CN113156640A

CN113156640A - Scanning actuator, optical fiber scanner and scanning display module

Info

Publication number: CN113156640A
Application number: CN202110334130.9A
Authority: CN
Inventors: 宋海涛; 其他发明人请求不公开姓名
Original assignee: Chengdu Idealsee Technology Co Ltd
Current assignee: Chengdu Idealsee Technology Co Ltd
Priority date: 2021-03-29
Filing date: 2021-03-29
Publication date: 2021-07-23

Abstract

The embodiment of the application discloses a scanning actuator, an optical fiber scanner and a scanning display module, wherein a first actuating part does not perform bending vibration, but performs periodic swinging of a set frequency within a certain angle range by taking a certain specific position as a rotating center through telescopic vibration or motor drive of an actuating unit, and further drives a second actuating part to swing in a first direction; the second actuator itself is capable of bending vibration in the second direction, so that the scanning actuator can achieve two-dimensional actuation. The scanning actuator in the embodiment of the application can provide larger driving force, can reduce the coupling effect between the two scanning shafts, and is more advantageous in the scene needing approximate power and/or large-size scanning display.

Description

Scanning actuator, optical fiber scanner and scanning display module

Technical Field

The application relates to the technical field of scanning display, in particular to a scanning actuator, an optical fiber scanner and a scanning display module.

Background

Scanning display imaging is a new display technology, and can be used for various display scenes such as projection display, near-eye display and the like.

The scanning display imaging can be realized by a fiber scanner, in addition to a Digital Micromirror Device (DMD) which is widely used at present.

A typical fiber scanner structure is shown in fig. 1, and the fiber scanner mainly includes: a scanning actuator adopting a fast-slow axis structure, and an optical fiber for scanning light. The scanning actuator fixed on the base sequentially comprises a slow shaft, an isolation part and a fast shaft from back to front, wherein the slow shaft is used for vibrating at a relatively slow frequency in a first direction (vertical direction, namely the Y-axis direction of a reference coordinate system in figure 1), the fast shaft is used for vibrating at a relatively fast frequency in a second direction (horizontal direction, namely the X-axis direction of the reference coordinate system in figure 1), and the vibration of the slow shaft is accumulated on the fast shaft through the isolation part, so that the optical fiber can be driven to perform two-dimensional scanning in the first direction and the second direction, two-dimensional scanning is realized, and an image is projected.

In some practical application scenarios, the requirements on the actuation force and the amplitude of the slow axis of the scanning actuator are high, and the existing structure of the scanning actuator has a certain limitation on the promotion of the actuation force and the amplitude.

Disclosure of Invention

An object of the present application is to provide a scanning actuator, an optical fiber scanner and a scanning display module, which are used to solve the problem of large limitation of the actuating force and amplitude of the slow axis in the existing scanning actuator.

An embodiment of the present application provides a scan actuator, which at least includes: a first actuating portion and a second actuating portion, wherein,

the first actuating part comprises an actuating unit and a rotating part, the actuating unit is connected with the rotating part, and the second actuating part is connected to the rotating part;

in an actuating state, the rotating part rotates around a rotating center at a first frequency within a set angle range under the actuating action of the actuating unit, and drives the second actuating part to displace in a first direction at the first frequency; the second actuating portion itself vibrates in a second direction at a second frequency.

Optionally, the scanning actuator further comprises a base, and the first actuating portion is fixed on the base.

Optionally, the actuating unit is of a cylindrical structure, one end of the actuating unit is fixed on the base, and the other end of the actuating unit is connected with the rotating part towards one side of the base;

under the actuating state, the actuating unit performs telescopic actuation along the axial direction of the column body at a first frequency, and pushes the rotating part to rotate around the rotating center at the first frequency within a set angle range.

Optionally, one end of the rotating part is rotatably connected to the base, and the rotatable connection position serves as a rotation center of the rotating part;

the number of the actuating units is at least one, and the actuating units are arranged at a set distance from the rotatable connection in the first direction.

Optionally, the rotating part is hinged to the base.

Optionally, the number of said actuation units is at least two;

the at least two actuating units are respectively arranged in two opposite areas in the first direction on the same surface of the base, and the surface of the rotating part facing the base is respectively connected with each actuating unit.

Optionally, the actuation units provided in the opposite regions are opposite in telescopic state when actuated.

Optionally, the pillar structure comprises a plurality of sheets of piezoelectric material stacked.

Optionally, the actuating unit is a motor, the rotating part includes a rotating shaft and a connecting part, one end of the connecting part is connected with the rotating shaft, and the other end of the connecting part is connected with a fixed end of the second actuating part;

in an actuating state, the motor drives the rotating part to rotate within a set angle range at the first frequency, and drives the second actuating part to swing in the first direction at the first frequency.

