CN101950061B - Translation stage capable of containing devices - Google Patents

Translation stage capable of containing devices Download PDF

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Publication number
CN101950061B
CN101950061B CN2010102730782A CN201010273078A CN101950061B CN 101950061 B CN101950061 B CN 101950061B CN 2010102730782 A CN2010102730782 A CN 2010102730782A CN 201010273078 A CN201010273078 A CN 201010273078A CN 101950061 B CN101950061 B CN 101950061B
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China
Prior art keywords
base plate
push rod
translation stage
adjustment
spring
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Expired - Fee Related
Application number
CN2010102730782A
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Chinese (zh)
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CN101950061A (en
Inventor
吴文镜
李国光
马铁中
夏洋
严晓浪
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Institute of Microelectronics of CAS
BEIOPTICS Tech CO Ltd
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Institute of Microelectronics of CAS
BEIOPTICS Tech CO Ltd
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Application filed by Institute of Microelectronics of CAS, BEIOPTICS Tech CO Ltd filed Critical Institute of Microelectronics of CAS
Priority to CN2010102730782A priority Critical patent/CN101950061B/en
Publication of CN101950061A publication Critical patent/CN101950061A/en
Application granted granted Critical
Publication of CN101950061B publication Critical patent/CN101950061B/en
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Abstract

The invention relates to the technical field of adjustment of optical devices, in particular to a translation stage capable of containing devices, which comprises a base plate and a cover plate, wherein the centers of the base plate and the cover plate are respectively provided with a round light hole, and the base plate is connected with the cover plate by a screw to form a semi-closed cavity capable of containing optical devices. By containing the optical devices in the translation stage, the invention achieves the advantages of concise mechanical drive chain, small volume, compact structure and convenient operation, thereby being very suitable for product integration or situations having stringent requirements for volume. The invention can be used for two-dimensional or three-dimensional translational adjustment of optical devices such as small pinholes, slits, lenses, reflectors and the like.

Description

The built-in translation stage of a kind of device
Technical field
The present invention relates to optical device adjustment technology field, be specifically related to the built-in translation stage of a kind of device.
Background technology
Translation stage, particularly two dimension, D translation platform are parts commonly used in the optical regulator, and technology commonly used at present has:
The first, adopt modular design, with two one dimension translation stage stacks, form the two-dimension translational platform.The basic design philosophy of each one dimension translation stage all is that screw rod turn drive motion stage is moved on guide rail, and spring provides elastic force to eliminate the gap simultaneously.The base of another translation stage is fixed on the motion stage of first translation stage.This design proposal, often volume is very big, and can only be used for the adjustment of reflective optical device, can not be used for the adjustment of transmission optics device, because translation stage itself can block light path.This series products comparative maturity on market is like the MS-500-XY translation stage of the GCM-123102M translation stage of Daheng Xinshijiyuan Science & Technology Co., Ltd. and GCM-123103M translation stage, Newport company and MS-KIT-Z-1 translation stage or the like.This series products complex structure, volume is very huge.
The second, the integrated form design is done as a whole the design with the two-dimension translational platform; Consider the structure optimization of whole translation stage during design; Basic design philosophy also is that screw rod turn drive motion stage is moved on guide rail, and spring provides elastic force to eliminate the gap simultaneously, and first kind of scheme of volume ratio is slightly little; But volume is still bigger, and major part also is the adjustment that can only be used for reflective optical device.Also have portioned product to make frame-type, often cost is higher, and volume is also bigger.This series products mainly contains M406 translation stage and 401 translation stages of GCM-120202AM, the Newport company of Daheng Xinshijiyuan Science & Technology Co., Ltd., 7SWM02213 translation stage of Beijing Saifan Photoelectric Instrument Co., Ltd etc., and these small product size are still very big.
Chinese patent ZL200520073354.5 discloses a kind of zero stand-off optical translation platform; This translation stage comprises slide, slide plate, side rails, web joint, support steel ball, guiding steel ball, spring and micrometer head, adopts no gap to cooperate, and motion flexibly; Stable mechanical performance, precision is high.This translation stage is the one dimension translation stage, adopts dovetail guide, only considers accuracy requirement during design, and volume is bigger.
