CN113155286B - Interferometer integrated mirror and system based on MEMS micro-mirror - Google Patents
Interferometer integrated mirror and system based on MEMS micro-mirror Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
Abstract
The invention discloses an interferometer integrated mirror and system based on an MEMS micro-mirror, which are suitable for a compact FTIR spectrum measuring system. Based on the Michelson interference principle, the MEMS micro-mirror is integrated with a traditional interference system, so that the system size is reduced, the installation and adjustment errors are simplified, and the stability is improved. The interference integral mirror is designed into a symmetrical structure, the influence of thermal deformation caused by temperature change on interference is reduced, and the interference integral mirror is insensitive to assembly errors of other optical elements of the system. The interference integrated mirror is different from a traditional Michelson interferometer, the use of a fixed mirror is omitted, light reflected by the front surface and the back surface of the MEMS micro-mirror is interfered, and the optical path difference between light beams is amplified, so that the spectral resolution is improved, and the requirement on the maximum amplitude of the MEMS micro-mirror is lowered.
Description
Technical Field
The invention belongs to the technical field of compact FTIR spectrum measurement of MEMS micro-mirrors, and particularly relates to an interferometer integrated mirror and system based on the MEMS micro-mirrors.
Background
Fourier Transform Infrared Spectrometer (FTIR) is mainly composed of a michelson interferometer and a computer. The michelson interferometer has the main function of dividing light emitted by a light source into two beams to form a certain optical path difference, and then combining the beams to generate interference, wherein the obtained interference pattern function contains all frequency and intensity information of the light source. The distribution of the intensity of the original light source according to the frequency can be calculated by using a computer to carry out Fourier transform on the interferogram function. The method overcomes the defects of low resolving power, small light energy output, narrow spectral range, long measuring time and the like of the dispersion type spectrometer. It can not only measure the absorption and reflection spectrum of various gas, solid and liquid samples, but also can be used for short-time chemical reaction measurement. At present, the infrared spectrometer is widely applied to the fields of electronics, chemical engineering, medicine and the like.
The interferometer of the conventional FTIR spectrometer based on a Micro-Electro-Mechanical System (MEMS) micromirror consists of a fixed mirror, a movable mirror and a beam splitter, which are separated, so that the size is large, the assembly difficulty is high, and each optical element needs to be finely adjusted. In addition, interferometers are sensitive to temperature, and thermal deformation of optical or mechanical parts due to temperature changes can also affect system performance. Due to the use of separate optics, vibration resistance and stability are also more demanding than for an integral mirror.
The spectral resolution of an FTIR spectrometer based on an MEMS micro-mirror is determined by the maximum stroke of the MEMS micro-mirror, the traditional combination of a fixed mirror, a movable mirror and a beam splitter has the maximum optical path difference of double-beam interference which is 2 times of the maximum stroke of the MEMS micro-mirror, and in order to improve the spectral resolution, the maximum stroke of the MEMS micro-mirror can be only improved as much as possible, but due to the process or other reasons, the maximum stroke of the MEMS micro-mirror is limited.
Disclosure of Invention
Aiming at the defects or improvement requirements in the prior art, the invention provides an interferometer integrated mirror based on an MEMS micro-mirror and a system thereof, and aims to solve the technical problems of high assembly difficulty, poor vibration resistance and low spectral resolution of the traditional interferometer.
To achieve the above object, according to a first aspect of the present invention, there is provided a MEMS micro-mirror based interferometer integrated mirror, comprising: the light-splitting triple prism, the antireflection triple prism, the first light-guiding triple prism, the second light-guiding triple prism and the MEMS micro-mirror;
the vertical surface of the beam splitting prism is in contact with the vertical surface of the anti-reflection prism, incident light is incident to the contact surface in a direction perpendicular to the inclined surface of the beam splitting prism, the contact point of the incident light and the contact surface is a beam splitting point, the incident light is split into two light beams at the beam splitting point, wherein the first light beam is reflected to the first light guide prism through the beam splitting prism, and the first light guide prism guides the first light beam to be vertically incident to the first mirror surface of the MEMS micro-mirror; the second light beam is transmitted to a second light guide triangular prism through the antireflection triangular prism, and the second light guide triangular prism guides the second light beam to vertically irradiate to a second mirror surface of the MEMS micro-mirror; the MEMS micro-mirror is a double-sided reflector and is used for adjusting the optical path difference of two light beams, the original paths of the two light beams after the optical path difference is adjusted return to light splitting points, and the two light beams are vertically emitted from the inclined plane of the anti-reflection triangular prism after interference occurs at the light splitting points.
