CN201159795Y - Torsion hinged mirror structure with two reflection surfaces - Google Patents
Torsion hinged mirror structure with two reflection surfaces Download PDFInfo
- Publication number
- CN201159795Y CN201159795Y CNU2006900000335U CN200690000033U CN201159795Y CN 201159795 Y CN201159795 Y CN 201159795Y CN U2006900000335 U CNU2006900000335 U CN U2006900000335U CN 200690000033 U CN200690000033 U CN 200690000033U CN 201159795 Y CN201159795 Y CN 201159795Y
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- mirror structure
- pair
- torsion hinge
- torsional hinged
- hinged mirror
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Abstract
The utility model discloses a torsion hinged mirror structure with a back-to-back reflection surface, which can be used in laser print image system. The utility model also discloses an optical layer and a support structure which do not influence any of the two input light beams when the two reflection light beams scan through. The hinge plate structure 10 includes a center part 12 which has a first side face 14 and a second side face 16, a pair of torsion hinges 18a and 18b, and a pair of anchor parts 20a and 20b. The anchor parts 20a and 20b can be replaced by a support frame 20. To be optimized, the hinge plate 10 can be formed by silicon substrate through etching, laser milling or other method to include a pair of support ridges 22a and 22b.
Description
Technical field
[0001] the utility model relates to torsional hinged mirror and manufacture method thereof, and this mirror has back-to-back reflecting surface.The two sides mirror is particularly suitable in the laser scanning imaging instrument of laser printer.
Background technology
[0002] for the rotation polygon mirror that was used for monochrome laser printer and some displays in the past, rotates or swings that torsional hinged mirror provides very effectively, also relatively cheap substitute.But, have the color laser printer of torsional hinged driving engine to replace color inkjet printer always with failing.Its main cause is to compare volume that laser printer need be bigger and bigger desktop area occupied with color inkjet printer.In order successfully in PC and desktop printer market, to compete, to need the color printer system easily to be installed in desktop and take as far as possible little volume.Because color inkjet printer has little floor area and low price point, so they have occupied the huge share in the desktop color printer market.
[0003] some laser printer manufacturing merchants attempt by using known rotation polygon mirror and the ink-jet printer competition.According to these systems, two laser beams are directed toward rotation polygon mirror from opposite face.Right latter two light path is folded and is formed image and reduced whole volume required and floor areas by coaxial alignment.These systems only use a polygon and lower than the cost of old-fashioned compound polygon system.But all problems relevant with rotation polygon mirror still exists.
[0004] therefore, provide be applicable to color printer, littler floor area to be arranged and need the torsional hinged driving engine of littler cumulative volume be favourable.
The utility model content
[0005] the utility model provides the method that the torsional hinged mirror of back-to-back reflecting surface structure is arranged and make this mirror.
[0006] more specifically, the torsional hinged mirror structure in the embodiment of description comprises center hinge plate, and this center hinge plate has a pair of torsion hinge, this hinge from the central area or along the parts of pivot center to extending at a distance.MEMS (micro electro mechanical system) (MEMS) device that articulated slab preferably forms from silicon layer or matrix.Each hinge in the described a pair of hinge comprises first end by support construction supports.For the ease of torsion hinge is installed, embodiment of the present utility model further comprises the support frame or the first and second anchor parts of first end that is attached to each torsion hinge.Second end of each torsion hinge is attached to central area or articulated slab parts and forms one with central area or articulated slab parts.Central area or parts also comprise first and second sides, so that can freely swing on torsion hinge about pivot center.Each all has the back of the body surface of the first and second mirror layers of back of the body surface and reflecting surface to be bonded to respectively on described first and second sides of central module of articulated slab, so that the reflecting surface face is in the opposite direction, and parallel to each other substantially.
