CN113315405A - Non-full-drive type large-stroke micro-mechanical actuator - Google Patents
Non-full-drive type large-stroke micro-mechanical actuator Download PDFInfo
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- CN113315405A CN113315405A CN202110470927.1A CN202110470927A CN113315405A CN 113315405 A CN113315405 A CN 113315405A CN 202110470927 A CN202110470927 A CN 202110470927A CN 113315405 A CN113315405 A CN 113315405A
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- 238000010586 diagram Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 244000005700 microbiome Species 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
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- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
Abstract
The invention discloses a non-fully-driven large-stroke micro-mechanical actuator, which comprises a base, an upper polar plate, a lower polar plate and a supporting piece, wherein the upper polar plate is connected with the supporting piece, the supporting piece is connected with the base, and the upper polar plate is parallel to the base; the lower polar plate is laid on the upper surface of the base and positioned below the upper polar plate, and a gap is formed between the lower polar plate and the upper polar plate; the length of the upper polar plate is greater than that of the lower polar plate. The non-full-drive type large-stroke micro-mechanical actuator has a larger linear stroke than a full-drive type micro-actuator.
Description
Technical Field
The invention belongs to the technical field of micro-electronic machinery, and particularly relates to a non-fully-driven large-stroke micro-mechanical actuator made of monocrystalline silicon or polycrystalline silicon materials.
Background
The torsional plate-type microactuator and cantilever beam-type microactuator are the two most commonly used types of micromechanical actuators, which are typically electrostatically driven. Taking the rectangular torsion plate type micro-actuator as an example, the rectangular torsion plate is rigid and is supported by a torsion support beamAnd (4) supporting. The rectangular torsion plate is an upper electrode of the driving electrode and is a movable polar plate. The lower electrode plate of the driving electrode is arranged on the substrate right below the torsion flat plate. The thickness of the lower electrode plate is very thin and is far smaller than the gap g between the upper electrode and the lower electrode0And is also much smaller than the thickness of the upper electrode plate. Step voltage is applied between the upper electrode and the lower electrode, the torsion supporting beam generates elastic torsion deformation under the action of the electrostatic torque, and the flat plate is driven to generate integral torsion. When the input voltage is small, the electrostatic force moment is equal to the torsional support counter moment of the torsional support beam, the torsional angle of the rigid flat plate is not large, and the rigid flat plate is not in contact with the lower polar plate. When the input voltage exceeds a specific value, the electrostatic force moment exceeds the torsion supporting moment of the torsion supporting beam, one side of the torsion flat plate is pulled to the lower polar plate, and the torsion flat plate and the lower polar plate are attracted (Pull-in). In engineering, the voltage and the rotation angle corresponding to the pull-in instability phenomenon are referred to as "pull-in voltage" and "pull-in position". The electrostatic driven cantilever beam type micro actuator also has similar attraction instability phenomenon.
In the prior device, in order to generate larger driving torque, the physical area of the upper plate must be fully utilized, so the area of the lower plate must be as large as possible, and preferably the area of the lower plate is equal to that of the upper plate, namely, a full-drive type is adopted. Fig. 1 is a full-drive type torsion micro actuator, and fig. 2 is a cantilever beam type micro actuator. As can be seen, the dimension of the lower electrode in the length direction (x direction) is equal to the length L of the upper plate, and the dimension in the width direction (y direction) is equal to the width W of the upper plate. Research shows that the full-drive device cannot work in a full stroke due to the attraction phenomenon. For example, for a full drive type torsional microactuator, the dynamic actuation positions are: thetapulling＝0.645·θmaxWherein, in the step (A),
is the maximum geometric rotation angle, g, allowed for the device0The gap between the upper polar plate and the lower polar plate when the driving voltage is zero is the theoretical maximum geometric line stroke. Dynamic pull-in of parallel-plate and capacitive MEMS actuators, IEEE Journal of Microelectromechanical System 2006,15(4),pp.811-821 discloses that the actual line travel of the device is θpullingL, less than the maximum value g of the geometric allowance 02/3 of (1). A new approach and model for the acquisition determination of the dynamic pull-in parameters of microorganisms activated by a step voltage, Journal of microorganisms and Microengineering,23(2013)045010 disclose that the actual stroke of the all-drive cantilever beam microactuator is also not less than 2/3.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: a non-all-drive type large-stroke micro-mechanical actuator having a larger linear stroke than that of an all-drive type micro-actuator is provided.
