CN113215579B - Surface treatment method for radio frequency four-stage field acceleration cavity - Google Patents
Surface treatment method for radio frequency four-stage field acceleration cavity Download PDFInfo
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- CN113215579B CN113215579B CN202110264806.1A CN202110264806A CN113215579B CN 113215579 B CN113215579 B CN 113215579B CN 202110264806 A CN202110264806 A CN 202110264806A CN 113215579 B CN113215579 B CN 113215579B
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- 238000000034 method Methods 0.000 title claims abstract description 26
- 238000004381 surface treatment Methods 0.000 title claims abstract description 10
- 230000001133 acceleration Effects 0.000 title claims abstract description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 51
- 238000004140 cleaning Methods 0.000 claims abstract description 44
- 239000002253 acid Substances 0.000 claims abstract description 31
- 238000011010 flushing procedure Methods 0.000 claims abstract description 14
- 238000005406 washing Methods 0.000 claims abstract description 10
- 239000007788 liquid Substances 0.000 claims abstract description 4
- 230000002378 acidificating effect Effects 0.000 claims description 26
- 239000012459 cleaning agent Substances 0.000 claims description 26
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 15
- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 claims description 15
- 238000003756 stirring Methods 0.000 claims description 15
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 claims description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 10
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 10
- 239000003085 diluting agent Substances 0.000 claims description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 239000007864 aqueous solution Substances 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 3
- 238000000861 blow drying Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims description 2
- 238000010306 acid treatment Methods 0.000 claims 5
- 238000002161 passivation Methods 0.000 abstract description 21
- 230000000694 effects Effects 0.000 abstract description 12
- 238000001556 precipitation Methods 0.000 abstract description 7
- 238000005498 polishing Methods 0.000 abstract description 4
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 abstract description 3
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract description 2
- 239000000243 solution Substances 0.000 description 10
- 239000000306 component Substances 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 239000008367 deionised water Substances 0.000 description 6
- 229910021641 deionized water Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000005554 pickling Methods 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 238000002791 soaking Methods 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- 238000010790 dilution Methods 0.000 description 3
- 239000012895 dilution Substances 0.000 description 3
- 239000003344 environmental pollutant Substances 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- 239000004480 active ingredient Substances 0.000 description 1
- 238000007605 air drying Methods 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/05—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
- C23C22/06—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6
- C23C22/48—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6 not containing phosphates, hexavalent chromium compounds, fluorides or complex fluorides, molybdates, tungstates, vanadates or oxalates
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Detergent Compositions (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a surface treatment method of a radio frequency four-stage field acceleration cavity. The method comprises the following steps: 1) Washing the cavity to be treated by weak acid and then washing the cavity with high-pressure pure water; 2) And (3) passivating the cavity treated in the step 1) by weak acid, and then flushing the cavity by high-pressure pure water. The invention eliminates the use of chromic acid and other harmful acid liquor, precisely controls the polishing rate and thoroughly removes the residual chemical liquid on the surface through a plurality of steps (such as weak acid cleaning and passivation and high-pressure pure water flushing), has good cleaning effect, obvious mirror surface effect, no grain precipitation phenomenon and higher practical value after cleaning by the method.
Description
Technical Field
The invention belongs to the technical field of surface treatment, and particularly relates to a surface treatment method of a radio frequency four-stage field acceleration cavity.
Background
A radio frequency quaternary field acceleration cavity (RFQ) is one of the core components of an accelerator, and its surface condition directly affects its acceleration performance. The RFQ manufacturing process mainly comprises machining RFQ parts, surface treatment and welding. The surface of the RFQ component subjected to mechanical processing has a large amount of greasy dirt, an excessively thick oxide layer, other pollutants and the like, and the pollutants are required to be thoroughly removed, so that the surface of the cavity is bright and uniform, and no macroscopic oil, acid marks, water marks, oxide layers and the like exist.
