CN109728065B - Display substrate, preparation method thereof and display device - Google Patents
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- CN109728065B CN109728065B CN201910019195.7A CN201910019195A CN109728065B CN 109728065 B CN109728065 B CN 109728065B CN 201910019195 A CN201910019195 A CN 201910019195A CN 109728065 B CN109728065 B CN 109728065B
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- 238000002360 preparation method Methods 0.000 title abstract description 8
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- 238000005538 encapsulation Methods 0.000 claims description 13
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- 239000000463 material Substances 0.000 claims description 7
- 239000011159 matrix material Substances 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 5
- 238000004806 packaging method and process Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 98
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 3
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Abstract
The invention provides a display substrate, a preparation method thereof and a display device, and belongs to the technical field of display. A display substrate of the present invention includes: a substrate; a plurality of light emitting devices on the substrate; wherein each of the plurality of light emitting devices includes: a first electrode, a light-emitting layer, and a second electrode; an auxiliary electrode layer connected in parallel with the second electrode of at least one of the plurality of light emitting devices.
Description
Technical Field
The invention belongs to the technical field of display, and particularly relates to a display substrate, a preparation method of the display substrate and a display device.
Background
An Organic Light-Emitting Diode (OLED) is also called an Organic electroluminescent display or an Organic Light-Emitting semiconductor. It was found in the laboratory in 1979 by professor deng dunqing cloud of chinese ethnic origin (china w.tang). The OLED display technology has the advantages of self-luminescence, wide viewing angle, almost infinite contrast, low power consumption, extremely high reaction speed and the like.
Disclosure of Invention
The present invention is directed to at least one of the technical problems in the prior art, and provides a display substrate, a method for manufacturing the same, and a display device.
The technical scheme adopted for solving the technical problem of the invention is a display substrate, which comprises:
a substrate;
a plurality of light emitting devices on the substrate; wherein each of the plurality of light emitting devices includes: a first electrode, a light-emitting layer, and a second electrode;
an auxiliary electrode layer connected in parallel with the second electrode of at least one of the plurality of light emitting devices.
Preferably, the first electrodes of the light emitting devices of the plurality of light emitting devices are disposed at intervals; the second electrode of each of the plurality of light emitting devices forms an integrated structure, and the auxiliary electrode layer is connected in parallel with the second electrode.
Preferably, the display substrate is divided into a light-transmitting area and a light-shielding area; the display substrate further includes: an encapsulation layer disposed between the second electrodes of the plurality of light emitting devices and the auxiliary electrode layer; wherein,
a plurality of connecting through holes are formed in the packaging layer and are positioned in the shading area; the auxiliary electrode layer is connected with the second electrode through a connecting through hole.
Preferably, a shortest distance between each of the plurality of connection vias and the light-transmitting region adjacent thereto is greater than or equal to 0.5 μm in a plane parallel to the substrate.
Preferably, the display substrate further includes: a pixel defining layer including a plurality of openings, each of the plurality of openings exposing a first electrode of each of the plurality of light emitting devices; wherein,
a shortest distance between each of the plurality of connection vias and an opening in the pixel defining layer adjacent thereto is greater than or equal to 0.5 μm.
Preferably, the display substrate is divided into a light-transmitting area and a light-shielding area; the display substrate further comprises a plurality of optical filters and a black matrix; wherein,
each optical filter in the plurality of optical filters is arranged in one-to-one correspondence with the light transmitting area;
the black matrixes are arranged in one-to-one correspondence with the shading areas.
Preferably, the display device comprises a white organic electroluminescent device.
Preferably, the material of the auxiliary electrode includes a transparent conductive material.
The technical scheme adopted for solving the technical problem of the invention is a preparation method of a display substrate, which comprises the following steps:
forming a plurality of light emitting devices on a substrate; wherein the step of forming each of the plurality of light emitting devices comprises: forming a first electrode, a light emitting layer and a second electrode;
forming an auxiliary electrode layer in parallel with the second electrode of at least one of the plurality of light emitting devices.
