CN113176645A - Optical device adjusting device - Google Patents

Optical device adjusting device Download PDF

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Publication number
CN113176645A
CN113176645A CN202110427392.XA CN202110427392A CN113176645A CN 113176645 A CN113176645 A CN 113176645A CN 202110427392 A CN202110427392 A CN 202110427392A CN 113176645 A CN113176645 A CN 113176645A
Authority
CN
China
Prior art keywords
support frame
optical device
adjustment
drive
adjustment mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110427392.XA
Other languages
Chinese (zh)
Inventor
张金
李璟
陈进新
王丹
杨光华
高斌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institute of Microelectronics of CAS
Original Assignee
Institute of Microelectronics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institute of Microelectronics of CAS filed Critical Institute of Microelectronics of CAS
Priority to CN202110427392.XA priority Critical patent/CN113176645A/en
Publication of CN113176645A publication Critical patent/CN113176645A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements

Abstract

The present disclosure provides an optical device adjustment apparatus, including: a base adapted to hold an optical device; a first adjustment mechanism configured to support the base and drive the base to move in a first direction; a second adjustment mechanism configured to support the first adjustment mechanism and to drive the first adjustment mechanism to move in a second direction perpendicular to the first direction; an upright frame; and a third adjustment mechanism mounted on the upright frame and configured to support the second adjustment mechanism and drive the second adjustment mechanism to move relative to the upright frame in a third direction perpendicular to the first and second directions. The optical device adjusting device is used for holding an optical device and can adjust the degree of freedom of linear movement of the optical device along three directions, the adjusting process of the optical device adjusting device is simple, the adjusting processes in the three directions are not interfered with each other, and decoupling adjustment in the three directions is realized.

