CN113204930A - Equivalent circuit suitable for single-frequency and double-frequency driving atmospheric pressure dielectric barrier dispersion discharge electrical characteristics and calculation method thereof - Google Patents

Equivalent circuit suitable for single-frequency and double-frequency driving atmospheric pressure dielectric barrier dispersion discharge electrical characteristics and calculation method thereof Download PDF

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CN113204930A
CN113204930A CN202110372586.4A CN202110372586A CN113204930A CN 113204930 A CN113204930 A CN 113204930A CN 202110372586 A CN202110372586 A CN 202110372586A CN 113204930 A CN113204930 A CN 113204930A
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张仲麟
聂秋月
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Abstract

The invention discloses an equivalent circuit of electrical characteristics of medium barrier dispersion discharge of atmospheric pressure suitable for single-frequency and double-frequency driving and a calculation method thereof. Step 1: calculating a single-frequency discharge with a discharge current, an air gap voltage, a medium voltage, a discharge instantaneous power, a coupling energy and a charge transport through a discharge air gap in a frequency range of kHz-MHz by using the equivalent circuit and the Lissajous figure of claim 1; step 2: based on the single-frequency discharge calculation in the step 1, the discharge current, the air gap voltage, the medium voltage, the discharge instantaneous power, the coupling energy and the charge transport through the discharge air gap are obtained through the linear superposition of two frequencies and calculation after filtering, wherein the frequency range of the double-frequency discharge is kHz-MHz. The invention solves a series of problems of low measurement accuracy of discharge electrical parameters such as discharge current, air gap voltage, medium voltage and accumulated charge, high interference, high requirement on environment, relatively high cost and the like in the discharge process of the existing double-frequency driving atmospheric pressure dielectric barrier dispersion discharge plasma.

Description

Equivalent circuit suitable for single-frequency and double-frequency driving atmospheric pressure dielectric barrier dispersion discharge electrical characteristics and calculation method thereof
Technical Field
The invention relates to the field of equivalent circuits of electrical characteristics, in particular to an equivalent circuit of electrical characteristics suitable for single-frequency and double-frequency driving atmospheric pressure dielectric barrier dispersion discharge and a calculation method thereof.
Background
Atmospheric Dielectric Barrier Discharge (DBD) is an important way to generate high density plasma at room temperature and pressure. Based on the unique technical advantages, the generated plasma has high density, low macroscopic temperature, and is rich in various active particles, etc., and is widely applied to the high and new technology and advanced manufacturing fields of energy chemical industry, resource environment, biomedicine, agricultural food, aerospace, rail transit, etc., and the plasma has become one of the hot spots of the international advanced technology research at present, and is closely related to the high and new technology, industrial application and major requirements.
For example, in the subject of special/precise materials, the technologies such as plasma Physical Vapor Deposition (PVD), enhanced chemical vapor deposition (PECVD), and plasma ion implantation for atmospheric pressure medium barrier glow discharge (APGD-SII) are usually adopted to prepare novel multifunctional thin film materials such as photoelectricity, microelectronics, corrosion resistance, wear resistance, and super-hardness; in the chemical industry, the high polymer film material can be printed and manufactured by adopting the atmospheric pressure dielectric barrier discharge plasma polymerization technology; applications in the microelectronics industry are more attractive, and the worldwide sales for the microelectronics industry is now many billions of dollars, with over one-third of microelectronic device devices being produced using low temperature plasma technology; in the production process of the super-large scale integrated circuit, the plasma etching technology can realize the etching process of high etching rate, high aspect ratio, high selection ratio, small microscopic nonuniformity and low energy operation; the method also shows great advantages in depositing the microelectronic thin film material without defects and with high adhesion and cleaning the wafer of the micro device. It can be said that the atmospheric dielectric barrier discharge plasma has been closely linked with the development of modern high and new technologies, so the research on the discharge process and discharge parameter index of the atmospheric dielectric barrier discharge plasma becomes more important.
