CN113299535B - Annular generating device for powder with oxide shell layer coated core-shell structure - Google Patents
Annular generating device for powder with oxide shell layer coated core-shell structure Download PDFInfo
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- CN113299535B CN113299535B CN202110554600.2A CN202110554600A CN113299535B CN 113299535 B CN113299535 B CN 113299535B CN 202110554600 A CN202110554600 A CN 202110554600A CN 113299535 B CN113299535 B CN 113299535B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J13/00—Colloid chemistry, e.g. the production of colloidal materials or their solutions, not otherwise provided for; Making microcapsules or microballoons
- B01J13/02—Making microcapsules or microballoons
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/16—Metallic particles coated with a non-metal
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
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Abstract
The invention discloses an annular generating device of core-shell structure powder coated by an oxide shell, which relates to the technical field of metallurgical processes and comprises a chuck and an air distribution element, wherein the air distribution element is fixed on the chuck, a spray pipe is fixed in the middle of the chuck and is used for being communicated with a plasma spray gun, the air distribution element is used for being communicated with an oxygen supply element, the oxygen supply element is used for supplying oxygen into the air distribution element, at least one oxygen outlet hole group is arranged on the side wall of the air distribution element, each oxygen outlet hole group comprises a plurality of oxygen outlet holes annularly arranged in the circumferential direction of the spray pipe, the oxygen outlet holes are used for discharging oxygen, and the spray pipe can spray plasma carrying powder to the space between the oxygen outlet holes. The annular generation device for the oxide shell layer coated core-shell structure powder can improve the quality of the oxide core-shell coated core-shell structure powder, so that the core-shell bonding strength is improved, and the coating quality is ensured.
Description
Technical Field
The invention relates to the technical field of metallurgical processes, in particular to an annular generating device for powder with an oxide shell layer coated core-shell structure.
Background
The oxide-coated core-shell structure powder material is used as an important raw material in a powder metallurgy process, such as special-shaped piece sintering forming, special functional coating preparation, 3D printing and the like, and the particle size range of the oxide-coated core-shell structure powder material is from several micrometers to hundreds of micrometers. The current main shell coating methods comprise sputtering, mechanical mixing and the like, and have the problems of uneven thickness, excessively low core-shell bonding strength, poor core-shell matching property and the like.
The direct current plasma has the characteristics of ultrahigh temperature and high speed, and is the core of a plurality of advanced technologies and methods. Due to the characteristics of high temperature, high activity, high conductivity and the like, the direct current plasma is generated by inert gas (Ar, He, N2) or reducing gas (H2) at present. The whole jet flow field is in an inert or reducing environment, so how to generate oxide shell layers to coat the core-shell structure powder by using direct-current plasmas becomes a problem to be solved urgently.
Disclosure of Invention
The invention aims to provide an annular generating device for powder with an oxide shell layer coated core-shell structure, which is used for solving the problems in the prior art and improving the quality of the powder with the oxide core-shell coated core-shell structure, so that the core-shell bonding strength is improved and the coating quality is ensured.
In order to achieve the purpose, the invention provides the following scheme:
the invention provides an annular generating device for powder with an oxide shell layer coated core-shell structure, which comprises a chuck and an air distribution element, wherein the air distribution element is fixed on the chuck, a spray pipe is fixed in the middle of the chuck and is used for being communicated with a plasma spray gun, the air distribution element is used for being communicated with an oxygen supply element, the oxygen supply element is used for supplying oxygen into the air distribution element, at least one oxygen outlet hole group is arranged on the side wall of the air distribution element, each oxygen outlet hole group comprises a plurality of oxygen outlet holes annularly arranged in the circumferential direction of the spray pipe, the oxygen outlet holes are used for discharging oxygen, and the spray pipe can spray plasma carrying the powder between the oxygen outlet holes.
Preferably, the gas distribution element comprises at least one gas distribution ring and a plurality of gas outlet columns, the gas outlet columns are circumferentially fixed around the central shaft of the chuck, a reaction cavity is enclosed between the gas outlet columns, and the gas outlet columns are used for being communicated with an oxygen supply element; the gas distribution ring is coaxially arranged with the spray pipe, the gas outlet columns are circumferentially fixed on the outer wall of the gas distribution ring, the gas distribution ring is communicated with the gas outlet columns, one is correspondingly arranged on the gas distribution ring, and the oxygen outlet hole groups are arranged on the inner side wall of the gas distribution ring.