Description

Optical device adjusting device
Technical Field
The present disclosure relates to the technical field of mechanical structures, and in particular, to an optical device adjusting apparatus.
Background
Optical devices are often equipped with a large number of optical components and optical devices, which typically require two optical devices (e.g., lenses, mirrors, half mirrors) to be grouped together. In the assembling and using processes of the optical equipment, the requirement on the spatial relative position precision between two optical devices arranged in groups is high; however, the design, manufacture and assembly of the adjusting device of the optical device have more accumulated errors, so that the adjusting device is prone to cause inaccuracy of the relative spatial position between the two optical devices during the use process. The existing adjusting devices usually have only one degree of freedom, i.e. only one linear distance in one direction between two optical devices can be adjusted, and therefore the spatial relative position between two sets of optical devices cannot be determined. In addition, the existing multi-degree-of-freedom adjusting device has a coupling problem in the adjusting process, and the adjusting process is very complex.
Disclosure of Invention
Technical problem to be solved
The present disclosure is directed to an optical device adjusting apparatus to at least solve the above-mentioned problems of the prior art.
(II) technical scheme
To achieve the above object, the present disclosure provides an optical device adjusting apparatus adapted to adjust an attitude of an optical device with respect to a mating optical device, including: a base adapted to hold an optical device; a first adjustment mechanism configured to support the base and drive the base to move in a first direction; a second adjustment mechanism configured to support the first adjustment mechanism and to drive the first adjustment mechanism to move in a second direction perpendicular to the first direction; an upright frame; and a third adjusting mechanism mounted on the upright frame and configured to support the second adjusting mechanism and drive the second adjusting mechanism to move relative to the upright frame in a third direction perpendicular to the first and second directions.
Optionally, the base comprises: the movable sleeve is internally provided with a through hole extending in the third direction, and a shaft shoulder is arranged in the through hole; and a lock nut coupled with the threads of the through hole to hold the optical device between the shoulder and the lock nut within the through hole.
Optionally, the first adjustment mechanism comprises: a first support frame on which the movable sleeve is movably supported by a first guide rail mechanism; a first drive mechanism configured to drive the movable sleeve to move in a first direction relative to the first support frame.
Optionally, the first adjustment mechanism further comprises a first elastic return mechanism configured to drive the movable sleeve to return to the home position in case the driving force exerted on the movable sleeve by the first driving mechanism disappears.
Optionally, the optical device adjusting apparatus further includes: a first positioning mechanism configured to resist movement of the movable sleeve relative to the first support frame.
Optionally, the second adjustment mechanism comprises: the first support frame is movably supported on the second support frame through a second guide rail mechanism; a second drive mechanism configured to drive the first support frame to move in a second direction relative to the second support frame.
Optionally, the second adjusting mechanism further comprises a second elastic return mechanism, and the second elastic return mechanism is configured to drive the first support frame to return to the original position in the case that the driving force exerted on the first support frame by the second driving mechanism disappears.
Optionally, the optics adjustment apparatus further comprises a second positioning mechanism configured to prevent further movement of the first support frame relative to the second support frame.
Optionally, the third adjustment mechanism comprises: a fixed base installed on the upright frame; and a third driving screw passing through the fixed base in the third direction and screw-coupled to the fixed base, the second support frame being supported at an upper end of the third driving screw such that the second support frame is driven to move upward in the third direction by driving the third driving screw to rotate with respect to the fixed base.
Optionally, the optics adjustment apparatus further comprises a third positioning mechanism configured to prevent movement of the second support frame relative to the upright frame in a third direction.
(III) advantageous effects
From the above technical solution, it can be seen that the optical device adjusting apparatus of the present disclosure has at least one or a part of the following beneficial effects:
the optical device adjusting device is used for holding an optical device and can adjust the degree of freedom of linear movement of the optical device along X, Y, Z three directions, the adjusting process of the optical device adjusting device is simple, the adjusting processes in the three directions are not interfered with each other, and decoupling adjustment in the three directions is realized.
Drawings
Fig. 1 is a three-dimensional model diagram of an optical device adjustment apparatus in an embodiment of the present disclosure.
Fig. 2 is a three-dimensional model diagram of an optics mount in an embodiment of the disclosure.
Fig. 3 is a sectional view taken along a-a of fig. 2.
FIG. 4 is a three-dimensional model diagram of a first adjustment mechanism in an embodiment of the disclosure.
FIG. 5 is a three-dimensional model diagram of a second adjustment mechanism in an embodiment of the disclosure.
FIG. 6 is a three-dimensional model diagram of a third adjustment mechanism in an embodiment of the disclosure.
Fig. 7 is a cross-sectional view of an optic adjustment device in an embodiment of the present disclosure.
FIG. 8 is a three-dimensional model diagram of a support structure in an embodiment of the disclosure.
Fig. 9 is an exploded view of an optics adjustment apparatus in an embodiment of the disclosure.
[ description of main reference numerals in the drawings ] of the embodiments of the present disclosure
1-base
011-movable sleeve
012-locking nut
013-through hole
014-shaft shoulder
015-dovetail groove
2-first adjustment mechanism
021-first support frame
022-first drive screw
023-dovetail guide rail
024 first extension part
025-dovetail groove
3-second adjusting mechanism
031-second support frame
032-second drive screw
033-dovetail guide rail
034-second extension
035-third extension
4-third adjustment mechanism
041-fixed base
042-third drive screw
5-upright frame
051-guiding groove
052-stop block
053-third positioning screw
6-adjusting optics
7-mating optics
8-first elastic reset mechanism
081-tension spring
082-pin shaft
9-first positioning mechanism
10-second elastic reset mechanism
11-second positioning mechanism
Detailed Description