Preferably, the display substrate is divided into a light-shielding region and a light-transmitting region; between the steps of forming the second electrodes of the plurality of light emitting devices and forming the auxiliary electrode layer, further comprising:
forming an encapsulation layer, and forming a plurality of connecting through holes in the encapsulation layer, wherein the connecting through holes are positioned in the shading area; the auxiliary electrode layer is connected with the second electrode through a connecting through hole.
Preferably, the display substrate is divided into a light-shielding region and a light-transmitting region; further comprising, after forming the auxiliary electrode layer:
forming a plurality of optical filters; the optical filters are arranged in one-to-one correspondence with the light transmitting areas.
The display device is characterized by comprising the display substrate.
Drawings
FIG. 1 is a schematic view of a display substrate according to some embodiments of the present invention;
FIG. 2 is a schematic view of another display substrate according to some embodiments of the present invention;
fig. 3 is a schematic structural view illustrating the formation of a driving transistor and an organic electroluminescent diode in a method of manufacturing a display substrate according to some embodiments of the present invention;
fig. 4 is a schematic structural diagram of an encapsulation layer formed in a method for manufacturing a display substrate according to some embodiments of the present invention.
Wherein the reference numerals are: 10. a substrate; 1. a drive transistor; 2. an organic electroluminescent diode; 21. an anode; 22. a light emitting layer; 23. a cathode; 3. a pixel defining layer; 4. a packaging layer; 41. a connecting via; 5. an electrode pattern layer; 6. an optical filter; 9. a buffer layer; q1, clear region; q2, light-blocking zone.
Detailed Description
In order to make the technical solutions of the present invention better understood, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
The inventor finds that: in the preparation of large-sized organic electroluminescent diode substrates, the following technical barriers exist: (1) for the substrate of the organic electroluminescent diode with three colors of red, green and blue, because there is no FMM (metal fine mask) corresponding to the large-sized substrate, the evaporation of the luminescent layers of the three colors of red, green and blue cannot be realized; (2) for the white organic electroluminescent diode, due to the inherent resistance of the evaporation cathode and the limitation of the thickness of the film, the area of the large-size substrate has larger resistance and voltage drop, and the integral current uniformity is influenced, so that the display effect is influenced. In the following embodiments of the present invention, the inventors provide a display substrate to solve at least one of the above problems.
It should be noted that the light emitting device referred to in the following embodiments may be an organic electroluminescent diode or an inorganic light emitting diode, and the type of the light emitting device is not limited in the embodiments of the present invention, but the light emitting device is merely exemplified as an organic electroluminescent diode. The organic electroluminescent diode at least comprises a first electrode, a second electrode and a light-emitting layer clamped between the first electrode and the second electrode; in the present invention, the first electrode is an anode, and the second electrode is a cathode, but the first electrode is an anode and the second electrode is a cathode.
Some embodiments of the present invention provide a display substrate including a base, a plurality of organic electroluminescent diodes, an auxiliary electrode layer; the organic light-emitting diodes are positioned on the substrate, and each organic light-emitting diode comprises an anode, a light-emitting layer and a cathode which are sequentially arranged along the direction departing from the substrate; the auxiliary electrode layer is connected in parallel with a cathode of at least one organic electroluminescent diode among the plurality of organic electroluminescent diodes.
Since the cathodes of the organic electroluminescent diodes in the display substrate are connected in series, the cathode series resistance of each organic electroluminescent diode in the display substrate with the same size is relatively large, therefore, when voltage is applied to the cathodes of the organic electroluminescent diodes at the same time, large voltage drop exists, the uniformity of the whole current is influenced, and the display is influenced, the display substrate of the embodiment of the invention comprises an auxiliary electrode layer, and the cathode of at least one organic electroluminescent diode is connected with the auxiliary electrode layer in parallel, thus, the auxiliary electrode layer and the cathode of the organic electroluminescent diode connected in parallel therewith correspond to the cathode of the organic electroluminescent diode, and the two are connected in parallel, so that the resistance is obviously reduced, and the problem that the display is influenced due to the uneven current of the whole cathode can be effectively solved. Meanwhile, as the material of the auxiliary electrode layer comprises the non-light-transmitting material, the pattern in the auxiliary electrode layer can be arranged corresponding to the light-shielding region of the display substrate, so that the preparation of the light-shielding pattern in the display substrate can be omitted. Specifically, when a color filter layer is required to be provided on the display substrate, the auxiliary electrode layer may serve as a black matrix structure in the color filter layer.
