CN113203406A - Device and method for inhibiting deformation of optical fiber gyroscope ring assembly in acceleration field - Google Patents
Device and method for inhibiting deformation of optical fiber gyroscope ring assembly in acceleration field Download PDFInfo
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- CN113203406A CN113203406A CN202110475987.2A CN202110475987A CN113203406A CN 113203406 A CN113203406 A CN 113203406A CN 202110475987 A CN202110475987 A CN 202110475987A CN 113203406 A CN113203406 A CN 113203406A
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 36
- 230000001133 acceleration Effects 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 title claims abstract description 11
- 230000002401 inhibitory effect Effects 0.000 title abstract description 8
- 239000013078 crystal Substances 0.000 claims abstract description 29
- 230000006698 induction Effects 0.000 claims abstract description 15
- 239000000835 fiber Substances 0.000 claims description 24
- 230000001629 suppression Effects 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000007613 environmental effect Effects 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 11
- 230000005684 electric field Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 125000003003 spiro group Chemical group 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910021489 α-quartz Inorganic materials 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
- G01C19/64—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
- G01C19/72—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The invention discloses a device and a method for inhibiting deformation of a fiber-optic gyroscope ring component in an acceleration field, wherein the device comprises a piezoelectric induction layer and a piezoelectric driving layer; the piezoelectric sensing layer is paved on the top of the optical fiber ring shell of the optical fiber gyro ring assembly, the piezoelectric driving layer is paved on the periphery of the optical fiber ring shell of the optical fiber gyro ring assembly, the piezoelectric sensing layer and the piezoelectric driving layer are corresponding in position, and the piezoelectric sensing layer and the piezoelectric driving layer are both made of piezoelectric crystals. The deformation of the optical fiber gyro ring assembly shell is directly restrained from the structural layer, and the environmental adaptability and the data accuracy of the optical fiber gyro ring assembly shell are improved.
Description
Technical Field
The invention belongs to the field of fiber optic gyroscopes, and relates to a device and a method for inhibiting deformation of a fiber optic gyroscope ring assembly under an acceleration field.
Background
The fiber optic gyroscope is an all-solid-state gyroscope without movable parts, the core technology of the fiber optic gyroscope lies in a fiber optic ring technology, and the fiber optic ring directly determines the final precision of the fiber optic gyroscope, wherein in an unstable complex use environment, the shell and the fiber optic ring in a fiber optic ring assembly are easily deformed to different degrees under severe vibration or an unstable acceleration field to cause collision between the fiber optic ring and the shell, so that the precision and the stability of the fiber optic gyroscope are influenced, and the application universality of the fiber optic gyroscope is further limited.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a device and a method for inhibiting deformation of a fiber-optic gyroscope ring component under an acceleration field, which directly inhibit deformation of a fiber-optic gyroscope ring component shell from a structural level and enlarge environmental adaptability and data accuracy of the fiber-optic gyroscope ring component shell.
In order to achieve the purpose, the invention adopts the following technical scheme to realize the purpose:
a deformation suppression device of a fiber optic gyroscope ring component under an acceleration field comprises a piezoelectric induction layer and a piezoelectric driving layer;
the piezoelectric sensing layer is paved on the top of the optical fiber ring shell of the optical fiber gyro ring assembly, the piezoelectric driving layer is paved on the periphery of the optical fiber ring shell of the optical fiber gyro ring assembly, the piezoelectric sensing layer and the piezoelectric driving layer are corresponding in position, and the piezoelectric sensing layer and the piezoelectric driving layer are both made of piezoelectric crystals.
Preferably, the piezoelectric sensing layer is connected with an input end of an inverter, and an output end of the inverter is connected with an input end of the piezoelectric driving layer.
Furthermore, an electric signal processor is connected in series between the inverter and the piezoelectric driving layer.
Preferably, the top of the piezoelectric induction paving layer is provided with a mass block.
