fourth optical fiber;
s3: manufacturing an air bag: inert gas or other non-toxic gas is filled into the air bags by using a method of blowing the air bags, the specifications of the air bags in each batch are the same, and the two metal sheets are prevented from being broken when being compressed to a plane;
s4: assembling a sensor main body: placing the air bag at the concave position of the female metal sheet stuck with the fiber grating, respectively placing two metal rods with limiting rings in the middle into connecting holes at two ends of the female metal sheet, penetrating corresponding holes of the male metal sheet into the other ends of the two metal rods, and correspondingly sticking supporting parts of the two metal sheets to enable the two metal sheets provided with the fiber grating to form a sensor main body internally provided with the air bag, wherein the limiting rings in the middles of the metal rods at two ends are used for connecting a traction rope; the parts of the metal rods at the two ends, which extend out of the metal sheets, are knotted, the knotted parts are used for fixing the head and tail ends of the two metal sheets, and the knotted circular ring part is used for connecting a torsion-resistant rope which is used for connecting the torsion of a balance optical fiber;
s5: assembling the optical cable: manufacturing an optical fiber connector for connecting four optical fibers, connecting a traction rope for tensile strength in the middle, symmetrically arranging connecting through holes of torsion-resistant ropes on two sides, connecting the four optical fibers and the traction rope with the optical fiber connector, and connecting the torsion-resistant ropes on two sides with corresponding parts of the optical fiber connector;
s501: packaging the sensor body and the optical cable: packaging the sensor main body, the four optical fibers, the traction ropes and the metal rod to ensure that the inner air bag is not damaged, and packaging the four optical fibers and the traction ropes to form an optical cable;
s6: and (3) balance measurement: measuring the floating balance capacity of the sensor main body by using an oil suspension method, and carrying out floating balance by using a method of increasing and decreasing the mass of an elastic body at the end part;
s7: integral packaging: packaging and sealing the sensor main body and the optical cable by using a film; a film compatible with oil is hung between the torsion-resistant rope and the optical cable, and torsion-resistant balance is performed by means of liquid flow.
Further, when the optical cable is assembled in step S5, the connection length of the pulling rope is not greater than the length of the optical fiber between the optical fiber connector and the connection hole, so as to prevent the optical fiber from being broken by the impact of liquid flow; in step S501, the length of the optical cable is in principle greater than ten times the longitudinal length of the sensor body or the optical fiber connector at the front end thereof, so as to avoid the influence of the rear turbulence of the upstream object on the pressure detection of the next sensor.
Further, filling is performed when the sensor main body is assembled in step S4, and the filler is used to fill the two metal sheets and the gap between the temperature measurement metal sheet and the air bag, so as to ensure that the positions of the air bag and the metal rod in the sensor main body are fixed, thereby forming a sensor whole body with a fish-like structure.
Further, after the step S7 is performed with the integral packaging, the pressure detection calibration is performed on the sensors from 0MPa by a calibration method per 0.1MPa, each pressure data is collected first, the difference between the drift amounts of the grating center wavelengths in the first optical fiber and the second optical fiber is correspondingly collected, the difference between the drift amounts of each fish-type sensor is stored as the calibration relation corresponding to the pressure, the difference is stored in the computer system for measuring the pressure by each fish-type sensor until the optical signal of the grating center wavelength of each fish-type sensor in the fourth optical fiber or the third optical fiber can be subjected to the resonance wavelength splitting under the pressure load condition, the pressure outside the corresponding fish-type sensor is calibrated by collecting the offsets of the x-polarized light and the y-polarized light amplitude spectrum center wavelength of the optical signal in the characteristic grating, or the stokes parameter S1 of the optical signal of the grating center wavelength of each fish-type sensor in the fourth optical fiber or the third optical fiber can be collected, s2, s3 calibrating the pressure outside the corresponding fish-shaped sensor, storing the states of the light source signals and the corresponding relation between the pressure and the parameters into a computer system, and completing the pressure calibration of the fish-shaped sensor;
in the calibration process according to the calibration method of boosting pressure every 0.1MPa, when Stokes parameters s1, s2 and s3 of optical signals of the central wavelength of each grating in a third optical fiber or a fourth optical fiber do not change any more, the pressure is used as the limit pressure Pext of the sensor, and data obtained after the limit pressure Pext/1.2 is used as the maximum pressure value Pmax of the sensor.
