CN113215528A

CN113215528A - Display panel evaporation assembly, evaporation method and display panel

Info

Publication number: CN113215528A
Application number: CN202110465671.5A
Authority: CN
Inventors: 葛少雄
Original assignee: Wuhan Tianma Microelectronics Co Ltd
Current assignee: Wuhan Tianma Microelectronics Co Ltd
Priority date: 2021-04-28
Filing date: 2021-04-28
Publication date: 2021-08-06
Anticipated expiration: 2041-04-28
Also published as: CN113215528B

Abstract

The application discloses a display panel evaporation assembly, an evaporation method and a display panel. The array substrate of the display panel comprises an optical element setting area and a display area at least partially surrounding the optical element setting area, the display area is provided with a plurality of sub-pixels with different colors, the evaporation coating assembly comprises a plurality of shared mask plates used for evaporating a functional layer on the periphery side of the optical element setting area of the array substrate, the number of the shared mask plates is the same as that of the colors of the sub-pixels, a plurality of openings are formed in each shared mask plate corresponding to the functional area, orthographic projections of the openings of the shared mask plates on the array substrate are not overlapped with each other, the area of the openings is smaller than that of a public unit evaporated through the openings, and therefore in the public units evaporated through the openings of the shared mask plates, every two adjacent public units are at least partially overlapped to form the functional layer of the whole layer. The evaporation assembly improves the manufacturability of the display panel with the dug holes.

Description

Display panel evaporation assembly, evaporation method and display panel

Technical Field

The application relates to the field of display, in particular to an evaporation component for a display panel, an evaporation method and the display panel.

Background

Organic Light-Emitting diodes (OLEDs) have the advantages of simple structure, fast response speed, active Light emission, low power consumption, and the like, and have been widely applied to the display field of electronic devices such as mobile phones, tablet computers, televisions, and the like. In order to realize the functions of front-end camera shooting and the like, a hole needs to be dug in the display panel to place an optical element such as a camera.

Disclosure of Invention

The application aims to provide an evaporation assembly, an evaporation method and a display panel for the display panel, wherein the evaporation assembly can evaporate a common layer in a display area of the display panel with a hole, and the manufacturability of the display panel with the hole is improved.

In a first aspect, an embodiment of the present application provides an evaporation assembly for a display panel, where an array substrate of the display panel includes an optical element disposing region and a display region at least partially surrounding the optical element disposing region, and the display region is provided with a plurality of sub-pixels with different colors; the evaporation coating assembly comprises a plurality of common mask plates used for arranging area peripheral side evaporation coating functional layers on an optical element of an array substrate, the number of the common mask plates is the same as the number of colors of a plurality of sub-pixels, each common mask plate is provided with a plurality of openings corresponding to a functional area, orthographic projections of the plurality of openings of the common mask plates on the array substrate are not overlapped, the area of each opening is smaller than that of a public unit evaporated through the opening, and in a plurality of public units evaporated through a plurality of first openings of the common mask plates, every two adjacent public units are at least partially overlapped to form a whole layer of the functional layer.

In a second aspect, an embodiment of the present application further provides an evaporation method for a display panel, where an array substrate of the display panel includes an optical element disposing region and a display region at least partially surrounding the optical element disposing region, the display region is provided with a plurality of sub-pixels with different colors, and the evaporation method includes: adopt the coating by vaporization subassembly to set up district week side coating by vaporization functional layer at array substrate's optical element, the coating by vaporization subassembly includes a plurality of sharing mask plates, the quantity of sharing mask plate is the same with the quantity of a plurality of sub-pixel's colour, a plurality of openings have been seted up on every sharing mask plate, a plurality of openings of a plurality of sharing mask plates orthographic projection on array substrate do not overlap each other, and open-ended area is less than the area of the public unit through this opening coating by vaporization, make in a plurality of public units of a plurality of opening coating by vaporization of a plurality of sharing mask plates, every two adjacent public units overlap at least partially, in order to form the functional layer of whole layer.

In a third aspect, an embodiment of the present application further provides a display panel, which includes an array substrate, where the array substrate includes an optical element disposing area and a display area at least partially surrounding the optical element disposing area, the display area is provided with a plurality of sub-pixels with different colors, and a functional layer on a peripheral side of the optical element disposing area of the array substrate is formed by evaporation of the evaporation component used for the display panel.

According to the evaporation assembly, the evaporation method and the display panel for the display panel provided by the embodiment of the application, the array substrate of the display panel comprises an optical element setting area and a display area at least partially surrounding the optical element setting area, the display area is provided with a plurality of sub-pixels with different colors, the evaporation assembly comprises a plurality of common mask plates for evaporating a functional layer on the periphery side of the optical element setting area of the array substrate, the number of the common mask plates is the same as the number of the colors of the sub-pixels, each common mask plate is provided with a plurality of openings corresponding to the display area, orthographic projections of the plurality of openings of the common mask plates on the array substrate are not overlapped with each other, the area of the openings is smaller than that of a common unit evaporated through the openings, so that every two adjacent common units are at least partially overlapped in the plurality of common units evaporated through the plurality of openings of the common mask plates, to form a full layer of functional layer. The evaporation coating component utilizes a plurality of mask plates of the sub-pixels of the existing evaporation coating display area to perform evaporation coating in sequence respectively, so that a functional layer can be formed on the periphery of the excavated holes of the array substrate together, and the manufacturability of the display panel with the excavated holes is improved.

Drawings

Other features, objects, and advantages of the present application will become apparent from the following detailed description of non-limiting embodiments thereof, when read in conjunction with the accompanying drawings, in which like reference characters designate the same or similar parts throughout the figures thereof, and which are not to scale.

