CN113178777A - Vertical cavity surface emitting laser light source - Google Patents
Vertical cavity surface emitting laser light source Download PDFInfo
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- CN113178777A CN113178777A CN202110450930.7A CN202110450930A CN113178777A CN 113178777 A CN113178777 A CN 113178777A CN 202110450930 A CN202110450930 A CN 202110450930A CN 113178777 A CN113178777 A CN 113178777A
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- galvanometer
- light
- light source
- emitting device
- laser beam
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
- H01S5/0071—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for beam steering, e.g. using a mirror outside the cavity to change the beam direction
Abstract
The invention discloses a vertical cavity surface emitting laser light source, comprising: a substrate; the light-emitting device is arranged on the substrate and used for emitting laser beams, and the directions of the laser beams are perpendicular to the substrate; the pattern structure preparation layer is arranged on the light-emitting device and used for deflecting the angle of the laser beam, and the control angle of the beam is enlarged by arranging the pattern structure preparation layer on the light-emitting device of the light source and deflecting the angle of the laser beam, so that the coverage range of the beam is enlarged, and the control angle of the beam is enlarged.
Description
Technical Field
The invention relates to the technical field of optoelectronic devices, in particular to a vertical cavity surface emitting laser light source, and specifically relates to a VCSEL light source.
Background
In recent years, laser radars are developing in the direction of application to robots, unmanned planes and automobile autopilots. Traditional laser radar system passes through mechanical rotation and accomplishes the scanning, and its is bulky, the consumption is high, the directional inertia of wave beam is strong, is unfavorable for integratively, and speed is slow moreover, the real-time is poor, and the cost also is difficult to further reduce, is difficult to satisfy the application requirement of small-size carriers such as unmanned aerial vehicle, robot to laser radar light-dutyization, miniaturization, intellectuality, low-power consumption etc.. Vertical Cavity Surface Emitting Lasers (VCSELs) have unique advantages over Edge Emitting Lasers (EELs) for use in robotic, unmanned and automotive applications because they have a narrower wavelength range over the operating temperature range and can form an addressable array of stripes, even in a matrix-addressable format, with intelligent addressability that allows the lidar to employ robust electronic scanning instead of mechanical scanning.
The chip integration of the VCSEL in practical application at present is to realize as many VCSEL points as possible in a unit area, and concentrate on a small area, and a single chip can have 1 to more than 1 ten thousand light emitting sources (expandable), so that the power of the light emitting sources is expanded, and at the same time, the omnidirectional scanning can be realized. Various schemes with high cost performance have been produced in the integration of the VCSEL chip, so that the VCSEL chip has a wider application space in the aspect of laser radars. VCSEL beam steering can be divided into discrete beam steering and monolithic integrated beam steering. The optical system of the off-chip control is large in size, complex and unstable, the problem of the off-chip light beam control technology is solved by the monolithic integrated light beam control, but the problems of small light beam control angle, limited output power, optical loss and the like exist at present.
Disclosure of Invention
In order to solve the above technical problem, the present invention provides a vertical cavity surface emitting laser light source, comprising:
a substrate;
the light-emitting device is arranged on the substrate and used for emitting laser beams, and the directions of the laser beams are perpendicular to the substrate;
and the pattern structure preparation layer is arranged on the light-emitting device and used for deflecting the angle of the laser beam.
According to some embodiments of the invention, the graphic structure preparation layer comprises any one of: micro-opto-electro-mechanical system structures, two-dimensional super-surface structures or beam-controlled composite structures.
According to some embodiments of the invention, the micro-opto-electro-mechanical system structure comprises:
the supporting structure is arranged on the substrate and erected above the light-emitting device;
the galvanometer is erected at the top of the supporting structure;
the galvanometer control unit is connected with the galvanometer and used for controlling the galvanometer to swing;
the vibrating mirror is arranged above the light-emitting device, and the laser beam passes through the vibrating mirror and then deflects.
According to some embodiments of the invention, the material of the support structure comprises one of: semiconductor material, dielectric material, adhesive glue, viscous material or weld metal material.
According to some embodiments of the invention, the galvanometer control unit drives the galvanometer to vibrate periodically by piezoelectric; or
The galvanometer control unit drives the galvanometer to vibrate periodically through electromagnetism.