The atmospheric pressure dielectric barrier discharge can work under a wider driving frequency (from kHz to MHz), which determines that the atmospheric pressure dielectric barrier discharge can present different working states under different working conditions. In addition, although many outstanding results have been obtained in the research on atmospheric pressure dielectric barrier discharge, decoupling between the generated plasma parameters is difficult for the currently common single-frequency driving, and therefore, the method based on the dual-frequency source common driving is currently a practicable plasma parameter regulation and control method. Meanwhile, the variable nonlinear behavior exists in the atmospheric pressure dielectric barrier discharge process, so that the original complex parameter diagnosis method and parameter test process are more difficult due to the introduction of double frequencies, people often cannot directly measure the energy transport and discharge modes of the discharge process, and the process and parameters can only be indirectly inverted by means of volt-ampere characteristics, impedance characteristics and the like of discharge plasma. At present, the commonly used diagnostic techniques mainly include probe diagnosis, microwave interference diagnosis, laser beating method, spectral mass spectrometry diagnosis, and the like. When the plasma contains fluctuation, oscillation and waves, the application of the probe method is very difficult, sometimes even the probe method cannot be applied, and the acrobatics on the surface of the probe can pollute the plasma, so that the I-V characteristic curve of the plasma is deformed, and the measurement result is seriously influenced; the microwave method has poor space response to the plasma and smaller dynamic range; in order to measure the scattering signal and have smaller statistical error, the laser method must adopt a high-power giant pulse laser as a light source and adopts a photodetector with high sensitivity, large signal-to-noise ratio and quick time response as a receiver, so that the operation is inconvenient and the cost is greatly increased; spectral mass spectrometry is extremely complex and difficult to accurately interpret, even molecular spectral lines used for end-point detection of plasma etching processes are sometimes unclear in their origin, and thin film deposition or etching on their optical windows can greatly alter or attenuate the spectral signals.
Disclosure of Invention
The invention provides an equivalent circuit suitable for single-frequency and double-frequency driving atmospheric pressure dielectric barrier dispersion discharge electrical characteristics and a calculation method thereof, and solves a series of problems of low measurement accuracy of discharge electrical parameters such as discharge current, air gap voltage, dielectric voltage and accumulated charge, high interference, high requirement on environment, relatively high cost and the like in the discharge process of the conventional double-frequency driving atmospheric pressure dielectric barrier dispersion discharge plasma.
The invention is realized by the following technical scheme:
an equivalent circuit suitable for single-frequency and double-frequency driving atmospheric pressure dielectric barrier dispersion discharge electrical characteristics comprises a low-frequency power supply, a high-frequency power supply, a switch, a single low-frequency equivalent circuit, a single high-frequency equivalent circuit and a double-frequency equivalent circuit; the low-frequency power supply and the high-frequency power supply are both connected with a switch, and the switches are respectively connected with a single low-frequency equivalent circuit, a single high-frequency equivalent circuit and a double-frequency equivalent circuit; the switch is a change-over switch.
A calculation method suitable for single-frequency and double-frequency driving atmospheric pressure dielectric barrier dispersion discharge electrical characteristic equivalent circuits comprises the following steps:
step 1: calculating a single-frequency discharge with a discharge current, an air gap voltage, a medium voltage, a discharge instantaneous power, a coupling energy and a charge transport through a discharge air gap in a frequency range of kHz-MHz by using the equivalent circuit and the Lissajous figure of claim 1;
step 2: based on the single-frequency discharge calculation in the step 1, the discharge current, the air gap voltage, the medium voltage, the discharge instantaneous power, the coupling energy and the charge transport through the discharge air gap are obtained through the linear superposition of two frequencies and calculation after filtering, wherein the frequency range of the double-frequency discharge is kHz-MHz.
