CN113204126A - Debugging device and method for multi-pass cascade amplification laser driver - Google Patents

Debugging device and method for multi-pass cascade amplification laser driver Download PDF

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CN113204126A
CN113204126A CN202110455245.3A CN202110455245A CN113204126A CN 113204126 A CN113204126 A CN 113204126A CN 202110455245 A CN202110455245 A CN 202110455245A CN 113204126 A CN113204126 A CN 113204126A
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transmission
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CN113204126B (en
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朱海东
郭爱林
张攀政
刘志刚
胡恒春
吕凤年
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Shanghai Institute of Optics and Fine Mechanics of CAS
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    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
    • G—PHYSICS
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    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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    • G—PHYSICS
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    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
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Abstract

The device comprises an optical fiber light source, a wedge-shaped reflector, a wavefront sensor, a wave plate, a vacuum unit and a computer. The multi-pass cascade amplification laser driver consists of a spatial filter, an amplifier, a transflective polarizer, a reflector, an electro-optical switch and a deformable mirror. The optical fiber light source, the wave plate and the wavefront sensor are used for detecting the aberration of the output light beam of the multi-pass cascade amplification laser driver in real time, and the cavity space filter and the transmission space filter are fed back and adjusted to finish the online fine debugging of the multi-pass cascade amplification laser driver. The adjusting device and the method have the characteristics of simple structure, convenience in adjustment, high detection precision and the like, and the online calibration debugging capability and the output beam quality of the multi-pass cascade amplification laser driver are improved.

Description

Debugging device and method for multi-pass cascade amplification laser driver
Technical Field
The invention relates to an optical debugging device and method, in particular to a debugging device and method of a multi-pass cascade amplification laser driver.
Background
For decades, advances in laser technology and its industry have profound effects on national economic development, national defense and military construction, and academic technological research. With the development demand of the laser fusion energy ICF, new requirements and challenges are also presented to the high-power laser driver. In order to meet the requirements of fusion energy and physical exploration, the large-caliber high-power multi-pass cascade laser driver becomes an indispensable instrument for scientists to develop laser research in the world, and is also a laser engineering project needing precise debugging.
The large-caliber multi-pass cascade laser driver adopts multi-pass laser transmission amplification, and the energy utilization efficiency can be greatly improved. In a multi-pass cascade laser driver with safe and stable operation in the world, one of the light path transmission modes of 'four-pass cavity amplification and two-pass boosting' is adopted, namely, when light beams are transmitted back and forth in the multi-pass cascade laser driver, the light beams pass through the boosting amplifier twice and pass through the cavity amplifier four times, and the precise debugging, installation and improvement of the light beam quality of the output light beams are important research contents for the development of large-caliber multi-pass cascade laser engineering.
In the multi-pass cascade amplification laser driver, a large-caliber optical element comprises a long-pass transmission spatial filter, an amplifier, a reflector, a transmission and reflection polarizing film, an electro-optical switch, a cavity spatial filter and a deformable mirror. The large-caliber long-range spatial filter is used for restraining the nonlinear effect, improving the safe operation flux of a system, filtering and stopping high-frequency information, protecting a laser working medium, and the deformable mirror can be used for performing wavefront correction in real time to improve the quality of an output light beam and the energy concentration of a far-field focal spot, so that the spatial filter and the deformable mirror are key optical elements. In addition, the via efficiency and beam quality of the long-range spatial filter are also reduced due to residual aberration of other optical elements caused by processing, assembly, calibration and the like.
In order to meet the spatial arrangement characteristics and technical indexes of the multi-pass cascade amplification laser driver, a device and a method for online precise debugging of all optical elements of a full link are required to be built. Aiming at the debugging requirements of the multi-pass cascade amplification laser driver, the invention provides an online precision debugging device and method by combining the light path of the driver and the arrangement of devices, so as to improve the spatial filtering via hole efficiency, the output light beam quality and the safe operation capability of the multi-pass cascade amplification laser driver.
Disclosure of Invention
The invention provides an optical debugging device and method, wherein the device comprises an optical fiber light source, a sampling reflector, a wavefront sensor, a wave plate, a vacuum unit and a computer. The online fine debugging of the multi-pass cascade amplification laser driver is completed by utilizing the characteristics of simple structure of the adjusting device and method, convenience in adjustment, high detection precision and the like, and the online assembling and correcting capability and the output light beam quality of the multi-pass cascade amplification laser driver are improved.
In order to achieve the purpose, the invention adopts the following technical scheme:
a multi-pass cascade amplification laser driver is characterized by comprising a transmission space filter, a boosting amplifier, a boosting reflector, a transflective polaroid, a cavity reflector, an electro-optical switch, a cavity space filter, a cavity amplifier and a deformable mirror.
The multi-pass cascade laser driver adopts a light path transmission mode of 'four-pass cavity amplification and two-pass boosting', namely, when light beams are transmitted back and forth in the multi-pass cascade laser driver, the light beams pass through the boosting amplifier twice and pass through the cavity amplifier four times.
A debugging device of a multi-pass cascade amplification laser driver comprises an optical fiber light source component, a wedge-shaped reflector, a wavefront acquisition component, a wave plate component, a vacuum unit and a computer.
The transmission space filter comprises a transmission space vacuum pipeline, and a transmission space input lens, a transmission space output lens and a transmission space filtering hole disc which are fixed at the front end and the rear end of the transmission space vacuum pipeline, wherein the transmission space output lens is fixed on the vacuum pipeline, and the transmission space input lens is provided with a driving motor and can axially translate along the transmission space vacuum pipeline in vacuum and atmospheric states.
The cavity space filter comprises a cavity space vacuum pipeline, and a cavity space input lens, a cavity space output lens and a cavity space filtering hole disc which are fixed at the front end and the rear end of the cavity space vacuum pipeline, wherein the cavity space input lens and the cavity space output lens are provided with driving motors and can axially translate along the cavity space vacuum pipeline in vacuum and atmospheric states.
The optical fiber light source assembly comprises two paths of single-mode optical fiber light sources with adjustable power, and a first optical fiber collimator, a first right-angle total reflection prism, a second optical fiber collimator and a second right-angle total reflection prism which are positioned in the vacuum pipeline of the transmission space; the first output end of the single-mode fiber light source enters a transmission space vacuum pipeline of a transmission space filter through a first path of fiber and then is connected with a first fiber collimator, the divergence angle of an output light beam of the first fiber collimator is matched with an input lens of the transmission space, and the light beam is split and mirrored into an output light beam of a first small hole of a transmission space filter hole disc through a first right-angle total reflection prism; and a second output end of the single-mode optical fiber light source enters a transmission space vacuum pipeline of the transmission space filter through a second path of optical fiber and is connected with a second optical fiber collimator, the divergence angle of an output light beam of the second optical fiber collimator is matched with a transmission space output lens of the transmission space filter, the light beam is subjected to beam splitting and mirroring through a second right-angle total reflection prism to form a second small-hole emergent light beam of the transmission space filter hole disc, the emergent light beam is collimated through the second optical fiber collimator and the transmission space output lens and then enters the wedge-shaped reflector, the front surface of the wedge-shaped reflector is plated with a reflecting film, and the rear surface of the wedge-shaped reflector is plated with an antireflection film.
The wave front acquisition assembly comprises a wave front sensor, a small-caliber lens and a reflector which are positioned in the vacuum pipeline of the transmission space; collimated light beams output by the second optical fiber collimator and the transmission space output lens are reflected by the front surface of the wedge-shaped reflector, then deflected by a small angle and returned to the transmission space output lens, and then enter the small-caliber lens after being reflected by the reflector to finish beam contraction, and then are incident to the wavefront sensor.
The wave plate assembly comprises a first wave plate, a first wave plate driving motor, a second wave plate and a second wave plate driving motor which are positioned in the cavity space vacuum pipeline; the first wave plate and the second wave plate are 1/2 wave plates, the first wave plate is moved to the second small hole of the cavity space filtering hole plate through the first wave plate driving motor, and the second wave plate is moved to the third small hole of the cavity space filtering hole plate through the second wave plate driving motor.
The vacuum unit comprises a low-temperature pump vacuum combination unit consisting of a low vacuum unit and a high vacuum unit, a transmission vacuum gate valve and a cavity vacuum gate valve; the transmission vacuum gate valve and the cavity vacuum gate valve are respectively communicated with the transmission space filter and the cavity space filter, and the transmission space filter and the cavity space filter are maintained in a vacuum or atmospheric state by controlling the opening and closing of the transmission vacuum gate valve and the cavity vacuum gate valve.
The computer is respectively connected with the wavefront sensor and the deformable mirror; the wave-front sensor works in a continuous or pulse single-frame trigger mode and measures aberration data of a light beam incident to the wave-front sensor; and the computer controls the deformable mirror to finish aberration correction according to the measured wavefront data of the wavefront sensor.
