CN113258022A - Composite fine mask - Google Patents

Composite fine mask Download PDF

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Publication number
CN113258022A
CN113258022A CN202010084114.4A CN202010084114A CN113258022A CN 113258022 A CN113258022 A CN 113258022A CN 202010084114 A CN202010084114 A CN 202010084114A CN 113258022 A CN113258022 A CN 113258022A
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metal layer
region
thickness
composite
fine mask
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CN202010084114.4A
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Chinese (zh)
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CN113258022B (en
Inventor
吴学宪
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Immortal Industrial Co ltd
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Immortal Industrial Co ltd
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Priority to CN202010084114.4A priority Critical patent/CN113258022B/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/16Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Laminated Bodies (AREA)

Abstract

The invention discloses a composite fine mask which comprises a composite material sheet. A composite sheet includes a polymer layer, a first metal layer disposed on a first surface of the polymer layer, and a second metal layer disposed on a second surface of the polymer layer. The composite sheet has a first region and a second region, wherein the first region surrounds the second region. The thickness of one part of the first metal layer in the first area is larger than that of the other part of the first metal layer in the second area, and the thickness of one part of the second metal layer in the first area is larger than that of the other part of the second metal layer in the second area.

Description

Composite fine mask
Technical Field
The present invention relates to a composite fine mask (FHM), and more particularly, to a composite fine mask having a large thickness in a welding region.
Background
The composite fine mask may be used to pattern an Organic Light Emitting Diode (OLED) layer in a display device. However, in the prior art, the difficulty of successfully welding the frame to the welding region of the mask is high, and the poor design of the composite metal layer may cause uneven stress and bending, so that the probability of welding failure is increased.
Disclosure of Invention
The invention provides a composite fine mask, wherein the metal layer of the composite fine mask in a welding area has larger total thickness than the metal layer of the composite fine mask in a punching area, so that the phenomenon of uneven stress on a composite material sheet can be improved, the yield of the composite material sheet is improved, and the successful probability of frame welding can be improved.
In one embodiment, the present invention provides a composite fine mask including a composite sheet and a frame. The composite sheet includes a polymer layer, a first metal layer disposed on a first surface of the polymer layer, and a second metal layer disposed on a second surface of the polymer layer. The second surface is opposite to the first surface. The composite material sheet has a first region and a second region, the first region surrounding the second region, a portion of the first metal layer in the first region having a thickness greater than another portion of the first metal layer in the second region, and a portion of the second metal layer in the first region having a thickness greater than another portion of the second metal layer in the second region. The frame is welded to the first zone of the composite sheet.
Drawings
FIG. 1 is a schematic cross-sectional view of a composite sheet according to an embodiment of the present invention.
FIG. 2 is a schematic cross-sectional view of a composite fine mask and frame according to an embodiment of the invention.
The reference numbers illustrate:
100 composite sheet
102 polymer layer
104 first main metal layer
106 first auxiliary metal layer
108 first metal layer
110 second main metal layer
112 second auxiliary metal layer
114 second metal layer
116 clamp
118 frame
150 laser beam
R1 first region
R2 second region
S1 first surface
S2 second surface
T, T1, T2, T3, T4, T5, T' thickness
In the Z vertical direction
Detailed Description
The present invention may be understood by reference to the following detailed description taken in conjunction with the accompanying drawings, in which it is noted that, for the sake of brevity and clarity of the drawing, only a portion of the electronic device is depicted and described, and in which certain elements are not necessarily drawn to scale. In addition, the number and size of the elements in the drawings are merely illustrative and are not intended to limit the scope of the present invention.
In the following description and claims, the terms "including" and "comprising" are used in an open-ended fashion, and thus should be interpreted to mean "including, but not limited to …".
It will be understood that when an element or layer is referred to as being "on" or "connected to" another element or layer, it can be directly on or connected to the other element or layer or intervening elements or layers may be present (not directly). In contrast, when an element is referred to as being "directly on" or "directly connected to" another element or layer, there are no intervening elements or layers present therebetween.
Although the terms first, second, and third … may be used to describe various components, the components are not limited by this term. This term is used only to distinguish a single component from other components within the specification. The same terms may not be used in the claims, but instead first, second, and third … may be substituted for the elements in the claims in the order in which they are presented. Therefore, in the following description, a first constituent element may be a second constituent element in the claims.
It is to be understood that the embodiments described below may be implemented in various other embodiments, and that various changes, substitutions, and alterations may be made herein without departing from the spirit and scope of the invention.
Referring to fig. 1 to 2, fig. 1 is a schematic cross-sectional view of a composite material sheet according to an embodiment of the invention, and fig. 2 is a schematic cross-sectional view of a composite fine mask and a frame according to an embodiment of the invention. According to the embodiment, as shown in fig. 1, the composite sheet 100 has a first region R1 and a second region R2, the first region R1 may be, for example, a weldable region of the composite sheet 100, the second region R2 may be, for example, a perforated region of the composite sheet 100, and the first region R1 may surround the second region R2 in the vertical direction Z, but not limited thereto. Composite sheet 100 includes polymer layer 102, first metal layer 108, and second metal layer 114. The polymer layer 102 is disposed between the first metal layer 108 and the second metal layer 114, and a material of the polymer layer 102 may include Polyimide (PI), but is not limited thereto. According to this embodiment, the thickness T1 of the polymer layer 102 can range, for example, from 5 to 25 micrometers (μm) (5 μm ≦ T1 ≦ 25 μm), but is not so limited. The first metal layer 108 is disposed on the first surface S1 of the polymer layer 102 and may include a first main metal layer 104 and a first auxiliary metal layer 106, wherein the first main metal layer 104 is disposed between the first auxiliary metal layer 106 and the polymer layer 102. The first main metal layer 104 may be located at the first region R1 and the second region R2 of the composite sheet 100, and the first auxiliary metal layer 106 may be located at the first region R1 of the composite sheet 100. In some embodiments, a portion of the first auxiliary metal layer 106 may overlap the second region R2 in the vertical direction Z, but is not limited thereto. According to the present embodiment, the thickness T2 of the first main metal layer 104 may be, for example, in a range from 2 micrometers to 10 micrometers (2 micrometers ≦ T2 ≦ 10 micrometers), and the thickness T of the portion of the first metal layer 108 in the first region R1 (i.e., the sum of the thickness T2 of the first main metal layer 104 and the thickness T3 of the first