Further, the single-frequency discharge is specifically that, in the atmospheric pressure dielectric barrier diffusion discharge process, the ratio of the charge changed on the surface of the dielectric to the discharge voltage is C ═ dQ/dV, and due to the existence of the insulating dielectric layer, the equivalent capacitance in the discharge process is equivalent to the barrier capacitance C on the dielectricdAnd air gap capacitance CgIn series, while discharging the cell capacitance CcellThe value of (d) is related to the barrier capacitance and the air gap capacitance by the formula:
Figure BDA0003009865560000031
further, according to the formula (1) and the Lissajous figure, in the self-sustaining periods A-D and C-B of discharge, the charge function Q (t) accumulated on the medium and the voltage V of the externally applied driving sourcetotalThe relationship of (t) is:
Q(t)＝Cd(Vtotal(t)±Vg(t)) (2)
wherein VgIs the voltage value loaded between the air gaps; at this time, the air gap voltage Vg(t) is kept constant equal to the effective breakdown voltage Vbreak。
Further, according to the formula (1) and the Lissajous figure, when the discharge reaches the extinguishing stages A-B and C-D, the charge function Q (t) accumulated on the medium and the voltage V of the externally applied driving sourcetotalThe relationship of (t) is:
Figure BDA0003009865560000032
wherein Q0With maximum charge q transferred through the air gapmaxCorrelation, the relationship is:
Figure BDA0003009865560000033
further, according to the formula (1) and the lissajous figure, in the stage a, the value is qmaxAnd Q0The difference, based on CdIs the slope of the B-C phase, and CcellThe slope of the A-B phase, therefore, the two values can be expressed as:
Figure BDA0003009865560000034
the combination of (4) and (5) can jointly obtain the maximum charge q of air gap transfermax。
Further, the medium voltage changes with time in the discharging process according to kirchhoff's law:
Figure BDA0003009865560000035
the voltage applied to the air gap is:
Vg(t)＝Vtotal(t)-Vd(t) (7)
the current flowing through the air gap is:
Figure BDA0003009865560000036
the total discharge current is:
Figure BDA0003009865560000041
after obtaining the air gap voltage and the total discharge current, the instantaneous power and the coupling energy of the discharge are obtained as follows:
P(t)＝JT(t)Vg(t) (10)
Figure BDA0003009865560000042
during discharge, the transport of charge across the discharge gap is also derived from equation (9):
Figure BDA0003009865560000043
further, the dual-frequency discharge specifically includes that for waveform disturbance generated by dual-frequency superposition, filtering is performed by adopting a fast fourier method, and a barrier capacitor C loaded on a mediumdComprises the following steps:
Figure BDA0003009865560000044
and the capacitance loaded on the air gap can be equivalent to:
Cg, double frequency(t)＝Cg+RP(t) (14)
Therefore, the discharge unit capacitor C under the dual-frequency driving at this timecell, dual frequencyCan be rewritten as:
Figure BDA0003009865560000045
and obtaining various discharge electrical parameters of the discharge process, namely discharge current, air gap voltage, medium voltage, discharge instantaneous power, coupling energy and charge transport through a discharge air gap according to equations (6) to (12).
The invention has the beneficial effects that:
the invention can measure the discharge current, air gap voltage, medium voltage and accumulated charge in the process of single-frequency and double-frequency driving atmospheric pressure medium barrier discharge in a wider frequency range (kHz-MHz), thereby deducing the energy exchange and energy distribution in the discharge process.
Drawings
FIG. 1 shows an atmospheric dielectric barrier discharge structure and driving method for the present invention.
FIG. 2 is a Lissajous figure under single-frequency discharge of the present invention, wherein (a) is a diagram showing a low-frequency discharge form and (b) is a diagram showing a high-frequency discharge form.
Fig. 3 is a lissajous figure under the dual frequency discharge of the present invention.
Fig. 4 is an equivalent circuit of the single/double frequency atmospheric pressure dielectric barrier diffusion discharge chemical characteristic related to the invention.