The transmission space input lens, the transmission space output lens, the cavity space input lens and the cavity space output lens are all thick lenses, and the focal length f meets the following formula:
Figure BDA0003040294180000031
in the formula: n isgIs the refractive index of the lens, R1And R2Respectively the curvature of the two side spherical surfaces of the thick lens, D the thickness between the two side spherical surfaces of the center of the lens, n1And n2Respectively the refractive index of the medium on both sides of the thick lens.
The first path of optical fiber and the second path of optical fiber are both polarization maintaining optical fibers, output horizontal polarization continuous light sources and are consistent with the working wavelength of the laser light source of the operation seed of the multi-path cascade amplification laser driver; the first optical fiber collimator and the first right-angle total reflection prism are sequentially fixed on the combined adjusting frame from front to back, and the adjusting frame has five-dimensional precision adjustment of integral lifting, pitching, deflection and horizontal and front-back translation; the first optical fiber collimator, the first right-angle total reflection prism and the transmission space input lens are combined to generate a paraxial plane wave beam incidence multi-pass cascade amplification laser driver with a near diffraction limit.
After the wave plate vacuum driving motor is started to move the first wave plate and the second wave plate to the second small hole and the third small hole of the cavity space filtering hole disc respectively, the paraxial plane wave beam close to the diffraction limit is transmitted twice back and forth in the cavity space filter after being reflected by the boosting reflector, the transmission and reflection polarizing film, the cavity reflector and the deformation mirror, and is transmitted once back and forth in the transmission space filter, and the path of the paraxial plane wave beam close to the diffraction limit is the same as the path of the operation seed laser light source of the multi-pass cascade amplification laser driver, and the aberration data of the paraxial plane wave beam close to the diffraction limit is acquired by the wavefront acquisition component and output by the multi-pass cascade amplification laser driver.
The second optical fiber collimator and the second right-angle total reflection prism are sequentially fixed on a combined adjusting frame, and the adjusting frame has five-dimensional precision adjustment of integral lifting, pitching, deflection, left-right translation and front-back translation; the second optical fiber collimator, the second right-angle total reflection prism and the transmission space output lens are combined to generate a near-diffraction limit coaxial plane wave beam to enter the multi-pass cascade amplification laser driver, the near-diffraction limit coaxial plane wave beam enters the wavefront collection assembly through reflection of the wedge-shaped reflector, and aberration data of the near-diffraction limit coaxial plane wave beam is collected through the wavefront collection assembly and serves as initial data for debugging the multi-pass cascade amplification laser driver.
The transmission space output lens is fixed and takes the optical axis thereof as a reference optical axis, namely, the debugging device of the multi-pass cascade amplification laser driver and all optical elements of the multi-pass cascade amplification laser driver finish debugging by taking the optical axis and the spatial position of the transmission space output lens as reference standards.
Focusing far-field characteristics at the transmission space filtering hole disc and the cavity space filtering hole disc are derived from beam aberration characteristics, and the via hole efficiency of the transmission space filter and the cavity space filter is influenced; when the laser beam is transmitted by the multi-pass cascade amplification laser driver, the far-field focal spot divergence angle comes from defocusing aberration, and the rest aberration influences the focal spot form; adjusting the axial spatial positions of the lenses corresponding to the transmission spatial filter and the cavity spatial filter, and dynamically adjusting the defocusing aberration of the output beam of the multi-pass cascade amplification laser driver; the deformation mirror is adjusted to dynamically adjust the multi-pass cascade amplification laser driver output beam aberration and the far field focal spot.
A debugging method of a multi-pass cascade amplification laser driver is characterized by comprising the following steps:
firstly, a transmission space vacuum pipeline of the transmission space filter is arranged on a support frame of an optical table, a transmission space input lens is arranged at an input end, a transmission space output lens is arranged and fixed at an output end, and a mechanical central axis of the transmission space vacuum pipeline and the transmission space output lens have the same optical axis; the focal length of an output lens in a vacuum transmission space pipeline under a vacuum condition is obtained through the formula (1), the center of a second small hole of a filter hole disc of a transmission space filter is superposed with the focal point of the output lens in the transmission space under the vacuum condition, a second optical fiber collimator and a second right-angle total reflection prism combined adjusting frame are arranged near the second small hole, and an optical fiber point light source of the second optical fiber collimator is smaller than one-time diffraction limit of the output lens in the transmission space and forms a mirror image relation with the center of the second small hole; the second output end of the single-mode optical fiber light source transmits the light source to a second optical fiber collimator and a second right-angle total reflection prism through a second path of optical fiber, and the light source is collimated by a transmission space output lens of the transmission space filter to generate a near-diffraction limit coaxial plane wave light beam; a first optical fiber collimator and a first right-angle total reflection prism combined adjusting frame are arranged near a first small hole of a transmission space filtering hole disc of the transmission space filter, and an optical fiber point light source of the first optical fiber collimator is smaller than one-time diffraction limit of a transmission space input lens and forms a mirror image relation with the center of the first small hole; the first output end of the single-mode optical fiber light source transmits the light source to a first optical fiber collimator and a first right-angle total reflection prism through a first path of optical fiber, and the light source is collimated by a transmission space input lens of the transmission space filter to generate paraxial plane wave beams close to the diffraction limit;
secondly, starting a low vacuum unit and a high vacuum unit of a cryopump vacuum combination unit of the vacuum unit, and pumping a transmission space filter to a vacuum state by using a transmission vacuum gate valve; a wedge-shaped reflector is arranged behind a transmission space output lens of the transmission space filter and the pitching and the deflection of the wedge-shaped reflector are adjusted, a coaxial plane wave beam close to the diffraction limit is reflected by the wedge-shaped reflector to enter a wave front acquisition assembly, a wave front sensor measures the output aberration of a beam shrinking beam, a small-caliber lens in the wave front acquisition assembly is finely adjusted along the axial direction, the defocusing aberration is adjusted to be zero, aberration data is recorded and recorded as phi0The initial data is used for debugging the multi-pass cascade amplification laser driver; the combined adjusting frame of the second optical fiber collimator and the second right-angle total reflection prism integrally translates to the side edge of the filter hole disc, namely moves out of the optical path;
thirdly, a boosting reflector is arranged in the optical path of the paraxial plane wave beam near the diffraction limit output by the transmission space filter transmission space input lens through the laser tracker according to the optical path and space arrangement of the multi-pass cascade amplification laser driver, the horizontal deflection and the pitch angle of the boosting reflector are adjusted, the incident paraxial plane wave beam near the diffraction limit is reflected by the boosting reflector and then enters the transmission space filter again, the paraxial plane wave beam enters the wedge-shaped reflector and the wavefront acquisition component through the second small hole, the wavefront sensor records aberration data and records the aberration data as phi1(ii) a A boosting amplifier is arranged between the boosting reflector and the transmission space input lens, and after the horizontal deflection and the pitch angle of the boosting amplifier are integrally adjusted, the wave front sensor records aberration data which are recorded as phi2(ii) a The axial position of the transmission space input lens is adjusted by the driving motor, and when the aberration data phi2When the middle defocusing aberration is divergent, the transmission space input lens moves coaxially along the transmission space vacuum pipeline to the direction far away from the second small hole, and when the aberration data phi is obtained2When the intermediate defocus aberration is convergence, null is transmittedThe inter-input lens moves coaxially along the transmission space vacuum pipeline to the direction close to the second small hole, and when the aberration data phi recorded by the wave front sensor2When the middle defocusing aberration is zero, the input lens stops moving and is fixedly locked;
mounting a cavity space vacuum pipeline of the cavity space filter on a support frame of the optical table board, mounting a cavity space input lens at an input end, mounting a cavity space output lens at an output end, and enabling a mechanical central shaft of the cavity space vacuum pipeline to be coaxial with the cavity space input lens and the cavity space output lens; obtaining the focal lengths of a cavity space input lens and a cavity space output lens under the vacuum condition in the transmission space vacuum pipeline through the formula (1), superposing the focal points of the cavity space input lens and the cavity space output lens through adjusting a driving motor, placing a cavity space filtering hole disc of a cavity space filter, and positioning the center of a fifth small hole at the common focal point of the cavity space input lens and the cavity space output lens; starting a low vacuum unit, a high vacuum unit and a cavity vacuum gate valve of a cryopump vacuum combination unit of the vacuum unit, vacuumizing a cavity space filter, and adjusting a cavity space input lens and a cavity space output lens to be coaxial and confocal through driving motors of the cavity space input lens and the cavity space output lens under a vacuum condition;