auxiliary metal layer 106) may be, for example, in a range from 20 micrometers to 60 micrometers (20 micrometers ≦ T ≦ 60 micrometers), wherein the thickness T3 of the first auxiliary metal layer 106 may be adjusted according to the thickness T2 of the first main metal layer 104, so that the total thickness T of the portion of the first metal layer 108 in the first region R1 satisfies the above range, but not limited thereto. The material of the first main metal layer 104 and the first auxiliary metal layer 106 may include invar alloy (invar alloy) or other suitable metal materials, but is not limited thereto. According to the present embodiment, since the first metal layer 108 further includes the first auxiliary metal layer 106 in the first region R1 of the composite sheet 100, the thickness (i.e., the thickness T) of the first metal layer 108 in a part of the first region R1 is greater than the thickness (i.e., the thickness T2) of the first metal layer 108 in another part of the second region R2. The second metal layer 114 is disposed on a second surface S2 of the polymer layer 102 opposite to the first surface S1, and may include a second main metal layer 110 and a second auxiliary metal layer 112, wherein the second main metal layer 110 is disposed between the second auxiliary metal layer 112 and the polymer layer 102. The second main metal layer 110 may be located at the first region R1 and the second region R2 of the composite sheet 100, and the second auxiliary metal layer 112 may be located at the first region R1 of the composite sheet 100. According to the present embodiment, the thickness T4 of the second main metal layer 110 may be, for example, in a range of 2 micrometers to 10 micrometers (2 micrometers ≦ T4 ≦ 10 micrometers), and the total thickness T ' (i.e., the sum of the thickness T4 of the second main metal layer 110 and the thickness T5 of the second auxiliary metal layer 112) of the portion of the second metal layer 114 in the first region R1 may be, for example, in a range of 20 micrometers to 60 micrometers (20 micrometers ≦ T ' ≦ 60 micrometers), wherein the thickness T4 of the second auxiliary metal layer 112 may be adjusted according to the thickness T4 of the second main metal layer 110, so that the total thickness T ' of the portion of the second metal layer 114 in the first region R1 satisfies the above range, but is not limited thereto. The materials of the second main metal layer 110 and the second auxiliary metal layer 112 may be the same as those of the first main metal layer 104 and the first auxiliary metal layer 106, and thus, the description thereof is omitted. Since the second metal layer 114 of the present embodiment further includes the second auxiliary metal layer 112 in the first region R1, a thickness (i.e., thickness T') of a portion of the second metal layer 114 in the first region R1 may be greater than a thickness (i.e., thickness T4) of another portion of the second metal layer 114 in the second region R2. In addition, the thickness (i.e., the thickness T') of the portion of the second metal layer 114 in the first region R1 may be the same as the thickness (i.e., the thickness T) of the portion of the first metal layer 108 in the first region R1, but is not limited thereto. It should be noted that, although the first main metal layer 104, the first auxiliary metal layer 106, the second main metal layer 110 and the second auxiliary metal layer 112 have the same material in this embodiment, the invention is not limited thereto. In other embodiments, the first main metal layer 104, the first auxiliary metal layer 106, the second main metal layer 110, and the second auxiliary metal layer 112 may have the same or different suitable metal materials from each other. In addition, in the present embodiment, the thickness T2 of the first main metal layer 104 may be the same as the thickness T4 of the second main metal layer 110, and the thickness T3 of the first auxiliary metal layer 106 may be the same as the thickness T5 of the second auxiliary metal layer 112, but the invention is not limited thereto. In some embodiments, the thickness T2 may be different from the thickness T4, the thickness T3 may be different from the thickness T5, and the thickness T (the sum of the thicknesses T2 and T3) may be the same as the thickness T' (the sum of the thicknesses T4 and T5), but not limited thereto.
In summary, the first metal layer 108 and the second metal layer 114 of the composite sheet 100 of the present embodiment have a larger total thickness in the first region R1. Since the first region R1 of the composite sheet 100 is a solderable region, the second metal layer 114 may have a larger thickness in the first region R1 so that the composite sheet 100 is easier to solder to the frame by the second auxiliary metal layer 112 of the second metal layer 114. In addition, since the first metal layer 108 and the second metal layer 114 both have a larger thickness in the first region R1, the stress on both sides of the composite sheet 100 can be more uniform, and the phenomenon of stress non-uniformity caused by only one thicker metal layer can be improved, thereby improving the bending or deformation of the composite sheet 100.
Next, as shown in fig. 2, a welding process may be performed on the composite sheet 100. Prior to the welding process, the composite sheet 100 may be secured using a clamp (grip) 116, such as by using the clamp 116 to clamp a portion of the composite sheet 100 outside of the first region R1 to stretch the composite sheet 100 flat. Next, a welding process may be performed to weld the frame 118 to the first region R1 of the composite sheet 100, wherein the frame 118 may be connected with a portion of the second metal layer 114 of the composite sheet 100 that is located in the first region R1 and does not overlap the clamp 116 in the vertical direction Z. In detail, the frame 118 may be connected with a portion of the second auxiliary metal layer 112 of the second metal layer 114. The material of the frame 118 may include, but is not limited to, invar, stainless steel, or other suitable metallic materials, for example. Therefore, the material of the frame 118 may be the same as or different from the first metal layer 108 and/or the second metal layer 114, and the invention is not limited thereto. The welding process of the present embodiment may include, for example, a laser welding (laser welding) process, but is not limited to, welding the frame 118 to the first region R1 of the composite sheet 100 by the laser beam 150. Since the second metal layer 114 has the second auxiliary metal layer 112 and the first region R1 has a larger thickness, the frame 118 and the second metal layer 114 can be easily connected by eutectic melting during the soldering process, and further, in order to avoid the stress non-uniformity phenomenon caused by the second metal layer 114 only having a larger thickness in the first region R1 of the composite sheet 100, the first metal layer 108 has the first auxiliary metal layer 106 and the first region R1 has a larger thickness, so that the bending or deformation of the composite sheet 100 can be improved.
After the soldering process, a hole opening process may be performed on the composite material sheet 100 to form a plurality of patterned holes, thereby completing the fabrication of the composite fine mask 120. The opening process in the present embodiment may include, for example, a laser drilling (laser drilling) process, but is not limited thereto. The patterned holes can be applied in the manufacturing process of the display device, for example, to define the position of the organic light emitting diode layer.
In summary, the present invention provides a composite fine mask. The composite fine mask includes a sheet of composite material. The composite sheet includes a polymer layer, a first metal layer, and a second metal layer. The first metal layer and the second metal layer respectively comprise the first auxiliary metal layer and the second auxiliary metal layer in the weldable area, so that the first metal layer and the second metal layer have larger thickness, the composite material sheet can be easily welded on the frame, and the bending or deformation of the composite material sheet caused by uneven stress can be improved, thereby increasing the reliability and yield of the composite fine mask.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (6)