FIG. 5 is an equivalent circuit implemented by the computation of the present invention using MATLAB SIMULINK simulation control.
FIG. 6 is a graph of the simulation calculation single frequency discharge current, air gap voltage waveform of the present invention.
FIG. 7 is a graph of the simulated calculated dual-frequency discharge current, air gap voltage waveform of the present invention.
Fig. 8 is a graph of simulated calculated media accumulated charge of the present invention.
FIG. 9 is a graph of the total discharge power of the dual-frequency atmospheric-pressure dielectric barrier diffusion discharge and the instantaneous power of the plasma.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 4, an equivalent circuit for electrical characteristics of single-frequency and dual-frequency driven atmospheric pressure dielectric barrier diffusion discharge comprises a low-frequency power supply, a high-frequency power supply, a switch, a single low-frequency equivalent circuit, a single high-frequency equivalent circuit and a dual-frequency equivalent circuit; the low-frequency power supply and the high-frequency power supply are both connected with a switch, and the switches are respectively connected with a single low-frequency equivalent circuit, a single high-frequency equivalent circuit and a double-frequency equivalent circuit; the switch is a change-over switch.
And adopting an equivalent circuit model for the plasma electrical parameters in the discharge process to be measured. The invention is suitable for a flat-type single/double-frequency driving atmospheric pressure dielectric barrier discharge structure, as shown in figure 1. The driving frequency range is kHz-MHz.
As shown in fig. 2-3, a calculation method for an equivalent circuit of electrical characteristics of single-frequency and dual-frequency driven atmospheric pressure dielectric barrier diffusion discharge is provided, wherein the measurement method comprises the following steps:
step 1: calculating a single-frequency discharge with a discharge current, an air gap voltage, a medium voltage, a discharge instantaneous power, a coupling energy and a charge transport through a discharge air gap in a frequency range of kHz-MHz by using the equivalent circuit and the Lissajous figure of claim 1;
step 2: based on the single-frequency discharge calculation in the step 1, the discharge current, the air gap voltage, the medium voltage, the discharge instantaneous power, the coupling energy and the charge transport through the discharge air gap are obtained through the linear superposition of two frequencies and calculation after filtering, wherein the frequency range of the double-frequency discharge is kHz-MHz.
Further, the single-frequency discharge is specifically that, in the atmospheric pressure dielectric barrier diffusion discharge process, the ratio of the charge changed on the surface of the dielectric to the discharge voltage is C ═ dQ/dV, and due to the existence of the insulating dielectric layer, the equivalent capacitance in the discharge process is equivalent to the barrier capacitance C on the dielectricdAnd air gap capacitance CgIn series, while discharging the cell capacitance CcellThe value of (d) is related to the barrier capacitance and the air gap capacitance by the formula:
Figure BDA0003009865560000061
further, according to the formula (1) and the Lissajous figure, in the self-sustaining periods A-D and C-B of discharge, the charge function Q (t) accumulated on the medium and the voltage V of the externally applied driving sourcetotalThe relationship of (t) is:
Q(t)＝Cd(Vtotal(t)±Vg(t)) (2)
wherein VgIs the voltage value loaded between the air gaps; at this time, the air gap voltage Vg(t) remaining constant can be approximately considered equal to the effective breakdown voltage Vbreak。
Further, according to the formula (1) and the Lissajous figure, when the discharge reaches the extinguishing stages A-B and C-D, the charge function Q (t) accumulated on the medium and the voltage V of the externally applied driving sourcetotalThe relationship of (t) is:
Figure BDA0003009865560000062
wherein Q0With maximum charge q transferred through the air gapmaxCorrelation, the relationship is:
Figure BDA0003009865560000063
