CN113165110A - Laser processing machine with swinging scanner - Google Patents
Laser processing machine with swinging scanner Download PDFInfo
- Publication number
- CN113165110A CN113165110A CN201980081028.3A CN201980081028A CN113165110A CN 113165110 A CN113165110 A CN 113165110A CN 201980081028 A CN201980081028 A CN 201980081028A CN 113165110 A CN113165110 A CN 113165110A
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- China
- Prior art keywords
- laser beam
- axis
- deflection unit
- optical fiber
- workpiece
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- 239000013307 optical fiber Substances 0.000 claims abstract description 22
- 239000000835 fiber Substances 0.000 claims abstract description 18
- 230000003534 oscillatory effect Effects 0.000 claims abstract description 7
- 230000033001 locomotion Effects 0.000 description 19
- 230000010355 oscillation Effects 0.000 description 7
- 238000003466 welding Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
Abstract
A laser processing machine (1) for processing a workpiece (2) by means of a laser beam (3), having: a laser beam generator (4) for generating a laser beam (3); an optical fiber (5) into which the laser beam (3) is coupled; -collimating optics (6) for collimating the laser beam (3) divergently emerging from the optical fiber (5); and a mirror scanner (9) for deflecting the laser beam (3) in one or two dimensions in the direction of the workpiece (2); and a deflection unit (10) according to the invention, which is arranged between the fiber end (7) of the optical fiber (5) and the collimating optics (6) and deflects the beam axis (A) of the divergent laser beam (3) in a one-or two-dimensional oscillatory parallel offset manner, or a deflection unit (20) which deflects the fiber end (7) of the optical fiber (5) in a one-or two-dimensional oscillatory parallel offset manner with respect to the collimating optics (6).
Description
Technical Field
The invention relates to a laser processing machine for processing a workpiece by means of a laser beam, comprising: a laser beam generator for generating a laser beam; an optical fiber into which the laser beam is coupled; collimating optics for collimating the laser beam divergently emitted from the optical fiber; and a mirror scanner for deflecting the laser beam one-dimensionally or two-dimensionally in a direction of the workpiece.
Background
A laser processing machine of this type with a mirror scanner is known, for example, from DE 102013110523B 3.
In laser welding, a laser focus oscillating transversely to the feed direction has proven to be advantageous in applications, in particular when welding thick plates, in which gaps have to be bridged or when overlap welding a larger overall joint cross section is required.
In principle, such a rapid lateral movement ("wobbling") of the laser focus can be solved with conventional mirror scanners, but the scanning systems usually used are too slow for this process, which requires a scanning frequency of at least a few hundred hertz. A mirror scanner cannot move the following mirrors fast enough: the focused beam (in the case of a post-objective scanning system) or the collimated beam (in the case of scanning optics with a flat-field focusing objective) is steered by the mirror to achieve the required scanning frequency of several hundred hertz or several kilohertz. This is due to the relatively small torque achievable with a mirror scanner compared to the inertia of the scan mirror.
In the laser processing machine known from the document DE 102013110523B 3 mentioned at the outset, a high-frequency mirror scanner is arranged in front of the low-frequency mirror scanner, which deflects the collimated laser beam one-dimensionally or two-dimensionally in the direction of the workpiece at an oscillation frequency of at most 400 hz, and which deflects the collimated laser beam or the focused laser beam one-dimensionally or two-dimensionally at an oscillation frequency of between 400 hz and 5000 hz.
From document US 2012/0273472 a1, a laser processing machine is also known which has a scanning unit arranged in front of the actual mirror scanner, which scanning unit is formed by two acousto-optical modulators for the two-dimensional deflection of the laser beam.
Disclosure of Invention
In contrast, the object of the present invention is to provide an alternative for producing a rapid lateral movement ("wobble") of the laser focus in a laser processing machine of the type mentioned at the outset.
According to the invention, this object is achieved by a deflection unit arranged between the fiber end of the optical fiber and the collimating optics, which deflects the beam axis of the divergent laser beam in a parallel offset oscillating one-or two-dimensionally, or by a deflection unit, which deflects the fiber end of the optical fiber in a parallel offset oscillating one-or two-dimensionally relative to the collimating optics.