[0007] for the driving engine as laser printer uses torsional hinged mirror, also comprise drive source, this drive source makes pivot center the warble to select of hinged mirror around it.The frequency of selecting is the resonant frequency of mirror preferably.First modulated beam of light is directed toward a reflecting surface and is reflected from this reflecting surface; In a similar manner, second modulated beam of light is directed toward another reflecting surface opposite with first reflecting surface and is reflected from this reflecting surface.Therefore, be understandable that two reflecting surfaces and two modulated beam of light produce two modulated beam of light, two modulated beam of light of generation are with the swing each time of mirror or all angles of inswept selection of vibrating.
[0008], keeps mirror device can not blur or disturb incident beam or reflection with the drive source of required amplitude fluctuation at its resonant frequency the intrafascicular arbitrary light beam of scanned light as persons skilled in the art will recognize that.Therefore, for example be connected in twos inertia-activated source that four piezoelectric elements on the torsion hinge provide or by be attached to or contiguous one or two torsion hinge on the permanent magnet of cooperation drive coil be found to be specially suitable.
Can will be appreciated that also that [0009] torsional hinged mirror must also be mounted or support so that two reflecting surfaces can receive and folded light beam.For this target, being used for supporting the torsion hinge mirror does not consequently all have the groove structure that has of interference to be found effective especially to arbitrary light beam of two light beams yet.
Description of drawings
[0010] Figure 1A is depicted as the skeleton view according to the torsional hinged mirror with two reflecting surfaces of the utility model instruction;
[0011] Figure 1B is the exploded view of mirror structure among Figure 1A;
[0012] Fig. 2 is the index path of the light beam sweep range that causes of torsional hinged mirror that two reflecting surfaces are arranged, two laser light beam sources and laser light reflected light beam;
[0013] Fig. 3 A is the skeleton view that the inertia-activated source is arranged and two torsion hinge mirrors of the present utility model of groove supporting construction are arranged;
[0014] Fig. 3 B is mirror and inertia-activated structure, comes two light beams of self-excitation light source and the enlarged drawing of two folded light beam sweep range;
[0015] Fig. 3 C is the further enlarged drawing of mirror and inertia-activated structure;
[0016] Fig. 4 A has two lasing light emitters and is installed in permanent magnet on the groove supporting construction and the skeleton view of the torsional hinged mirror of the present utility model in coil drive source;
[0017] Fig. 4 B is the enlarged drawing of mirror and magnet drives structure;
[0018] Fig. 5 A and 5B have shown and have been applicable to replaceable permanent magnet of the present utility model and coil drive source structure; And
[0019] Fig. 6 figure has released by single silicon layer and has made or the simple pattern of the torsional hinged mirror of the present utility model that is made of it.
Embodiment
[0020] Figure 1A and 1B are depicted as the torsional hinged mirror structure in conjunction with the utility model instruction.As shown in the figure, articulated slab structure 10 includes the central area 12 of first side 14 and second side 16, a pair of torsion hinge or rotating shaft 18a and 18b and a pair of anchor parts or fixture (anchor member) 20a and 20b.Pointed as Figure 1A dotted line, anchor parts 20a and 20b can be replaced by support frame 20.Preferably, articulated slab 10 is to be milled or alternate manner is processed to form to comprise a pair of support ridge 22a and 22b through etching, laser by silicon substrate.
Each is connected or is bonded to first side and second side 14 and 16 of articulated slab 10 separately [0021] first liang of horizontal runner plate or structure 24 and second runner plate or mechanism 26.According to can be better being seen in illustrated embodiment and Figure 1B exploded view, each runner plate 24 and 26 has two aspects, these aspects comprise the first truss aspect 30 with ridge 32a and 32b and with truss aspect 30 integrated mirror aspects 34.Each runner plate comprises as being labeled as reflection shown in digital 36a and the 36b or mirror surfaces.Also preferably etching or laser mill from the silicon substrate for two runner plates.