Optionally, the axial direction of the rotating shaft is parallel to the second direction, and the connecting portion is a right-angle adapter.

Optionally, the second actuating portion is provided with a through channel along an axial direction thereof for mounting an optical fiber.

Optionally, a through hole or a mounting groove is provided at a position on the rotating portion and/or the base corresponding to the through channel of the second actuating portion, for mounting an optical fiber.

In an embodiment of the present application, there is further provided an optical fiber scanner, including the scanning actuator and the optical fiber, where the optical fiber is mounted on the scanning actuator, and extends to form an optical fiber cantilever at a free end of the second actuating portion, and in an actuated state, the free end of the optical fiber cantilever scans and outputs a corresponding image beam according to a set track based on an actuating action of the scanning actuator to display an image.

By adopting the technical scheme in the embodiment of the application, the following technical effects can be realized:

compared with the existing scanning actuator with a coaxial structure of a first actuating part and a second actuating part, the two actuating parts of the scanning actuator in the application adopt different actuating forms, wherein the first actuating part does not perform bending vibration, but performs stretching vibration or motor drive through an actuating unit, so that the whole rotating part periodically swings at a set frequency within a certain angle range by taking a certain specific position as a rotating center, and further drives the second actuating part to swing in a first direction; the second actuator itself is capable of bending vibration in the second direction, so that the scanning actuator can achieve two-dimensional actuation. On one hand, compared with bending vibration, the first actuating part which realizes the swing of the set angle through telescopic actuation or motor driving can provide larger driving force, the amplitude is more remarkable, and the first actuating part has more advantages in scenes which need approximate power and/or large-size scanning display. On the other hand, the first actuating part and the second actuating part adopt two different actuating modes, the coupling effect of vibration between the first actuating part and the second actuating part is small, and when the fiber optic scanner is used, the influence on the scanning track is small.

Additional features and advantages of the application will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the invention. The objectives and other advantages of the application may be realized and attained by the structure and/or processes particularly pointed out in the written description and claims hereof as well as the appended drawings.

Drawings

Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings in which:

FIG. 1 is a schematic diagram of an exemplary fiber scanner of the prior art;

fig. 2a is a schematic structural diagram of an illustrative scanning display module according to an embodiment of the present disclosure;

FIG. 2b is a schematic diagram of a fiber scanner in the illustrative scanning display module of FIG. 2 a;

FIG. 3 is a schematic diagram of the actuation of a first actuation portion in the fiber scanner;

FIG. 4a is a schematic structural diagram of a first scanning actuator according to an embodiment of the present disclosure;

FIG. 4b is a schematic view of the scanning actuator shown in FIG. 4a in the X-axis direction at the viewing angle;

FIG. 4c is a schematic view of another configuration of the scanning actuator shown in FIG. 4 a;

fig. 5 is a schematic structural view of the actuating unit 411;

FIG. 6a is a schematic structural diagram of a second scanning actuator according to an embodiment of the present disclosure;

FIG. 6b is a schematic view of the scanning actuator shown in FIG. 6a in the X-axis direction at the viewing angle;

FIG. 7 is a schematic diagram of a distribution of a plurality of actuation units 711;

FIG. 8a is a schematic structural diagram of a third scanning actuator provided in the embodiments of the present application;

FIG. 8b is a schematic view of the scanning actuator shown in FIG. 8a in the Y-axis direction at the viewing angle;

FIG. 9a is a schematic structural diagram of an optical fiber scanner according to an embodiment of the present application;

FIG. 9b is a schematic view of the fiber scanner shown in FIG. 9a with the view angle in the X-axis direction.

Detailed Description

The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not restrictive of the invention. It should be noted that, for convenience of description, only the portions related to the related invention are shown in the drawings.

Illustrative scanning display module

As shown in fig. 2a, an illustrative scanning display module mainly includes:

the laser system comprises a processor 100, a laser group 110, a fiber scanner 120, a transmission fiber 130, a light source modulation circuit 140, a scanning driving circuit 150 and a beam combining unit 160. Wherein the content of the first and second substances,

the processor 100 may be a Graphics Processing Unit (GPU), a Central Processing Unit (CPU), or other chips or circuits having a control function and an image Processing function, and is not limited in particular.

In operation, the processor 100 may control the light source modulation circuit 140 to modulate the laser group 110 according to image data to be displayed, where the laser group 110 includes a plurality of monochromatic lasers, and the lasers emit light beams of different colors respectively. As shown in fig. 1, three-color lasers of Red (R), Green (G) and Blue (B) can be specifically used in the laser group. The light beams emitted by the lasers in the laser group 110 are combined into a laser beam by the beam combining unit 160 and coupled into the transmission fiber 130.

The processor 100 can also control the scan driving circuit 150 to drive the fiber scanner in the fiber scanner 120 to scan and output the light beam transmitted in the transmission fiber 130.

