CN113279060A - Quasi-monocrystalline silicon ingot furnace with explosion-proof pressure release structure - Google Patents
Quasi-monocrystalline silicon ingot furnace with explosion-proof pressure release structure Download PDFInfo
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- CN113279060A CN113279060A CN202110497617.9A CN202110497617A CN113279060A CN 113279060 A CN113279060 A CN 113279060A CN 202110497617 A CN202110497617 A CN 202110497617A CN 113279060 A CN113279060 A CN 113279060A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
Abstract
The invention discloses a quasi-monocrystalline silicon ingot furnace with an explosion-proof pressure relief structure, which comprises a top plate, a furnace body, a feed inlet, a damping mechanism, a cooling mechanism, a single-chip microcomputer controller, a first support column, a pressure gauge, a bearing wall, a clamp, a temperature measuring point and a waste heat recovery mechanism, wherein the outer wall of the left side of the clamp is connected with the bearing wall, the furnace body is fixed on the outer wall of the left side of the bearing wall, the feed inlet is formed in the middle of the outer wall of the top end of the furnace body, the temperature measuring point is arranged at the bottom end of the furnace body, the damping mechanism is arranged on the outer wall of the bottom end of the first support column, the single-chip microcomputer controller is arranged in the middle of the top end of the top plate, the cooling mechanism is installed on the outer; the invention can effectively finish the treatment of the discharged gas, and avoid the accident caused by the liquid object discharged by the ingot furnace because the temperature and the pressure value of the ingot furnace exceed the standard and the explosion is easy to cause.
Description
Technical Field
The invention relates to the technical field of crystalline silicon, in particular to a quasi-monocrystalline silicon ingot furnace with an explosion-proof pressure relief structure.
Background
The electric conductivity of a semiconductor is between that of a conductor and an insulator, silicon, germanium, gallium arsenide and cadmium sulfide are all semiconductor materials, the resistivity of the semiconductor materials is reduced along with the increase of temperature and the increase of radiation intensity, a small amount of impurities are added into the semiconductor, the conductivity of the semiconductor materials is decisively influenced, the semiconductor materials are important characteristics, silicon is the most commonly used semiconductor material, when molten simple substance silicon is solidified, silicon atoms are arranged into crystal nuclei in diamond crystal lattices, and the crystal nuclei grow into crystal grains with the same crystal face orientation to form monocrystalline silicon.
The ingot furnace is mainly used for producing solar-grade monocrystalline silicon ingots, when the existing ingot furnace is used for producing and processing monocrystalline silicon, the problem that the ingot furnace is easy to explode due to the fact that the temperature and the pressure values exceed the standard and accidents are caused by discharging liquid objects is solved, meanwhile, the water inlet temperature of cooling water of the ingot furnace is 21-24 ℃, the water temperature is increased after the cooling water exchanges heat with the heat in the ingot furnace, the water outlet temperature is generally 28-32 ℃, the water temperature is directly discharged according to the normal design or is discharged through the heat exchange of a heat exchanger, and therefore not only is the water source wasted, but also the heat is more wasted. In view of the above defects, it is actually necessary to design a quasi-monocrystalline silicon ingot furnace with an explosion-proof pressure relief structure.
Disclosure of Invention
The invention aims to provide a quasi-monocrystalline silicon ingot furnace with an explosion-proof pressure relief structure, which aims to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: a quasi-monocrystalline silicon ingot furnace with an explosion-proof pressure relief structure comprises a top plate, a furnace body, a feed inlet, a damping mechanism, a cooling mechanism, a single-chip microcomputer controller, a first support column, a pressure gauge, a bearing wall, a clamp, a temperature measuring point and a waste heat recovery mechanism, wherein the first support column is welded on the right side of the bottom end of the top plate, the clamp wraps the outer wall of the first support column, the bearing wall is connected with the outer wall of the left side of the clamp, the furnace body is fixed on the outer wall of the left side of the bearing wall, the feed inlet is formed in the middle of the outer wall of the top end of the furnace body, the temperature measuring point is arranged at the bottom end of the furnace body, the damping mechanism is arranged on the outer wall of the bottom end of the first support column, the single-chip microcomputer controller is arranged in the middle of the top end of the top plate, the cooling mechanism is installed on the outer wall of the right side of the single-chip microcomputer controller, the pressure gauge is located on the right side of the outer wall of the top end of the furnace body, the furnace body is provided with a water inlet and a water outlet, the water outlet is connected with a filter box, the utility model discloses a waste heat recovery device, including rose box, waste heat recovery mechanism, be provided with the filter screen in the rose box, the export end of rose box is provided with the shower nozzle, the rose box is connected with waste heat recovery mechanism, waste heat recovery mechanism's top is provided with steam outlet, be provided with the cold water pipe of matrix type range in the waste heat recovery mechanism, the lateral surface of every cold water pipe all is provided with the scale, waste heat recovery mechanism's bottom is provided with the outlet pipe, water piping connection has the pump, the pump is connected with the water inlet.
