CN113204092A - High-frequency and high-precision focusing mechanism of objective lens and camera in vertical direction - Google Patents
High-frequency and high-precision focusing mechanism of objective lens and camera in vertical direction Download PDFInfo
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- CN113204092A CN113204092A CN202110623409.9A CN202110623409A CN113204092A CN 113204092 A CN113204092 A CN 113204092A CN 202110623409 A CN202110623409 A CN 202110623409A CN 113204092 A CN113204092 A CN 113204092A
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 70
- 239000000725 suspension Substances 0.000 claims abstract description 38
- 239000000919 ceramic Substances 0.000 claims description 58
- 238000003825 pressing Methods 0.000 claims description 14
- 230000006835 compression Effects 0.000 claims description 9
- 238000007906 compression Methods 0.000 claims description 9
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- 238000003384 imaging method Methods 0.000 abstract description 7
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- 238000012360 testing method Methods 0.000 description 4
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
- G02B21/242—Devices for focusing with coarse and fine adjustment mechanism
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/248—Base structure objective (or ocular) turrets
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
- G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
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Abstract
The invention discloses a high-frequency high-precision focusing mechanism of an objective lens and a camera in the vertical direction, which comprises a Z-axis base assembly, wherein a Z-axis lifting coarse adjusting assembly is arranged on the Z-axis base assembly, a Z-axis suspension arm assembly is arranged on the Z-axis lifting coarse adjusting assembly, an objective lens leveling assembly is arranged on the Z-axis suspension arm assembly, a scanning camera assembly and a Z-axis lifting fine adjusting assembly are arranged in a camera assembly avoiding hole of the Z-axis suspension arm assembly through the objective lens leveling assembly, and an objective lens wheel assembly is arranged at the bottom of the Z-axis lifting fine adjusting assembly. The invention can automatically carry out coarse adjustment and fine adjustment of focal length, has simple and convenient operation, strong load capacity of the fine adjustment component, fast displacement frequency and accurate stepping, not only can simultaneously drive 5 objective lenses to lift, but also can ensure that the objective lenses realize nano-scale anti-shake accurate displacement within a certain range under the condition of large load, ensures the imaging effect and meets the use requirements of an electron microscope which is provided with a plurality of objective lenses and has higher focusing accuracy requirement.
Description
Technical Field
The invention relates to the technical field of machine vision imaging or electron microscope scanning, in particular to a high-frequency high-precision focusing mechanism of an objective lens and a camera in the vertical direction.
Background
In the field of machine vision imaging or scanning by electron microscope, the adjustment of the focal length is basically realized by adjusting the heights of the objective lens and the camera in the vertical direction. Most of the existing objective lens and camera focusing mechanisms have the problems of complex mechanism, large size, low displacement speed, low accuracy, poor imaging effect and the like, so that the accuracy of a detection result is low, and the problem always puzzles the machine vision imaging or electron microscope scanning industry. At present, although some objective lenses and camera focusing mechanisms capable of realizing high-frequency and high-precision displacement appear in the market, the obvious defects of the objective lenses and the camera focusing mechanisms are that the load capacity of an objective lens wheel is poor, and the objective lens wheel cannot be eccentrically loaded. Therefore, to ensure high-frequency and high-precision focusing, only a single objective or a double objective is usually provided on the objective wheel. Therefore, when a sample is detected, the objective lens needs to be frequently and manually replaced by a worker to complete the operation, the operation is complex, and the detection efficiency is low.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a high-frequency high-precision focusing mechanism of an objective lens and a camera in the vertical direction, which can ensure that the objective lens still can realize high-frequency high-precision displacement within an effective distance while increasing the load capacity of an objective lens wheel.
In order to solve the technical problems and achieve the technical effects, the invention is realized by the following technical scheme:
a high-frequency high-precision focusing mechanism of an objective lens and a camera in the vertical direction comprises a Z-axis base assembly, a Z-axis lifting coarse adjustment assembly, a Z-axis suspension arm assembly, a Z-axis lifting fine adjustment assembly, a scanning camera assembly, an objective lens leveling assembly and an objective lens wheel assembly; the Z-axis suspension arm assembly is arranged on the Z-axis base assembly in a lifting manner through the Z-axis coarse lifting adjustment assembly, the objective lens leveling assembly is arranged on the upper surface of the Z-axis suspension arm assembly, and the scanning camera assembly is arranged in a camera assembly avoiding hole of the Z-axis suspension arm assembly in an adjustable manner through the objective lens leveling assembly in a parallelism manner;
the Z-axis lifting fine adjustment assembly consists of a Z-axis lifting fine adjustment assembly mounting plate, a pen-shaped piezoelectric ceramic stack displacement device hanger, an objective wheel mounting bracket and a Z-axis lifting fine adjustment linear slide rail, the Z-axis lifting fine adjustment assembly mounting plate is vertically arranged in a camera assembly avoiding hole of the Z-axis suspension arm assembly through the objective lens leveling assembly, the objective wheel mounting bracket is arranged on the front surface of the Z-axis lifting fine adjustment component mounting plate in a lifting way through the Z-axis lifting fine adjustment linear slide rail, the hanger of the pen-shaped piezoelectric ceramic stack displacement device is fixed on the top of the mounting plate of the Z-axis lifting fine adjustment assembly, the top end of the pen-shaped piezoelectric ceramic stack displacement device is fixedly connected with the hanger of the pen-shaped piezoelectric ceramic stack displacement device, the bottom end of the pen-shaped piezoelectric ceramic stack displacement device is fixedly connected with the objective wheel mounting bracket;
the objective wheel component consists of an objective wheel, an objective wheel rotating piece, an objective wheel rotating drive motor connecting plate, an objective wheel rotating synchronous belt wheel and an objective, the objective wheel is rotatably arranged at the bottom of the objective wheel mounting bracket through the objective wheel rotating piece, 1-5 objectives are arranged on the objective wheel, one end of a connecting plate of the objective wheel rotation driving motor is fixedly connected with the objective wheel rotating piece, the other end of the objective wheel rotation driving motor connecting plate is fixedly connected with the objective wheel rotation driving motor, the objective wheel rotation driving motor is arranged on one side of the objective wheel through the objective wheel rotation driving motor connecting plate, and the objective wheel rotation driving motor is in transmission connection with the objective wheel through the objective wheel rotation synchronous belt wheel, the objective lens is switched under the lens of the scanning camera assembly by rotation of the objective lens wheel.
Furthermore, the Z-axis lifting coarse adjustment component consists of a Z-axis lifting coarse adjustment stepping motor, a motor mounting bracket, a ball screw mounting plate, a Z-axis lifting coarse adjustment linear slide rail and a Z-axis suspension arm component mounting plate, the ball screw mounting plate is fixed on a vertical plate of the Z-axis base assembly, the ball screw is vertically arranged in the middle of the front surface of the ball screw mounting plate, the two Z-axis coarse lifting linear slide rails are respectively vertically arranged on the left side and the right side of the front surface of the ball screw mounting plate, the Z-axis lifting coarse adjustment stepping motor is arranged at the top end of the ball screw mounting plate through the motor mounting bracket, and the Z-axis lifting coarse adjustment stepping motor is in transmission connection with the top end of the ball screw, and the rear surface of the Z-axis suspension arm assembly mounting plate is fixedly connected with the nut on the ball screw and the sliding blocks on the two Z-axis lifting coarse adjustment linear sliding rails.
Furthermore, the pen-shaped piezoelectric ceramic stack displacement device comprises a pressure-resistant cylinder, a piezoelectric ceramic stack, an upper end cap, a lower nut cap, a stressed nut adapter and a spring; the pressure-resistant cylinder is in a straight tube shape, the piezoelectric ceramic stack is in a rod shape or a rod shape, the piezoelectric ceramic stack is arranged in the pressure-resistant cylinder in a length-variable manner, the upper end cap is arranged at the top port of the pressure-resistant cylinder, the inner side surface of the upper end cap is fixedly connected with the top of the piezoelectric ceramic stack, the lower nut is arranged at the bottom port of the pressure-resistant cylinder, the stress nut is telescopically arranged in the lower nut, the output end of the stress nut is positioned outside the pressure-resistant cylinder, and the input end of the stress nut is positioned inside the pressure-resistant cylinder; the stress nut adaptor and the spring are arranged inside the compression resistant cylinder, wherein the upper end of the stress nut adaptor is fixedly connected with the bottom of the piezoelectric ceramic stack, the lower end of the stress nut adaptor is fixedly connected with the input end of the stress nut, the upper end of the spring is in contact with the lower end of the stress nut adaptor, and the lower end of the spring is in contact with the bottom surface of the inner wall of the lower nut.
Furthermore, the displacement frequency of the pen-shaped piezoelectric ceramic stack displacement device is 600Hz/s, the effective displacement distance is 110 μm, the stepping precision is 0.1 μm, and the maximum load force is 400N.
Further, the driving voltage range of the pen-shaped piezoelectric ceramic stack displacement device is 0-150V, and the 150V resistance is 1000N.
Further, the size of the piezoelectric ceramic stack is 5.2mm × 7.1mm × 100 mm.
Further, the spring is a plurality of disc springs connected in series.
Further, the springs are 4 disc springs connected in series.
Furthermore, the objective lens leveling assembly consists of a camera assembly mounting plate, a leveling pressing block, a compression screw, a height fixing piece and two height adjusting pieces, wherein a hollow structure for mounting the Z-axis lifting fine adjustment assembly and avoiding the scanning camera assembly is arranged in the middle of the camera assembly mounting plate, an origin, a first fulcrum and a second fulcrum are designed on a frame of the camera assembly mounting plate, the origin, the first fulcrum and the second fulcrum form a triangle on the plane of the camera assembly mounting plate, the leveling pressing block is of a C-shaped structure, the leveling pressing block is fixedly connected with the upper surface of the camera assembly mounting plate, and the leveling pressing block is positioned in the triangle formed by the origin, the first fulcrum and the second fulcrum; the height fixing piece is arranged at the origin, the two height adjusting pieces are respectively arranged at the first fulcrum and the second fulcrum, the compression screw is arranged on the leveling pressing block, and the camera component mounting plate is adjustably arranged on the upper surface of the Z-axis suspension arm assembly through the height fixing piece and the two height adjusting pieces in levelness and is locked and fixed through the compression screw.