At present, the common surface treatment methods at home and abroad mainly comprise hot alkali ultrasonic degreasing, mixed acid deoxidization layer, strong acid polishing, mixed acid passivation, dehydration and air drying, and deionized water is used for flushing between each step. The method has three main problems, namely (1) the mixed acid contains a large amount of chromic acid, and has great harm to human bodies and the environment; (2) The reaction rate of the acid liquor and the RFQ is high, so that over-polishing and grain precipitation of the surface of the cavity body can occur frequently; (3) The deionized water is not thoroughly washed, and acid liquor remains on the surface of the cavity, so that the performance of the cavity can be affected, and the surface of the cavity can be gradually corroded.
Disclosure of Invention
The invention aims to provide a surface treatment method of a radio frequency four-stage field acceleration cavity. The method is simple and feasible, safe and environment-friendly.
The invention provides a surface treatment method of a radio frequency four-stage field acceleration cavity, which comprises the following steps:
1) Washing the cavity to be treated by weak acid and then washing the cavity with high-pressure pure water;
2) And (3) passivating the cavity treated in the step 1) by weak acid, and then flushing the cavity by high-pressure pure water.
In the step 1) of weak acid cleaning, the weak acid cleaning agent used in the step of the method is composed of citric acid, sulfamic acid, hydrogen peroxide, n-butyl alcohol and water;
the ratio of the citric acid to the water is 1-5g:1L;
the proportion of sulfamic acid to water is 2-10 g/1L;
the ratio of the hydrogen peroxide to the water is 20-200mL:1L;
the ratio of the n-butanol to the water is 20-100mL:1L.
Specifically, the ratio of citric acid to water is 1.1g:1L, 1.25g:1L or 1.1-1.25g:1L;
the sulfamic acid to water ratio was 3.75g:1L, 4.75g:1L, 5.6g:1L, 6.25g:1L or 3.75-6.25g:1L;
the ratio of the hydrogen peroxide to the water is 37.5mL:1L, 47.5mL:1L, 56.25mL:1L, 62.5mL:1L or 37.5-62.5mL:1L;
the ratio of n-butanol to water was 37.5mL:1L, 47.5mL:1L, 56.25mL:1L, 62.5mL:1L or 37.5-62.5mL:1L;
in the weak acid cleaning step of the step 1), the temperature is 60-75 ℃; specifically 68 ℃ or 70 ℃;
the time is 1-5min; specifically 1.5min-2min;
in the high-pressure pure water flushing step, the pressure is 60-100mbar; specifically 70-80mbar; the time is 2-10min; specifically for 4-5min;
the weak acid cleaning is specifically stirring; more specifically, the cleaning surface is cleaned by using a stirring rod; more specifically, the distance between the stirring rod and the cleaning surface is 10-30cm;
stirring speed is 20-100rpm/min; specifically 40, 50, 70 or 80rpm/min or 40-80rpm/min.
In the weak acid passivation step of the step 2), the passivation solution is an aqueous solution of sulfamic acid.
Specifically, the concentration of the passivation solution is 2-15g/L; in particular 5.625g/L, 6.25g/L, 7.5g/L or 5.625-7.5g/L.
In the weak acid passivation step of the step 2), the passivation temperature is 10-40 ℃; specifically 15 ℃, 20 ℃, 30 ℃ and passivation time of 1-5min; specifically for 2min.
In the high-pressure pure water flushing step, the pressure is 60-100mbar; specifically 70-80mbar; the time is 2-10min; specifically for 4-5min.