Preferably, the vertical surface of the first light guiding prism and the vertical surface of the second light guiding prism are oppositely arranged in parallel, and the MEMS micro-mirror is parallel-reciprocated between the two vertical surfaces to adjust the optical path difference of the two light beams.
Preferably, the light-splitting triple prism is symmetrical to the anti-reflection triple prism, and the first light-guiding triple prism is symmetrical to the second light-guiding triple prism.
Preferably, the other vertical surface of the light-splitting triangular prism is in contact with the vertical surface of the first light-guiding triangular prism, and the other vertical surface of the anti-reflection triangular prism is in contact with the vertical surface of the second light-guiding triangular prism;
after the first light beam is emitted from the other vertical surface of the beam splitting triangular prism, the first light beam enters the inclined surface of the first light guide triangular prism from the contact surface and is reflected by the inclined surface to vertically enter the first mirror surface of the MEMS micro-mirror; and after the second light beam is emitted from the other vertical surface of the antireflection triangular prism, the second light beam enters the inclined surface of the second light guide triangular prism from the contact surface and is reflected by the inclined surface to vertically enter the second mirror surface of the MEMS micro-mirror.
Preferably, the vertical surface of the beam splitting prism is plated with a semi-transparent and semi-reflective film, and the other vertical surface and the inclined surface are plated with an anti-reflection film; three surfaces of the anti-reflection triple prism are plated with anti-reflection films; the inclined planes of the first light guide triangular prism and the second light guide triangular prism are plated with high reflection films, and the two vertical planes are plated with anti-reflection films; two mirror surfaces of the MEMS micro-mirror are plated with high-reflection films.
Preferably, the incident light is collimated light, and comprises diffuse reflection light of an object and reference laser light; the emergent light comprises emergent reference laser and emergent object diffuse reflection light; the emergent reference laser is used for the motion position feedback of the MEMS micro-mirror, and the emergent object diffuse reflection light is used for calculating an object absorption spectrum.
Preferably, the integrated mirror further comprises a first dichroic beam splitter for combining the incident object diffuse reflected light and the incident reference laser light to form the coaxial reference laser light and the object diffuse reflected light.
Preferably, the integrated mirror further includes a second dichroic beam splitter for splitting the outgoing light of the integrated mirror into outgoing reference laser light and outgoing object diffuse reflection light.
According to a second aspect of the present invention, there is provided a MEMS micro-mirror based interferometer system, comprising the MEMS micro-mirror based interferometer integral mirror according to the first aspect, and further comprising a first photo-detector and a second photo-detector for receiving the outgoing object diffuse reflection light and the outgoing reference laser light, respectively.
In general, compared with the prior art, the above technical solution contemplated by the present invention can achieve the following beneficial effects:
1. compared with the traditional mode of separately designing elements such as a beam splitter, a fixed mirror and a movable mirror, the interferometer integrated mirror based on the MEMS micro-mirror provided by the invention can reduce the installation and adjustment difficulty of a system, reduce the installation and adjustment error of the system, improve the vibration resistance and stability of the system, reduce the volume of the system and provide convenience for designing a compact FTIR spectrometer based on the MEMS micro-mirror.
2. According to the interferometer integrated mirror based on the MEMS micro-mirror, the adopted MEMS micro-mirror is a double-sided reflector, and the optical path difference between light beams can be amplified, so that the spectral resolution is improved; compared with the traditional interferometer, under the condition of the same MEMS micro-mirror stroke, the spectral resolution is improved, so that the maximum amplitude requirement on the MEMS micro-mirror is reduced.
3. The interferometer integrated mirror based on the MEMS micro-mirror is of a symmetrical structure, and can effectively eliminate the influence of optical element thermal deformation on optical interference caused by temperature change. In addition, the optical paths of the light with the same wavelength and different light beams passing through the prism can be equal, and the influence of dispersion on the system can be compensated.
4. The interferometer integrated mirror based on the MEMS micro-mirror is insensitive to the incident light direction, and the adverse effect caused by the assembly error of other optical elements in an FTIR system relative to the integrated mirror is effectively reduced.