In the display substrate according to the embodiment of the invention, the anodes of the organic electroluminescent diodes are located in the same layer and are arranged at intervals, the cathodes of the organic electroluminescent diodes are formed into an integral structure, and the auxiliary electrode layer is connected in parallel with the cathodes. Therefore, the total resistance of the cathodes of the organic light-emitting diodes can be reduced, and the problem that the display is influenced by the non-uniform current of the cathodes due to the large resistance can be effectively solved.
It should be noted that the cathode of each organic electroluminescent diode may be formed in a planar structure, or the cathodes of each of a plurality of organic electroluminescent diodes arranged in an array in each organic electroluminescent diode may form a cathode block, and the plurality of cathode blocks are connected together to form a unitary structure.
As shown in fig. 1 and 2, in some embodiments of the present invention, there is provided a display substrate divided into a light-shielding region Q2 and a light-transmitting region Q1, the display substrate including: the display device comprises a substrate 10 and a plurality of pixel units positioned on the substrate 10, wherein each pixel unit in the plurality of pixel units comprises a pixel driving circuit and an organic light-emitting diode 2; wherein the organic electroluminescent diode 2 includes: an anode 21, a light-emitting layer 22, and a cathode 23; the pixel driving circuit at least comprises a driving transistor 1, and the drain electrode of the driving transistor 1 is connected with the anode 21 of the organic electroluminescent diode 2; the cathodes 23 of the organic electroluminescent diodes 2 are connected together, and the encapsulation layer 4 is arranged above the layer where the cathode 23 of each organic electroluminescent diode 2 is located, so as to encapsulate the organic electroluminescent diodes 2 and prevent water and oxygen from polluting the organic electroluminescent diodes 2; an auxiliary electrode layer 5 is disposed above the encapsulation layer 4, and a connection via 41 is disposed in the encapsulation layer 4, the auxiliary electrode layer 5 being connected to the cathode 23 of the organic electroluminescent diode 2 through the connection via 41.
It should be noted here that when the organic electroluminescent diode 2 is a top emission type light emitting device, the auxiliary electrode layer 5 should be made of a transparent conductive material, such as Indium Tin Oxide (ITO) or the like.
In some embodiments of the present invention, in order to prevent the connection via 41 from affecting the pixel aperture ratio of the display substrate, the connection via 41 may be disposed in the light shielding region Q2. The organic electroluminescent diode 2 is disposed corresponding to the light-transmitting region Q1, and the light-emitting area of the light emitted from the organic electroluminescent diode 2 through the light-transmitting region Q1 is larger than the area of the light-transmitting region Q1, so as to prevent the light from irradiating the connecting via 41 and affecting the transmission path of the light, in the present embodiment, the shortest distance between each of the plurality of connecting vias 41 and the light-transmitting region Q1 adjacent thereto is greater than or equal to 0.5 μm on a plane parallel to the substrate 10. Of course, the distance between each of the connection vias 41 and the light-transmitting region Q1 adjacent thereto may also be specifically set according to the sizes of the light-transmitting region Q1 and the light-shielding region Q2.
In some embodiments of the present invention, the display substrate is further provided with a pixel defining layer 3, specifically, the pixel defining layer 3 is disposed above the layer where the anode 21 of each organic electroluminescent diode 2 is located, and the pixel defining layer 3 includes a plurality of openings, which are disposed in one-to-one correspondence with the anodes 21 of the organic electroluminescent diodes 2 to expose the anodes 21 of the organic electroluminescent diodes 2, and the light emitting layer 22 and the cathode 23 of each organic electroluminescent diode 2 are sequentially covered on the pixel defining layer 3. The shortest distance between each of the plurality of connection vias 41 and the opening in the pixel defining layer 3 adjacent thereto is greater than or equal to 0.5 μm to prevent light from being irradiated to the connection vias 41 to affect the transmission path of the light and thus the uniformity of the light.