Preferably, the chuck is hollow, each gas outlet column is communicated with the inside of the chuck, the spray pipe is not communicated with the inside of the chuck, and the chuck is used for being communicated with an oxygen supply element.
Preferably, the chuck is provided with a plurality of oxygen charging holes on the end surface of one end far away from the gas outlet column, and the oxygen charging holes are used for being communicated with an oxygen supply element.
Preferably, the plurality of oxygenation holes are uniformly circumferentially fixed about a central axis of the chuck.
Preferably, one end of each gas outlet column is fixed on the chuck, the other end of each gas outlet column is plugged, a plurality of oxygen outlet holes are formed in the side wall of one side, close to the central shaft of the chuck, of each gas outlet column, the oxygen outlet holes are uniformly arranged along the axial direction of the gas outlet columns, and the oxygen outlet holes are used for introducing oxygen into the reaction cavity.
Preferably, the gas outlet column is an arc-shaped pipe, and the middle part of the gas outlet column is bent towards the direction far away from the central shaft of the chuck.
Preferably, the nozzle is arranged coaxially with the chuck.
Preferably, eight gas outlet columns are provided, two gas distribution rings are provided, and the two gas distribution rings are arranged along the axial direction of the spray pipe.
Preferably, a plurality of support legs are fixed on one side of the chuck far away from the gas distribution element, and the support legs are used for supporting the chuck.
Compared with the prior art, the invention has the following technical effects:
the invention provides an annular generating device of core-shell structure powder coated by an oxide shell, a gas distribution element is fixed on a chuck, a spray pipe is fixed in the middle of the chuck and is used for communicating a plasma spray gun, an oxygen supply element is used for supplying oxygen into the gas distribution element, at least one oxygen outlet hole group is arranged on the side wall of the gas distribution element, each oxygen outlet hole group comprises a plurality of oxygen outlet holes annularly arranged in the circumferential direction of the spray pipe, the oxygen outlet holes are used for discharging oxygen so as to form oxygen atmosphere, the oxygen outlet hole groups are circumferentially arranged around the spray pipe, the spray pipe can spray plasma carrying the powder to the space between the oxygen outlet holes, so that the oxygen surrounds the plasma, the uniformity of oxygen discharge is improved, meanwhile, an annular oxygen discharge mode can ensure that the oxygen discharged by the oxygen outlet hole groups is positioned on the same plane without inclination, and ensure that the oxygen uniformly coats the periphery of the plasma carrying the powder and is in full contact with the plasma, the interaction of the plasma and the oxygen induces the oxygen to be instantaneously ionized to form the oxygen plasma with strong oxidizing property, thereby forming oxidizing atmosphere of the plasma, facilitating the realization of transient reaction of powder materials and environmental atmosphere, realizing the rapid discrete modification of powder components and structures, generating self-growing oxide shell layer to coat the core-shell structure powder, and leading the powder materials and even parts to obtain the performance which is difficult to obtain by the traditional process.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a sectional view of an annular generating device for an oxide shell layer coated core-shell structure powder provided by the invention;
FIG. 2 is a top view of an annular generating device for an oxide shell layer coated core-shell structure powder provided by the present invention;
in the figure: the device comprises an annular generating device for 100-oxide shell layer coated core-shell structure powder, a chuck 1, a spray pipe 11, an oxygen filling hole 12, an air outlet column 2, a support leg 3, an air distribution ring 4 and an oxygen outlet hole 41.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide an annular generating device for powder with an oxide shell layer coated core-shell structure, which aims to solve the technical problem of low core-shell bonding strength caused by poor quality of the existing powder with an oxide shell layer coated core-shell structure.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