Preferably, an upper heat insulation plate with an air guide cylinder and a heat insulation cage are arranged above the furnace body, a quartz crucible is arranged in the middle of the furnace body, a graphite crucible is arranged outside the quartz crucible, heaters are arranged on the periphery of the graphite crucible, and a heat exchange table is arranged below the graphite crucible.
Preferably, the bottom heat-insulation board supported by the second support column is arranged below the inside of the furnace body, the second support column supports the heat exchange table at the same time, the second support column is of a boss structure, a cushion block with a certain thickness is sleeved on the boss of the second support column, and the cushion block supports the bottom heat-insulation board.
Preferably, the thickness of the cushion block is 0-20 mm, and the cushion block is made of a graphite hard felt.
Preferably, the periphery of the edge of the bottom of the heat exchange table is provided with heat insulation plates with a certain thickness, and the thickness of each heat insulation plate is 10-30 mm.
Preferably, the damping mechanism comprises a base, a sleeve, a column, a spring and a support rod, the sleeve is arranged at the top end of the inner wall of the base, the column is arranged on the top end of the inner wall of the base, the spring is connected to the outer wall of the bottom end of the sleeve, the support rod is arranged on the outer wall of the bottom end of the spring, a welding integrated structure is arranged between the outer wall of the bottom end of the spring and the bottom end of the inner wall of the support rod, and the sleeve is arranged on the column and forms an elastic structure through the spring and the support rod.
Preferably, cooling mechanism includes the pipeline of giving vent to anger, butt joint board, adsorbs piece, ice storage room, screw cap, fan and air-out pipeline, and the inner wall bottom of the pipeline of giving vent to anger is provided with butt joint board, and the inner wall middle part of the pipeline of giving vent to anger settles and adsorbs the piece, and the tip of the pipeline of giving vent to anger links up there is the ice storage room.
Preferably, the thread cover is installed on the left side of the top of the ice storage chamber, and the outer wall of the right side of the ice storage chamber is bonded with the air outlet pipeline, the middle part of the air outlet pipeline is fixed with the fan, the adsorption block is tightly attached to the middle part of the inner wall of the air outlet pipeline, and the air outlet pipeline, the ice storage chamber and the air outlet pipeline are communicated.
Compared with the prior art, the quasi-monocrystalline silicon ingot furnace with the explosion-proof pressure relief structure has the advantages that through the arrangement of the sleeved columns, the springs and the supporting rods, the effect of buffering vibration can be achieved when the machine shakes, the springs have good damping and anti-seismic functions, the stability and safety of the ingot furnace are improved, the service life of the ingot furnace is prolonged, and through the arrangement of the plurality of temperature measuring points on the outer wall of the furnace body, the furnace body is more stable during processing, and the safety of the furnace body is guaranteed; according to the invention, the ice blocks can be placed in the ice storage chamber by opening the threaded cover, and then the matching of the fan is carried out, so that the discharged gas is transmitted into the ice storage chamber under the arrangement of the gas outlet pipeline during the report of the pressure value, the harmful substances in the gas of the adsorption block are utilized for treatment and adsorption, and then the gas is cooled by the cold air on the ice blocks in the ice storage chamber, so that the treatment of the discharged gas is effectively completed, and the accident caused by the liquid object discharged by the ingot furnace due to the fact that the temperature and the pressure value of the ingot furnace exceed the standard easily caused by explosion is avoided; according to the invention, through the arrangement of the water inlet and the water outlet, a cooling effect can be achieved, the furnace body is prevented from being hot-cracked in the heating process, cooling water is discharged through the water outlet and enters the waste heat recovery mechanism through filtration, a cold water pipe is arranged in the waste heat recovery mechanism, and the outer side surface of the cold water pipe is provided with the scale, so that the contact area with the cooling water is increased, the temperature of the cooling water can be better reduced, wherein steam generated in the waste heat recovery mechanism is discharged through the steam outlet and is used by other equipment, and the cooled cooling water is sent to the furnace body