Further, the film used in step S7 is a low temperature resistant polyethylene film.
Furthermore, the filler is made of fluororubber or oil-resistant nitrile rubber so as to give consideration to the compatibility of oil and the working temperature range.
Further, when the oil outside the sensor is in a high-pressure state, the filler can be made of vulcanized rubber or nylon materials, so that the sensor has a matched elastic modulus.
Further, when the airbag is manufactured in step S3, the skin material of the high-altitude balloon is used, and low-temperature resistant polyethylene, such as LDPE low-density polyethylene, is selected, and is heated and melted to a glass state in an inert gas environment, and the inert gas is filled by blowing a glass bottle, so as to form the airbag with the inert gas inside.
Further, when the airbag is manufactured in step S3, the airbag is manufactured according to the manufacturing method of the balloon, the outer shape of the airbag is spherical or symmetrical ellipsoidal, and a lubricant incompatible with the filler is sprayed on the surface of the airbag.
Further, in step S1, the anode metal sheet is an industrial titanium sheet, a titanium alloy sheet or a stainless steel sheet with a thickness of not less than 0.2 mm.
The fish body structure has the advantages that according to the bionic principle of the sub-symmetrical structure of the fish body, fishbone-shaped metal sheets with different rigidity are designed on the left side and the right side of the fish body, air bags similar to fish bubbles are arranged inside the fish body, elastic fillers are arranged between the air bags and the metal sheets, and grating sensors are arranged on optical fibers on the inner side and the outer side of the central axis of the metal sheets. The metal sheet of the sensor framework is divided into a positive metal sheet and a negative metal sheet, the negative metal sheet can dig through grooves along the upper side and the lower side of the grating, the negative metal sheet plays a role of a strain diaphragm when the pressure is low, the negative metal sheet can quickly deform and respond when the pressure is low, and the fiber bragg gratings on the surface of the negative metal sheet are numbered as 1 and 2 from outside to inside in sequence; in a low-pressure measurement range, the temperature influence is eliminated by utilizing the positive and negative deformation principle of the two grating sensors, so that the pressure detection of temperature self-compensation is realized; the thickness of the metal sheet on the positive side can be thickened relative to one side of the metal sheet on the negative side as required, or convex or concave reinforcing rib grooves are arranged along the surface of the metal sheet on the positive side, so that the deformation resistance of the metal sheet on the positive side is larger than the deformation resistance of the metal sheet on the negative side, the grating on the outermost side is supported to generate radial elliptic deformation under external pressure at first, a polarized light signal with specific wavelength which transmits through the grating generates resonance wavelength splitting under the pressure load condition, the external pressure is detected through the offset or Stokes parameters s1, s2 and s3 of the central wavelength of an x polarized light spectrum and a y polarized light spectrum, and the elliptic deformation is generated when the grating on the inner side of the metal sheet on the positive side is subjected to larger external pressure due to the energy absorption of an elastic part of a sensor main body, so that higher pressure can be detected, and the elliptic deformation of the grating on the inner side and the outer side of the metal sheet on the positive side is not influenced by temperature, therefore, the sensor manufactured by the manufacturing method is suitable for large-range hydraulic pressure detection, and the problems of low detection pressure and small range of the conventional fiber grating sensor are solved.
Drawings
Fig. 1 is a schematic sectional structure of the present invention.
Fig. 2 is a schematic view of the unfolding structure of the female-side metal sheet of the present invention at a corresponding angle.
Fig. 3 is a schematic view of the unfolded structure of the male-side metal sheet according to the present invention.
Fig. 4 is a schematic perspective view of a sensor body according to the present invention.
Fig. 5 is a side view of the structure of fig. 4.