The method further comprises, prior to said step 1), the following pretreatment steps a and b:
a. ultrasonically cleaning the cavity to be treated by using an acidic cleaning agent diluent;
b. flushing the cavity treated in the step a by high-pressure pure water;
in the step a, the acidic cleaning agent diluent consists of an acidic cleaning agent and water. The mass percentage concentration of the acidic cleaning agent in the acidic cleaning agent diluent is 2-20%; specifically, the content of the active ingredients can be 3%, 5%, 8% or 2-8%; the acidic cleaning agent can be various commonly used acidic ultrasonic cleaning agents for metals, such as acidic cleaning agents available from Alconox company under the product name of Citinox;
in the ultrasonic cleaning step, the temperature is 20-60 ℃; specifically 40 ℃, 50 ℃, 58 ℃ or 40-58 ℃;
the time is 0.5-1.5h; specifically 1h;
the power is 15-25kW; specifically 20kW.
In the flushing step of the step b, the pressure is 60-100mbar; specifically 70-80mbar; the time is 2-10min; specifically for 4-5min.
The method further comprises the steps of: dehydrating and drying the cavity treated in the step 2) by using absolute ethyl alcohol;
in the blow-drying step, the gas is specifically nitrogen or compressed air.
Compared with the prior art, the invention has the advantages that:
the invention eliminates the use of chromic acid and other harmful acid liquor, precisely controls the polishing rate and thoroughly removes the residual chemical liquid on the surface through a plurality of steps (such as weak acid cleaning and passivation and high-pressure pure water flushing), has good cleaning effect, obvious mirror surface effect, no grain precipitation phenomenon and higher practical value after cleaning by the method.
Drawings
FIG. 1 is a comparison of optical photographs of RFQ parts before and after cleaning under different cleaning conditions, and the left image is unwashed; the right panel shows after washing.
FIG. 2 is a comparison of optical photographs of RFQ parts before and after cleaning under different cleaning conditions, and the left plot is unwashed; the right panel shows after washing.
FIG. 3 is a comparison of optical photographs of RFQ parts before and after cleaning under different cleaning conditions, and the left plot is unwashed; the right panel shows after washing.
Detailed Description
The invention will be further illustrated with reference to the following specific examples, but the invention is not limited to the following examples. The methods are conventional methods unless otherwise specified. The starting materials are available from published commercial sources unless otherwise specified. The acidic cleaning agent diluents used in the following examples are each composed of an acidic cleaning agent and water; the mass percentage concentration of the acidic cleaning agent in the acidic cleaning agent diluent is 2%, 3%, 5% or 8%; available from Alconox corporation under the product name citronox.
Example 1
RFQ components were selected and sized approximately 80mm by 60mm by 40mm.
Pretreatment is firstly carried out, namely step 1) and step 2):
1) Placing the RFQ component in an acidic cleaning agent diluent (the mass percentage concentration of the acidic cleaning agent is 2%) at 50 ℃ for 1h (at 20 kW), and taking out the RFQ component;
2) The surface was rinsed with high pressure pure water at a pressure of 70mbar for 4min.
3) Then placing the mixture in a weak acid cleaning agent at 65 ℃ at a stirring speed of 50rmp/min, wherein the distance between a stirring rod and a cleaning face is 20cm, and the soaking time is 2min. At the end of the pickling, it was removed and the surface was rinsed with high-pressure pure water at a pressure of 70mbar for 4min.
4) Then placing the solution in a passivation tank for 2min at 20 ℃, wherein the passivation solution is an aqueous solution of sulfamic acid, and the preparation method is that 800L of deionized water is placed in the tank, and 4.5Kg of sulfamic acid is added. At the end of the passivation, it was removed and the surface was rinsed with high-pressure pure water at a pressure of 70mbar for 4min. And spraying absolute ethyl alcohol on the surface of the cavity, and drying the absolute ethyl alcohol by nitrogen.
The optical photographs before and after cleaning are shown in fig. 1, and the surface of the RFQ before cleaning (shown as the left diagram in fig. 1) is yellow and has a large amount of greasy dirt and oxide; the surface after cleaning (shown as the right diagram in fig. 1) has no oil stain and oxidation layer, the cleaning effect is good, the mirror surface effect is obvious, and the phenomenon of grain precipitation does not occur.
