CN113161261A - Biological etching equipment and biological etching method - Google Patents

Biological etching equipment and biological etching method Download PDF

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Publication number
CN113161261A
CN113161261A CN202110220152.2A CN202110220152A CN113161261A CN 113161261 A CN113161261 A CN 113161261A CN 202110220152 A CN202110220152 A CN 202110220152A CN 113161261 A CN113161261 A CN 113161261A
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China
Prior art keywords
etching
processed
box body
substrate
culture medium
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CN202110220152.2A
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Chinese (zh)
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CN113161261B (en
Inventor
蓝梓淇
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Guangdong Green Exhibition Technology Co ltd
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Guangdong Green Exhibition Technology Co ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00523—Etching material
    • B81C1/00547—Etching processes not provided for in groups B81C1/00531 - B81C1/00539
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/0146—Processes for removing material not provided for in B81C2201/0129 - B81C2201/0145

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)

Abstract

The invention provides a biological etching device and a biological etching method, which comprise the following steps: the base is installed on the base: the etching box body is provided with a side opening capable of being placed into the substrate to be processed; a culture medium for culturing the etching flora is arranged at the inner bottom of the etching box body, and a movable lifting appliance is arranged at the inner top and can suspend the matrix to be processed and move the matrix to be processed to a preset position; the feeding device is movably arranged on the base and can support the matrix to be processed through vertical movement and horizontal movement and send or move the matrix to be processed into or out of the etching box body through the side opening; and the control device is electrically connected with the etching box body and the feeding device and is used for controlling the movement of the feeding device and controlling the movement of the movable lifting appliance. The process flow is simplified, and the process is simple and easy to operate; the biological etching has high etching efficiency, and the etching precision can meet the processing requirement.

Description

Biological etching equipment and biological etching method
Technical Field
The invention relates to the technical field of etching, in particular to a biological etching device and a biological etching method.
Background
With the rapid development of scientific technology, etching technology is widely applied in various fields, for example: in the fields of micro-machining, semiconductor manufacturing and the like, in general, etching is to cover a mask on the surface of a substrate to be processed, the mask covers the surface which does not need to be processed, and the mask reacts with the surface which is not covered by the mask through dry etching or wet etching to achieve the effects of etching and processing. In the traditional wet etching, a corrosive chemical reagent is usually adopted to remove materials on the surface of a processing body, and then the processing body needs to be cleaned to remove the corrosive chemical reagent, so that the use safety needs to be paid attention to in the operation process, if the cleaning is incomplete, the etching effect is directly influenced, higher requirements on construction protection and a cleaning process are provided, and the process flow is more complex; in conventional dry etching, ion etching is generally used, including: the etching process includes ion milling etching, plasma etching, reactive ion etching and the like, generally, the etching precision is not high, and the etching efficiency is low, so that an etching device which has a simple process, can achieve high etching precision and high etching efficiency, and an etching process method which is matched with the etching device are needed for etching.
Disclosure of Invention
The invention provides a biological etching device and a biological etching method, which simplify the process flow and have simple and easy operation; the biological etching has high etching efficiency, and the etching precision can meet the processing requirement.
The biological etching equipment provided by the invention comprises a base, wherein the base is provided with:
the etching box body is provided with a side opening into which a substrate to be processed can be placed; a culture medium for culturing etching flora is arranged at the inner bottom of the etching box body, and a movable lifting appliance is arranged at the inner top of the etching box body and can suspend the matrix to be processed and move the matrix to be processed to a preset position;
the feeding device is movably arranged on the base and can lift the to-be-processed base body through vertical movement and horizontal movement and send the to-be-processed base body into or move the to-be-processed base body out of the etching box body through the side opening;
and the control device is electrically connected with the etching box body and the feeding device and is used for controlling the movement of the feeding device and controlling the movement of the movable lifting appliance.