Chinese patent ZL200820153671.1 discloses a kind of two-dimension translational platform of volume compact type; Comprise gear wheel, pinion wheel, guide rail, slide block, stepper motor I and stepper motor II, realize programmed control, overcome the shortcoming that traditional translation stage extends through stepper motor; The labyrinth that does not have traditional translation stage; Processing is simple, and cost is low, and is functional.The shortcoming of this scheme is bulky equally, realizes that the D translation volume is bigger.
Analysis through to prior art draws: translation stage volume of the prior art is big, quality is big; And because optical device generally is installed in the outside of translation stage; Make the volume of translation stage further strengthen; Therefore translation stage of the prior art is unfavorable for that product is integrated, is difficult to the occasion harsh to volume requirement.
Summary of the invention
The technical matters that the present invention will solve provides the built-in translation stage of a kind of device simple in structure, that volume is little.
In order to achieve the above object; The technical scheme that the present invention adopts is: the built-in translation stage of a kind of device, comprise base plate and cover plate, and said base plate and cover plate center are respectively equipped with circular light hole; Said base plate is connected through screw with cover plate, forms the semi-enclosed cavity that can hold optical device.
In the such scheme; The shape side of the being plate shape of said base plate and cover plate; Mutually perpendicular two sides are respectively equipped with adjustment bolt and push rod on the said base plate; Said adjustment bolt passes the adjustment threaded hole that is arranged at the base plate side and contacts with push rod, the end face of said push rod and the edge contact of optical device.
In the such scheme, said push rod is a T type bar, and said push rod moves in the push rod groove internal linear that is arranged at said base plate side.
In the such scheme, the said base plate lateral vertical that the adjustment bolt is set is provided with spring, the edge contact of said spring and optical device, and the elastic force direction of spring is in the opposite direction with the precession of adjustment bolt.
In the such scheme, be provided with supporting plate between said base plate and the optical device, said supporting plate is connected with base plate through pin, and moves freely along the pin axis direction; Said base plate is provided with the adjustment volution, and end face of said adjustment volution and supporting plate are fitted.
In the such scheme, be fixed with shell fragment on the said cover plate, said shell fragment below is provided with depression bar, and said depression bar passes setting strut kong on the cover board, and an end contacts with optical device, and an end contacts with shell fragment.
In the such scheme, said spring is wire spring or steel sheet spring.
In the such scheme, said cover plate is provided with clamping screw.
In the such scheme, said base plate side is provided with the side mounting hole, and said base plate is provided with the back mounting hole.
Compared with prior art, the beneficial effect of technical scheme generation of the present invention is following:
The present invention places translation stage inner optical device; Mechanical drive train is succinct; Volume is little, and compact conformation is easy to operate; Be very suitable for the integrated or harsh occasion of product, can be used for the two dimension or the D translation adjustment of optical device such as small-sized pin hole, slit, lens, catoptron volume requirement.
Description of drawings
The three-dimensional structure synoptic diagram of the built-in translation stage of device that Fig. 1 provides for the embodiment of the invention;
The three-dimensional structure exploded perspective view of the built-in translation stage of device that Fig. 2 provides for the embodiment of the invention;
Inner structure synoptic diagram when the built-in translation stage of device that Fig. 3 provides for the embodiment of the invention is unkitted cover plate;
The three-dimensional structure synoptic diagram of the built-in translation stage base plate of device that Fig. 4 provides for the embodiment of the invention;
The three-dimensional structure synoptic diagram of the built-in translation stage of device that Fig. 5 provides for another embodiment of the present invention;
Fig. 6 is that the A of Fig. 5 is to view;
Fig. 7 is that the B of Fig. 6 is to view;
The three-dimensional structure exploded perspective view of the built-in translation stage of device that Fig. 8 provides for another embodiment of the present invention.