In the figure, 1, a sensor body; 2. a metal sheet; 201. a negative side metal sheet; 202. a male-side metal sheet; 3. a cavity; 4. an air bag; 5. a filler; 6. a rib groove; 7. a support portion; 8. an optical fiber; 9. a grating; 10. an optical cable; 11. connecting holes; 12. a hauling rope; 13. a metal rod; 14. a torsion resistant rope; 15. an optical fiber connector.
Detailed Description
In order to clearly explain the technical features of the present invention, the following detailed description of the present invention is provided with reference to the accompanying drawings.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, however, the present application may be practiced in other ways than those described herein, and therefore the scope of the present application is not limited by the specific embodiments disclosed below.
In addition, in the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like, indicate orientations and positional relationships based on those shown in the drawings, are only for convenience of description and simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present application.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and encompass, for example, both fixed and removable connections or integral parts thereof; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. In the description herein, reference to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
As shown in fig. 1-5, a method for manufacturing and packaging a fish-shaped fiber grating wide-range pressure sensor includes the following steps:
s1: preparing fish-shaped metal sheets: punching the metal sheet 2 into a fishbone shape, arranging connecting holes 11 at two ends, and punching the metal sheet 2 into an olive shape with a convex middle part; one of the metal sheets 2 is symmetrically provided with longitudinal grooves along two sides of a longitudinal central axis thereof, and is set as a female metal sheet 202; taking another metal sheet 2, symmetrically forming rib grooves 6 which are convex or concave along the longitudinal direction along two sides of the longitudinal central axis, and setting the rib grooves as male metal sheets 4; the female metal sheets 201 and the male metal sheets 202 have the same number of bone spur-shaped supporting parts 7 which protrude outwards transversely and are symmetrical along the respective longitudinal axes, and the supporting parts 7 between the female metal sheets 201 and the male metal sheets 202 are also arranged symmetrically;
s2: manufacturing the fiber grating: respectively and symmetrically sticking optical fibers 8 on the inner side and the outer side of a female metal sheet 201 and a male metal sheet 202 of the same sensor along a longitudinal axis, ensuring that the specifications of the four optical fibers 8 are the same, engraving gratings 9 on the surface of the optical fiber 8 in the middle of the longitudinal axis, and ensuring that the gratings 9 on the inner side and the outer side of two metal sheets 2 of each sensor are grids with the same characteristics; after the four optical fibers are numbered, the outer side wall of the female metal sheet 201 is pasted with a first optical fiber, and the inner side wall of the female metal sheet 201 is pasted with a second optical fiber; the inner side wall of the male surface metal sheet 202 is pasted with a third optical fiber, and the outer side wall of the male surface metal sheet 202 is pasted with a fourth optical fiber;
s3: manufacturing an air bag: inert gas or other non-toxic gas is filled into the air bags 4 by using a method of blowing balloons, the size of the air bags 4 is selected according to the space between the metal sheets 2, the specifications of the air bags 4 in each batch are the same, and the two metal sheets 2 are ensured not to be broken when being compressed to the plane;
s4: assembling a sensor main body: placing an air bag 4 at the concave position of a female metal sheet 201 stuck with the fiber bragg grating, respectively placing two metal rods 13 with limiting rings in the middle into connecting holes 11 at two ends of the female metal sheet 201, penetrating corresponding holes of a male metal sheet 202 into the other ends of the two metal rods 13, and correspondingly sticking supporting parts of the two metal sheets 2 to enable the two metal sheets 2 with the fiber bragg grating to form a sensor main body 1 with the air bag 4 inside, wherein the limiting rings in the middles of the metal rods 13 at two ends are used for connecting a traction rope 12; the parts of the metal rods 13 at the two ends, which extend out of the metal sheets 2, are knotted to fix the head and tail ends of the two metal sheets 2, the knotted circular ring part is used for connecting the torsion-resistant rope 14, and the torsion-resistant rope 14 is used for connecting the torsion of the balance optical fiber 8;
s5: assembling an optical cable: manufacturing an optical fiber connector 15 connected with four optical fibers 8, connecting a traction rope 12 for tensile strength in the middle, symmetrically arranging connecting through holes of torsion-resistant ropes 14 on two sides, connecting the four optical fibers 8 and the traction rope 12 with the optical fiber connector 15, and connecting the torsion-resistant ropes 14 on two sides with corresponding parts of the optical fiber connector 15;
s501: packaging the sensor body and the optical cable: the sensor main body 1, the four optical fibers 8, the traction ropes 12 and the metal rod 13 are packaged by using a non-metal elastomer to ensure that the inner air bag 4 is not damaged, and the four optical fibers 8 and the traction ropes 12 are packaged to form an optical cable 10;
s6: and (3) balance measurement: measuring the floating balance capacity of the sensor main body 1 by an oil suspension method, and balancing the sensor main body 1 by a method of removing or adding elastomers of the fish head and/or the fish tail from the head end and the tail end;
s7: and (3) integral packaging: the sensor body 1 and the optical cable 10 are packaged and sealed by using a film; a film compatible with oil is hung between the torsion resistant rope 14 and the optical cable 10, and torsion resistance balance is carried out by liquid flow.