Preferably, the mobile spreader comprises:
a telescoping member capable of translating along the interior top of the etch chamber;
the translation mechanism is fixed at the top in the etching box body and can provide translation power for the telescopic piece;
the sucking disc is arranged at the free end of the telescopic piece, the top of the sucking disc is provided with a suction hole, and the sucking disc is used for adsorbing and suspending the substrate to be processed; and
and the suction assembly is communicated with the suction hole of the sucker and is used for providing adsorption force for the sucker.
Preferably, the telescopic piece is of a telescopic cylinder rod structure; the suction assembly comprises a closed barrel body and a piston arranged in the barrel body, the barrel body is fixed with the sucker, the inner cavity of the barrel body is communicated with the suction hole of the sucker, and the sucker can be sucked and suspended on the base body to be processed by moving the piston to extract air between the sucker and the base body to be processed.
Preferably, the feeding device comprises:
a post translatable along the base;
the feeding mechanism is fixed on the base and used for providing translation power for the upright post;
the supporting piece is fixed at the top end of the upright post and can support the base body to be processed;
and the motor screw and nut structure is arranged along the upright column and is used for providing lifting power for the supporting piece.
Preferably, the base is further provided with: the rotary disc and the rotary motor for providing power for the rotary disc;
the etching box body is arranged on the rotating disc, and the rotating disc can drive the etching box body to rotate.
Preferably, a vibrator is further mounted on the rotating disc.
Preferably, the etching box is symmetrically provided with: two brackets;
the two brackets are used for supporting the to-be-processed substrate from two sides, and the two brackets can vertically move along the inner side wall of the etching box body so as to drive the to-be-processed substrate arranged on the brackets to move to a position where the to-be-processed substrate can be contacted with the culture medium.
Preferably, the etching box body is further provided with:
the temperature detection device is used for detecting the temperature value in the etching box body;
and the temperature regulating and controlling device is used for regulating the temperature value in the etching box body.
Preferably, the etching box body is further provided with:
the pH value detection device is arranged in the culture medium and is used for detecting the pH value in the culture medium;
and the pH value regulating device is used for regulating the pH value in the culture medium.
The invention also provides a method for carrying out biological etching by using the biological etching equipment, which comprises the following steps:
completing mask covering on a to-be-processed substrate to be etched;
putting a strain into a culture medium in the etching box body, sealing the etching box body for flora culture, and keeping the pH value and the temperature value in the culture medium in accordance with preset culture conditions in the culture process;
after the flora in the culture medium meets the etching requirement, moving a to-be-processed matrix to be etched into the etching box body from the side opening of the etching box body through the feeding device;
moving the to-be-processed substrate to be etched to a position capable of contacting with the culture medium through the movable lifting appliance to perform etching operation;
when the preset reaction time is reached, suspending the etched substrate to be processed away from the culture medium by the movable lifting appliance;
and moving the etched matrix to be processed out of the etching box body through the feeding device.
According to the biological etching equipment and the biological etching method provided by the invention, the etching box body is used for accommodating the culture medium for culturing the etching flora, the matrix to be processed, which needs to be etched, is placed in the etching box body through the feeding device, the matrix to be processed is moved to the effective position capable of reacting with the etching flora through the movable lifting appliance, the etching flora reacts with the matrix to be processed to perform etching processing, the actions of the feeding device and the movable lifting appliance can be controlled through the control device, corrosive etching liquid does not need to be used, the matrix to be processed does not need to be cleaned after etching, the process flow is simplified, and the process is simple and easy to operate; the biological etching has high etching efficiency, and the etching precision can meet the processing requirement.
Additional features and advantages of embodiments of the invention will be set forth in the detailed description which follows.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the embodiments of the invention without limiting the embodiments of the invention. In the drawings:
FIG. 1 is a schematic structural view of a bio-etching apparatus according to an embodiment of the present invention in a state where a substrate to be processed is moved;
fig. 2 is a schematic structural diagram of a bioerodible device for bioerodible a substrate to be processed according to an embodiment of the invention.