Preferably, the number of the piezoelectric sensing laying layers and the number of the piezoelectric driving laying layers are multiple, the piezoelectric sensing laying layers are uniformly distributed at the top of the optical fiber ring shell, and the positions of the piezoelectric driving laying layers correspond to the piezoelectric sensing laying layers one to one.
Preferably, the two piezoelectric driving layers form a group, and the piezoelectric driving layers in the same group are respectively arranged on the circumferential surfaces of the inner ring and the outer ring at the same position of the optical fiber ring shell.
Preferably, the piezoelectric sensing layer and the piezoelectric driving layer are fixedly bonded with the optical fiber ring shell.
Preferably, the piezoelectric crystal is made of crystal.
According to the deformation suppression method of the fiber-optic gyroscope ring assembly based on any one of the devices, after the piezoelectric sensing layer is extruded or stretched, an electric signal is generated, the electric signal of the piezoelectric sensing layer is obtained, the electric signal is processed in the reverse direction and is sent to the piezoelectric driving layer, and the piezoelectric driving layer generates mechanical deformation in the direction opposite to the direction of the stress of the piezoelectric sensing layer.
Preferably, an inverter is adopted to obtain the electric signal of the piezoelectric sensing layer, and the inverter reversely outputs the electric signal to the piezoelectric driving layer.
Compared with the prior art, the invention has the following beneficial effects:
the piezoelectric crystal of the piezoelectric induction layer is extruded or stretched to generate an electric signal, and then a reverse electric signal is given to the piezoelectric crystal of the piezoelectric driving layer, the piezoelectric crystal generates mechanical deformation in a certain direction to achieve the effect of inhibiting deformation, and when an external electric field is removed, the deformation disappears, so that the piezoelectric sensing layer can be used repeatedly, and the stability is high. Utilize its positive and negative piezoelectric effect with the deformation of control assembly, restrain the deformation of subassembly from the structural layer face, make full use of piezoelectric material's characteristics such as crystal response is fast simultaneously satisfy the operation requirement, for traditional data compensation method, directly restrain the deformation of its subassembly cap from the structural layer face simultaneously, enlarged its environmental suitability and data accuracy.
Furthermore, an inverter is arranged between the piezoelectric induction layer and the piezoelectric driving layer, so that the electric signal of the piezoelectric induction layer is automatically processed in a reverse mode and output to the piezoelectric driving layer, and self-adaptive deformation suppression is achieved.
Furthermore, the electric signal processor can amplify or reduce the electric signal, so that the deformation quantity of the optical fiber ring shell and the suppression deformation quantity of the piezoelectric driving layer are distributed uniformly and equally.
Furthermore, the mass block can increase the deformation inertia of the shell, so that the piezoelectric crystal can generate a piezoelectric effect more easily, and the piezoelectric effect of the piezoelectric crystal is completed by utilizing the inertia effect of the piezoelectric crystal.
Drawings
FIG. 1 is a top view of the apparatus of the present invention;
FIG. 2 is a cross-sectional view taken along line B-B of FIG. 1 in accordance with the present invention;
FIG. 3 is a schematic circuit diagram of the present invention.
Wherein: 1-optical fiber ring shell; 2-a fiber optic ring; 3-a mass block; 4-piezoelectric induction layering; 5-piezoelectric driving layering; a 6-inverter; 7-an electrical signal processor; 8-external connector.
Detailed Description
The invention is described in further detail below with reference to the accompanying drawings:
the optical fiber ring 2 and the optical fiber ring shell 1 are circular rings, the optical fiber ring 2 is arranged inside the optical fiber ring shell 1, the bottom of the optical fiber ring 2 is fixedly connected with the bottom of the inner wall of the optical fiber ring shell 1, the inner ring, the outer ring and the top of the optical fiber ring 2 are arranged in a gap with the inner wall of the optical fiber ring shell 1, the optical fiber ring is in a complex acceleration field, and the optical fiber ring can collide without specific protection measures, so that the precision and the stability of the optical fiber gyroscope are influenced, and the application universality of the optical fiber ring is limited.