According to the invention, the rocking motion does not occur in the collimated laser beam immediately before the focusing optics, but in a diverging laser beam immediately (i.e. a few millimetres) after the end of the fibre where the beam diameter is still significantly smaller than the collimated laser beam before the focusing optics. Smaller, lighter components with reduced moments of inertia may be used. In contrast to the use of a mirror scanner in a collimated laser beam, however, the direction of the laser beam cannot be changed in a divergent laser beam after the optical fiber simply by means of a scanning mirror, but rather the beam axis must be offset in parallel in order to achieve a lateral offset of the laser beam in the working focus. However, a parallel offset of the optical axis of the diverging laser beam after the optical fiber leads to a parallel offset of the laser beam after the collimating optics with respect to the original optical axis and thus requires a larger through aperture; this is not a real problem, but must be taken into account when designing the aperture or path between collimation and focusing.
In a first variant of the invention, the oscillating movement is carried out by means of a deflection unit which deflects the beam axis of the divergent laser beam in a one-dimensional or two-dimensional oscillatory parallel offset with respect to the original beam axis; or in a second inventive variant, the rocking motion is carried out by means of a deflection unit which deflects the fiber ends of the optical fibers in a one-or two-dimensional oscillatory parallel deflection relative to the collimating optics. In the latter case, the fiber ends imaged on the workpiece are laterally offset. In both inventive variants, the oscillation of the deflection unit or the deflection unit is greater than the scanning frequency of the mirror scanner arranged behind.
In a preferred embodiment of the first variant of the invention, the deflection unit has, for the purpose of said one-dimensional deflection, a plane-parallel plate which is arranged in the beam path of the divergent laser beam transversely, i.e. obliquely or at right angles to the beam axis, and which is rotated about an axis which runs obliquely, in particular at right angles, to the beam axis of the divergent laser beam. The plane parallel plate may, for example, be mounted on the axis of a conventional scanner motor. The lateral offset which the laser beam undergoes when passing through the plane-parallel plate which is positioned obliquely in the beam is such that an optically parallel offset of the beam axis is achieved which is transferred to the workpiece on the scale of the optics arranged behind. If the plane-parallel plate is set in rotational vibration, the laser beam undergoes a corresponding (one-dimensional) transverse vibrational movement in the region of the laser focus. Since the necessary plane parallel plates can be very small as long as they are positioned near the fiber ends, very high scanning frequencies can be achieved in combination with conventional scanner motors. Advantageously, the axis is mounted so as to be rotatable in azimuth about the beam axis, so that the scanning frequency or the scanning direction of movement on the workpiece can be readjusted, which is advantageous in particular in non-linear welding seams.
In one embodiment, in order to achieve an oscillating two-dimensional parallel offset of the beam axis, the deflection unit can have two plane-parallel plates which are arranged one behind the other and in each case obliquely in the beam path of the divergent laser beam, which in each case oscillate or rotate about axes which are at right angles to one another and which in each case run obliquely, in particular at right angles, to the beam axis of the divergent laser beam. This has the advantage that the rocking motion takes place in a manner similar to a biaxial scanning system with almost the same dynamics on both axes, and the control technique can also be undertaken directly by the biaxial scanner.
In a preferred embodiment of the second variant of the invention, the deflection unit has at least one actuator acting in the deflection direction, to which the fiber end of the optical fiber is fixed. The actuator may be, for example, a piezoelectric actuator. In order to achieve a two-dimensional parallel offset, two actuators are provided, each of which acts at right angles to one another, in order to bring about a two-dimensional parallel offset of the fiber end of the optical fiber relative to the axis of the divergent laser beam.
Drawings
Further advantages and advantageous embodiments of the invention emerge from the description, the claims and the drawings. Likewise, the features mentioned above and also the features listed further above can each be used individually or in any combination in the form of a plurality. The embodiments shown and described are not to be understood as exhaustive enumeration but rather have exemplary character for the description of the invention. The figures show:
fig. 1 shows a laser processing machine according to the invention, comprising a deflection unit arranged in a divergent laser beam for generating an oscillating one-dimensional parallel offset of the beam axis of the divergent laser beam;
fig. 2 shows a detail view of the deflection unit shown in fig. 1;
fig. 3a, 3b show the laser beam deflected by the deflection unit of fig. 2 on the workpiece surface without a feed movement between the laser beam and the workpiece (fig. 3 a); and a laser beam deflected by the deflection unit on the workpiece surface in the presence of a feed motion between the laser beam and the workpiece (fig. 3 b);
fig. 4 shows, in a detail view similar to fig. 2, an oscillating two-dimensional parallel offset deflection unit for generating a beam axis of a divergent laser beam;
fig. 5a, 5b show the laser beam deflected by the deflection unit of fig. 4 on the workpiece surface without a feed movement between the laser beam and the workpiece (fig. 5 a); and a laser beam deflected by the deflection unit on the workpiece surface in the presence of a feed motion between the laser beam and the workpiece (fig. 5 b); and is
Fig. 6 shows, in a detail view similar to fig. 2, an oscillating one-dimensional parallel offset of the beam axis for generating a divergent laser beam.