According to some embodiments of the invention, the two-dimensional super-surface structure comprises:
and the lens is arranged on the light emitting surface of the light emitting device, and is provided with a super surface which is used for deflecting the angle of the laser beam.
According to some embodiments of the invention, the material of the lens comprises one of: a semiconductor material, a dielectric layer, or a metal material.
According to some embodiments of the invention, the number of the light emitting devices is plural, and the plural light emitting devices form an area array.
According to some embodiments of the invention, the super-surface parameters on the lenses on a plurality of the light emitting devices are different, the super-surface parameters comprising: pattern shape, pattern period, size and duty cycle.
According to some embodiments of the invention, the beam steering composite structure comprises:
the supporting structure is arranged on the substrate and erected above the light-emitting device;
the galvanometer is erected at the top of the supporting structure;
the super surface is arranged on the surface of the galvanometer and used for deflecting the angle of the laser beam and regulating and controlling the polarization or mode of the laser beam;
the galvanometer control unit is connected with the galvanometer and used for controlling the galvanometer to swing;
the vibrating mirror is arranged above the light-emitting device, and the laser beam passes through the vibrating mirror and then deflects.
According to the technical scheme, the pattern structure preparation layer is arranged on the light-emitting device of the light source, and the control angle of the light beam is expanded by deflecting the angle of the laser beam so as to expand the coverage range of the light beam, and the light beam control angle is large.
Drawings
FIG. 1 schematically illustrates a schematic structural view of a VCSEL light source according to an embodiment of the present invention;
FIG. 2 schematically illustrates a schematic diagram of a VCSEL light source according to an embodiment of the present invention;
FIG. 3 schematically illustrates a schematic structural view of a VCSEL light source according to another embodiment of the present invention;
FIG. 4 is a schematic view of a portion of the structure of FIG. 3;
in the above figures, the reference numerals have the following meanings:
101-a first front side electrode; 102-a first light emitting device; 103-a first back electrode; 104-a support structure; 105-a galvanometer control unit; 106-a connection unit; 107-galvanometer;
201-a substrate; 202-super surface; 203-second front electrode; 204-a second back electrode; 205-a second light emitting device; 206-an upper distributed bragg mirror layer; 207-lower distributed bragg mirror layer; 208-Oxidation of the current-limiting orifice layer.
Detailed Description
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
It is to be understood that such description is merely illustrative and not intended to limit the scope of the present invention. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the invention. It may be evident, however, that one or more embodiments may be practiced without these specific details. Furthermore, in the following description, descriptions of well-known technologies are omitted so as to avoid unnecessarily obscuring the concepts of the present invention.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "comprising" as used herein indicates the presence of the features, steps, operations but does not preclude the presence or addition of one or more other features.
All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly formal sense, e.g., a DBR (distributed bragg reflector layer); micro-opto-electro-mechanical systems (MOEMS) is an extremely active new technology system developed in micro-electro-mechanical systems (MEMS) in recent years, which is a new micro-optical structure system generated by combining micro-optics, micro-electronics and micro-mechanics.
In order to solve the above technical problem, the present invention provides a vertical cavity surface emitting laser light source, comprising: a substrate, a light emitting device, and a pattern structure preparation layer.
FIG. 1 schematically illustrates a schematic structural view of a VCSEL light source according to an embodiment of the present invention.
According to some embodiments of the present invention, as shown in fig. 1, a first light emitting device 102 is disposed on a substrate for emitting a laser beam, wherein the laser beam direction is perpendicular to the substrate.
According to some embodiments of the present invention, the light source optionally includes a substrate, an oxide confinement layer, an active layer upper and lower optical field confinement layers, and a patterned structure preparation layer. Specifically, the active layer is used for lasing a laser beam, the wavelength of which covers the ultraviolet to infrared range.
According to some embodiments of the invention, the pattern structure preparation layer is a transmissive structure.
According to some embodiments of the present invention, the pattern structure preparation layer may be integrally designed with the first light emitting device 102, and prepared through one process flow; can also be independently prepared and connected and assembled by means of subsequent back-off and the like.
According to some embodiments of the present invention, the material of the pattern structure preparation layer includes a semiconductor material such as Si, GaAs, InP, or the like; the material of the pattern structure preparation layer may also include two-dimensional materials, such as nano-film or superlattice; the material of the pattern structure preparation layer may also include a metal material.