In some present embodiments of the invention, the organic electroluminescent diode 2 may employ a white organic electroluminescent device. The reason why the white organic electroluminescent device is used is that the light emitting layer 22 of each organic electroluminescent diode 2 can be prepared by one-time evaporation process, thereby reducing the process steps and saving the cost. Of course, the organic electroluminescent diode 2 may also be an organic electroluminescent device with three different colors of red, green and blue.
In some embodiments of the present invention, the display substrate not only has the above structure, but also includes a plurality of filters 6 and black matrixes 7 on the layer where the auxiliary electrode layer 5 is located; the optical filters 6 are arranged corresponding to the light transmitting areas Q1 one by one, and the black matrixes 7 are arranged corresponding to the light shading areas Q2 one by one; that is, each filter 6 is sandwiched between two adjacent black matrices. When the organic electroluminescent diode 2 employs a white organic electroluminescent device, the filter 6 may include filters 6 of three colors of red, green, and blue.
In some embodiments of the present invention, the transparent conductive material used for the auxiliary electrode layer 5 may be Indium Tin Oxide (ITO); of course, the material of the auxiliary electrode layer 5 is not limited to this, and other transparent conductive materials may be used.
In some embodiments of the present invention, there is provided a method of manufacturing a display substrate, including: forming a plurality of organic electroluminescent diodes 2 on a substrate 10; wherein the step of forming each of the plurality of organic electroluminescent diodes 2 includes: the anode 21, the light-emitting layer 22, and the cathode 23 are sequentially formed in a direction away from the substrate 10. On the substrate 10 where the cathode 23 of each organic electroluminescent diode 2 is formed, an auxiliary electrode layer 5 is formed, the auxiliary electrode layer 5 being connected in parallel with the second electrode of at least one of the plurality of light emitting devices.
The preparation method of the display substrate comprises the step of forming the auxiliary electrode layer 5, and the cathode 23 of at least one organic electroluminescent diode 2 is connected in parallel with the auxiliary electrode layer 5, so that the auxiliary electrode layer 5 and the cathode 23 connected in parallel with the organic electroluminescent diode 2 are equivalent to the cathode 23 of the organic electroluminescent diode 2, and the two are connected in parallel, so that the resistance is obviously reduced, and the problem that the display is influenced due to the non-uniform current of the cathode 23 can be effectively solved.
In some embodiments of the present invention, a method for manufacturing a display substrate is provided, in which the display substrate is divided into a light-shielding region Q2 and a light-transmitting region Q1, the method specifically includes the following steps:
as shown in fig. 3, a plurality of pixel units are formed on a substrate 10, wherein forming each pixel unit includes at least forming a pixel driving circuit and an organic electroluminescent diode 2; forming the pixel drive circuit includes forming at least a drive transistor 1; forming the organic electroluminescent diode 2 includes: an anode 21, a light-emitting layer 22, and a cathode 23 are formed.
Specifically, in this step, the top gate type driving transistor 1 is formed as an example; forming the driving transistor 1 includes: on the substrate 10, a buffer layer 9 is formed, and then a pattern including an active layer of the driving transistor 1 is formed through a patterning process; forming a gate insulating layer on the substrate 10 on which the active layer is formed; forming a pattern including a gate electrode of the driving transistor 1 on the substrate 10 on which the gate insulating layer is formed through a patterning process; forming an interlayer insulating layer on the substrate 10 on which the gate electrode is formed; forming a pattern including a source electrode and a drain electrode of the driving transistor 1 on the substrate 10 on which the interlayer insulating layer is formed through a patterning process; the source electrode and the drain electrode are respectively connected with the active layer through a via hole penetrating through the interlayer insulating layer and the grid electrode insulating layer; forming a planarization layer on the substrate 10 on which the source electrode and the drain electrode are formed, and etching a via hole penetrating through the planarization layer at a position of the planarization layer corresponding to the drain electrode; forming a pattern including an anode 21 of the organic electroluminescent diode 2 through a patterning process on the substrate 10 on which the planarization layer is formed, the anode 21 being connected to the drain electrode of the driving transistor 1 through a via hole penetrating the planarization layer; forming a pixel defining layer 3 on the substrate 10 on which the anode 21 is formed, and etching openings in the formation defining layer, which correspond one-to-one to the anodes 21, so that the anodes 21 are exposed at the positions of the openings of the pixel defining layer 3; depositing a light-emitting layer 22 and a cathode 23 layer in this order on the substrate 10 on which the pixel defining layer 3 is formed; wherein, the material of the light emitting layer 22 may include a white light emitting material; the cathodes 23 of the respective organic electroluminescent diodes 2 are connected together.
