CN1132218C - 一种离子注入设备和离子源装置及将离子源装置定位的方法 - Google Patents

一种离子注入设备和离子源装置及将离子源装置定位的方法 Download PDF

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Publication number
CN1132218C
CN1132218C CN95108133A CN95108133A CN1132218C CN 1132218 C CN1132218 C CN 1132218C CN 95108133 A CN95108133 A CN 95108133A CN 95108133 A CN95108133 A CN 95108133A CN 1132218 C CN1132218 C CN 1132218C
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CN
China
Prior art keywords
ion
support
extraction elements
extraction
cabinet
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Expired - Fee Related
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CN95108133A
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English (en)
Chinese (zh)
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CN1119338A (zh
Inventor
F·R·特鲁爱拉
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Axcelis Technologies Inc
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Axcelis Technologies Inc
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Publication of CN1119338A publication Critical patent/CN1119338A/zh
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Publication of CN1132218C publication Critical patent/CN1132218C/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H10P30/20—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
CN95108133A 1994-06-29 1995-06-29 一种离子注入设备和离子源装置及将离子源装置定位的方法 Expired - Fee Related CN1132218C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/267,437 US5420415A (en) 1994-06-29 1994-06-29 Structure for alignment of an ion source aperture with a predetermined ion beam path
US267437 1994-06-29

Publications (2)

Publication Number Publication Date
CN1119338A CN1119338A (zh) 1996-03-27
CN1132218C true CN1132218C (zh) 2003-12-24

Family

ID=23018770

Family Applications (1)

Application Number Title Priority Date Filing Date
CN95108133A Expired - Fee Related CN1132218C (zh) 1994-06-29 1995-06-29 一种离子注入设备和离子源装置及将离子源装置定位的方法

Country Status (8)