The light beam scanned and output by the fiber scanner 120 acts on a certain pixel point position on the medium surface, and forms a light spot on the pixel point position, so that the pixel point position is scanned. In the actual scanning process, the light beam output by the transmission fiber 130 will form a light spot with corresponding image information (such as color, gray scale or brightness) at each pixel position according to the set scanning track. In a frame time, the light beam traverses each pixel position at a high enough speed to complete the scanning of a frame of image, and because the human eye observes the object and has the characteristic of 'visual residual', the human eye cannot perceive the movement of the light beam at each pixel position but sees a frame of complete image.

With continued reference to FIG. 2b, a specific configuration of the fiber scanner 120 is shown, which includes: scanning actuator 121, fiber suspension 122, mirror group 123, scanner package 124 and fixing member 125. The scanning actuator 121 is fixed in the scanner packaging case 124 through a fixing member 125, and the transmission fiber 130 extends at the front end of the scanning actuator 121 to form a fiber suspension 122 (also called a scanning fiber), so that, in operation, the scanning actuator 121 is driven by a scanning driving signal, the slow axis 121a (also called as the first actuating portion) vibrates along the vertical direction (the vertical direction is parallel to the Y axis in the reference coordinate system in fig. 2a and 2b, in this application, the vertical direction may also be called as the first direction), the fast axis 121b (also called as the second actuating portion) vibrates along the horizontal direction (the horizontal direction is parallel to the X axis in the reference coordinate system in fig. 2a and 2b, in this application, the horizontal direction may also be called as the second direction), and is driven by the scanning actuator 121, the front end of the fiber cantilever 122 performs two-dimensional scanning according to a predetermined track and emits a light beam, and the emitted light beam can pass through the mirror assembly 123 to realize scanning and imaging. In general, the structure formed by the scan actuator 121 and the fiber suspension 122 can be referred to as: an optical fiber scanner. The first direction and the second direction are orthogonal to each other.

It should be noted that, in the embodiments of the present application, the description of "rear end" and "front end" is usually determined according to the direction of the light beam transmission, that is, the front-to-rear direction is consistent with the direction of the light beam transmission, and the rear end of the scanning actuator refers to the end of the scanning actuator used as a fixed end; the front end of the scanning actuator refers to the other end of the scanning actuator opposite to the rear end, and in some embodiments, may also be referred to as a free end, which is the most significant part of the deformation and amplitude of the scanning actuator. The light-emitting end of the optical fiber cantilever may be referred to as a tip end of the optical fiber cantilever or a free end of the optical fiber cantilever. Of course, the definitions and explanations herein regarding the concepts of free end, front end, or back end apply equally to the scan actuator, fiber optic cantilever, or other structure in other embodiments of the present application. It should be noted that in the following embodiments of the present application, for some structures without the concept of "front" and "back", the description will be directly used with "fixed end" and "free end", and of course, such description is only for the convenience of accurate and intuitive understanding of those skilled in the art, and should not be considered as limiting the present application.

The above-mentioned illustrative scan display module is only an exemplary content for facilitating understanding of the following schemes of the present application, and in practical applications, the specific architecture and structure of each unit module in the scan display module are not limited to those shown in fig. 2a and 2b, and may be changed, for example: the light source modulation circuit 140 and the scan driving circuit 150 may be combined into a processing circuit; for another example: the processor 100 may be independent of the scan display module, rather than being a constituent unit of the scan display module; also for example: the scanning actuator 121 of the fiber scanner 120 is fixed by a base, instead of the fixing member 125 in fig. 2b, and so on, and for different variations, the description is omitted here. That is, the above exemplary contents should not be construed as limiting the present application.

Referring now to fig. 3, an actuation manner of a slow shaft 121a in a scanning actuator 121 is shown, where the slow shaft 121a is a piezoelectric ceramic tube, and fig. 3 shows an axial cross section of a part of a tube wall of the piezoelectric ceramic tube, specifically, a tube wall base 21 is made of a piezoelectric ceramic material, electrodes 22 are respectively disposed on inner and outer surfaces of the tube wall base 21, when the electrodes 22 are energized, the tube wall base 21 generates a piezoelectric effect and undergoes bending deformation, and by periodically adjusting a potential difference formed by the electrodes 22, the tube wall base 21 generates periodic bending deformation, so that the slow shaft 121a can vibrate at a set frequency.

However, the amplitude and the actuating force generated by the vibration mode are small, and the scanning actuator is not well suitable for some application scenarios with high requirements on vibration and actuating force, so that the scanning actuator provided in the embodiment of the application can provide stronger actuating force and larger actuating amplitude compared with the scanning actuator with the conventional fast-slow axis coaxial structure.