fifthly, according to the optical path and spatial arrangement of the multi-pass cascade amplification laser driver, a laser tracker is utilized to install a deformable mirror at the outlet end of a cavity space output lens of the cavity space filter; installing a transmission and reflection polarizing film at a cavity space input lens of the cavity space filter, and adjusting to a polarization working angle; adjusting the horizontal deflection and pitch angle of the boosting reflector, and reflecting paraxial plane wave beams close to the diffraction limit output by a transmission space input lens of the transmission space filter by a transmission and reflection polarizing film and then entering the cavity space filter; a cavity amplifier is arranged between a cavity space output lens and a deformable mirror of the cavity space filter; the paraxial plane wave beam near the diffraction limit is transmitted back and forth once in the cavity space filter, the cavity amplifier and the deformable mirror and returned to the transmission space filter, the wave front sensor records the aberration data and is recorded as phi3(ii) a Translating the cavity space output lens along the optical axis by a drive motor when the aberration data phi3When the middle defocusing aberration is divergent, the cavity space output lens moves coaxially along the cavity space vacuum pipeline to the direction far away from the fifth small hole for adjustment, and when the aberration data phi is obtained3When the medium defocusing aberration is converged, the cavity space input lens moves coaxially along the vacuum pipeline to be close to the fifth small hole for adjustment, and recorded aberration data phi3When the middle defocusing aberration is zero, the cavity space output lens stops moving and completes fixing and locking;
sixthly, an electro-optical switch and a cavity reflector are arranged behind the transflective polarizer, and the central normal direction of the mirror surfaces of the electro-optical switch and the cavity reflector is superposed with the central optical axis of the cavity space filter; a first wave plate of the wave plate assembly moves to a second small hole of the cavity space filtering hole plate through a first wave plate driving motor; a second wave plate of the wave plate assembly moves to a third small hole of a filter hole disc of the cavity space filter through a second wave plate driving motor; the posture of the transmission and reflection polarizing plate is finely adjusted, the paraxial wave near the diffraction limit paraxial plane wave output by the transmission space input lens of the transmission space filter is slightly deflected and then enters the cavity amplifier and the deformable mirror after passing through the first small hole, the micro-adjustment deformable mirror gesture enables incident light beams to be deflected in a micro mode and then pass through a second small hole and a first wave plate in an paraxial mode, the polarization direction of the light beams is rotated by 90 degrees and then is transmitted into a transmission and reflection polarizing film and an electro-optical switch and then is incident to a cavity reflector, the micro-adjustment cavity reflector gesture enables the light beams to be turned back and then is transmitted through the electro-optical switch and the transmission and reflection polarizing film and then is incident to a third small hole and a second wave plate, the polarization direction of the light beams is rotated by 90 degrees again and then is incident to the deformable mirror through a cavity amplifier, the light beams are reflected by the deformable mirror and then are reflected by a fourth small hole and then return to a boosting space filter again, the wavefront sensor is started to record aberration data and is recorded as phi.4(ii) a Translating the cavity space input lens along the optical axis by a drive motor when the aberration data phi4When the middle defocusing aberration is divergent, the cavity space input lens moves and adjusts along the cavity space vacuum pipeline to the direction far away from the fifth small hole, and when the aberration data phi is obtained4When the middle defocusing aberration is convergent, the input lens moves and adjusts towards the direction close to the fifth small hole along the cavity space vacuum pipeline, and when the aberration data phi is obtained4When the middle defocusing aberration is zero, the output lens stops moving and completes fixing and locking；
Seventhly, after the debugging process is completed, the recorded aberration data phi0，Ф1，Ф2，Ф3，Ф4The intermediate defocusing aberration is adjusted to be zero, and the multi-pass cascade amplification laser driver has good spatial filtering via hole efficiency; aberration data phi4Phi of0The difference between the two is the residual aberration of the multi-pass cascade amplification laser driver after debugging is finished;
integrally translating a combined adjusting frame of a first optical fiber collimator and a first right-angle total reflection prism of an optical fiber light source component to the side edge of a transmission space filtering hole disc, moving out a light path, respectively moving a first wave plate and a second wave plate out of a second small hole and a third small hole of a cavity space filtering hole disc through a wave plate vacuum driving motor, and completing debugging work by a multi-pass cascade amplification laser driver debugging device; injecting a running seed laser light source into a first small hole of a filter hole disc of a transmission space filter of the multi-pass cascade amplification laser driver; and correcting the aberration output by injecting the seed laser light source into the multi-pass cascade amplification laser driver through the wavefront sensor, the computer and the deformable mirror.
Principle of the invention
Principle 1 thick lens focal length
As is well known, the core optical elements of a spatial filter are input and output optical lenses with different apertures and focal lengths, and a filtering aperture located at the focal point of the lenses. The long-range spatial filter is mostly adopted in the engineering of the large-caliber high-power laser driver. The performance of long-range spatial filters and their tuning is crucial to the development and later operation of the device. Due to safety requirements, thick lenses are almost used for long-range spatial filters in large-aperture high-power laser drivers, and the confocal error of the lenses is usually less than two ten-thousandth. According to the working environment of the large-caliber high-power laser driver, the outer side of the spatial filter is in an atmospheric environment, and the inner side of the spatial filter is in a vacuum state, namely, a medium on one side of the lens is in the atmosphere, and the other side of the lens is in vacuum. The refractive index of air is 1.00029, and the refractive index of vacuum is 1. It is not difficult to obtain that the difference between the refractive index of air and the refractive index of vacuum is about three ten-thousandths, i.e. the difference between the refractive indexes of the media on both sides of the thick lens of the long-range spatial filter cannot be ignored. The focal length formula when the media on the two sides of the thick lens are different is obtained by derivation as follows:
Figure BDA0003040294180000081
in the formula: n isgIs the refractive index of the lens, R1And R2The curvatures of the spherical surfaces at the two sides of the lens are respectively shown, and D is the thickness between the spherical surfaces at the two sides of the center of the lens. n is1And n2Respectively the refractive index of the medium at both sides of the lens.
Determining n according to the usage environment of spatial filter in multi-pass cascade amplification laser driver1And n2The value of (a). When both sides are atmosphere in the early stage of debugging the spatial filter, n1＝n21.00029; the space filter is vacuum at the inner side after operation, n21 is ═ 1; outside is the atmosphere, n1＝1.00029。
Compared with the prior art, the invention has the beneficial effects that:
1) the method comprises the steps that a light source, a wave plate and a wavefront sensor are used for detecting the wavefront of a light beam output by a multi-pass cascade amplification laser driver in real time, and an online adjusting cavity space filter and a transmission space filter are fed back to complete online fine debugging of the multi-pass cascade amplification laser driver;
2) the online debugging device has the characteristics of simple structure, convenience in adjustment, high detection precision and the like, and improves the online debugging capability and the output beam quality of the multi-pass cascade amplification laser driver.
Drawings
FIG. 1 is a schematic diagram of a multi-pass cascade amplification laser driver in the prior art
In the figure, the multi-pass cascade amplification laser driver 7, the transmission spatial filter 71, the booster amplifier 72, the booster mirror 73, the transflective polarizer 74, the cavity mirror 75, the electro-optical switch 76, the cavity spatial filter 77, the cavity amplifier 78, the anamorphic mirror 79, the transmission space input lens 711, the transmission space output lens 712, the transmission space filter aperture disk 713, the cavity space input lens 771, the cavity space output lens 772, and the cavity space filter aperture disk 773
FIG. 2 is a schematic diagram of optical path transmission of a multi-pass cascade amplification laser driver in the prior art
When the light beam of the seed light source is transmitted in the multi-pass cascade laser driver, the light beam passes through the boosting amplifier twice and passes through the cavity amplifier four times
FIG. 3 is a schematic structural diagram of a debugging apparatus for a multi-pass cascade amplification laser driver according to the present invention
In the figure, an optical fiber light source component 1, a sampling reflector 2, a wavefront acquisition component 3, a wave plate component 4, a vacuum unit 5, a computer 6 and a multi-pass cascade amplification laser driver 7
FIG. 4 is a schematic diagram of a fiber optic light source module and a transmission spatial filter aperture according to the present invention
In the figure, a first optical fiber 110, a second optical fiber 120, a first optical fiber collimator 111, a first right-angle total reflection prism 112, a second optical fiber collimator 121, a second right-angle total reflection prism 122, a transmission space filtering hole disc 713, a first small hole 7131 and a second small hole 7132
FIG. 5 is a schematic diagram of a wavefront sensor device according to the present invention
The wavefront collecting component 3, the wavefront sensor 31, the small-caliber lens 32 and the reflector 33
FIG. 6 is a schematic diagram of an aperture and waveplate of a cavity spatial filter according to the present invention
In the figure, the wave plate assembly 4, the first wave plate 41, the second wave plate 42, the cavity space filter aperture plate 773, the first small hole 7731, the second small hole 7732, the third small hole 7733, the fourth small hole 7734 and the fifth small hole 7735
FIG. 7 is a schematic view of a vacuum unit according to the present invention
In the figure, a vacuum unit 5, a cryopump vacuum combination unit 51, a transmission vacuum gate valve 52 and a cavity vacuum gate valve 53
FIG. 8 shows the experimental results of the debugging of the multi-pass cascade amplification laser driver of the present invention
In the figure, the wave front (a) of an output beam before debugging, the defocusing aberration (b) of the output beam before debugging, the wave front (c) of the output beam after debugging, the wave front (d) of the output beam after debugging and correction by a deformable mirror, and the wavelength of a PV (peak-to-valley value) and the RMS (root-mean-square) unit are all the wavelengths of a laser light source for operating seeds
Detailed Description
The invention is further illustrated by the following figures and examples, which should not be construed as limiting the scope of the invention:
referring to fig. 1, as shown, a multi-pass cascade amplification laser driver 7 includes a transmission space filter 71, a booster amplifier 72, a booster mirror 73, a transflective polarizer 74, a cavity mirror 75, an electro-optical switch 76, a cavity space filter 77, a cavity amplifier 78, and a deformable mirror 79
Referring to fig. 2, as shown in the figure, the multi-pass cascaded laser driver adopts a "four-pass cavity amplifier + two-pass boosting" optical path transmission mode, that is, when a light beam is transmitted back and forth in the multi-pass cascaded laser driver, the light beam passes through the boosting amplifier twice and passes through the cavity amplifier four times.