[0022] Fig. 2 figure has released the simplification index path of two reflecting surfaces of the torsional hinged mirror structure of the utility model.As shown in the figure, two-sided swing or oscillation mirror 38 are still in the neutral position, and rotate between the first extreme position 38a and the second extreme position 38b about axis 40.First light source 42 will for example be that the incident beam 44 of the laser beam of modulation is directed on first reflecting surface (right-hand surface among the figure) of swing mirror 38, and this reflecting surface reflects incident beam 44 with different directions.Along with mirror structure 38 is swung between two extreme position 38a and 38b, folded light beam 46 inswept deflection angles, this deflection angle is launched between the first outer boundary 46a and the second outer boundary 46b.In a similar manner, secondary light source 48 is directed to the light beam 50 of incident modulation on second reflecting surface (left hand surface among the figure).Along with mirror is swung between the first extreme position 38a and the second extreme position 38b, folded light beam 52 is also inswept between the first outer boundary 52a and the second outer boundary 52b.Therefore, as can be seen, torsional hinged mirror can produce the light beam sweep range from each reflecting surface simultaneously.Even not shown, what those skilled in the art will recognize is that folded light beam then can be folded on light-sensitive medium and be aimed at coaxially to each other and generate single image.Also can recognize, light beam 44 and two sources 42 and 48 of 50 must be positioned in case the drive source that supports the structure of mirror or produce swing do not disturb incident beam 44 and 50 or reflection scan light beam 46 and 52.
[0023] Fig. 3 A and 3B figure have released and have not disturbed light beam and be applicable to the inertial driving mechanism of the torsional hinged mirror structure that the utlity model has two reflecting surfaces and the groove supporting construction arranged.Fig. 3 C is the mirror structure among Fig. 3 A and the 3B and the enlarged drawing in Piezoelectric Driving source.The element similar with element in 2 with above-mentioned Figure 1A, 1B adopts identical reference numbers.
[0024] Fig. 3 A and 3B figure have released two lasing light emitters 42 and 48, when torsional hinged mirror 38 rotated about axis 40 at torsion hinge 18a and 18b place, described lasing light emitter 42 and 48 was directed to laser beam 44 and 50 respectively on torsional hinged mirror 38 corresponding two reflecting surface 36a and the 36b.Equally as shown in the figure, the supporting construction 54 that defines groove 56 is arranged.Mirror structure 38 is supported on four piezoelectric element 58a, 58b, 58c and the 58d, and described piezoelectric element is driven with the frequency of selecting, and the frequency of this selection preferably equals the resonant frequency of torsional hinged mirror 38 substantially, so that mirror 38 is swung with resonant frequency.As shown in the figure with Fig. 3 C in more specifically shown in, torsion hinge 18a and 18b are connected on anchor parts 20a and the 20b.The first couple of piezoelectric element 58a and 58b are fixed to anchor parts 20a on the supporting construction 54 (showing among Fig. 3 C) in the both sides of torsion hinge 18a.Similarly, the second couple of piezoelectric element 58c and 58d are fixed to anchor parts 20b in the both sides of torsion hinge 18b.Arrow 59a, 59b, 59c and 59d figure have released the motion of the piezoelectric element that causes oscillating motion.Importantly, can see because the position of groove structure 54 and lasing light emitter is arranged, supporting construction 54 or lasing light emitter 42 and 48 not with incident beam 44 and 50 or two complete light beam sweep range in any one interference.
[0025] except the inertia system about Fig. 3 A, 3B and 3C discussion, permanent magnet and coil device also can be used to cause the swing of torsional hinged mirror.Fig. 4 A and the structural supports 54 shown in the 4B and lasing light emitter 42 with 48 to Fig. 3 A, 3B and 3C in similar, except lasing light emitter 42 is moved figure to release possible different arranging with 48 position.The drive system figure of embodiment has released similar mirror structure among Fig. 4 A and the 4B, is used for supporting and installing permanent magnet 62a and 62b on the torsion hinge except magnet installation region 60a and 60b are comprised in.Also comprise electric coil 64a and 64b, this electric coil produces flux fields, and this flux fields and these permanent magnets interact and cause the swing of mirror structure.