According to the bionic principle of a fish body sub-symmetrical structure, fishbone-shaped metal sheets 2 with different rigidity are designed on the left side and the right side of the fish body, air bags 4 similar to fish bubbles are arranged inside the fish body, elastic fillers 5 are arranged between the air bags 4 and the metal sheets 2, and grating sensors are arranged on optical fibers on the inner side and the outer side of the central axis of the metal sheets 2. The metal sheet 2 of the sensor framework is divided into a positive metal sheet 200 and a negative metal sheet 201, the negative metal sheet 201 can be provided with through grooves along the upper side and the lower side of the grating, the negative metal sheet 201 can play a role of a strain diaphragm at low pressure, so that the negative metal sheet 201 can quickly deform and respond at low pressure, and the fiber gratings on the surface are sequentially numbered as 1 and 2 from outside to inside; in a low-pressure measurement range, the temperature influence is eliminated by utilizing the positive and negative deformation principle of the two grating sensors, so that the pressure detection of temperature self-compensation is realized; the thickness of the male metal sheet 201 can be thickened relative to one side of the female metal sheet 202 as required, or convex or concave reinforcing rib grooves are arranged along the surface of the male metal sheet 201, so that the deformation resistance of the male metal sheet 202 is greater than that of the female metal sheet 201, the outermost grating is supported to be radially deformed elliptically under external pressure firstly, the polarized light signal with specific wavelength transmitted through the grating generates resonance wavelength splitting under the condition of pressure load, the external pressure is detected through the offset of the central wavelength of an x polarized light and a y polarized light amplitude spectrum or stokes parameters s1, s2 and s3, and the grating on the inner side of the male metal sheet 202 is deformed elliptically under larger external pressure due to the energy absorption of the elastic part of the sensor main body, so that higher pressure can be detected, and the elliptical deformation of the gratings on the inner side and the outer side of the male metal sheet 202 is not influenced by temperature, therefore, the sensor manufactured by the manufacturing method is suitable for large-range hydraulic pressure detection, and the problems of low detection pressure and small range of the conventional fiber grating sensor are solved.
When the optical cable is assembled in step S5, the connection length of the pulling rope 12 is not greater than the length of the optical fiber between the optical fiber connector 15 and the connection hole 11 to prevent the optical fiber 8 from being broken by the impact of the liquid flow; in step S501, the length of the optical cable 10 is in principle greater than ten times the longitudinal length of the sensor body 1 or the optical fiber connector 15 at the front end thereof, so as to avoid the influence of the rear turbulence of the upstream object on the pressure detection of the next sensor.
In step S4, the filling is performed when the sensor body is assembled, and the filler 5 is used to fill the gap between the two metal sheets 2 and the air bag 4, so as to ensure that the positions of the air bag 4 and the metal rod 13 in the sensor body 1 are fixed, thereby forming a sensor whole with a fish-like structure.