1. A composite fine mask, comprising:
a composite sheet comprising:
a polymer layer;
a first metal layer disposed on a first surface of the polymer layer;
a second metal layer disposed on a second surface of the polymer layer, the second surface being opposite the first surface, wherein the composite sheet has a first region and a second region, the first region surrounds the second region, a portion of the first metal layer in the first region has a thickness greater than another portion of the first metal layer in the second region, a portion of the second metal layer in the first region has a thickness greater than another portion of the second metal layer in the second region, and the second region of the composite sheet includes a plurality of patterned holes; and
a frame welded to the first zone of the composite sheet.
2. The composite fine mask according to claim 1, wherein the thicknesses of the portions of the first and second metal layers in the first region range from 20 to 60 micrometers, respectively.
3. The composite fine mask of claim 2, wherein the first metal layer comprises a first main metal layer and a first auxiliary metal layer, wherein the first main metal layer is located in both the first region and the second region, the first auxiliary metal layer is located in the first region, and the thickness of the first main metal layer is in a range of 2 microns to 10 microns, and the thickness of the portion of the first metal layer in the first region is the sum of the thicknesses of the first main metal layer and the first auxiliary metal layer.
4. The composite fine mask of claim 2, wherein the second metal layer comprises a second main metal layer and a second auxiliary metal layer, wherein the second main metal layer is located in both the first region and the second region, the second auxiliary metal layer is located in the first region, and the thickness of the second main metal layer is in a range of 2 microns to 10 microns, and the thickness of the portion of the second metal layer in the first region is the sum of the thicknesses of the second main metal layer and the second auxiliary metal layer.
5. The composite fine mask of claim 1, wherein said polymer layer comprises a polyimide material.
6. The composite fine mask of claim 1, wherein said first and second metal layers comprise invar and said frame comprises invar or stainless steel.
CN202010084114.4A 2020-02-10 2020-02-10 Composite fine mask Active CN113258022B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010084114.4A CN113258022B (en) 2020-02-10 2020-02-10 Composite fine mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010084114.4A CN113258022B (en) 2020-02-10 2020-02-10 Composite fine mask