Fig. 1 is a schematic top view illustrating a display panel in the related art;

FIG. 2 is a schematic cross-sectional view of a sub-pixel of the display panel shown in FIG. 1;

FIG. 3 shows a schematic distribution diagram of functional layers of the display panel shown in FIG. 1;

fig. 4 is a schematic structural diagram illustrating an evaporation assembly for a display panel according to an embodiment of the present disclosure;

fig. 5 is a schematic structural diagram illustrating a first opening and a common unit evaporated by the first opening in the region N of the first common mask shown in fig. 4;

FIG. 6 is a schematic diagram illustrating an effect of the first common layer evaporated by the evaporation assembly shown in FIG. 4;

fig. 7 is a schematic structural diagram illustrating an evaporation assembly for a display panel according to another embodiment of the present disclosure;

fig. 8 is a schematic structural diagram illustrating an evaporation assembly for a display panel according to another embodiment of the present disclosure;

fig. 9 is a schematic view illustrating a layout structure of an electrode contact layer of the display panel shown in fig. 1 on an array substrate;

fig. 10 is a schematic structural diagram illustrating a third independent mask of an evaporation assembly for a display panel according to an embodiment of the present application;

fig. 11 is a schematic structural diagram illustrating a first independent mask of an evaporation assembly for a display panel according to an embodiment of the present application;

fig. 12 is a schematic structural diagram illustrating a second independent mask of an evaporation assembly for a display panel according to an embodiment of the present disclosure;

fig. 13 shows a schematic structural diagram of a display panel provided according to an embodiment of the present application.

Detailed Description

Features and exemplary embodiments of various aspects of the present application will be described in detail below, and in order to make objects, technical solutions and advantages of the present application more apparent, the present application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application. It will be apparent to one skilled in the art that the present application may be practiced without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the present application by illustrating examples thereof.

It is noted that, herein, relational terms such as third and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions.

It will be understood that when a layer, region or layer is referred to as being "on" or "over" another layer, region or layer in describing the structure of the component, it can be directly on the other layer, region or layer or intervening layers or regions may also be present. Also, if the component is turned over, one layer or region may be "under" or "beneath" another layer or region.

Fig. 1 is a schematic top view showing a related art display panel, fig. 2 is a schematic cross-sectional view showing a sub-pixel of the display panel shown in fig. 1, and fig. 3 is a schematic distribution diagram showing functional layers of the display panel shown in fig. 1.

The full screen technology is a relatively broad definition of the display industry for ultra-high screen ratio display device design. The ideal full screen adopts a frameless design, the front of the display device is completely the screen, and the screen proportion is pursued to be close to 100 percent so as to realize full screen display. But the actual situation is difficult to do. The main reason is that the front of the display device generally has components such as a headphone, a light sensor, a distance sensor, a front camera, and the like, especially the front camera. As shown in fig. 1 and 2, in order to place the front camera, a position is reserved in a display area of the display screen, for example, a hole is dug in a corresponding position of the display screen or a hole with a different shape is reserved to place the front camera.

Taking the OLED display panel as an example, as shown in fig. 1 and 2, the array substrate AR of the display panel includes an optical element disposition area OPA and a display area AA at least partially surrounding the optical element disposition area OPA. The optical element arrangement area OPA is a cutout for placing a front camera and the like, and the display area AA is provided with a plurality of sub-pixels PX of different colors.

The display panel further includes an electroluminescent layer EL on the array substrate AR, the electroluminescent layer EL including a first electrode layer P1, a second electrode layer P2, and a light emitting structure P3 between the first electrode layer P1 and the second electrode layer P2. Wherein the first electrode layer P1 includes a plurality of first electrodes P11, and each of the first electrodes P11, the light emitting structure P3 and the second electrode layer P2 forms one sub-pixel PX. A plurality of sub-pixels PX are arranged in the display area AA of the array substrate AR to form an electroluminescent layer EL. One of the first electrode layer P1 and the second electrode layer P2 is an anode, and the other is a cathode. Here, the first electrode layer P1 is used as an anode, and the second electrode layer P2 is used as a cathode.

The light emitting structure P3 of the sub-pixel PX may further include at least one of a Hole Injection Layer (HIL) P32, a Hole Transport Layer (HTL) P33, an Electron Injection Layer (EIL) P34, or an Electron Transport Layer (ETL) P35, in addition to the light emitting Layer (EML) P31, and the Electron injection Layer P34 and the Hole Transport Layer P33 are respectively disposed at both sides of the light emitting Layer P31, as required by design. In addition, a side of the second electrode P2 layer facing away from the array substrate AR is generally further provided with a protective layer P4, such as lithium fluoride LiF, an organic film CP, and the like.

The first electrode layer P1 of the sub-pixel PX is generally fabricated on the array substrate AR in advance by laser etching, physical vapor deposition, or the like, and the second electrode layer P2, the light emitting structure P3, and the protection layer P4 are generally fabricated by evaporating an organic material using a metal mask.

As shown in fig. 3, the array substrate AR further includes a first frame area FA1 at least partially surrounding the display area AA and a second frame area FA2 surrounding the first frame area FA 1. The array substrate AR further includes a functional layer laid on the periphery side of the optical element arrangement area OPA, the functional layer including a light-emitting layer P31, a first common layer PL1, a second common layer PL2, and a third common layer PL 3. Wherein the first common layer PL1 includes at least one of a hole injection layer P32, a hole transport layer P33, an electron injection layer P34, and an electron transport layer P35 laid over the display area AA; the second common layer PL2 comprises a second electrode layer P2 laid on the first frame area FA1 and the display area AA; the third common layer PL3 includes a protection layer P4 laid on the second frame area FA2, the first frame area FA1 and the display area AA.

In the related art, the sub-pixels PX in the display area AA are usually vapor-deposited by using a metal mask plate, but the optical element installation area OPA needs to be avoided when the entire functional layer laid on the display area AA is vapor-deposited. This just requires to set up the shielding piece around the mask plate is corresponding to optical element and sets up district OPA department, still needs to set up the fixed frame that supporting component will shelter from piece and mask plate simultaneously and is connected, but supporting component can occupy the area in display area, and the shielding piece also has the risk of sheltering from the inefficacy, leads to unable each functional layer of array substrate AR coating by vaporization that has optical element and sets up district OPA.

In order to solve the problems, the application provides an evaporation coating assembly for a display panel, which can be used for evaporating a functional layer on the side of a hole digging periphery of the display panel, so that the manufacturability of the display panel is improved.

Fig. 4 is a schematic structural diagram of an evaporation module for a display panel according to an embodiment of the present application, fig. 5 is a schematic structural diagram of an opening and a common unit for evaporation in a region N of a common mask shown in fig. 4, and fig. 6 is a schematic structural diagram of an effect of a first common layer evaporated by the evaporation module shown in fig. 4.