As shown in fig. 1-2, the present invention provides an annular generating apparatus 100 for generating a self-growing oxide shell-coated core-shell powder, which comprises a chuck 1 and a gas distribution element, wherein the gas distribution element is fixed on the chuck 1, a nozzle 11 is disposed in the middle of the chuck 1, the nozzle 11 penetrates through the nozzle 11 in the thickness direction of the chuck 1, the nozzle 11 is used for communicating with a plasma torch, the gas distribution element is used for communicating with an oxygen supply element, the oxygen supply element is used for supplying oxygen into the gas distribution element, at least one oxygen outlet group is disposed on the sidewall of the gas distribution element, each oxygen outlet group includes a plurality of oxygen outlets 41 annularly disposed in the circumferential direction of the nozzle 11, the oxygen outlets 41 are used for discharging oxygen to facilitate forming an oxygen atmosphere, the oxygen outlet groups are disposed around the circumferential direction of the nozzle 11, the nozzle 11 can spray plasma carrying the powder between the oxygen outlets, therefore, oxygen surrounds the periphery of the plasma, the uniformity of oxygen discharge is improved, meanwhile, the annular oxygen discharge mode can ensure that the oxygen discharged from the oxygen discharge hole group is positioned on the same plane, no inclination is generated, the oxygen is uniformly coated on the periphery of the plasma carrying the powder and is fully contacted with the plasma, the plasma and the oxygen interact to induce the oxygen to be instantly ionized to form the oxygen plasma with strong oxidizing property, so that an oxidizing atmosphere of the plasma is formed, the transient reaction of the powder material and the environment atmosphere is conveniently realized, the rapid discrete modification of the powder component and the structure is realized, the self-growing oxide shell layer is generated to coat the core-shell structure powder, and the powder material and even parts can obtain the performance which is difficult to obtain by the traditional process.
Specifically, the gas distribution element comprises at least one gas distribution ring 4 and a plurality of gas outlet columns 2, the plurality of gas outlet columns 2 are circumferentially fixed around a central shaft of the chuck 1, a reaction cavity is defined between the gas outlet columns 2, the gas outlet columns 2 are used for communicating with an oxygen supply element and introducing oxygen into the reaction cavity, so that the gas outlet columns 2 introduce oxygen into the reaction cavity at the periphery of the reaction cavity to form an oxygen atmosphere, the gas distribution ring 4 is coaxially arranged with the spray pipe 11, the gas outlet columns are uniformly and circumferentially fixed on the outer wall of the gas distribution ring 4, the gas outlet columns 2 are connected through the gas distribution ring 4, the stability of the gas outlet columns can be improved, the gas distribution ring 4 is communicated with the gas outlet columns, one gas distribution ring 4 is correspondingly provided with one oxygen outlet hole group, the plurality of oxygen outlet holes 41 are uniformly arranged on the inner side wall of the gas distribution ring 4, and simultaneously, the discharge direction of the oxygen in each gas distribution ring 4 is ensured to be on a plane and not to be inclined, the full contact of oxygen and the plasma carrying the powder is ensured, preferably, the plasma jet is vertical to the horizontal plane when in use, and the plane where the oxygen sprayed out from the oxygen outlet holes 41 on each gas distribution ring 4 is parallel to the horizontal plane.
Chuck 1 is used for communicateing the oxygen suppliment component, the inside cavity of chuck 1, and each gas column 2 all communicates with chuck 1 is inside for oxygen gets into chuck 1 earlier, and lets in respectively in each gas column 2 after 1 inner chambers of chuck disperse, improves the homogeneity when oxygen discharges, guarantees with the mixed effect of plasma, spray tube 11 and 1 inside incommunication of chuck, prevents that oxygen from discharging from spray tube 11, influences the mixture of oxygen and plasma.
The chuck 1 has been seted up a plurality of oxygen holes 12 on the terminal surface of keeping away from the one end of gas column 2, oxygenate hole 12 and be used for the intercommunication oxygen suppliment component, a plurality of oxygen holes 12 are fixed around the even circumference of the center pin of chuck 1 for oxygen gets into the 1 inner chamber of chuck through oxygenating hole 12, and evenly let in each gas column 2 after 1 inner chamber dispersion of chuck in, improve the exhaust effect of oxygen, and then improve the emergence effect of plasma and oxygen.