As shown in FIG. 1, the deformation suppression device of the ring assembly of the fiber-optic gyroscope in the acceleration field comprises a piezoelectric sensing layer 4 and a piezoelectric driving layer 5.
Piezoelectric induction is spread layer 4 and piezoelectric drive and is spread 5 quantity and be a plurality ofly, piezoelectric induction is spread 4 even paves at the optic fibre ring shell 1 top of optic fibre top spiro 2 subassembly, piezoelectric induction is spread layer 4 and is mainly played the sensing effect, piezoelectric drive spreads 5 positions and spreads 4 one-to-ones of piezoelectric induction, piezoelectric drive spreads 5 and sets up with optic fibre top spiro 2 optic fibre ring shell 1's global laminating, piezoelectric drive spreads 5 and mainly plays deformation inhibiting action, piezoelectric drive spreads 5 two and is a set of, same group's piezoelectric drive spreads 5 and sets up respectively on optic fibre ring shell 1 inner ring and outer loop global of same position, in this embodiment, piezoelectric induction spreads 4 quantity and is eight, piezoelectric drive spreads 5's quantity and is sixteen.
As shown in FIG. 2, a mass block 3 is arranged on the top of the piezoelectric sensing layer 4, and the mass block 3 mainly has the function of assisting in completing the piezoelectric effect of the piezoelectric crystal by utilizing the inertia effect of the mass block. The mass block 3 can increase the deformation inertia of the shell, and the piezoelectric crystal can generate a piezoelectric effect more easily.
The piezoelectric sensing layer 4 and the piezoelectric driving layer 5 are attached to the optical fiber ring shell 1 in a bonding mode, and the mass block 3 is attached to the top of the piezoelectric sensing layer 4.
As shown in fig. 3, the piezoelectric sensing layer 4 is connected with an input end of an inverter 6, an output end of the inverter 6 is connected with an input end of an electric signal processor 7, an output end of the electric signal processor 7 is connected with an input end of the piezoelectric driving layer 5, the inverter 6 can automatically perform reverse processing on the electric signal of the piezoelectric sensing layer 4 and output the electric signal to the piezoelectric driving layer 5, so that adaptive deformation suppression is realized, the electric signal processor 7 can perform amplification or reduction processing on the electric signal, and the deformation quantity of the optical fiber ring shell 1 and the deformation suppression quantity of the piezoelectric driving layer 5 are uniformly distributed and equally; the input end of the phase inverter 6 and the output end of the electric signal processor 7 are connected with the input end of the external connector 8, and the external connector 8 can collect electric signals output by the piezoelectric sensing laying layer 4 and electric signals input by the piezoelectric driving laying layer 5, so that a foundation is laid for data arrangement and induction.
The piezoelectric sensing layer 4 and the piezoelectric driving layer 5 are both made of piezoelectric crystals, and in the embodiment, the piezoelectric crystals are made of crystals.
Under an accelerating field, the piezoelectric induction layer 4 on the outer layer of the shell sleeve of the optical fiber assembly generates an electric signal through extrusion or stretching of the piezoelectric crystal and transmits the electric signal to the phase inverter 6, the phase inverter 6 reversely outputs the electric signal to the electric signal processor 7, the electric signal processor 7 amplifies or reduces the electric signal and finally outputs the electric signal to the piezoelectric driving layer 5, and the piezoelectric driving layer 5 correspondingly reversely stretches or extrudes to accurately realize suppression balance. Crystal (alpha-quartz) is a well-known piezoelectric crystal, the quantity of electric charge generated by the crystal under stress is in direct proportion to the magnitude of external force, when the crystal is under the action of the external force along a certain direction, the inside of the crystal can generate polarization phenomenon, so that charged particles can generate relative displacement, charges with equal size and opposite sign are generated on the surface of the crystal, an electric field is applied to the crystal through an inverter 6, and the crystal can generate mechanical deformation in a certain direction, so that the effect of inhibiting deformation is achieved. When the external electric field is removed, the deformation disappears, and the device can be repeatedly used and has high stability. The method utilizes the positive and negative piezoelectric effect to control the deformation of the assembly, restrains the deformation of the assembly from the structural level, simultaneously fully utilizes the characteristics of quick response of crystals of piezoelectric materials and the like, meets the use requirement, and simultaneously directly restrains the deformation of the assembly shell cover from the structural level compared with the traditional data compensation method, thereby expanding the environmental adaptability and the data accuracy of the assembly.