Drawings
FIG. 1 is one of the integrated mirror structure diagrams of the interferometer based on MEMS micro-mirrors provided by the present invention;
FIG. 2 is a second structural diagram of an integrated mirror of the interferometer based on MEMS micro-mirrors according to the present invention;
FIG. 3 is a diagram of simulation results when the incident light of the interferometer integrated mirror based on the MEMS micro-mirror provided by the present invention is incident perpendicular to the inclined plane of the beam splitter prism;
FIG. 4 is a diagram showing simulation results when incident light of the interferometer integrated mirror based on the MEMS micro-mirror provided by the present invention is deflected clockwise by 1 degree and enters from the inclined plane of the beam splitting triple prism;
fig. 5 is a diagram of simulation results when incident light of the interferometer integrated mirror based on the MEMS micro-mirror according to the present invention is deflected counterclockwise by 1 ° and enters from the inclined surface of the spectroscopic triple prism.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
An embodiment of the present invention provides an interferometer integrated mirror based on a MEMS micro-mirror, as shown in fig. 1, the integrated mirror includes:
the light splitting triple prism comprises a light splitting triple prism 1, an anti-reflection triple prism 2, a first light guide triple prism 3, a second light guide triple prism 4 and an MEMS micro-mirror 5;
the vertical surface 1-2 of the light splitting triple prism 1 is in contact with the vertical surface 2-2 of the anti-reflection triple prism 2, incident light is perpendicular to the inclined surface 1-1 of the light splitting triple prism 1 and enters a contact surface, the contact point of the incident light and the contact surface is a light splitting point, the incident light is split into two light beams at the light splitting point, the first light beam is reflected to a first light guide triple prism 3 through the light splitting triple prism 1, and the first light guide triple prism 3 guides the first light beam to vertically enter a first mirror surface 5-1 of an MEMS micro-mirror 5; the second light beam is transmitted to a second light guide triangular prism 4 through the antireflection triangular prism 2, and the second light guide triangular prism 4 guides the second light beam to vertically enter a second mirror surface 5-2 of the MEMS micro-mirror 5; the MEMS micro-mirror 5 is a double-sided reflector and is used for adjusting the optical path difference of two light beams, returning the original path of the two light beams after the optical path difference is adjusted to a light splitting point, and vertically emitting the light beams from the inclined plane of the anti-reflection triangular prism 2 after the light splitting point interferes.
Specifically, the first light beam exits from another vertical surface 1-3 of the beam splitting triangular prism 1, and the first light guiding triangular prism 3 guides the first light beam to vertically enter the first mirror surface 5-1 of the MEMS micro-mirror 5; the second light beam is emitted from the other vertical surface 4-1 of the anti-reflection triangular prism 2, and the second light guide triangular prism 4 guides the second light beam to vertically enter the second mirror surface 5-2 of the MEMS micro-mirror 5.
The incident light is vertical to the inclined plane 1-1 of the prismatic prism 1 and is incident to the vertical plane, and is reflected and transmitted by the vertical plane 1-2 to be divided into a first light beam B1 and a second light beam B2, and the light splitting point is the contact point of the incident light and the vertical plane 1-2.
Preferably, to reduce light loss, the vertical faces 1-2 of the dispersing triangular prism 1 are glued to the vertical faces 2-2 of the antireflection triangular prism 2.
The first light beam B1 is emitted from the other vertical surface 1-3 of the beam splitting triangular prism 1, then enters the inclined surface 3-2 of the first light guiding triangular prism 3, and is reflected by the inclined surface 3-2 and then vertically enters the first mirror surface 5-1 of the MEMS micro-mirror 5; the second light beam B2 is emitted from the other vertical surface 2-3 of the anti-reflection triangular prism 2, then enters the inclined surface 2-1 of the second light guide triangular prism, and is reflected by the inclined surface 2-1 and then vertically enters the second mirror surface 5-2 of the MEMS micro-mirror 5; the first light beam B1 and the second light beam B2 are reflected by a first mirror surface 5-1 and a second mirror surface 5-2 of the MEMS micro-mirror 5 respectively, and return to a light splitting point to generate interference; the MEMS micro-mirror adjusts the optical path difference of the two light beams through movement, the original paths of the two light beams after the optical path difference is adjusted return to the light splitting point, and the two light beams are vertically emitted from the inclined plane of the anti-reflection triple prism 2 after the light splitting point interferes.
It can be understood that the initial optical path difference between the first light beam B1 and the second light beam B2 is 0, and incoherent broadband light source interference can be realized.