For the existing scanning actuator with the coaxial structure of the fast axis and the slow axis, in addition to the above limitations of the actuating force and the vibration amplitude of the slow axis, the slow axis generates vibration with a certain frequency in an actuating state, so that mechanical constraint on the fast axis is affected, and mechanical constraint force on the fast axis is weakened, and the vibration in the first direction generated by the slow axis is partially transmitted to a part, close to the slow axis, on the fast axis, so that the vibration in the second direction generated by the fast axis is interfered by the vibration in the first direction. Accordingly, when the fast axis is in the actuated state, the high-frequency vibration in the second direction generated by the fast axis is also transmitted to the part of the slow axis close to the fast axis, and the vibration in the first direction generated by the slow axis itself is interfered. The coupling of vibration interference (which may be referred to as coupling between fast and slow axes) of the fast and slow axes causes problems such as deformation and difficulty in control of the scanning trajectory of the entire scanning actuator.

To this end, in subsequent embodiments of the present application, a corresponding scanning actuator and fiber scanner are provided to mitigate or even avoid the above-mentioned problems to some extent.

Scanning actuator

Referring to fig. 4a and 4b, the present embodiment provides a scan actuator 40, which at least includes: a first actuator 410 and a second actuator 420. To ensure the actuation effect and provide a stable support, the scanning actuator 40 is fixedly connected to the base 430.

The first actuating portion 410 includes an actuating unit 411 and a rotating portion 413, the actuating unit 411 is cylindrical, one end of the actuating unit is fixed on one side surface of the base 430 in a manner that a column axis is perpendicular to the surface of the base 430, and can perform telescopic actuation in the column axis direction, and the other end of the actuating unit is connected to the rotating portion 413. The actuating unit 411 may provide an actuating force to the rotating part 413. The rotating portion 413 is a strip-shaped thin plate, a fixed end of which is movably connected to the base 430, and a position where the actuating unit 411 is connected is close to the other end opposite to the fixed end (the other end may also be referred to as a free end of the rotating portion 413). In other embodiments of the present application, the actuating unit 411 may be a square cylinder or a cylindrical cylinder, and the rotating part 413 may also be a rectangular sheet, or a square/round tube, a square/round bar (column), or the like.

The second actuator 420 has a circular tube structure in the present embodiment, and may have a square tube, a square/round rod (column), a sheet-like structure in other embodiments, or other structures having a predetermined length in the longitudinal axis direction. The fixed end of the second actuator 420 meets the side surface of the middle section of the first actuator 410, and the length axis of the second actuator 420 is parallel to the Z-axis. The other end of the second actuating portion 420 serves as a free end. The second actuator 420 may be made of a piezoelectric material and disposed with corresponding electrodes, and of course, the structure and the actuation principle of the second actuator 420 may refer to the existing scan actuator, and will not be described in detail herein.

In the present embodiment, the second actuator 420 is provided with a through channel 425 along the axis thereof, and correspondingly, the rotating portion 413 and the base 430 are provided with through holes at corresponding positions, so as to mount the optical fiber when the scanning actuator 40 is used as an optical fiber scanner.

When the scanning actuator 40 is in an operating state, the actuating unit 411 performs telescopic vibration in the Z-axis direction at a set frequency (in the embodiment of the present application, the vibration frequency of the actuating unit 411 in the first actuating portion 410 may also be referred to as a first frequency) and a set amplitude, and the rotating portion 413 is actuated by the actuating unit 411 to swing within a certain angle range with the movable fixed portion as a rotation center according to the vibration frequency of the actuating unit 411. Generally, the swing angle of the rotating part 413 is related to (in a proportional or positive correlation with) the amplitude of the actuating unit 411. The second actuator 420 will be displaced in the Y direction by the swinging action of the rotating part 413. In addition, the second actuator 420 itself may perform bending vibration with a set frequency (in the embodiment, the vibration frequency of the second actuator 420 may also be referred to as a second frequency) in the second direction (the aforementioned X direction). Thus, the scanning actuator 40 can effect two-dimensional actuation in the first and second directions. That is, the scanning actuator 40 in the present embodiment can also realize the actuation of the scanning actuator of the fast and slow axis coaxial structure described above.

In the present embodiment, the rotating portion 413 is rotatably connected to the base 430, and a specific connection manner may be a hinge, so that the rotating portion 413 can swing at a certain angle with the hinge as a rotation center. In the present embodiment, the rotating part 413 is hinged to the base 430 in a non-spherical manner, thereby ensuring that the rotating part 413 swings only in a plane perpendicular to the rotation center axis. It will be understood by those skilled in the art that if the rotating part 413 is connected to the base 430 by a spherical hinge, multi-directional swinging may occur during swinging, and when the scanning actuator 40 is used as a fiber scanner to scan out an image, the scanning trajectory may be distorted, which may affect the imaging quality of the scanned out image.