The present disclosure provides an optical device adjustment apparatus, including: the device comprises a base, a first adjusting mechanism, a second adjusting mechanism, an upright frame and a third adjusting mechanism. The base is adapted to hold an optical device; the first adjusting mechanism is configured to support the base and drive the base to move along a first direction; the second adjusting mechanism is configured to support the first adjusting mechanism and drive the first adjusting mechanism to move along a second direction perpendicular to the first direction; and a third adjustment mechanism mounted on the upright frame and configured to support the second adjustment mechanism and drive the second adjustment mechanism to move relative to the upright frame in a third direction perpendicular to the first and second directions. The adjusting process of the optical device adjusting device is simple, decoupling adjustment in three directions is achieved, and the adjusting processes in the three directions are not interfered with each other.
For the purpose of promoting a better understanding of the objects, aspects and advantages of the present disclosure, reference is made to the following detailed description taken in conjunction with the accompanying drawings. This disclosure may, however, be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art. In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity, and like reference numerals designate like elements throughout.
Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. It should be understood that the description is illustrative only and is not intended to limit the scope of the present disclosure. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the disclosure. It may be evident, however, that one or more embodiments may be practiced without these specific details. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present disclosure.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. The terms "comprises," "comprising," and the like, as used herein, specify the presence of stated features, steps, operations, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, or components.
All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It is noted that the terms used herein should be interpreted as having a meaning that is consistent with the context of this specification and should not be interpreted in an idealized or overly formal sense.
The present disclosure provides an optical device adjustment apparatus, as shown in fig. 1, including a base 1, a first adjustment mechanism 2, a second adjustment mechanism 3, an upright frame 5, and a third adjustment mechanism 4. The base 1 is adapted to hold an optical device; the first adjustment mechanism 2 is configured to support the base 1 and drive the base 1 to move in a first direction, which is shown as the X direction; the second adjustment mechanism 3 is configured to support the first adjustment mechanism 2 and to drive the first adjustment mechanism to move in a second direction perpendicular to the first direction, the second direction being the Y direction as shown; and a third adjustment mechanism 4 mounted on the upright frame 5 and configured to support the second adjustment mechanism 3 and to drive the second adjustment mechanism 3 to move relative to the upright frame 5 in a third direction perpendicular to the first and second directions, the third direction being the Z direction as shown.
The optics in the optical apparatus, including the adjustment optics 6 and the mating optics 7, are typically used in groups. The optical device 7 is fixed by a device other than the optical device adjusting device, the position and the posture of the optical device 7 are fixed, the optical device 7 is clamped by the base 1 of the optical device adjusting device, the optical device 6 is moved X, Y, Z along three directions by adjusting the optical device 6 adjusting device, and the posture of the optical device 6 relative to the optical device 7 is further adjusted, wherein the posture represents the relative distance and the relative position between the optical device 6 and the optical device 7. Wherein X, Y, Z form a cartesian rectangular coordinate system.
As shown in fig. 2 to 3, the base 1 includes: a movable sleeve 011 and a lock nut 012. The movable sleeve 011 is provided inside with a through hole 013, the through hole 013 being used for placing the adjusting optics 6. The axis of the through hole 013 is parallel to the Z direction, the upper end is provided with a shoulder 014, and the lower end is provided with an internal thread matched with the lock nut 012.
When the adjusting optical device 6 is put into the square sleeve from the lower end of the through hole 013, as shown in fig. 3, the shoulder 014 acts as a stopper for the first optical device. At the same time, the lock nut 012 is screwed into the through hole 013 from the lower end thereof until it abuts against the adjusting optical device 6, and is locked in the through hole 013.
As shown in fig. 4, the first adjustment mechanism 2 includes a first support frame 021 and a first drive mechanism. The first support frame 021 and the movable sleeve 011 are slidably connected by a first guide rail mechanism. The first guide mechanism may be in the form of a dovetail groove 015 and a dovetail guide 023, that is, the dovetail groove 015 (as shown in fig. 3) and the dovetail guide 023 are respectively disposed on the movable sleeve 011 and the first support frame 021, so as to realize that the movable sleeve 011 moves on the first support frame 021 in the X direction. The first driving mechanism drives the movable sleeve 011 to move in the X direction with respect to the first support frame 021.
Specifically, the first drive mechanism is screwed into the first support frame 021 through the first drive screw 022 and abuts against the outside of the movable sleeve 011 in the Y direction, so that the first drive screw 022 drives the movable sleeve 011 to move linearly in the X direction by driving the first drive screw 022 to rotate relative to the first support frame 021.
The first adjustment mechanism 2 may further include a first elastic return mechanism 8, wherein the first elastic return mechanism 8 includes a pin 082 and a tension spring 081, the tension spring 081 is respectively inserted into the movable sleeve 011 and the first support frame 021, both ends of the tension spring 081 are respectively fixed to the movable sleeve 011 and the first support frame 021 by the pin 082, and the tension spring 081 is always in a stretching state. When the first drive screw 022 is tightened, the first drive screw 022 pushes the movable sleeve 011 to move away from the first support frame 021 against the elastic force of the tension spring 081; when the first drive screw 022 is loosened until its driving force disappears, the movable sleeve 011 is restored to the original position by the tensile force of the tension spring 081.
The optical device adjustment apparatus further includes a first positioning mechanism 9 for preventing movement of the movable sleeve 011 with respect to the first support frame 021. The first positioning mechanism 9 can prevent the movable sleeve 011 from moving relative to the first support frame 021 by the first positioning screw being screwed into and through the first support frame 021 to press the X-direction outside of the movable sleeve 011.
As shown in fig. 5, the second adjustment mechanism 3 includes a second support frame 031 and a second drive mechanism. The second support frame 031 is slidably connected to the first support frame 021 via a second rail mechanism. The second guide mechanism may be in the form of a dovetail groove 025 and a dovetail guide 033, that is, the dovetail groove 025 (as shown in fig. 4) and the dovetail guide 033 are respectively disposed on the first support frame 021 and the second support frame 031, so that the first support frame 021 moves in the Y direction on the second support frame 031. The second driving mechanism drives the first support frame 021 to move in the Y direction with respect to the second support frame 031.