Description of the reference numerals
1 etching box 101 culture medium
102 moving spreader 103 side opening
104 bracket 105 temperature detection device
106 PH value detection device 2 feeding device
3 rotating disk 4 base
5 base body to be processed
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating embodiments of the invention, are given by way of illustration and explanation only, not limitation.
The technical solution in the embodiments of the present invention is described in detail below with reference to the accompanying drawings.
In order to solve the problems of complex etching process flow, low etching precision and low etching efficiency, the invention provides biological etching equipment, which comprises a base 4, wherein the base 4 is provided with:
the method comprises the following steps of (1) etching a box body 1, wherein the etching box body 1 is provided with a side opening 103 capable of being placed into a substrate 5 to be processed; a culture medium 101 for culturing an etching flora is arranged at the inner bottom of the etching box body 1, a movable lifting appliance 102 is arranged at the inner top, and the movable lifting appliance 102 can suspend the substrate 5 to be processed and move the substrate 5 to be processed to a preset position;
the feeding device 2 is movably arranged on the base 4, and the feeding device 2 can support the to-be-processed substrate 5 through vertical movement and horizontal movement and send or remove the to-be-processed substrate 5 into or out of the etching box body 1 through the side opening 103;
and the control device is electrically connected with the etching box body 1 and the feeding device 2 and is used for controlling the movement of the feeding device 2 and controlling the movement of the movable lifting appliance 102.
Biological etching is a novel etching processing method, and the processing principle is that the biochemical reaction in the microbial metabolism process is utilized to remove redundant materials on a substrate to be processed so as to process a tiny structure, such as: thiobacillus ferrooxidans can be used as an etching bacterium, thiobacillus ferrooxidans is an energy-saving autotrophic bacterium, and can continuously react with a copper substrate to be processed in the process of metabolism of the thiobacillus ferrooxidans, so that the aim of etching processing is fulfilled, and the thiobacillus ferrooxidans can be used for processing micro mechanical parts or chips in the semiconductor industry and the like.
According to the technical scheme of the invention, the etching box body 1 is used for containing the culture medium 101 for culturing the etching flora, the matrix 5 to be processed, which needs to be etched, is placed in the etching box body 1 through the feeding device 2, the matrix 5 to be processed is moved to an effective position capable of reacting with the etching flora through the movable lifting appliance 102, the etching flora reacts with the matrix 5 to be processed to perform etching processing, the actions of the feeding device 2 and the movable lifting appliance 102 can be controlled through the control device, corrosive etching liquid does not need to be used, the matrix 5 to be processed does not need to be cleaned after etching, the process flow is simplified, and the process is simple and easy to operate; the biological etching has high etching efficiency, and the etching precision can meet the processing requirement.
The etching box body 1 is provided with a side opening 103 capable of being placed into the substrate 5 to be processed, so that the exposed area of the inner space of the etching box body 1 is reduced as much as possible, and the environment suitable for the existence of etching flora is always maintained in the etching box body 1.
In order to ensure the sealing performance of the internal environment of the etching box body 1 when the to-be-processed base body 5 enters and exits, the position of the side opening 103 is provided with a baffle capable of being operated to open and close, the baffle can be a rectangular baffle and is arranged at the lower edge of the side opening 103, the to-be-processed base body 5 is required to be placed or taken out, the baffle is operated to move downwards to expose the side opening 103, and after the placing or taking-out operation is completed, the baffle is operated to move upwards to shield the side opening 103.
The opening area of the side opening 103 and the size of the baffle are determined according to the volume of the substrate 5 to be processed.
The culture medium 101 for culturing the etching flora is arranged at the inner bottom of the etching box body 1, specifically, the culture medium 101 can be a Leton culture medium, the components of the culture medium are ammonium sulfate, dipotassium hydrogen phosphate, 7-water magnesium sulfate, potassium chloride, calcium nitrate, 7-water ferrous sulfate and the like, the culture medium can be used for culturing Thiobacillus ferrooxidans as etching bacteria, and the mass of each component is selected according to the capacity and the reaction condition of the culture medium 101.