Further, the height fixing piece is a steel ball, the height adjusting piece is a jackscrew, the steel ball is embedded in the position corresponding to the original point of the lower surface of the camera component mounting plate and between the positions corresponding to the original point of the upper surface of the Z-axis suspension arm component, the jackscrews are respectively arranged on the leveling pressing block, the first supporting point and the second supporting point correspond to each other, and the jackscrews penetrate downwards to contact the upper surface of the Z-axis suspension arm component behind the camera component mounting plate.
Further, the first fulcrum and the second fulcrum are as close as possible to the outer edge of the frame of the camera assembly mounting plate.
Further, the scanning camera subassembly comprises scanning camera, scanning camera installing support and scanning camera limiting plate, the scanning camera passes through scanning camera installing support camera lens sets up down in the camera leveling subassembly among the hollow out construction in camera subassembly mounting panel middle part, the setting of scanning camera limiting plate is in the anterior upper surface of camera subassembly mounting panel, the scanning camera limiting plate with it is right that displacement device gallows is piled to type piezoceramics in the front and back both sides the scanning camera plays further limiting displacement.
Further, the objective lens is divided into a dry objective lens and a wet objective lens.
Furthermore, a vertically downward elastic oil filling nozzle is arranged on the objective wheel mounting support, a circle of cam plate used for adjusting the position relation between the elastic oil filling nozzle and the objective is arranged on the outer edge of the objective wheel, the cam plate is composed of an outer convex arc edge and an inner concave arc edge, the position of the outer convex arc edge corresponds to the position of the dry objective, the position of the inner concave arc edge corresponds to the position of the wet objective, when the elastic oil filling nozzle is in contact with the outer convex arc edge, the oil filling nozzle of the elastic oil filling nozzle is far away from the dry objective, and when the elastic oil filling nozzle is in contact with the inner concave arc edge, the oil outlet of the elastic oil filling nozzle is close to the wet objective.
Furthermore, the elastic oil filling nozzle is connected with an oil bottle through an oil filling pipe and an oil pump, and the oil bottle is arranged on a vertical plate of the Z-axis base seat assembly.
Further, the front end of the Z-axis suspension arm assembly is provided with a global camera for shooting a slide sample area and an identification area and a front side light source for providing illumination for the global camera.
The invention has the beneficial effects that:
1. the invention has focusing function of both coarse adjustment and fine adjustment, is simple and convenient to operate, can automatically focus, has strong load capacity of the Z-axis lifting fine adjustment assembly, high displacement frequency and accurate stepping, not only can simultaneously drive 5 objective lenses to move up and down through the objective lens wheel, but also can ensure that the objective lenses realize nano-scale anti-shaking accurate displacement within a certain effective range under the condition of large load, and ensures the imaging effect and the accuracy of detection results, thereby completely meeting the use requirements of an electron microscope which is provided with a plurality of objective lenses and has higher requirement on the displacement accuracy of the objective lenses.
2. The Z-axis lifting fine adjustment assembly disclosed by the invention adopts the independently developed pen-type piezoelectric ceramic stack displacement device, and the pen-type piezoelectric ceramic stack displacement device improves the energy conversion efficiency, improves the output mode, perfects the utilization rate of materials and greatly improves the self defects of the conventional Z-axis lifting fine adjustment assembly by optimizing the structure and the working state, and meanwhile, the Z-axis lifting fine adjustment assembly disclosed by the invention has the advantages of strong load capacity, high displacement frequency, accurate stepping, capability of eccentrically bearing, small size, convenience in operation, strong practicability and the like.
3. The Z-axis lifting fine adjustment assembly has the eccentric bearing capacity, so that the offset objective wheel rotating motor can drive the objective wheel to rotate, free switching of a plurality of objectives is realized under the condition of large load, and the operation of sample detection is facilitated.
4. The invention has the characteristics of sufficient load capacity, high displacement frequency, accurate stepping, eccentric bearing and the like, has the advantages of small volume, compact structure, low manufacturing cost and the like, and can reduce the occupied space of the whole electronic microscope equipment as much as possible while ensuring the performance of the electronic microscope.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical solutions of the present invention more clearly understood and to implement them in accordance with the contents of the description, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings. The detailed description of the present invention is given in detail by the following examples and the accompanying drawings.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:
FIG. 1 is a perspective view of the overall structure of the present invention;
FIG. 2 is an exploded view of the overall structure of the present invention;
FIG. 3 is a partial enlarged view of the Z-axis fine adjustment assembly of the present invention;
FIG. 4 is an enlarged partial view of the objective wheel assembly of the present invention;
FIG. 5 is an enlarged view of a portion of the Z-axis coarse lift adjustment assembly of the present invention;
FIG. 6 is an exploded view of a pen-type piezo ceramic stack displacement apparatus according to the present invention;
FIG. 7 is an enlarged partial view of the objective lens leveling assembly of the present invention;
fig. 8 is a partial enlarged view of a scanning camera assembly in the present invention.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments. The description set forth herein is intended to provide a further understanding of the invention and forms a part of this application and is intended to be an exemplification of the invention and is not intended to limit the invention to the particular embodiments illustrated.
Referring to fig. 1-2, a high-frequency and high-precision focusing mechanism for an objective lens and a camera in a vertical direction comprises a Z-axis base assembly 1, a Z-axis coarse lifting and adjusting assembly 2, a Z-axis suspension arm assembly 3, a Z-axis fine lifting and adjusting assembly 4, a scanning camera assembly 5, an objective lens leveling assembly 6 and an objective lens wheel assembly 7; the Z-axis suspension arm assembly 3 is arranged on the Z-axis base assembly 1 in a lifting manner through the Z-axis coarse lifting adjustment assembly 2, the objective lens leveling assembly 6 is arranged on the upper surface of the Z-axis suspension arm assembly 3, and the scanning camera assembly 5 is arranged in a camera assembly avoiding hole of the Z-axis suspension arm assembly 3 in a parallelism-adjustable manner through the objective lens leveling assembly 6;
referring to fig. 3, the Z-axis fine adjustment assembly 4 comprises a Z-axis fine adjustment assembly mounting plate 401, a pen-type piezo ceramic stack displacement device 402, a pen-type piezo ceramic stack displacement device hanger 403, an objective wheel mounting bracket 404 and a Z-axis fine adjustment linear slide rail, the Z-axis fine adjustment assembly mounting plate 401 is vertically disposed in a camera assembly access hole of the Z-axis suspension arm assembly 3 through the objective leveling assembly 6, the objective wheel mounting bracket 404 is liftably mounted on the front surface of the Z-axis fine adjustment assembly mounting plate 401 through the Z-axis fine adjustment linear slide rail, the pen-type piezo ceramic stack displacement device hanger 403 is fixed on the top of the Z-axis fine adjustment assembly mounting plate 401, the top end of the pen-type piezo ceramic stack displacement device 402 is fixedly connected with the pen-type piezo ceramic stack displacement device hanger 403, the bottom end of the pen-shaped piezoelectric ceramic stack displacement device 402 is fixedly connected with the objective wheel mounting bracket 404;
referring to fig. 4, the objective wheel assembly 7 is composed of an objective wheel 701, an objective wheel rotating member 702, an objective wheel rotating driving motor 703, an objective wheel rotating driving motor connecting plate 704, an objective wheel rotating synchronous pulley 705 and an objective lens 706, the objective wheel 701 is rotatably disposed at the bottom of the objective wheel mounting bracket 404 via the objective wheel rotating member 702, 1-5 objective lenses 706 are disposed on the objective wheel 701, one end of the objective wheel rotating driving motor connecting plate 704 is fixedly connected with the objective wheel rotating member 702, the other end of the objective wheel rotating driving motor connecting plate 704 is fixedly connected with the objective wheel rotating driving motor 703, the objective wheel rotating driving motor is disposed at one side of the objective wheel 701 via the objective wheel rotating driving motor connecting plate 704, and the objective wheel rotating driving motor 703 is drivingly connected with the objective wheel 701 via the objective wheel rotating synchronous pulley 705, the objective 706 is switched under the lens of the scanning camera assembly 5 by rotation of the objective wheel 701.
Further, referring to fig. 5, the Z-axis coarse lift adjustment assembly 2 comprises a Z-axis coarse lift adjustment stepping motor 201, a motor mounting bracket 202, a ball screw 203, a ball screw mounting plate 204, Z-axis coarse lift adjustment linear slide rails 205 and a Z-axis suspension arm assembly mounting plate 206, wherein the ball screw mounting plate 204 is fixed on a vertical plate of the Z-axis base assembly 1, the ball screw 203 is vertically disposed in the middle of the front surface of the ball screw mounting plate 204, the two Z-axis coarse lift adjustment linear slide rails 205 are vertically disposed on the left and right sides of the front surface of the ball screw mounting plate 204, the Z-axis coarse lift adjustment stepping motor 201 is disposed on the top end of the ball screw mounting plate 204 through the motor mounting bracket 202, the Z-axis coarse lift adjustment stepping motor 201 is in transmission connection with the top end of the ball screw 203, and the rear surface of the Z-axis suspension arm assembly mounting plate 206 is simultaneously connected with the nut on the ball screw 203 and the two Z-axis coarse lift adjustment linear slide rails 203 And the slide block on the Z-axis lifting coarse adjustment linear slide rail 205 is fixedly connected.
Further, referring to fig. 6, the pen-shaped piezoceramic stack displacement device 402 includes a compression-resistant cylinder 4021, a piezoceramic stack 4022, an upper edge cap 4023, a lower nut 4024, a force nut 4025, a force nut adaptor 4026, and a spring 4027; the pressure resistant cylinder 4021 is in a straight tube shape, the piezoelectric ceramic stack 4022 is in a rod shape or a stick shape, the piezoelectric ceramic stack 4022 is variably arranged in the pressure resistant cylinder 4021 in length, the upper end cap 4023 is arranged at a top port of the pressure resistant cylinder 4021, the inner side surface of the upper end cap 4023 is fixedly connected with the top of the piezoelectric ceramic stack 4022, the lower nut 4024 is arranged at a bottom port of the pressure resistant cylinder 4021, the stress nut 4025 is telescopically arranged in the lower nut 4024, the output end of the stress nut 4025 is positioned outside the pressure resistant cylinder 4021, and the input end of the stress nut 4025 is positioned inside the pressure resistant cylinder 4021; the stress nut adaptor 4026 and the spring 4027 are both arranged inside the pressure resistant cylinder 4021, wherein the upper end of the stress nut adaptor 4026 is fixedly connected with the bottom of the piezoelectric ceramic stack 4022, the lower end of the stress nut adaptor 4026 is fixedly connected with the input end of the stress nut 4025, the upper end of the spring 4027 is in contact with the lower end of the stress nut adaptor 4026, and the lower end of the spring 4027 is in contact with the bottom surface of the inner wall of the lower nut 4024.