The first mirror 5-1 and the second mirror 5-2 of the MEMS micro-mirror 5 are parallel.
The dynamic tilt and the dynamic deformation of the MEMS micro-mirror 5 are controllable.
Specifically, the inclination angle and the deformation of the MEMS micromirror 5 are both in a controllable range, and a stable working state can be maintained, thereby further improving the vibration resistance and the stability of the interferometer integrated mirror.
Compared with the traditional mode of separately designing elements such as a beam splitter, a fixed mirror and a movable mirror, the integrated interferometer mirror based on the MEMS micro-mirror provided by the embodiment of the invention can reduce the difficulty in assembling and adjusting the system, reduce the assembling and adjusting error of the system, improve the vibration resistance and stability of the system, reduce the volume of the system and provide convenience for designing a compact FTIR spectrometer based on the MEMS micro-mirror. In addition, the MEMS micro-mirror adopted by the interferometer integrated mirror based on the MEMS micro-mirror is a double-sided reflecting mirror, and the optical path difference between light beams can be amplified, so that the spectral resolution is improved; compared with the traditional interferometer, under the condition of the same MEMS micro-mirror stroke, the spectrum resolution is improved, and the maximum amplitude requirement on the MEMS micro-mirror is reduced.
Preferably, the vertical plane of the first light guiding triangular prism 3 and the vertical plane of the second light guiding triangular prism 4 are oppositely arranged in parallel, and the MEMS micro-mirror 5 is reciprocally moved in parallel between the two vertical planes to adjust the optical path difference between the two light beams.
Specifically, MEMS micro-mirror 5 is located the intermediate position of first light guide triangular prism 3 and second light guide triangular prism 4, MEMS micro-mirror 5's first mirror surface 5-1, second mirror surface 5-2, the inclined plane 3-3 of first light guide triangular prism 3 and the perpendicular 4-3 of second light guide triangular prism 4 are parallel, MEMS micro-mirror 5 can parallel reciprocating motion between first light guide triangular prism 3 and second light guide triangular prism 4.
The MEMS micro-mirror 5 moves in a parallel reciprocating mode between the first light guide triangular prism 3 and the second light guide triangular prism 4, so that the optical path difference of the system changes, the interference light intensity is a function of the optical path difference, corresponding functions are obtained by measuring different positions of the micro-mirror, namely the interference light intensity under different optical path differences, and the frequency spectrum of incident light can be obtained by carrying out Fourier transform on the functions.
Alternatively, the MEMS micro-mirror 5 may be moved in parallel or reciprocated in parallel between the first and second light guiding triangular prisms 3 and 4.
The parallel movement or the parallel reciprocating movement of the MEMS micro-mirror 5 between the first light guiding triple prism 3 and the second light guiding triple prism 4 can be realized by a driving structure.
It can be understood that, since the MEMS micro-mirror 5 is a double-sided mirror, the maximum optical path difference between the first light beam B1 and the second light beam B2 is 4 times the maximum stroke of the MEMS micro-mirror 5; however, in the combination of the traditional fixed mirror, the traditional movable mirror and the traditional beam splitter, the maximum optical path difference of the double-beam interference is 2 times of the maximum optical path difference of the MEMS micro-mirror, so that the optical path difference between the beams is increased by the interferometer integrated mirror based on the MEMS micro-mirror provided by the invention, and the spectral resolution is inversely proportional to the maximum optical path difference according to the FTIR spectrum measurement principle, so that the spectral resolution can be improved due to the increase of the optical path difference, and the requirement on the maximum amplitude of the MEMS micro-mirror is reduced.
Preferably, the light-splitting triple prism 1 is symmetrical to the anti-reflection triple prism 2, and the first light-guiding triple prism 3 is symmetrical to the second light-guiding triple prism 4.
Because the integral mirror provided by the invention is of a symmetrical structure, the influence of the thermal deformation of the optical element on the optical interference can be effectively eliminated. Before the first light beam B1 and the second light beam B2 enter the micro mirror 5, the optical paths of the light with the same wavelength of the first light beam B1 and the second light beam B2 passing through the prism are equal, and the influence of dispersion on the system can be compensated.
Preferably, the other vertical face of the prismatic prism 1 is in contact with the vertical face of the first light guiding prism 3, and the other vertical face of the antireflection prism 2 is in contact with the vertical face of the second light guiding prism 4.