Further, as a preferable mode in the present embodiment, the arm axis of the rotating portion 413 and the length axis of the second actuating portion 420 are coplanar or parallel to each other, for example: in the embodiment shown in fig. 4b, the arm axis AB of the rotating part 413 and the length axis CD of the second actuating part 420 are both in the plane of the YZ axis in the reference coordinate system. It will also be appreciated by those skilled in the art that the planes of the two axes are parallel or coplanar, and thus when the scanning actuator 40 is used as a fiber scanner to perform two-dimensional scanning, the scanning trajectory is more regular and easier to control, thereby reducing the difficulty of controlling the scanning trajectory.

In the present embodiment, the actuating unit 411 and the rotating portion 413, and the first actuating portion 410 and the second actuating portion 420 may be formed by bonding, welding (e.g., laser welding), or by integral molding. And is not particularly limited herein.

In one embodiment, the actuating unit 411 is a stacked piezoelectric material structure, and refer to fig. 5 in particular. The actuator unit 411 includes a plurality of piezoelectric material pieces 455 stacked on each other along the telescopic direction (Z-axis direction), and electrodes 466 (divided into positive and negative electrodes) are respectively disposed on both sides of each piezoelectric material piece 455 along the telescopic direction. In practical applications, the electrodes 466 of the stacked different piezoelectric material pieces 455 may be insulated from each other, and may be implemented by, for example, an insulating film layer, which is not limited in particular. On both sides of the actuator unit 411, there are also provided conduction electrodes 477, and the conduction electrodes 477 on both sides are respectively used for connecting positive and negative electrodes on both sides of each piezoelectric material piece 455 and are held in insulated contact with electrodes of opposite polarities. The structure of stacked piezoelectric sheets is adopted as an actuation unit, the driving voltage of the actuation unit is small, the loading capacity of the stacked actuation unit is stronger compared with the slow axis in the actuation structure shown in fig. 1, the stacked actuation unit has good linearity, and when the stacked actuation unit is used as an optical fiber scanner, scanning track control is easier to carry out.

In practical applications, the first actuator 410 and the second actuator 420 of the scanning actuator 40 may have different sizes according to different application scenarios, for example: the manufactured optical fiber scanner is applied to near-eye display equipment such as Augmented Reality (AR) head-mounted equipment, Virtual Reality (VR) head-mounted equipment and the like, the thickness of the rotating part 413 can reach the micrometer to millimeter level, the axial length can reach the millimeter level, the radial dimension of the second actuating part 420 can reach the micrometer to millimeter level, and the axial length can reach the millimeter to centimeter level; the optical fiber scanner is made to be applied to an endoscope apparatus, and the thickness and axial length of the rotating portion 413, the radial dimension and axial length of the second actuating portion 420 are similar to those applied to an AR apparatus; the thickness of the rotating part 413 can reach millimeter level, the axial length can reach centimeter level, the radial dimension of the second actuating part 420 can reach millimeter level, and the axial dimension can reach centimeter level.

It should be noted that fig. 4a and 4b are only for the convenience of visually showing the details of the structure, wherein the size and the proportion shown are not to be construed as limitations to the present application, and in practical applications, the size, the proportion, and the like of the specific structure will be determined according to the requirements of the practical applications.

In one embodiment, as shown in FIG. 4a, the width d of the side of the rotating part 413 contacting the second actuating part 420₁May be equal to or greater than the diameter d of the second actuating portion₂So that the coupling stability between the rotating part 413 and the second actuating part 420 can be secured.

In some embodiments, besides the middle position of the second actuator 420 being fixedly connected to the rotating part 413 as shown in fig. 4a, other positions of the second actuator 420 being fixedly connected to the first actuator are also possible, such as: as shown in fig. 4c, in the scanning actuator 40', the connection position of the second actuator part 420 and the rotating part 413 is closer to the free end of the rotating part 413. As will be understood by those skilled in the art, the closer the connection position of the second actuator 420 to the rotating part 413 is to the free end of the rotating part 413, the more significant the displacement of the second actuator 420 in the Y direction when the rotating part 413 swings. Therefore, the position where the second actuating portion 420 is fixedly connected to the rotating portion 413 can be set according to the requirements of practical application.

Generally, when the scanning actuator 40 is in the non-actuated state, the length axis of the second actuating portion 420 may be kept horizontal, or the angle relationship with the horizontal direction is within a preset value (here, the horizontal or horizontal direction may be considered as the direction parallel to the XZ plane in the reference coordinate system shown in fig. 4 a), because the length axis direction of the second actuating portion 420 is too far from the horizontal direction, and the scanning actuator 40 may cause the optical path to be deviated when acting on the optical fiber scanner, and may also affect the scanning track of the light output by scanning.