Referring to fig. 3, as shown in the figure, the debugging device of the multi-pass cascade amplification laser driver comprises a fiber light source component 1, a wedge-shaped reflector 2, a wavefront collecting component 3, a wave plate component 4, a vacuum unit 5 and a computer 6;
the transmission space filter 71 comprises a transmission space vacuum pipeline, and a transmission space input lens 712, a transmission space output lens 711 and a transmission space filter hole disc 713 which are fixed at the front end and the rear end of the transmission space vacuum pipeline, wherein the transmission space output lens 711 is fixed on the vacuum pipeline, and the transmission space input lens 712 is provided with a driving motor and can axially translate along the transmission space vacuum pipeline in vacuum and atmospheric states.
The cavity space filter 77 comprises a cavity space vacuum pipeline, and a cavity space input lens 771, a cavity space output lens 772 and a cavity space filter hole disc 773 which are fixed at the front end and the rear end of the cavity space vacuum pipeline, wherein the cavity space input lens 771 and the cavity space output lens 772 are both provided with driving motors and can axially translate along the cavity space vacuum pipeline in vacuum and atmospheric states.
Referring to fig. 4, as shown in the figure, the fiber light source assembly 1 includes two paths of power-adjustable single-mode fiber light sources 113, and a first fiber collimator 111, a first right-angle total reflection prism 112, a second fiber collimator 121, and a second right-angle total reflection prism 122 located in a transmission space vacuum pipeline; a first output end of the single-mode fiber light source 113 enters a transmission space vacuum pipeline of the transmission space filter 71 through the first path of optical fiber 110 and then is connected with the first fiber collimator 111, an output beam divergence angle of the first fiber collimator 111 is matched with the transmission space input lens 712, and the beam is split and mirrored through the first right-angle total reflection prism 112 to become an outgoing beam of the first small hole 7131 of the transmission space filter aperture disc 713; the second output end of the single-mode fiber light source 113 enters the transmission space vacuum pipeline of the transmission space filter 71 through the second path of fiber 120 and is connected with the second fiber collimator 121, the divergence angle of the output light beam of the second fiber collimator 121 is matched with the transmission space output lens 711 of the transmission space filter 71, the light beam is split and mirrored through the second right-angle total reflection prism 122 to form an outgoing light beam of the second small hole 7132 of the transmission space filter hole disc 713, the outgoing light beam is collimated through the second fiber collimator 121 and the transmission space output lens 711 and then enters the wedge-shaped reflector 2, the front surface of the wedge-shaped reflector 2 is plated with a reflecting film, and the rear surface of the wedge-shaped reflector 2 is plated with an antireflection film.
Referring to fig. 5, as shown, the wavefront collecting assembly 3 includes a wavefront sensor 31, a small-bore lens 32 and a mirror 33 located in a vacuum pipe of a transmission space; collimated light beams output by the second optical fiber collimator 121 and the transmission space output lens 711 are reflected by the front surface of the wedge-shaped reflector 2, then deflected by a small angle and returned to the transmission space output lens 711, and then reflected by the reflector 33, enter the small-aperture lens 32 to complete beam contraction, and then enter the wavefront sensor 31.
Referring to fig. 6, as shown, the wave plate assembly 4 includes a first wave plate 41, a first wave plate driving motor, a second wave plate 42 and a second wave plate driving motor located in the cavity space vacuum pipeline; the first wave plate 41 and the second wave plate 42 are 1/2 wave plates, the first wave plate 41 is moved to the second small hole 7732 of the cavity space filter aperture plate 773 by the first wave plate driving motor, and the second wave plate 42 is moved to the third small hole 7733 of the cavity space filter aperture plate 773 by the second wave plate driving motor.
Referring to fig. 7, as shown, the vacuum unit 5 includes a cryopump vacuum combining unit 51 composed of a low vacuum unit and a high vacuum unit, and a transfer vacuum gate valve 52 and a cavity vacuum gate valve 53; the transmission vacuum gate valve 52 and the cavity vacuum gate valve 53 are respectively communicated with the transmission space filter 71 and the cavity space filter 77, and the transmission space filter 71 and the cavity space filter 77 are maintained in a vacuum or atmospheric state by controlling the opening and closing of the transmission vacuum gate valve 52 and the cavity vacuum gate valve 53.
The computer 6 is respectively connected with the wavefront sensor 31 and the deformable mirror 79; the wavefront sensor 31 works in a continuous or pulse single-frame trigger mode, and aberration data of a light beam incident to the wavefront sensor 31 is measured; the computer 6 controls the deformable mirror 79 to perform aberration correction according to the measured wavefront data of the wavefront sensor 31.
The transmission space input lens 712, the transmission space output lens 711, the cavity space input lens 771, and the cavity space output lens 772 are all thick lenses, and the focal length f satisfies the following formula:
Figure BDA0003040294180000111
in the formula: n isgIs the refractive index of the lens, R1And R2Respectively the curvature of the two side spherical surfaces of the thick lens, D the thickness between the two side spherical surfaces of the center of the lens, n1And n2Respectively the refractive index of the medium on both sides of the thick lens.
The first path of optical fiber 110 and the second path of optical fiber 120 are both polarization maintaining optical fibers, output horizontal polarization continuous light sources, and are consistent with the working wavelength of the seed laser light source operated by the multi-path cascade amplification laser driver 7; the first optical fiber collimator 111 and the first right-angle total reflection prism 112 are sequentially fixed on a combined adjusting frame from front to back, and the adjusting frame has five-dimensional precision adjustment of integral lifting, pitching, deflection and left-right and front-back translation; the first fiber collimator 111, the first right-angle total reflection prism 112 and the transmission space input lens 712 are combined to generate a paraxial plane wave beam incidence multi-pass cascade amplification laser driver 7 close to a diffraction limit.
After the wave plate vacuum driving motor is started to move the first wave plate 41 and the second wave plate 42 to the second small hole 7732 and the third small hole 7733 of the cavity space filter aperture disc 773 respectively, the paraxial plane wave beam close to the diffraction limit is reflected by the boosting reflector 73, the transflective polarizer 74, the cavity reflector 75 and the deformable mirror 79 and then transmitted to and fro twice in the cavity space filter 77, and transmitted to and fro once in the transmission space filter 71, and the paraxial plane wave beam close to the diffraction limit is acquired by the wavefront acquisition component 3 and passes through the multi-pass cascade amplification laser driver 7 to output aberration data of the light beam, wherein the path of the paraxial plane wave beam close to the diffraction limit is the same as that of the operation seed laser light source of the multi-pass cascade amplification laser driver 7.
The second optical fiber collimator 121 and the second right-angle total reflection prism 122 are sequentially fixed on a combined adjusting frame, and the adjusting frame has five-dimensional precision adjustment of integral lifting, pitching, deflection and left-right and front-back translation; the second optical fiber collimator 121, the second right-angle total reflection prism 122 and the transmission space output lens 711 are combined to generate a near-diffraction-limit coaxial plane wave beam which enters the multi-pass cascade amplification laser driver 7, the near-diffraction-limit coaxial plane wave beam is reflected by the wedge-shaped reflector 2 and enters the wavefront collection assembly 3, and the wavefront collection assembly 3 collects aberration data of the near-diffraction-limit coaxial plane wave beam and uses the aberration data as initial data for debugging the multi-pass cascade amplification laser driver 7.