Further, the displacement frequency of the pen-shaped piezoelectric ceramic stack displacement device 402 is 600Hz/s, the effective displacement distance is 110 μm, the stepping precision is 0.1 μm, and the maximum load force is 400N.
Further, the spring 4027 is a plurality of disc springs connected in series.
Further, the spring 4027 is 4 disc springs connected in series.
Further, the driving voltage range of the pen-type piezoceramic stack displacement device 402 is 0-150V, and the 150V resistance is 1000N.
Further, the piezoelectric ceramic stack 4022 has dimensions of 5.2mm × 7.1mm × 100 mm.
The invention performs the following performance tests on the pen-type piezoelectric ceramic stack displacement device 402:
under the condition that the objective wheel 701 is provided with five objectives 706, the invention respectively tests the motion accuracy of four motion steps of step 2, step 3, step 4 and step 5, and in each step, the motion accuracy of different target positions under 6 motion frequencies of 200HZ, 150HZ, 125HZ, 100HZ, 75HZ and 50HZ is respectively tested.
The unit of the step length and the target position is a grating scale, and the physical length of each value is 0.1 mu m. That is, the step distance of step 2 is 0.2 μm, the step distance of step 3 is 0.3 μm, the step distance of step 4 is 0.4 μm, and the step distance of step 5 is 0.5 μm.
After the motion accuracy test of one step is completed, the mirror wheel rotation driving motor 703 drives the objective wheel 701 to rotate by an angle of one objective, and then the motion accuracy test of the next step is continued. The results of the precision test are shown in tables 1-1 to 4-2.
TABLE 1-1
| Target position | 200HZ | 150HZ | 125HZ | 100HZ | 75HZ | 50HZ | Error of motion | 200HZ | 150HZ | 125HZ | 100HZ | 75HZ | 50HZ |
| 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 2 | 2 | 1 | 1 | 1 | 1 | 1 | 0 | -1 | -1 | -1 | -1 | -1 | |
| 4 | 2 | 3 | 3 | 3 | 3 | 3 | -2 | -1 | -1 | -1 | -1 | -1 | |
| 6 | 5 | 5 | 5 | 5 | 5 | 5 | -1 | -1 | -1 | -1 | -1 | -1 | |
| 8 | 5 | 7 | 7 | 7 | 7 | 7 | -3 | -1 | -1 | -1 | -1 | -1 | |
| 10 | 9 | 9 | 9 | 9 | 9 | 9 | -1 | -1 | -1 | -1 | -1 | -1 | |
| 12 | 9 | 11 | 11 | 11 | 11 | 11 | -3 | -1 | -1 | -1 | -1 | -1 | |
| 14 | 13 | 13 | 13 | 13 | 13 | 13 | -1 | -1 | -1 | -1 | -1 | -1 | |
| 16 | 14 | 15 | 15 | 15 | 15 | 15 | -2 | -1 | -1 | -1 | -1 | -1 | |
| 18 | 18 | 18 | 17 | 17 | 18 | 18 | 0 | 0 | -1 | -1 | 0 | 0 | |
| 20 | 18 | 19 | 19 | 19 | 20 | 20 | -2 | -1 | -1 | -1 | 0 | 0 | |
| 22 | 22 | 22 | 21 | 22 | 22 | 22 | 0 | 0 | -1 | 0 | 0 | 0 | |
| 24 | 23 | 24 | 24 | 24 | 24 | 24 | -1 | 0 | 0 | 0 | 0 | 0 | |
| 26 | 26 | 26 | 26 | 25 | 26 | 26 | 0 | 0 | 0 | -1 | 0 | 0 | |
| 28 | 27 | 27 | 27 | 27 | 28 | 28 | -1 | -1 | -1 | -1 | 0 | 0 | |
| 30 | 30 | 29 | 29 | 29 | 30 | 30 | 0 | -1 | -1 | -1 | 0 | 0 | |
| 32 | 30 | 31 | 31 | 32 | 32 | 31 | -2 | -1 | -1 | 0 | 0 | -1 | |
| 34 | 34 | 33 | 33 | 34 | 34 | 34 | 0 | -1 | -1 | 0 | 0 | 0 | |
| 36 | 34 | 35 | 35 | 36 | 35 | 36 | -2 | -1 | -1 | 0 | -1 | 0 | |
| 38 | 38 | 38 | 38 | 38 | 38 | 38 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 40 | 39 | 40 | 40 | 40 | 40 | 40 | -1 | 0 | 0 | 0 | 0 | 0 | |
| 42 | 42 | 42 | 42 | 42 | 42 | 42 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 44 | 43 | 44 | 43 | 44 | 44 | 44 | -1 | 0 | -1 | 0 | 0 | 0 | |
| 46 | 46 | 46 | 46 | 46 | 46 | 46 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 48 | 47 | 48 | 47 | 48 | 48 | 48 | -1 | 0 | -1 | 0 | 0 | 0 | |
| 50 | 50 | 49 | 50 | 50 | 50 | 50 | 0 | -1 | 0 | 0 | 0 | 0 | |
| 52 | 51 | 52 | 51 | 52 | 52 | 52 | -1 | 0 | -1 | 0 | 0 | 0 | |
| 54 | 54 | 54 | 53 | 54 | 54 | 54 | 0 | 0 | -1 | 0 | 0 | 0 | |
| 56 | 55 | 56 | 55 | 56 | 56 | 56 | -1 | 0 | -1 | 0 | 0 | 0 | |
| 58 | 58 | 57 | 57 | 58 | 58 | 58 | 0 | -1 | -1 | 0 | 0 | 0 | |
| 60 | 59 | 60 | 59 | 59 | 60 | 60 | -1 | 0 | -1 | -1 | 0 | 0 | |
| 62 | 62 | 62 | 61 | 62 | 62 | 62 | 0 | 0 | -1 | 0 | 0 | 0 | |
| 64 | 63 | 64 | 64 | 64 | 64 | 64 | -1 | 0 | 0 | 0 | 0 | 0 | |
| 66 | 66 | 66 | 65 | 66 | 66 | 66 | 0 | 0 | -1 | 0 | 0 | 0 | |
| 68 | 67 | 67 | 68 | 68 | 68 | 68 | -1 | -1 | 0 | 0 | 0 | 0 | |
| 70 | 70 | 70 | 69 | 70 | 70 | 70 | 0 | 0 | -1 | 0 | 0 | 0 | |
| 72 | 71 | 72 | 71 | 72 | 72 | 72 | -1 | 0 | -1 | 0 | 0 | 0 | |
| 74 | 74 | 73 | 74 | 74 | 74 | 74 | 0 | -1 | 0 | 0 | 0 | 0 |
Tables 1 to 2
| Target position | 200HZ | 150HZ | 125HZ | 100HZ | 75HZ | 50HZ | Error of motion | 200HZ | 150HZ | 125HZ | 100HZ | 75HZ | 50HZ |
| 76 | 75 | 76 | 76 | 76 | 76 | 76 | -1 | 0 | 0 | 0 | 0 | 0 | |
| 78 | 78 | 78 | 78 | 78 | 78 | 78 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 80 | 79 | 79 | 80 | 80 | 80 | 80 | -1 | -1 | 0 | 0 | 0 | 0 | |
| 82 | 82 | 82 | 82 | 82 | 82 | 82 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 84 | 83 | 84 | 84 | 84 | 84 | 84 | -1 | 0 | 0 | 0 | 0 | 0 | |
| 86 | 86 | 86 | 86 | 86 | 86 | 86 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 88 | 87 | 88 | 87 | 88 | 88 | 88 | -1 | 0 | -1 | 0 | 0 | 0 | |
| 90 | 90 | 89 | 89 | 90 | 90 | 90 | 0 | -1 | -1 | 0 | 0 | 0 | |
| 92 | 91 | 92 | 91 | 92 | 92 | 92 | -1 | 0 | -1 | 0 | 0 | 0 | |
| 94 | 94 | 94 | 94 | 94 | 94 | 94 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 96 | 95 | 96 | 95 | 96 | 96 | 96 | -1 | 0 | -1 | 0 | 0 | 0 | |
| 98 | 98 | 98 | 98 | 98 | 98 | 98 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 100 | 99 | 100 | 99 | 100 | 100 | 100 | -1 | 0 | -1 | 0 | 0 | 0 | |
| 102 | 102 | 102 | 102 | 102 | 102 | 102 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 104 | 103 | 104 | 104 | 104 | 104 | 104 | -1 | 0 | 0 | 0 | 0 | 0 | |
| 106 | 106 | 105 | 106 | 106 | 106 | 106 | 0 | -1 | 0 | 0 | 0 | 0 | |
| 108 | 107 | 108 | 108 | 108 | 108 | 108 | -1 | 0 | 0 | 0 | 0 | 0 | |
| 110 | 110 | 110 | 110 | 110 | 110 | 110 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 112 | 111 | 112 | 112 | 112 | 112 | 112 | -1 | 0 | 0 | 0 | 0 | 0 | |
| 114 | 114 | 114 | 114 | 114 | 114 | 114 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 116 | 115 | 116 | 116 | 116 | 116 | 116 | -1 | 0 | 0 | 0 | 0 | 0 | |
| 118 | 118 | 118 | 118 | 118 | 118 | 118 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 120 | 119 | 120 | 119 | 120 | 120 | 120 | -1 | 0 | -1 | 0 | 0 | 0 | |
| 122 | 122 | 122 | 121 | 122 | 122 | 122 | 0 | 0 | -1 | 0 | 0 | 0 | |
| 124 | 123 | 124 | 123 | 124 | 124 | 124 | -1 | 0 | -1 | 0 | 0 | 0 | |
| 126 | 126 | 126 | 125 | 126 | 126 | 126 | 0 | 0 | -1 | 0 | 0 | 0 | |
| 128 | 127 | 128 | 128 | 128 | 128 | 128 | -1 | 0 | 0 | 0 | 0 | 0 | |
| 130 | 130 | 130 | 130 | 130 | 130 | 130 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 132 | 131 | 132 | 132 | 132 | 132 | 132 | -1 | 0 | 0 | 0 | 0 | 0 | |
| 134 | 134 | 134 | 134 | 134 | 134 | 134 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 136 | 135 | 136 | 136 | 136 | 136 | 136 | -1 | 0 | 0 | 0 | 0 | 0 | |
| 138 | 138 | 138 | 138 | 138 | 138 | 138 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 140 | 139 | 140 | 140 | 140 | 140 | 140 | -1 | 0 | 0 | 0 | 0 | 0 | |
| 142 | 142 | 142 | 142 | 142 | 142 | 142 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 144 | 143 | 144 | 144 | 144 | 144 | 144 | -1 | 0 | 0 | 0 | 0 | 0 | |
| 146 | 146 | 146 | 146 | 146 | 146 | 146 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 148 | 147 | 148 | 148 | 148 | 148 | 148 | -1 | 0 | 0 | 0 | 0 | 0 | |
| 150 | 150 | 150 | 150 | 150 | 150 | 150 | 0 | 0 | 0 | 0 | 0 | 0 |
Table 1-1 shows the result of the motion error of the pen-type piezo ceramic stack displacement device between the target positions 0-74 when the motion step is set to step 2(0.2 μm) at the first objective position; tables 1-2 show the results of the motion error between target positions 76-150 for the pen type piezo ceramic stack displacement apparatus of the present invention at the first objective position, setting the motion step size to step size 2(0.2 μm).