Reference numeral:
1, base plate, 2, cover plate, 3, the adjustment bolt, 4, push rod, 5, spring, 6, clamping screw; 7, optical device, 8, screw, 9, shell fragment, 10, depression bar, 11, supporting plate, 12, the adjustment volution; 13, pin, 1-1, side mounting hole, 1-2, back mounting hole, 1-3, spring mounting hole, 1-4, adjustment threaded hole, 1-5, push rod groove; 1-6, push rod chamber, 1-7, light hole, 1-8, locking screw pit, 1-9, screw, 1-10, pin-and-hole; 2-1, light hole, 2-2, locking hole, 2-3, strut kong, 2-4, pin-and-hole, 12-1, adjustment hole.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment technical scheme of the present invention is described in detail.
Embodiment 1:
Like Fig. 1, shown in Figure 2, present embodiment provides a kind of device built-in two-dimension translational platform, and this translation stage is made up of base plate 1, cover plate 2, adjustment bolt 3, push rod 4, spring 5, clamping screw 6 and screw 8.
Like Fig. 2, shown in Figure 4, base plate 1 side's of being template structure, there is the light hole 1-7 of a circle at the middle part, and the both sides of light hole 1-7 have a locking screw pit 1-8 and two back mounting hole 1-2 respectively; There is side mounting hole 1-1 two sides of base plate 1, and the middle part, in addition two sides of base plate 1 has adjustment threaded hole 1-4, square push rod groove 1-5 and spring mounting hole 1-3; Over against push rod groove 1-5 place push rod chamber 1-6 is arranged, push rod groove 1-5 and push rod chamber 1-6 constitute the space of push rod 4.
Like Fig. 1, shown in Figure 2, said cover plate 2 side's of being template structures have light hole 2-1, locking hole 2-2 on the cover plate 2.Said push rod 4 is the T-shape structure, has two, is respectively applied for the adjustment of both direction.Said adjustment bolt 3 has two, respectively with base plate 1 on adjustment threaded hole 1-4 cooperate, it is secondary to constitute accurate thread, is used to adjust the position of push rod 4.Said spring 5 has two, is wire spring, and an end is fixed on the spring mounting hole 1-3 of base plate 1.
Like Fig. 1, shown in Figure 2, said base plate 1 is fixedly connected through screw 8 with cover plate 2, and constitutes a semi-enclosed cavity.The optical device 7 of said push rod 4, spring 5 and required adjustment is arranged in the cavity that base plate 1 and cover plate 2 are formed.
As shown in Figure 3, push rod 4 is positioned among the push rod groove 1-5 and push rod chamber 1-6 of base plate 1, can move along push rod groove 1-5 is linear.Adjustment bolt 3 cooperates with adjustment threaded hole 1-4, and passes adjustment threaded hole 1-4 and contact with push rod 4, adjusts bolt 3 precessions and can promote push rod 4 and move.The edge contact of the end face of push rod 4 and optical device 7, the edge contact of spring 5 and optical device 7, and the elastic force direction of spring 5 is in the opposite direction with the precession of adjustment bolt 3.Under the effect of spring 5 and push rod 4, precession or back-out adjustment bolt 3 just can have been adjusted the position of optical device 7.Adjustment bolt 3, push rod 4 and spring 5 have two groups, adjust the translation on optical device 7 both directions respectively.
Like Fig. 1, shown in Figure 2, after cover plate 2 was fixed on the base plate 1 through screw 8, optical device 7 was arranged in the cavity of cover plate 2 and base plate 1 composition, and a minim gap is arranged between cover plate 2 and the optical device 7; When turn adjustment bolt 3, the position of translation optical device 7 very like a cork; After adjustment finishes, the clamping screw 6 of screwing, elastic deformation takes place in cover plate 2, and cover plate 2 compresses optical device 7, and this moment, optical device 7 was by locked.
Like Fig. 1, Fig. 2, shown in Figure 4, side mounting hole 1-1 and back mounting hole 1-2 are arranged on the base plate 1, the user in use can be as required and conveniently, selects suitable mounting hole for use, and the present invention is installed in the miscellaneous equipment.