The transmission space output lens 711 is fixed and takes the optical axis thereof as a reference optical axis, that is, all the optical elements of the debugging device of the multi-pass cascade amplification laser driver 7 and the multi-pass cascade amplification laser driver 7 are debugged by taking the optical axis and the spatial position of the transmission space output lens 711 as reference.
The focusing far field characteristics at the transmission space filter aperture disc 713 and the cavity space filter aperture disc 773 are derived from beam aberration characteristics, which affect the via efficiency of the transmission space filter 71 and the cavity space filter 77. When the laser beam is transmitted by the multi-pass cascade amplification laser driver 7, the far-field focal spot divergence angle comes from defocusing aberration, and the rest aberration influences the focal spot form; the defocusing aberration of the output beam of the multi-pass cascade amplification laser driver 7 can be dynamically adjusted by adjusting the axial spatial positions of the lenses corresponding to the transmission spatial filter 71 and the cavity spatial filter 77; the distortion mirror 79 can be adjusted to dynamically adjust the multi-pass cascade amplification laser driver 7 output beam aberration and far-field focal spot.
A debugging method of a multi-pass cascade amplification laser driver comprises the following steps:
firstly, a transmission space vacuum pipeline of the transmission space filter 71 is arranged on a support frame of an optical table, a transmission space input lens 712 is arranged at the input end, a transmission space output lens 711 is arranged and fixed at the output end, and the mechanical central axis of the transmission space vacuum pipeline and the transmission space output lens 711 have the same optical axis; the focal length of the output lens 711 in the vacuum transmission space pipeline under the vacuum condition is obtained through the formula of claim 2, the center of the second small hole 7132 of the filter hole disc 713 of the transmission space filter 71 is superposed with the focal point of the output lens 711 in the vacuum transmission space pipeline, a combined adjusting frame of a second optical fiber collimator 121 and a second right-angle total reflection prism 122 is arranged near the second small hole 7132, and the optical fiber point light source of the second optical fiber collimator 121 is smaller than the one-time diffraction limit of the output lens 711 in the transmission space and forms a mirror image relationship with the center of the second small hole 7132; the second output end of the single-mode fiber light source 113 transmits the light source to the second fiber collimator 121 and the second right-angle total reflection prism 122 through the second optical fiber 120, and generates a near-diffraction-limit coaxial plane wave light beam after being collimated by the transmission space output lens 711 of the transmission space filter 71; a first optical fiber collimator 111 and a first right-angle total reflection prism 112 combined adjusting frame are arranged near a first small hole 7131 of a transmission space filtering hole disc 713 of the transmission space filter 71, an optical fiber point light source of the first optical fiber collimator 111 is smaller than one-time diffraction limit of a transmission space input lens 712, and forms a mirror image relation with the center of the first small hole 7131; the first output end of the single-mode fiber light source 113 transmits the light source to the first fiber collimator 111 and the first right-angle total reflection prism 112 through the first optical fiber 110, and the light source is collimated by the transmission space input lens 712 of the transmission space filter 71 to generate a paraxial plane wave beam close to the diffraction limit;
② opening theThe low vacuum unit and the high vacuum unit of the cryopump vacuum combination unit 51 of the vacuum unit 5 and the transmission vacuum gate valve 52 pump the transmission space filter 71 to a vacuum state; a wedge-shaped reflector 2 is arranged behind a transmission space output lens 711 of the transmission space filter 71 and the pitching and the deflection of the wedge-shaped reflector 2 are adjusted, a coaxial plane wave beam close to the diffraction limit is reflected by the wedge-shaped reflector 2 to enter a wave front acquisition component 3, a wave front sensor 31 measures the output aberration of a beam shrinking beam, a small-caliber lens 32 in the wave front acquisition component 3 is finely adjusted along the axial direction, the defocusing aberration is adjusted to be zero, aberration data is recorded and recorded as phi0As initial data for debugging the multi-pass cascade amplification laser driver 7; the combined adjusting frame of the second fiber collimator 121 and the second right-angle total reflection prism 122 is integrally translated to the side of the filter hole disc 713, i.e. is moved out of the optical path;
thirdly, through the laser tracker, amplifying the optical path and spatial arrangement of the laser driver 7 according to the multi-pass cascade, placing the boosting reflector 73 in the optical path of the paraxial plane wave beam output by the transmission spatial filter 71 transmission spatial input lens 711, adjusting the horizontal deflection and pitch angle of the boosting reflector 73, making the incident paraxial plane wave beam with the diffraction limit reflected by the boosting reflector 73 and incident into the transmission spatial filter 71 again, and then entering the wedge-shaped reflector 2 and the wavefront collection component 3 through the second small hole 7132, and the wavefront sensor 31 recording the aberration data and recording the data as phi1(ii) a A booster amplifier 72 is arranged between the booster reflector 73 and the transmission space input lens 711, and after the horizontal deflection and the pitch angle of the booster amplifier 72 are integrally debugged, the wavefront sensor 31 records aberration data which is recorded as phi2(ii) a The axial position of the input lens 711 in the transmission space is adjusted by the driving motor, and the data phi of the aberration is obtained2When the middle defocusing aberration is divergent, the transmission space input lens 711 moves coaxially along the transmission space vacuum pipeline to the direction far away from the second small hole 7132, and when the aberration data phi is obtained2When the middle defocusing aberration is convergent, the transmission space input lens 711 moves coaxially along the transmission space vacuum pipeline to the direction close to the second small hole 7132, and when the aberration data phi recorded by the wavefront sensor 312When the mid-defocus aberration is zero,the input lens 711 stops moving and is fixed and locked;
installing the cavity space vacuum pipeline of the cavity space filter 77 on the support frame of the optical table, installing a cavity space input lens 771 at the input end, installing a cavity space output lens 772 at the output end, and enabling the mechanical central axis of the cavity space vacuum pipeline to be coaxial with the cavity space input lens 771 and the cavity space output lens 772; obtaining the focal lengths of the cavity space input lens 771 and the cavity space output lens 771 under the vacuum condition in the transmission space vacuum pipeline by the formula (1), superposing the focal points of the cavity space input lens 771 and the cavity space output lens 772 by adjusting a driving motor, placing a cavity space filter aperture disc 773 of the cavity space filter 77, and positioning the center of a fifth small aperture 7735 at the common focal point of the cavity space input lens 771 and the cavity space output lens 772; starting the low vacuum unit and the high vacuum unit of the cryopump vacuum combination unit 51 of the vacuum unit 5 and the cavity vacuum gate valve 53, vacuumizing the cavity space filter, and adjusting the cavity space input lens 771 and the cavity space output lens 772 to be coaxial confocal through the driving motors of the cavity space input lens 771 and the cavity space output lens 772 under the vacuum condition;
fifthly, according to the optical path and spatial arrangement of the multi-pass cascade amplification laser driver 7, a deformable mirror 79 is arranged at the outlet end of a cavity space output lens 772 of the cavity space filter 77 by using a laser tracker; a transflective polarizer 74 is installed at the cavity space input lens 771 of the cavity space filter 77 and adjusted to the polarization working angle; adjusting the horizontal deflection and pitch angle of the boosting reflector 73, reflecting the paraxial plane wave beam close to the diffraction limit output by the transmission space input lens 711 of the transmission space filter 71 by the transmission and reflection polarizing plate 74, and then entering the cavity space filter 77; a cavity amplifier 78 is mounted between the cavity space output lens 772 of the cavity space filter 77 and the anamorphic mirror 79; the paraxial plane wave beam near the diffraction limit is transmitted back and forth once in the cavity space filter 77, the cavity amplifier 78, and the anamorphic mirror 79, and returns to the transmission space filter 71, and the wavefront sensor 31 records aberration data, which is recorded as Φ3(ii) a By driving the motor to translate the cavity space output lens 772 along the optical axis when the aberration data Φ3When the intermediate defocus aberration is divergent, the cavity space output lens 772 followsThe cavity space vacuum pipeline moves coaxially to the direction far away from the fifth small hole 7735 for adjustment when the aberration data phi3When the medium defocusing aberration is convergent, the cavity space input lens 772 moves coaxially along the vacuum pipeline to be adjusted in the direction close to the fifth small hole 7735, and the recorded aberration data phi3When the intermediate defocus aberration is zero, the cavity space output lens 772 stops moving and completes the fixing and locking;
sixthly, an electro-optical switch 76 and a cavity reflector 75 are arranged behind the transflective polarizer 74, and the normal direction of the centers of the mirror surfaces of the electro-optical switch 76 and the cavity reflector 75 is superposed with the central optical axis of the cavity space filter 77; the first wave plate 41 of the wave plate assembly 4 is moved to the second small hole 7732 of the cavity space filter aperture plate 773 by the first wave plate driving motor; the second waveplate 42 of the waveplate assembly 4 is moved to the third aperture 7733 of the filter aperture plate 773 of the cavity space filter 77 by the second waveplate drive motor; the posture of the fine tuning transmission and reflection polarizing plate 74 slightly deflects paraxial waves output by a transmission space input lens 711 of the transmission space filter 71 after paraxial waves pass through a first small hole 7731 and then enter the cavity amplifier 78 and the deformable mirror 79, the posture of the fine tuning deformable mirror 79 slightly deflects incident light beams and then paraxial waves pass through a second small hole 7732 and a first wave plate 41, the polarization direction of the light beams rotates by 90 degrees and then is transmitted into the transmission and reflection polarizing plate 74 and the electro-optical switch 76 and then enters the cavity reflecting mirror 75, the posture of the fine tuning cavity reflecting mirror 75 turns back the light beams and then transmits the light beams and transmits the light beams through the electro-optical switch 76 and the transmission and reflection polarizing plate 74 and then enters the third small hole 7733 and the second wave plate 42, the polarization direction of the light beams rotates by 90 degrees again and enters the deformable mirror 79 after passing through the cavity amplifier 78 again, the light beams after being reflected and turned back by the deformable mirror 79 and then being reflected by the transmission and reflection polarizing plate 74 and then returns to the boosting space filter 71 again, turn on wavefront sensor 31 to record aberration data, denoted as Φ4(ii) a Translating the cavity space input lens 771 along the optical axis by a drive motor when aberration data phi4When the middle defocusing aberration is divergent, the cavity space input lens 771 moves and adjusts along the cavity space vacuum pipeline to the direction far away from the fifth small hole 7735, and when the aberration data phi is obtained4When the middle defocusing aberration is convergent, the input lens 771 moves and adjusts in the direction close to the fifth small hole 7735 along the cavity space vacuum pipeline, and when the aberration data phi is obtained4Middle defocus aberrationWhen the value is zero, the output lens 771 stops moving and completes fixing and locking;