As shown in fig. 4 to 6, the evaporation module includes a plurality of common mask plates for evaporating the functional layer on the periphery of the optical element arrangement area OPA of the array substrate AR, and the number of the common mask plates is the same as the number of the colors of the plurality of sub-pixels. A plurality of openings are formed in each common mask plate, orthographic projections of the openings of the common mask plates on the array substrate AR are not overlapped, the area of each opening is smaller than that of a public unit evaporated through the opening, and therefore in a plurality of public units PU evaporated through the openings of the common mask plates, every two adjacent public units PU are at least partially overlapped to form a whole functional layer.

In some embodiments, as shown in fig. 1 and 2, the functional layer includes light emitting layers P31 of different colors located at a plurality of sub-pixels PX of the display area AA. Each common mask plate comprises a main body part 1a, the plurality of openings comprise a plurality of first openings K1 formed in the main body part 1a, orthographic projections of the plurality of first openings K1 of each common mask plate on the array substrate AR correspond to the light-emitting layers of the same color one by one, and materials of the light-emitting layers of the corresponding colors are evaporated to a display area AA of the array substrate AR through the first openings K1 by each common mask plate to form the light-emitting layers P31 of the corresponding colors.

In some embodiments, as shown in fig. 4, the functional layer includes a first common layer PL1 laid on the display area AA, and the first common layer PL1 may be at least one of a hole injection layer P32, a hole transport layer P33, an electron injection layer P34, and an electron transport layer P35 as described above. The material of the first common layer PL1 is sequentially evaporated to the display area AA of the array substrate AR through the respective first openings K1 by the plurality of common masks, respectively, to collectively form the first common layer PL 1.

Optionally, the plurality of sub-pixels includes a first color sub-pixel, a second color sub-pixel, and a third color sub-pixel. The first color sub-pixel may be a blue sub-pixel, the second color sub-pixel may be a green sub-pixel, and the third color sub-pixel may be a red sub-pixel.

The plurality of common mask plates include a first common mask plate 11, a second common mask plate 12 and a third common mask plate 13, first openings K1 of main body portions 1a of the first common mask plate 11, the second common mask plate 12 and the third common mask plate 13 are respectively used for evaporating light-emitting layers P31 of first color sub-pixels, second color sub-pixels and third color sub-pixels, and first openings K1 of the main body portions 1a of the first common mask plate 11, the second common mask plate 12 and the third common mask plate 13 are also used for evaporating a first common layer PL 1.

Because the first color sub-pixels, the second color sub-pixels and the third color sub-pixels are arranged in the display area AA, the optical element setting area OPA is avoided, and accordingly, the first opening K1 is not arranged in the optical element setting area OPA corresponding to the main body portion 1a of the first common mask plate 11, the second common mask plate 12 and the third common mask plate 13, so that the plurality of sub-pixels of the array substrate AR evaporated by the main body portion 1a of the first common mask plate 11, the second common mask plate 12 and the third common mask plate 13 are also respectively avoided from the optical element setting area OPA. The shielding layer and the supporting component connected with the shielding layer are not required to be arranged on the peripheral side of the mask plate corresponding to the digging hole, so that the manufacturability of the display panel with the digging hole is improved.

As shown in fig. 5 and 6, when the mask plate is used for evaporating sub-pixels with different colors, the size of the evaporated sub-pixels is generally slightly larger than the size of the opening of the mask plate, that is, a circle of overflow area (Shadow) is formed around the theoretically designed sub-pixels, and the width of the overflow area can be adjusted by adjusting process parameters, such as the evaporation temperature, the height between the mask plate and the array substrate, and the like, so that the width of the overflow area meets specific requirements.

Therefore, in the light-emitting layers P31 of the first color sub-pixel, the second color sub-pixel and the third color sub-pixel evaporated through the first opening K1 of each of the first common mask 11, the second common mask 12 and the third common mask 13, the overflow areas between every two adjacent light-emitting layers P31 at least partially overlap, and the width and the thickness of the overflow areas are controlled by adjusting process parameters, so that the overflow areas do not affect the light-emitting function of each light-emitting layer P31.

Further, in the plurality of common units PU formed by sequentially and respectively evaporating the first openings K1 of the first common mask 11, the second common mask 12, and the third common mask 13, every two adjacent common units PU are at least partially overlapped, that is, overflow regions of two adjacent common units PU are overlapped with each other, so that the first common layer PL1 of the whole layer can be formed. The width and thickness of the overflow region are controlled by adjusting process parameters so that the thickness of the first common layer PL1 as a whole is as uniform as possible.

It is understood that the plurality of sub-pixels may further include sub-pixels with more colors, such as yellow or white, and accordingly, the plurality of common masks 1 include more colors corresponding to the number of colors of the sub-pixels, and will not be described again.

The embodiment of the application provides a coating by vaporization subassembly for display panel, this display panel's array substrate AR includes optical element setting area OPA and at least part surrounds optical element setting area OPA's display area AA, this coating by vaporization subassembly is including being used for at array substrate's optical element setting area OPA week side coating by vaporization functional layer's a plurality of common mask plate, every common mask plate has seted up a plurality of openings corresponding to display area AA, a plurality of openings of a plurality of common mask plate orthographic projection on array substrate do not overlap each other, and open-ended area is less than the area through the public unit PU of this opening coating by vaporization, in a plurality of public unit PU of a plurality of opening coating by vaporization of a plurality of common mask plate, every two adjacent public unit PU partially overlap at least, in order to form the functional layer of whole layer. The evaporation coating component utilizes a plurality of mask plates of the sub-pixels of the existing evaporation coating display area to perform evaporation coating in sequence respectively, so that a functional layer can be formed on the periphery of the excavated holes of the array substrate together, and the manufacturability of the display panel with the excavated holes is improved.

Fig. 7 shows a schematic structural diagram of an evaporation assembly for a display panel according to another embodiment of the present application.

As shown in fig. 3 and 7, in some embodiments, the array substrate AR further includes a first frame area FA1, the first frame area FA1 at least partially surrounding the display area AA. The functional layer further includes a second common layer PL2 laid over the display area AA and the first border area FA1, the second common layer PL2 being located on a side of the first common layer PL1 away from the array substrate AR. Alternatively, the second common layer PL2 is the second electrode layer P2 of the sub-pixel PX, and in the embodiment of the present application, the second common layer PL2 is the cathode layer of the sub-pixel PX.