through the pump, so that the waste heat is recovered and utilized, water circulation is formed, and resources are saved; according to the invention, the cushion block with a certain thickness is sleeved on the second supporting column, so that the height of the bottom heat-insulating plate can be increased, the distance between the bottom heat-insulating plate and the heat exchange table is reduced, the crystal growth speed of the edge area of the crucible is inhibited in the crystal growth process, the crystal growth interface is deflected, the preferential growth of the edge crystal growth is effectively avoided, the growth of the middle area to the periphery is facilitated, and the area ratio of single crystals is increased. In addition, the distance between the bottom heat-insulation plate and the heat exchange table is reduced, so that the heat dissipation of the edge area of the crucible is reduced along with the slow opening of the heat-insulation cage in the crystal growing process, and the crystal growing speed of the edge area of the crucible is further inhibited.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention without limiting the invention in which:
FIG. 1 is a schematic structural diagram of a quasi-monocrystalline silicon ingot furnace with an explosion-proof pressure relief structure according to the invention;
FIG. 2 is a schematic diagram of the internal structure of a furnace body in a quasi-monocrystalline silicon ingot furnace with an explosion-proof pressure relief structure according to the invention;
FIG. 3 is a schematic structural diagram of a damping mechanism in a quasi-monocrystalline silicon ingot furnace with an explosion-proof pressure relief structure according to the invention;
fig. 4 is a schematic structural diagram of a point a in fig. 1.
In the drawings:
1. a top plate; 2. a furnace body; 3. a feed inlet; 4. a damping mechanism; 5. a cooling mechanism; 6. a single chip controller; 7. a first support column; 8. a pressure gauge; 9. a bearing wall; 10. clamping a hoop; 11. measuring temperature points; 12. a heat insulation cage; 13. a heater; 14. a quartz crucible; 15. a graphite crucible; 16. a heat exchange station; 17. a second support column; 18. cushion blocks; 19. an upper insulation board; 20. a heat insulation plate; 21. a side heat insulation plate; 22. a bottom insulation board; 23. a base; 24. sleeving a column; 25. a spring; 26. a support bar; 27. an air outlet pipe; 28. a butt joint plate; 29. an adsorption block; 30. an ice storage chamber; 31. a threaded cap; 32. a fan; 33. an air outlet pipeline; 34. a waste heat recovery mechanism; 35. a water inlet; 36. a water outlet; 37. a filter box; 38. (ii) a 39. A spray head; 40. a steam outlet; 41. a cold water pipe; 42. flakes; 43. a water outlet pipe; 44. and (4) a pump.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides a technical solution: a quasi-monocrystalline silicon ingot furnace with an explosion-proof pressure relief structure comprises a top plate 1, a furnace body 2, a feeding hole 3, a damping mechanism 4, a cooling mechanism 5, a single chip microcomputer controller 6, a first supporting column 7, a pressure gauge 8, a bearing wall 9, a clamp 10, a temperature measuring point 11 and a waste heat recovery mechanism 34, wherein the first supporting column 7 is welded on the right side of the bottom end of the top plate 1, the clamp 10 wraps the outer wall of the first supporting column 7, the bearing wall 9 is connected with the outer wall of the left side of the clamp 10, the furnace body 2 is fixed on the outer wall of the left side of the bearing wall 9, the feeding hole 3 is formed in the middle of the outer wall of the top end of the furnace body 2, the temperature measuring point 11 is arranged at the bottom end of the furnace body 2, the damping mechanism 4 is arranged on the outer wall of the bottom end of the first supporting column 7, the single chip microcomputer controller 6 is arranged in the middle of the top end of the top plate 1, the cooling mechanism 5 is installed on the outer wall of the right side of the single chip microcomputer controller 6, the pressure gauge 8 is located on the right side of the outer wall of the top end of the furnace body 2, furnace body 2 is provided with water inlet 35 and delivery port 36, delivery port 36 is connected with rose box 37, be provided with filter screen 38 in the rose box 37, the export end of rose box 37 is provided with shower nozzle 39, rose box 37 is connected with waste heat recovery mechanism 34, waste heat recovery mechanism 34's top is provided with steam outlet 40, be provided with the cold water pipe 41 that becomes the matrix type range in the waste heat recovery mechanism 34, the lateral surface of every cold water pipe 41 all is provided with scale 42, waste heat recovery mechanism 34's bottom is provided with outlet pipe 43, outlet pipe 43 is connected with pump 44, pump 44 is connected with water inlet 35.