seventhly, after the debugging process is completed, the recorded aberration data phi0，Ф1，Ф2，Ф3，Ф4The intermediate defocusing aberration is adjusted to be zero, and the multi-pass cascade amplification laser driver 7 has good spatial filtering via hole efficiency; aberration data phi4Phi of0The difference between the two is the residual aberration after the multi-pass cascade amplification laser driver 7 finishes debugging;
integrally translating the combined adjusting frame of the first fiber collimator 111 and the first right-angle total reflection prism 112 of the fiber light source component 1 to the side edge of the filtering hole disc 713, moving out the light path, and respectively moving the first wave plate 41 and the second wave plate 42 out of the second small hole 7732 and the third small hole 7733 of the cavity space filtering hole disc 773 through a wave plate vacuum driving motor, so that the debugging device of the multi-pass cascade amplification laser driver 7 finishes debugging work; injecting a laser light source for operating seeds into a first small hole 7131 of a filter hole disc 713 of a boosting spatial filter 71 of the multi-pass cascade amplification laser driver 7; the aberration output after the seed laser light source is injected into the multi-pass cascade amplification laser driver 7 is corrected through the wavefront sensor 31, the computer 6 and the deformable mirror 79.
In an embodiment, the multi-pass cascade amplification laser driver adjusting device and method are applied to a superluminescent laser device. The transmission spatial filter 71 and the cavity spatial filter 77 are both long-range spatial filters, the length of the transmission spatial filter 71 is about 32m, the focal lengths of the transmission spatial input lens 712 and the transmission spatial output lens 711 are 16056mm and 15973mm respectively under vacuum conditions, the length of the cavity spatial filter 77 is about 22m, and the focal lengths of the cavity spatial input lens 771 and the cavity spatial output lens 772 are 11886mm and 11117mm respectively under vacuum conditions. The aperture of the near diffraction limit coaxial plane wave light beam, the aperture of the near diffraction limit paraxial plane wave light beam and the aperture of the operation seed laser light source light beam are all 300mm multiplied by 300mm (square); the working angle of the transflective polarizer 74 is 53 °; the wavelength of the laser light source for operating the seeds is 1.053 mu m; the output power of the first optical fiber 110 of the optical fiber light source assembly 1 is about 450mW, and the output power of the second optical fiber 120 is about 50 mW; the measurement precision of the wavefront sensor 31 is 0.01 μm, and the measurement range is 30 μm; the first wave plate 41 and the second wave plate 42 are both 1/2 wave plates; the front surface of the wedge-shaped reflector is plated with a reflecting film with 0.5 percent of reflectivity, and the rear surface is plated with an anti-reflection film with 0.05 percent of reflectivity; the measurement accuracy of a laser tracker (API Co., Ltd.) was 15 μm. + -. 5 ppm; the pumping speed of the middle Edward low vacuum unit of the cryopump vacuum combination unit 51 of the vacuum unit 5 is 100 liters/second, and the pumping speed of the CTI high vacuum unit is 5000 liters/second.
Referring to fig. 8, as shown in the figure, the aberration collected data indicates that, during the debugging process, the defocusing aberration (PV is 9.504, RMS is 2.003) affecting the via hole efficiency of the spatial filter in the high-power multi-pass cascade amplification laser driver is removed, and then the deformable mirror corrects the residual output aberration of the seed laser source, so that the beam quality is greatly improved (PV is 0.825, RMS is 0.151) (the above experimental data are obtained by comparing with the wavefront data of the debugging reference light source constructed by the high-quality plane wave generated by the combination of the second fiber collimator 121, the second orthogonal total reflection prism 122 and the output lens 711 of the transmission spatial filter 71), and thus, safe operation can be realized, the online installation and calibration debugging capability and the output beam quality of the large laser driver are improved, and the capability of reliably developing physical experiment operation tasks is provided.

Claims (8)

1. A commissioning apparatus for a multi-pass cascade amplification laser driver, the multi-pass cascade amplification laser driver (7) comprising a transmission spatial filter (71), a boost amplifier (72), a boost mirror (73), a transflective polarizer (74), a cavity mirror (75), an electro-optical switch (76), a cavity spatial filter (77), a cavity amplifier (78) and a distorting mirror (79), characterized in that: the debugging device comprises an optical fiber light source component (1), a wedge-shaped reflector (2), a wavefront acquisition component (3), a wave plate component (4), a vacuum unit (5) and a computer (6);
the transmission space filter (71) comprises a transmission space vacuum pipeline, and a transmission space input lens (712), a transmission space output lens (711) and a transmission space filter hole disc (713) which are fixed at the front end and the rear end of the transmission space vacuum pipeline, wherein the transmission space output lens (711) is fixed on the vacuum pipeline, and the transmission space input lens (712) is provided with a driving motor and can axially translate along the transmission space vacuum pipeline in vacuum and atmospheric states;
the cavity space filter (77) comprises a cavity space vacuum pipeline, and a cavity space input lens (771), a cavity space output lens (772) and a cavity space filtering hole disc (773) which are fixed at the front end and the rear end of the cavity space vacuum pipeline, wherein the cavity space input lens (771) and the cavity space output lens (772) are both provided with driving motors and can axially translate along the cavity space vacuum pipeline in vacuum and atmospheric states;
the fiber light source assembly (1) comprises two paths of power-adjustable single-mode fiber light sources (113), a first fiber collimator (111), a first right-angle total reflection prism (112), a second fiber collimator (121) and a second right-angle total reflection prism (122) which are positioned in a vacuum pipeline of a transmission space; a first output end of the single-mode fiber light source (113) enters a transmission space vacuum pipeline of the transmission space filter (71) through a first path of optical fiber (110) and then is connected with a first fiber collimator (111), an output light beam divergence angle of the first fiber collimator (111) is matched with that of a transmission space input lens (712), and light beams are split and mirrored through a first right-angle total reflection prism (112) to form emergent light beams of a first small hole (7131) of a transmission space filter hole disc (713); a second output end of the single-mode fiber light source (113) enters a transmission space vacuum pipeline of a transmission space filter (71) through a second path of fiber (120) and is connected with a second fiber collimator (121), the divergence angle of an output light beam of the second fiber collimator (121) is matched with that of a transmission space output lens (711) of the transmission space filter (71), the light beam is subjected to beam splitting and mirror image by a second right-angle total reflection prism (122) to form an outgoing light beam of a second small hole (7132) of a transmission space filter hole disc (713), the outgoing light beam is collimated by the second fiber collimator (121) and the transmission space output lens (711) and then enters the wedge-shaped reflector (2), the front surface of the wedge-shaped reflector (2) is plated with a reflecting film, and the rear surface of the wedge-shaped reflector is plated with an anti-reflection film;
the wave front acquisition assembly (3) comprises a wave front sensor (31), a small-caliber lens (32) and a reflector (33) which are positioned in a vacuum pipeline of a transmission space; collimated light beams output by the second optical fiber collimator (121) and the transmission space output lens (711) are reflected by the front surface of the wedge-shaped reflector (2), then deflected by a small angle and returned to the transmission space output lens (711), reflected by the reflector (33), enter the small-caliber lens (32) to finish light beam contraction, and then enter the wavefront sensor (31);
the wave plate assembly (4) comprises a first wave plate (41), a first wave plate driving motor, a second wave plate (42) and a second wave plate driving motor which are positioned in the cavity space vacuum pipeline; the first wave plate (41) and the second wave plate (42) are 1/2 wave plates, the first wave plate (41) is moved to the second small hole (7732) of the cavity space filtering hole plate (773) through the first wave plate driving motor, and the second wave plate (42) is moved to the third small hole (7733) of the cavity space filtering hole plate (773) through the second wave plate driving motor;
the vacuum unit (5) comprises a low-temperature pump vacuum combination unit (51) consisting of a low vacuum unit and a high vacuum unit, a transmission vacuum gate valve (52) and a cavity vacuum gate valve (53); the transmission vacuum gate valve (52) and the cavity vacuum gate valve (53) are respectively communicated with the transmission space filter (71) and the cavity space filter (77), and the transmission space filter (71) and the cavity space filter (77) are maintained in a vacuum or atmospheric state by controlling the opening and closing of the transmission vacuum gate valve (52) and the cavity vacuum gate valve (53);
the computer (6) is respectively connected with the wavefront sensor (31) and the deformable mirror (79); the wave-front sensor (31) works in a continuous or pulse single-frame trigger mode, and aberration data of a light beam incident to the wave-front sensor (31) is measured; the computer (6) controls the deformable mirror (79) to complete aberration correction according to the measured wavefront data of the wavefront sensor (31).