TABLE 2-1
| Target position | 200HZ | 150HZ | 125HZ | 100HZ | 75HZ | 50HZ | Error of motion | 200HZ | 150HZ | 125HZ | 100HZ | 75HZ |
| 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 3 | 3 | 2 | 2 | 2 | 2 | 2 | 0 | -1 | -1 | -1 | -1 | |
| 6 | 3 | 5 | 5 | 5 | 4 | 5 | -3 | -1 | -1 | -1 | -2 | |
| 9 | 8 | 8 | 7 | 8 | 8 | 8 | -1 | -1 | -2 | -1 | -1 | |
| 12 | 8 | 11 | 10 | 11 | 11 | 11 | -4 | -1 | -2 | -1 | -1 | |
| 15 | 14 | 14 | 14 | 14 | 14 | 14 | -1 | -1 | -1 | -1 | -1 | |
| 18 | 14 | 17 | 17 | 17 | 17 | 17 | -4 | -1 | -1 | -1 | -1 | |
| 21 | 20 | 20 | 21 | 21 | 21 | 21 | -1 | -1 | 0 | 0 | 0 | |
| 24 | 21 | 24 | 23 | 23 | 24 | 24 | -3 | 0 | -1 | -1 | 0 | |
| 27 | 27 | 27 | 27 | 27 | 27 | 27 | 0 | 0 | 0 | 0 | 0 | |
| 30 | 28 | 30 | 30 | 30 | 30 | 30 | -2 | 0 | 0 | 0 | 0 | |
| 33 | 33 | 32 | 33 | 32 | 33 | 33 | 0 | -1 | 0 | -1 | 0 | |
| 36 | 34 | 36 | 36 | 36 | 36 | 36 | -2 | 0 | 0 | 0 | 0 | |
| 39 | 39 | 39 | 39 | 39 | 39 | 39 | 0 | 0 | 0 | 0 | 0 | |
| 42 | 40 | 42 | 42 | 42 | 42 | 42 | -2 | 0 | 0 | 0 | 0 | |
| 45 | 45 | 45 | 45 | 45 | 45 | 45 | 0 | 0 | 0 | 0 | 0 | |
| 48 | 46 | 48 | 48 | 48 | 48 | 48 | -2 | 0 | 0 | 0 | 0 | |
| 51 | 51 | 51 | 50 | 51 | 51 | 51 | 0 | 0 | -1 | 0 | 0 | |
| 54 | 52 | 54 | 54 | 54 | 54 | 54 | -2 | 0 | 0 | 0 | 0 | |
| 57 | 57 | 57 | 57 | 57 | 57 | 57 | 0 | 0 | 0 | 0 | 0 | |
| 60 | 59 | 60 | 60 | 59 | 60 | 60 | -1 | 0 | 0 | -1 | 0 | |
| 63 | 63 | 63 | 63 | 63 | 63 | 63 | 0 | 0 | 0 | 0 | 0 | |
| 66 | 64 | 66 | 66 | 66 | 66 | 66 | -2 | 0 | 0 | 0 | 0 | |
| 69 | 69 | 69 | 69 | 69 | 69 | 69 | 0 | 0 | 0 | 0 | 0 | |
| 72 | 70 | 72 | 72 | 72 | 72 | 72 | -2 | 0 | 0 | 0 | 0 | |
| 75 | 75 | 75 | 75 | 75 | 75 | 75 | 0 | 0 | 0 | 0 | 0 | |
| 78 | 76 | 78 | 78 | 78 | 78 | 78 | -2 | 0 | 0 | 0 | 0 | |
| 81 | 81 | 81 | 81 | 81 | 81 | 81 | 0 | 0 | 0 | 0 | 0 | |
| 84 | 82 | 84 | 84 | 84 | 84 | 84 | -2 | 0 | 0 | 0 | 0 | |
| 87 | 87 | 87 | 87 | 87 | 87 | 87 | 0 | 0 | 0 | 0 | 0 | |
| 90 | 88 | 90 | 89 | 90 | 90 | 90 | -2 | 0 | -1 | 0 | 0 | |
| 93 | 93 | 93 | 93 | 93 | 93 | 93 | 0 | 0 | 0 | 0 | 0 | |
| 96 | 94 | 96 | 95 | 96 | 96 | 96 | -2 | 0 | -1 | 0 | 0 | |
| 99 | 99 | 99 | 99 | 99 | 99 | 100 | 0 | 0 | 0 | 0 | 0 | |
| 102 | 100 | 102 | 102 | 102 | 102 | 102 | -2 | 0 | 0 | 0 | 0 | |
| 105 | 105 | 105 | 105 | 105 | 105 | 105 | 0 | 0 | 0 | 0 | 0 | |
| 108 | 107 | 108 | 108 | 108 | 108 | 108 | -1 | 0 | 0 | 0 | 0 | |
| 111 | 111 | 111 | 111 | 111 | 111 | 111 | 0 | 0 | 0 | 0 | 0 |
Tables 2 to 2
| Target position | 200HZ | 150HZ | 125HZ | 100HZ | 75HZ | 50HZ | Error of motion | 200HZ | 150HZ | 125HZ | 100HZ | 75HZ |
| 114 | 112 | 114 | 114 | 114 | 114 | 114 | -2 | 0 | 0 | 0 | 0 | |
| 117 | 117 | 117 | 117 | 117 | 117 | 117 | 0 | 0 | 0 | 0 | 0 | |
| 120 | 118 | 120 | 120 | 120 | 120 | 120 | -2 | 0 | 0 | 0 | 0 | |
| 123 | 123 | 123 | 123 | 123 | 123 | 124 | 0 | 0 | 0 | 0 | 0 | |
| 126 | 124 | 126 | 126 | 126 | 126 | 126 | -2 | 0 | 0 | 0 | 0 | |
| 129 | 129 | 129 | 129 | 129 | 129 | 129 | 0 | 0 | 0 | 0 | 0 | |
| 132 | 130 | 132 | 132 | 132 | 132 | 132 | -2 | 0 | 0 | 0 | 0 | |
| 135 | 135 | 135 | 135 | 135 | 135 | 135 | 0 | 0 | 0 | 0 | 0 | |
| 138 | 136 | 138 | 138 | 138 | 138 | 138 | -2 | 0 | 0 | 0 | 0 | |
| 141 | 141 | 141 | 141 | 141 | 141 | 141 | 0 | 0 | 0 | 0 | 0 | |
| 144 | 143 | 144 | 144 | 144 | 144 | 144 | -1 | 0 | 0 | 0 | 0 | |
| 147 | 147 | 147 | 147 | 147 | 147 | 147 | 0 | 0 | 0 | 0 | 0 | |
| 150 | 149 | 150 | 150 | 150 | 150 | 151 | -1 | 0 | 0 | 0 | 0 | |
| 153 | 153 | 153 | 153 | 153 | 153 | 153 | 0 | 0 | 0 | 0 | 0 | |
| 156 | 154 | 156 | 156 | 156 | 156 | 156 | -2 | 0 | 0 | 0 | 0 | |
| 159 | 159 | 159 | 159 | 159 | 159 | 159 | 0 | 0 | 0 | 0 | 0 | |
| 162 | 160 | 162 | 162 | 162 | 162 | 162 | -2 | 0 | 0 | 0 | 0 | |
| 165 | 165 | 165 | 165 | 165 | 165 | 165 | 0 | 0 | 0 | 0 | 0 | |
| 168 | 167 | 168 | 168 | 168 | 168 | 168 | -1 | 0 | 0 | 0 | 0 | |
| 171 | 171 | 171 | 171 | 171 | 171 | 171 | 0 | 0 | 0 | 0 | 0 | |
| 174 | 173 | 174 | 174 | 174 | 174 | 174 | -1 | 0 | 0 | 0 | 0 | |
| 177 | 177 | 177 | 177 | 177 | 177 | 177 | 0 | 0 | 0 | 0 | 0 | |
| 180 | 179 | 180 | 180 | 180 | 181 | 180 | -1 | 0 | 0 | 0 | 1 | |
| 183 | 183 | 183 | 183 | 183 | 184 | 183 | 0 | 0 | 0 | 0 | 1 | |
| 186 | 185 | 186 | 186 | 186 | 186 | 186 | -1 | 0 | 0 | 0 | 0 | |
| 189 | 189 | 189 | 189 | 189 | 189 | 190 | 0 | 0 | 0 | 0 | 0 | |
| 192 | 190 | 192 | 192 | 192 | 192 | 192 | -2 | 0 | 0 | 0 | 0 | |
| 195 | 195 | 195 | 195 | 195 | 195 | 195 | 0 | 0 | 0 | 0 | 0 | |
| 198 | 197 | 198 | 198 | 198 | 198 | 198 | -1 | 0 | 0 | 0 | 0 | |
| 201 | 201 | 201 | 201 | 201 | 201 | 201 | 0 | 0 | 0 | 0 | 0 | |
| 204 | 202 | 204 | 204 | 204 | 205 | 205 | -2 | 0 | 0 | 0 | 1 | |
| 207 | 207 | 207 | 207 | 207 | 207 | 207 | 0 | 0 | 0 | 0 | 0 | |
| 210 | 208 | 210 | 210 | 210 | 210 | 210 | -2 | 0 | 0 | 0 | 0 | |
| 213 | 213 | 213 | 213 | 213 | 214 | 213 | 0 | 0 | 0 | 0 | 1 | |
| 216 | 215 | 216 | 216 | 216 | 216 | 216 | -1 | 0 | 0 | 0 | 0 | |
| 219 | 219 | 219 | 219 | 219 | 219 | 219 | 0 | 0 | 0 | 0 | 0 | |
| 222 | 220 | 222 | 222 | 222 | 222 | 222 | -2 | 0 | 0 | 0 | 0 | |
| 225 | 225 | 225 | 225 | 225 | 226 | 225 | 0 | 0 | 0 | 0 | 1 |
Table 2-1 shows the result of the motion error of the pen-type piezo-ceramic stack displacement device between the target positions 0-111 when the motion step is set to be step 3(0.3 μm) at the second objective position; table 2-2 shows the result of the motion error between the target positions 114 and 225 of the pen-type piezoceramic stack displacement device of the present invention when the motion step is set to step 3(0.3 μm) at the second objective position.