Embodiment 2:
As shown in Figure 8, present embodiment provides a kind of device built-in D translation platform, and this translation stage is by base plate 1, cover plate 2, adjustment bolt 3, push rod 4, shell fragment 9, clamping screw 6, depression bar 10, supporting plate 11, spring 5, adjustment volution 12 and pin and 13 form.
As shown in Figure 8, said base plate 1 is a square cavity structure, and there is screw 1-9 at the middle part, and there are back mounting hole 1-2, pin-and-hole 1-10 in the bottom surface, and there are adjustment threaded hole, square push rod groove, spring mounting groove in two sides.Said cover plate 2 is square platy structure, and there is a circular light hole at the middle part, also has three strut kong 2-3, two pin-and-hole 2-4 in addition on the plate.Push rod 4 is the T-shape structure, has two, is respectively applied for the adjustment of both direction.Adjustment bolt 3 has two, respectively with base plate 1 on the adjustment threaded hole cooperates, constitute the accurate thread pair, be used to adjust the position of push rod 4.Spring 5 has two, is steel sheet spring, and an end is fixed in the spring mounting groove of base plate 1.Shell fragment 9 is the strip spring leaf, and an end is porose, is used for fixing on cover plate 2.Depression bar 10 has three, is two ends bulb rod-like structure.Supporting plate 11 is a thin-slab construction, and the middle part is an annular, and there is handle shape structure at two ends, and the end of handle has the guiding circular hole.
As shown in Figure 8, push rod 4 is positioned in the push rod groove of base plate 1, can move along push rod line of rabbet joint property; Adjustment bolt 3 passes the adjustment threaded hole of base plate 1, contacts with push rod 4, and 3 precessions of adjustment bolt can promote push rod 4 motions.Two pins 13 are individually fixed among two pin-and-hole 1-10 of base plate 1 through interference fit, and two pilot holes of supporting plate 11 pass pin 13, and can move freely along the pin axis direction.Adjustment volution 12 screws on screw 1-9, and end face of adjustment volution 12 is fitted with supporting plate 11, and turn adjustment volution 12 can drive supporting plate 11 and move.Optical device 7 is positioned on the supporting plate 11, and the end face of the edge of optical device 7 and two push rods 4 is fitted, and two springs 5 are also fitted with the edge of optical device 7 simultaneously, and the elastic force direction of spring 5 is in the opposite direction with the precession of adjustment bolt 3.Cover plate 2 passes through four screws and base plate 1 is fixing, semi-enclosed cavity of formation between cover plate 2 and the base plate 1, two the pin-and-hole 2-4 on the cover plate 2 and the 13 little clearance fit of pinning, the further position of qualification pin 13 simultaneously.Three shell fragments 9 pass through screw retention on cover plate 2, and depression bar 10 passes strut kong 2-3, and an end of depression bar 10 contacts with optical device 7, and the other end contacts with shell fragment 9.Under the effect of shell fragment 9, depression bar 10, optical device 7, supporting plate 11 and adjustment volution 12 are tightly fitted.
Like Fig. 6, Fig. 7, shown in Figure 8, by the adjustment hole 12-1 of instrumental purpose in adjustment volution 12, can turn adjustment volution 12.When precession adjustment volution 12, adjustment volution 12 promotes supporting plate 11, and supporting plate 11 drives optical device 7 and moving axially, and optical device 7 promotes three depression bars 10 and outwards moves, and depression bar 10 backs down shell fragment 9.When screwing out adjustment volution 12, the elastic force of shell fragment 9 acts on the depression bar 10, and depression bar 10 promotes optical device 7, and optical device 7 drive supporting plates 11 screw out direction to adjustment volution 12 and move.When optical device 7 was made axial translation, two depression bar 10 end faces that contact with optical device 7 and the big face of spring 5 had constituted the guide rail of optical device 7 motions.