2. The debugging device of the multi-pass cascade amplification laser driver according to claim 1, wherein: the transmission space input lens (712), the transmission space output lens (711), the cavity space input lens (771) and the cavity space output lens (772) are all thick lenses, and the focal length f meets the following formula:
Figure FDA0003040294170000021
in the formula: n isgIs the refractive index of the lens, R1And R2Respectively the curvature of the two side spherical surfaces of the thick lens, D the thickness between the two side spherical surfaces of the center of the lens, n1And n2Respectively the refractive index of the medium on both sides of the thick lens.
3. The debugging device of the multi-pass cascade amplification laser driver according to claim 1, wherein: the first path of optical fiber (110) and the second path of optical fiber (120) are both polarization-maintaining optical fibers, output horizontal polarization continuous light sources and are consistent with the working wavelength of a seed laser light source operated by a multi-path cascade amplification laser driver (7); the first optical fiber collimator (111) and the first right-angle total reflection prism (112) are sequentially fixed on a combined adjusting frame from front to back, and the adjusting frame has five-dimensional precision adjustment of integral lifting, pitching, deflection, left-right and front-back translation; the first optical fiber collimator (111), the first right-angle total reflection prism (112) and the transmission space input lens (712) are combined to generate a paraxial plane wave beam incidence multi-pass cascade amplification laser driver (7) with a diffraction limit.
4. The debugging device of the multi-pass cascade amplification laser driver according to claim 1, wherein: and starting a wave plate vacuum driving motor, enabling a first wave plate (41) and a second wave plate (42) to move to a second small hole (7732) and a third small hole (7733) of a cavity space filter hole disc (773) respectively, enabling the paraxial plane wave beams close to the diffraction limit to be reflected by the boosting reflector (73), the transmission reflection polarizer (74), the cavity reflector (75) and the deformation mirror (79) and then transmitted to and fro twice in the cavity space filter (77), enabling the paraxial plane wave beams close to the diffraction limit to be transmitted to and fro once in the transmission space filter (71), enabling the paraxial plane wave beams close to the diffraction limit to be the same as the path of the operation seed laser light source of the multi-pass cascade amplification laser driver (7), and acquiring aberration data of the paraxial plane wave beams close to output the beam after passing through the multi-pass cascade amplification laser driver (7) through the wavefront acquisition component (3).
5. The debugging device of the multi-pass cascade amplification laser driver according to claim 1, wherein: the second optical fiber collimator (121) and the second right-angle total reflection prism (122) are sequentially fixed on the combined adjusting frame from front to back, and the adjusting frame has five-dimensional precision adjustment of integral lifting, pitching, deflection, left-right translation and front-back translation; the second optical fiber collimator (121), the second right-angle total reflection prism (122) and the transmission space output lens (711) are combined to generate a near-diffraction limit coaxial plane wave beam to enter the multi-pass cascade amplification laser driver (7), the near-diffraction limit coaxial plane wave beam is reflected by the wedge-shaped reflector (2) to enter the wavefront acquisition component (3), and aberration data of the near-diffraction limit coaxial plane wave beam is acquired by the wavefront acquisition component (3) and is used as initial data for debugging the multi-pass cascade amplification laser driver (7).
6. The debugging device of the multi-pass cascade amplification laser driver according to claim 1, wherein: the transmission space output lens (711) is fixed and takes the optical axis thereof as a reference optical axis, namely, the debugging device of the multi-pass cascade amplification laser driver (7) and all optical elements of the multi-pass cascade amplification laser driver (7) finish debugging by taking the optical axis and the spatial position of the transmission space output lens (711) as reference standards.
7. The debugging device of the multi-pass cascade amplification laser driver according to claim 1, wherein: the focusing far field characteristics at the transmission space filtering hole disc (713) and the cavity space filtering hole disc (773) are derived from beam aberration characteristics, and the via hole efficiency of the transmission space filter (71) and the cavity space filter (77) is influenced; when the laser beam is transmitted by a multi-pass cascade amplification laser driver (7), the far-field focal spot divergence angle comes from defocusing aberration, and the rest aberration influences the focal spot form; the defocusing aberration of the output beam of the multi-pass cascade amplification laser driver (7) can be dynamically adjusted by adjusting the axial spatial positions of the corresponding lenses of the transmission spatial filter (71) and the cavity spatial filter (77); the distortion mirror (79) can be adjusted to dynamically adjust the multi-pass cascade amplification laser driver (7) to output beam aberration and far-field focal spot.
