CN113161243A - Surface chip mounting process - Google Patents

Surface chip mounting process Download PDF

Info

Publication number
CN113161243A
CN113161243A CN202110403765.XA CN202110403765A CN113161243A CN 113161243 A CN113161243 A CN 113161243A CN 202110403765 A CN202110403765 A CN 202110403765A CN 113161243 A CN113161243 A CN 113161243A
Authority
CN
China
Prior art keywords
flexible film
wafer
chip
solder balls
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110403765.XA
Other languages
Chinese (zh)
Inventor
冯光建
黄雷
郭西
顾毛毛
高群
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Jimaike Microelectronics Co Ltd
Original Assignee
Zhejiang Jimaike Microelectronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang Jimaike Microelectronics Co Ltd filed Critical Zhejiang Jimaike Microelectronics Co Ltd
Priority to CN202110403765.XA priority Critical patent/CN113161243A/en
Publication of CN113161243A publication Critical patent/CN113161243A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • H01L24/11Manufacturing methods
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/11Manufacturing methods
    • H01L2224/111Manufacture and pre-treatment of the bump connector preform
    • H01L2224/1111Shaping

Abstract

The invention provides a surface chip mounting process, which comprises the following steps: step S1, providing a wafer, preparing a first bonding pad on the surface of the wafer, implanting solder balls with the same height into the first bonding pad on the surface of the wafer, welding to obtain a wafer with the surface implanted with the solder balls, and then cutting the wafer to obtain a chip with the solder balls with the same height; step S2, providing a flexible film, manufacturing a second pad on the surface of the flexible film, and arranging an isolation layer between the second pad and the flexible film; step S3, a chip with solder balls is attached to the surface of the flexible film in a surface mounting mode, the solder balls on the chip are welded with a second bonding pad on the surface of the flexible film through reflow soldering, and the flexible film is combined with a mold in the reflow soldering process to obtain the solder ball distribution with the same surface appearance as the mold; and step S4, separating the solder ball with the second pad from the flexible film to obtain a chip with the height of the solder ball on the surface matched with the curved surface of the base. The invention reduces the problem of desoldering.