After the step S7 is performed with integral packaging, calibrating the pressure detection of the sensors by a calibration method of every 0.1MPa from 0MPa, first collecting each pressure data, correspondingly collecting the difference of the drift amounts of the grating center wavelengths in the first optical fiber and the second optical fiber, storing the difference of the drift amounts of each fish-type sensor as the calibration relation of the corresponding pressure, storing the calibration relation in a computer system for measuring the pressure by each fish-type sensor until the optical signal of the grating center wavelength of each fish-type sensor in the fourth optical fiber or the third optical fiber can be subjected to resonance wavelength splitting under the condition of pressure load, calibrating the pressure outside the corresponding fish-type sensor by collecting the offsets of the center wavelength of the x-polarized light and the y-polarized light amplitude spectrum of the optical signal in the characteristic grating, or collecting the stokes parameter S1 of the optical signal of the grating center wavelength of each fish-type sensor in the fourth optical fiber or the third optical fiber, s2, s3 calibrating the pressure outside the corresponding fish-shaped sensor, storing the states of the light source signals and the corresponding relation between the pressure and the parameters into a computer system, and completing the pressure calibration of the fish-shaped sensor;
it is worth mentioning that in the calibration process according to the calibration method of boosting voltage per 0.1MPa, when the stokes parameters s1, s2, s3 of the optical signal of the central wavelength of each grating in the third optical fiber or the fourth optical fiber are not changed any more, the pressure is used as the limit pressure Pext of the sensor, and the data obtained after the limit pressure Pext/1.2 is used as the maximum pressure value Pmax of the sensor.
The film used in step S7 is a low temperature resistant polyethylene film.
In a preferred embodiment, the filler 5 is made of fluororubber or oil-resistant nitrile rubber, so as to achieve compatibility of oil and working temperature range. The filler 5 is vulcanized rubber, wherein the sulfur content of the vulcanized rubber is 3%, about 20%, 40% or more, and three-grade sensors with the highest pressure of 9MPa,20MPa,45MPa or less are respectively manufactured.
It should be noted that when the oil outside the sensor is in a high pressure state, the filler 5 may be vulcanized rubber or nylon material, so that the sensor has a matched elastic modulus.
When the airbag is manufactured in step S3, the skin material of the high-altitude balloon is used, low-temperature resistant polyethylene such as LDPE is selected, the low-temperature resistant polyethylene is heated and melted to a glass state in an inert gas environment, and the inert gas is filled by blowing a glass bottle to form the airbag 4 with the inert gas inside. The low-temperature-resistant polyethylene has the advantages of no toxicity, good thermal conductivity and good compatibility with external oil of the sensor.
When the airbag is manufactured in step S3, the airbag 4 is manufactured according to the method of manufacturing a balloon, the outer shape of the airbag 4 is spherical or symmetrical ellipsoidal, and a lubricant incompatible with the filler 5 is sprayed on the surface of the airbag 4. The lubricant can ensure the air bag 4 to deform uniformly in the sensor body 1 and is not easy to break, and the lubricant is silicone resin or talcum powder.
In step S1, the anode metal sheet 202 is an industrial titanium sheet, titanium alloy sheet or stainless steel sheet with a thickness of not less than 0.2 mm.
The above-described embodiments should not be construed as limiting the scope of the invention, and any alternative modifications or alterations to the embodiments of the present invention will be apparent to those skilled in the art.
The present invention is not described in detail, but is known to those skilled in the art.