Detailed Description
A laser processing machine 1, which is shown in perspective in fig. 1, is used for processing a workpiece 2 by means of a laser beam 3 and comprises: a laser beam generator 4 for generating a laser beam 3; a transmission optical fiber 5 into which the laser beam 3 is coupled; a collimating optics 6 for collimating the laser beam 3 divergently emitted from the optical fiber 5; focusing optics 8 for focusing the laser beam 3 in the direction of the workpiece 2; and, for example, a biaxial mirror scanner 9 for deflecting the laser beam 3 two-dimensionally.
The laser processing machine 1 also has a deflection unit 10 arranged between the fiber end 7 of the optical fiber 5 and the collimating optics 6, which deflects the beam axis a of the divergent laser beam 3 in a one-dimensional oscillating parallel offset manner. For this purpose, the deflection unit 10 shown enlarged in fig. 2 has a plane-parallel plate 11 arranged obliquely in the beam path of the divergent laser beam 3, which either oscillates back and forth or rotates completely (double arrow direction 13) about an axis 12 running obliquely (at right angles in fig. 1) to the beam axis a of the divergent laser beam 3. The plane parallel plate 11, which may be made of sapphire, for example, should have as high a refractive index as possible with as low an absorption of the laser beam as possible in order to achieve as high a beam deflection as possible.
The beam offset x of the offset beam axis a' is calculated from the varying angle of incidence a of the beam axis a onto the vibrating or rotating plane parallel plate 11 by the following equation:
x＝d*sin(α)*(1-cos(α)/(SQRT(n2-sin2(. alpha.)))) according to any of the above methods
d: the thickness of the plate is set by the thickness of the plate,
n: refractive index of the plane parallel plate 11.
Due to the rotational oscillation of the plane-parallel plate 11 about the axis 12, the laser beam 3 undergoes a corresponding linear (one-dimensional) transverse oscillating movement in the region of the laser focus, for example on the surface of the workpiece 2. Since the plane parallel plate 11 can be very small due to its positioning near the fiber end 7 (a few millimeters), very high rotational vibration frequencies or scanning frequencies can be achieved in combination with conventional scanner motors.
Fig. 3a shows the laser beam 3 deflected by the deflection unit 10 on the workpiece surface without a feed movement (v ═ 0) between the workpiece 2 and the laser beam 3. In response to the oscillation of the plane parallel plate 11 about the axis 12, the laser beam 3 incident in the Z direction is oscillatingly deflected in the Y direction, i.e., at right angles to the incident direction of the laser beam 3 in one dimension. Fig. 3b shows the laser beam 3 deflected by the deflection unit 10 on the workpiece surface in the case of an additional feed movement v (v > 0) in the X direction between the workpiece 2 and the laser beam 3, which results, for example, in a zigzag path curve 14 of the laser beam 3 on the workpiece surface.
In order to achieve an oscillating two-dimensional parallel offset of the beam axis a, the deflection unit 10 has two plane- parallel plates 11a, 11b arranged one behind the other and each obliquely in the beam path of the diverging laser beam 3, as shown in fig. 4. The plane- parallel plates 11a, 11b oscillate about axes 12a, 12b at right angles to one another, which extend at right angles in fig. 3, in each case at an angle to the beam axis a of the divergent laser beam 3. Due to the rotational oscillation of the plane parallel plates 11a, 11b, the laser beam 3 undergoes a corresponding two-dimensional transverse oscillating movement in the region of the laser focus, i.e. on the surface of the workpiece 2. Since the plane parallel plates 11a, 11b can be very small due to their positioning near the fiber end 7 (a few millimeters), very high rotational vibration frequencies or scanning frequencies can be achieved in combination with conventional scanner motors.
