CN113281261A - Novel photoacoustic spectrum gas sensor - Google Patents
Novel photoacoustic spectrum gas sensor Download PDFInfo
- Publication number
- CN113281261A CN113281261A CN202110324299.6A CN202110324299A CN113281261A CN 113281261 A CN113281261 A CN 113281261A CN 202110324299 A CN202110324299 A CN 202110324299A CN 113281261 A CN113281261 A CN 113281261A
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- Prior art keywords
- light source
- main control
- control board
- air chamber
- chamber cover
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- 238000001834 photoacoustic spectrum Methods 0.000 title abstract description 6
- 238000004867 photoacoustic spectroscopy Methods 0.000 claims description 14
- 230000005611 electricity Effects 0.000 claims description 12
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000004804 winding Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 7
- 230000003287 optical effect Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 64
- 238000001228 spectrum Methods 0.000 description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000010895 photoacoustic effect Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
Abstract
The invention discloses a novel photoacoustic spectrum gas sensor which comprises a main control board, wherein a plurality of connecting supports are symmetrically arranged on the main control board, a light source driving board is jointly arranged at the upper ends of the connecting supports, an electric modulatable light source is arranged in the middle of the lower surface of the light source driving board, the electric modulatable light source is positioned on the central axis of the connecting supports, and the main control board is connected with the light source driving board through a flat cable fixed on the connecting supports. The invention reduces the volume of the equipment by adopting the electrically modulatable light source, saves the cost by replacing the optical filter with the gas chamber cover filled with the high-concentration gas to be detected, increases the detection accuracy, realizes the diversity and the selectivity of the equipment by matching the gas chamber cover, the photoelectric detector and the pickup, reduces the use cost and is convenient for large-area popularization.
Description
Technical Field
The invention relates to the field of gas sensors, in particular to a novel photoacoustic spectroscopy gas sensor.
Background
When a beam of modulated light irradiates gas in the transparent container, the gas is locally heated and expanded after absorbing light energy, periodic heating expansion is generated, sound waves are emitted, the sound waves are received by the acoustic sensor, the photoacoustic effect of the gas is achieved, different gases in the container are heated and expanded due to the wavelength of different incident light, photoacoustic spectra are formed, and the gas can be distinguished and the gas concentration can be detected by utilizing the principle of the photoacoustic spectra.
The photoacoustic spectroscopy gas sensor generally uses a laser light source, which is due to high monochromaticity of laser and can be modulated to generate sound waves which can be easily detected, is limited by the manufacturing process of the laser, the wavelength of the photoacoustic spectroscopy gas sensor using the laser light source is limited, the detected gas is limited, while the use of a non-laser light source is low in price, but a narrow-band filter with a specific gas absorption waveband is generally needed, and the price is high.
Disclosure of Invention
The invention aims to solve the defects in the prior art, and provides a novel photoacoustic spectroscopy gas sensor.
In order to achieve the purpose, the invention adopts the following technical scheme:
the utility model provides a novel optoacoustic spectrum gas sensor, includes the main control board, a plurality of linking bridge are installed to the symmetry on the main control board, and is a plurality of the light source drive plate is installed jointly to the upper end of linking bridge, the light source that can modulate of electricity is installed between two parties to the lower surface of light source drive plate, the light source that can modulate of electricity is located the axis of a plurality of linking bridge, main control board and light source drive plate are connected through the winding displacement of fixing on the linking bridge.
Preferably, the upper surface of main control board is located and installs the air chamber cover between a plurality of linking bridge, the last surface mounting of air chamber cover has the printing opacity window piece, form the air gap between printing opacity window piece and the electrical modulatable light source, install photoelectric detector and adapter on the main control board respectively, photoelectric detector and adapter all are located the air chamber cover, photoelectric detector and printing opacity window piece all are located the electrical modulatable light source under.
Preferably, the main control board is provided with a Micro Control Unit (MCU) for controlling the light source driving board to emit a pulse light source and processing signals sent by the sound pickup.