In order to reduce light loss, the other vertical surface 1-3 of the light splitting triangular prism 1 is glued with the vertical surface 3-1 of the first light guiding triangular prism 3, and the other vertical surface 2-3 of the anti-reflection triangular prism 2 is glued with the vertical surface 4-1 of the second light guiding triangular prism 4.
After being emitted from the other vertical surface of the beam splitting triangular prism 1, the first light beam enters the inclined surface of the first light guide triangular prism 3 from the contact surface and is reflected by the inclined surface to vertically enter the first mirror surface of the MEMS micro-mirror 5; after being emitted from the other vertical surface of the antireflection triangular prism 2, the second light beam enters the inclined surface of the second light guide triangular prism 4 from the contact surface and is reflected by the inclined surface to vertically enter the second mirror surface of the MEMS micro-mirror 5.
Preferably, the vertical surface of the beam splitting prism 1 is plated with a semi-transparent and semi-reflective film, and the other vertical surface and the inclined surface are plated with an anti-reflection film; three surfaces of the anti-reflection triple prism 2 are plated with anti-reflection films; the inclined planes of the first light guide triangular prism and the second light guide triangular prism are plated with high reflection films, and the two vertical planes are plated with anti-reflection films; the two mirror surfaces of the MEMS micro-mirror 5 are plated with high reflection films.
Specifically, a semi-transparent and semi-reflective film is plated on a vertical surface 1-2 of the beam splitting prism 1, and an anti-reflection film is plated on an inclined surface 1-1 and another vertical surface 1-3; three mirror surfaces 2-1, 2-2 and 2-3 of the antireflection triple prism 2 are plated with antireflection films; two vertical surfaces 3-1 and 3-3 of the first light guiding prism 3 are plated with antireflection films, and an inclined surface 3-2 is plated with a high reflection film; two vertical surfaces 4-1 and 4-3 of the second light guiding prism 4 are plated with antireflection films, and an inclined surface 4-2 is plated with a high reflection film; the MEMS micro-mirror 5 is a double-sided reflector, and the first mirror surface 5-1 and the second mirror surface 5-2 of the MEMS micro-mirror 5 are plated with high-reflection films.
Preferably, the incident light is collimated light, and comprises diffuse reflection light of an object and reference laser light; the emergent light comprises emergent reference laser and emergent object diffuse reflection light; the emergent reference laser is used for the motion position feedback of the MEMS micro-mirror 5, and the emergent object diffuse reflection light is used for calculating an object absorption spectrum.
Specifically, the incident light of the integral mirror is collimated light, and the collimated light includes object diffuse reflection light and reference laser light.
The collimated light can be made to be incident perpendicular to the inclined plane 1-1 of the prismatic prism 1 by adjusting the angle of the incident light; the collimated light can also be made to enter perpendicularly to the inclined plane 1-1 of the prismatic prism 1 by adjusting the inclined plane 1-1 of the prismatic prism 1.
Preferably, the integrated mirror further comprises a first dichroic beam splitter 6 for combining the incident object diffuse reflected light and the incident reference laser light to form a coaxial reference laser light and object diffuse reflected light.
The integrated mirror also comprises a first dichroic beam splitter 6, which is used for combining incident object diffuse reflection light and incident reference laser light to form coaxial reference laser light and object diffuse reflection light; the coaxial reference laser and the diffuse reflection light of the object are incident perpendicular to the inclined plane 1-1 of the beam splitting prism 1.
Specifically, as shown in fig. 2, by adding a first dichroic beam splitter 6, incident object diffuse reflection light and incident reference laser light are combined, and coaxial reference laser light and object diffuse reflection light are output; the coaxial reference laser and the diffuse reflected light of the object are perpendicular to the inclined plane 1-1 of the beam splitter prism 1, are incident on the vertical plane 1-2 of the beam splitter prism 1, and are divided into a first light beam B1 and a second light beam B2.
Preferably, the integrated mirror further includes a second dichroic beam splitter 7 for splitting the outgoing light of the integrated mirror into outgoing reference laser light and outgoing object diffuse reflection light.