To this end, another evaporation assembly for a display panel provided in the embodiment of the present application is similar to the common mask structure shown in fig. 4 to 6, except that each common mask further includes a plurality of first connecting portions 1b located on an outer peripheral side of the main body portion 1a, the plurality of openings further includes a second opening K2 formed between two adjacent first connecting portions 1b, projections of the second openings K2 of the plurality of common masks 1 in the first frame area FA1 do not overlap each other and coincide with the first frame area FA1, the plurality of common masks sequentially evaporate a material of the second common layer PL2 to the first frame area FA1 of the array substrate AR through the respective second openings K2, and sequentially evaporate to the display area AA of the array substrate AR through the respective first openings K1, so as to collectively form the second common layer PL 2.

Still taking the example that the plurality of sub-pixels include a first color sub-pixel, a second color sub-pixel, and a third color sub-pixel, the plurality of common masks include a first common mask 11, a second common mask 12, and a third common mask 13. As shown in fig. 7, any one of the first, second, and third

common mask plates

11, 12, and 13 further includes a plurality of first connection portions 1b located on the outer peripheral side of the main body portion 1a, and a second opening K2 is formed between two adjacent first connection portions 1 b. The projections of the second openings K2 of the first, second, and third

common masks

11, 12, and 13 in the first frame region FA1 do not overlap each other and overlap the first frame region FA 1.

Optionally, the second openings K2 of the respective common masks are dispersedly arranged in the respective regions of the common masks, so that stress concentration is avoided, and the rigidity and strength of the common masks are improved. The shape of the second opening K2 of each common mask is not limited, and it is sufficient if the projections on the first frame area FA1 do not overlap each other and overlap the first frame area FA 1.

Further, the second opening K2 of each common mask and the respective evaporated common unit of the adjacent first opening K1 at least partially overlap each other, so that the common layer evaporated through the first opening K1 of each common mask and the common unit PU evaporated through the second opening K2 at least partially overlap, that is, the overflow areas of the adjacent two common units PU overlap each other, to form the second common layer PL2 of the whole layer as shown in fig. 3. The width and thickness of the overflow region are controlled by adjusting process parameters so that the thickness of the second common layer PL2 as a whole is as uniform as possible.

Thus, the first, second, and third

common masks

11, 12, and 13 sequentially and respectively evaporate the material of the second common layer PL2 to the first frame area FA1 of the array substrate AR through the respective second openings K2 and to the display area AA of the array substrate AR through the respective first openings K1 to collectively form the second common layer PL 2. In addition, the order of vapor deposition of the first common mask 11, the second common mask 12, and the third common mask 13 is not limited.

Fig. 8 shows a schematic structural diagram of an evaporation assembly for a display panel according to another embodiment of the present application.

As shown in fig. 3 and 8, in some embodiments, the array substrate AR further includes a second frame area FA2, and the second frame area FA2 is located at a side of the first frame area FA1 away from the display area AA. The functional layer further includes a third common layer PL3 laid on the display area AA, the first frame area FA1 and the second frame area FA2, the third common layer PL3 being located on a side of the second common layer PL2 away from the array substrate AR. Optionally, the third common layer PL3 is a protective layer P4 covering the second common layer PL 2.

To this end, another evaporation assembly for a display panel provided in the embodiment of the present application is similar to the common mask structure shown in fig. 7, except that each common mask 1 further includes a plurality of second connecting portions 1c located at a side of the plurality of first connecting portions 1b away from the main body portion 1a, the plurality of openings further includes a third opening K3 formed between two adjacent second connecting portions 1c, projections of the third openings K3 of the plurality of common mask 1 in the second frame area FA2 do not overlap each other and coincide with the second frame area FA2, the plurality of common mask 1 sequentially and respectively evaporate a material of the third common layer PL3 to the display area AA of the array substrate AR through the respective first openings K1, sequentially and respectively evaporate to the first frame area FA1 of the array substrate AR through the respective second openings K2, and sequentially and respectively evaporate to the second frame area FA2 AR of the array substrate AR through the respective third openings K3, to collectively form a third common layer PL 3.

Still taking the example that the plurality of sub-pixels include a first color sub-pixel, a second color sub-pixel, and a third color sub-pixel, the plurality of common masks include a first common mask 11, a second common mask 12, and a third common mask 13. As shown in fig. 8, any one of the first, second, and third

common masks

11, 12, and 13 further includes a plurality of second connection portions 1c located on a side of the plurality of first connection portions 1b away from the main body portion 1a, a third opening K3 is formed between two adjacent second connection portions 1c, and projections of the third openings K3 of the plurality of common masks 1 on the second frame area FA2 do not overlap each other and overlap the second frame area FA 2.

Optionally, the third openings K3 of the respective common masks are dispersedly arranged in the respective regions of the common masks, so as to avoid stress concentration and improve the rigidity and strength of the common masks. Further optionally, the third openings K3 and the second openings K2 are arranged in a staggered manner, so that the rigidity and strength of the shared mask plate are further improved. In addition, the shape of the third opening K3 of each common mask is not limited as long as the projections on the second frame area FA2 do not overlap each other and overlap the second frame area FA 2.

Further, the third opening K3 of each common mask and the respective evaporated common unit of the adjacent second opening K2 at least partially overlap each other, so that the common layer evaporated through the second opening K2 of each common mask and the common unit PU evaporated through the third opening K3 at least partially overlap, that is, the overflow areas of the adjacent two common units PU overlap each other, to form the entire layer of the third common layer PL3 as shown in fig. 4. The width and thickness of the overflow region are controlled by adjusting process parameters so that the thickness of the third common layer PL3 as a whole is as uniform as possible.

Thus, the first, second, and third

common masks

11, 12, and 13 sequentially and respectively evaporate the material of the third common layer PL3 to the second frame area FA2 of the array substrate AR through the respective third openings K3, to the first frame area FA1 of the array substrate AR through the respective second openings K2, and to the display area AA of the array substrate AR through the respective first openings K1, to collectively form the third common layer PL 3. In addition, the order of vapor deposition of the first common mask 11, the second common mask 12, and the third common mask 13 is not limited.