Specifically, the second driving mechanism is screwed into the second supporting frame 031 through the second driving screw 032, and abuts against the outside of the first supporting frame 021 in the X direction, and the second driving screw 032 is driven to rotate relative to the second supporting frame 031, so that the second driving screw 032 is driven to move linearly in the Y direction. The first support frame 021 may be provided with a coupling portion extending from the Z direction into the second support frame 031, and the second driving screw 032 may abut against an outer side of the coupling portion to drive the first support frame 021.
The second adjustment mechanism 3 may further include a second elastic return mechanism 10, wherein the second elastic return mechanism 10 includes a pin 082 and a tension spring 081, the tension spring 081 is respectively inserted into the first support frame 021 and the second support frame 031, both ends of the tension spring 081 are respectively fixed to the first support frame 021 and the second support frame 031 by the pin 082, and the tension spring 081 is always in a stretched state. When the second driving screw 032 is screwed down, the second driving screw 032 overcomes the elasticity of the tension spring 081 to push the first supporting frame 021 to move towards the direction close to the base 1; when the second driving screw 032 is released until its driving force disappears, the first support frame 021 is restored to the original position by the tension of the tension spring 081.
The optics adjusting apparatus further comprises a second positioning mechanism 11 for preventing the first support frame 021 from moving relative to the second support frame 031. The second positioning mechanism 11 can prevent the first support frame 021 from moving relative to the second support frame 031 by the second positioning screw being screwed into and through the second support frame 031 to press the Y-direction outer side of the first support frame 021.
The second positioning mechanism 11 further includes a first extension 024 and a second extension 034, wherein the first extension 024 extends downward on the first support frame 021 (as shown in fig. 4), and the second extension 034 extends upward on the second support frame 031 to the outside of the first extension 024 (as shown in fig. 5).
As shown in fig. 6, the third adjustment mechanism 4 includes a fixed base 041 mounted on the upright frame 5, and a third drive screw 042 passing through the fixed base 041 and threadedly coupled thereto. As shown in fig. 7, the second support frame 031 is supported at the upper end of the third drive screw 042 such that the second support frame 031 is driven to move upward in the vertical direction by driving the third drive screw 042 to rotate with respect to the fixed base 041.
As shown in fig. 8, the optical device adjusting apparatus further includes a first positioning mechanism 9, and the third positioning mechanism includes: a guide groove 051, a third extension part 035, a stop 052 and a third positioning screw rod 053. The guide groove 051 is opened on the upright frame 5, and the third extension part 035 is arranged on the second support frame 031 and extends into the guide groove 051 from the longitudinal outer side of the second support frame 031. The stopper 052 is provided at an outer side of the upright frame 5 opposite to the second supporting frame 031. A third positioning screw 053 passes through the stopper 052 and screw-threadedly coupled to the third extension 035, and the third positioning screw 053 blocks the movement of the second support frame 031 relative to the upright frame 5 by pressing the stopper 052 to the outside of the upright frame 5 in the Y direction.
In the optical device adjusting apparatus in the embodiment of the present disclosure, the adjustment stroke of the first adjusting mechanism 2 in the X direction is 0 to 6mm, the adjustment stroke of the second adjusting mechanism 3 in the Y direction is 0 to 6mm, and the adjustment stroke of the third adjusting mechanism 4 in the Z direction is 0 to 9 mm.
Optionally, each of the first and second support frames 021 and 031 is provided as a hollow mechanism to allow a light beam from the mating optics 7 and passing through the optics to be viewed from the lower portion of the optics adjustment apparatus.
The optical device adjusting device is used for holding an optical device and can adjust the degree of freedom of linear movement of the optical device 6 along X, Y, Z in three directions, the adjusting process of the optical device adjusting device is simple, the adjusting processes in the three directions are not interfered with each other, and decoupling adjustment in the three directions is realized.
It should also be noted that directional terms, such as "upper", "lower", "front", "rear", "left", "right", and the like, used in the embodiments are only directions referring to the drawings, and are not intended to limit the scope of the present disclosure. Throughout the drawings, like elements are represented by like or similar reference numerals. In the event of possible confusion for understanding of the present disclosure, conventional structures or configurations will be omitted, and the shapes and sizes of the components in the drawings do not reflect actual sizes and proportions, but merely illustrate the contents of the embodiments of the present disclosure.
Unless otherwise indicated, the numerical parameters set forth in the specification and attached claims are approximations that can vary depending upon the desired properties sought to be obtained by the present disclosure. In particular, all numbers expressing quantities of ingredients, reaction conditions, and so forth used in the specification and claims are to be understood as being modified in all instances by the term "about". Generally, the expression is meant to encompass variations of ± 10% in some embodiments, 5% in some embodiments, 1% in some embodiments, 0.5% in some embodiments by the specified amount.
The use of ordinal numbers such as "first," "second," "third," etc., in the specification and claims to modify a corresponding element does not by itself connote any ordinal number of the element or any ordering of one element from another or the order of manufacture, and the use of the ordinal numbers is only used to distinguish one element having a certain name from another element having a same name.
In addition, unless steps are specifically described or must occur in sequence, the order of the steps is not limited to that listed above and may be changed or rearranged as desired by the desired design. The embodiments described above may be mixed and matched with each other or with other embodiments based on design and reliability considerations, i.e., technical features in different embodiments may be freely combined to form further embodiments.
The above-mentioned embodiments are intended to illustrate the objects, aspects and advantages of the present disclosure in further detail, and it should be understood that the above-mentioned embodiments are only illustrative of the present disclosure and are not intended to limit the present disclosure, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present disclosure should be included in the scope of the present disclosure.

