CN113237997A - Ozone concentration detection device, detection system and detection method - Google Patents
Ozone concentration detection device, detection system and detection method Download PDFInfo
- Publication number
- CN113237997A CN113237997A CN202110320294.6A CN202110320294A CN113237997A CN 113237997 A CN113237997 A CN 113237997A CN 202110320294 A CN202110320294 A CN 202110320294A CN 113237997 A CN113237997 A CN 113237997A
- Authority
- CN
- China
- Prior art keywords
- ozone
- ozone concentration
- pipeline
- concentration
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims abstract description 158
- 238000001514 detection method Methods 0.000 title claims abstract description 60
- 238000000034 method Methods 0.000 claims abstract description 21
- 238000005086 pumping Methods 0.000 claims description 25
- 239000007789 gas Substances 0.000 claims description 18
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 12
- 239000001301 oxygen Substances 0.000 claims description 12
- 229910052760 oxygen Inorganic materials 0.000 claims description 12
- 238000010926 purge Methods 0.000 claims description 7
- 230000006641 stabilisation Effects 0.000 claims description 2
- 238000011105 stabilization Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000013101 initial test Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/0039—O3
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Physics & Mathematics (AREA)
- Combustion & Propulsion (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
Abstract
The invention discloses an ozone concentration detection device, a detection system and a detection method, wherein the ozone concentration detection device comprises an ozone inlet pipeline, an ozone outlet pipeline, an ozone concentration meter and a control box, wherein two ends of the ozone concentration meter are respectively connected with the ozone inlet pipeline and the ozone outlet pipeline, and the control box is arranged on the ozone concentration meter; wherein the control box comprises a power module and a digital display for supplying power to the ozone concentration meter, and an ozone concentration acquisition and detection unit. The ozone concentration detection device provided by the invention can be used as an independent tool applied to the same machine or different machines to detect the ozone concentrations of different devices; the device is arranged in a detection system, the concentration of ozone before entering the cavity can be accurately detected, the detection time is short, the field detection can be realized by applying the ozone concentration detection method, the cost is low, the production economic value is high, and the process difference among different cavities can be solved.
Description
Technical Field
The invention relates to the technical field of deposition reaction of SACVD semiconductor equipment, in particular to an ozone concentration detection device, system and method.
Background
When the SACVD semiconductor equipment is used for deposition reaction, ozone gas is needed, and is output by an ozone generator and transported into a reaction cavity through a process pipeline to react with TEOS (TEOS, TEPO and TEB) to generate a silicon oxide (BPSG) film. Ozone concentration is an important indicator that affects film deposition rate, refractive index, stress, wet etch rate, pore-filling capability, and process stability.
The ozone concentration output by the ozone generator is certain, and under different temperatures or after passing through process pipelines with different lengths, the ozone is lost to different degrees, so that the concentration conveyed to the reaction cavity can be changed, the change can influence the stability of the process and the process difference between the cavities, and in order to avoid the phenomenon, the concentration of the ozone before entering the cavities needs to be detected.
Disclosure of Invention
In view of this, the invention discloses and provides an ozone concentration detection device, a detection system and a detection method, so as to keep the concentration of ozone entering a reaction cavity consistent and accurately calibrate the concentration of ozone at different temperatures or after process pipelines with different lengths.
The technical scheme provided by the invention is that the ozone concentration detection device comprises an ozone inlet pipeline, an ozone outlet pipeline, an ozone concentration meter and a control box, wherein two ends of the ozone concentration meter are respectively connected with the ozone inlet pipeline and the ozone outlet pipeline; wherein the control box comprises a power module and a digital display for supplying power to the ozone concentration meter, and an ozone concentration acquisition and detection unit.
Furthermore, the power module, the ozone concentration acquisition and detection unit and the digital display unit are all integrated structures.
The invention also provides an ozone concentration detection system which comprises an air box (5), wherein the air box (5) receives and temporarily stores ozone gas output by the ozone generator (6), an output pipeline of the air box (5) is divided into two parallel pipelines and comprises a first pipeline and a side pumping pipeline, the first pipeline is connected with the reaction cavity (7), an ozone concentration detection device is arranged on the side pumping pipeline close to the outlet of the air box (5), and the side pumping pipeline is connected with an ozone decomposer (8).
Furthermore, the tail end of the bypass pumping pipeline is connected with a vacuum pump.