Fig. 9 is a schematic view illustrating a layout structure of an electrode contact layer of the display panel shown in fig. 1 on an array substrate, and fig. 10 is a schematic view illustrating a structure of a third independent mask plate of an evaporation assembly for a display panel according to an embodiment of the present disclosure.

As shown in fig. 9, the array substrate further includes an electrode contact layer CL, which is disposed on the first frame area FA1 and the partial display area AA and electrically connects the second common layer PL2 and the metal conductive layer PVEE. The metal conductive layer PVEE is formed on the array substrate AR in advance by laser etching, physical vapor deposition, and the like.

As shown in fig. 10, the evaporation module further includes a third independent mask 16, a sixth opening K6 is formed on the third independent mask 16, an orthographic projection of the sixth opening K6 on the array substrate AR corresponds to the first frame area FA1 and the partial display area AA, and the third independent mask 16 evaporates the material of the electrode contact layer CL to the first frame area FA1 and the partial display area AA on the array substrate AR through the sixth opening K6 to form the electrode contact layer CL.

In order to simplify the structure of the common mask, the second common layer PL2 and the third common layer PL3 may be evaporated by combining the common mask and the independent mask for evaporating the sub-pixels of each color. The structure of the evaporation assembly is described in detail below with reference to the accompanying drawings.

Fig. 11 is a schematic structural diagram illustrating a first independent mask of an evaporation assembly for a display panel according to an embodiment of the present application.

As shown in fig. 3, 4 and 11, the evaporation assembly further includes a first independent mask 14, the first independent mask 14 is provided with a fourth opening K4, an orthographic projection of the fourth opening K4 on the array substrate AR corresponds to the first frame area FA1, and the first independent mask 14 evaporates the material of the second common layer PL2 to the first frame area FA1 of the array substrate AR through the fourth opening K4. The plurality of common masks sequentially and respectively evaporate the material of the second common layer PL2 to the display area AA of the array substrate AR through the respective first openings K1 to collectively form the second common layer PL 2.

Since the support member is required to support the fourth opening K4 adjacent to the first independent mask 14, a gap is formed in the evaporated first frame area FA 1. The second common layer PL2 is a cathode layer, and its electrical performance is not affected even if there is a gap.

Optionally, the fourth openings K4 of the first individual mask 14 and the first openings K1 of the respective common masks at least partially overlap each other at the boundary between the first frame area FA1 and the display area AA, that is, the overflow areas of two adjacent common units PU overlap each other, so as to form the second common layer PL2 of the whole layer. The width and thickness of the overflow region are controlled by adjusting process parameters so that the thickness of the second common layer PL2 as a whole is as uniform as possible.

Fig. 12 is a schematic structural diagram illustrating a second independent mask of an evaporation assembly for a display panel according to an embodiment of the present application.

As shown in fig. 3, 4 and 11, the evaporation component further includes a second independent mask 15, the second independent mask 15 is provided with a fifth opening K5, an orthographic projection of the fifth opening K5 on the array substrate AR corresponds to the second frame area FA2 and the first frame area FA1, the second independent mask 15 evaporates the material of the third common layer PL3 to the second frame area FA2 and the first frame area FA1 of the array substrate AR through the fifth opening K5, and the plurality of common masks 1 evaporate the material of the third common layer PL3 to the display area AA of the array substrate AR through the respective first openings K1 in sequence, so as to form the third common layer PL3 together.

Since the support member is required to support the fifth opening K5 adjacent to the second independent mask 15, a gap is formed in the evaporated second frame region FA 2. The third common layer PL3 is a protective layer, and as long as the vapor deposition gap through the fifth opening K5 is smaller than the vapor deposition gap through the fourth opening K4 of the first mask plate 14, the electrical performance of the second common layer PL2 is not affected.

Optionally, the fifth openings K5 of the second independent mask 15 and the respective evaporated common units of the first openings K1 of the common masks at least partially overlap each other at the boundary between the first frame area FA1 and the display area AA, that is, the overflow areas of two adjacent common units PU overlap each other, so as to form a third common layer PL3 including a plurality of slits in the second frame area FA2 and the first frame area FA1, respectively. The width and thickness of the overflow region are controlled by adjusting process parameters so that the thickness of the third common layer PL3 as a whole is as uniform as possible.

In addition, the embodiment of the present application further provides an evaporation method for a display panel, where an array substrate AR of the display panel includes an optical element installation area OPA and a display area AA at least partially surrounding the optical element installation area OPA, and the display area AA is provided with a plurality of sub-pixels with different colors, the evaporation method including:

adopt the coating by vaporization subassembly to set up district OPA week side coating by vaporization functional layer at array substrate AR's optical element, the coating by vaporization subassembly includes a plurality of sharing mask plates, the quantity of sharing mask plate is the same with the quantity of a plurality of sub-pixel's colour, a plurality of openings have been seted up on every sharing mask plate, a plurality of openings of sharing mask plate orthographic projection on array substrate AR do not overlap each other, and open-ended area is less than the area of the public unit through this opening coating by vaporization, make in a plurality of public unit PU of a plurality of opening coating by vaporization of a plurality of sharing mask plates, every two adjacent public unit PU partially overlap at least, in order to form the functional layer of whole layer.

In some embodiments, as shown in fig. 3 to 6, the functional layer includes light-emitting layers P31 of different colors of a plurality of sub-pixels PX located in the display area AA, each common mask includes a main body portion 1a, the plurality of openings includes a plurality of first openings K1 opened on the main body portion 1a, and orthographic projections of the plurality of first openings K1 of each common mask on the array substrate AR correspond to the light-emitting layers of the same color one by one.

The evaporation method comprises the following steps:

materials of the light-emitting layers P31 with different colors are respectively evaporated to the display area of the array substrate through the respective first openings K1 of the corresponding common masks, so as to respectively form the light-emitting layers P31 with different colors.

In some embodiments, as shown in fig. 3 to 6, the functional layer further includes a first common layer PL1 laid on the display area AA, and the first common layer PL1 may be at least one of the hole injection layer P32, the hole transport layer P33, the electron injection layer P34, and the electron transport layer P35 as described above.