TABLE 3-1
| Target position | 200HZ | 150HZ | 125HZ | 100HZ | 75HZ | 50HZ | Error of motion | 200HZ | 150HZ | 125HZ | 100HZ | 75HZ |
| 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 4 | 4 | 2 | 3 | 2 | 3 | 3 | 0 | -2 | -1 | -2 | -1 | |
| 8 | 4 | 6 | 6 | 6 | 7 | 7 | -4 | -2 | -2 | -2 | -1 | |
| 12 | 10 | 11 | 10 | 10 | 10 | 11 | -2 | -1 | -2 | -2 | -2 | |
| 16 | 10 | 15 | 14 | 15 | 15 | 15 | -6 | -1 | -2 | -1 | -1 | |
| 20 | 19 | 19 | 19 | 19 | 19 | 20 | -1 | -1 | -1 | -1 | -1 | |
| 24 | 20 | 23 | 24 | 24 | 24 | 24 | -4 | -1 | 0 | 0 | 0 | |
| 28 | 28 | 28 | 28 | 28 | 28 | 28 | 0 | 0 | 0 | 0 | 0 | |
| 32 | 28 | 32 | 31 | 31 | 32 | 32 | -4 | 0 | -1 | -1 | 0 | |
| 36 | 36 | 36 | 36 | 36 | 36 | 36 | 0 | 0 | 0 | 0 | 0 | |
| 40 | 37 | 40 | 39 | 40 | 41 | 41 | -3 | 0 | -1 | 0 | 1 | |
| 44 | 43 | 44 | 43 | 44 | 44 | 44 | -1 | 0 | -1 | 0 | 0 | |
| 48 | 45 | 48 | 47 | 48 | 48 | 49 | -3 | 0 | -1 | 0 | 0 | |
| 52 | 51 | 52 | 51 | 52 | 52 | 52 | -1 | 0 | -1 | 0 | 0 | |
| 56 | 53 | 56 | 56 | 56 | 56 | 56 | -3 | 0 | 0 | 0 | 0 | |
| 60 | 60 | 60 | 60 | 60 | 60 | 60 | 0 | 0 | 0 | 0 | 0 | |
| 64 | 62 | 64 | 64 | 64 | 64 | 64 | -2 | 0 | 0 | 0 | 0 | |
| 68 | 68 | 68 | 68 | 68 | 69 | 69 | 0 | 0 | 0 | 0 | 1 | |
| 72 | 70 | 72 | 72 | 72 | 72 | 73 | -2 | 0 | 0 | 0 | 0 | |
| 76 | 76 | 76 | 76 | 76 | 77 | 76 | 0 | 0 | 0 | 0 | 1 | |
| 80 | 78 | 80 | 80 | 80 | 81 | 81 | -2 | 0 | 0 | 0 | 1 | |
| 84 | 84 | 84 | 84 | 84 | 84 | 84 | 0 | 0 | 0 | 0 | 0 | |
| 88 | 86 | 88 | 88 | 88 | 88 | 89 | -2 | 0 | 0 | 0 | 0 | |
| 92 | 91 | 92 | 92 | 92 | 92 | 93 | -1 | 0 | 0 | 0 | 0 | |
| 96 | 94 | 96 | 96 | 96 | 96 | 96 | -2 | 0 | 0 | 0 | 0 | |
| 100 | 100 | 100 | 100 | 100 | 100 | 101 | 0 | 0 | 0 | 0 | 0 | |
| 104 | 101 | 104 | 104 | 104 | 105 | 104 | -3 | 0 | 0 | 0 | 1 | |
| 108 | 108 | 108 | 108 | 108 | 108 | 109 | 0 | 0 | 0 | 0 | 0 | |
| 112 | 109 | 112 | 112 | 112 | 112 | 113 | -3 | 0 | 0 | 0 | 0 | |
| 116 | 116 | 116 | 116 | 116 | 117 | 117 | 0 | 0 | 0 | 0 | 1 | |
| 120 | 117 | 120 | 120 | 120 | 120 | 121 | -3 | 0 | 0 | 0 | 0 | |
| 124 | 124 | 124 | 124 | 124 | 124 | 125 | 0 | 0 | 0 | 0 | 0 | |
| 128 | 125 | 128 | 128 | 128 | 129 | 129 | -3 | 0 | 0 | 0 | 1 | |
| 132 | 132 | 132 | 132 | 132 | 133 | 133 | 0 | 0 | 0 | 0 | 1 | |
| 136 | 133 | 136 | 136 | 136 | 137 | 137 | -3 | 0 | 0 | 0 | 1 | |
| 140 | 140 | 140 | 140 | 140 | 141 | 141 | 0 | 0 | 0 | 0 | 1 | |
| 144 | 141 | 144 | 144 | 144 | 145 | 145 | -3 | 0 | 0 | 0 | 1 | |
| 148 | 148 | 148 | 148 | 148 | 148 | 149 | 0 | 0 | 0 | 0 | 0 |
TABLE 3-2
| Target position | 200HZ | 150HZ | 125HZ | 100HZ | 75HZ | 50HZ | Error of motion | 200HZ | 150HZ | 125HZ | 100HZ | 75HZ |
| 152 | 149 | 152 | 152 | 152 | 153 | 153 | -3 | 0 | 0 | 0 | 1 | |
| 156 | 156 | 156 | 156 | 156 | 157 | 156 | 0 | 0 | 0 | 0 | 1 | |
| 160 | 158 | 160 | 160 | 160 | 160 | 161 | -2 | 0 | 0 | 0 | 0 | |
| 164 | 164 | 164 | 164 | 164 | 165 | 165 | 0 | 0 | 0 | 0 | 1 | |
| 168 | 166 | 168 | 168 | 168 | 168 | 169 | -2 | 0 | 0 | 0 | 0 | |
| 172 | 172 | 172 | 172 | 172 | 173 | 173 | 0 | 0 | 0 | 0 | 1 | |
| 176 | 173 | 176 | 176 | 176 | 176 | 177 | -3 | 0 | 0 | 0 | 0 | |
| 180 | 180 | 180 | 180 | 180 | 181 | 181 | 0 | 0 | 0 | 0 | 1 | |
| 184 | 182 | 184 | 184 | 184 | 185 | 185 | -2 | 0 | 0 | 0 | 1 | |
| 188 | 188 | 188 | 188 | 188 | 189 | 188 | 0 | 0 | 0 | 0 | 1 | |
| 192 | 189 | 192 | 192 | 193 | 192 | 193 | -3 | 0 | 0 | 1 | 0 | |
| 196 | 196 | 196 | 196 | 196 | 197 | 197 | 0 | 0 | 0 | 0 | 1 | |
| 200 | 198 | 200 | 200 | 200 | 200 | 201 | -2 | 0 | 0 | 0 | 0 | |
| 204 | 204 | 204 | 204 | 204 | 205 | 205 | 0 | 0 | 0 | 0 | 1 | |
| 208 | 206 | 208 | 208 | 208 | 209 | 209 | -2 | 0 | 0 | 0 | 1 | |
| 212 | 212 | 212 | 212 | 212 | 213 | 213 | 0 | 0 | 0 | 0 | 1 | |
| 216 | 214 | 216 | 216 | 216 | 217 | 216 | -2 | 0 | 0 | 0 | 1 | |
| 220 | 220 | 220 | 220 | 220 | 221 | 221 | 0 | 0 | 0 | 0 | 1 | |
| 224 | 222 | 224 | 224 | 224 | 225 | 225 | -2 | 0 | 0 | 0 | 1 | |
| 228 | 228 | 228 | 228 | 228 | 228 | 229 | 0 | 0 | 0 | 0 | 0 | |
| 232 | 230 | 232 | 232 | 232 | 233 | 233 | -2 | 0 | 0 | 0 | 1 | |
| 236 | 236 | 236 | 236 | 236 | 237 | 237 | 0 | 0 | 0 | 0 | 1 | |
| 240 | 238 | 240 | 240 | 240 | 241 | 241 | -2 | 0 | 0 | 0 | 1 | |
| 244 | 244 | 244 | 244 | 244 | 244 | 245 | 0 | 0 | 0 | 0 | 0 | |
| 248 | 246 | 248 | 248 | 248 | 249 | 249 | -2 | 0 | 0 | 0 | 1 | |
| 252 | 252 | 252 | 252 | 252 | 252 | 253 | 0 | 0 | 0 | 0 | 0 | |
| 256 | 254 | 256 | 256 | 256 | 256 | 257 | -2 | 0 | 0 | 0 | 0 | |
| 260 | 260 | 260 | 260 | 260 | 260 | 261 | 0 | 0 | 0 | 0 | 0 | |
| 264 | 262 | 264 | 264 | 264 | 265 | 265 | -2 | 0 | 0 | 0 | 1 | |
| 268 | 268 | 268 | 268 | 268 | 268 | 269 | 0 | 0 | 0 | 0 | 0 | |
| 272 | 270 | 272 | 272 | 272 | 273 | 273 | -2 | 0 | 0 | 0 | 1 | |
| 276 | 276 | 276 | 276 | 276 | 276 | 277 | 0 | 0 | 0 | 0 | 0 | |
| 280 | 278 | 280 | 280 | 280 | 281 | 281 | -2 | 0 | 0 | 0 | 1 | |
| 284 | 284 | 284 | 284 | 285 | 285 | 285 | 0 | 0 | 0 | 1 | 1 | |
| 288 | 285 | 288 | 288 | 288 | 289 | 289 | -3 | 0 | 0 | 0 | 1 | |
| 292 | 292 | 292 | 292 | 292 | 292 | 292 | 0 | 0 | 0 | 0 | 0 | |
| 296 | 294 | 296 | 296 | 296 | 296 | 297 | -2 | 0 | 0 | 0 | 0 | |
| 300 | 300 | 300 | 300 | 300 | 300 | 300 | 0 | 0 | 0 | 0 | 0 |
Table 3-1 shows the result of the motion error between the target positions 0-148 of the pen-type piezo ceramic stack displacement device of the present invention when the step length of the motion is set to 4(0.4 μm) at the third objective position; table 3-2 shows the result of the motion error between the target positions 152 and 300 of the pen-type piezoceramic stack displacement device of the present invention when the motion step is set to be step 4(0.4 μm) at the third objective position.