Claims (10)

1. An optical device adjustment apparatus adapted to adjust the attitude of an optical device relative to a mating optical device, comprising:
a base adapted to hold an optical device;
a first adjustment mechanism configured to support the base and drive the base to move in a first direction;
a second adjustment mechanism configured to support the first adjustment mechanism and to drive the first adjustment mechanism to move in a second direction perpendicular to the first direction; and
an upright frame; and
a third adjustment mechanism mounted on the upright frame and configured to support the second adjustment mechanism and to drive the second adjustment mechanism to move relative to the upright frame in a third direction perpendicular to the first and second directions.
2. The optical device adjustment apparatus according to claim 1, wherein the base includes:
a through hole extending in the third direction is formed in the movable sleeve, and a shaft shoulder is arranged in the through hole; and
a lock nut engaged with the threads of the through-hole to retain the optic within the through-hole between the shoulder and the lock nut.
3. The optical device adjustment apparatus of claim 2, wherein the first adjustment mechanism comprises:
a first support frame on which the movable sleeve is movably supported by a first rail mechanism; and
a first drive mechanism configured to drive the movable sleeve to move in the first direction relative to the first support frame.
4. The optical device adjustment apparatus of claim 3, wherein the first adjustment mechanism further comprises a first elastic return mechanism configured to drive the movable sleeve to return to the home position in the event that the driving force exerted on the movable sleeve by the first drive mechanism disappears.
5. The optic adjustment device of claims 3 or 4, further comprising a first positioning mechanism configured to prevent movement of the movable sleeve relative to the first support frame.
6. The optical device adjustment apparatus of any one of claims 3-5, wherein the second adjustment mechanism comprises:
a second support frame on which the first support frame is movably supported by a second rail mechanism; and
a second drive mechanism configured to drive the first support frame to move in the second direction relative to the second support frame.
7. The optical device adjustment apparatus of claim 6, wherein the second adjustment mechanism further comprises a second elastic return mechanism configured to drive the first support frame to return to the home position in the event that the driving force exerted on the first support frame by the second drive mechanism is lost.
8. The optic adjustment device of claim 6 or 7, further comprising a second positioning mechanism configured to prevent further movement of the first support frame relative to the second support frame.
9. The optical device adjustment apparatus of any one of claims 1-8, wherein the third adjustment mechanism comprises:
a fixed base mounted on the upright frame; and
a third driving screw passing through the fixed base in the third direction and screw-coupled to the fixed base, the second support frame being supported at an upper end of the third driving screw such that the second support frame is driven to move upward in the third direction by driving the third driving screw to rotate with respect to the fixed base.
10. The optic adjustment device of claim 9, further comprising a third positioning mechanism configured to prevent movement of the second support frame relative to the upright frame in the third direction.
CN202110427392.XA 2021-04-20 2021-04-20 Optical device adjusting device Pending CN113176645A (en)