Description

Surface chip mounting process
Technical Field
The invention relates to the technical field of semiconductors, in particular to a surface chip mounting process.
Background
Planar die attach technology, which enables a die with BGA solder balls to be interconnected to a substrate (e.g., a PCB or a substrate) having pads on a surface thereof, requires that the BGA solder balls be planar within a single plane, has a small height difference, and also requires that the pads of the substrate be planar within a single plane.
However, with the application of special areas, especially the great popularization of artificial wearable products, more and more electronic modules are converted from a plane to a curved surface, which requires that the chip soldering technology is converted from a plane to a curved surface, especially when the base is a curved surface before soldering, only a part of the flat BGA solder balls on the surface of the planar chip can be soldered on the soldering pad, and other areas can be detached due to insufficient distance.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a surface chip mounting process, which can obtain a chip with the height of a surface solder ball matched with the curved surface of a base. In order to realize the technical purpose, the invention adopts the technical scheme that:
the embodiment of the invention provides a surface chip mounting process, which comprises the following steps:
step S1, providing a wafer, preparing a first bonding pad on the surface of the wafer, implanting solder balls with the same height into the first bonding pad on the surface of the wafer, welding to obtain a wafer with the surface implanted with the solder balls, and then cutting the wafer to obtain a chip with the solder balls with the same height;
step S2, providing a flexible film, manufacturing a second pad on the surface of the flexible film, and arranging an isolation layer between the second pad and the flexible film;
step S3, a chip with solder balls is attached to the surface of the flexible film in a surface mounting mode, the solder balls on the chip are welded with a second bonding pad on the surface of the flexible film through reflow soldering, and the flexible film is combined with a mold in the reflow soldering process to obtain the solder ball distribution with the same surface appearance as the mold;
and step S4, separating the solder ball with the second pad from the flexible film to obtain a chip with the height of the solder ball on the surface matched with the curved surface of the base.
Further, in step S1, before the solder balls are implanted into the first pads on the surface of the wafer, flux is sprayed.
Further, the soldering in step S1 employs reflow soldering.
Further, the flexible film is deformed by the jig during the reflow process of step S3.
Further, in step S4, the second pads are separated from the flexible film by UV light or heat.
The invention has the advantages that: the invention uses an intermediate film to apply stress to the BGA solder ball at a relatively low temperature, so that the solder ball is deformed after being melted to form a welding plane consistent with the curved surface of the base; therefore, when the chip is welded, the BGA solder balls can be in contact with the curved-surface bonding pads of the base of the electronic product, and the problem of desoldering is reduced.
Drawings
FIG. 1 is a schematic view illustrating a wafer and a flexible film welded together according to an embodiment of the present invention.
Fig. 2 is a schematic diagram illustrating deformation of a flexible film passing jig according to an embodiment of the present invention.
FIG. 3 is a schematic diagram of solder ball distribution with the same surface topography as the mold in an embodiment of the present invention.
Fig. 4 is a schematic view illustrating a chip and a base curved surface welding in an embodiment of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Moreover, repeated reference numerals or designations may be used in various embodiments. These iterations are merely for simplicity and clarity of describing the present invention, and are not intended to represent any correlation between the various embodiments and/or structures discussed.
Reference numerals in the various embodiments of the invention with respect to steps are merely for convenience of description and are not necessarily associated in a substantially sequential manner. Different steps in each embodiment can be combined in different sequences, so that the purpose of the invention is achieved.
The embodiment of the invention provides a surface chip mounting process, which comprises the following steps:
step S1, providing a wafer 1, preparing a first bonding pad 101 on the surface of the wafer 1, implanting solder balls 2 with the same height on the first bonding pad 101 on the surface of the wafer 1, welding to obtain a wafer with the surface implanted with the balls, and then cutting the wafer 1 to obtain a chip with the solder balls 2 with the same height; in particular, the amount of the solvent to be used,
as shown in fig. 1, a wafer 1 is provided, and a first pad 101 is prepared on a surface of the wafer 1; then, spraying soldering flux on the surface of the wafer 1, and planting solder balls 2 with the same height on the first bonding pads 101 on the surface of the wafer 1; the diameter range of the solder ball 2 is 100 mu m-1 mm;
then reflow soldering is carried out to enable the solder balls 2 to be connected with the first bonding pads 101 on the surface of the wafer 1; removing the soldering flux to obtain a wafer 1 with the surface thereof being provided with balls, and then cutting the wafer 1 to obtain a chip with the same height of the solder balls;
step S2, providing a flexible film 3, manufacturing a second pad 301 on the surface of the flexible film 3, and forming an isolation layer between the second pad 301 and the flexible film 3; so that the second pads 301 can be detached from the flexible film 3 by means of UV light or heat;
as shown in particular in fig. 1;
step S3, a chip with solder balls 2 is attached to the surface of the flexible film 3 in a surface mounting mode, the solder balls 2 on the chip are welded with the second bonding pads 301 on the surface of the flexible film 3 through reflow soldering, and meanwhile, the flexible film 3 is combined with a mold in the reflow soldering process to obtain the distribution of the solder balls 2 with the same appearance as the surface of the mold;
specifically, as shown in fig. 2, soldering flux is sprayed on the surface of a chip, the chip with solder balls 2 is attached to the surface of a flexible film 3 in a surface mounting manner, then reflow soldering is carried out, and the flexible film 3 is deformed by a jig 4 in the reflow soldering process to obtain the distribution of the solder balls 2 with the same appearance as the surface of a die;
the surface appearance of the mould is the same as that of the base 5;
step S4, separating the solder ball 2 with the second pad 301 from the flexible film 3 to obtain a chip with the height of the solder ball on the surface matched with the curved surface of the base 5;
specifically, as shown in fig. 3, the second pad 301 may be separated from the flexible film 3 by means of UV light or heat;
finally, when the chip is used, as shown in fig. 4, the second bonding pad 301 on the solder ball 2 of the chip can be bonded to the third bonding pad 501 on the curved surface of the base 5 of the electronic product.
Finally, it should be noted that the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting, and although the present invention has been described in detail with reference to examples, it should be understood by those skilled in the art that modifications or equivalent substitutions may be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, which should be covered by the claims of the present invention.

Claims (5)