The above-mentioned contents are only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited thereby, and any modification made on the basis of the technical idea of the present invention falls within the protection scope of the claims of the present invention.
Claims (10)
1. A deformation suppression device of a fiber-optic gyroscope ring component under an acceleration field is characterized by comprising a piezoelectric induction layer (4) and a piezoelectric driving layer (5);
the piezoelectric sensing layer (4) is tiled at the top of the optical fiber ring shell (1) of the optical fiber gyroscope spiral ring (2) component, the piezoelectric driving layer (5) is attached to the circumferential surface of the optical fiber ring shell (1) of the optical fiber gyroscope spiral ring (2) component, the piezoelectric sensing layer (4) corresponds to the piezoelectric driving layer (5), and the piezoelectric sensing layer (4) and the piezoelectric driving layer (5) are both made of piezoelectric crystals.
2. A device for suppressing deformation of a fiber optic gyro ring assembly under an acceleration field as claimed in claim 1, wherein the input terminal of the inverter (6) is connected to the piezoelectric sensing layer (4), and the output terminal of the inverter (6) is connected to the input terminal of the piezoelectric driving layer (5).
3. The deformation suppression device of the fiber-optic gyroscope ring assembly in the acceleration field according to claim 2, characterized in that an electric signal processor (7) is connected in series between the inverter (6) and the piezoelectric driving layer (5).
4. The device for suppressing deformation of a fiber optic gyro ring assembly under an acceleration field according to claim 1, wherein a mass block (3) is provided on top of the piezoelectric sensing layer (4).
5. The deformation suppression device of the fiber-optic gyroscope ring assembly in the acceleration field according to claim 1, wherein the number of the piezoelectric sensing layers (4) and the number of the piezoelectric driving layers (5) are both multiple, the piezoelectric sensing layers (4) are uniformly distributed on the top of the fiber-optic gyroscope shell (1), and the positions of the piezoelectric driving layers (5) correspond to the piezoelectric sensing layers (4) one by one.
6. The deformation suppression device for the fiber-optic gyroscope ring assembly under the acceleration field according to claim 1, wherein two piezoelectric driving layers (5) are in a group, and the piezoelectric driving layers (5) in the same group are respectively arranged on the peripheral surfaces of the inner ring and the outer ring at the same position of the fiber-optic gyroscope shell (1).
7. The deformation suppression device for the fiber optic gyro ring assembly under the acceleration field according to claim 1, characterized in that the piezoelectric sensing layer (4) and the piezoelectric driving layer (5) are fixed to the fiber optic ring shell (1) by bonding.
8. The device for suppressing deformation of a fiber-optic gyroscope ring assembly under an acceleration field as claimed in claim 1, wherein the piezoelectric crystal is crystal.
9. A deformation suppression method for a fiber-optic gyroscope ring assembly under an acceleration field based on the device of any one of claims 1-8 is characterized in that the piezoelectric sensing layer (4) generates an electric signal after being extruded or stretched, the electric signal of the piezoelectric sensing layer (4) is obtained, the electric signal is processed in a reverse way and is sent to the piezoelectric driving layer (5), and the piezoelectric driving layer (5) generates mechanical deformation in a direction opposite to the stress of the piezoelectric sensing layer (4).
