CN113280046B - Multi-zone fine-adjustment gas-saving floating mat - Google Patents
Multi-zone fine-adjustment gas-saving floating mat Download PDFInfo
- Publication number
- CN113280046B CN113280046B CN202110698133.0A CN202110698133A CN113280046B CN 113280046 B CN113280046 B CN 113280046B CN 202110698133 A CN202110698133 A CN 202110698133A CN 113280046 B CN113280046 B CN 113280046B
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- Prior art keywords
- air
- air inlet
- inlet channel
- pressure equalizing
- area
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0607—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being retained in a gap, e.g. squeeze film bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention discloses a multi-region fine-tuning gas saving floating pad which comprises a floating pad body, wherein four regions are divided on the surface of a gas film generated by the floating pad body through cross grooves, and each region comprises an independent throttling hole, an air inlet channel and a pressure equalizing groove; the air inlet channel is arranged on the side face of the air floatation cushion body of each area, the pressure equalizing groove is arranged on the surface of each area, which forms an air film, the throttling hole is arranged in the pressure equalizing groove, and the throttling hole is communicated with the air inlet channel; according to the invention, the fine adjustment of the thickness of the air film in each area of the air floating pad can be realized by independently controlling the air inlet channel in each area, so that the function of leveling the air floating pad on an uneven plane is further achieved; compared with a plurality of air-bearing cushions, the multi-region fine-tuning air-bearing cushion has a simpler structure, and can effectively avoid the problem that the error caused by factors such as installation is far larger than the fine-tuning distance of the air-bearing cushion.
Description
Technical Field
The invention relates to the field of air flotation pads, in particular to a multi-region fine-tuning air-saving air flotation pad.
Background
The air bearing is used as a key component of an ultra-precise measuring and processing system and has the advantages of cleanness, low friction resistance, wide application speed range, wide application temperature range and the like. The air bearing has the advantages that the air bearing is an air bearing, and the air bearing can form a gap between the air bearing and a plane through an air thin layer (namely an air film) formed at the bottom of the air bearing, so that the air bearing can form approximate frictionless sliding. The air floatation cushion in the current market has the problem of poor bearing capacity, and meanwhile, the air floatation cushion cannot be applied to the field of uneven planes.
Disclosure of Invention
The invention aims to solve the problems that the air bearing pad has small bearing capacity and cannot be applied to the field of insufficient smoothness of a plane, and provides a multi-region fine-tuning gas-saving air bearing pad, which effectively improves the bearing capacity of the air bearing pad, and meanwhile, fine tuning can be performed in a plurality of regions on the air bearing pad with an uneven plane, so that the leveling of the air bearing pad is realized.
The invention realizes the purpose through the following technical scheme: a multi-region fine-tuning air-saving floating pad comprises an air-floating pad body, wherein four regions are divided on the surface of an air film generated by the air-floating pad body through cross grooves, and each region comprises an independent throttling hole, an air inlet channel and a pressure equalizing groove; the air inlet channel is arranged on the side face of the air floatation cushion body of each area, the pressure equalizing groove is arranged on the surface of each area, which forms an air film, the throttling hole is arranged in the pressure equalizing groove, and the throttling hole is communicated with the air inlet channel.
Furthermore, each area comprises 3 air inlet channels, any air inlet channel can be selected according to actual conditions when the air inlet device is used, and other air inlet channels are blocked by air plugs. The air cavities of the three air inlet channels in each area of the air floating cushion body are communicated, and the air cavities are communicated with the throttling holes in each area.
Furthermore, the pressure equalizing grooves of all the areas are in a shape of Chinese character 'ri', and the throttling holes are formed in the corners and the straight line middle points of the pressure equalizing grooves in the shape of Chinese character 'ri'. And each area is provided with a pressure equalizing groove near the throttling hole for improving the bearing capacity and the impact resistance of the formed air film.
Furthermore, the air inlet channel of each region and the air cavity inside each region are mutually independent, the air flow in the air inlet channel is independently controlled in each region, air films with different thicknesses are formed on the surface of the air floating cushion through the throttling holes, and the leveling of the air floating cushion on an uneven plane is realized through multi-region fine adjustment.
Furthermore, the whole shape of the air floatation cushion body is in a square column shape or a cylindrical shape. Each area is in a fan shape or a square shape, and if the air flotation pad body is in a square column shape, a plane is cut at four corners of the square column shape for generating an air inlet surface of one air inlet channel.