1. A surface chip mounting process is characterized by comprising the following steps:
step S1, providing a wafer (1), preparing a first bonding pad (101) on the surface of the wafer (1), implanting solder balls (2) with the same height into the first bonding pad (101) on the surface of the wafer (1), welding to obtain the wafer with the surface implanted with the balls, and then cutting the wafer (1) to obtain a chip with the solder balls (2) with the same height;
step S2, providing a flexible film (3), manufacturing a second bonding pad (301) on the surface of the flexible film (3), and arranging an isolation layer between the second bonding pad (301) and the flexible film (3);
step S3, a chip with solder balls (2) is attached to the surface of the flexible film (3) in a surface mounting mode, the solder balls (2) on the chip are welded with the second bonding pads (301) on the surface of the flexible film (3) through reflow soldering, and the flexible film (3) is combined with a mold in the reflow soldering process to obtain the distribution of the solder balls (2) with the same surface appearance as the mold;
and step S4, separating the solder ball (2) with the second bonding pad (301) from the flexible film (3) to obtain a chip with the height of the solder ball on the surface matched with the curved surface of the base (5).
2. The surface chip mounting process according to claim 1,
in step S1, before the solder balls (2) are implanted into the first pads (101) on the surface of the wafer (1), flux is sprayed.
3. The surface die attach process according to claim 1 or 2,
the soldering in step S1 employs reflow soldering.
4. The surface die attach process according to claim 1, 2 or 3,
and deforming the flexible film (3) through the jig (4) in the reflow soldering process of the step S3.
5. The surface die attach process according to claim 1, 2 or 3,
step S4 is to separate the second pad (301) from the flexible film (3) by means of UV light or heat.
CN202110403765.XA 2021-04-15 2021-04-15 Surface chip mounting process Pending CN113161243A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110403765.XA CN113161243A (en) 2021-04-15 2021-04-15 Surface chip mounting process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110403765.XA CN113161243A (en) 2021-04-15 2021-04-15 Surface chip mounting process

Publications (1)

Publication Number Publication Date
CN113161243A true CN113161243A (en) 2021-07-23

Family

ID=76890719

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110403765.XA Pending CN113161243A (en) 2021-04-15 2021-04-15 Surface chip mounting process

Country Status (1)

Country Link
CN (1) CN113161243A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020155637A1 (en) * 2001-04-20 2002-10-24 Shih-Chang Lee Flip chip interconnected structure and a fabrication method thereof
JP2005340393A (en) * 2004-05-25 2005-12-08 Olympus Corp Small-sized mount module and manufacturing method thereof
JP2012119387A (en) * 2010-11-29 2012-06-21 Fujikura Ltd Semiconductor device, method of manufacturing the same, and electronic device
US20120309187A1 (en) * 2011-05-30 2012-12-06 International Business Machines Corporation Conformal Coining of Solder Joints in Electronic Packages
CN107591383A (en) * 2017-09-15 2018-01-16 中国电子科技集团公司第五十八研究所 The detachable curved surface encapsulated structure of BGA device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020155637A1 (en) * 2001-04-20 2002-10-24 Shih-Chang Lee Flip chip interconnected structure and a fabrication method thereof
JP2005340393A (en) * 2004-05-25 2005-12-08 Olympus Corp Small-sized mount module and manufacturing method thereof
JP2012119387A (en) * 2010-11-29 2012-06-21 Fujikura Ltd Semiconductor device, method of manufacturing the same, and electronic device
US20120309187A1 (en) * 2011-05-30 2012-12-06 International Business Machines Corporation Conformal Coining of Solder Joints in Electronic Packages
CN107591383A (en) * 2017-09-15 2018-01-16 中国电子科技集团公司第五十八研究所 The detachable curved surface encapsulated structure of BGA device

Similar Documents

Publication Publication Date Title
US7713575B2 (en) Method and apparatus for depositing coplanar microelectronic interconnectors using a compliant mold
KR100257420B1 (en) Systems interconnected by bumps of joining material
US7534652B2 (en) Microelectronic elements with compliant terminal mountings and methods for making the same
US20040124540A1 (en) [flip chip package structure]
US20020063319A1 (en) Direct-downset flip-chip package assembly and method of fabricating the same
CN101939832A (en) Thermal mechanical flip chip die bonding
US9589873B2 (en) Leadless chip carrier
US9368372B1 (en) Method for manufacturing semiconductor device
KR100562453B1 (en) Method of manufacturing a semiconductor integrated circuit device
CN113161243A (en) Surface chip mounting process
KR20020026854A (en) Manufacturing method of a semiconductor device
US9991248B2 (en) Method and device of pop stacking for preventing bridging of interposer solder balls
CN112786462B (en) Semiconductor packaging method, semiconductor assembly and electronic device comprising semiconductor assembly
TW202226390A (en) Semiconductor packaging method, semiconductor assembly and electronic equipment comprising the same
US20160366774A1 (en) Electronic component and method for manufacturing electronic module
CN108074824B (en) Manufacturing method of semiconductor device
CN112768363B (en) Curved surface chip mounting structure and preparation method thereof
KR100666990B1 (en) Ball grid array package and method for fabricating the same
CN117038624A (en) Package structure and method for fixing chip on lead
CN100433278C (en) Radiation type packaging structure and its making method
JP3209640B2 (en) Flip chip connection method and circuit board manufacturing method
KR100601487B1 (en) Flip-chip bonding method using thermal expansion film
TW411753B (en) Method of producing thin fine tape BGA package
JP2000232113A (en) Die bonder
JP3645444B2 (en) Manufacturing method of semiconductor integrated circuit device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination