CN113267840B - Sawtooth diaphragm, application thereof and debugging method of sawtooth diaphragm to light path - Google Patents
Sawtooth diaphragm, application thereof and debugging method of sawtooth diaphragm to light path Download PDFInfo
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- CN113267840B CN113267840B CN202110500874.3A CN202110500874A CN113267840B CN 113267840 B CN113267840 B CN 113267840B CN 202110500874 A CN202110500874 A CN 202110500874A CN 113267840 B CN113267840 B CN 113267840B
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- G—PHYSICS
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Abstract
The invention relates to a sawtooth diaphragm and application thereof and a debugging method of the sawtooth diaphragm to a light path, belonging to the technical field of optics.A circular sawtooth structure, a first annular sawtooth structure and a second annular sawtooth structure are sequentially etched on an optical plane of the sawtooth diaphragm from inside to outside.
Description
Technical Field
The invention belongs to the technical field of optics, and particularly relates to a sawtooth diaphragm, application thereof and a debugging method of the sawtooth diaphragm to a light path.
Background
The large-caliber high-power laser device can create unprecedented extreme state conditions such as strong electric field, strong magnetic field, high pressure and the like in a laboratory environment, and plays an irreplaceable role in a plurality of advanced scientific and technical fields such as inertial confinement fusion, high energy density physics, celestial body physics and the like. With the continuing advancement of sophisticated physical experimentation, there is a demand for higher energy and higher power for Large caliber high power devices, for which more Large caliber optical elements are required, such as the 7348 optical elements required to be installed in National Ignition devices (Baiden, P.A., et al, Large Optics for the National Ignition facility, FUSION SCIENCE AND TECHNOLOGY,2016.69: p.295-351). The production, processing and detection processes of the large-caliber optical element are very strict, so that the cost of the large-caliber optical element is extremely high. When designing the overall laser device, researchers balance system specifications with construction costs, and usually design the optical element with a very small (mm-order) optical aperture relative to the redundancy of the actual beam optical area. In addition, in order to improve the average flux and energy extraction efficiency of the laser, the large-aperture laser device usually employs a square aperture beam with ultra-high gaussian distribution, such as a square beam with 12-order ultra-gaussian distribution and 390mm × 390 mm. The ultrahigh-gaussian distribution light beam is evenly and smoothly transited from a maximum value to a zero intensity value at the edge, and obvious boundary points such as half-height width and the like are not easy to observe. The problems of various large-aperture optical elements of the laser device, low redundancy of the light transmission aperture of the large-aperture optical element, ultrahigh Gaussian distribution of the edge of a light beam and the like are solved, and how to finish the installation and debugging of the large-aperture optical element in a light path with high precision and high efficiency is a difficult problem with great application value.
At present, aiming at the difficult problems of installation and debugging of large-caliber optical elements, the overall design and processing level of a laser device is firstly improved, an optical mechanical pipeline and an optical element clamping groove are ensured to be positioned in the center of an optical axis as much as possible, and the requirement of coarse adjustment is met. Secondly, in order to meet the fine adjustment requirement, namely that the optical element is strictly positioned at the center of an optical axis, the projection of an actual infrared beam on the optical element is observed in an auxiliary mode by adopting methods such as 'infrared card development + night vision observation' and the like at present, the position of the optical element relative to the optical axis is further adjusted, a laser field drawing is pasted on a mechanical part outside the optical element, and the position of the actual beam relative to the optical element and the phenomenon of the existence of the card light are observed through the development of field drawing after the formal emission of large energy (about 100-300J). Because the edge of the infrared laser beam is in a super-gaussian distribution, the energy of the repetition frequency laser is small, and the like, the exact boundary point of the beam is difficult to observe and judge in actual operation, so that the adjustment and checking are required to be repeatedly performed, and time and labor are wasted. In addition, the method verifies the light beam transmission debugging effect by means of formal emission field drawing development, the cost is high, the laser device needs to be cooled for more than 3 hours after each formal emission (Wonterghem, B.M.V., et al, Operations on the National Ignition facility, FUSION SCIENCE AND TECHNOLOGY,2016.69: p.452-469), the time of more than 1 day is consumed by repeating the formal emission field drawing development, and the debugging efficiency is low.
Disclosure of Invention
Aiming at various defects of the prior art, the inventor finds out through repeated practice that: according to the ray optical transmission transformation principle, the edge of the initial object beam can represent the near-field transmission profile of the beam, and the center of the initial object beam can represent the far-field transmission position of the beam. Circular sawtooth structure, first annular sawtooth structure, second annular sawtooth structure of sculpture in proper order in the optical plane, circular sawtooth structure is used for fixing a position the far field central point of laser beam and puts, and first annular sawtooth structure, second annular sawtooth structure are used for fixing a position the near field border position of laser beam, and then form the sawtooth diaphragm of nearly far field location, cut into the sawtooth diaphragm in the light path can high accuracy, efficient completion laser device lead to the light debugging.
In order to achieve the purpose, the invention provides the following technical scheme:
the utility model provides a sawtooth diaphragm, its optical plane from inside to outside etches in proper order has circular sawtooth structure, first annular sawtooth structure and second annular sawtooth structure, circular sawtooth structure is located optical plane's center, and first annular sawtooth structure and second annular sawtooth structure use optical plane's center as the centre of a circle, the surrounding area of circular sawtooth structure between region, first annular sawtooth structure and the second annular sawtooth structure is light transmission area, and all areas except light transmission area are light tight region in the optical plane.
Further, the circumference of the circular sawtooth structure is integral multiple of the sawtooth width of the circular sawtooth structure.
Further, the sawtooth widths of the circular sawtooth structure, the first annular sawtooth structure and the second annular sawtooth structure are smaller than the sawtooth height.
Furthermore, the opaque area is plated with a gold film to improve the laser damage threshold value as a dark background.
Furthermore, the light-transmitting area is plated with an antireflection film to improve the light-transmitting effect.
The invention also provides the application of the sawtooth diaphragm to the near-far field positioning of the laser beam in the laser device, and the sawtooth diaphragm is positioned in the light path before the spatial filter, namely the laser beam firstly passes through the sawtooth diaphragm and then passes through the spatial filter.
Further, the laser beam forms a central bright area (i.e. a central bright spot) in its near field through the circular saw tooth structure, so as to locate the far field center position of the laser beam.
Further, first annular sawtooth structure is used for strengthening the contrast on the edge in the laser beam, second annular sawtooth structure is used for strengthening the contrast on the laser beam outer fringe, and the laser beam forms the clear clitellum bright area in its near field formation border through first annular sawtooth structure and second annular sawtooth structure for the near field border position of location laser beam.
Preferably, the laser beam enters the spatial filter after passing through the sawtooth diaphragm, high-frequency information such as sawtooth details and the like on a laser beam near field is smoothed after filtering and converting processing of the spatial filter, the laser beam near field presents an image with clear and bright edge girdle band and bright center position, and the observation of the edge position of the near field and the center position of a far field is facilitated. That is, the sawtooth diaphragm needs to be matched with a spatial filter to complete high-contrast display of the near-field edge and the far-field center.
Furthermore, the opaque region is used for extinction, and the contrast ratio of the transparent region relative to the opaque region is further enhanced.
Further, the diameter of the circular sawtooth structure is related to the overall amplification rate of the laser device, the half-height width of a bright area at the far-field center position and the processing technology.
Further, the saw tooth widths of the circular saw tooth structure, the first annular saw tooth structure and the second annular saw tooth structure are set according to a spatial filter of the laser device, and the saw tooth widths
Where k denotes a coefficient relating to the spatial filter aperture shape, f denotes a lens focal length in the spatial filter, D denotes a spatial filter aperture diameter, and λ denotes a laser beam wavelength.