In order to solve the technical problem, an embodiment of the present invention provides a non-fully-driven large-stroke micro mechanical actuator, including a base, an upper polar plate, a lower polar plate and a support member, where the upper polar plate is connected with the support member, the support member is connected with the base, and the upper polar plate is parallel to the base; the lower polar plate is laid on the upper surface of the base and positioned below the upper polar plate, and a gap is formed between the lower polar plate and the upper polar plate; the length of the upper polar plate is greater than that of the lower polar plate.
As a further improvement of the embodiment of the invention, the upper polar plate is a rigid rectangular flat plate; the support piece comprises two support sub-pieces, and the two support sub-pieces are arranged on the base along the width direction of the upper polar plate; each supporting sub-part comprises a fixed supporting part and a twisting supporting beam, the fixed supporting part is fixedly connected with the base, one end of the twisting supporting beam is connected with the fixed supporting part, and the other end of the twisting supporting beam is connected with the upper polar plate; the upper pole plate can rotate around a torsion axis formed by the two torsion supporting beams.
As a further improvement of the embodiment of the present invention, the two torsion support beams are respectively connected to both ends of the width-directional side of the upper plate, and the width-directional side of the lower plate is aligned with the width-directional side of the upper plate.
As a further improvement of the embodiment of the present invention, the length of the upper plate is 1.55 times of the length of the lower plate.
As a further improvement of the embodiment of the invention, the two torsion support frames are respectively connected with two ends of the central line of the upper polar plate, and the side of the lower polar plate in the width direction is aligned with the central line of the upper polar plate; the length of the upper polar plate is 2 times larger than that of the lower polar plate.
As a further improvement of the embodiment of the present invention, the length of the upper plate is 3.1 times of the length of the lower plate.
As a further improvement of the embodiment of the invention, the upper polar plate is a flexible cantilever beam; the support piece comprises a cantilever support part, and the edge of the upper polar plate in the width direction is fixedly connected with the cantilever support part.
As a further improvement of the embodiment of the present invention, the length of the upper plate is 1.4 times of the length of the lower plate.
As a further improvement of the embodiment of the present invention, the width of the upper plate is equal to the width of the lower plate.
As a further improvement of the embodiment of the present invention, the width-direction side of the upper plate is aligned with the width-direction side of the lower plate.
Compared with the prior art, the technical scheme of the invention has the following beneficial effects: according to the non-full-drive large-stroke micro-mechanical actuator provided by the embodiment of the invention, the length of the upper polar plate is longer than that of the lower polar plate, and the rotation angle of the upper polar plate reaches the attraction position thetapullingPreviously, the upper plate could be in contact with the base, thereby having a greater linear travel than a full drive type micro-actuator.