The evaporation method comprises the following steps:

the material of the first common layer PL1 is sequentially and respectively evaporated to the display area AA of the array substrate AR through the first openings K1 of the plurality of common masks, so as to collectively form the first common layer PL 1.

In some embodiments, as shown in fig. 4-7, the plurality of sub-pixels includes a first color sub-pixel, a second color sub-pixel, and a third color sub-pixel. The plurality of common mask plates include a first common mask plate 11, a second common mask plate 12, and a third common mask plate 13.

The evaporation method comprises the following steps:

evaporating the material of the light emitting layer of the first color sub-pixel to the display area of the array substrate through the first opening of the first common mask plate to form the light emitting layer of the first color sub-pixel;

evaporating the material of the light emitting layer of the second color sub-pixel to the display area of the array substrate through the first opening of the second common mask plate to form the light emitting layer of the second color sub-pixel;

evaporating the material of the light emitting layer of the third color sub-pixel to the display area of the array substrate through the first opening of the first common mask plate to form the light emitting layer of the third color sub-pixel;

and/or the material of the first common layer PL1 is sequentially evaporated to the display area AA of the array substrate AR through the first openings K1 of the main body portion 1a of each of the first common mask 11, the second common mask 12, and the third common mask 13, respectively, to collectively form the first common layer PL 1.

In some embodiments, as shown in fig. 3 and 7, the array substrate AR further includes a first frame area FA1, the first frame area FA1 at least partially surrounds the display area AA, the functional layer further includes a second common layer PL2 disposed on the display area AA and the first frame area FA1, the second common layer PL2 is located on a side of the first common layer PL1 away from the array substrate AR, and the second common layer PL2 may be a cathode layer or an anode layer. Each of the mask common plates further includes a plurality of first connecting portions 1b located on an outer peripheral side of the main body portion 1a, and the plurality of openings further includes a second opening K2 formed between two adjacent first connecting portions 1b, and projections of the second openings K2 of the mask common plates on the first frame area FA1 do not overlap each other and overlap the first frame area FA 1.

The evaporation method also comprises the following steps:

the material of the second common layer PL2 is sequentially and respectively evaporated to the first frame area FA1 of the array substrate AR through the respective second openings K2 of the plurality of common masks, and sequentially and respectively evaporated to the display area AA of the array substrate AR through the respective first openings K1, so as to collectively form the second common layer PL 2.

In some embodiments, as shown in fig. 3 and 8, the array substrate AR further includes a second frame area FA2, the second frame area FA2 is located at a side of the first frame area FA1 away from the display area AA, the functional layer further includes a third common layer PL3 laid on the display area AA, the first frame area FA1 and the second frame area FA2, the third common layer PL3 is located at a side of the second common layer PL2 away from the array substrate AR, and the third common layer PL3 may be a protective layer P4.

Each common mask further includes a plurality of second connecting portions 1c located on a side of the plurality of first connecting portions 1b away from the main body portion 1a, the plurality of openings further includes a third opening K3 formed between two adjacent second connecting portions 1c, and projections of the third openings K3 of the plurality of common masks on the second frame area FA2 do not overlap each other and coincide with the second frame area FA 2.

The evaporation method also comprises the following steps:

the material of the third common layer PL3 is sequentially and respectively evaporated to the display area AA of the array substrate AR through the respective first openings K1 of the plurality of common masks, sequentially and respectively evaporated to the first frame area FA1 of the array substrate AR through the respective second openings K2, and sequentially and respectively evaporated to the second frame area FA2 of the array substrate AR through the respective third openings K3, so as to collectively form a third common layer PL 3.

In addition, as shown in fig. 9 and 10, the array substrate AR further includes an electrode contact layer CL located at the first frame area FA1 and the partial display area AA for electrically connecting the second common layer PL2 with the metal conductive layer PVEE. The metal conductive layer PVEE is formed on the array substrate AR in advance by laser etching, physical vapor deposition, and the like. The evaporation coating assembly further comprises a third independent mask 16, a sixth opening K6 is formed in the third independent mask 16, and the orthographic projection of the sixth opening K6 on the array substrate AR corresponds to the first border area FA1 and the partial display area AA.

The evaporation method also comprises the following steps:

a material of the electrode contact layer CL is evaporated to the first frame area FA1 and the partial display area AA of the array substrate AR through the sixth opening K6 to form the electrode contact layer CL.

In some embodiments, as shown in fig. 3, 4 and 11, the evaporation assembly further includes a first independent mask 14, the first independent mask 14 is provided with a fourth opening K4, and an orthographic projection of the fourth opening K4 on the array substrate AR corresponds to the first frame area FA 1.

The evaporation method also comprises the following steps:

evaporating the material of the second common layer PL2 to the first frame area FA1 of the array substrate AR through the fourth opening K4 of the first independent mask 14;

the material of the second common layer PL2 is sequentially and respectively evaporated to the display area AA of the array substrate AR through the first openings K1 of the plurality of common masks, so as to collectively form the second common layer PL 2.

In some embodiments, as shown in fig. 3, 4 and 12, the evaporation assembly further includes a second independent mask 15, a fifth opening K5 is formed on the second independent mask 15, and an orthographic projection of the fifth opening K5 on the array substrate AR corresponds to the second frame area FA 2.

The evaporation method also comprises the following steps:

evaporating the material of the third common layer PL3 to the second frame area FA2 and the first frame area FA1 of the array substrate AR through the fifth opening K5 of the second individual mask 15;

the material of the third common layer PL3 is sequentially and respectively evaporated to the display area AA of the array substrate AR through the first openings K1 of the plurality of common masks, so as to collectively form the third common layer PL 3.

Referring to fig. 13, an embodiment of the present application further provides a display panel, which includes an array substrate AR, where the array substrate AR includes an optical element disposition area OPA and a display area AA at least partially surrounding the optical element disposition area OPA, and the display area AA is disposed with a plurality of sub-pixels with different colors. The functional layer on the periphery of the optical element installation area OPA of the array substrate AR is formed by vapor deposition using any of the vapor deposition modules for a display panel as described above.

While the application has been described with reference to specific embodiments, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the application. In particular, the technical features mentioned in the embodiments can be combined in any way as long as there is no structural conflict. The present application is not intended to be limited to the particular embodiments disclosed herein but is to cover all embodiments that may fall within the scope of the appended claims.