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Application Number Priority Date Filing Date Title
CN202110427392.XA CN113176645A (en) 2021-04-20 2021-04-20 Optical device adjusting device

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Publication Number Publication Date
CN113176645A true CN113176645A (en) 2021-07-27

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114114581A (en) * 2021-11-16 2022-03-01 北京鉴知技术有限公司 Adjusting bracket for optical equipment

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CN107422491A (en) * 2017-08-28 2017-12-01 歌尔股份有限公司 The assemble method and assembling equipment of optics
CN108709722A (en) * 2018-07-23 2018-10-26 中国工程物理研究院激光聚变研究中心 Optical element Three Degree Of Freedom detection device
CN208333817U (en) * 2018-07-23 2019-01-04 中国工程物理研究院激光聚变研究中心 The separate type Three Degree Of Freedom detection system of optical element
CN110596848A (en) * 2019-10-22 2019-12-20 中国科学院上海光学精密机械研究所 Vibration-proof two-dimensional optical adjusting frame and using method

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Publication number Priority date Publication date Assignee Title
JP2000039546A (en) * 1998-05-21 2000-02-08 Toshiba Corp Device and method for position adjustment
JP2008151844A (en) * 2006-12-14 2008-07-03 Necディスプレイソリューションズ株式会社 Optical component adjustment mechanism, liquid crystal display and projection display
CN102508352A (en) * 2011-11-25 2012-06-20 中国科学院光电技术研究所 Two-dimensional angular fine-tuning regulating frame
CN106772904A (en) * 2017-02-07 2017-05-31 周仲达 A kind of laser lens three-dimensional synchronous regulation mechanism
CN107422491A (en) * 2017-08-28 2017-12-01 歌尔股份有限公司 The assemble method and assembling equipment of optics
CN107329230A (en) * 2017-08-31 2017-11-07 重庆博奥新景医学科技有限公司 A kind of structure adjusted for optical collection camera lens Manual three-dimensional
CN108709722A (en) * 2018-07-23 2018-10-26 中国工程物理研究院激光聚变研究中心 Optical element Three Degree Of Freedom detection device
CN208333817U (en) * 2018-07-23 2019-01-04 中国工程物理研究院激光聚变研究中心 The separate type Three Degree Of Freedom detection system of optical element
CN110596848A (en) * 2019-10-22 2019-12-20 中国科学院上海光学精密机械研究所 Vibration-proof two-dimensional optical adjusting frame and using method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114114581A (en) * 2021-11-16 2022-03-01 北京鉴知技术有限公司 Adjusting bracket for optical equipment

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