A movable lifting appliance 102 is arranged at the inner top of the etching box body 1, and the movable lifting appliance 102 can suspend the substrate 5 to be processed and move the substrate 5 to be processed to a preset position; the substrate 5 to be processed can be moved longitudinally and transversely under the condition that the etching box body 1 is in a closed state, so that the substrate 5 to be processed can be moved to an effective etching range, and the etching processing precision and the etching processing efficiency can be improved.
According to one embodiment of the invention, the mobile spreader 102 comprises: a telescopic part capable of translating along the inner top of the etching box body 1; and the translation mechanism is fixed at the top in the etching box body 1 and can provide translation power for the telescopic piece. Specifically, translation mechanism can select for use belt motor translation mechanism or screw nut translation mechanism, for example screw nut translation mechanism, and the screw rod is fixed with the driving motor hookup the interior top of sculpture box 1, nut thread cover is established on the screw rod, and the nut is fixed with the one end of extensible member, and the motor during operation screw rod is rotatory, and the nut drives extensible member and together removes along the screw rod, and the motor corotation or reversal are in order to change the direction of rotation of screw rod to change the translation direction of nut and extensible member, convenient operation is reliable.
The sucking disc is arranged at the free end of the telescopic piece, the top of the sucking disc is provided with a suction hole, and the sucking disc is used for sucking and suspending the substrate 5 to be processed; and the suction assembly is communicated with the suction hole of the sucker and is used for providing suction force for the sucker.
According to an embodiment of the invention, the suction assembly comprises a closed barrel body and a piston arranged in the barrel body, the barrel body is fixed with the sucker, an inner cavity of the barrel body is communicated with the suction hole of the sucker, air between the sucker and the substrate 5 to be processed is extracted through the movement of the piston, the sucker can adsorb and suspend the substrate 5 to be processed, and gas in a rod cavity of the piston in the barrel body can be extracted through a pneumatic pump, so that the piston moves towards one side of the rod cavity.
The telescopic piece is of a telescopic cylinder rod structure, and the rod part extends out or retracts under the action of hydraulic pressure or air pressure.
And the feeding device 2 is movably arranged on the base 4, and the feeding device 2 can support the to-be-processed base body 5 through vertical movement and horizontal movement and send or move the to-be-processed base body 5 into or out of the etching box body 1 through the side opening 103.
Specifically, the feeding device 2 includes: a column capable of translating along the base 4; the feeding mechanism is fixed on the base 4 and used for providing translation power for the upright post;
the supporting piece is fixed at the top end of the upright post and can support the base body 5 to be processed; and the motor screw and nut structure is arranged along the upright column and is used for providing lifting power for the supporting piece.
Feed mechanism can select for use the gear chain structural installation to be in the base 4, the gear rotates under the drive of feed motor, the chain removes under the drive of gear, the bottom of stand with the chain is fixed, the stand can carry out translational motion under the drive of chain. In the motor screw nut structure, the screw rod is fixed on the surface of the stand column, the nut is sleeved on the screw rod in a threaded manner, the screw rod is fixed with the support piece, the screw rod motor works, the screw rod rotates, and the nut can drive the support piece to move along the screw rod together, so that the support piece can move along the stand column in a lifting manner.
And the control device is electrically connected with the etching box body 1 and the feeding device 2 and is used for controlling the movement of the feeding device 2 and controlling the movement of the movable lifting appliance 102. Specifically, the control device can control the feed motor and the screw motor of the feeding device 2 to work, and control the moving parts in the etching box 1 to work, for example, can control the horizontal movement, the vertical telescopic movement and the dish washing adsorption of the mobile lifting appliance 102.
Since the etching chamber 1 can promote the biological reaction in the rotating state during the biological etching process, according to an embodiment of the present invention, the base 4 is further provided with: a rotating disk 3 and a rotating motor for powering the rotating disk 3; the rotating motor is electrically connected with the control device, and the control device can control the starting and stopping of the rotating motor and control the rotating speed. The etching box body 1 is arranged on the rotating disc 3, and the rotating disc 3 can drive the etching box body 1 to rotate so as to promote the biological reaction in the etching box body 1 to be carried out and improve the etching efficiency.