Fig. 5a shows the laser beam 3 deflected by the deflection unit 10 of fig. 4 on the workpiece surface without a feed movement (v ═ 0) between the workpiece 2 and the laser beam 3. In response to the oscillation of the plane parallel plates 11a, 11b about the axes 12a, 12b, the laser beam 3 incident in the Z direction is oscillatingly deflected in the X and Y directions, i.e., at right angles to the incident direction of the laser beam 3 in two dimensions. Fig. 5b shows the laser beam 3 deflected by the deflection unit 10 of fig. 4 on the workpiece surface in the case of an additional feed movement v (v > 0) in the X direction between the workpiece 2 and the laser beam 3, which results, for example, in a loop-shaped path curve of the laser beam 3 on the workpiece surface.
Fig. 6 shows a deflection unit 20 for generating an oscillating one-dimensional parallel deflection of the beam axis a of the divergent laser beam 3 relative to the collimating optics 6. The deflection unit 20 also has an actuator 21 which acts at right angles to the beam axis a in a deflection direction 22 and to which the fiber end 7 of the optical fiber 5 is fixed. The actuator 21, which is realized, for example, as a piezoelectric actuator, oscillates in the direction of displacement 22 and thus brings about an oscillating one-dimensional parallel displacement of the fiber end 7 relative to the collimating optics 6, as a result of which the laser beam 3 performs a corresponding linear (one-dimensional) transverse oscillatory movement in the region of the laser focus, i.e. on the surface of the workpiece 2, i.e. at right angles to the direction of incidence of the laser beam 3 in one dimension.
Claims (5)
1. A laser processing machine (1) for processing a workpiece (2) by means of a laser beam (3), having:
a laser beam generator (4) for generating a laser beam (3);
an optical fiber (5) into which the laser beam (3) is coupled;
-collimating optics (6) for collimating the laser beam (3) divergently emerging from the optical fiber (5); and
a mirror scanner (9) for deflecting the laser beam (3) in one or two dimensions in the direction of the workpiece (2),
characterized in that a deflection unit (10) is provided which is arranged between the fiber end (7) of the optical fiber (5) and the collimating optics (6) and which deflects the beam axis (A) of the divergent laser beam (3) in a one-or two-dimensional oscillatory parallel offset manner, or a deflection unit (20) is provided which deflects the fiber end (7) of the optical fiber (5) in a one-or two-dimensional oscillatory parallel offset manner with respect to the collimating optics (6).
2. Laser processing machine according to claim 1, characterized in that the deflection unit (10) has at least one plane-parallel plate (11) which is arranged transversely to the beam axis (a) in the beam path of the divergent laser beam (3) and which oscillates or rotates about an axis (12) which runs obliquely, in particular at right angles, to the beam axis (a) of the divergent laser beam (3).
3. The device according to claim 2, characterized in that the axis (12) of the plane parallel plate (11) is supported rotatably in azimuth about the beam axis (a).
4. The device according to one of the preceding claims, characterized in that the deflection unit (10) has two plane-parallel plates (11a, 11b) which are arranged one after the other and in each case obliquely in the beam path of the divergent laser beam (3), which in each case oscillate or rotate about axes (12a, 12b) at right angles to one another, which in each case run obliquely, in particular at right angles, to the beam axis (a) of the divergent laser beam (3).