Claims (10)
1. A manufacturing and packaging method of a fish-shaped fiber grating wide-range pressure sensor is characterized by comprising the following steps:
s1: preparing fish-shaped metal sheets: punching the metal sheet into a fishbone shape, arranging connecting holes at two ends of the metal sheet, and punching the metal sheet into an olive shape with a convex middle part; one metal sheet is symmetrically provided with longitudinal grooves along two sides of a longitudinal central axis of the metal sheet, and the longitudinal grooves are set as female metal sheets; taking another metal sheet, symmetrically forming rib grooves which are convex or concave along the longitudinal direction along two sides of a longitudinal central axis, and setting the rib grooves as male metal sheets; the female metal sheet and the male metal sheet have the same number of bone spur-shaped supporting parts which transversely protrude outwards and are symmetrical along respective longitudinal axes, and the supporting parts between the female metal sheet and the male metal sheet are also arranged symmetrically;
s2: manufacturing the fiber grating: respectively and symmetrically sticking optical fibers on the inner side and the outer side of a female metal sheet and a male metal sheet of the same sensor along a longitudinal axis, ensuring that the specifications of the four optical fibers are the same, engraving gratings on the surfaces of the optical fibers in the middle of the longitudinal axis, and ensuring that the gratings on the inner side and the outer side of the two metal sheets of each sensor are grids with the same characteristics; after the four optical fibers are numbered, the outer side wall of the negative metal sheet is pasted with a first optical fiber, and the inner side wall of the negative metal sheet is pasted with a second optical fiber; the inner side wall of the male surface metal sheet is adhered with a third optical fiber, and the outer side wall of the male surface metal sheet is adhered with a fourth optical fiber;
s3: manufacturing an air bag: filling inert gas into the air bags by using a blowing balloon method, wherein the specifications of the air bags in each batch are the same, and ensuring that the two metal sheets are not cracked when being compressed to a plane;
s4: assembling a sensor main body: placing the air bag at the concave position of the female metal sheet stuck with the fiber grating, respectively placing two metal rods with limiting rings in the middle into connecting holes at two ends of the female metal sheet, penetrating corresponding holes of the male metal sheet into the other ends of the two metal rods, and correspondingly sticking supporting parts of the two metal sheets to enable the two metal sheets provided with the fiber grating to form a sensor main body internally provided with the air bag, wherein the limiting rings in the middles of the metal rods at two ends are used for connecting a traction rope; the parts of the metal rods at the two ends, which extend out of the metal sheets, are knotted, the knotted parts are used for fixing the head and tail ends of the two metal sheets, and the knotted circular ring part is used for connecting a torsion-resistant rope which is used for connecting the torsion of a balance optical fiber;
s5: assembling the optical cable: manufacturing an optical fiber connector for connecting four optical fibers, connecting a traction rope for tensile strength in the middle, symmetrically arranging connecting through holes of torsion-resistant ropes on two sides, connecting the four optical fibers and the traction rope with the optical fiber connector, and connecting the torsion-resistant ropes on two sides with corresponding parts of the optical fiber connector;
s501: packaging the sensor body and the optical cable: packaging the sensor main body, the four optical fibers, the traction ropes and the metal rod to ensure that the inner air bag is not damaged, and packaging the four optical fibers and the traction ropes to form an optical cable;
s6: and (3) balance measurement: measuring the floating balance capacity of the sensor main body by using an oil suspension method, and carrying out floating balance by using a method of increasing and decreasing the mass of an elastic body at the end part;
s7: and (3) integral packaging: packaging and sealing the sensor main body and the optical cable by using a film; a film compatible with oil is hung between the torsion-resistant rope and the optical cable, and torsion-resistant balance is performed by means of liquid flow.
2. The method for manufacturing and packaging a fish-type FBG wide-range pressure sensor as claimed in claim 1, wherein the connection length of the pulling rope is not greater than the length of the optical fiber between the optical fiber connector and the connection hole when the optical cable is assembled in step S5 to prevent the optical fiber from being broken by the impact of liquid flow; in step S501, the length of the optical cable is more than ten times the longitudinal length of the sensor body or the optical fiber connector at the front end thereof, so as to avoid the influence of the rear turbulence of the upstream object on the pressure detection of the next sensor.
3. The method for manufacturing and packaging a fish-shaped fiber grating wide-range pressure sensor as claimed in claim 2, wherein the filling is performed during the assembly of the sensor body in step S4, and the filler is used to fill the two metal sheets and the gap between the temperature-measuring metal sheet and the air bag, so as to ensure the position of the air bag and the metal rod in the sensor body to be fixed, thereby forming a sensor body with a fish-like structure.