TABLE 4-1
| Target position | 200HZ | 150HZ | 125HZ | 100HZ | 75HZ | 50HZ | Error of motion | 200HZ | 150HZ | 125HZ | 100HZ | 75HZ |
| 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | |
| 5 | 4 | 3 | 3 | 4 | 4 | 4 | -1 | -2 | -2 | -1 | -1 | |
| 10 | 4 | 8 | 8 | 8 | 8 | 8 | -6 | -2 | -2 | -2 | -2 | |
| 15 | 13 | 13 | 13 | 13 | 14 | 14 | -2 | -2 | -2 | -2 | -1 | |
| 20 | 13 | 19 | 19 | 19 | 19 | 20 | -7 | -1 | -1 | -1 | -1 | |
| 25 | 23 | 24 | 24 | 25 | 25 | 25 | -2 | -1 | -1 | 0 | 0 | |
| 30 | 25 | 30 | 29 | 30 | 30 | 30 | -5 | 0 | -1 | 0 | 0 | |
| 35 | 35 | 35 | 35 | 35 | 35 | 36 | 0 | 0 | 0 | 0 | 0 | |
| 40 | 37 | 40 | 40 | 40 | 41 | 41 | -3 | 0 | 0 | 0 | 1 | |
| 45 | 44 | 45 | 45 | 45 | 45 | 45 | -1 | 0 | 0 | 0 | 0 | |
| 50 | 47 | 50 | 50 | 50 | 51 | 51 | -3 | 0 | 0 | 0 | 1 | |
| 55 | 55 | 55 | 55 | 55 | 55 | 56 | 0 | 0 | 0 | 0 | 0 | |
| 60 | 57 | 60 | 60 | 60 | 60 | 60 | -3 | 0 | 0 | O | 0 | |
| 65 | 65 | 65 | 65 | 65 | 66 | 66 | 0 | 0 | 0 | 0 | 1 | |
| 70 | 67 | 70 | 70 | 70 | 71 | 71 | -3 | 0 | 0 | 0 | 1 | |
| 75 | 74 | 75 | 75 | 75 | 76 | 76 | -1 | 0 | 0 | 0 | 1 | |
| 80 | 78 | 80 | 80 | 80 | 80 | 81 | -2 | 0 | 0 | 0 | 0 | |
| 85 | 84 | 85 | 85 | 85 | 86 | 86 | -1 | 0 | 0 | 0 | 1 | |
| 90 | 87 | 90 | 90 | 90 | 91 | 91 | -3 | 0 | 0 | 0 | 1 | |
| 95 | 95 | 95 | 95 | 95 | 96 | 96 | 0 | 0 | 0 | 0 | 1 | |
| 100 | 98 | 100 | 100 | 100 | 101 | 101 | -2 | 0 | 0 | 0 | 1 | |
| 105 | 105 | 105 | 105 | 105 | 106 | 106 | 0 | 0 | 0 | 0 | 1 | |
| 110 | 108 | 110 | 110 | 110 | 111 | 111 | -2 | 0 | 0 | 0 | 1 | |
| 115 | 115 | 115 | 115 | 115 | 116 | 116 | 0 | 0 | 0 | 0 | 1 | |
| 120 | 118 | 120 | 120 | 120 | 121 | 121 | -2 | 0 | 0 | 0 | 1 | |
| 125 | 125 | 125 | 125 | 125 | 126 | 126 | 0 | 0 | 0 | 0 | 1 | |
| 130 | 127 | 130 | 130 | 130 | 131 | 131 | -3 | 0 | 0 | 0 | 1 | |
| 135 | 135 | 135 | 135 | 135 | 136 | 136 | 0 | 0 | 0 | 0 | 1 | |
| 140 | 137 | 140 | 140 | 140 | 141 | 141 | -3 | 0 | 0 | 0 | 1 | |
| 145 | 144 | 145 | 145 | 145 | 146 | 146 | -1 | 0 | 0 | 0 | 1 | |
| 150 | 148 | 150 | 150 | 150 | 151 | 151 | -2 | 0 | 0 | 0 | 1 | |
| 155 | 155 | 155 | 155 | 155 | 156 | 156 | 0 | 0 | 0 | 0 | 1 | |
| 160 | 157 | 160 | 160 | 160 | 161 | 161 | -3 | 0 | 0 | 0 | 1 | |
| 165 | 165 | 165 | 165 | 165 | 166 | 166 | 0 | 0 | 0 | 0 | 1 | |
| 170 | 168 | 170 | 170 | 170 | 171 | 171 | -2 | 0 | 0 | 0 | 1 | |
| 175 | 174 | 175 | 175 | 175 | 176 | 176 | -1 | 0 | 0 | 0 | 1 | |
| 180 | 178 | 180 | 180 | 180 | 181 | 181 | -2 | 0 | 0 | 0 | 1 | |
| 185 | 184 | 185 | 185 | 185 | 186 | 186 | -1 | 0 | 0 | 0 | 1 |
TABLE 4-2
| Target position | 200HZ | 150HZ | 125HZ | 100HZ | 75HZ | 50HZ | Error of motion | 200HZ | 150HZ | 125HZ | 100HZ | 75HZ |
| 190 | 188 | 190 | 190 | 190 | 191 | 191 | -2 | 0 | 0 | 0 | 1 | |
| 195 | 195 | 195 | 195 | 195 | 196 | 196 | 0 | 0 | 0 | 0 | 1 | |
| 200 | 198 | 200 | 200 | 200 | 201 | 201 | -2 | 0 | 0 | 0 | 1 | |
| 205 | 205 | 205 | 205 | 206 | 206 | 206 | 0 | 0 | 0 | 1 | 1 | |
| 210 | 208 | 210 | 210 | 211 | 211 | 211 | -2 | 0 | 0 | 1 | 1 | |
| 215 | 215 | 215 | 215 | 215 | 216 | 216 | 0 | 0 | 0 | 0 | 1 | |
| 220 | 217 | 220 | 220 | 220 | 221 | 221 | -3 | 0 | 0 | 0 | 1 | |
| 225 | 225 | 225 | 225 | 225 | 226 | 226 | 0 | 0 | 0 | 0 | 1 | |
| 230 | 228 | 230 | 230 | 230 | 231 | 231 | -2 | 0 | 0 | 0 | 1 | |
| 235 | 235 | 235 | 235 | 235 | 236 | 236 | 0 | 0 | 0 | 0 | 1 | |
| 240 | 237 | 240 | 240 | 241 | 241 | 241 | -3 | 0 | 0 | 1 | 1 | |
| 245 | 245 | 245 | 245 | 245 | 246 | 246 | 0 | 0 | 0 | 0 | 1 | |
| 250 | 247 | 250 | 250 | 250 | 251 | 251 | -3 | 0 | 0 | 0 | 1 | |
| 255 | 255 | 255 | 255 | 255 | 256 | 256 | 0 | 0 | 0 | 0 | 1 | |
| 260 | 257 | 260 | 260 | 260 | 261 | 261 | -3 | 0 | 0 | 0 | 1 | |
| 265 | 265 | 265 | 265 | 266 | 266 | 266 | 0 | 0 | 0 | 1 | 1 | |
| 270 | 268 | 270 | 270 | 270 | 271 | 271 | -2 | 0 | 0 | 0 | 1 | |
| 275 | 275 | 275 | 275 | 275 | 276 | 276 | 0 | 0 | 0 | 0 | 1 | |
| 280 | 278 | 280 | 280 | 280 | 281 | 281 | -2 | 0 | 0 | 0 | 1 | |
| 285 | 285 | 285 | 285 | 286 | 286 | 286 | 0 | 0 | 0 | 1 | 1 | |
| 290 | 288 | 290 | 290 | 290 | 291 | 291 | -2 | 0 | 0 | 0 | 1 | |
| 295 | 295 | 295 | 295 | 295 | 296 | 296 | 0 | 0 | 0 | 0 | 1 | |
| 300 | 298 | 300 | 300 | 300 | 301 | 301 | -2 | 0 | 0 | 0 | 1 | |
| 305 | 305 | 305 | 305 | 305 | 306 | 306 | 0 | 0 | 0 | 0 | 1 | |
| 310 | 308 | 310 | 310 | 310 | 311 | 311 | -2 | 0 | 0 | 0 | 1 | |
| 315 | 315 | 315 | 315 | 315 | 316 | 316 | 0 | 0 | 0 | 0 | 1 | |
| 320 | 317 | 320 | 320 | 320 | 321 | 321 | -3 | 0 | 0 | 0 | 1 | |
| 325 | 325 | 325 | 325 | 325 | 326 | 326 | 0 | 0 | 0 | 0 | 1 | |
| 330 | 327 | 330 | 330 | 330 | 331 | 331 | -3 | 0 | 0 | 0 | 1 | |
| 335 | 335 | 335 | 335 | 335 | 336 | 336 | 0 | 0 | 0 | 0 | 1 | |
| 340 | 338 | 340 | 340 | 340 | 341 | 341 | -2 | 0 | 0 | 0 | 1 | |
| 345 | 345 | 345 | 345 | 345 | 346 | 346 | 0 | 0 | 0 | 0 | 1 | |
| 350 | 347 | 350 | 350 | 350 | 351 | 351 | -3 | 0 | 0 | 0 | 1 | |
| 355 | 355 | 355 | 355 | 355 | 356 | 356 | 0 | 0 | 0 | 0 | 1 | |
| 360 | 358 | 360 | 360 | 360 | 361 | 361 | -2 | 0 | 0 | 0 | 1 | |
| 365 | 365 | 365 | 365 | 365 | 366 | 366 | 0 | 0 | 0 | 0 | 1 | |
| 370 | 368 | 370 | 370 | 370 | 371 | 371 | -2 | 0 | 0 | 0 | 1 | |
| 375 | 375 | 375 | 375 | 375 | 376 | 376 | 0 | 0 | 0 | 0 | 1 |
Table 4-1 shows the results of the motion errors between target positions 0-185 for the pen-type piezo ceramic stack displacement apparatus of the present invention at the third objective position, when the motion step is set to step 5(0.5 μm); table 4-2 shows the result of the motion error between the target positions 190-375 of the pen-type piezo-ceramic stack displacement device of the present invention when the motion step is set to be step 5(0.5 μm) at the third objective position.