Finally, the invention also provides an ozone concentration detection method, which comprises the following steps:
1) arranging an ozone concentration detection device at an outlet close to the gas box (5) and on a side pumping pipeline to form an ozone concentration detection system;
2) evacuating residual gas in the side-pumping pipeline;
3) introducing oxygen into the side pumping pipeline, and purging the side pumping pipeline, wherein the flow of the introduced oxygen is controlled by an ozone generator;
4) starting an ozone generator, introducing ozone into the first branch and the side pumping pipeline simultaneously, and setting the initial concentration of the ozone to be C1;
5) detecting the concentration of ozone in the bypass pumping pipeline through a power supply detection device, reading the ozone concentration C2 of a digital display of the power supply detection device, and calculating the difference value between the ozone concentration C2 and the ozone concentration C1;
6) according to the difference value of the ozone concentration C2 and the ozone concentration C1, the concentration set values of the ozone generators of the same machine station in different periods or the concentrations of the ozone generators of different machine stations are finely adjusted, so that the ozone concentration entering the reaction cavity is always consistent in the process.
Further, the end of the side pumping pipeline in the step 2) is pumped out by a vacuum pump, wherein the pumping-out time of the vacuum pump is set to be 5-60 min.
Further, the flow rate of oxygen in the step 3) is 2000-30000sccm, and the time for purging the pipeline with oxygen is 5-60 min.
Further, the stabilization time of the ozone concentration set value C1 in the step 4) is kept between 1 and 10 min.
The ozone concentration detection device provided by the invention is simple in structure and convenient to apply, can be used as an independent tool to be applied to the same machine or different machines, and can detect the ozone concentrations of different devices; the device is arranged in the detection system to form an ozone concentration detection system, the concentration of ozone before entering the cavity can be accurately detected, the detection time is short, the field detection can be realized by applying one ozone concentration detection method, the cost is low, the production economic value is high, and the process difference among different cavities can be solved.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.
In order to more clearly illustrate the embodiments or technical solutions in the prior art of the present invention, the drawings used in the description of the embodiments or prior art will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of an ozone concentration influence curve provided by the disclosed embodiment of the present invention:
FIG. 2 is a schematic structural diagram of an ozone concentration detection apparatus according to an embodiment of the present disclosure;
FIG. 3 is a schematic structural diagram of an ozone concentration detection system according to an embodiment of the present disclosure;
FIG. 4 is a schematic flow chart of a method for detecting ozone concentration according to an embodiment of the disclosure.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Rather, they are merely examples of systems consistent with certain aspects of the invention, as detailed in the appended claims.
The unstable concentration of ozone will affect the deposition process between the chambers in the SACVD apparatus, as shown in fig. 1; to reduce process variation between chambers, the concentration of ozone needs to be accurately calibrated.
The embodiment provides an ozone concentration detection device, as shown in fig. 2, comprising an ozone inlet pipeline 1, an ozone outlet pipeline 2, an ozone concentration meter 3 and a control box 4, wherein two ends of the ozone concentration meter 3 are respectively connected with the ozone inlet pipeline 1 and the ozone outlet pipeline 2, and the control box 4 is arranged on the ozone concentration meter 3; wherein the control box 4 comprises a power module and a digital display for supplying power to the ozone concentration meter 3, and an ozone concentration acquisition and detection unit. The power supply supplies power to the ozone concentration meter, the ozone concentration can be detected by controlling the switch, the digital display outputs the ozone concentration through analog quantity, and the concentration is 0-500g/m corresponding to 0-5V3。
The power module, the ozone concentration acquisition and detection unit and the digital display unit are all integrated structures. Adopt miniaturized integrated design, realize that this control box can directly install on the ozone concentration meter, the outside only needs a power cord can normally work.
As shown in fig. 3, an ozone concentration detection system comprises an air tank 5, wherein the air tank 5 is used for receiving and temporarily storing ozone gas output by an ozone generator 6, an output pipeline of the air tank 5 is divided into two parallel pipelines, the two parallel pipelines comprise a first pipeline and a side pumping pipeline, the first pipeline is connected with a reaction cavity 7, an ozone concentration detection device is installed on the side pumping pipeline close to an outlet of the air tank 5, and the side pumping pipeline is connected with an ozone decomposer 8. The ozone in the system is conveyed out from the ozone generator in two directions, one is led to the reaction cavity to carry out chemical vapor deposition reaction, and the other is led to the side pumping pipeline when the deposition reaction is not carried out; arrange ozone detection device on other pump line way, can avoid frequently dismantling the technology pipeline that gets into the cavity, cause the risk that the granule sneaked into.