4. The method as claimed in claim 3, wherein after the step S7 of packaging the whole fish-shaped fiber grating wide-range pressure sensor, the sensor is calibrated every 0.1MPa from 0MPa, each pressure data is collected, the difference of the drift amount of each grating center wavelength in the first optical fiber and the second optical fiber is correspondingly collected, the difference of the drift amount of each fish-shaped sensor is stored as the calibration relation of the corresponding pressure, the difference is stored in the computer system for measuring the pressure by each fish-shaped sensor until the optical signal of the grating center wavelength of each fish-shaped sensor in the fourth optical fiber or the third optical fiber can be subjected to resonance wavelength splitting under the condition of pressure load, the pressure outside the corresponding fish-shaped sensor is calibrated by collecting the offset of the x-polarized light and the y-polarized light amplitude spectrum center wavelength of the optical signal in the characteristic grating, or Stokes parameters s1, s2 and s3 of optical signals of the grating center wavelength of each fish-shaped sensor in the fourth optical fiber or the third optical fiber can be collected to calibrate the external pressure of the corresponding fish-shaped sensor, and the states of the light source signals and the corresponding relation between the pressure and the parameters are stored in a computer system to complete the pressure calibration of the fish-shaped sensor;
in the calibration process according to the calibration method of boosting pressure every 0.1MPa, when Stokes parameters s1, s2 and s3 of optical signals of central wavelengths of gratings in a third optical fiber or a fourth optical fiber are not changed any more, the pressure is used as the limit pressure Pext of the sensor, and data obtained after the limit pressure Pext/1.2 is used as the maximum pressure value Pmax of the sensor.
5. The method for manufacturing and packaging a fish-shaped fiber grating wide-range pressure sensor according to claim 4, wherein the film used in step S7 is a low temperature resistant polyethylene film.
6. The method for manufacturing and packaging the fish-type fiber grating wide-range pressure sensor according to claim 5, wherein the filler is made of fluororubber or oil-resistant nitrile rubber, so that compatibility of oil and a working temperature range are both considered.
7. The method for manufacturing and packaging a fish-shaped fiber grating wide-range pressure sensor as claimed in claim 6, wherein when the oil outside the sensor is in a high pressure state, the filler is vulcanized rubber or nylon material, so that the sensor has a matched elastic modulus.
8. The method for manufacturing and packaging a fish-type FBG wide-range pressure sensor as claimed in claim 7, wherein in step S3, when the air bag is manufactured, the skin material of the high-altitude balloon is heated and melted to a glass state in an inert gas environment by using low temperature resistant polyethylene, and the inert gas is filled by blowing a glass bottle to form the air bag with the inert gas inside.
9. The method for manufacturing and packaging a fish-type fiber grating wide-range pressure sensor as claimed in claim 7, wherein when the balloon is manufactured in step S3, the balloon is manufactured according to a method for manufacturing a balloon, the shape of the balloon is spherical or symmetrical ellipsoid, and a lubricant incompatible with the filler is sprayed on the surface of the balloon.
10. The method for manufacturing and packaging a fish-type fiber grating wide-range pressure sensor according to claim 8 or 9, wherein the positive metal sheet in step S1 is an industrial titanium sheet, a titanium alloy sheet or a stainless steel sheet with a thickness of not less than 0.2 mm.
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| SU667836A1 (en) * | 1977-12-22 | 1979-06-15 | Фрунзенский политехнический институт | Magnetoelastic torque sensor |
| EP2331923B1 (en) * | 2008-09-23 | 2013-06-19 | Voith Patent GmbH | Industrial roll with optical roll cover sensor system |
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Denomination of invention: Fabrication and packaging method of a fish-shaped fiber grating large-range pressure sensor Effective date of registration: 20220830 Granted publication date: 20220701 Pledgee: Postal Savings Bank of China Limited by Share Ltd. Weifang branch Pledgor: Weifang Jiateng Hydraulic Technology Co.,Ltd. Registration number: Y2022980014039 |
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Date of cancellation: 20231007 Granted publication date: 20220701 Pledgee: Postal Savings Bank of China Limited by Share Ltd. Weifang branch Pledgor: Weifang Jiateng Hydraulic Technology Co.,Ltd. Registration number: Y2022980014039 |