From the above results, the pen-type piezoelectric ceramic stack displacement device of the invention has the advantages of small structure, small processing difficulty, low manufacturing cost, sufficient load capacity, high displacement frequency, accurate stepping and eccentric bearing, so that the pen-type piezoelectric ceramic stack displacement device of the invention can completely meet the use requirements of an electron microscope which is provided with a plurality of objective lenses and has higher requirements on the displacement accuracy of the objective lenses, and can realize the nano-scale anti-shake accurate displacement which simultaneously drives the objective lenses within an effective distance.
Further, referring to fig. 3 and 7, the objective lens leveling assembly 6 is composed of a camera assembly mounting plate 601, a leveling press 602, a hold-down screw 603, a height fixing member 604 and two height adjusting members 605, the middle part of the camera component mounting plate 601 is provided with a hollow structure for mounting the Z-axis lifting fine adjustment component 4 and avoiding the scanning camera component 5, an origin, a first fulcrum and a second fulcrum are designed on the frame of the camera component mounting plate 601, the origin, the first fulcrum and the second fulcrum form a triangle on the plane of the camera module mounting plate 601, the leveling pressing block 602 is of a C-shaped structure, the leveling pressing block 602 is fixedly connected with the upper surface of the camera component mounting plate 601, the leveling pressing block 602 is located in a triangle formed by the origin, the first fulcrum and the second fulcrum; the height fixing member 604 is arranged at the origin, the two height adjusting members 605 are respectively arranged at the first fulcrum and the second fulcrum, the hold-down screw 603 is arranged on the leveling pressing block 602, and the camera component mounting plate 601 is arranged on the upper surface of the Z-axis suspension arm assembly 3 through the height fixing member 604 and the two height adjusting members 605 in a levelness-adjustable manner, and is locked and fixed through the hold-down screw 603.
Further, the height fixing member 604 is a steel ball, two the height adjusting member 605 is a jack screw, the steel ball is embedded in the position corresponding to the origin of the lower surface of the camera component mounting plate 601 and the position corresponding to the origin of the upper surface of the Z-axis suspension arm assembly 3, two the jack screws are respectively arranged at the position corresponding to the first fulcrum and the second fulcrum on the leveling pressing block 602, and two the jack screws all downwards penetrate through the camera component mounting plate 601 and then contact with the upper surface of the Z-axis suspension arm assembly 3.
Further, the first pivot and the second pivot are as close as possible to the outer edge of the frame of the camera module mounting board 601.
Further, as shown in fig. 8, the scanning camera assembly 5 is composed of a scanning camera, a scanning camera mounting bracket and a scanning camera limiting plate, the scanning camera is disposed in the hollow structure in the middle of the camera assembly mounting plate 601 of the objective lens leveling assembly 6 through the lens of the scanning camera mounting bracket facing downward, the scanning camera limiting plate is disposed on the upper surface of the front portion of the camera assembly mounting plate 601, and the scanning camera limiting plate and the pen-shaped piezoceramic stack displacement device hanging frame 403 further limit the scanning camera at the front and rear sides.
Further, the objective lens 706 is divided into a dry objective lens and a wet objective lens.
Further, as shown in fig. 4, a vertically downward elastic oil filling nozzle 8 is arranged on the objective wheel mounting bracket 404, a circle of cam plate 9 for adjusting the position relationship between the elastic oil filling nozzle 8 and the objective lens 706 is arranged on the outer edge of the objective wheel 701, the cam plate 9 is composed of an outer convex arc edge and an inner concave arc edge, the position of the outer convex arc edge corresponds to the position of the dry objective lens, the position of the inner concave arc edge corresponds to the position of the wet objective lens, when the elastic oil filling nozzle 8 contacts with the outer convex arc edge, the oil outlet of the elastic oil filling nozzle 8 is far away from the dry objective lens, and when the elastic oil filling nozzle 8 contacts with the inner concave arc edge, the oil outlet of the elastic oil filling nozzle 8 is close to the wet objective lens.
Furthermore, the elastic oil filling nozzle 8 is connected with an oil bottle through an oil filling pipe and an oil pump, and the oil bottle is installed on a vertical plate of the Z-axis base assembly 1.
Further, referring to fig. 4, the front end of the Z-axis suspension arm assembly 3 is provided with a global camera 10 for photographing a slide sample area and a label area, and a front side light source 11 for providing illumination to the global camera 10.
The working process and principle of the invention are as follows:
firstly, the verticality of the objective lens and the camera lens with the slide frame carrying platform and the slide is adjusted through the objective lens leveling component 6, the principle of determining a plane by three points is utilized, an original point with fixed height and two supporting points with adjustable height are provided on the camera component mounting plate 601, the horizontal state of a triangular working surface enclosed by the original point and the supporting points can be quickly adjusted by adjusting the heights of the two supporting points on the basis of the height fixation of the original point, and finally the camera component mounting plate 601 is tightly pressed on the upper surface of the Z-axis suspension arm component 3 through the leveling pressing block 602 and the pressing screw 603, so that the verticality of the objective lens and the camera lens with the slide frame carrying platform and the slide can quickly meet the detection requirement of an electronic microscope, thereby ensuring that the image definition of each area of a detection sample can be kept consistent in the lifting process of the objective lens and the camera lens, and not only ensuring the imaging effect, and the preparation time of the early stage of detection is greatly shortened.
And then the Z-axis lifting coarse adjustment component 2 is used for carrying out Z-axis height coarse adjustment on the objective lens and the camera, the Z-axis lifting coarse adjustment stepping motor 201 drives the ball screw 203 to work, so as to drive the Z-axis suspension arm component mounting plate 206 to move downwards along the Z-axis lifting coarse adjustment linear slide rail 205, and the Z-axis suspension arm component mounting plate 206 drives the Z-axis lifting fine adjustment component 4, the scanning camera component 5, the objective lens leveling component 6 and the objective lens wheel component 7 to move downwards together from the initial height position through the Z-axis suspension arm component 3 until the objective lens 706 reaches the height position where the scanning camera component 5 can roughly and clearly see a sample target area.
And then, the Z-axis lifting fine adjustment assembly 4 performs Z-axis direction height precision on the objective lens, and applies corresponding voltage to the pen-type piezoelectric ceramic stack displacement device 402, so that the pen-type piezoelectric ceramic stack displacement device 402 drives the objective lens wheel mounting bracket 404 and the objective lens wheel assembly 7 to gradually move downwards along the Z-axis lifting fine adjustment linear slide rail until the scanning camera assembly 5 can form focusing on the detection area of the sample through the objective lens 706. The displacement frequency of the pen-type piezoelectric ceramic stack displacement device 402 is 600Hz/s, the stepping distance of 0.1 mu m at each time can be realized within the effective displacement distance range of 110 mu m, and the load capacity is strong, so that at most five objective lenses 706 can be driven to lift at the same time.
The working principle of the pen-type piezoceramic stack displacement apparatus 402 of the present invention is to change the length state of the piezoceramic stack 4022 by applying different voltages to the piezoceramic stack 4022 located within the compression resistant cylinder 4021. In the process of changing the length state, the upper end of the piezoelectric ceramic stack 4022 is blocked by an upper end cap 4023 at the upper end of the compression cylinder 4021 and remains stationary, the lower end of the piezoelectric ceramic stack 4022 transmits torque to a stress nut 4025 in a lower nut 4024 through a stress nut adaptor 4026, meanwhile, the stress nut adaptor 4026 extrudes a spring 4027 to a certain degree, and finally, the stress nut 4025 controls the displacement state of the pen-shaped piezoelectric ceramic stack displacement device 402. When the voltage disappears, the length of the piezoelectric ceramic stack 4022 gradually recovers, and in the process of recovering the length, the lower end of the piezoelectric ceramic stack 4022 drives the force nut 4025 to retract in the lower nut 4024 through the force nut adaptor 4026, and meanwhile, the previously compressed spring 4027 provides an auxiliary resilience force for retraction of the force nut 4025.