[0026] Fig. 5 A and 5B figure have released two additional torsional hinged structure, and this structure uses permanent magnet and electric coil as the drive source that is applicable to two reflecting surfaces of the utility model torsional hinged structure.
[0027] torsional hinged structure of Fig. 5 A and 5B is similar to the structure of Fig. 4 B, except magnet installation region 66a and 66b not on the torsion hinge but be fixed on anchor 20a and the 20b.Yet magnet installation region 66a and 66b and torsion hinge are on same straight line and be positioned on the pivot center.Vibrate in order to help to keep mirror deflection amplitude with resonant frequency and needs under minimum power, be fixed on anchor 20a and the 20b with the material area that reduces according to the torsion hinge of the embodiment of Fig. 5 A and 5B.According to the embodiment of Fig. 5 A, except in the zonule of 70a and 70b, notch 68a and 68b have separated installation region 66a and 66b and anchor 20a and 20b.Fig. 5 B works in some similar mode, except not being cuts out notch in anchor, but torsion hinge 18a and 18b are fixed on regional 72a, 72b, 72c and the 72d attenuation on anchor 20a and the 20b or reduce on thickness.
[0028] with reference now to Fig. 6, be depicted as very simple pattern of the present utility model, this pattern is from single silicon substrate or material layer is etched or laser mills out.As shown in the figure, core or mirror, torsion hinge 18a and 18b and anchor 20a and 20b are formed by single silicon layer.Can will be appreciated that if as reflecting surface 24 and 26, the two sides of silicon layer must be able to similarly be reflected.
What [0029] the utility model related to those skilled in the art will appreciate that, various interpolations, deletion, substitute and other modification can be used to described example, and this does not depart from the scope of claimed utility model.
Claims (9)
1. have the torsional hinged mirror structure of two reflecting surfaces, comprising:
A pair of torsion hinge, described torsion hinge is extended along pivot center, and each hinge of an above-mentioned centering has first end and second end on the supporting construction of being installed in;
Core supports between described second end of this core each in described a pair of torsion hinge and by them, so that described core can freely swing around described pivot center,
Described central module have first side and with second side of described first side thereof opposite;
First reflecting surface on described first side of described core; And
Second reflecting surface on described second side of described core.
2. torsional hinged mirror structure according to claim 1 is characterized in that, each surface in described a pair of torsion hinge, described core and described first and second surface forms by monolayer silicon.
3. torsional hinged mirror structure according to claim 1 and 2, it is characterized in that, described a pair of torsion hinge and described core comprise articulated slab, and described first reflecting surface comprises the first mirror layer of described first side that is combined in described articulated slab, and described second reflecting surface comprises the second mirror layer of described second side that is combined in described articulated slab.
4. torsional hinged mirror structure according to claim 1 and 2, it is characterized in that, described first end of each in the described a pair of torsion hinge is mounted for the torsion hinge structure and can freely swings around described hinge, further comprise drive source, this drive source is connected to described torsional hinged mirror structure and swings described two reflecting surfaces around described rotation axis by the deflection angle of selecting, first light beam be directed toward described first reflecting surface and by its reflection and second light beam is directed toward described second reflecting surface and by its reflection so that the deflection angle of the inswept described selection of first and second light beams of described reflection.
5. torsional hinged mirror structure according to claim 4 is characterized in that, further comprises each the first and second anchor parts of described first end that are connected in the described a pair of torsion hinge; And wherein said drive source is the inertia-activated source, this inertia-activated source comprises two pairs of piezoelectric actuators, on a pair of of being installed in the described anchor parts in the described piezoelectric actuator, another in the described piezoelectric actuator is to being installed on the described second anchor parts.