Of course, for the scanning actuator 40, in some embodiments, the number of the actuating units 411 may also be two or more, and two or more actuating units 411 may be arranged along the X-axis direction on one side surface of the base 430 (not shown in the figures), in this case, of course, the rotating part 413 is generally a rectangular sheet structure instead of the aforementioned strip-shaped sheet, and the rotating part 413 has a certain length in the X-axis direction so as to be connected with two or more actuating units 411 arranged along the X-axis direction. Of course, the specific structure of the actuating unit 411 and the rotating part 413 will depend on the requirement of the practical application, and is not limited herein.

In addition, the actuating unit 411 does not always protrude from the surface of the base 430, and in some embodiments, a groove, a hole, a pit, or the like is provided on the base 430 at a position for connecting the actuating unit 411, and the actuating unit 411 can be accommodated therein, and when the actuating unit 411 is not actuated, the outer side surface of the actuating unit 411 is flush with the surface of the base 430.

For the scanning actuator in the present embodiment, unlike the conventional method in which the slow axis performs bending vibration through the piezoelectric effect, the first actuating portion 410 does not perform bending vibration, but performs the stretching vibration of the actuating unit 411, so that the rotating portion 413 as a whole performs periodic oscillation with a set frequency within a certain angle range with the fixed position as the rotation center, thereby further driving the second actuating portion 420 to perform periodic displacement in the first direction. The second actuator 420 itself may perform bending vibration in the second direction, so that the scanning actuator may implement two-dimensional actuation. On one hand, compared with bending vibration, the first actuating part which realizes the swing of the set angle through telescopic actuation can provide larger driving force, has more obvious amplitude, and has more advantages in scenes which need approximate power and/or large-size scanning display. On the other hand, the first actuator 410 and the second actuator 420 adopt two different actuation modes, the coupling effect of the vibration between each other is small, and the influence on the scanning track is small when the optical fiber scanner is used.

Referring to fig. 6a and 6b, the present application further provides a scanning actuator 60. At least comprises the following steps: a first actuator 610 and a second actuator 620. To ensure the actuation effect and provide a stable support, the scanning actuator 60 is fixedly attached to the base 630.

Unlike the aforementioned scanning actuator 40, the first actuating portion 610 of the scanning actuator 60 includes two actuating units 611, and the two actuating units 611 are oppositely disposed on the same side surface of the base 630 along the first direction. Similar to the actuating unit 411 in the aforementioned scanning actuator 40, the two actuating units 611 are each in a cylindrical shape, one side of each actuating unit 611 is fixed to the base 630 and can perform telescopic actuation in the Z-axis direction, and the other side is connected to the rotating part 613 for providing an actuating force to the rotating part 613. In this embodiment, the rotating portion 613 is also in a sheet shape, and is fixedly connected to the actuating unit 611 at positions near both ends. The second actuating portion 620 is also of a circular tube type and is provided with a passage 625 for mounting an optical fiber.

When the scanning actuator 60 is in an operating state, the two actuating units 611 respectively perform stretching and contracting vibrations alternately in the Z-axis direction at a set frequency (i.e., a first frequency) and a set amplitude, that is, when one of the actuating units 611 performs an "extending" operation, the other actuating unit 611 performs a "contracting" operation. The rotating part 613 is actuated by the two actuating units 611, and performs a seesaw swing of a first frequency with a middle position E area (a gray portion in fig. 6 b) of the rotating part 613 as a swing center. Of course, the swing angle of the rotating part 613 is related to (in a proportional or positive correlation with) the amplitude of the actuating unit 611. The second actuator 620 will also be displaced in the Y direction by the swinging action of the rotating part 613. The second actuator 620 itself may perform bending vibration of a second frequency in a second direction (the aforementioned X direction). Thus, the scanning actuator 60 can effect two-dimensional actuation in the first and second directions.

In conjunction with the foregoing, it is easily understood by those skilled in the art that the distance between the two actuating units 611 is not too close, and the actuating effect on the rotating part 613 is gradually deteriorated as the distance between the two actuating units 611 is reduced. As shown in fig. 6a and 6b, two actuating units 611 are disposed near both ends of the rotating part 613, so that the actuating effect on the rotating part 613 is better.

Similar to the previous embodiments, in the present embodiment, the actuating unit 611 and the rotating part 613, and the first actuating part 610 and the second actuating part 620 may be bonded or welded (e.g., laser welded) or integrally formed.

It is also possible for the actuation unit 611 to be a cylindrical structure formed by a stack of piezoelectric material. For the detailed construction and actuation principles of the structures in this embodiment, reference may be made to the above-mentioned embodiments, and redundant description is not repeated here.