Further, the spatial filter includes 2 lenses and apertures between the 2 lenses.
Further, the shape profile of the first annular sawtooth structure and the second annular sawtooth structure is the same as the shape profile of a standard diaphragm in the laser device, the size of the second annular sawtooth structure is the same as the size of the standard diaphragm, and the size of the first annular sawtooth structure is smaller than the size of the standard diaphragm.
Preferably, the standard diaphragm is a tooth diaphragm, which exists in an original optical path of the laser device, and the standard diaphragm and the spatial filter are used for beam shaping to obtain an ultra-high gaussian distribution beam with relatively uniform light intensity distribution, for example, the application number is CN201210001351.5, which is named as a method for determining the average radius of the tooth diaphragm with random gaussian beam shaping radius.
In addition, the invention also provides a method for debugging the optical path of the sawtooth diaphragm in the application of positioning the near field and the far field of the laser beam, which comprises the following steps:
step S1, inserting the sawtooth diaphragm and the standard diaphragm into two clamping grooves of the turntable respectively, enabling the laser beam to enter a spatial filter after passing through the sawtooth diaphragm, enabling the near field of the laser beam to present an image with clear and bright edge ring band and bright central position, and enabling the laser beam to continue to pass through an optical link and enter an optical element to be debugged;
s2, adjusting the horizontal position and the vertical position of the optical element to be debugged to ensure that the central position of the optical element to be debugged coincides with the bright area of the near-field central position of the laser beam, and adjusting the pitching attitude and the side-swinging attitude of the optical element to be debugged to ensure that the distance between the edge position of the clear aperture of the optical element to be debugged and the bright area of the near-field ring of the laser beam is equal;
step S3, all optical elements to be debugged are sequentially adjusted along the transmission direction of the laser beam, so that the optical elements to be debugged are positioned at the center of the optical axis of the laser beam, and the phenomena of near-field light blocking and far-field drift are avoided;
and step S4, switching the standard diaphragm back to the optical path through the turntable, and finishing the debugging of the optical path.
Further, in step S1, the distance between the two card slots and the center of the turntable is the same, and the saw-tooth diaphragm and the standard diaphragm are switched by the turntable to have the same posture in the optical path, and at this time, the saw-tooth diaphragm represents the feature information of the standard diaphragm.
Furthermore, the rotary disc rotates in an electric control mode, and the switching positions of the sawtooth diaphragm and the standard diaphragm are ensured to be consistent.
The invention has the beneficial effects that:
1. the circular sawtooth structure is adopted to represent the far field position of the laser beam, the first annular sawtooth structure and the second annular sawtooth structure are adopted to represent the edge position of the near field of the laser beam, an image with clear and bright edge girdle and bright central position is formed in the near field of the laser beam, the contrast with the opaque area is obvious, and the observation, the measurement and the light path adjustment are convenient.
2. The laser beam enters the spatial filter after passing through the sawtooth diaphragm, high-frequency information such as sawtooth details and the like on a near field of the laser beam is uniformly slipped after the filtering and converting processing of the spatial filter, and the near field of the laser beam presents an image with clear and bright edge girdle band and bright central position, so that the near field edge position and the far field central position can be observed conveniently.
3. According to the position difference between the central position of the optical element to be debugged and the bright area of the near-field central position of the laser beam, the horizontal position and the vertical position of the optical element to be debugged are adjusted, and according to the distance between the edge position of the light-passing aperture of the optical element to be debugged and the bright area of the near-field ring band of the laser beam, the pitching posture and the side-swinging posture of the optical element to be debugged are adjusted, so that the dimension of the optical element to be debugged is adjusted and decomposed, and the optical path debugging work is ensured to be clear and orderly.
4. The sawtooth diaphragm is accurately positioned, the development and repeated verification of a formal reflection field drawing are not needed, the time is saved, and the debugging efficiency is high.