10. The method for suppressing deformation of a fiber optic gyro ring assembly under an acceleration field according to claim 9, wherein an inverter (6) is used to obtain an electrical signal of the piezoelectric sensing layer (4), and the inverter (6) reversely outputs the electrical signal to the piezoelectric driving layer (5).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110475987.2A CN113203406B (en) | 2021-04-29 | 2021-04-29 | Device and method for inhibiting deformation of optical fiber gyroscope ring assembly under acceleration field |
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| CN202110475987.2A CN113203406B (en) | 2021-04-29 | 2021-04-29 | Device and method for inhibiting deformation of optical fiber gyroscope ring assembly under acceleration field |
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| CN113203406B CN113203406B (en) | 2022-08-16 |
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62133421A (en) * | 1985-12-04 | 1987-06-16 | Nec Corp | Optical fiber |
| CN102589541A (en) * | 2012-02-06 | 2012-07-18 | 苏州光环科技有限公司 | Optical fiber ring capable of eliminating influence of external environmental factors |
| CN104777556A (en) * | 2015-04-29 | 2015-07-15 | 中国科学院半导体研究所 | Piezoelectric ceramic photoelectric link microwave signal true time delay control device |
| CN205038531U (en) * | 2015-10-22 | 2016-02-17 | 青岛蔚蓝深空自动化科技有限公司 | Measuring engine vibration initiative suppression device |
| CN106940198A (en) * | 2017-03-13 | 2017-07-11 | 无锡亚天光电科技有限公司 | A kind of prestressing force optical fiber ring structure |
| CN108775898A (en) * | 2018-03-19 | 2018-11-09 | 哈尔滨工程大学 | A kind of fiber optic loop and preparation method thereof inhibiting optical fibre gyroscope magnetic field susceptibility |
| CN109883411A (en) * | 2019-03-12 | 2019-06-14 | 哈尔滨工程大学 | A method of inhibiting optical fibre gyro temperature error or vibration error |
| CN111043531A (en) * | 2020-01-08 | 2020-04-21 | 兰州大学 | Intelligent optical fiber ring skin monitoring method for online diagnosis of structural damage of marine pipe |
| CN212458395U (en) * | 2020-06-24 | 2021-02-02 | 北京思卓博瑞科技有限公司 | Fiber optic gyroscope with stress compensation |
-
2021
- 2021-04-29 CN CN202110475987.2A patent/CN113203406B/en not_active Expired - Fee Related
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62133421A (en) * | 1985-12-04 | 1987-06-16 | Nec Corp | Optical fiber |
| CN102589541A (en) * | 2012-02-06 | 2012-07-18 | 苏州光环科技有限公司 | Optical fiber ring capable of eliminating influence of external environmental factors |
| CN104777556A (en) * | 2015-04-29 | 2015-07-15 | 中国科学院半导体研究所 | Piezoelectric ceramic photoelectric link microwave signal true time delay control device |
| CN205038531U (en) * | 2015-10-22 | 2016-02-17 | 青岛蔚蓝深空自动化科技有限公司 | Measuring engine vibration initiative suppression device |
| CN106940198A (en) * | 2017-03-13 | 2017-07-11 | 无锡亚天光电科技有限公司 | A kind of prestressing force optical fiber ring structure |
| CN108775898A (en) * | 2018-03-19 | 2018-11-09 | 哈尔滨工程大学 | A kind of fiber optic loop and preparation method thereof inhibiting optical fibre gyroscope magnetic field susceptibility |
| CN109883411A (en) * | 2019-03-12 | 2019-06-14 | 哈尔滨工程大学 | A method of inhibiting optical fibre gyro temperature error or vibration error |
| CN111043531A (en) * | 2020-01-08 | 2020-04-21 | 兰州大学 | Intelligent optical fiber ring skin monitoring method for online diagnosis of structural damage of marine pipe |
| CN212458395U (en) * | 2020-06-24 | 2021-02-02 | 北京思卓博瑞科技有限公司 | Fiber optic gyroscope with stress compensation |
Non-Patent Citations (1)
| Title |
|---|
| 王斌华等: "加速度场下陀螺光纤环形变的影响分析", 《应用光学》 * |
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