Preferably, the sound pickup is a micro-electro-mechanical system (MEMS) microphone chip and is used for converting sound wave signals into digital signals to be output.
Preferably, the upper surface of main control board is located and symmetrically installs two air chamber covers between a plurality of linking bridge, every the printing opacity window sheet is all installed to the upper surface of air chamber cover, two form the air gap between printing opacity window sheet and the electric modulatable light source, it does not install photoelectric detector and adapter equally to lie in two air chamber covers on the main control board, two photoelectric detector just all lies in the electric modulatable light source under about the electric modulatable light source symmetry.
Preferably, the upper surface of main control board is located that a plurality of air chamber covers are installed to the annular symmetry between a plurality of linking bridge, every the printing opacity window is all installed to the upper surface of air chamber cover, and is a plurality of form the air gap between printing opacity window and the electrically modulatable light source, it is equallyd divide and do not install photoelectric detector and adapter to lie in every air chamber cover on the main control board, and is a plurality of photoelectric detector is about the electrically modulatable light source annular symmetry, every photoelectric detector all is located the vertical projection region of the electrically modulatable light source on the main control board and corresponds the coincidence department of the vertical projection region of printing opacity window.
The invention has the following beneficial effects:
1. the adjustable light source of adoption electricity, this light source volume is little, does not need mechanical modulation device for whole optoacoustic spectrum gas sensor device volume reduces greatly, and does not have the light filter structure, adopts the high concentration gas chamber cover that awaits measuring to replace the light filter, the cost is reduced.
2. The gas to be detected is sealed in the gas chamber cover to detect, so that the concentration of the gas to be detected after detection in the gas chamber cover is known, and then the variation of the photoacoustic signal caused by the gas to be detected diffused in the air gap is reflected on the known gas, so that the photoacoustic signal is obtained, the gas selectivity of the photoacoustic spectrum gas sensor is realized, the detection accuracy is increased, and the cost is reduced.
3. Form single channel optoacoustic spectrum gas sensor through setting up a photoelectric detector of air chamber cover collocation and a adapter, set up two photoelectric detectors of two air chamber cover collocation and two adapters and form two passageway optoacoustic spectrum gas sensor and set up a plurality of photoelectric detectors of a plurality of air chamber cover collocation and a plurality of adapters and form multichannel optoacoustic spectrum gas sensor, the variety and the speciality of optoacoustic spectrum gas sensor have been realized, select suitable optoacoustic spectrum gas sensor promptly according to required, use cost is reduced, increase the possibility of promoting by a large scale.
In summary, the invention reduces the volume of the device by adopting the electrically modulatable light source, saves the cost by replacing the optical filter with the gas chamber cover filled with the high-concentration gas to be detected, increases the detection accuracy, realizes the diversity and the selectivity of the device by matching the gas chamber cover, the photoelectric detector and the sound pickup, reduces the use cost and is convenient for large-area popularization.
Drawings
Fig. 1 is a schematic structural diagram of a novel photoacoustic spectroscopy gas sensor according to the present invention;
FIG. 2 is a schematic structural diagram of the second embodiment;
fig. 3 is a schematic structural diagram of the third embodiment.
In the figure: the device comprises a main control board 1, an air chamber cover 2, a light-transmitting window 21, a photoelectric detector 3, a sound pick-up 4, an electrically modulatable light source 5, a light source driving board 6, a connecting support 8 and an air gap 9.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
The first embodiment is as follows:
referring to fig. 1, a novel photoacoustic spectroscopy gas sensor, including main control board 1, a plurality of linking bridge 8 are installed to the symmetry on the main control board 1, and light source drive plate 6 is installed jointly to the upper end of a plurality of linking bridge 8, and the adjustable light source 5 of electricity is installed between two parties to the lower surface of light source drive plate 6, and the adjustable light source 5 of electricity is located the axis of a plurality of linking bridge 8, and main control board 1 and light source drive plate 6 are connected through the winding displacement of fixing on linking bridge 8.