The pen-type piezoceramic stack displacement device 402 of the invention also has eccentric bearing capacity, so that the objective wheel 701 of the invention not only can simultaneously bear 5 objectives 706, but also the objective wheel 701 can rotate through the objective wheel rotating synchronous pulley 705 through the offset objective wheel rotating driving motor 703, thereby realizing the switching between the 5 objectives 706. Meanwhile, in order to match the use mode of the dry objective lens and the wet objective lens in the objective lens 706, a vertically downward elastic oil filling nozzle 8 is arranged on the objective lens wheel mounting bracket 404, and a circle of cam plate 9 consisting of an outer convex arc edge and an inner concave arc edge is designed on the outer edge of the objective lens wheel 701; when the objective wheel 701 drives the dry objective to be switched to the position below the lens of the scanning camera component 5, the elastic oil filling nozzle 8 is in contact with the outer convex arc edge on the cam plate 9, and the oil outlet of the elastic oil filling nozzle 8 is jacked outwards due to the outer convex arc edge so as to be far away from the dry objective; when the objective wheel 701 drives the wet objective to switch to the lower part of the lens of the scanning camera component 5, the elastic oil filling nozzle 8 contacts with the concave arc edge on the cam plate 9, and the oil outlet of the elastic oil filling nozzle 8 rebounds inwards due to the concave arc edge so as to be tightly attached to the wet objective.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The utility model provides a high-frequency high accuracy focusing mechanism of objective and camera in vertical direction which characterized in that: the device comprises a Z-axis base assembly (1), a Z-axis lifting coarse adjustment assembly (2), a Z-axis suspension arm assembly (3), a Z-axis lifting fine adjustment assembly (4), a scanning camera assembly (5), an objective lens leveling assembly (6) and an objective lens wheel assembly (7); the Z-axis suspension arm assembly (3) is arranged on the Z-axis base assembly (1) in a lifting manner through the Z-axis coarse lifting adjustment assembly (2), the objective lens leveling assembly (6) is arranged on the upper surface of the Z-axis suspension arm assembly (3), and the scanning camera assembly (5) is arranged in a camera assembly avoiding hole of the Z-axis suspension arm assembly (3) in a parallelism-adjustable manner through the objective lens leveling assembly (6);
the Z-axis lifting fine adjustment assembly (4) consists of a Z-axis lifting fine adjustment assembly mounting plate (401), a pen-type piezoelectric ceramic stack displacement device (402), a pen-type piezoelectric ceramic stack displacement device hanging bracket (403), an objective wheel mounting bracket (404) and a Z-axis lifting fine adjustment linear slide rail, the Z-axis lifting fine adjustment assembly mounting plate (401) is vertically arranged in a camera assembly avoiding hole of the Z-axis suspension arm assembly (3) through the objective leveling assembly (6), the objective wheel mounting bracket (404) is arranged on the front surface of the Z-axis lifting fine adjustment assembly mounting plate (401) in a lifting way through the Z-axis lifting fine adjustment linear slide rail, the pen-type piezoelectric ceramic stack displacement device hanging bracket (403) is fixed at the top of the Z-axis lifting fine adjustment assembly mounting plate (401), and the top end of the pen-type piezoelectric ceramic stack displacement device (402) is fixedly connected with the pen-type piezoelectric ceramic stack displacement device hanging bracket (403), the bottom end of the pen-shaped piezoelectric ceramic stack displacement device (402) is fixedly connected with the objective wheel mounting bracket (404);
the objective wheel assembly (7) consists of an objective wheel (701), an objective wheel rotating piece (702), an objective wheel rotating driving motor (703), an objective wheel rotating driving motor connecting plate (704), an objective wheel rotating synchronous belt wheel (705) and an objective (706), wherein the objective wheel (701) is rotatably arranged at the bottom of the objective wheel mounting bracket (404) through the objective wheel rotating piece (702), 1-5 objectives (706) are arranged on the objective wheel (701), one end of the objective wheel rotating driving motor connecting plate (704) is fixedly connected with the objective wheel rotating piece (702), the other end of the objective wheel rotating driving motor connecting plate (704) is fixedly connected with the objective wheel rotating driving motor (703), the objective wheel rotating driving motor (703) is arranged at one side of the objective wheel (701) through the objective wheel rotating driving motor connecting plate (704), and the objective wheel rotation driving motor (703) is in transmission connection with the objective wheel (701) through the objective wheel rotation synchronous pulley (705), and the objective (706) is switched under the lens of the scanning camera component (5) through the rotation of the objective wheel (701).
2. A high-frequency high-precision focusing mechanism of an objective lens and a camera in a vertical direction according to claim 1, characterized in that: the Z-axis lifting coarse adjustment assembly (2) consists of a Z-axis lifting coarse adjustment stepping motor (201), a motor mounting bracket (202), a ball screw (203), a ball screw mounting plate (204), a Z-axis lifting coarse adjustment linear slide rail (205) and a Z-axis suspension arm assembly mounting plate (206), wherein the ball screw mounting plate (204) is fixed on a vertical plate of the Z-axis base assembly (1), the ball screw (203) is vertically arranged in the middle of the front surface of the ball screw mounting plate (204), the two Z-axis lifting coarse adjustment linear slide rails (205) are respectively vertically arranged on the left side and the right side of the front surface of the ball screw mounting plate (204), the Z-axis lifting coarse adjustment stepping motor (201) is arranged at the top end of the ball screw mounting plate (204) through the motor mounting bracket (202), and the Z-axis lifting coarse adjustment stepping motor (201) is in transmission connection with the top end of the ball screw (203), the rear surface of the Z-axis suspension arm assembly mounting plate (206) is fixedly connected with a nut on the ball screw (203) and two sliders on the Z-axis lifting coarse adjustment linear slide rail (205).
3. A high-frequency high-precision focusing mechanism of an objective lens and a camera in a vertical direction according to claim 1, characterized in that: the pen-type piezoceramic stack displacement device (402) comprises a pressure-resistant cylinder (4021), a piezoceramic stack (4022), an upper edge cap (4023), a lower screw cap (4024), a stress nut (4025), a stress nut adaptor (4026) and a spring (4027); the pressure-resistant cylinder (4021) is in a straight tube shape, the piezoelectric ceramic stack (4022) is in a rod shape or a stick shape, the piezoelectric ceramic stack (4022) is arranged in the pressure-resistant cylinder (4021) in a length-variable manner, the upper end cap (4023) is arranged at a top port of the pressure-resistant cylinder (4021), the inner side surface of the upper end cap (4023) is fixedly connected with the top of the piezoelectric ceramic stack (4022), the lower nut (4024) is arranged at a bottom port of the pressure-resistant cylinder (4021), the stress nut (4025) is telescopically arranged in the lower nut (4024), the output end of the stress nut (4025) is positioned outside the pressure-resistant cylinder (4021), and the input end of the stress nut (4025) is positioned inside the pressure-resistant cylinder (4021); the stress nut adaptor (4026) and the spring (4027) are arranged inside the pressure resistant cylinder (4021), wherein the upper end of the stress nut adaptor (4026) is fixedly connected with the bottom of the piezoelectric ceramic stack (4022), the lower end of the stress nut adaptor (4026) is fixedly connected with the input end of the stress nut (4025), the upper end of the spring (4027) is in contact with the lower end of the stress nut adaptor (4026), and the lower end of the spring (4027) is in contact with the bottom surface of the inner wall of the lower nut (4024).
4. A high-frequency high-precision focusing mechanism of an objective lens and a camera in a vertical direction according to claim 3, characterized in that: the displacement frequency of the pen-shaped piezoelectric ceramic stack displacement device (402) is 600Hz/s, the effective displacement distance is 110 μm, the stepping precision is 0.1 μm, the maximum load force is 400N, the driving voltage range is 0-150V, the 150V resistance is 1000N, and the size of the piezoelectric ceramic stack (4022) is 5.2mm multiplied by 7.1mm multiplied by 100 mm.
5. A high-frequency high-precision focusing mechanism of an objective lens and a camera in a vertical direction according to claim 3, characterized in that: the springs (4027) are four disc springs connected in series.
6. A high-frequency high-precision focusing mechanism of an objective lens and a camera in a vertical direction according to claim 1, characterized in that: objective leveling subassembly (6) comprises camera subassembly mounting panel (601), leveling briquetting (602), housing screw (603), high mounting (604) and two altitude mixture control spares (605), the middle part of camera subassembly mounting panel (601) is provided with and is used for the installation Z axle goes up and down to finely tune subassembly (4) and dodges scan the hollow out construction of camera subassembly (5), the design has origin, first fulcrum and second fulcrum on the frame of camera subassembly mounting panel (601), the origin with first fulcrum, the second fulcrum is in constitute a triangle-shaped on the plane of camera subassembly mounting panel (601), leveling briquetting (602) is C type structure, leveling briquetting (602) with the last fixed surface of camera subassembly mounting panel (601) is connected, just leveling briquetting (602) are located the origin with first fulcrum, The second fulcrum forms a triangle; the height fixing piece (604) is arranged at the original point, the two height adjusting pieces (605) are respectively arranged at the first fulcrum and the second fulcrum, the compression screw (603) is arranged on the leveling pressing block (602), and the camera component mounting plate (601) is arranged on the upper surface of the Z-axis suspension arm assembly (3) in a levelness-adjustable manner through the height fixing piece (604) and the two height adjusting pieces (605) and is locked and fixed through the compression screw (603).
7. A high-frequency high-precision focusing mechanism of an objective lens and a camera in a vertical direction according to claim 6, characterized in that: height fixing spare (604) are the steel ball, two altitude mixture control spare (605) is the jackscrew, the steel ball inlays to be established camera subassembly mounting panel (601) lower surface the original point correspond the department with Z axle cantilever subassembly (3) upper surface between the original point corresponds the department, two the jackscrew sets up respectively on leveling briquetting (602) first fulcrum with the second fulcrum corresponds the department, and two the jackscrew all passes downwards camera subassembly mounting panel (601) back with the upper surface contact of Z axle cantilever subassembly (3).
8. A high-frequency high-precision focusing mechanism of an objective lens and a camera in a vertical direction according to claim 1, characterized in that: the objective (706) is divided into a dry objective and a wet objective.
9. A high-frequency high-precision focusing mechanism of an objective lens and a camera in a vertical direction according to claim 8, characterized in that: the oil-filling device is characterized in that a vertically downward elastic oil filling nozzle (8) is arranged on the objective wheel mounting support (404), a circle of cam plate (9) used for adjusting the position relation between the elastic oil filling nozzle (8) and the objective (706) is arranged on the outer edge of the objective wheel (701), the cam plate (9) is composed of an outer convex arc edge and an inner concave arc edge, the position of the outer convex arc edge corresponds to the position of the dry objective, the position of the inner concave arc edge corresponds to the position of the wet objective, when the elastic oil filling nozzle (8) is in contact with the outer convex arc edge, the oil outlet of the elastic oil filling nozzle (8) is far away from the dry objective, and when the elastic oil filling nozzle (8) is in contact with the inner concave arc edge, the oil outlet of the elastic oil filling nozzle (8) is close to the wet objective.
10. A high-frequency high-precision focusing mechanism of an objective lens and a camera in a vertical direction according to claim 1, characterized in that: the front end of the Z-axis suspension arm assembly (3) is provided with a global camera (10) used for shooting a slide sample area and an identification area and a front side light source (11) used for providing illumination for the global camera (10).
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114509868A (en) * | 2022-01-27 | 2022-05-17 | 宁波大学 | Precise zooming multi-view microscopic imaging device and method |
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| CN111158132A (en) * | 2020-02-21 | 2020-05-15 | 桂林优利特医疗电子有限公司 | Microscope fine-adjustment focusing device utilizing piezoelectric objective table |
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| JPH06109963A (en) * | 1992-09-25 | 1994-04-22 | Olympus Optical Co Ltd | Focusing mechanism for microscope |
| CN102749697A (en) * | 2011-04-21 | 2012-10-24 | 奥林巴斯映像株式会社 | Driving apparatus and imaging apparatus using the same |
| US20120268642A1 (en) * | 2011-04-21 | 2012-10-25 | Olympus Imaging Corporation | Driving apparatus and imaging apparatus using the same |
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Application publication date: 20210803 |