Example 2
RFQ components were selected and sized approximately 80mm by 60mm by 40mm.
Pretreatment is firstly carried out, namely step 1) and step 2):
1) The RFQ parts were placed in a 50 ℃ dilution of the acidic cleaner (wherein the mass percentage concentration of the acidic cleaner is 5%) for 0.5 hours (at 20 kW) and removed.
2) The surface was rinsed with high-pressure pure water at a pressure of 80mbar for 2min.
3) Then placing the mixture in a weak acid cleaning agent at 68 ℃ at a stirring rate of 40rmp/min, wherein the distance between a stirring rod and a cleaning face is 20cm, and the soaking time is 2min. At the end of the pickling, it was removed and the surface was rinsed with high-pressure pure water at a pressure of 80mbar for 2min.
4) Then placing the solution in a passivation tank for 5min at 15 ℃, wherein the passivation solution is an aqueous solution of sulfamic acid, and the preparation method is that 800L of deionized water is placed in the tank, and 6Kg of sulfamic acid is added. At the end of the passivation, it was removed and the surface was rinsed with high-pressure pure water at a pressure of 80mbar for 2min. And spraying absolute ethyl alcohol on the surface of the cavity, and drying the absolute ethyl alcohol by nitrogen.
The optical photographs before and after cleaning are shown in fig. 2, and the surface of the RFQ before cleaning (shown as the left diagram in fig. 2) is yellow and has a large amount of greasy dirt and oxide; the surface after cleaning (shown as the right diagram in fig. 2) has no oil stain and oxidation layer, the cleaning effect is good, the mirror surface effect is obvious, and the phenomenon of grain precipitation does not occur.
Example 3
RFQ components were selected and sized approximately 80mm by 60mm by 40mm.
Pretreatment is firstly carried out, namely step 1) and step 2):
1) The RFQ parts were placed in a 58 ℃ dilution of the acidic cleaner (wherein the mass percentage concentration of the acidic cleaner is 3%) for 1h (at 20 kW) and removed.
2) The surface was rinsed with high pressure pure water at a pressure of 60mbar for 5min.
3) Then placing the mixture in a weak acid cleaning agent at 70 ℃ at a stirring rate of 70rmp/min, wherein the distance between a stirring rod and a cleaning surface is 20cm, and the soaking time is 1.5 min. At the end of the pickling, it was removed and the surface was rinsed with high-pressure pure water at a pressure of 60mbar for 5min.
4) Then placing the solution in a passivation tank for 2min at 30 ℃, wherein the passivation solution is an aqueous solution of sulfamic acid, and the preparation method is that 800L of deionized water is placed in the tank, and 5Kg of sulfamic acid is added. At the end of the passivation, it was removed and the surface was rinsed with high-pressure pure water at a pressure of 60mbar for 5min. Spraying absolute ethyl alcohol on the surface of the cavity body, and drying the absolute ethyl alcohol by compressed air.
The optical photographs before and after cleaning are shown in fig. 3, and the surface of the RFQ before cleaning (shown as the left diagram in fig. 3) is yellow and has a large amount of greasy dirt and oxide; the surface after cleaning (shown as the right diagram in fig. 3) has no oil stain and oxidation layer, the cleaning effect is good, the mirror surface effect is obvious, and the phenomenon of grain precipitation does not occur.
Example 4
RFQ components were selected and sized approximately 80mm by 60mm by 40mm.
Pretreatment is firstly carried out, namely step 1) and step 2):
1) The RFQ parts were placed in a 40 ℃ dilution of the acidic cleaner (wherein the mass percentage concentration of the acidic cleaner is 8%) for 1.5 hours (at 20 kW) and removed.
2) The surface was rinsed with high pressure pure water at a pressure of 70mbar for 2min.