The upper surface of main control board 1 is located and installs air chamber cover 2 between a plurality of linking bridge 8, and the last surface mounting of air chamber cover 2 has printing opacity window piece 21, forms air gap 9 between printing opacity window piece 21 and the adjustable light source 5 of electricity, installs photoelectric detector 3 and adapter 4 on the main control board 1 respectively, and photoelectric detector 3 and adapter 4 all are located air chamber cover 2, and photoelectric detector 3 and printing opacity window piece 21 all are located the adjustable light source 5 of electricity under.
The main control board 1 is provided with a micro control unit MCU for controlling the light source driving board 6 to emit a pulse light source and processing signals transmitted by the sound pickup 4.
The sound pickup 4 is a micro-electro-mechanical system MEMS microphone chip, and is configured to convert a sound wave signal into a digital signal and output the digital signal.
When the gas-infrared energy measuring device is used, the main control board 1 controls the light source driving board 6 to start, the electric modulatable light source 5 emits infrared light according to a set modulation period under the driving of the light source driving board 6, the infrared light enters the gas chamber cover 2 through the light-transmitting window sheet 21 arranged at the upper part of the gas chamber cover 2, the gas chamber cover 2 is sealed with gas to be measured, when the gas to be measured in the gas chamber cover 2 absorbs the infrared light energy emitted by the electric modulatable light source 5 and is heated to expand, the gas to be measured has the same frequency as the infrared light modulation period, the periodic expansion forms sound waves, the expansion degree, namely the sound wave signal intensity depends on the gas concentration and the energy of the electric modulatable light source 5, the sound wave signals generated by the periodic expansion of the gas to be measured can be received by the MEMS microphone and converted into digital signals to be output, the MCU on the main control board, the concentration of the gas to be detected is obtained, and the method is suitable for detecting one gas.
During detection, gas to be detected is diffused to an air gap 9 between the electrically modulatable light source 5 and the air chamber cover 2, and the concentration of gas to be detected sealed in the air chamber cover 2 is unchanged, so that a sound wave signal detected by the sound pickup 4 only depends on the energy of the light source reaching the air chamber cover 2, if the air gap 9 passes through the gas to be detected, the gas can absorb the energy of the light source, namely the light energy of the gas reaching the air chamber cover 2 is reduced, the expansion degree of the gas in the air chamber cover 2 is reduced, so that the sound wave signal is reduced, the MCU can calculate the concentration of the gas to be detected according to the change of the sound wave intensity output by the MEMS microphone, and the response waveband of the photoelectric detector 3 is an absorption waveband without gas and is used for compensating and referencing the received energy.
Example two:
referring to fig. 2, a novel photoacoustic spectroscopy gas sensor, which is substantially the same as the first embodiment except that:
two air chamber covers 2 are installed to the symmetry between a plurality of linking bridge 8 on the upper surface of main control board 1, printing opacity window sheet 21 is all installed to the upper surface of every air chamber cover 2, form air gap 9 between two printing opacity window sheets 21 and the electric modulatable light source 5, it respectively installs photoelectric detector 3 and adapter 4 equally to lie in two air chamber covers 2 on the main control board 1, two photoelectric detector 3 are about the electric modulatable light source 5 symmetry and all lie in the electric modulatable light source 5 under.
When the two-gas-concentration detection device is used, two gases, such as carbon dioxide and methane, need to be detected simultaneously, the two gas chamber covers 2 are respectively sealed with carbon dioxide and methane with certain concentrations, the electrically modulated light source 5 works, the MCU can calculate the concentrations of the two gases to be detected according to the sound wave intensities output by the two MEMS microphones, and the two-gas-concentration detection device is suitable for detecting and comparing the concentrations of one or two gases.
Example three:
referring to fig. 3, a novel photoacoustic spectroscopy gas sensor, which is substantially the same as the first embodiment except that:
the upper surface of main control board 1 is located that a plurality of air chamber covers 2 are installed to annular symmetry between a plurality of linking bridge 8, printing opacity window 21 is all installed to the upper surface of every air chamber cover 2, form air gap 9 between a plurality of printing opacity window 21 and the electricity modulatable light source 5, it does not install photoelectric detector 3 and adapter 4 equally to lie in every air chamber cover 2 on the main control board 1, a plurality of photoelectric detector 3 are about 5 annular symmetries of electricity modulatable light source, every photoelectric detector 3 all is located the coincidence department of the vertical projection region of 1 electricity modulatable light source 5 of main control board and the vertical projection region of corresponding printing opacity window 21.
When the embodiment is used, when multiple gases need to be detected simultaneously, for example, carbon dioxide, carbon monoxide, methane and ethane are sealed in the four gas chamber covers 2 respectively, the electrically modulated light source 5 works, and the MCU can calculate the concentration of the two gases to be detected according to the intensity of sound waves output by the two MEMS microphones, so that the MEMS microphone is suitable for detecting and comparing the concentration of one or more gases.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (6)
1. The utility model provides a novel photoacoustic spectroscopy gas sensor, includes main control board (1), its characterized in that, a plurality of linking bridge (8) are installed to the symmetry on main control board (1), and is a plurality of light source drive plate (6) are installed jointly to the upper end of linking bridge (8), the lower surface of light source drive plate (6) is installed electricity modulatable light source (5) between two parties, electricity modulatable light source (5) are located the axis of a plurality of linking bridge (8), main control board (1) and light source drive plate (6) are connected through the winding displacement of fixing on linking bridge (8).
2. A novel photoacoustic spectrometry gas sensor according to claim 1, wherein the upper surface of the main control board (1) is located between the plurality of connecting supports (8) and is provided with an air chamber cover (2), the upper surface of the air chamber cover (2) is provided with a light-transmitting window sheet (21), an air gap (9) is formed between the light-transmitting window sheet (21) and the electrically modulatable light source (5), the main control board (1) is provided with a photodetector (3) and a sound pickup (4), the photodetector (3) and the sound pickup (4) are both located in the air chamber cover (2), and the photodetector (3) and the light-transmitting window sheet (21) are both located under the electrically modulatable light source (5).
3. A novel photoacoustic spectrometry gas sensor according to claim 2, wherein the micro control unit MCU is installed on the main control board (1) and is used to control the light source driving board (6) to emit a pulsed light source and process the signal transmitted by the microphone (4).
4. A novel photoacoustic spectrometry gas sensor according to claim 2, wherein the sound pick-up (4) is a MEMS microphone chip for converting the sound wave signal into a digital signal output.
5. A novel photoacoustic spectrometry gas sensor according to claim 1, wherein the upper surface of the main control board (1) is located between a plurality of connecting supports (8) and symmetrically provided with two air chamber covers (2), the upper surface of each air chamber cover (2) is provided with a light-transmitting window (21), an air gap (9) is formed between the two light-transmitting windows (21) and the electrically modulatable light source (5), the main control board (1) is located in the two air chamber covers (2) and is respectively provided with a photodetector (3) and a sound pickup (4), and the photodetectors (3) are symmetrical about the electrically modulatable light source (5) and are both located under the electrically modulatable light source (5).