6. torsional hinged mirror structure according to claim 4 is characterized in that, further comprises each the first and second anchor parts of described first end that are connected in the described a pair of torsion hinge; And wherein said drive source comprises first permanent magnet that is installed to the magnet supporting zone, and this magnet supporting zone is defined within on the described first anchor parts along described pivot center; And comprise that further first drive coil that contiguous described first permanent magnet is installed causes described swing to provide with the interactional driving magnetic flux of described first permanent magnet.
7. torsional hinged mirror structure according to claim 6, it is characterized in that, described magnet areas on the described first anchor parts is defined by slit, and this slit has been separated described anchor parts and the described magnet supporting zone except that the part of contiguous described pivot center.
8. torsional hinged mirror structure according to claim 6, it is characterized in that, further comprise second permanent magnet that is installed in the second magnet supporting zone, this magnet supporting zone is defined within on the described second anchor parts along described pivot center, and further comprises second drive coil that contiguous described second permanent magnet is installed.
9. torsional hinged mirror structure according to claim 4, it is characterized in that, the magnet installation region is defined within least one described torsion hinge, and wherein said drive source comprises first permanent magnet that is installed in described magnet installation region and is close to first drive coil that described first permanent magnet is installed.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US67666205P | 2005-04-28 | 2005-04-28 | |
| US60/676,662 | 2005-04-28 | ||
| US11/367,256 | 2006-03-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201159795Y true CN201159795Y (en) | 2008-12-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2006900000335U Expired - Lifetime CN201159795Y (en) | 2005-04-28 | 2006-04-28 | Torsion hinged mirror structure with two reflection surfaces |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105278098A (en) * | 2014-05-28 | 2016-01-27 | 京瓷办公信息系统株式会社 | Optical deflector and image forming apparatus including the same |
| CN110612465A (en) * | 2017-05-10 | 2019-12-24 | 杰拉德·迪尔克·施密茨 | Scanning mirror system and method |
| US11372320B2 (en) | 2020-02-27 | 2022-06-28 | Gerard Dirk Smits | High resolution scanning of remote objects with fast sweeping laser beams and signal recovery by twitchy pixel array |
| US11709236B2 (en) | 2016-12-27 | 2023-07-25 | Samsung Semiconductor, Inc. | Systems and methods for machine perception |
| US11714170B2 (en) | 2015-12-18 | 2023-08-01 | Samsung Semiconuctor, Inc. | Real time position sensing of objects |
| US12025807B2 (en) | 2018-04-13 | 2024-07-02 | Gerard Dirk Smits | System and method for 3-D projection and enhancements for interactivity |
-
2006
- 2006-04-28 CN CNU2006900000335U patent/CN201159795Y/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105278098A (en) * | 2014-05-28 | 2016-01-27 | 京瓷办公信息系统株式会社 | Optical deflector and image forming apparatus including the same |
| US11714170B2 (en) | 2015-12-18 | 2023-08-01 | Samsung Semiconuctor, Inc. | Real time position sensing of objects |
| US11709236B2 (en) | 2016-12-27 | 2023-07-25 | Samsung Semiconductor, Inc. | Systems and methods for machine perception |
| CN110612465A (en) * | 2017-05-10 | 2019-12-24 | 杰拉德·迪尔克·施密茨 | Scanning mirror system and method |
| CN110612465B (en) * | 2017-05-10 | 2022-03-08 | 杰拉德·迪尔克·施密茨 | Scanning mirror system and method |
| US12025807B2 (en) | 2018-04-13 | 2024-07-02 | Gerard Dirk Smits | System and method for 3-D projection and enhancements for interactivity |
| US11372320B2 (en) | 2020-02-27 | 2022-06-28 | Gerard Dirk Smits | High resolution scanning of remote objects with fast sweeping laser beams and signal recovery by twitchy pixel array |
| US11829059B2 (en) | 2020-02-27 | 2023-11-28 | Gerard Dirk Smits | High resolution scanning of remote objects with fast sweeping laser beams and signal recovery by twitchy pixel array |
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| CX01 | Expiry of patent term |
Granted publication date: 20081203 |
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| EXPY | Termination of patent right or utility model |