As shown in fig. 4, on the substrate 10 on which the cathode 23 of the organic electroluminescent diode 2 is formed, the encapsulation layer 4 is formed, and a connection via 41 is etched at a position of the encapsulation layer 4 corresponding to the light shielding region Q2, the connection via 41 being used to connect the auxiliary electrode layer 5 to be formed next in parallel with the cathode 23 of the organic electroluminescent diode 2.
In this step, in order to avoid the connection via 41 from affecting the pixel aperture ratio of the display substrate, the connection via 41 may be disposed in the light-shielding region Q2. The organic electroluminescent diode 2 is disposed corresponding to the light-transmitting region Q1, and the light-emitting area of the light emitted from the organic electroluminescent diode 2 through the light-transmitting region Q1 is larger than the area of the light-transmitting region Q1, so as to prevent the light from irradiating the connecting via 41 and affecting the transmission path of the light, in the present embodiment, the shortest distance between each of the plurality of connecting vias 41 and the light-transmitting region Q1 adjacent thereto is greater than or equal to 0.5 μm on a plane parallel to the substrate 10. Similarly, the shortest distance between each of the plurality of connection vias 41 and the opening in the pixel defining layer 3 adjacent thereto is greater than or equal to 0.5 μm to prevent light from being irradiated to the connection vias 41 to affect the transmission path of the light and thus the uniformity of the light.
As shown in fig. 1, on the substrate 10 on which the encapsulation layer 4 is formed, an auxiliary electrode layer 5 is formed through a patterning process, and the auxiliary electrode layer 5 is connected in parallel to the cathode 23 of the organic electroluminescent diode 2 through a contact via hole.
In this step, the auxiliary electrode layer 5 may be a planar structure. Wherein, the auxiliary electrode layer 5 may comprise Indium Tin Oxide (ITO), when the auxiliary electrode layer 5 has a thickness of
The sheet resistance is about 0.7, while the sheet resistance of the cathode 23 is usually about 10 to 20, and thusThe addition of the auxiliary electrode layer 5 at least reduces the resistance of the whole screen by more than ten times, namely, the current is increased by more than ten times.
As shown in fig. 2, on the substrate 10 on which the auxiliary electrode layer 5 is formed, the filter 6 and the black matrix 7 are formed; wherein, the optical filters 6 are arranged corresponding to the light transmission areas Q1 one by one; the black matrix is provided in one-to-one correspondence with the light-shielding regions Q2.
In this step, the specific filter 6 may include filters 6 of three different colors, red, green, and blue; the optical filters 6 are arranged in one-to-one correspondence with the light transmission regions Q1, that is, each optical filter 6 is sandwiched between two adjacent black matrices 7, so that there is no need to prepare a black matrix.
In some embodiments of the present invention, there is also provided a display device including the above display substrate.
The display device may be an OLED display device, such as any product or component with a display function, such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, and a navigator.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (8)
1. A display substrate, comprising:
a substrate;
a plurality of light emitting devices on the substrate; wherein each of the plurality of light emitting devices includes: a first electrode, a light-emitting layer, and a second electrode;
an auxiliary electrode layer connected in parallel with the second electrode of at least one of the plurality of light emitting devices;
the display substrate is divided into a light-transmitting area and a light-shielding area; the display substrate further includes: an encapsulation layer disposed between the second electrodes of the plurality of light emitting devices and the auxiliary electrode layer; wherein,
a plurality of connecting through holes are formed in the packaging layer and are positioned in the shading area; the auxiliary electrode layer is connected with the second electrode through a connecting through hole;
on a plane parallel to the substrate, the shortest distance between each of the plurality of connecting through holes and the light-transmitting area adjacent to the connecting through hole is greater than or equal to 0.5 μm;
the display substrate further includes: a pixel defining layer including a plurality of openings, each of the plurality of openings exposing a first electrode of each of the plurality of light emitting devices; wherein,
a shortest distance between each of the plurality of connection vias and an opening in the pixel defining layer adjacent thereto is greater than or equal to 0.5 μm.