Like Fig. 5, Fig. 6, shown in Figure 7, when precession adjustment bolt 3, adjustment bolt 3 promotes push rod 4, and push rod 4 promotes optical device 7 and makes radial translation, and optical device 7 promotes spring 5; When screwing out adjustment bolt 3, the elastic force of spring 5 acts on the optical device 7, and optical device 7 screws out direction together with push rod 4 to adjustment bolt 3 and moves.Two translation modes radially are identical, and in setting range radially, the motion of push rod 4 is not interfered with supporting plate 11.
As shown in Figure 5, after adjustment finished, the clamping screw 6 of can screwing was with optical device 7 lockings.As shown in Figure 7, the user in use can be as required and conveniently, utilizes back mounting hole 1-2 that the present invention is installed in the miscellaneous equipment.
Above-described specific embodiment; The object of the invention, technical scheme and beneficial effect have been carried out further explain, and institute it should be understood that the above is merely specific embodiment of the present invention; Be not limited to the present invention; All within spirit of the present invention and principle, any modification of being made, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (5)

1. built-in translation stage of device, it is characterized in that: comprise base plate and cover plate, said base plate and cover plate center are respectively equipped with circular light hole, and said base plate is connected through screw with cover plate, form the semi-enclosed cavity that can hold optical device;
The shape side of the being plate shape of said base plate and cover plate; Mutually perpendicular two sides are respectively equipped with adjustment bolt and push rod on the said base plate; Said adjustment bolt passes the adjustment threaded hole that is arranged at the base plate side and contacts with push rod, the end face of said push rod and the edge contact of optical device; The said base plate lateral vertical that the adjustment bolt is set is provided with spring, the edge contact of said spring and optical device, and the elastic force direction of spring is in the opposite direction with the precession of adjustment bolt;
Be provided with supporting plate between said base plate and the optical device, said supporting plate is connected with base plate through pin, and moves freely along the pin axis direction; Said base plate is provided with the adjustment volution, and end face of said adjustment volution and supporting plate are fitted;
Be fixed with shell fragment on the said cover plate, said shell fragment below is provided with depression bar, and said depression bar passes setting strut kong on the cover board, and an end contacts with optical device, and an end contacts with shell fragment.
2. the built-in translation stage of device as claimed in claim 1 is characterized in that: said push rod is a T type bar, and said push rod moves in the push rod groove internal linear that is arranged at said base plate side.
3. the built-in translation stage of device as claimed in claim 1 is characterized in that: said spring is wire spring or steel sheet spring.
4. the built-in translation stage of device as claimed in claim 1, it is characterized in that: said cover plate is provided with clamping screw.
5. the built-in translation stage of device as claimed in claim 1 is characterized in that: said base plate side is provided with the side mounting hole, and said base plate is provided with the back mounting hole.
CN2010102730782A 2010-09-06 2010-09-06 Translation stage capable of containing devices Expired - Fee Related CN101950061B (en)

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CN102681366B (en) * 2012-05-28 2014-12-17 上海理工大学 Exposure light path system in production of concave holographic grating and method for adjusting gyration center
CN103576697B (en) * 2012-07-31 2016-03-09 中国科学院微电子研究所 A kind of multi-angle rotary steady arm
CN103213087B (en) * 2013-04-22 2014-12-31 兰州空间技术物理研究所 Small-size combined optical filter splicing fixture
CN103472557B (en) * 2013-09-04 2015-07-15 中国科学院半导体研究所 Cylindrical lens coupling three-dimensional adjusting structure
CN105137559A (en) * 2015-05-25 2015-12-09 黑龙江大学 Optical bench capable of transversely adjusting position of upright column
CN106547067B (en) * 2017-01-25 2017-12-26 龙口科锐激光科技有限公司 Two-dimentional adjustable flexible stand for optical lens
CN107092065A (en) * 2017-06-14 2017-08-25 苏州艾力光电科技有限公司 A kind of optic components
CN107193098A (en) * 2017-06-19 2017-09-22 苏州艾力光电科技有限公司 A kind of removable optics installing mechanism

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