An ozone concentration detection method comprises the following steps:
1) arranging an ozone concentration detection device at an outlet close to the gas box 5 and on a side pumping pipeline to form an ozone concentration detection system;
2) evacuating residual gas in the side-pumping pipeline; and the end of the side pumping pipeline is connected with a vacuum pump, and residual gas is pumped out by the vacuum pump, so that the gas remained in the pipeline is pumped out completely, and the gas is prevented from remaining, wherein the pumping-out time of the vacuum pump is set to be any time within 5-60min and is adjusted according to actual conditions.
3) Introducing oxygen into the side pumping pipeline, and purging the side pumping pipeline, wherein the flow of the introduced oxygen is controlled by an ozone generator; when the ozone generator generates ozone, stable ozone flow control is needed, a certain time is needed for flow stability, the step adopts the preferable introducing time of 5-60min, the preferable flow of oxygen is 2000-30000sccm, and meanwhile, the oxygen purging can further purge the residual gas in the pipeline.
4) Setting the initial concentration of ozone to be C1, starting an ozone generator, and stabilizing the ozone concentration C1 for 1-10 min;
5) the power control of the detection device is started, the ozone concentration C2 of the digital display is read, and the difference between C2 and C1 is compared.
And finally, finely adjusting the concentration of the ozone generators of the same machine station in different periods or the concentration of the ozone generators of different machine stations according to the C1 and C2 tested at the beginning of the machine station, and finally aiming at enabling the concentration of the ozone entering the cavity to be consistent.
Wherein, for the same ozone generator, the concentration of the ozone actually generated by the ozone generator is attenuated and is smaller than the set value C1 along with the increase of the use time. At this point, the ozone concentration setting is increased to ensure that the ozone concentration reaching the reaction chamber is consistent with the initial test of C2.
The method of the embodiment can also ensure the consistency of the process, and can carry out fine adjustment on the ozone concentration of different machines at different periods or different machines; although the ozone concentration settings can be kept the same for different ozone generators, in practice each ozone generator will have a difference, i.e. the actual ozone concentration will have a difference, which will cause process differences, since the ozone concentration is one of the key factors affecting the process. For example, using the method and apparatus provided in this embodiment, a standard ozone concentration is selected, all the ozone concentration test results are compared with the standard, and the ozone concentration actually reaching the chamber can be detected by the ozone concentration test apparatus, and if the measured ozone concentration C2 is different from the standard concentration, the standard can be achieved by adjusting the set value C1.
Other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the invention and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims.
It will be understood that the invention is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the invention is limited only by the appended claims.
Claims (8)
1. The ozone concentration detection device is characterized by comprising an ozone inlet pipeline (1), an ozone outlet pipeline (2), an ozone concentration meter (3) and a control box (4), wherein two ends of the ozone concentration meter (3) are respectively connected with the ozone inlet pipeline (1) and the ozone outlet pipeline (2), and the control box (4) is arranged on the ozone concentration meter (3); wherein the control box (4) comprises a power module and a digital display for supplying power to the ozone concentration meter (3), and an ozone concentration acquisition and detection unit.
2. The ozone concentration detection device according to claim 1, wherein the power module, the ozone concentration acquisition and detection unit and the digital display unit are all integrated structures.
3. The utility model provides an ozone concentration detection system, its characterized in that includes gas tank (5), gas tank (5) are received, are kept in by the ozone gas of ozone generator (6) output, and the output pipeline of gas tank (5) divide into two parallelly connected pipelines, including pipeline one, other pipeline of taking out, pipeline one is connected with reaction cavity (7), is close to gas tank (5) exit, installs ozone concentration detection device on the other pipeline of taking out, other pipeline of taking out is connected with ozone decomposer (8).
4. The ozone concentration detection system of claim 3, wherein the end of the bypass line is connected to a vacuum pump.
5. An ozone concentration detection method is characterized by comprising the following steps:
1) arranging an ozone concentration detection device at an outlet close to the gas box (5) and on a side pumping pipeline to form an ozone concentration detection system;
2) evacuating residual gas in the side-pumping pipeline;
3) introducing oxygen into the side pumping pipeline, and purging the side pumping pipeline, wherein the flow of the introduced oxygen is controlled by an ozone generator;
4) starting an ozone generator, and setting the initial concentration of ozone to be C1;
5) detecting the concentration of ozone in the bypass pumping pipeline through a power supply detection device, reading the ozone concentration C2 of a digital display of the power supply detection device, and calculating the difference value between the ozone concentration C2 and the ozone concentration C1;
6) according to the difference value of the ozone concentration C2 and the ozone concentration C1, the concentration set values of the ozone generators of the same machine station in different periods or the concentrations of the ozone generators of different machine stations are finely adjusted, so that the ozone concentration entering the reaction cavity is always consistent in the process.