2. The display substrate according to claim 1, wherein the first electrodes of the light emitting devices of the plurality of light emitting devices are arranged at intervals; the second electrode of each of the plurality of light emitting devices forms an integrated structure, and the auxiliary electrode layer is connected in parallel with the second electrode.
3. The display substrate according to claim 1 or 2, wherein the display substrate is divided into a light-transmissive region and a light-blocking region; the display substrate further comprises a plurality of optical filters and a black matrix; wherein,
each optical filter in the plurality of optical filters is arranged in one-to-one correspondence with the light transmitting area;
the black matrixes are arranged in one-to-one correspondence with the shading areas.
4. The display substrate according to claim 1 or 2, wherein the light emitting device comprises a white organic electroluminescent device.
5. The display substrate according to claim 1 or 2, wherein a material of the auxiliary electrode comprises a transparent conductive material.
6. A method for preparing a display substrate is characterized by comprising the following steps:
forming a plurality of light emitting devices on a substrate; wherein the step of forming each of the plurality of light emitting devices comprises: forming a first electrode, a light emitting layer and a second electrode;
forming an auxiliary electrode layer connected in parallel with a second electrode of at least one of the plurality of light emitting devices; between the steps of forming the second electrodes of the plurality of light emitting devices and forming the auxiliary electrode layer, further comprising:
forming an encapsulation layer, and forming a plurality of connecting through holes in the encapsulation layer, wherein the connecting through holes are positioned in the shading area; the auxiliary electrode layer is connected with the second electrode through a connecting through hole; wherein,
on a plane parallel to the substrate, the shortest distance between each of the plurality of connecting vias and the light-transmitting region adjacent thereto is greater than or equal to 0.5 μm.
7. The method of claim 6, wherein the display substrate is divided into a light-blocking area and a light-transmitting area; further comprising, after forming the auxiliary electrode layer:
forming a plurality of optical filters; the optical filters are arranged in one-to-one correspondence with the light transmitting areas.
8. A display device comprising the display substrate according to any one of claims 1 to 5.
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| CN109742122B (en) * | 2019-01-10 | 2021-08-06 | 京东方科技集团股份有限公司 | Display substrate, manufacturing method thereof and display panel |
| CN110061151A (en) * | 2019-05-17 | 2019-07-26 | 京东方科技集团股份有限公司 | A kind of organic LED panel and preparation method thereof and display equipment |
| CN110416269B (en) * | 2019-07-29 | 2022-02-18 | 云谷（固安）科技有限公司 | Display panel and manufacturing method thereof |
| CN110911583B (en) * | 2019-11-28 | 2022-07-01 | 京东方科技集团股份有限公司 | Organic light-emitting display cover plate, manufacturing method and display device |
| CN111276632B (en) * | 2020-02-19 | 2021-03-16 | 深圳市华星光电半导体显示技术有限公司 | Display panel and manufacturing method thereof |
| TW202143477A (en) * | 2020-03-31 | 2021-11-16 | 日商索尼股份有限公司 | Display device and electronic apparatus |
| CN111474785A (en) * | 2020-05-12 | 2020-07-31 | 深圳市华星光电半导体显示技术有限公司 | Liquid crystal display panel |
| CN111599937B (en) | 2020-05-25 | 2022-10-14 | 视涯科技股份有限公司 | Organic light-emitting display panel and preparation method thereof |
| CN114843420A (en) * | 2022-04-20 | 2022-08-02 | 深圳市华星光电半导体显示技术有限公司 | Display panel, manufacturing method of display panel and display device |
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| CN103545345A (en) * | 2013-11-11 | 2014-01-29 | 京东方科技集团股份有限公司 | Display panel, manufacturing method of display panel and display device |
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