It should be noted here that, for the foregoing embodiments, the case of 1 actuating unit and 2 actuating units are respectively shown, but in some possible implementations, a plurality of actuating units may also be adopted. Specifically, as shown in fig. 7, a case is shown in which 4 actuating units are employed, that is, 4 actuating units 711 are respectively provided in two regions (i.e., the region 74 and the region 75) on the same side surface of the base 730. The region 74 and the region 75 are on the same side surface of the base 730 and are oppositely disposed in the first direction, and the actuation states of the actuation units 711 disposed in the region 74 and the region 75 when actuated are opposite, that is, if the actuation units 711 in the region 74 are in the "extended" state, the actuation units 711 in the region 75 are in the "retracted" state.

In fig. 7, the situation that the actuating units 711 are respectively arranged in two areas in a symmetrical number and symmetrical positions is shown, and in some embodiments in practical application, the actuating units 711 can also be arranged in two areas in a number asymmetrical manner, such as: one actuation unit 711 is disposed in the region 74, and 3 actuation units 711 are disposed in the region 75. In other embodiments in practical applications, the actuating unit 711 may also be disposed in two regions in a manner of symmetric number but asymmetric position, such as: 2 actuator units 711 are provided in the region 74 and the region 75, respectively, but the actuator units 711 in the region 74 are arranged in a direction parallel to the X axis, and the actuator units 711 in the region 75 are arranged in a direction parallel to the Y axis.

The arrangement of the actuating units 711 in the above embodiments is also suitable for the case of a larger number of actuating units, and will not be described in detail herein.

Of course, it is easily understood by those skilled in the art that when a plurality of actuating units are employed, the positions, numbers, etc. of the actuating units are provided to be correspondingly matched with the rotating portion, so that the actuating units can drive the actuating portion together. Also, the side of the rotating portion contacting the plurality of actuating units should have a sufficient length and width, e.g., the rotating portion has a rectangular sheet structure, rather than the strip-shaped sheet structure of the previous embodiment. Compared with the situation of 1-2 actuating units, the actuating units can provide stronger actuating force. Of course, the specific manner used in the practical application can be determined according to the needs of the practical application, and is not limited specifically here.

Referring to fig. 8a and 8b, the embodiment of the present application further provides a scan actuator 80. At least comprises the following steps: a first actuator 810 and a second actuator 820. The first and second actuation portions 810 and 820 employ different actuation forms. To ensure the actuation effect and provide a stable support, the scan actuator 80 is fixedly attached to the base 830.

The first actuator 810 includes a motor 816 as an actuator unit, the motor 816 is fixedly disposed on a base 830, a rotation shaft 818 of the motor 816 extends in the X-axis direction as a rotation unit, a connection portion 819 is disposed on the rotation shaft 818 for deflecting the connection direction, and the second actuator 820 is fixedly connected to one end of the connection portion 819 through a fixed end in a direction perpendicular to the axis of the rotation shaft 818.

When the scanning actuator 80 is in an activated state, the motor 816 drives the rotating shaft 818 to periodically rotate within a set frequency and a set angle range, and the second actuating portion 820 periodically swings with the rotating shaft 818 within the set frequency and the set angle range in a first direction (i.e., a Y-axis direction) along with the rotating shaft 818 under the action of the rotation of the rotating shaft 818, and the second actuating portion 820 can realize bending vibration at the set frequency in a second direction. Thus, the scanning actuator 80 can achieve two-dimensional actuation.

In the present embodiment, a channel 825 for installing an optical fiber is provided on the second actuating portion 820, and a channel or a through hole (not shown in fig. 8a and 8 b) is also opened at a corresponding position of the connecting portion 819 to facilitate installation of the optical fiber.

Although a channel for mounting an optical fiber is shown in each of the figures, in some embodiments, no channel may be provided in the second actuator and the optical fiber may be affixed to a surface of the second actuator.

The scanning actuator can achieve two-dimensional scanning, for the scanning actuator in each embodiment of the present application, an actuation manner of the first actuation portion is different from an actuation manner of a slow axis itself in an existing coaxial structure that is actuated by bending vibration, and a first actuation portion of the scanning actuator in the embodiment of the present application implements actuation by swinging or motor rotation via a stacked actuation unit.

Optical fiber scanner

As shown in fig. 9a and 9b, a structure of the optical fiber scanner 90 is shown, the optical fiber scanner 90 is exemplified by the scanning actuator 60 shown in fig. 6a and 6b, that is, the optical fiber scanner 90 includes the scanning actuator 60 and the optical fiber 500, a through channel is provided at the axial position of the second actuating portion 620 of the scanning actuator 60, correspondingly, through holes (not shown in fig. 9a and 9 b) are provided at corresponding positions on the base 630 and the rotating portion 613, the optical fiber 500 passes through the through holes of the base 630, the rotating portion 613 and the through channel of the second actuating portion 620 to realize the installation, and a cantilever structure (i.e., a fiber cantilever) is formed at the front end of the second actuating portion 620 in an extending manner. When the optical fiber scanner works, the first actuating portion 610 swings to drive the second actuating portion 620 to vibrate in the first direction (Y-axis direction), and the second actuating portion 620 itself bends to vibrate in the second direction, so that the optical fiber 500 can be driven to perform two-dimensional scanning according to the set scanning track by controlling the actuating amplitude, the actuating frequency, the actuating force, the actuating timing sequence, and the like of the first actuating portion 610 and the second actuating portion 620.