6. The novel photoacoustic spectroscopy gas sensor of claim 1, a plurality of air chamber covers (2) are annularly and symmetrically arranged on the upper surface of the main control board (1) between the plurality of connecting supports (8), a light-transmitting window sheet (21) is arranged on the upper surface of each air chamber cover (2), an air gap (9) is formed between each light-transmitting window sheet (21) and the electrically modulated light source (5), the main control board (1) is positioned in each air chamber cover (2) and is respectively provided with a photoelectric detector (3) and a sound pickup (4), the photoelectric detectors (3) are circularly symmetrical about the electric modulatable light source (5), and each photoelectric detector (3) is positioned at the coincidence position of the vertical projection area of the electric modulatable light source (5) and the vertical projection area of the corresponding light-transmitting window piece (21) on the main control board (1).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110324299.6A CN113281261A (en) | 2021-03-26 | 2021-03-26 | Novel photoacoustic spectrum gas sensor |
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| CN202110324299.6A CN113281261A (en) | 2021-03-26 | 2021-03-26 | Novel photoacoustic spectrum gas sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114839148A (en) * | 2022-03-29 | 2022-08-02 | 电子科技大学 | Miniature infrared photoacoustic CO 2 Sensor and detection method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102279156A (en) * | 2010-06-03 | 2011-12-14 | 霍尼韦尔国际公司 | Integrated ir source and acoustic detector for photoacoustic gas sensor |
| CN104458634A (en) * | 2014-11-26 | 2015-03-25 | 中国科学院电工研究所 | Pulsed multi-channel photoacoustic spectrometry device for gas detection |
| CN105466854A (en) * | 2015-12-30 | 2016-04-06 | 武汉精昱光传感系统研究院有限公司 | Active air-chamber structure and photoacoustic spectrometry gas sensing system |
| CN106066305A (en) * | 2015-04-24 | 2016-11-02 | 英飞凌科技股份有限公司 | Including the optoacoustic gas sensor module of light transmitter elements and detector cell |
| CN106769973A (en) * | 2017-03-03 | 2017-05-31 | 江苏舒茨测控设备股份有限公司 | Ammonia gas detection means and method are detected using photocaustic spectroscopy |
| CN107036967A (en) * | 2016-01-22 | 2017-08-11 | 英飞凌科技股份有限公司 | Integrated optoacoustic gas sensor module |
| CN111189781A (en) * | 2020-01-14 | 2020-05-22 | 上海虬祺传感器科技有限公司 | Photoacoustic spectrum gas sensor |
| WO2020212481A1 (en) * | 2019-04-17 | 2020-10-22 | Sensirion Ag | Photoacoustic gas sensor device |
-
2021
- 2021-03-26 CN CN202110324299.6A patent/CN113281261A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102279156A (en) * | 2010-06-03 | 2011-12-14 | 霍尼韦尔国际公司 | Integrated ir source and acoustic detector for photoacoustic gas sensor |
| CN104458634A (en) * | 2014-11-26 | 2015-03-25 | 中国科学院电工研究所 | Pulsed multi-channel photoacoustic spectrometry device for gas detection |
| CN106066305A (en) * | 2015-04-24 | 2016-11-02 | 英飞凌科技股份有限公司 | Including the optoacoustic gas sensor module of light transmitter elements and detector cell |
| CN105466854A (en) * | 2015-12-30 | 2016-04-06 | 武汉精昱光传感系统研究院有限公司 | Active air-chamber structure and photoacoustic spectrometry gas sensing system |
| CN107036967A (en) * | 2016-01-22 | 2017-08-11 | 英飞凌科技股份有限公司 | Integrated optoacoustic gas sensor module |
| CN106769973A (en) * | 2017-03-03 | 2017-05-31 | 江苏舒茨测控设备股份有限公司 | Ammonia gas detection means and method are detected using photocaustic spectroscopy |
| WO2020212481A1 (en) * | 2019-04-17 | 2020-10-22 | Sensirion Ag | Photoacoustic gas sensor device |
| CN111189781A (en) * | 2020-01-14 | 2020-05-22 | 上海虬祺传感器科技有限公司 | Photoacoustic spectrum gas sensor |
Non-Patent Citations (1)
| Title |
|---|
| 姜萌等: "小型化光声光谱气体传感器研究进展", 《激光与光电子学进展》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114839148A (en) * | 2022-03-29 | 2022-08-02 | 电子科技大学 | Miniature infrared photoacoustic CO 2 Sensor and detection method |
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Application publication date: 20210820 |