In accordance with the embodiments described herein above, these embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments described. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the application and its practical application, to thereby enable others skilled in the art to best utilize the application and its various modifications as are suited to the particular use contemplated. The application is limited only by the claims and their full scope and equivalents.

Claims

1. An evaporation component of a display panel, wherein an array substrate of the display panel comprises an optical element arrangement area and a display area at least partially surrounding the optical element arrangement area, the display area is provided with a plurality of sub-pixels with different colors, and the evaporation component is characterized in that,

the evaporation coating assembly comprises a plurality of shared mask plates used for evaporation coating of the optical element setting area peripheral side evaporation coating functional layer of the array substrate, the number of the shared mask plates is the same as that of the colors of the sub-pixels, each shared mask plate is provided with a plurality of openings, orthographic projections of the openings of the shared mask plates on the array substrate are not overlapped, the area of each opening is smaller than that of a public unit evaporated through the opening, and in a plurality of public units evaporated through the openings, every two adjacent public units are at least partially overlapped to form the whole layer of the functional layer.

2. The evaporation assembly according to claim 1, wherein the functional layer comprises light emitting layers of different colors located in the plurality of sub-pixels of the display area;

each sharing mask plate includes the main part, a plurality of openings are including seting up in a plurality of first openings on the main part, every sharing mask plate first opening is in orthographic projection and the same kind colour on the array substrate the luminescent layer one-to-one, every sharing mask plate will correspond the colour the material of luminescent layer passes through first opening coating by vaporization extremely array substrate the display area to form corresponding colour the luminescent layer.

3. The evaporation assembly according to claim 2, wherein the functional layer further comprises a first common layer disposed in the display region, and the common masks sequentially and respectively evaporate a material of the first common layer to the display region of the array substrate through the first openings to collectively form the first common layer.

4. The evaporation assembly according to claim 3, wherein the plurality of sub-pixels comprise a first color sub-pixel, a second color sub-pixel and a third color sub-pixel, and the plurality of common masks comprise a first common mask, a second common mask and a third common mask;

the first openings of the main body portions of the first, second, and third common mask plates are respectively used for evaporating the light emitting layers of the first, second, and third color sub-pixels, and are also used for evaporating the first common layer.

5. The evaporation assembly according to claim 3, wherein the array substrate further comprises a first frame region at least partially surrounding the display region; the functional layer further comprises a second common layer which is laid on the display area and the first frame area, and the second common layer is positioned on one side, far away from the array substrate, of the first common layer;

each common mask further includes a plurality of first connecting portions located on an outer peripheral side of the main body portion, the plurality of openings further include second openings formed between two adjacent first connecting portions, projections of the second openings of the plurality of common masks in the first frame region do not overlap with each other and coincide with the first frame region, and the plurality of common masks sequentially and respectively evaporate a material of the second common layer to the first frame region of the array substrate through the respective second openings and sequentially and respectively evaporate to the display region of the array substrate through the respective first openings to collectively form the second common layer.

6. The evaporation assembly according to claim 5, wherein the array substrate further comprises a second frame region, the second frame region is located on a side of the first frame region away from the display region; the functional layer further comprises a third common layer which is laid on the display area, the first frame area and the second frame area, and the third common layer is positioned on one side, far away from the array substrate, of the second common layer;

each common mask plate further comprises a plurality of second connecting parts located on one side, away from the main body part, of the first connecting parts, and the plurality of openings further comprise third openings formed between every two adjacent second connecting parts; the projections of the third openings of the common mask plates in the second frame area are not overlapped with each other and coincide with the second frame area, the materials of the third common layer are sequentially and respectively evaporated to the display area of the array substrate through the respective first openings, are sequentially and respectively evaporated to the first frame area of the array substrate through the respective second openings, and are sequentially and respectively evaporated to the second frame area of the array substrate through the respective third openings, so that the third common layer is formed jointly.

7. The evaporation assembly according to claim 3, wherein said array substrate further comprises a first frame region at least partially surrounding said display region, said functional layer further comprises a second common layer disposed on said display region and said first frame region, said second common layer being located on a side of said first common layer away from said array substrate;

the evaporation assembly further comprises a first independent mask plate, a fourth opening is formed in the first independent mask plate, the orthographic projection of the fourth opening on the array substrate corresponds to the first frame area, and the first independent mask plate evaporates the material of the second common layer to the first frame area of the array substrate through the fourth opening; the materials of the second common layer are sequentially and respectively evaporated to the display area of the array substrate through the first openings of the common mask plates so as to form the second common layer together.

8. The evaporation assembly according to claim 7, wherein the array substrate further comprises a second frame region, the second frame region being located on a side of the first frame region away from the display region; the functional layer further comprises a third common layer which is laid on the display area, the first frame area and the second frame area, and the third common layer is positioned on one side, far away from the array substrate, of the second common layer;

the evaporation coating assembly further comprises a second independent mask plate, wherein a fifth opening is formed in the second independent mask plate, the orthographic projection of the fifth opening on the array substrate corresponds to the second frame area and the first frame area, the material of the third common layer is evaporated to the second frame area and the first frame area of the array substrate through the fifth opening by the second independent mask plate, and the material of the third common layer is sequentially and respectively evaporated to the display area of the array substrate through the respective first openings by the aid of the common mask plates to jointly form the third common layer.

9. The evaporation assembly according to any one of claims 5 to 8, wherein the array substrate further comprises an electrode contact layer, the electrode contact layer is laid on the first frame region and a part of the display region;

the evaporation coating assembly further comprises a third independent mask plate, a plurality of sixth openings are formed in the third independent mask plate, orthographic projections of the sixth openings on the array substrate correspond to the first frame areas and the display areas, and materials of the electrode contact layer are evaporated to the first frame areas and the display areas through the sixth openings to form the electrode contact layer.