Drawings
Fig. 1 is a schematic structural diagram of an all-drive type torsional micro-actuator, wherein fig. 1(a) is a front view of the all-drive type torsional micro-actuator, and fig. 1(b) is a top view of the all-drive type torsional micro-actuator;
fig. 2 is a schematic structural diagram of an all-drive cantilever micro-actuator, wherein fig. 2(a) is a front view of the all-drive cantilever micro-actuator, and fig. 2(b) is a top view of the all-drive cantilever micro-actuator;
fig. 3 is a schematic structural diagram of a non-fully-driven large-stroke single-side supported torsional micromechanical actuator according to an embodiment of the present invention, where fig. 3(a) is a front view of the non-fully-driven large-stroke single-side supported torsional micromechanical actuator, and fig. 3(b) is a top view of the non-fully-driven large-stroke single-side supported torsional micromechanical actuator;
fig. 4 is a schematic structural diagram of a non-unilaterally supported torsional micro-mechanical actuator with a non-fully-driven large stroke according to an embodiment of the present invention, where fig. 4(a) is a front view of the non-unilaterally supported torsional micro-mechanical actuator with the non-fully-driven large stroke, and fig. 4(b) is a top view of the non-unilaterally supported torsional micro-mechanical actuator with the non-fully-driven large stroke;
fig. 5 is a comparison graph of the linear stroke of the non-fully-driven large-stroke single-side supported torsional micro-actuator according to the embodiment of the present invention and the conventional torsional micro-actuator.
The figure shows that: the device comprises a base 1, an upper polar plate 2, a lower polar plate 3, a fixed supporting part 41 and a torsion supporting beam 42.
Detailed Description
The technical solution in the embodiments of the present invention will be described more clearly and completely with reference to the accompanying drawings in the embodiments of the present invention.
The embodiment of the invention provides a non-full-drive type large-stroke micro-mechanical actuator which comprises a base 1, an upper polar plate 2, a lower polar plate 3 and a supporting piece. The upper polar plate 2 is connected with a supporting piece, the supporting piece is connected with the base 1, and the upper polar plate 2 is parallel to the base 1. The lower polar plate 3 is laid on the upper surface of the base 1, the lower polar plate 3 is positioned below the upper polar plate 2, and a gap is formed between the lower polar plate 3 and the upper polar plate 2. The length of the upper pole plate 2 is greater than that of the lower pole plate 3.
In the non-fully-driven large-stroke micro-mechanical actuator of the embodiment, the length of the upper polar plate 2 is longer than that of the lower polar plate 3, and the corner of the upper polar plate 2 reaches the suction position thetapullingPreviously, the upper plate 2 can be in contact with the base 1, thereby having a larger linear stroke than the full drive type micro actuator.
Preferably, as shown in fig. 3 and 4, the upper plate 2 is a rigid rectangular flat plate. The support member includes two support sub-members arranged on the base 1 in the width direction (y-axis direction in the drawing) of the upper plate 2. Each supporting component comprises a fixed supporting part 41 and a twisting supporting beam 42, the fixed supporting part 41 is fixedly connected with the base 1, one end of the twisting supporting beam 42 is connected with the fixed supporting part 41, and the other end of the twisting supporting beam 42 is connected with the upper pole plate 2. The upper plate 2 is rotatable about a torsion axis formed by the two torsion support beams 42, and the torsion axis is the y-axis.
The micro-mechanical actuator of the embodiment is a torsional micro-mechanical actuator, a driving voltage is applied between the upper polar plate 2 and the lower polar plate 3, and the torsional support beam 42 generates elastic torsional deformation under the action of an electrostatic torque to drive the upper polar plate 2 to generate torsional displacement in the z-axis direction around a torsional axis.
Further, as shown in fig. 3, two torsion support beams 42 are connected to both ends of the width-directional side of the upper plate 2, respectively, and the width-directional side of the lower plate 3 and the width-directional side of the upper plate 2 are aligned.
The micro-mechanical actuator of the embodiment is a single-side supported torsional micro-mechanical actuator, a driving voltage is applied between the upper polar plate 2 and the lower polar plate 3, the torsional supporting beam 42 generates elastic torsional deformation under the action of an electrostatic torque, the upper polar plate 2 is driven to generate torsional displacement in the z-axis direction around a torsional axis, and the torsional axis is the side of the upper polar plate in the width direction. The length of the upper polar plate is set to be L', the length of the lower polar plate is set to be L, and the distance between the upper polar plate and the lower polar plate is set to be g0. The linear stroke of the micromechanical actuator of the present embodiment is
The length of the upper polar plate is greater than that of the lower polar plate, namely L' > L, and the linear stroke of the micro-mechanical actuator of the embodiment is greater than 0.645 g0Therefore, the linear stroke of the micro-mechanical actuator of the embodiment is larger than that of the existing torsion micro-actuator.
Further, the length of the upper plate 2 is 1.55 times of the length of the lower plate 3.
Since the length of the upper plate is 1.55 times the length of the lower plate 3, i.e., L' is 1.55L, the linear stroke of the micro-mechanical actuator of the present embodiment is g0The micromechanical actuator of the present embodiment can achieve a full stroke. Meanwhile, the situation that the volume, the mass and the like of the whole micro-mechanical actuator are too large and the rigidity of the upper polar plate is reduced quickly due to too long length is avoided.
Preferably, as shown in fig. 4, two torsion support beams 42 are connected to both ends of the center line of the upper plate 2, respectively, and the width-directional side of the lower plate 3 is aligned with the center line of the upper plate 2. Only the upper plate is symmetrical about the torsion axis (y-axis), and the lower plate 3 is below the upper plate side.
The micro-mechanical actuator of the embodiment is a non-unilateral-supported torsional micro-mechanical actuator, a driving voltage is applied between the upper polar plate 2 and the lower polar plate 3, the torsional supporting beam 42 generates elastic torsional deformation under the action of an electrostatic torque to drive the upper polar plate 2 to generate torsional displacement in the z-axis direction around a torsional axis, and the torsional axis is the central line of the upper polar plate 2, namely the y-axis. The length of the upper polar plate is set to be L', the length of the lower polar plate is set to be L, and the distance between the upper polar plate and the lower polar plate is set to be g0. The linear stroke of the micromechanical actuator of the present embodiment is
The length of the upper polar plate is 2 times larger than that of the lower polar plate, namely L' is more than 2L, and the linear stroke of the existing torsion-type micro actuator is 0.645 g0Therefore, the linear stroke of the micro-mechanical actuator of the embodiment is larger than that of the existing torsion micro-actuator.
Further, the length of the upper plate 2 is 3.1 times of the length of the lower plate 3.
Since the length of the upper plate is 3.1 times the length of the lower plate 3, i.e., L' is 3.1L, the linear stroke of the micro-mechanical actuator of the present embodiment is g0The micromechanical actuator of the present embodiment can achieve a full stroke. Meanwhile, the situation that the volume, the mass and the like of the whole micro-mechanical actuator are too large and the rigidity of the upper polar plate is reduced quickly due to too long length is avoided.
Preferably, the upper pole plate 2 is a flexible cantilever beam, the supporting member includes a cantilever supporting portion, and the side of the upper pole plate 2 in the width direction is fixedly connected with the cantilever supporting portion.
The micro mechanical actuator of the embodiment is a cantilever beam type micro mechanical actuator, a driving voltage is applied between the upper polar plate 2 and the lower polar plate 3, the upper polar plate 2 is elastically deformed under the action of an electrostatic moment, and the free end of the upper polar plate 2 is deformed and displaced in the z-axis direction. Setting up the upper poleThe length of the plate is L', the length of the lower polar plate is L, and the distance between the upper polar plate and the lower polar plate is g0. The length of the upper polar plate is larger than that of the lower polar plate, namely L' is larger than L, and the upper polar plate can be contacted with the base before the upper polar plate reaches the suction position, so that the linear stroke of the micro-mechanical actuator of the embodiment is larger than that of the existing cantilever beam type micro-actuator.
Further, the length of the upper plate 2 is 1.4 times that of the lower plate 3.
Since the length of the upper plate is 1.4 times the length of the lower plate 3, i.e., L' is 1.4L. The cantilever beam deformation curve can be approximated as
Right corner of cantilever beam
Therefore, the linear stroke of the micro-mechanical actuator of this embodiment is g0The micromechanical actuator of the present embodiment can achieve a full stroke. Meanwhile, the situation that the volume, the mass and the like of the whole micro-mechanical actuator are too large and the rigidity of the upper polar plate is reduced quickly due to too long length is avoided.
Preferably, the width of the upper plate 2 is equal to the width of the lower plate 3. The widthwise side of the upper plate 2 is aligned with the widthwise side of the lower plate 3. The widths of the upper polar plate 2 and the lower polar plate 3 are kept the same, so that the area of a driving electrode can be increased, and the electrostatic driving force can be increased.
The following provides a specific embodiment, which proves that the micro-mechanical actuator of the embodiment of the invention has larger linear stroke than the existing micro-actuator.
The micro-mechanical actuator of the embodiment is a single-side supported torsion type micro-actuator, the length of the upper polar plate is 500 μm, the width is 500 μm, the thickness is 20 μm, and the torsion rigidity is 7.78 × 10-9N.m/rad, distance g between upper and lower plates 020 μm. The driving voltage is applied between the upper plate and the lower plate, and the driving voltage is increased slowly from 0 toThe plate begins to deform. Fig. 5 shows a comparison of the linear stroke of the conventional all-drive torsion micro-actuator and the micro-mechanical actuator of the present embodiment, in which a curve a represents the conventional all-drive torsion micro-actuator, a curve b represents the single-side supported torsion micro-actuator with the upper plate length 1.2 times the lower plate length, a curve c represents the single-side supported torsion micro-actuator with the upper plate length 1.55 times the lower plate length, and a curve d represents the single-side supported torsion micro-actuator with the upper plate length 2.5 times the lower plate length. As shown in fig. 5, when the driving voltage is zero, the distortion is zero and the upper/lower plate gap is 20 μm. As the driving voltage increases, the deformation increases and the gap decreases. Obviously, the conventional all-drive torsion micro actuator is unstable when the deformation exceeds 12 μm and is absorbed to the lower plate, so the stable deformation of the conventional all-drive torsion micro actuator is about 12 μm. When the length of the upper plate is 1.2 times the length of the lower plate, the stable deformation is about 16 μm. When the length of the upper polar plate is 1.55 times of the length of the lower polar plate, the stable deformation is 20 mu m, the suction phenomenon just does not occur, and the stroke reaches 100 percent. When the length of the upper pole plate is 2.5 times of the length of the lower pole plate, the stroke can reach 100 percent by using voltage smaller than the original structure.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are intended to further illustrate the principles of the invention, and that various changes and modifications may be made without departing from the spirit and scope of the invention, which is also intended to be covered by the appended claims. The scope of the invention is defined by the claims and their equivalents.
Claims (10)
1. A non-full-drive type large-stroke micro-mechanical actuator is characterized by comprising a base (1), an upper polar plate (2), a lower polar plate (3) and a supporting piece, wherein the upper polar plate (2) is connected with the supporting piece, the supporting piece is connected with the base (1), and the upper polar plate (2) is parallel to the base (1); the lower polar plate (3) is laid on the upper surface of the base (1), the lower polar plate (3) is positioned below the upper polar plate (2), and a gap is formed between the lower polar plate (3) and the upper polar plate (2); the length of the upper polar plate (2) is greater than that of the lower polar plate (3).
2. The non-all-drive type large-stroke micromechanical actuator according to claim 1, characterized in that the upper plate (2) is a rigid rectangular flat plate; the supporting piece comprises two supporting sub-pieces, and the two supporting sub-pieces are distributed on two sides of the upper polar plate (2) along the width direction of the upper polar plate; each supporting sub-component comprises a fixed supporting part (41) and a twisting supporting beam (42), the fixed supporting part (41) is fixedly connected with the base (1), one end of the twisting supporting beam (42) is connected with the fixed supporting part (41), and the other end of the twisting supporting beam (42) is connected with the upper polar plate (2); the upper polar plate (2) can rotate around a torsion axis formed by the two torsion supporting beams.
3. The non-all-drive type large-stroke micromechanical actuator according to claim 2, characterized in that the two torsion supporting beams (42) are respectively connected with two ends of the width-direction edge of the upper polar plate (2), and the width-direction edge of the lower polar plate (3) is aligned with the width-direction edge of the upper polar plate (2).
4. The non-all-drive type large-stroke micromechanical actuator according to claim 3, characterized in that the length of the upper plate (2) is 1.55 times of the length of the lower plate (3).
5. The non-full-drive type large-stroke micromechanical actuator according to claim 2, characterized in that two torsion supporting beams (42) are respectively connected with two ends of the center line of the upper polar plate (2), and the side of the lower polar plate (3) in the width direction is aligned with the center line of the upper polar plate (2); the length of the upper polar plate (2) is 2 times larger than that of the lower polar plate (3).
6. The non-all-drive type large-stroke micromechanical actuator according to claim 5, characterized in that the length of the upper plate (2) is 3.1 times the length of the lower plate (3).
7. The non-all-drive type large-stroke micromechanical actuator according to claim 1, characterized in that the upper plate (2) is a flexible cantilever beam; the support piece comprises a cantilever support part, and the edge of the upper polar plate (2) in the width direction is fixedly connected with the cantilever support part.
8. The non-all-drive type large-stroke micromechanical actuator according to claim 7, characterized in that the length of the upper plate (2) is 1.4 times the length of the lower plate (3).
9. The non-all-drive type large-stroke micromechanical actuator according to claim 1, characterized in that the width of the upper plate (2) is equal to the width of the lower plate (3).
10. The non-all-drive type large-stroke micromechanical actuator according to claim 7, characterized in that the width-directional side of the upper plate (2) is aligned with the width-directional side of the lower plate (3).
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| CN202110470927.1A CN113315405A (en) | 2021-04-22 | 2021-04-22 | Non-full-drive type large-stroke micro-mechanical actuator |
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| CN202110470927.1A CN113315405A (en) | 2021-04-22 | 2021-04-22 | Non-full-drive type large-stroke micro-mechanical actuator |
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| CN1693180A (en) * | 2005-05-25 | 2005-11-09 | 西北工业大学 | Miniature plate electrostatic driver and mfg. method thereof |
| JP2006340531A (en) * | 2005-06-03 | 2006-12-14 | Matsushita Electric Works Ltd | Actuator |
| CN103780221A (en) * | 2014-01-02 | 2014-05-07 | 东南大学 | Torsional microcomputer electric resonance device with low thermal elastic damping structure |
| CN107592089A (en) * | 2017-09-14 | 2018-01-16 | 东南大学 | A kind of low-heat elastic damping cantilever arm fine beam resonator with through-hole structure |
| CN109911841A (en) * | 2019-03-19 | 2019-06-21 | 东南大学 | A kind of maximum capacity plate antenna microactrator of squeeze-film damping |
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2021
- 2021-04-22 CN CN202110470927.1A patent/CN113315405A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1693180A (en) * | 2005-05-25 | 2005-11-09 | 西北工业大学 | Miniature plate electrostatic driver and mfg. method thereof |
| JP2006340531A (en) * | 2005-06-03 | 2006-12-14 | Matsushita Electric Works Ltd | Actuator |
| CN103780221A (en) * | 2014-01-02 | 2014-05-07 | 东南大学 | Torsional microcomputer electric resonance device with low thermal elastic damping structure |
| CN107592089A (en) * | 2017-09-14 | 2018-01-16 | 东南大学 | A kind of low-heat elastic damping cantilever arm fine beam resonator with through-hole structure |
| CN109911841A (en) * | 2019-03-19 | 2019-06-21 | 东南大学 | A kind of maximum capacity plate antenna microactrator of squeeze-film damping |
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