According to some embodiments of the present invention, a pattern structure preparation layer is disposed on or above the first light emitting device 102 for deflecting an angle of the laser beam, thereby expanding a coverage of the laser beam.
FIG. 2 schematically illustrates a schematic diagram of a VCSEL light source according to an embodiment of the present invention.
As shown in fig. 2, assuming that the XOY plane is an incident plane of the pattern structure preparation layer, light is perpendicularly incident on the XOY plane along the z direction, and the light is modulated by the phase of the incident plane, then is deflected to a certain extent, and is transmitted along the OP direction, and the deflection angle of the light beam can be expressed in the pitch angle θ and the azimuth angle in the spherical coordinate system.
According to some embodiments of the invention, the graphic structure preparation layer comprises any one of: micro-opto-electro-mechanical system structures, two-dimensional super-surface structures or beam-controlled composite structures.
According to some embodiments of the present invention, as shown in fig. 1, a micro-opto-electro-mechanical system structure includes: a support structure 104, a galvanometer 107, and a galvanometer control unit 105.
According to some embodiments of the invention, the support structure 104 is disposed on a substrate, the support structure 104 being mounted above the first light emitting device 102.
According to some embodiments of the invention, the galvanometer 107 is mounted on top of the support structure 104.
According to some embodiments of the present invention, the galvanometer control unit 105 is coupled to the galvanometer 107 for controlling the oscillating of the galvanometer 107.
According to some embodiments of the present invention, the first light emitting device 102 is disposed on a substrate, and meanwhile, a first back electrode 103 is disposed on the back surface of the substrate, and a first front electrode 101 is disposed beside the first light emitting device 102, and the first light emitting device 102 is controlled to emit a laser beam through the first front electrode 101 and the first back electrode 103.
According to some embodiments of the present invention, the MOEMS support structure 104 swings regularly by the electromagnetic or electrostatic action of the MOEMS galvanometer control unit 105, which in turn drives the galvanometer 107 to swing. The oscillation of the MOEMS galvanometer can be realized through voltage control, electrostatic control and the like, and the specific principle is the prior art, which is not described herein in detail.
According to some embodiments of the present invention, after the laser beam emitted by the first light emitting device 102 passes through the real-time oscillating galvanometer 107, the scanning coverage is performed within a range along with the oscillating galvanometer 107 oscillating back and forth or left and right.
According to some embodiments of the present invention, the galvanometer 107 is disposed above the first light emitting device 102, and the laser beam is deflected by an angle after passing through the galvanometer 107.
According to some embodiments of the invention, the material of the support structure 104 comprises one of: semiconductor material, dielectric material, adhesive glue, viscous material or weld metal material.
According to some embodiments of the present invention, the support structure 104 includes a plurality of connection units 106 disposed on the substrate and a frame disposed on top of the connection units 106, on which the galvanometer 107 is fixedly disposed.
According to some embodiments of the invention, the connection unit 106 may be a semiconductor material, such as Si, GaAs, SiO2Etc.; the connection unit 106 may be an adhesive glue, a viscous material, a specific liquid, or the like; the connection unit 106 may be a solder metal material, such as In, AuSn, Au, etc.
According to some embodiments of the present invention, the galvanometer control unit 105 drives the galvanometer 107 by piezoelectric to vibrate periodically.
According to some embodiments of the present invention, the galvanometer control unit 105 periodically vibrates the galvanometer 107 by electromagnetic driving.
FIG. 3 schematically illustrates a schematic structural view of a VCSEL light source according to another embodiment of the present invention.
According to some embodiments of the invention, the two-dimensional super-surface structure comprises a lens, as shown in fig. 3.
According to some embodiments of the present invention, as shown in fig. 4, a lens is disposed over the light emitting face of the second light emitting device 205, the lens having a super surface 202 disposed thereon, the super surface 202 being used to deflect the angle of the laser beam.
According to some embodiments of the invention, the material of the lens comprises one of: a semiconductor material, a dielectric layer, or a metal material.
According to some embodiments of the present invention, the number of the second light emitting devices 205 is plural, and the plural second light emitting devices 205 constitute an area array.
According to some embodiments of the present invention, the super-surface 202 parameters on the lens on the plurality of second light emitting devices 205 are different, the super-surface 202 parameters comprising: pattern shape, pattern period, size and duty cycle. The angle at which the super-surface 202 deflects the laser beam is controlled by controlling parameters such as the pattern period, size, and duty cycle of the super-surface.