3) Then placing the mixture in a weak acid cleaning agent at 68 ℃ at a stirring rate of 80rmp/min, wherein the distance between a stirring rod and a cleaning face is 20cm, and the soaking time is 1 min. At the end of the pickling, it was removed and the surface was rinsed with high-pressure pure water at a pressure of 70mbar for 2min.
4) Then placing the solution in a passivation tank for 2min at 30 ℃, wherein the passivation solution is an aqueous solution of sulfamic acid, and the preparation method is that 800L of deionized water is placed in the tank, and 6Kg of sulfamic acid is added. At the end of the passivation, it was removed and the surface was rinsed with high-pressure pure water at a pressure of 70mbar for 2min. Spraying absolute ethyl alcohol on the surface of the cavity body, and drying the alcohol by compressed air.
The optical photographs before and after cleaning were not substantially different from fig. 3, the RFQ surface before cleaning was yellowish with a lot of oil stains and oxides; the surface after cleaning has no greasy dirt and oxidation layer, the cleaning effect is good, the mirror surface effect is obvious, and no grain precipitation phenomenon occurs.
Claims (8)
1. A surface treatment method of a radio frequency four-stage field acceleration cavity comprises the following steps:
1) Washing the cavity to be treated by weak acid and then washing the cavity with high-pressure pure water;
in the weak acid cleaning step of the step 1), the temperature is 60-75 DEG C o C, performing operation; the time is 1-5min;
in the weak acid cleaning step of the step 1), the weak acid cleaning is stirring;
the distance between the stirring rod and the cleaning surface is 10-30cm;
stirring speed is 20-100rpm/min;
in the weak acid cleaning step of the step 1), the weak acid cleaning agent used is composed of citric acid, sulfamic acid, hydrogen peroxide, n-butanol and water;
the ratio of the citric acid to the water is 1-5g:1L;
the proportion of sulfamic acid to water is 2-10 g/1L;
the ratio of the hydrogen peroxide to the water is 20-200mL:1L;
the ratio of the n-butanol to the water is 20-100mL: 1L;
2) Washing the cavity treated in the weak acid treatment step 1) with high-pressure pure water;
in the weak acid treatment step of the step 2), the treatment liquid is an aqueous solution of sulfamic acid;
in the weak acid treatment step of the step 2), the concentration of the treatment liquid is 2-15 g/L.
2. The method according to claim 1, characterized in that: in the step 1), the pressure is 60-100mbar in the high-pressure pure water flushing step; the time is 2-10 min.
3. The method according to claim 1 or 2, characterized in that: in the weak acid treatment step of the step 2), the treatment temperature is 10-40 ℃;
the treatment time is 1-5min;
in the high-pressure pure water flushing step, the pressure is 60-100mbar; the time is 2-10 min.
4. A method according to claim 3, characterized in that: in the weak acid treatment step of the step 2), the treatment time is 2min;
in the high-pressure pure water flushing step, the pressure is 70-80mbar; the time is 4-5min.
5. The method according to claim 1 or 2, characterized in that: the method further comprises, prior to said step 1), the following pretreatment steps a and b:
a. ultrasonically cleaning the cavity to be treated by using an acidic cleaning agent diluent;
b. and (3) flushing the cavity treated in the step 1) by high-pressure pure water.
6. The method according to claim 5, wherein: in the step a, the acidic cleaning agent diluent consists of an acidic cleaning agent and water;
in the acidic cleaning agent diluent, the mass percentage concentration of the acidic cleaning agent in the acidic cleaning agent diluent is 2-20%;
in the ultrasonic cleaning step, the temperature is 20-60 ℃;
the time is 0.1-1 h;
in the flushing step of the step b, the pressure is 60-100mbar; the time is 2-10 min.
7. The method according to claim 1 or 2, characterized in that: the method further comprises the steps of: and (3) dehydrating and drying the cavity treated in the step (2) by using absolute ethyl alcohol.
8. The method according to claim 7, wherein: in the blow-drying step, the gas is nitrogen or compressed air.
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