6. The method as claimed in claim 5, wherein the end of the bypass line in step 2) is evacuated by a vacuum pump, wherein the evacuation time of the vacuum pump is set to 5-60 min.
7. The method as claimed in claim 5, wherein the flow rate of oxygen in step 3) is 2000-30000sccm, and the time for purging the pipeline with oxygen is 5-60 min.
8. The method as claimed in claim 5, wherein the stabilization time of the ozone concentration set value C1 in step 4) is 1-10 min.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110320294.6A CN113237997A (en) | 2021-03-25 | 2021-03-25 | Ozone concentration detection device, detection system and detection method |
| CN202220684428.2U CN217278222U (en) | 2021-03-25 | 2022-03-25 | Ozone concentration control system and semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110320294.6A CN113237997A (en) | 2021-03-25 | 2021-03-25 | Ozone concentration detection device, detection system and detection method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113237997A true CN113237997A (en) | 2021-08-10 |
Family
ID=77130501
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110320294.6A Pending CN113237997A (en) | 2021-03-25 | 2021-03-25 | Ozone concentration detection device, detection system and detection method |
| CN202220684428.2U Active CN217278222U (en) | 2021-03-25 | 2022-03-25 | Ozone concentration control system and semiconductor device |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220684428.2U Active CN217278222U (en) | 2021-03-25 | 2022-03-25 | Ozone concentration control system and semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN113237997A (en) |
-
2021
- 2021-03-25 CN CN202110320294.6A patent/CN113237997A/en active Pending
-
2022
- 2022-03-25 CN CN202220684428.2U patent/CN217278222U/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN217278222U (en) | 2022-08-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102613325B1 (en) | Method of determining flow rate of gas | |
| US7237562B2 (en) | Substrate processing apparatus and control method of inert gas concentration | |
| KR102143678B1 (en) | Substrate processing apparatus, gas supply method, substrate processing method, and film forming method | |
| US10385457B2 (en) | Raw material gas supply apparatus, raw material gas supply method and storage medium | |
| US20020083984A1 (en) | System for and method of monitoring the flow of semiconductor process gases from a gas delivery system | |
| US6482266B1 (en) | Metal organic chemical vapor deposition method and apparatus | |
| KR102225988B1 (en) | Method of manufacturing semiconductor device, method of managing parts, substrate processing apparatus and substrate processing program | |
| KR20150044437A (en) | Method and device for supplying hydrogen-selenide mixed gas | |
| CN110323158B (en) | Substrate processing system and method for determining gas flow rate | |
| US10256101B2 (en) | Raw material gas supply apparatus, raw material gas supply method and storage medium | |
| CN113237997A (en) | Ozone concentration detection device, detection system and detection method | |
| US8925481B2 (en) | Systems and methods for measuring, monitoring and controlling ozone concentration | |
| KR100251134B1 (en) | Method for manufacturing semiconductor device | |
| CN110957235B (en) | Device and method for compensating process gas flow and semiconductor processing equipment | |
| CN111569594A (en) | Tail gas treatment device and semiconductor equipment | |
| JP4213331B2 (en) | Metal organic vapor phase growth method and metal organic vapor phase growth apparatus | |
| KR20090100811A (en) | Checking method and apparatus of mass flow controller | |
| US11326914B2 (en) | Flow rate measurement apparatus and method for more accurately measuring gas flow to a substrate processing system | |
| JP5008086B2 (en) | High-speed gas switching device with pressure adjustment function | |
| KR101236696B1 (en) | Substrate processing apparatus | |
| US11899476B2 (en) | Method and apparatus for measuring gas flow | |
| CN113631753A (en) | Apparatus and method for plasma treatment of containers | |
| JPH11204511A (en) | Formation apparatus for silicon thermal oxidation film | |
| KR102598332B1 (en) | System and Method for evaluating water vapor pumping performance of a vacuum pump | |
| US11535931B2 (en) | Method of manufacturing semiconductor device, method of managing parts, and recording medium |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20210810 |
|
| WD01 | Invention patent application deemed withdrawn after publication |