The leveling of the multi-region fine-tuning air-saving floating pad can be judged by a laser displacement sensor, and a specific leveling judging mechanism comprises a base, a laser displacement sensor mounting plate, a sensor mounting seat, four laser displacement sensors and a balance weight, wherein the four laser displacement sensors are fixed on the laser displacement sensor mounting plate through the sensor mounting seat, the laser displacement sensor mounting plate is mounted on the base, the plane of an air film generated by an air floating pad body is downwards arranged on the base, the air floating pad body is suspended on the base after the air floating pad body generates the air film, the balance weight is fixed on the back of the air floating pad body, and the laser directions of the four laser displacement sensors are downwards and are opposite to four regions on the air floating pad body.
And (3) simultaneously measuring the heights of the four areas by using four laser displacement sensors, and when the readings of the sensors are the same, indicating that the air floatation cushion is leveled.
The invention has the beneficial effects that:
1. according to the invention, the air inlet channels of all areas can be independently controlled, so that the air film thickness of all areas of the air floating pad can be finely adjusted, and the function of leveling the air floating pad on an uneven plane can be further achieved;
2. the pressure equalizing groove is formed near the throttling hole, so that the bearing capacity and the impact resistance of the air film can be effectively improved;
3. compared with a plurality of air-bearing cushions, the multi-region fine-tuning air-bearing cushion has a simpler structure, and can effectively avoid the problem that the error caused by factors such as installation is far larger than the fine-tuning distance of the air-bearing cushions.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a multi-zone fine-tuning air-saving float cushion according to the present invention.
FIG. 2 is a block diagram of a multi-zone fine tuned gas cushion according to the present invention;
fig. 3 is a structural diagram of a leveling determination mechanism for a multi-zone fine-tuning air-saving floating pad according to the present invention.
In the figure, 101-air film, 1-area, 2-air inlet channel, 3-pressure equalizing groove, 4-throttling hole, 5-base, 6-laser displacement sensor mounting plate, 7-sensor mounting seat, 8-laser displacement sensor, 9-counterweight and 10-air flotation cushion body.
Detailed Description
The invention will be further described with reference to the accompanying drawings in which:
as shown in fig. 1 to 3, a multi-region fine-tuning air-saving floating pad comprises a floating pad body 10, wherein four regions 1 are divided from the surface of a gas film 101 generated by the floating pad body 10 through cross grooves, and each region 1 comprises an independent throttle hole 4, an air inlet channel 2 and a pressure equalizing groove 3; the air inlet channel 2 is arranged on the side surface of the air flotation cushion body 10 of each area 1, the pressure equalizing groove 3 is arranged on the surface of each area 1, which forms the air film 101, the throttling hole 4 is arranged in the pressure equalizing groove 3, and the throttling hole 4 is communicated with the air inlet channel 2.
Each area 1 comprises 3 air inlet channels 2, when in use, any air inlet channel 2 can be selected according to actual conditions, and the rest air inlet channels 2 are blocked by utilizing air blocking plugs.
The pressure equalizing grooves 3 of each region 1 are in a shape of Chinese character 'ri', and the throttle holes 4 are arranged at the corners and straight line midpoints of the pressure equalizing grooves 3 in the shape of Chinese character 'ri'. Each region 1 is provided with a pressure equalizing groove 3 near the orifice 4 for improving the bearing capacity and impact resistance of the gas film 101.
The air inlet channel 2 of each area 1 and the air cavity in each area 1 are independent of each other, the air flow in the air inlet channel 2 is independently controlled by each area 1, an air film 101 with different thicknesses is formed on the surface of the air flotation pad through the throttling hole 4, and the air flotation pad is leveled on an uneven plane through fine adjustment of multiple areas 1.
The air floating pad body 10 is in a square column shape or a cylindrical shape. Each area 1 is shaped like a fan or a square, and if the air bearing pad body 10 is a square column, a plane is cut at four corners of the square column to form an air inlet surface of one of the air inlet passages 2.
Fig. 3 is a structural diagram of a leveling determination mechanism of a multi-zone fine-tuning air-saving floating pad according to the present invention. A leveling decision mechanism of multizone fine setting air throttle floating pad includes base 5, laser displacement sensor 8 mounting panel 6, sensor mount pad 7, four laser displacement sensor 8 and counter weight 9, four laser displacement sensor 8 pass through sensor mount pad 7 to be fixed on laser displacement sensor 8 mounting panel 6, laser displacement sensor 8 mounting panel 6 is installed on base 5, air supporting pad body 10 generates the plane of gas membrane 101 and sets up on base 5 down, make air supporting pad body 10 suspension on base 5 behind the gas membrane 101 is produced to air supporting pad body 10, counter weight 9 is fixed on the back of air supporting pad body 10, four laser displacement sensor 8's laser direction is down and just to four regions 1 on the air supporting pad body 10. The leveling of the multi-zone fine-tuning air-saving floating cushion 10 can be judged by the laser displacement sensors 8, the heights of the four zones 1 are measured by the four laser displacement sensors 8 at the same time, and when the readings of the sensors 8 are the same, the leveling of the air-saving floating cushion 10 is represented.