In practical applications, the fiber scanner 90 may further include a package, a corresponding fixing member, and the like. Of course, for the scanning actuator in the other embodiments, the corresponding fiber scanner can be made as well, and the description is not repeated here.

Scanning display module

The scanning actuator can be matched with a light source, a control circuit and the like to form a corresponding scanning display module, and under the action of the control circuit, the light source outputs an image tube and an optical fiber scanner performs scanning display. Reference may be made to the embodiments corresponding to fig. 2a and 2b, which are not described herein for redundancy.

The expressions "first", "second", "said first" or "said second" used in various embodiments of the present disclosure may modify various components regardless of order and/or importance, but these expressions do not limit the respective components. The above description is only configured for the purpose of distinguishing elements from other elements.

The above description is only a preferred embodiment of the application and is illustrative of the principles of the technology employed. It will be appreciated by those skilled in the art that the scope of the invention herein disclosed is not limited to the particular combination of features described above, but also encompasses other arrangements formed by any combination of the above features or their equivalents without departing from the spirit of the invention. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.

The above scheme of the present application can be summarized as follows:

a1, a scanning actuator, comprising at least: a first actuating portion and a second actuating portion, wherein,

A2, the scan actuator of item A1, wherein the scan actuator further comprises a base, the first actuation portion being fixed to the base.

A3, the scan actuator as claimed in A2, wherein the actuator unit has a column structure with one end fixed on the base and the other end connected to the side of the rotation part facing the base;

A4, the scan actuator as set forth in A3, wherein one end of the rotation part is rotatably connected to the base, the rotatable connection serving as a rotation center of the rotation part;

A5, the scan actuator of item A4, wherein the rotary part is hinged on the base.

A6, the scanning actuator of item A3, wherein the number of actuating units is at least two;

A7, the scan actuator of A6, wherein the expansion and contraction states of the actuating units arranged in the opposite regions are opposite to each other.

A8, the scan actuator of item A3, wherein the columnar structure comprises a stack of multiple sheets of piezoelectric material.

A9, the scanning actuator as claimed in a1 or a2, wherein the actuating unit is a motor, the rotating part comprises a rotating shaft and a connecting part, one end of the connecting part is connected with the rotating shaft, and the other end is connected with the fixed end of the second actuating part;

A10, the scan actuator of claim a9, wherein the axis of the shaft is parallel to the second direction, and the connecting part is a right angle joint.

A11, the scan actuator of A1, wherein the second actuator has a through channel along its axial direction for installing an optical fiber.

A12, the scan actuator of A11, wherein a through hole or a mounting groove is formed at a position corresponding to the through channel of the second actuator on the rotating part and/or the base for mounting an optical fiber.

Claims

1. A scanning actuator, characterized in that it comprises at least: a first actuating portion and a second actuating portion, wherein,

2. The scanning actuator of claim 1, further comprising a base, wherein the first actuation portion is secured to the base.

3. The scanning actuator of claim 2, wherein the actuating unit is a column structure, one end of which is fixed on the base and the other end of which is connected with the side of the rotating part facing the base;

4. The scanning actuator of claim 3, wherein one end of the rotating portion is rotatably connected to the base, the rotatable connection serving as a rotation center of the rotating portion;

5. The scan actuator of claim 4, wherein the rotating portion is hinged to the base.

6. The scanning actuator of claim 3, wherein the number of actuation units is at least two;

7. The scan actuator of claim 6, wherein the actuator units disposed in the opposing regions are oppositely telescopic when actuated.

8. The scanning actuator of claim 1 or 2, wherein the actuating unit is a motor, the rotating part includes a rotating shaft and a connecting part, one end of the connecting part is connected with the rotating shaft, and the other end is connected with a fixed end of the second actuating part;

9. An optical fiber scanner comprising at least a scanning actuator according to any of claims 1 to 12, and an optical fiber;

the optical fiber is arranged on the scanning actuator, and extends to form an optical fiber cantilever at the free end of the second actuating part, and in an actuating state, the free end of the optical fiber cantilever is swept according to a set track based on the actuating action of the scanning actuator.

10. A scanning display module, comprising at least the fiber scanner of claim 9, a light source and a control circuit;

under the control of the control circuit, the light source outputs image light and the optical fiber scanner performs scanning display.