5. The sawtooth diaphragm and the standard diaphragm are switched through the rotary disc, the electric control mode does not need to be adjusted repeatedly, the sawtooth diaphragm and the standard diaphragm are consistent in position in the light path, repeatability is high, and simplicity and convenience are achieved.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a sawtooth diaphragm;
FIG. 2 is an enlarged schematic view of a circular saw tooth structure;
FIG. 3 is a schematic diagram of a sawtooth diaphragm applied to a laser device for optical path debugging;
FIG. 4(a) is a simulated near field image before laser beam filtering, FIG. 4(b) is a power spectral density diagram of FIG. 4(a), FIG. 4(c) is a simulated near field image after laser beam filtering, and FIG. 4(d) is a one-dimensional distribution of the filtered near field in the x-direction;
FIG. 5 is an actual near field image formed by the sawtooth diaphragm after filtering by a spatial filter;
FIG. 6 is a near-field image of a beam output by a laser device after a sawtooth diaphragm is used for debugging a light path;
fig. 7(a) is a three-dimensional diagram of a far-field focal spot of a light beam output by a laser device after a light path is adjusted by using a sawtooth diaphragm, fig. 7(b) is a plan view of the far-field focal spot, fig. 7(c) is a schematic diagram of an energy ring-to-ring ratio, and fig. 7(d) is a schematic diagram of far-field quality evaluation, wherein the abscissa of fig. 7(c) represents a diffraction limit multiple and the ordinate represents an energy ratio.
In the drawings: 1-circular sawtooth structure, 2-first annular sawtooth structure, 3-second annular sawtooth structure, 4-opaque region, 5-sawtooth diaphragm, 6-rotary table, 7-standard diaphragm, 8-spatial filter, 9-first lens, 10-aperture, 11-second lens, 12-optical link, 13-first optical element to be debugged, 14-second optical element to be debugged.
Detailed Description
In order to make the technical solutions of the present invention better understood, the following description of the technical solutions of the present invention with reference to the accompanying drawings of the present invention is made clearly and completely, and other similar embodiments obtained by a person of ordinary skill in the art without any creative effort based on the embodiments in the present application shall fall within the protection scope of the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are directions with reference to the drawings only, and thus, the directional terms are used for illustrating the present invention and not for limiting the present invention.
The first embodiment is as follows:
as shown in fig. 1 and fig. 2, a sawtooth diaphragm, its optical plane from inside to outside etches in proper order has circular sawtooth structure 1, first annular sawtooth structure 2 and second annular sawtooth structure 3, circular sawtooth structure 1 is located optical plane's center, and first annular sawtooth structure 2 and second annular sawtooth structure 3 use optical plane's center as the centre of a circle, the surrounding area between circular sawtooth structure 1, first annular sawtooth structure 2 and the second annular sawtooth structure 3 is light transmission area, and all areas except light transmission area in the optical plane are light tight region 4. Preferably, the light-transmitting area is plated with an antireflection film to improve the light-transmitting effect, and the light-tight area 4 is plated with a gold film to improve the laser damage threshold value and serve as a dark background.
The sawtooth diaphragm is used to fix a position the laser beam near far field in laser device, and is specific, and the laser beam is put bright zone (being central bright spot) through circular sawtooth structure 1 at its near field formation central point for the far field central point of location laser beam puts, the contrast of border in first annular sawtooth structure 2 is used for strengthening the laser beam, the contrast of border in second annular sawtooth structure 3 is used for strengthening the laser beam outer border, and the laser beam forms the clear clitellum bright zone in border in its near field through first annular sawtooth structure 2 and second annular sawtooth structure 3 for the near field border position of location laser beam.