During the biological etching process, the etching box 1 maintains a certain vibration rate to promote the biochemical reaction, so according to an embodiment of the present invention, the rotating disc 3 is further provided with a vibrator. The vibrator is electrically connected with the control device, the control device can control the starting and stopping of the vibrator and control the vibration rate, so that the biological reaction in the etching box body 1 is promoted, and the etching efficiency is improved.
According to an embodiment of the present invention, the etching chamber 1 is symmetrically provided with: two brackets 104; the two brackets 104 are used for supporting the to-be-processed substrate 5 from two sides, and the two brackets 104 can vertically move along the inner side wall of the etching box body 1 to drive the to-be-processed substrate 5 arranged on the brackets 104 to move to an effective position where the to-be-processed substrate 5 can contact with the culture medium 101, so that the to-be-processed substrate 5 is ensured to enter an effective biological etching range, and an etching effect is ensured.
The two brackets 104 are provided with the clamping devices, the two ends of the to-be-processed base body 5 can be tightly pressed, the two brackets 104 are provided with the rotating motors, the rotating motors can drive the to-be-processed base body 5 to rotate, etching processing is carried out on different processing surfaces, operation is convenient, and etching processing efficiency is improved.
Since the growth of the etching bacteria requires a certain temperature condition to be maintained in addition to the composition of the culture medium, according to an embodiment of the present invention, the etching chamber 1 further includes:
the temperature detection device 105 is used for detecting the temperature value in the etching box body 1;
and the temperature regulating device is used for regulating the temperature value in the etching box body 1.
Wherein, temperature-detecting device 105 with temperature regulation and control device with the controlling means electric connection, controlling means can acquire the temperature value that temperature-detecting device 105 detected, according to the temperature value control temperature regulation and control device carries out heating or refrigerated temperature regulation work. The temperature regulation and control device comprises a heater and a refrigerator, and is similar to the working principle of an air conditioner so as to ensure that the temperature in the etching box body 1 is within a preset range.
In the growth process of the etching bacteria, the pH value (pH value) in the culture medium 101 needs to be controlled, and different pH values can cause the charge change of the cell membrane of the etching bacteria, thereby influencing the absorption of the microorganisms on nutrient substances and influencing the activity of enzymes in the metabolic process, according to one embodiment of the invention, the etching box body 1 is also internally provided with:
a pH value detection device 106, disposed in the culture medium 101, for detecting a pH value in the culture medium 101;
and the pH value regulating device is used for regulating the pH value in the culture medium 101.
The PH value detection device 106 and the PH value regulation device are electrically connected with the control device, the control device can acquire a PH value detected by the PH value detection device 106, and the PH value regulation device is controlled to regulate the PH value according to the PH value. The pH value regulating device contains an acidic and alkaline regulator, and can be correspondingly added according to the pH value so as to change the pH value in the culture medium 101 and regulate the pH value to be within a preset range.
In order to ensure the etching precision, a plurality of etching depth detection devices are arranged in different directions in the etching box body 1 and used for detecting whether the etching at different angles reaches the preset depth. The etching depth detection device can select a distance sensor, so that the detection precision of etching is improved, and the etching precision is further ensured.
The invention also provides a method for carrying out biological etching by using the biological etching equipment, which comprises the following steps:
finishing mask covering on a to-be-processed substrate 5 to be etched;
putting a strain into a culture medium 101 in the etching box body 1, sealing the etching box body 1 for flora culture, and keeping the pH value and the temperature value in the culture medium 101 in accordance with preset culture conditions in the culture process;
after the flora in the culture medium 101 meets the etching requirement, moving a to-be-processed substrate 5 to be etched into the etching box body 1 from the side opening 103 of the etching box body 1 through the feeding device 2 (as shown in fig. 1);
moving the substrate 5 to be etched to a position capable of contacting with the culture medium 101 by the moving hanger 102 to perform an etching operation (as shown in fig. 2);
when the preset reaction time is reached, suspending the etched substrate 5 to be processed away from the culture medium 101 by the mobile lifting appliance 102;
and removing the substrate 5 to be processed after the etching from the etching box body 1 through the feeding device 2.