further, according to the formula (1) and the lissajous figure, when the discharge is in the c stage, the amplitude of the voltage of the driving source is changed rapidly; at stage a, its value is qmaxAnd Q0The difference, based on CdIs the slope of the B-C phase, and CcellThe slope of the A-B phase, therefore, the two values can be expressed as:
Figure BDA0003009865560000064
the combination of (4) and (5) can jointly obtain the maximum charge of air gap transferQuantity qmax。
Further, the medium voltage changes with time in the discharging process according to kirchhoff's law:
Figure BDA0003009865560000065
the voltage applied to the air gap is:
Vg(t)＝Vtotal(t)-Vd(t) (7)
the current flowing through the air gap is:
Figure BDA0003009865560000071
the total discharge current is:
Figure BDA0003009865560000072
after obtaining the air gap voltage and the total discharge current, the instantaneous power and the coupling energy of the discharge are obtained as follows:
P(t)＝JT(t)Vg(t) (10)
Figure BDA0003009865560000073
during discharge, the transport of charge across the discharge gap is also derived from equation (9):
Figure BDA0003009865560000074
further, the dual-frequency discharge specifically includes that for waveform disturbance generated by dual-frequency superposition, filtering is performed by adopting a fast fourier method, and a high (low) frequency part of the waveform disturbance is filtered; the relationship between the discharge plasma and the driving source becomes more complicated due to the dual frequency interaction, in which case the load is applied between the plasma and the driving sourceSubstantial barrier capacitance CdComprises the following steps:
Figure BDA0003009865560000075
and the capacitance loaded on the air gap can be equivalent to:
Cg, double frequency(t)＝Cg+RP(t) (14)
Therefore, the discharge unit capacitor C under the dual-frequency driving at this timecell, dual frequencyCan be rewritten as:
Figure BDA0003009865560000076
and obtaining various discharge electrical parameters of the discharge process, namely discharge current, air gap voltage, medium voltage, discharge instantaneous power, coupling energy and charge transport through a discharge air gap according to equations (6) to (12).
The specific simulation diagrams are shown in FIGS. 5-8.
Through the embodiment of the invention, various electrical parameters in the discharging process can be calculated, and compared with other equivalent diagnosis methods, the method has the following advantages: 1. the operation steps are simplified, and the calculation result can be obtained more quickly; 2. compared with the experimental result, the accuracy is higher, the electrical parameters in the discharging process can be simulated more accurately, and the plasma parameters are obtained through inversion.
FIG. 9- (Y-O) -is a calculation result; and O is experimental data.

Claims (8)

1. An equivalent circuit suitable for single-frequency and double-frequency driving atmospheric pressure dielectric barrier dispersion discharge electrical characteristics is characterized in that the equivalent circuit comprises a low-frequency power supply, a high-frequency power supply, a switch, a single low-frequency equivalent circuit, a single high-frequency equivalent circuit and a double-frequency equivalent circuit; the low-frequency power supply and the high-frequency power supply are both connected with a switch, and the switches are respectively connected with a single low-frequency equivalent circuit, a single high-frequency equivalent circuit and a double-frequency equivalent circuit; the switch is a change-over switch.
2. The equivalent circuit suitable for the single-frequency and double-frequency driving atmospheric pressure dielectric barrier dispersion discharge electrical characteristics is characterized by comprising the following steps of:
step 1: calculating a single-frequency discharge with a discharge current, an air gap voltage, a medium voltage, a discharge instantaneous power, a coupling energy and a charge transport through a discharge air gap in a frequency range of kHz-MHz by using the equivalent circuit and the Lissajous figure of claim 1;
step 2: based on the single-frequency discharge calculation in the step 1, the discharge current, the air gap voltage, the medium voltage, the discharge instantaneous power, the coupling energy and the charge transport through the discharge air gap are obtained through the linear superposition of two frequencies and calculation after filtering, wherein the frequency range of the double-frequency discharge is kHz-MHz.