In this embodiment, an upper heat insulation board 19 with an air guide cylinder and a heat insulation cage 12 are arranged above the inside of the furnace body 2, a quartz crucible 14 is arranged in the middle of the furnace body, a graphite crucible 15 is arranged outside the quartz crucible 14, a heater 13 is arranged on the periphery of the graphite crucible 15, a heat exchange table 16 is arranged below the graphite crucible 15, a bottom heat insulation board 22 supported by a second support column 17 is arranged below the inside of the furnace body 2, the second support column 17 supports the heat exchange table 16 simultaneously, the second support column 17 is of a boss structure, a cushion block 18 made of a graphite hard felt material with the thickness of 5mm is sleeved on a boss of the second support column 17, and the bottom heat insulation board 22 is supported by the cushion block 18. Through the cushion 18 of establishing on the cover at second support column 17, can promote the height of end heated board 22, along with the shifting up of end heated board 22, the spacing of thermal-insulated cage 12 also shifts up, just can be closed with end heated board 22. The bottom heat insulation plate 22 and the heat insulation cage 12 move upwards, so that in the silicon material melting stage, the heating space is small, the heat loss is small, and the cost is reduced. In the crystal growth stage, the heat insulation cage 12 is lifted upwards, the bottom heat insulation plate 22 is opened, and the gap between the heat insulation cage 12 and the bottom heat insulation plate 22 is gradually increased. The whole upward movement of bottom insulation board 22 has changed the heat radiation angle, reduces crucible edge region radiating effect for the temperature all around of long brilliant in-process bottom is slower than the middle temperature heat dissipation, and long brilliant interface can be convex partially, effectively avoids the brilliant preferential growth of edge length, is favorable to middle zone toward growing all around, increase single crystal area ratio.
In another embodiment, a cushion block 18 made of a graphite hard felt material with a thickness of 10mm is sleeved on a boss of the second supporting column 17, the cushion block 18 supports a bottom heat insulation plate 22, a heat insulation plate 20 made of a graphite hard felt material is arranged around the edge of the bottom of the heat exchange table 16, the heat insulation plate 20 is in a bolt and screw structure and is connected with the heat exchange table 16, and the thickness of the heat insulation plate is 10-30 mm.
Furthermore, the thickness of the heat insulation plate can be 10-15, 15-25 mm or 25-30 mm.
In this embodiment, the bottom insulation board 22 moves upward, so that in the stage of melting the silicon material, the heating space is small, the heat loss is small, and the cost is reduced. In the crystal growth stage, the bottom heat-insulation plate 22 moves upwards integrally to change the heat radiation angle and reduce the heat dissipation effect of the edge area of the crucible, and in addition, the heat-insulation plates 20 are arranged around the edge of the bottom of the heat exchange table 16, so that the corner area of the quartz crucible is more heat-insulation and slow in heat dissipation, the crystal grain growth speed of the edge area of the crucible is further inhibited, a more convex solid-liquid interface is obtained, and the quality of the monocrystalline silicon is further improved.
In another embodiment, a cushion block 18 made of 10mm graphite hard felt is sleeved on a boss of the second supporting column 17, the cushion block 18 supports a bottom heat insulation plate 22, a side heat insulation plate 21 is attached to the periphery of the bottom end of the side face of the heat insulation cage 12, the side heat insulation plate 21 is made of the graphite hard felt, the heat insulation cage 12 and the side heat insulation plate 21 are attached together in a bayonet clamping manner, the thickness of the side heat insulation plate 21 is 50-70 mm, and the height of the side heat insulation plate 21 is not more than the distance between the heat exchange table 16 and the bottom heat insulation plate 22.
Further, the thickness of the side heat insulation plate 21 is 50-55 mm, 55-60 mm, 60-65 mm or 65-70 mm.