The invention aims to provide a biological etching device and a biological etching method.A culture medium 101 for culturing etching flora is contained in an etching box body 1, a to-be-processed substrate 5 to be etched is placed in the etching box body 1 through a feeding device 2, the to-be-processed substrate 5 is moved to an effective position capable of reacting with the etching flora through a movable lifting appliance 102, the etching flora reacts with the to-be-processed substrate 5 to be etched, the actions of the feeding device 2 and the movable lifting appliance 102 can be controlled through a control device, corrosive etching liquid is not needed, the to-be-processed substrate 5 is not needed to be cleaned after etching, the process flow is simplified, and the process is simple and easy to operate; the biological etching has high etching efficiency, and the etching precision can meet the processing requirement.
Although the embodiments of the present invention have been described in detail with reference to the accompanying drawings, the embodiments of the present invention are not limited to the details of the above embodiments, and various simple modifications can be made to the technical solutions of the embodiments of the present invention within the technical idea of the embodiments of the present invention, and the simple modifications all belong to the protection scope of the embodiments of the present invention.
It should be noted that the various features described in the above embodiments may be combined in any suitable manner without departing from the scope of the invention. In order to avoid unnecessary repetition, the embodiments of the present invention do not describe every possible combination.
In addition, any combination of various different implementation manners of the embodiments of the present invention is also possible, and the embodiments of the present invention should be considered as disclosed in the embodiments of the present invention as long as the combination does not depart from the spirit of the embodiments of the present invention.

Claims (10)

1. The utility model provides a biological etching equipment, includes base (4), its characterized in that, install on base (4):
the device comprises an etching box body (1), wherein the etching box body (1) is provided with a side opening (103) capable of being placed into a substrate (5) to be processed; a culture medium (101) for culturing etching flora is arranged at the inner bottom of the etching box body (1), a movable lifting appliance (102) is arranged at the inner top, and the movable lifting appliance (102) can suspend the substrate to be processed (5) and move the substrate to be processed (5) to a preset position;
the feeding device (2) is movably arranged on the base (4), and the feeding device (2) can lift the to-be-processed base body (5) through vertical movement and horizontal movement and send the to-be-processed base body (5) into or move the to-be-processed base body out of the etching box body (1) through the side opening (103);
and the control device is electrically connected with the etching box body (1) and the feeding device (2) and is used for controlling the movement of the feeding device (2) and controlling the movement of the movable lifting appliance (102).
2. The bioerodible apparatus of claim 1 wherein the mobile spreader (102) comprises:
a telescopic part capable of translating along the inner top of the etching box body (1);
the translation mechanism is fixed at the inner top of the etching box body (1) and can provide translation power for the telescopic piece;
the sucking disc is arranged at the free end of the telescopic piece, the top of the sucking disc is provided with a suction hole, and the sucking disc is used for sucking and suspending the substrate (5) to be processed; and
and the suction assembly is communicated with the suction hole of the sucker and is used for providing adsorption force for the sucker.
3. The bioerodible device of claim 2 wherein the telescoping member is a telescoping cylinder rod structure; the suction assembly comprises a closed barrel body and a piston arranged in the barrel body, the barrel body is fixed with the sucker, the inner cavity of the barrel body is communicated with the suction hole of the sucker, and the air between the sucker and the base body (5) to be processed is extracted through the movement of the piston, so that the sucker can adsorb and suspend the base body (5) to be processed.
4. Bioerodible device according to claim 1, wherein the feeding means (2) comprises:
-a column capable of translating along said base (4);
the feeding mechanism is fixed on the base (4) and used for providing translation power for the upright post;
the supporting piece is fixed at the top end of the upright post and can support the base body (5) to be processed;
and the motor screw and nut structure is arranged along the upright column and is used for providing lifting power for the supporting piece.