The sawtooth diaphragm is located in the light path before the spatial filter 8, i.e. the laser beam passes the sawtooth diaphragm and then the spatial filter 8. The spatial filter 8 comprises a first lens 9, a second lens 11 and an aperture 10 located between the first lens 9 and the second lens 11. The opaque regions 4 are used to eliminate light, thereby enhancing the contrast of the transparent regions relative to the opaque regions 4. The laser beam enters the spatial filter 8 after passing through the sawtooth diaphragm, high-frequency information such as sawtooth details and the like on a laser beam near field is uniformly slipped after the filtering and converting processing of the spatial filter 8, and the laser beam near field presents an image with clear and bright edge girdle band and bright central position, so that the observation of the edge position of the near field and the central position of a far field is facilitated.
The circumference of the circular sawtooth structure 1 is an integral multiple of the sawtooth width w, and the diameter of the circular sawtooth structure 1 is related to the overall amplification rate of the laser device, the half-height width of a bright area at the far-field center position and the processing technology. The sawtooth widths w of the circular sawtooth structures 1, the first annular sawtooth structures 2 and the second annular sawtooth structures 3 are smaller than the sawtooth height h. The sawtooth widths w of the circular sawtooth structure 1, the first annular sawtooth structure 2 and the second annular sawtooth structure 3 are set according to the parameters of a spatial filter of the laser device, and the sawtooth widths
Where k denotes a coefficient related to the shape of the aperture of the spatial filter, such as a circular aperture, k 1.22, f denotes the focal length of the lens in the spatial filter, D denotes the aperture diameter of the spatial filter, and λ denotes the wavelength of the laser beam.
As shown in fig. 3, a standard diaphragm 7 is arranged in an original optical path of the laser device, the standard diaphragm 7 is a tooth-shaped diaphragm, and beam shaping is performed by using the standard diaphragm 7 and a spatial filter 8 to obtain an ultra-high-gaussian-distribution beam with relatively uniform light intensity distribution, such as CN201210001351.5, which is named as a method for determining the average radius of a sawtooth diaphragm with a random gaussian beam shaping radius. The shape profiles of the first annular sawtooth structure 2 and the second annular sawtooth structure 3 are the same as the shape profile of a standard diaphragm 7 in a laser device, the size of the second annular sawtooth structure 3 is the same as the size of the standard diaphragm 7, and the size of the first annular sawtooth structure 2 is smaller than the size of the standard diaphragm 7.
As shown in fig. 3, a method for debugging a light path in the above application by using a sawtooth diaphragm includes the following steps:
step S1, inserting the sawtooth diaphragm 5 and the standard diaphragm 7 into two slots of the rotary disk 6, respectively, wherein the two slots have the same distance from the center of the rotary disk 6, and switching the sawtooth diaphragm 5 and the standard diaphragm 7 through the rotary disk 6 to make the postures of the sawtooth diaphragm 5 and the standard diaphragm 7 in the optical path completely the same, at this time, the sawtooth diaphragm 5 represents the characteristic information of the standard diaphragm 7. Meanwhile, the rotary disc 6 rotates in an electric control mode, and the switching positions of the sawtooth diaphragm 5 and the standard diaphragm 7 are ensured to be consistent. After the laser beam passes through the sawtooth diaphragm 5 and enters the spatial filter 8, the near field of the laser beam presents an image with clear and bright edge ring zone and bright center position, and the laser beam continues to pass through the optical link 12 and enters the first optical element 13 to be debugged.
Step S2, adjusting the horizontal position and the vertical position of the first optical element to be debugged 13 to make the center position coincide with the bright area of the near-field center position of the laser beam, and adjusting the pitch attitude and the yaw attitude of the first optical element to be debugged 13 to make the edge position of the clear aperture equal to the distance between the bright areas of the near-field zones of the laser beam.
Step S3, sequentially adjusting the first optical element to be debugged 14 and other optical elements to be debugged along the transmission direction of the laser beam until all the optical elements to be debugged are adjusted.
And step S4, switching the standard diaphragm 7 back to the optical path through the turntable 6, and finishing the debugging of the optical path.