Further, this embodiment may be combined with the solution of providing heat shields 20 around the bottom edge of the heat exchange station 16. Wherein the side heat insulation plates 21 have a height flush with the lower surface of the heat insulation plate 20 disposed around the bottom edge of the heat exchange stage 16.
In this embodiment, the bottom insulation board 22 moves upward, so that in the stage of melting the silicon material, the heating space is small, the heat loss is small, and the cost is reduced. In the crystal growth stage, the bottom insulation board 22 moves upwards integrally to change the heat radiation angle, and the heat dissipation effect of the edge area of the crucible is reduced. The lateral heat insulation plates 21 are attached to the periphery of the bottom end of the side face of the heat insulation cage 12, so that the heat insulation effect of the corner region of the quartz crucible can be improved, the preferential growth of crystal grains near the crucible wall is inhibited, a convex solid-liquid interface is obtained, the preferential growth of crystal grains growing at the edge is effectively avoided, the growth from the middle region to the periphery is facilitated, and the area ratio of single crystals is increased.
In this embodiment, damper 4 includes base 23, the post 24 is established to the cover, spring 25 and bracing piece 26, and the inner wall top of base 23 is provided with the cover and establishes post 24, the bottom outer wall that the post 24 was established to the cover has linked spring 25, and the bottom outer wall of spring 25 settles and have bracing piece 26, be welding integrated structure between the bottom outer wall of spring 25 and the inner wall bottom of bracing piece 26, and the cover establishes post 24 and constitutes elastic construction through spring 25 and bracing piece 26, when this ingot furnace is processed monocrystalline silicon, easily rock because of the machine and lead to manometer 8 unstable structure to appear damaging, establish post 24 through the cover, spring 25 and bracing piece 26's setting, can reach the effect of bradyseism when the machine rocks, spring 25 has good shock attenuation, the antidetonation function, the stability and the security of ingot furnace have been improved, the life of ingot furnace has been prolonged.
In this embodiment, the cooling mechanism 5 includes an air outlet pipe 27, a butt plate 28, an adsorption block 29, an ice storage chamber 30, a threaded cover 31, a fan 32 and an air outlet pipe 33, and a butt plate 28 is disposed at the bottom end of the inner wall of the air outlet pipe 27, the adsorption block 29 is disposed in the middle of the inner wall of the air outlet pipe 27, the end of the air outlet pipe 27 is connected with the ice storage chamber 30, the threaded cover 31 is installed at the left side of the top end of the ice storage chamber 30, an air outlet pipe 33 is bonded to the outer wall of the right side of the ice storage chamber 30, the fan 32 is fixed in the middle of the air outlet pipe 33, the adsorption block 29 is tightly bonded to the middle of the inner wall of the air outlet pipe 27, the ice storage chamber 30 and the air outlet pipe 33 are communicated with each other, ice cubes can be placed in the ice storage chamber 30 by opening the threaded cover 31, and then the fan 32 is matched with each other, so that the discharged gas is transferred into the ice storage chamber 30 under the setting of the air outlet pipe 27 when reporting forms, utilize the harmful substance in the adsorption block 29 gas to handle and adsorb, cool down gas on through the inside ice-cube of ice-storage chamber 30 after that, thereby effectual completion is to exhaust gas's processing, avoid leading to the explosion because of ingot furnace temperature and pressure value exceed standard easily, make ingot furnace discharge liquid object lead to the occurence of failure, temperature measurement point 11 is symmetrical about the bottom central point of furnace body 2 puts and is the symmetric distribution, and roof 1, first support column 7, for welding integrated structure between carrying wall 9 and the furnace body 2, through the setting of a plurality of temperature measurement points 11 of furnace body 2 outer wall, thereby make furnace body 2 more stable when processing, the safety of furnace body 2 has been guaranteed.
The working principle of the invention is as follows: firstly, materials for processing can be placed in a furnace body 2 through the arrangement of a feed inlet 3, a top plate 1, a first support column 7 and a base 23 are fixed, the furnace body 2 is fixed with the first support column 7 through the arrangement of a bearing wall 9 and a clamp 10, a spring 25 has good shock absorption and shock resistance functions, the shock absorption effect can be achieved when the machine shakes through the arrangement of a sleeve column 24, the spring 25 and a support rod 26, the stability and the safety of the ingot furnace are improved, the internal temperature can be timely detected through a temperature measuring point 11 arranged at the bottom end in the processing process of the furnace body 2, the pressure in the furnace body 2 is monitored through a pressure gauge 8, when the pressure value exceeds the standard, a butt joint plate 28 at the bottom end of an air outlet pipeline 27 can be exploded, then the gas in the furnace body 2 enters a gas outlet pipeline 27 to enter a chamber 30, and an adsorption block 29 is arranged, can effectually prevent that the harmful substance in the gas from discharging, utilize to open screw cap 31 and can place the ice-cube in ice-storage chamber 30, utilize the air conditioning on the ice-cube to cool down gas, through fan 32, air-out pipeline 33 and single chip microcomputer controller 6's setting after that for gas outgoing avoids leading to the explosion easily because of ingot furnace temperature and pressure value exceed standard, makes ingot furnace discharge liquid object lead to the occurence of failure.
When the furnace body needs to be cooled, cooling water enters from a water inlet of the furnace body and flows out from a water outlet, the cooling effect is achieved, the furnace body is prevented from being hot-cracked in the heating process, the cooling water is discharged from the water outlet and enters a filter box, impurities of the cooling water are removed, the nozzle is prevented from being blocked, the filtered cooling water enters a waste heat recovery mechanism through the nozzle, the nozzle can be in contact with a cold water pipe in the waste heat recovery mechanism in a larger area, the outer side surface of the cold water pipe is provided with scales, the contact area of the cooling water is increased, the temperature of the cooling water can be better reduced, steam generated in the waste heat recovery mechanism is discharged through a steam outlet and is used by other equipment, and the cooled cooling water is sent to an ingot furnace through a pump, so that the waste heat is recovered and utilized, water circulation is formed, and resources are saved Good cooling effect and energy conservation.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The utility model provides a quasi monocrystalline silicon ingot furnace with explosion-proof pressure release structure which characterized in that: comprises a top plate (1), a furnace body (2), a feed inlet (3), a damping mechanism (4), a cooling mechanism (5), a singlechip controller (6), a first support column (7), a pressure gauge (8), a bearing wall (9), a clamp (10), a temperature measuring point (11) and a waste heat recovery mechanism (34), wherein the first support column (7) is welded on the right side of the bottom end of the top plate (1), the clamp (10) is wrapped on the outer wall of the first support column (7), the bearing wall (9) is connected on the outer wall of the left side of the clamp (10), the furnace body (2) is fixed on the outer wall of the left side of the bearing wall (9), the feed inlet (3) is arranged in the middle of the outer wall of the top end of the furnace body (2), the temperature measuring point (11) is arranged at the bottom end of the furnace body (2), the damping mechanism (4) is arranged on the outer wall of the bottom end of the first support column (7), the singlechip controller (6) is arranged in the middle of the top end of the top plate (1), and the right side outer wall of single chip microcomputer controller (6) is installed with cooling body (5), manometer (8) are located the top outer wall right side of furnace body (2), furnace body (2) is provided with water inlet (35) and delivery port (36), delivery port (36) are connected with rose box (37), be provided with filter screen (38) in rose box (37), the export end of rose box (37) is provided with shower nozzle (39), rose box (37) are connected with waste heat recovery mechanism (34), the top of waste heat recovery mechanism (34) is provided with steam outlet (40), be provided with cold water pipe (41) that the matrix type was arranged in waste heat recovery mechanism (34), the lateral surface of every cold water pipe (41) all is provided with scale (42), the bottom of waste heat recovery mechanism (34) is provided with outlet pipe (43), outlet pipe (43) are connected with pump (44), the pump (44) is connected with the water inlet (35).
2. The quasi-monocrystalline silicon ingot furnace with the explosion-proof pressure relief structure according to claim 1, characterized in that: an upper heat insulation plate (19) with an air guide cylinder and a heat insulation cage (12) are arranged above the inner portion of the furnace body (2), a quartz crucible (14) is arranged in the middle of the furnace body, a graphite crucible (15) is arranged on the outer side of the quartz crucible (14), heaters (13) are arranged on the periphery of the graphite crucible (15), and a heat exchange table (16) is arranged below the graphite crucible (15).
3. The quasi-monocrystalline silicon ingot furnace with the explosion-proof pressure relief structure according to claim 1, characterized in that: the bottom heat-insulation board (22) supported by the second supporting columns (17) is arranged below the inner portion of the furnace body (2), the second supporting columns (17) support the heat exchange table (16) at the same time, the second supporting columns (17) are of boss structures, cushion blocks (18) with certain thicknesses are sleeved on bosses of the second supporting columns (17), and the bottom heat-insulation board (22) is supported by the cushion blocks (18).
4. The quasi-monocrystalline silicon ingot furnace with the explosion-proof pressure relief structure according to claim 3, characterized in that: the thickness of the cushion block (18) is 0-20 mm, and the cushion block (18) is made of a graphite hard felt.
5. The quasi-monocrystalline silicon ingot furnace with the explosion-proof pressure relief structure according to claim 3, characterized in that: the heat exchange table is characterized in that heat insulation plates (20) with certain thickness are arranged on the periphery of the bottom edge of the heat exchange table (16), and the thickness of each heat insulation plate (20) is 10-30 mm.
6. The quasi-monocrystalline silicon ingot furnace with the explosion-proof pressure relief structure according to claim 1, characterized in that: shock-absorbing mechanism (4) are including base (23), cover and are established post (24), spring (25) and bracing piece (26), and the inner wall top of base (23) is provided with the cover and establish post (24), the bottom outer wall that post (24) were established to the cover has linked up spring (25), and the bottom outer wall of spring (25) settles and have bracing piece (26), be welding integrated structure between the bottom outer wall of spring (25) and the inner wall bottom of bracing piece (26), and cover and establish post (24) and pass through spring (25) and bracing piece (26) constitution elastic construction.
7. The quasi-monocrystalline silicon ingot furnace with the explosion-proof pressure relief structure according to claim 1, characterized in that: the cooling mechanism (5) comprises an air outlet pipeline (27), a butt joint plate (28), an adsorption block (29), an ice storage chamber (30), a threaded cover (31), a fan (32) and an air outlet pipeline (33), the butt joint plate (28) is arranged at the bottom end of the inner wall of the air outlet pipeline (27), the adsorption block (29) is arranged in the middle of the inner wall of the air outlet pipeline (27), and the end of the air outlet pipeline (27) is connected with the ice storage chamber (30).
8. The quasi-monocrystalline silicon ingot furnace with the explosion-proof pressure relief structure according to claim 7, characterized in that: threaded cover (31) are installed on the top left side of ice storage room (30), and the right side outer wall of ice storage room (30) bonds and has air-out pipeline (33), and the middle part of air-out pipeline (33) is fixed with fan (32), adsorbs piece (29) and closely laminates in the inner wall middle part of air outlet pipe way (27), and is the intercommunication between air outlet pipe way (27), ice storage room (30) and air-out pipeline (33).
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115354390A (en) * | 2022-07-05 | 2022-11-18 | 苏州步科斯新材料科技有限公司 | High-uniformity ingot casting single crystal thermal field structure and using method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204570087U (en) * | 2015-02-09 | 2015-08-19 | 洛阳巨子新能源科技有限公司 | A kind of ingot furnace waste-heat recovery device |
| CN206070039U (en) * | 2016-07-15 | 2017-04-05 | 江西赛维Ldk太阳能高科技有限公司 | A kind of thermal field structure of single crystal silicon ingot furnace |
| CN211595846U (en) * | 2019-12-30 | 2020-09-29 | 浙江天能电源材料有限公司 | Ingot furnace with explosion-proof pressure relief device |
-
2021
- 2021-05-08 CN CN202110497617.9A patent/CN113279060A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204570087U (en) * | 2015-02-09 | 2015-08-19 | 洛阳巨子新能源科技有限公司 | A kind of ingot furnace waste-heat recovery device |
| CN206070039U (en) * | 2016-07-15 | 2017-04-05 | 江西赛维Ldk太阳能高科技有限公司 | A kind of thermal field structure of single crystal silicon ingot furnace |
| CN211595846U (en) * | 2019-12-30 | 2020-09-29 | 浙江天能电源材料有限公司 | Ingot furnace with explosion-proof pressure relief device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115354390A (en) * | 2022-07-05 | 2022-11-18 | 苏州步科斯新材料科技有限公司 | High-uniformity ingot casting single crystal thermal field structure and using method |
| CN115354390B (en) * | 2022-07-05 | 2024-01-30 | 苏州步科斯新材料科技有限公司 | High homogeneity ingot casting single crystal thermal field structure |
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