According to some embodiments of the invention, the super surface 202 may be a dielectric material, may be a metallic material, may be a lens with a patterned surface, may be a two-dimensional material, or the like.
According to some embodiments of the present invention, the beam characteristics are selected by the surface ultrastructure, which can improve the beam quality and simultaneously realize wide-angle directional coverage output of a specific beam. Laser beam characteristics include polarization, mode, and direction.
According to some embodiments of the present invention, a periodic nanopillar may be designed to achieve selection of TE (transverse electric mode) and TM (transverse magnetic mode) of the beam, as well as selection of fundamental and higher order modes, depending on the wavelength of the laser beam.
According to some embodiments of the present invention, the plurality of second light emitting devices 205 form an area array, and the parameters of the super-surface 202 in the area array are different, so as to realize the difference of the deflection angle of the laser beam excited by each second light emitting device, thereby realizing the wider angle beam coverage of the area array device.
According to some embodiments of the present invention, optionally, the slope angles of the super-surfaces of the plurality of second light emitting devices 205 are different, as shown in fig. 4, and the angular gradient of α is increased or decreased or arranged in another regular manner.
According to some embodiments of the invention, the variation of the pitch angle θ and the azimuth angle φ in FIG. 1 can be realized through the setting of the angle; 360-degree coverage in the view angle can be realized through area array design.
According to some embodiments of the invention, dynamic beam regulation can be achieved through intelligent addressing design, and specifically, the laser units at different positions can be operated through intelligent control of circuits of devices at different positions.
According to some embodiments of the invention, the beam steering composite structure comprises the above-mentioned support structure, the above-mentioned galvanometer, the above-mentioned super-surface and the above-mentioned galvanometer steering unit.
According to some embodiments of the invention, a support structure is disposed on the substrate, the support structure being erected above the light emitting device.
According to some embodiments of the invention, the galvanometer is mounted atop a support structure.
According to some embodiments of the invention, a super-surface is provided on the surface of the galvanometer, the super-surface being used to deflect the angle of the laser beam, to manipulate the polarization or mode of said laser beam.
According to some embodiments of the invention, the galvanometer control unit is coupled to the galvanometer to control the oscillating of the galvanometer.
According to some embodiments of the invention, a galvanometer is disposed above the light emitting device, and the laser beam is deflected through the galvanometer at a angle.
According to the technical scheme, the pattern structure preparation layer is arranged on the light-emitting device of the light source, and the control angle of the light beam is expanded by deflecting the angle of the laser beam so as to expand the coverage range of the light beam, and the light beam control angle is large.
The vertical cavity surface emitting laser light source disclosed by the invention is suitable for the application requirements of small carriers such as unmanned planes, robots and the like on laser radar light sources with chip, integration and wide angles.
So far, the embodiments of the present disclosure have been described in detail with reference to the accompanying drawings. It is to be noted that, in the attached drawings or in the description, the implementation modes not shown or described are all the modes known by the ordinary skilled person in the field of technology, and are not described in detail. In addition, the above definitions of the components are not limited to the specific structures, shapes or manners mentioned in the embodiments, and those skilled in the art may easily modify or replace them.
It is also noted that, unless otherwise indicated, the numerical parameters set forth in the specification and attached claims are approximations that can vary depending upon the desired properties sought to be obtained by the present disclosure. In particular, all numbers expressing dimensions, range conditions, and so forth, used in the specification and claims are to be understood as being modified in all instances by the term "about". Generally, the expression is meant to encompass variations of ± 10% in some embodiments, 5% in some embodiments, 1% in some embodiments, 0.5% in some embodiments by the specified amount.
It will be appreciated by a person skilled in the art that various combinations and/or combinations of features described in the various embodiments and/or in the claims of the invention are possible, even if such combinations or combinations are not explicitly described in the invention. In particular, various combinations and/or combinations of the features recited in the various embodiments and/or claims of the present invention may be made without departing from the spirit or teaching of the invention. All such combinations and/or associations fall within the scope of the present invention.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A vertical cavity surface emitting laser light source, comprising:
a substrate;
the light-emitting device is arranged on the substrate and used for emitting laser beams, and the directions of the laser beams are perpendicular to the substrate;
and the pattern structure preparation layer is arranged on the light-emitting device and used for deflecting the angle of the laser beam.