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CN113258022A true CN113258022A (en) 2021-08-13
CN113258022B CN113258022B (en) 2024-04-09

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102186666A (en) * 2008-08-18 2011-09-14 多产研究有限责任公司 Formable light weight composites
CN102376854A (en) * 2010-08-09 2012-03-14 Lg伊诺特有限公司 Light emitting device and lighting system having the same
US20120183800A1 (en) * 2011-01-19 2012-07-19 GM Global Technology Operations LLC Resistance spot welding manufacture and method of forming same
US20120214018A1 (en) * 2011-02-21 2012-08-23 Productive Research Llc Composite materials including regions differing in properties and methods
TW201616931A (en) * 2014-10-29 2016-05-01 健鼎科技股份有限公司 Circuit structure and manufacturing method for circuit structure
CN105568218A (en) * 2016-01-11 2016-05-11 友达光电股份有限公司 a mask component
TWM573458U (en) * 2018-08-22 2019-01-21 鋆洤科技股份有限公司 Fine metal mask
TWM583556U (en) * 2019-06-14 2019-09-11 鋆洤科技股份有限公司 Fine metal mask

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102186666A (en) * 2008-08-18 2011-09-14 多产研究有限责任公司 Formable light weight composites
CN105034482A (en) * 2008-08-18 2015-11-11 多产研究有限责任公司 Formable light weight composites
CN102376854A (en) * 2010-08-09 2012-03-14 Lg伊诺特有限公司 Light emitting device and lighting system having the same
US20120183800A1 (en) * 2011-01-19 2012-07-19 GM Global Technology Operations LLC Resistance spot welding manufacture and method of forming same
US20120214018A1 (en) * 2011-02-21 2012-08-23 Productive Research Llc Composite materials including regions differing in properties and methods
CN103501996A (en) * 2011-02-21 2014-01-08 多产研究有限责任公司 Composite materials including regions differing in properties and methods
CN105415769A (en) * 2011-02-21 2016-03-23 多产研究有限责任公司 Composite materials including regions differing in properties and methods
TW201616931A (en) * 2014-10-29 2016-05-01 健鼎科技股份有限公司 Circuit structure and manufacturing method for circuit structure
CN105568218A (en) * 2016-01-11 2016-05-11 友达光电股份有限公司 a mask component
TWM573458U (en) * 2018-08-22 2019-01-21 鋆洤科技股份有限公司 Fine metal mask
TWM583556U (en) * 2019-06-14 2019-09-11 鋆洤科技股份有限公司 Fine metal mask

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