5. Device according to claim 1, characterized in that the deflection unit (20) has at least one actuator (21), in particular a piezoelectric actuator, which acts in the deflection direction (22) and to which the fiber end (7) of the optical fiber (5) is fixed.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102018221203.1 | 2018-12-07 | ||
| DE102018221203.1A DE102018221203A1 (en) | 2018-12-07 | 2018-12-07 | Laser processing machine with a wobble scanner |
| PCT/EP2019/083625 WO2020115110A1 (en) | 2018-12-07 | 2019-12-04 | Laser processing machine having a wobble scanner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113165110A true CN113165110A (en) | 2021-07-23 |
Family
ID=68887397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201980081028.3A Pending CN113165110A (en) | 2018-12-07 | 2019-12-04 | Laser processing machine with swinging scanner |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN113165110A (en) |
| DE (1) | DE102018221203A1 (en) |
| WO (1) | WO2020115110A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115079404A (en) * | 2022-06-01 | 2022-09-20 | 武汉欧毅光学有限公司 | Laser galvanometer scanning system with two-dimensional scanning function |
| CN115889978A (en) * | 2023-03-09 | 2023-04-04 | 深圳市睿达科技有限公司 | Laser welding 3D spiral type light spot control method and device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102022107324B4 (en) | 2022-03-29 | 2024-03-28 | Precitec Gmbh & Co. Kg | Laser processing head with deflection devices |
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| US5247174A (en) * | 1990-05-07 | 1993-09-21 | Scitex Corporation Ltd. | Laser scanning apparatus having a scanning beam and a reference beam |
| DE102010049460A1 (en) * | 2010-09-13 | 2012-03-15 | Laser- Und Medizin-Technologie Gmbh, Berlin | trepanning |
| DE102013110523A1 (en) * | 2013-09-24 | 2015-03-26 | Scansonic Mi Gmbh | Apparatus and method for joining workpieces by means of a laser beam |
| CN107000122A (en) * | 2014-10-20 | 2017-08-01 | 百超激光股份公司 | Processing head and Laser Processing machinery for laser machining machinery |
| DE102017201495A1 (en) * | 2017-01-31 | 2018-08-02 | Robert Bosch Gmbh | Laser welding method for producing a weld on a surface of a material arrangement; Laser welding device |
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| DD243123A1 (en) * | 1985-12-02 | 1987-02-18 | Zeiss Jena Veb Carl | ARRANGEMENT FOR INPUTING A LASER BEAM INTO A GLASS FIBER |
| KR102253017B1 (en) | 2010-10-22 | 2021-05-20 | 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 | Laser processing systems and methods for beam dithering and skiving |
| CN103203541B (en) * | 2013-02-04 | 2015-05-13 | 张立国 | Laser machining device |
| WO2017130351A1 (en) * | 2016-01-28 | 2017-08-03 | オリンパス株式会社 | Optical fiber scanning device, optical scanning endoscope, and endoscope system |
| JP6484204B2 (en) * | 2016-09-09 | 2019-03-13 | ファナック株式会社 | Galvano scanner |
| FR3056129B1 (en) * | 2016-09-20 | 2019-07-19 | Renault S.A.S | METHOD FOR GUIDING A ROTARY DISPLACEMENT LASER BEAM, AND ASSOCIATED GUIDE DEVICE |
| CN107138862B (en) * | 2017-06-20 | 2023-10-20 | 深圳市韵腾激光科技有限公司 | Laser rotary cutting device and method |
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2018
- 2018-12-07 DE DE102018221203.1A patent/DE102018221203A1/en active Pending
-
2019
- 2019-12-04 CN CN201980081028.3A patent/CN113165110A/en active Pending
- 2019-12-04 WO PCT/EP2019/083625 patent/WO2020115110A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5247174A (en) * | 1990-05-07 | 1993-09-21 | Scitex Corporation Ltd. | Laser scanning apparatus having a scanning beam and a reference beam |
| DE102010049460A1 (en) * | 2010-09-13 | 2012-03-15 | Laser- Und Medizin-Technologie Gmbh, Berlin | trepanning |
| DE102013110523A1 (en) * | 2013-09-24 | 2015-03-26 | Scansonic Mi Gmbh | Apparatus and method for joining workpieces by means of a laser beam |
| CN107000122A (en) * | 2014-10-20 | 2017-08-01 | 百超激光股份公司 | Processing head and Laser Processing machinery for laser machining machinery |
| DE102017201495A1 (en) * | 2017-01-31 | 2018-08-02 | Robert Bosch Gmbh | Laser welding method for producing a weld on a surface of a material arrangement; Laser welding device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115079404A (en) * | 2022-06-01 | 2022-09-20 | 武汉欧毅光学有限公司 | Laser galvanometer scanning system with two-dimensional scanning function |
| CN115079404B (en) * | 2022-06-01 | 2024-04-02 | 武汉欧毅光学有限公司 | Laser galvanometer scanning system with two-dimensional scanning function |
| CN115889978A (en) * | 2023-03-09 | 2023-04-04 | 深圳市睿达科技有限公司 | Laser welding 3D spiral type light spot control method and device |
| CN115889978B (en) * | 2023-03-09 | 2023-05-09 | 深圳市睿达科技有限公司 | Laser welding 3D spiral light spot control method and device |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2020115110A1 (en) | 2020-06-11 |
| DE102018221203A1 (en) | 2020-06-10 |
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Application publication date: 20210723 |