2. The light source of claim 1, wherein the graphic structure preparation layer comprises any one of: micro-opto-electro-mechanical system structures, two-dimensional super-surface structures or beam-controlled composite structures.
3. The light source of claim 2, wherein the micro-opto-electro-mechanical system structure comprises:
the supporting structure is arranged on the substrate and erected above the light-emitting device;
the galvanometer is erected at the top of the supporting structure;
the galvanometer control unit is connected with the galvanometer and used for controlling the galvanometer to swing;
the vibrating mirror is arranged above the light-emitting device, and the laser beam passes through the vibrating mirror and then deflects.
4. The light source in accordance with claim 3, wherein the material of the support structure comprises one of: semiconductor material, dielectric material, adhesive glue, viscous material or weld metal material.
5. The light source in accordance with claim 3,
the galvanometer control unit drives the galvanometer to vibrate periodically through piezoelectric type; or
The galvanometer control unit drives the galvanometer to vibrate periodically through electromagnetism.
6. The light source in accordance with claim 2, wherein the two-dimensional super-surface structure comprises:
and the lens is arranged on the light emitting surface of the light emitting device, and is provided with a super surface which is used for deflecting the angle of the laser beam.
7. The light source of claim 6, wherein the lens is made of one of: a semiconductor material, a dielectric layer, or a metal material.
8. The light source according to claim 6, wherein the number of the light emitting devices is plural, and the plural light emitting devices form an area array.
9. The light source in accordance with claim 8, wherein the super-surface parameters on the lenses on the plurality of light emitting devices are different, the super-surface parameters comprising: pattern shape, pattern period, size and duty cycle.
10. The light source in accordance with claim 2, wherein the beam steering composite structure comprises:
the supporting structure is arranged on the substrate and erected above the light-emitting device;
the galvanometer is erected at the top of the supporting structure;
the super surface is arranged on the surface of the galvanometer and used for deflecting the angle of the laser beam and regulating and controlling the polarization or mode of the laser beam;
the galvanometer control unit is connected with the galvanometer and used for controlling the galvanometer to swing;
the vibrating mirror is arranged above the light-emitting device, and the laser beam passes through the vibrating mirror and then deflects.
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| CN202110450930.7A CN113178777A (en) | 2021-04-25 | 2021-04-25 | Vertical cavity surface emitting laser light source |
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| CN202110450930.7A CN113178777A (en) | 2021-04-25 | 2021-04-25 | Vertical cavity surface emitting laser light source |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090296768A1 (en) * | 2008-06-03 | 2009-12-03 | Ricoh Company, Ltd. | Vertical cavity surface emitting laser (vcsel), vcsel array device, optical scanning apparatus, and image forming apparatus |
| US20130277341A1 (en) * | 2010-10-22 | 2013-10-24 | Highcon Ltd | Method and apparatus for laser cutting |
| CN105728946A (en) * | 2016-03-17 | 2016-07-06 | 中国科学院力学研究所 | Roller surface laser disorder texturing method and texturing device based on transmission type galvanometer |
| CN108988123A (en) * | 2018-07-26 | 2018-12-11 | 华中科技大学 | Single-chip integration face emitting semiconductor laser and preparation method thereof based on super surface |
| CN111830723A (en) * | 2020-07-28 | 2020-10-27 | Oppo广东移动通信有限公司 | Transmitting module, depth sensor and electronic equipment |
-
2021
- 2021-04-25 CN CN202110450930.7A patent/CN113178777A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090296768A1 (en) * | 2008-06-03 | 2009-12-03 | Ricoh Company, Ltd. | Vertical cavity surface emitting laser (vcsel), vcsel array device, optical scanning apparatus, and image forming apparatus |
| US20130277341A1 (en) * | 2010-10-22 | 2013-10-24 | Highcon Ltd | Method and apparatus for laser cutting |
| CN105728946A (en) * | 2016-03-17 | 2016-07-06 | 中国科学院力学研究所 | Roller surface laser disorder texturing method and texturing device based on transmission type galvanometer |
| CN108988123A (en) * | 2018-07-26 | 2018-12-11 | 华中科技大学 | Single-chip integration face emitting semiconductor laser and preparation method thereof based on super surface |
| CN111830723A (en) * | 2020-07-28 | 2020-10-27 | Oppo广东移动通信有限公司 | Transmitting module, depth sensor and electronic equipment |
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Application publication date: 20210727 |