To sum up, according to the position difference between the central position of the optical element to be debugged and the bright area of the laser beam near-field central position, the horizontal position and the vertical position of the optical element to be debugged are adjusted, and according to the distance between the edge position of the clear aperture of the optical element to be debugged and the bright area of the laser beam near-field girdle, the pitching posture and the side-swinging posture of the optical element to be debugged are adjusted, so that the dimension of the optical element to be debugged is adjusted and decomposed, and the optical path debugging work is ensured to be clear and ordered. Meanwhile, the sawtooth diaphragm is accurately positioned, the development and repeated verification of the formal reflection field drawing are not needed, the time is saved, and the debugging efficiency is high. The sawtooth diaphragm 5 and the standard diaphragm 7 are switched through the rotary disc 6, the electric control mode does not need to be adjusted repeatedly, the sawtooth diaphragm 5 and the standard diaphragm 7 are consistent in position in the light path, repeatability is high, and simplicity and convenience are achieved.
Example two:
parts of this embodiment that are the same as those of the first embodiment are not described again, except that:
as shown in fig. 1 to 3, the circumference of the circular saw tooth structure 1 is 26 times of the saw tooth width, the overall magnification of the laser device is 8.48 times, and in order to ensure that the full width at half maximum of the bright zone at the far-field center position of the final beam of the laser device is less than 10mm, the diameter of the circular saw tooth structure 1 is 1.6mm in combination with the processing technology.
The first annular sawtooth structure 2, the second annular sawtooth structure 3 and the standard diaphragm 7 are all in 12-order super-Gaussian distribution, the softening factor is about 7.3%, the side length of the second annular sawtooth structure 3 and the standard diaphragm 7 is 48mm, and the side length of the first annular sawtooth structure 2 is 43 mm. In order to make the convolution effect in the y direction obviously smaller than that in the x direction, the sawtooth widths w of the circular sawtooth structure 1, the first annular sawtooth structure 2 and the second annular sawtooth structure 3 need to be smaller than the sawtooth height h. The focal length of the lens in the spatial filter is 12000mm, the small hole 10 of the spatial filter is a circular small hole, the diameter of the small hole is 3.2mm, k is 1.22, the wavelength of a laser beam is 1053nm, the combined machining precision is high, and the width of a sawtooth is 0.4 mm.
The non-light-tight area 4 in the optical plane is plated with a gold film to improve the laser damage threshold value which is more than or equal to 0.2J/cm2The transparent area is coated with an anti-reflection film to improve the light transmission effect, the inner transmittance of the transparent aperture is more than or equal to 99 percent, and the outer transmittance of the transparent aperture is less than or equal to 0.1％。
When the laser beam irradiates the sawtooth diaphragm 5, the near field of the beam starts to carry high-frequency detail components such as sawtooth, as shown in fig. 4(a), and the power spectral density is shown in fig. 4 (b). After the light beam near field carrying high-frequency detail components such as sawteeth is subjected to the smoothing action of the spatial filter 8, the components with the spatial frequency higher than the cut-off frequency of the small hole 10 in the light beam are filtered, the sawteeth detail disappears, as shown in fig. 4(c), the change condition of the edge of the outermost ring light beam is the same as that of the edge of the standard diaphragm, and the light beam boundary information of the standard diaphragm is represented. As can be clearly seen from fig. 4(c) and 4(d), the sawtooth diaphragm 5 and the spatial filter 8 cooperate with each other, so that the near field of the laser beam presents an image with a clear and bright edge zone and a bright center position, which is convenient for observing the edge position of the near field and the center position of the far field. Fig. 5 is an actual near-field image filtered by the sawtooth diaphragm 5, which coincides with the simulation result in fig. 4 (c).
Fig. 6 is a near-field image of the light beam outputted by the laser device after the optical path is debugged by using the sawtooth diaphragm 5, and it can be seen from fig. 6 that no light is blocked at the edge of the light beam, the light transmission of the laser device is good, and the development requirements of the normal operation and the precise physical experiment of the laser device are met. Fig. 7(a) to 7(d) are far-field characteristic diagrams of light beams outputted by the laser device after the optical path adjustment is performed by using the sawtooth diaphragm 5, and it can be seen from the diagrams that the far-field focal spot is about 36 times the diffraction limit, and the light beam focusing effect is excellent.