The one end of gas outlet column 2 is fixed on chuck 1, the other end shutoff, and all seted up a plurality of oxygen holes 41 on the lateral wall of the one side that is close to chuck 1 center pin on each gas outlet column 2, each oxygen hole 41 is along the axial align to grid of gas outlet column 2, oxygen hole 41 is used for letting in oxygen to the reaction intracavity, thereby make plasma jet flow through chuck 1 middle part discharge, and to keeping away from the one end of chuck 1 on being close to gas outlet column 2 and remove, oxygen is discharged to the direction perpendicular to through the plasma efflux from the periphery of plasma efflux, make plasma efflux and oxygen intensive mixing contact in order to form oxygen plasma, lure the oxygen plasma that makes simultaneously and this kind of surface of powder of this kind to take place transient autoxidation, generate from growing oxide shell cladding nuclear shell structure powder.
Go out the air column 2 and be the arc pipe, and go out the middle part of air column 2 and to keeping away from the direction bending of 1 center pin of chuck, each oxygen outlet 41 all sets up towards the center of reaction chamber to make oxygen all spray towards the center of reaction chamber, plasma efflux and oxygen are at reaction intracavity intensive mixing, with the generation oxygen plasma.
The spray pipe 11 and the chuck 1 are coaxially arranged, so that the plasma jet is positioned in the center of the reaction cavity, the distances between the gas outlet columns 2 and the plasma jet are equal, and the mixing uniformity of oxygen and the plasma jet is improved.
The number of the gas outlet columns 2 is eight, but the number of the gas outlet columns 2 in the annular generating device 100 for the core-shell structure powder coated by the oxide shell layer provided by the invention is not limited to eight, as long as uniform gas distribution of oxygen is ensured, so that the oxygen can be fully mixed with plasma; the number of the gas distribution rings 4 is two, the number of the oxygen outlet holes is also two, and the two gas distribution rings 4 are arranged along the axial direction of the nozzle 11, so that plasma jet can be fully contacted with oxygen in the reaction cavity to form oxygen plasma with strong oxidizing property, and the reaction efficiency is improved.
One side of keeping away from the gas distribution component on the chuck 1 is fixed with a plurality of landing leg 3, and landing leg 3 is used for supporting chuck 1 to when making the use, utilize landing leg 3 to produce device 100 with the annular of whole oxide shell cladding core-shell structure powder and prop up, be convenient for be connected with oxygen suppliment component, plasma spray gun, can guarantee simultaneously that gas column 2 makes and places towards the upper end, guarantee to react and normally go on.
The principle and the implementation mode of the present invention are explained by applying specific examples in the present specification, and the above descriptions of the examples are only used to help understanding the method and the core idea of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In summary, this summary should not be construed to limit the present invention.
Claims (9)
1. An annular generating device of oxide shell layer cladding core-shell structure powder is characterized in that: the plasma spraying device comprises a chuck and a gas distribution element, wherein the gas distribution element is fixed on the chuck, a spray pipe is fixed in the middle of the chuck and is used for being communicated with a plasma spray gun, the gas distribution element is used for being communicated with an oxygen supply element, the oxygen supply element is used for supplying oxygen into the gas distribution element, at least one oxygen outlet hole group is formed in the side wall of the gas distribution element, each oxygen outlet hole group comprises a plurality of oxygen outlet holes annularly distributed in the circumferential direction of the spray pipe, the oxygen outlet holes are used for discharging the oxygen, and the spray pipe can spray plasma carrying powder to the space between the oxygen outlet holes;
the gas distribution element comprises at least one gas distribution ring and a plurality of gas outlet columns, the gas outlet columns are fixed circumferentially around the central shaft of the chuck, a reaction cavity is enclosed between the gas outlet columns, and the gas outlet columns are used for being communicated with an oxygen supply element; the gas distribution ring is coaxially arranged with the spray pipe, the gas outlet columns are circumferentially fixed on the outer wall of the gas distribution ring, the gas distribution ring is communicated with the gas outlet columns, one is correspondingly arranged on the gas distribution ring, and the oxygen outlet hole groups are arranged on the inner side wall of the gas distribution ring.
2. The annular generating device for the oxide shell layer coated core-shell structure powder according to claim 1, characterized in that: the chuck is inside cavity, and each the gas outlet column all with the inside intercommunication of chuck, the spray tube with the inside nonconnection of chuck, the chuck is used for communicateing the oxygen suppliment component.
3. The annular generating device for the oxide shell layer coated core-shell structure powder according to claim 2, characterized in that: the chuck is kept away from seted up a plurality of oxygen holes on the terminal surface of the one end of gas outlet column, the oxygen hole is used for communicateing the oxygen suppliment component.