8. A method for debugging a multi-pass cascade amplification laser driver according to any of claims 1-7, comprising the steps of:
firstly, a transmission space vacuum pipeline of a transmission space filter (71) is arranged on a support frame of an optical table, a transmission space input lens (712) is arranged at the input end, a transmission space output lens (711) is arranged and fixed at the output end, and the mechanical central axis of the transmission space vacuum pipeline and the transmission space output lens (711) have the same optical axis; the focal length of an output lens (711) in a vacuum transmission space pipeline under a vacuum condition is obtained through the formula (1), the center of a second small hole (7132) of a filter hole disc (713) of a transmission space filter (71) is superposed with the focal point of the transmission space output lens (711) under the vacuum condition, a second optical fiber collimator (121) and a second right-angle total reflection prism (122) combined adjusting frame are arranged near the second small hole (7132), and an optical fiber point light source of the second optical fiber collimator (121) is smaller than the one-time diffraction limit of the transmission space output lens (711) and forms a mirror image relation with the center of the second small hole (7132); the second output end of the single-mode optical fiber light source (113) transmits the light source to a second optical fiber collimator (121) and a second right-angle total reflection prism (122) through a second optical fiber (120), and the light source is collimated by a transmission space output lens (711) of the transmission space filter (71) to generate a near-diffraction limit coaxial plane wave light beam; a first optical fiber collimator (111) and a first right-angle total reflection prism (112) combined adjusting frame are arranged near a first small hole (7131) of a transmission space filtering hole disc (713) of the transmission space filter (71), and an optical fiber point light source of the first optical fiber collimator (111) is smaller than one-time diffraction limit of a transmission space input lens (712) and forms a mirror image relation with the center of the first small hole (7131); the first output end of the single-mode fiber light source (113) transmits the light source to a first fiber collimator (111) and a first right-angle total reflection prism (112) through a first path of fiber (110), and the light source is collimated by a transmission space input lens (712) of the transmission space filter (71) to generate paraxial plane wave light beams close to the diffraction limit;
secondly, starting a low vacuum unit and a high vacuum unit of a low-temperature pump vacuum combined unit (51) of the vacuum unit (5), and filtering a transmission space by a transmission vacuum gate valve (52)Pumping the device (71) to a vacuum state; a wedge-shaped reflector (2) is arranged behind a transmission space output lens (711) of the transmission space filter (71) and the pitching and the deflection of the wedge-shaped reflector are adjusted, a coaxial plane wave beam close to the diffraction limit is reflected by the wedge-shaped reflector (2) to enter a wave front acquisition component (3), a wave front sensor (31) measures the output aberration of a beam shrinking beam, a small-aperture lens (32) in the wave front acquisition component (3) is finely adjusted along the axial direction, the defocusing aberration is adjusted to be zero, aberration data is recorded and recorded as phi0As initial data for debugging the multi-pass cascade amplification laser driver (7); the combined adjusting frame of the second optical fiber collimator (121) and the second right-angle total reflection prism (122) integrally translates to the side edge of the transmission space filtering hole disc (713), namely moves out of the optical path;
thirdly, through a laser tracker, according to the optical path and spatial arrangement of a multi-pass cascade amplification laser driver (7), a boosting reflector (73) is arranged in the optical path of a paraxial plane wave beam which is output by a transmission spatial input lens (711) and is close to the diffraction limit, the horizontal deflection and the pitch angle of the boosting reflector (73) are adjusted, so that the incident paraxial plane wave beam which is close to the diffraction limit is reflected by the boosting reflector (73) and then enters the transmission spatial filter (71) again, the incident paraxial plane wave beam enters the wedge reflector (2) and the wavefront collection component (3) through the second small hole (7132), and the wavefront sensor (31) records aberration data and records the aberration data as phi1(ii) a A booster amplifier (72) is arranged between the booster reflector (73) and the transmission space input lens (711), after the horizontal deflection and the pitch angle of the booster amplifier (72) are integrally adjusted, the wave front sensor (31) records aberration data which are recorded as phi2(ii) a Adjusting the axial position of the transmission space input lens (711) by the driving motor when the aberration data phi2When the middle defocusing aberration is divergent, the transmission space input lens (711) moves coaxially along the transmission space vacuum pipeline to the direction far away from the second small hole (7132), and when the aberration data phi is in a diverging state2When the middle defocusing aberration is convergent, the transmission space input lens (711) moves coaxially along the transmission space vacuum pipeline to the direction close to the second small hole (7132), and when the aberration data phi recorded by the wavefront sensor (31)2When the intermediate defocus aberration is zero, the transfer space input lens (711) stops moving and is fixedTightening;
installing a cavity space vacuum pipeline of the cavity space filter (77) on a support frame of the optical table board, installing a cavity space input lens (771) at an input end, installing a cavity space output lens (772) at an output end, and enabling a mechanical central axis of the cavity space vacuum pipeline to be coaxial with the cavity space input lens (771) and the cavity space output lens (772); obtaining the focal lengths of a cavity space input lens (771) and a cavity space output lens (771) under the vacuum condition in a transmission space vacuum pipeline by the formula (1), enabling the focal points of the cavity space input lens (771) and the cavity space output lens (772) to be coincided by adjusting a driving motor, placing a cavity space filtering hole disc (773) of a cavity space filter (77), and enabling the center of a fifth small hole (7735) to be located at the common focal point of the cavity space input lens (771) and the cavity space output lens (772); starting a low vacuum unit and a high vacuum unit of a cryopump vacuum combination unit (51) of the vacuum unit (5) and a cavity vacuum gate valve (53), vacuumizing a cavity space filter, and adjusting a cavity space input lens (771) and a cavity space output lens (772) to be coaxial and confocal through a driving motor of the cavity space input lens (771) and the cavity space output lens (772) under a vacuum condition;
fifthly, according to the optical path and the spatial arrangement of the multi-pass cascade amplification laser driver (7), a deformable mirror (79) is arranged at the outlet end of a cavity space output lens (772) of the cavity space filter (77) by using a laser tracker; installing a transflective polarizer (74) at the cavity space input lens (771) of the cavity space filter (77) and adjusting to a polarization working angle; adjusting the horizontal deflection and the pitch angle of a boosting reflector (73), and reflecting paraxial plane wave beams which are output by a transmission space input lens (711) of a transmission space filter (71) and are close to a diffraction limit by a transmission and reflection polarizing plate (74) and then entering a cavity space filter (77); a cavity amplifier (78) is arranged between a cavity space output lens (772) of the cavity space filter (77) and the deformable mirror (79); the paraxial plane wave beam near the diffraction limit is transmitted back and forth once in the cavity space filter (77), the cavity amplifier (78) and the deformable mirror (79) and returns to the transmission space filter (71), the wave front sensor (31) records aberration data which is recorded as phi3(ii) a Translating the cavity space output lens (772) along the optical axis by a drive motor when the aberration data phi3Middle defocus aberrationWhen the aberration data phi is divergent, the cavity space output lens (772) is coaxially moved and adjusted along the cavity space vacuum pipeline to the direction far away from the fifth small hole (7735)3When the medium defocusing aberration is convergent, the cavity space input lens (772) moves coaxially along the vacuum pipeline to be adjusted towards the direction close to the fifth small hole (7735), and recorded aberration data phi3When the middle defocusing aberration is zero, the cavity space output lens (772) stops moving and completes fixing and locking;
an electro-optical switch (76) and a cavity reflector (75) are arranged behind the transflective polarizer (74), and the normal direction of the mirror surface centers of the electro-optical switch (76) and the cavity reflector (75) is superposed with the central optical axis of the cavity space filter (77); the first wave plate (41) of the wave plate assembly (4) is moved to the second small hole (7732) of the cavity space filtering hole disc (773) through the first wave plate driving motor; the second wave plate (42) of the wave plate component (4) is moved to a third small hole (7733) of a filter hole disc (773) of the cavity space filter (77) through a second wave plate driving motor; the attitude of a transmission and reflection polarizing plate (74) is finely adjusted, a paraxial wave output by a paraxial plane wave close to a diffraction limit input lens (711) of a transmission space filter (71) is subjected to tiny deflection, the paraxial wave passes through a first small hole (7731) and then enters a cavity amplifier (78) and a deformable mirror (79), the attitude of the deformable mirror (79) is finely adjusted, an incident beam passes through a paraxial hole (7732) and a first wave plate (41) after being subjected to tiny deflection, the polarization direction of the beam is rotated by 90 degrees and then is transmitted into the transmission and reflection polarizing plate (74) and an electro-optical switch (76) and then enters a cavity reflector (75), the attitude of the cavity reflector (75) is finely adjusted, the beam is turned back and then is transmitted through the electro-optical switch (76) and the transmission and reflection polarizing plate (74) and then enters a third small hole (7733) and a second wave plate (42), the polarization direction of the beam is rotated by 90 degrees again and then is again passed through the cavity amplifier (78) and then enters the deformable mirror (79), the beam after being reflected by the deformable mirror (79), the deformable mirror (79) and then passes through a fourth small hole (7734) Returning to the boosting spatial filter (71) after reflection, starting the wave front sensor (31) to record aberration data and recording the aberration data as phi4(ii) a Translating the cavity space input lens (771) along the optical axis by a drive motor when the aberration data phi4When the middle defocusing aberration is divergent, the cavity space input lens (771) moves and adjusts along the cavity space vacuum pipeline to the direction far away from the fifth small hole (7735), and when the aberration data phi is obtained4When the intermediate defocus aberration is convergentThe cavity space input lens (771) moves and adjusts along the cavity space vacuum pipeline to the direction close to the fifth small hole (7735) when the aberration data phi4When the middle defocusing aberration is zero, the cavity space output lens (771) stops moving and completes fixing and locking;
seventhly, after the debugging process is completed, the recorded aberration data phi0，Ф1，Ф2，Ф3，Ф4The intermediate defocusing aberration is adjusted to be zero, and the multi-pass cascade amplification laser driver (7) has good spatial filtering via hole efficiency; aberration data phi4Phi of0The difference between the two is the residual aberration after the multi-pass cascade amplification laser driver (7) finishes debugging;
integrally translating a combined adjusting frame of a first optical fiber collimator (111) and a first right-angle total reflection prism (112) of an optical fiber light source component (1) to the side edge of a transmission space filtering hole disc (713), moving out a light path, respectively moving a first wave plate (41) and a second wave plate (42) out of a second small hole (7732) and a third small hole (7733) of a cavity space filtering hole disc (773) through a wave plate vacuum driving motor, and completing debugging work by a debugging device of a multi-pass cascade amplification laser driver (7); injecting a seed laser light source into a first small hole (7131) of a filter hole disc (713) of a transmission spatial filter (71) of the multi-pass cascade amplification laser driver (7); the aberration output by the seed laser light source after being injected into the multi-pass cascade amplification laser driver (7) is corrected through the wavefront sensor (31), the computer (6) and the deformable mirror (79).
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