5. Bioerodible device according to claim 1, wherein on said base (4) there are further mounted: a rotating disc (3) and a rotating motor for providing power for the rotating disc (3);
the etching box body (1) is arranged on the rotating disc (3), and the rotating disc (3) can drive the etching box body (1) to rotate.
6. Bioerodible device according to claim 5, wherein a vibrator is further mounted on the rotating disc (3).
7. The biological etching equipment according to claim 1, wherein the etching box body (1) is symmetrically provided with: two brackets (104);
the two brackets (104) are used for supporting the substrate (5) to be processed from two sides, and the two brackets (104) can vertically move along the inner side wall of the etching box body (1) so as to drive the substrate (5) to be processed placed on the brackets (104) to move to a position where the substrate can be contacted with the culture medium (101).
8. The bioerodible device of claim 1 wherein the etching chamber (1) further comprises:
the temperature detection device (105) is used for detecting the temperature value in the etching box body (1);
and the temperature regulating device is used for regulating the temperature value in the etching box body (1).
9. The bioerodible device of claim 1 wherein the etching chamber (1) further comprises:
the pH value detection device (106) is arranged in the culture medium (101) and is used for detecting the pH value in the culture medium (101);
and the pH value regulating device is used for regulating the pH value in the culture medium (101).
10. A method of bioerosion using the bioerosion device of any one of claims 1-9, comprising:
finishing mask covering on a to-be-processed substrate (5) to be etched;
putting a strain into a culture medium (101) in the etching box body (1), sealing the etching box body (1) for flora culture, and keeping the pH value and the temperature value in the culture medium (101) to accord with preset culture conditions in the culture process;
after the flora in the culture medium (101) meets the etching requirement, moving a to-be-processed substrate (5) to be etched into the etching box body (1) from the side opening (103) of the etching box body (1) through the feeding device (2);
moving a substrate (5) to be etched to a position where it can contact the culture medium (101) by the moving hanger (102) to perform an etching operation;
suspending the etched substrate (5) to be processed away from the culture medium (101) by the mobile lifting appliance (102) until a predetermined reaction time is reached;
and the substrate (5) to be processed after the etching is finished is removed from the etching box body (1) through the feeding device (2).
CN202110220152.2A 2020-12-08 2021-02-26 Biological etching equipment and biological etching method Active CN113161261B (en)

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Citations (5)

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Publication number Priority date Publication date Assignee Title
CN1696347A (en) * 2004-05-14 2005-11-16 中国科学院理化技术研究所 Controllable microbial etching device
CN102061478A (en) * 2010-11-26 2011-05-18 北京理工大学 Biological corrosion removal method for machined burrs of micro metal parts
CN103021937A (en) * 2013-01-09 2013-04-03 江苏物联网研究发展中心 Device and method for overburden electroplating copper layer on chemical corrosion TSV (through silicon via) surface
US20170152603A1 (en) * 2015-11-30 2017-06-01 Industry-Academic Cooperation Foundation, Yeungnam University Method for surface treatment of metals using bacteria
CN111180351A (en) * 2018-11-12 2020-05-19 长鑫存储技术有限公司 Rotary wet etching equipment and method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1696347A (en) * 2004-05-14 2005-11-16 中国科学院理化技术研究所 Controllable microbial etching device
CN102061478A (en) * 2010-11-26 2011-05-18 北京理工大学 Biological corrosion removal method for machined burrs of micro metal parts
CN103021937A (en) * 2013-01-09 2013-04-03 江苏物联网研究发展中心 Device and method for overburden electroplating copper layer on chemical corrosion TSV (through silicon via) surface
US20170152603A1 (en) * 2015-11-30 2017-06-01 Industry-Academic Cooperation Foundation, Yeungnam University Method for surface treatment of metals using bacteria
CN111180351A (en) * 2018-11-12 2020-05-19 长鑫存储技术有限公司 Rotary wet etching equipment and method

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