Country Link
US (1) US5420415A (enExample)
EP (1) EP0690475B1 (enExample)
JP (1) JP3517762B2 (enExample)
KR (1) KR100261008B1 (enExample)
CN (1) CN1132218C (enExample)
DE (1) DE69511338T2 (enExample)
ES (1) ES2136798T3 (enExample)
TW (1) TW278209B (enExample)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2677295A (en) * 1995-06-07 1996-12-30 Applied Materials, Inc. Beam stop apparatus for an ion implanter
GB9515090D0 (en) * 1995-07-21 1995-09-20 Applied Materials Inc An ion beam apparatus
US6239440B1 (en) 1996-03-27 2001-05-29 Thermoceramix, L.L.C. Arc chamber for an ion implantation system
US6022258A (en) * 1996-03-27 2000-02-08 Thermoceramix, Llc ARC chamber for an ion implantation system
US5914494A (en) * 1996-03-27 1999-06-22 Thermoceramix, Llc Arc chamber for an ion implantation system
US5857889A (en) * 1996-03-27 1999-01-12 Thermoceramix, Llc Arc Chamber for an ion implantation system
US5763890A (en) * 1996-10-30 1998-06-09 Eaton Corporation Cathode mounting for ion source with indirectly heated cathode
US5703372A (en) * 1996-10-30 1997-12-30 Eaton Corporation Endcap for indirectly heated cathode of ion source
US5821677A (en) * 1996-12-05 1998-10-13 Eaton Corporation Ion source block filament with laybrinth conductive path
US5917186A (en) * 1997-09-09 1999-06-29 Seiko Instruments Inc. Focused ion beam optical axis adjustment method and focused ion beam apparatus
US6452338B1 (en) 1999-12-13 2002-09-17 Semequip, Inc. Electron beam ion source with integral low-temperature vaporizer
US6501078B1 (en) * 2000-03-16 2002-12-31 Applied Materials, Inc. Ion extraction assembly
US7064491B2 (en) * 2000-11-30 2006-06-20 Semequip, Inc. Ion implantation system and control method
JP3916929B2 (ja) * 2001-11-19 2007-05-23 株式会社昭和真空 イオンガン本体への付属部品の取付け方法及び取付け構造
US6688017B2 (en) * 2002-05-21 2004-02-10 Taiwan Semiconductor Manufacturing Co., Ltd. Method and apparatus for aligning an extraction electrode to an arc chamber
JP2004014422A (ja) * 2002-06-11 2004-01-15 Matsushita Electric Ind Co Ltd イオン注入装置
KR100461785B1 (ko) * 2002-06-17 2004-12-14 동부전자 주식회사 이온빔 발생장치의 일렉트로드 헤드 애퍼처의 정렬확인장치
KR20030096763A (ko) * 2002-06-17 2003-12-31 동부전자 주식회사 이온빔 발생장치의 일렉트로드 헤드
US20050242293A1 (en) * 2003-01-07 2005-11-03 Benveniste Victor M Mounting mechanism for plasma extraction aperture
US7145157B2 (en) * 2003-09-11 2006-12-05 Applied Materials, Inc. Kinematic ion implanter electrode mounting
US7087913B2 (en) * 2003-10-17 2006-08-08 Applied Materials, Inc. Ion implanter electrodes
US6992308B2 (en) * 2004-02-27 2006-01-31 Axcelis Technologies, Inc. Modulating ion beam current
JP4502191B2 (ja) * 2004-06-18 2010-07-14 ルネサスエレクトロニクス株式会社 イオンビーム引出電極およびイオン注入装置
KR100553716B1 (ko) * 2004-08-02 2006-02-24 삼성전자주식회사 이온 주입 설비의 이온 소스부
US7365346B2 (en) * 2004-12-29 2008-04-29 Matsushita Electric Industrial Co., Ltd. Ion-implanting apparatus, ion-implanting method, and device manufactured thereby
US7265368B2 (en) * 2005-05-13 2007-09-04 Applera Corporation Ion optical mounting assemblies
US7446326B2 (en) * 2005-08-31 2008-11-04 Varian Semiconductor Equipment Associates, Inc. Technique for improving ion implanter productivity
GB0608528D0 (en) * 2006-04-28 2006-06-07 Applied Materials Inc Front plate for an ion source
EP2026373B1 (de) * 2007-08-07 2010-02-17 Micronas GmbH Positioniereinrichtung zum Positionieren einer Blende in einem lonenstrahl
US7915597B2 (en) 2008-03-18 2011-03-29 Axcelis Technologies, Inc. Extraction electrode system for high current ion implanter
US8089052B2 (en) * 2008-04-24 2012-01-03 Axcelis Technologies, Inc. Ion source with adjustable aperture
CN103858201A (zh) * 2011-03-04 2014-06-11 珀金埃尔默健康科学股份有限公司 静电透镜及包括该静电透镜的系统
CN102956429B (zh) * 2011-08-22 2016-08-03 北京中科信电子装备有限公司 一种用于宽束离子注入机的引出电极系统
CN103187229A (zh) * 2011-12-30 2013-07-03 北京中科信电子装备有限公司 一种用于引出电极的滑动密封板装置
JP5956612B2 (ja) * 2012-12-19 2016-07-27 キヤノンアネルバ株式会社 グリッドアセンブリおよびイオンビームエッチング装置
US9006689B2 (en) * 2013-03-26 2015-04-14 Ion Technology Solutions, Llc Source bushing shielding
JP6388520B2 (ja) 2014-10-17 2018-09-12 住友重機械イオンテクノロジー株式会社 ビーム引出スリット構造、イオン源、及びイオン注入装置
US9318302B1 (en) 2015-03-31 2016-04-19 Axcelis Technologies, Inc. Integrated extraction electrode manipulator for ion source
TWI739793B (zh) * 2016-01-19 2021-09-21 美商艾克塞利斯科技公司 用於一離子植入系統之光學器件板的多件式電極孔、以及使用彼之離子植入系統
CN107910240B (zh) * 2017-12-13 2024-04-30 合肥中科离子医学技术装备有限公司 一种超导质子治疗装置离子源的验证工装
US10714296B2 (en) 2018-12-12 2020-07-14 Axcelis Technologies, Inc. Ion source with tailored extraction shape
CN119581300B (zh) * 2024-10-18 2025-10-31 北京烁科中科信电子装备有限公司 一种高能离子注入机光路对中装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3723785A (en) * 1972-05-23 1973-03-27 Atomic Energy Commission Deformable beam transport system with extraction port
US4847504A (en) * 1983-08-15 1989-07-11 Applied Materials, Inc. Apparatus and methods for ion implantation
US4580058A (en) * 1984-03-29 1986-04-01 Zymet, Inc. Scanning treatment apparatus
US4714834A (en) * 1984-05-09 1987-12-22 Atomic Energy Of Canada, Limited Method and apparatus for generating ion beams
US4985634A (en) * 1988-06-02 1991-01-15 Oesterreichische Investitionskredit Aktiengesellschaft And Ionen Mikrofabrications Ion beam lithography
US4883968A (en) * 1988-06-03 1989-11-28 Eaton Corporation Electron cyclotron resonance ion source
US5026997A (en) * 1989-11-13 1991-06-25 Eaton Corporation Elliptical ion beam distribution method and apparatus
GB9021629D0 (en) * 1990-10-04 1990-11-21 Superion Ltd Apparatus for and method of producing ion beams
US5306920A (en) * 1992-11-23 1994-04-26 Motorola, Inc. Ion implanter with beam resolving apparatus and method for implanting ions

Also Published As

Publication number Publication date
US5420415A (en) 1995-05-30
KR960002544A (ko) 1996-01-26
DE69511338T2 (de) 2000-03-02
KR100261008B1 (ko) 2000-08-01
EP0690475B1 (en) 1999-08-11
ES2136798T3 (es) 1999-12-01
TW278209B (enExample) 1996-06-11
EP0690475A1 (en) 1996-01-03
JPH0855596A (ja) 1996-02-27
JP3517762B2 (ja) 2004-04-12
DE69511338D1 (de) 1999-09-16
CN1119338A (zh) 1996-03-27

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