The above embodiments are only preferred embodiments of the present invention, and are not intended to limit the technical solutions of the present invention, so long as the technical solutions can be realized on the basis of the above embodiments without creative efforts, which should be considered to fall within the protection scope of the patent of the present invention.
Claims (4)
1. A multizone fine setting gas saving floating mat which characterized in that: the air floatation cushion comprises an air floatation cushion body (10), wherein four areas (1) are divided on the surface of an air film (101) generated by the air floatation cushion body (10) through cross grooves, and each area (1) comprises an independent throttling hole (4), an air inlet channel (2) and a pressure equalizing groove (3); the air inlet channel (2) is arranged on the side face of the air floatation pad body (10) of each area (1), the pressure equalizing groove (3) is arranged on the surface of each area (1) forming the air film (101), the throttling hole (4) is arranged in the pressure equalizing groove (3), and the throttling hole (4) is communicated with the air inlet channel (2); each region (1) comprises 3 air inlet channels (2), any air inlet channel (2) can be selected according to actual conditions when the air inlet device is used, and the rest air inlet channels (2) are blocked by using air blocking plugs; the leveling determination mechanism of the multi-zone fine-tuning air-saving floating pad comprises a base (5), a laser displacement sensor (8) mounting plate (6), a sensor mounting seat (7), four laser displacement sensors (8) and a balance weight (9), four laser displacement sensor (8) are fixed on laser displacement sensor (8) mounting panel (6) through sensor mount pad (7), install on base (5) laser displacement sensor (8) mounting panel (6), the plane that air supporting fills up body (10) and generates air film (101) sets up on base (5) down, make air supporting fill up body (10) suspend on base (5) after air supporting fills up body (10) production air film (101), counter weight (9) are fixed on the back of air supporting fill up body (10), the laser direction of four laser displacement sensor (8) is down and just to four region (1) on air supporting fill up body (10).
2. The multi-zone fine tuning air bearing gasket as claimed in claim 1 wherein: the pressure equalizing grooves (3) of each area (1) are in a shape of Chinese character 'ri', and the throttling holes (4) are formed in the corners and the straight line midpoints of the pressure equalizing grooves (3) in the shape of Chinese character 'ri'.
3. The multi-zone fine tuning air bearing gasket as claimed in claim 1 wherein: the air inlet channel (2) of each region (1) and the air cavity in each region (1) are mutually independent, each region (1) independently controls the air flow in the air inlet channel (2), so that air films (101) with different thicknesses are formed on the surface of the air floatation cushion through the throttling holes (4), and the leveling of the air floatation cushion on an uneven plane is realized through the fine adjustment of the multiple regions (1).
4. The multi-zone fine tuning air bearing gasket as claimed in claim 1 wherein: the air floating cushion body (10) is in a square column shape or a cylindrical shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110698133.0A CN113280046B (en) | 2021-06-23 | 2021-06-23 | Multi-zone fine-adjustment gas-saving floating mat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110698133.0A CN113280046B (en) | 2021-06-23 | 2021-06-23 | Multi-zone fine-adjustment gas-saving floating mat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113280046A CN113280046A (en) | 2021-08-20 |
| CN113280046B true CN113280046B (en) | 2022-09-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110698133.0A Active CN113280046B (en) | 2021-06-23 | 2021-06-23 | Multi-zone fine-adjustment gas-saving floating mat |
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Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3639770A1 (en) * | 1986-11-21 | 1988-06-01 | Peter Pertl | SENSOR CONTROLLED LEVELING DEVICE |
| JPH11132232A (en) * | 1997-10-30 | 1999-05-18 | Disco Abrasive Syst Ltd | Inclination adjusting mechanism of air spindle |
| WO2007077878A1 (en) * | 2005-12-27 | 2007-07-12 | Pneumatic Servo Controls Ltd. | Gas pressure control actuator, gas bearing mechanism for the gas pressure control actuator, and minute displacement output device using the gas pressure control actuator |
| JP2016161007A (en) * | 2015-02-27 | 2016-09-05 | 株式会社日本製鋼所 | Gas flotation workpiece support device and non-contact workpiece support method |
| CN110450993B (en) * | 2019-09-11 | 2021-03-19 | 北京邮电大学 | Zero-gravity self-adjusting air floatation platform and zero-gravity simulation system |
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2021
- 2021-06-23 CN CN202110698133.0A patent/CN113280046B/en active Active
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