10. An evaporation method of a display panel, wherein an array substrate of the display panel comprises an optical element arrangement area and a display area at least partially surrounding the optical element arrangement area, and the display area is provided with a plurality of sub-pixels with different colors, the evaporation method comprises the following steps:

adopt the coating by vaporization subassembly to be in array substrate optical element sets up district week side coating by vaporization functional layer, the coating by vaporization subassembly includes a plurality of sharing mask plates, the quantity of sharing mask plate with the quantity of a plurality of sub-pixel's colour is the same, every a plurality of openings have been seted up on the sharing mask plate, a plurality of sharing mask plates a plurality of openings are in orthographic projection on the array substrate do not overlap each other, just the open-ended area is less than through this opening coating by vaporization's area of public unit, makes in a plurality of public units of a plurality of opening coating by vaporization of a plurality of sharing mask plates, every adjacent two public unit at least partially overlaps to form whole layer the functional layer.

11. An evaporation method according to claim 10, wherein the functional layer comprises light emitting layers of different colors in the plurality of sub-pixels of the display region;

each common mask plate comprises a main body part, the plurality of openings comprise a plurality of first openings arranged on the main body part, and orthographic projections of the first openings of each common mask plate on the array substrate correspond to the light-emitting layers of the same color one by one;

the evaporation method comprises the following steps:

and respectively evaporating materials of the light-emitting layers with different colors to the display area of the array substrate through the respective first openings of the corresponding common mask plate so as to respectively form the light-emitting layers with different colors.

12. An evaporation method according to claim 11, wherein the functional layer further comprises a first common layer laid on the display region, the evaporation method further comprising:

and sequentially and respectively evaporating the material of the first common layer to the display area of the array substrate through the first openings of the plurality of common mask plates so as to jointly form the first common layer.

13. The evaporation method according to claim 12, wherein the plurality of sub-pixels comprise a first color sub-pixel, a second color sub-pixel and a third color sub-pixel;

the plurality of common mask plates comprise a first common mask plate, a second common mask plate and a third common mask plate; the first openings of the main body portions of the first, second and third common mask plates are respectively used for evaporating the first, second and third color sub-pixels;

the evaporation method comprises the following steps:

and/or sequentially and respectively evaporating the material of the first common layer to the display area of the array substrate through the first openings of the main body parts of the first common mask plate, the second common mask plate and the third common mask plate so as to jointly form the first common layer.

14. An evaporation method according to claim 12, wherein the array substrate further comprises a first frame region at least partially surrounding the display region, and the functional layer further comprises a second common layer disposed on the display region and the first frame region, the second common layer being located on a side of the first common layer away from the array substrate;

each common mask plate further comprises a plurality of first connecting parts positioned on the outer periphery side of the main body part, the plurality of openings comprise second openings formed between two adjacent first connecting parts, and the projections of the second openings of the plurality of common mask plates in the first frame area are not overlapped with each other and are overlapped with the first frame area;

the evaporation method further comprises the following steps:

and sequentially and respectively evaporating the material of the second common layer to the first frame area of the array substrate through the second openings of the plurality of common mask plates, and sequentially and respectively evaporating the material of the second common layer to the display area of the array substrate through the first openings, so as to jointly form the second common layer.

15. An evaporation method according to claim 14, wherein the array substrate further comprises a second frame region, the second frame region is located on one side of the first frame region away from the display region, the functional layer further comprises a third common layer laid on the display region, the first frame region and the second frame region, and the third common layer is located on one side of the second common layer away from the array substrate;

each common mask plate further comprises a plurality of second connecting parts located on one side, away from the main body part, of each first connecting part, each opening further comprises a third opening formed between two adjacent second connecting parts, and the projections of the third openings of the common mask plates in the second frame areas are not overlapped with each other and are overlapped with the second frame areas;

the evaporation method further comprises the following steps:

and sequentially and respectively evaporating the material of the third common layer to the display area of the array substrate through the first openings of the plurality of common mask plates, sequentially and respectively evaporating the material of the third common layer to the first frame area of the array substrate through the second openings of the plurality of common mask plates, and sequentially and respectively evaporating the material of the third common layer to the second frame area of the array substrate through the third openings of the plurality of common mask plates, so as to jointly form the third common layer.

16. An evaporation method according to claim 11, wherein the array substrate further comprises a first frame region at least partially surrounding the display region, and the functional layer further comprises a second common layer disposed on the display region and the first frame region, the second common layer being located on a side of the first common layer away from the array substrate;

the evaporation assembly further comprises a first independent mask plate, a fourth opening is formed in the first independent mask plate, and the orthographic projection of the fourth opening on the array substrate corresponds to the first frame area;

the evaporation method further comprises the following steps:

evaporating the material of the second common layer to the first frame area of the array substrate through the fourth opening of the first independent mask plate;

and sequentially and respectively evaporating the material of the second common layer to the display area of the array substrate through the first openings of the plurality of common mask plates so as to jointly form the second common layer.

17. An evaporation method according to claim 16, wherein the array substrate further comprises a second frame region, the second frame region is located on one side of the first frame region away from the display region, the functional layer further comprises a third common layer laid on the display region, the first frame region and the second frame region, and the third common layer is located on one side of the second common layer away from the array substrate;

the evaporation assembly further comprises a second independent mask plate, a fifth opening is formed in the second independent mask plate, and the orthographic projection of the fifth opening on the array substrate corresponds to the second frame area and the first frame area;

the evaporation method further comprises the following steps:

evaporating the material of the third common layer to the second frame region and the first frame region of the array substrate through the fifth opening of the second independent mask plate;

and sequentially and respectively evaporating the material of the third common layer to the display area of the array substrate through the first openings of the plurality of common mask plates so as to jointly form the third common layer.

18. An evaporation method according to any one of claims 14 to 17, wherein the array substrate further comprises an electrode contact layer electrically connected to the second common layer, the electrode contact layer being laid on the first frame region and a part of the display region;

the evaporation assembly further comprises a third independent mask plate, a plurality of sixth openings are formed in the third independent mask plate, and orthographic projections of the sixth openings on the array substrate correspond to the first frame area and part of the display area;

the evaporation method further comprises the following steps:

and evaporating the material of the electrode contact layer to the first frame area and part of the display area of the array substrate through the sixth opening to form the electrode contact layer.

19. A display panel, comprising an array substrate, wherein the array substrate comprises an optical element arrangement area and a display area at least partially surrounding the optical element arrangement area, the display area is provided with a plurality of sub-pixels with different colors, and the functional layer on the periphery side of the optical element arrangement area of the array substrate is formed by evaporation by using the evaporation component of the display panel according to any one of claims 1 to 9.