The present invention has been described in detail, and it should be understood that the detailed description and specific examples, while indicating the preferred embodiment of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.
Claims (8)
1. A sawtooth diaphragm is characterized in that a circular sawtooth structure, a first annular sawtooth structure and a second annular sawtooth structure are sequentially etched on an optical plane from inside to outside, the circular sawtooth structure is located in the center of the optical plane, the first annular sawtooth structure and the second annular sawtooth structure use the center of the optical plane as a circle center, surrounding areas of the circular sawtooth structure, between the first annular sawtooth structure and the second annular sawtooth structure are light-transmitting areas, and all areas except the light-transmitting areas in the optical plane are light-tight areas;
the sawtooth diaphragm is positioned in a light path in front of the spatial filter, a laser beam forms a central position bright area in a near field of the laser beam through the circular sawtooth structure to position the far field central position of the laser beam, and the laser beam forms an annular bright area with clear edges in the near field of the laser beam through the first annular sawtooth structure and the second annular sawtooth structure to position the near field edge position of the laser beam.
2. The sawtooth diaphragm of claim 1 wherein the circular sawtooth structure has a perimeter that is an integer multiple of its sawtooth width.
3. The sawtooth diaphragm of claim 1, wherein the sawtooth widths of the circular sawtooth structure, the first annular sawtooth structure, and the second annular sawtooth structure are less than the sawtooth height.
4. The sawtooth diaphragm of claim 1, wherein the opaque region is gold coated and the transparent region is antireflection coated.
5. A saw-tooth diaphragm according to any one of claims 1-4, wherein the saw-tooth widths of the circular saw-tooth structure, the first annular saw-tooth structure and the second annular saw-tooth structure are set according to a spatial filter of a laser device,
where k denotes a coefficient relating to the spatial filter aperture shape, f denotes a lens focal length in the spatial filter, D denotes a spatial filter aperture diameter, and λ denotes a laser beam wavelength.
6. The sawtooth diaphragm of claim 5, wherein the shape profile of the first annular sawtooth structure and the second annular sawtooth structure is the same as the shape profile of a standard diaphragm in a laser device, the size of the second annular sawtooth structure is the same as the size of the standard diaphragm, and the size of the first annular sawtooth structure is smaller than the size of the standard diaphragm.
7. A method for debugging a light path in application of a sawtooth diaphragm is characterized by comprising the following steps:
step S1, inserting the sawtooth diaphragm and the standard diaphragm into two clamping grooves of the turntable respectively, enabling the laser beam to enter a spatial filter after passing through the sawtooth diaphragm, enabling the near field of the laser beam to present an image with clear and bright edge ring band and bright central position, and enabling the laser beam to continue to pass through an optical link and enter an optical element to be debugged;
s2, adjusting the horizontal position and the vertical position of the optical element to be debugged to ensure that the central position of the optical element to be debugged coincides with the bright area of the near-field central position of the laser beam, and adjusting the pitching attitude and the side-swinging attitude of the optical element to be debugged to ensure that the distance between the edge position of the clear aperture of the optical element to be debugged and the bright area of the near-field ring of the laser beam is equal;
step S3, all optical elements to be debugged are sequentially adjusted along the transmission direction of the laser beam, so that the optical elements to be debugged are positioned at the center of the optical axis of the laser beam, and the phenomena of near-field light blocking and far-field drift are avoided;
and step S4, switching the standard diaphragm back to the optical path through the turntable, and finishing the debugging of the optical path.
8. The debugging method according to claim 7, wherein said turntable is rotated in an electric control mode to ensure that the sawtooth diaphragm is in accordance with the standard diaphragm switching position.
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