4. The annular generating device for the oxide shell layer coated core-shell structure powder according to claim 3, characterized in that: the plurality of oxygen-charging holes are uniformly circumferentially fixed around a central axis of the chuck.
5. The annular generating device for the oxide shell layer coated core-shell structure powder according to claim 2, characterized in that: one end of each gas outlet column is fixed on the chuck, the other end of each gas outlet column is blocked, a plurality of oxygen outlet holes are formed in the side wall of one side, close to the central shaft of the chuck, of each gas outlet column, the oxygen outlet holes are evenly arranged along the axial direction of the gas outlet columns, and the oxygen outlet holes are used for introducing oxygen into the reaction cavity.
6. The annular generating device for the oxide shell layer coated core-shell structure powder according to claim 2, characterized in that: the gas outlet column is an arc-shaped tube, and the middle part of the gas outlet column is bent towards the direction far away from the central shaft of the chuck.
7. The annular generating device for the oxide shell layer coated core-shell structure powder according to claim 1, characterized in that: the spray pipe and the chuck are coaxially arranged.
8. The annular generating device for the oxide shell layer coated core-shell structure powder according to claim 1, characterized in that: eight gas outlet columns are arranged, two gas distribution rings are arranged, and the two gas distribution rings are arranged along the axial direction of the spray pipe.
9. The annular generating device for the oxide shell layer coated core-shell structure powder according to claim 1, characterized in that: and a plurality of supporting legs are fixed on one side of the chuck, which is far away from the gas distribution element, and the supporting legs are used for supporting the chuck.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110554600.2A CN113299535B (en) | 2021-05-21 | 2021-05-21 | Annular generating device for powder with oxide shell layer coated core-shell structure |
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| CN202110554600.2A CN113299535B (en) | 2021-05-21 | 2021-05-21 | Annular generating device for powder with oxide shell layer coated core-shell structure |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104213066A (en) * | 2014-07-07 | 2014-12-17 | 北京理工大学 | Method for controlling atmospheric plasma spraying of easily-oxidized coating under atmosphere open environment |
| CN109485091A (en) * | 2018-12-07 | 2019-03-19 | 昆明理工大学 | A kind of preparation method of the stannic oxide superfines of size tunable |
| CN109487197A (en) * | 2018-11-29 | 2019-03-19 | 西安交通大学 | The preparation method and system of metal alloy coating under a kind of atmospheric atmosphere |
| CN110172668A (en) * | 2019-05-23 | 2019-08-27 | 钢铁研究总院 | A kind of preparation method and its nano particle of metal/oxide Core-shell Structure Nanoparticles |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6963044B2 (en) * | 2003-10-08 | 2005-11-08 | General Electric Compnay | Coating apparatus and processes for forming low oxide coatings |
| US9420639B2 (en) * | 2013-11-11 | 2016-08-16 | Applied Materials, Inc. | Smart device fabrication via precision patterning |
| JP7224096B2 (en) * | 2017-07-13 | 2023-02-17 | 東京エレクトロン株式会社 | Thermal spraying method for parts for plasma processing apparatus and parts for plasma processing apparatus |
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2021
- 2021-05-21 CN CN202110554600.2A patent/CN113299535B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104213066A (en) * | 2014-07-07 | 2014-12-17 | 北京理工大学 | Method for controlling atmospheric plasma spraying of easily-oxidized coating under atmosphere open environment |
| CN109487197A (en) * | 2018-11-29 | 2019-03-19 | 西安交通大学 | The preparation method and system of metal alloy coating under a kind of atmospheric atmosphere |
| CN109485091A (en) * | 2018-12-07 | 2019-03-19 | 昆明理工大学 | A kind of preparation method of the stannic oxide superfines of size tunable |
| CN110172668A (en) * | 2019-05-23 | 2019-08-27 | 钢铁研究总院 | A kind of preparation method and its nano particle of metal/oxide Core-shell Structure Nanoparticles |
Non-Patent Citations (1)
| Title |
|---|
| 《等离子喷涂技术现状及发展》;陈丽梅;《热处理技术与装备》;20060228;第27卷(第1期);第1-5页 * |
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