3. The equivalent circuit suitable for single-frequency and double-frequency driving atmospheric pressure dielectric barrier dispersion discharge electrical characteristics is characterized in that the single-frequency discharge specifically includes that in the atmospheric pressure dielectric barrier dispersion discharge process, the ratio of the charge changed on the surface of the medium to the discharge voltage is C ═ dQ/dV, and due to the existence of the insulating medium layer, the equivalent capacitance in the discharge process is equivalent to the barrier capacitance C on the mediumdAnd air gap capacitance CgIn series, while discharging the cell capacitance CcellThe value of (d) is related to the barrier capacitance and the air gap capacitance by the formula:
Figure FDA0003009865550000011
4. the equivalent circuit of electrical characteristics of single-frequency and dual-frequency driven atmospheric dielectric barrier diffusion discharge as claimed in claim 3, wherein the charge function Q (t) accumulated on the dielectric and the voltage V of the externally applied driving source are determined according to the formula (1) and the Lissajous figures during the self-sustaining periods A-D and C-B of the dischargetotalThe relationship of (t) is:
Q(t)＝Cd(Vtotal(t)±Vg(t)) (2)
wherein VgIs the voltage value loaded between the air gaps; at this time, the air gap voltage Vg(t) is kept constant equal to the effective breakdown voltage Vbreak。
5. The equivalent circuit of electrical characteristics of single-frequency and dual-frequency driven atmospheric dielectric barrier diffusion discharge as claimed in claim 3, wherein the charge function Q (t) accumulated on the dielectric and the voltage V of the externally applied driving source are obtained according to the formula (1) and the Lissajous figure during the discharge extinguishing period A-B and C-DtotalThe relationship of (t) is:
Figure FDA0003009865550000012
wherein Q0With maximum charge q transferred through the air gapmaxCorrelation, the relationship is:
Figure FDA0003009865550000021
6. the equivalent circuit of electrical characteristics of dielectric barrier diffusion discharge with atmospheric pressure suitable for single-frequency and dual-frequency driving according to claim 5, wherein the value of q in the stage a is q according to the formula (1) and the Lissajous figuremaxAnd Q0The difference, based on CdIs the slope of the B-C phase, and CcellThe slope of the A-B phase, therefore, the two values can be expressed as:
Figure FDA0003009865550000022
and
Figure FDA0003009865550000023
the combination of (4) and (5) can jointly obtain the maximum air gap transferQuantity of electric charge qmax。
7. The equivalent circuit suitable for the electrical characteristics of the single-frequency and double-frequency driven atmospheric pressure dielectric barrier diffusion discharge according to the claim 3, 4 or 6, is characterized in that the dielectric voltage changes with time during the discharge process according to the kirchhoff's law:
Figure FDA0003009865550000024
the voltage applied to the air gap is:
Vg(t)＝Vtotal(t)-Vd(t)(7)
the current flowing through the air gap is:
Figure FDA0003009865550000025
the total discharge current is:
Figure FDA0003009865550000026
after obtaining the air gap voltage and the total discharge current, the instantaneous power and the coupling energy of the discharge are obtained as follows:
P(t)＝JT(t)Vg(t) (10)
Figure FDA0003009865550000027
during discharge, the transport of charge across the discharge gap is also derived from equation (9):
Figure FDA0003009865550000031
8. the equivalent circuit of the electrical characteristics of the single-frequency and double-frequency driving atmospheric pressure dielectric barrier dispersion discharge as claimed in claim 2, wherein the double-frequency discharge is implemented by filtering a waveform disturbance generated by double-frequency superposition by using a fast Fourier method and loading a barrier capacitor C on a mediumdComprises the following steps:
Figure FDA0003009865550000032
and the capacitance loaded on the air gap can be equivalent to:
Cg, double frequency(t)＝Cg+RP(t) (14)
Therefore, the discharge unit capacitor C under the dual-frequency driving at this timecell, dual frequencyCan be rewritten as:
Figure FDA0003009865550000033
and obtaining various discharge electrical parameters of the discharge process, namely discharge current, air gap voltage, medium voltage, discharge instantaneous power, coupling energy and charge transport through a discharge air gap according to equations (6) to (12).
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