Specifically, as shown in fig. 2, after being reflected by the first mirror surface 5-1 and the second mirror surface 5-2 of the MEMS micro-mirror 5, the first light beam B1 and the second light beam B2 perform interference on the vertical surface 1-2 of the beam splitter prism, the synthesized interference light is incident on the second dichroic beam splitter perpendicular to the inclined surface 2-1 of the anti-reflection prism 2, and the second dichroic beam splitter 7 splits the outgoing light emitted from the first mirror surface 2-1 of the anti-reflection prism into outgoing reference laser light and outgoing object diffuse reflection light.
Zemax simulation software is adopted to simulate the interferometer integrated mirror based on the MEMS micro-mirror provided by the invention when incident light is incident perpendicular to the inclined plane 1-1 of the beam splitting prism, when the incident light deflects 1 degree clockwise and is incident from the inclined plane 1-1 of the beam splitting prism, and when the incident light deflects 1 degree anticlockwise and is incident from the inclined plane 1-1 of the beam splitting prism, and the simulation result is shown in figures 3-5. 3-5, under the condition that the incident light has a certain inclination angle relative to the integrated mirror, the emergent light can still be well overlapped and interfered, which proves that the integrated mirror is insensitive to the incident light direction, and the adverse effect caused by the assembly error of other optical elements of the FTIR system relative to the integrated mirror is effectively reduced.
The embodiment of the invention also provides an interferometer system based on the MEMS micro-mirror, which comprises the interferometer integrated mirror based on the MEMS micro-mirror, and further comprises a first light detector and a second light detector which are respectively used for receiving the emergent object diffuse reflection light and the emergent reference laser light.
Specifically, the outgoing object diffuse reflected light may be received by the first photodetector PD # 1, and the outgoing reference laser light may be received by the second photodetector PD # 2.
Specifically, the interfered object diffuse reflected light and the reference laser light are received by the PD # 1 and the PD # 2, respectively. The parallel reciprocating movement of the MEMS micro-mirror 5 can generate phase modulation on incident light, the modulation reference laser received by the PD # 2 is used for position feedback of the MEMS micro-mirror 5, and the modulated object diffuse reflection light received by the PD # 1 is used for calculating the absorption spectrum of an object.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (8)
1. An interferometer integral mirror based on a MEMS micro-mirror, the integral mirror comprising: the light-splitting triple prism comprises a light-splitting triple prism (1), an anti-reflection triple prism (2), a first light-guiding triple prism (3), a second light-guiding triple prism (4) and an MEMS micro-mirror (5);
the vertical surface of the beam splitting prism (1) is in contact with the vertical surface of the anti-reflection prism (2), incident light is incident to the contact surface perpendicular to the inclined surface of the beam splitting prism (1), the contact point of the incident light and the contact surface is a beam splitting point, the incident light is split into two light beams at the beam splitting point, wherein the first light beam is reflected to the first light guide prism (3), and the first light guide prism (3) guides the first light beam to vertically irradiate to the first mirror surface of the MEMS micro-mirror (5); the second light beam is transmitted to a second light guide triangular prism (4), and the second light guide triangular prism (4) guides the second light beam to vertically enter a second mirror surface of the MEMS micro-mirror (5); the MEMS micro-mirror (5) is a double-sided reflector and is used for adjusting the optical path difference of two light beams, the two light beams after the optical path difference is adjusted return to a light splitting point in the original path, and the light is vertically emitted from the inclined plane of the anti-reflection prism (2) after the light splitting point is interfered;
the other vertical surface of the light splitting prism (1) is in contact with the vertical surface of the first light guide prism (3), and the other vertical surface of the anti-reflection prism (2) is in contact with the vertical surface of the second light guide prism (4);
after being emitted from the other vertical surface of the beam splitting triangular prism (1), the first light beam enters the inclined surface of the first light guide triangular prism (3) from the contact surface and is reflected by the inclined surface to vertically enter the first mirror surface of the MEMS micro-mirror (5); and after the second light beam is emitted from the other vertical surface of the anti-reflection triangular prism (2), the second light beam enters the inclined surface of the second light guide triangular prism (4) from the contact surface and is reflected by the inclined surface to vertically enter the second mirror surface of the MEMS micro-mirror (5).
2. The MEMS micromirror-based interferometer integrated mirror of claim 1, wherein the vertical planes of the first light guiding triple prism (3) and the second light guiding triple prism (4) are oppositely disposed in parallel, and the MEMS micromirror (5) is reciprocally moved in parallel between the two vertical planes to adjust the optical path difference between the two light beams.
3. The MEMS micromirror-based interferometer integral mirror of claim 1, wherein the dispersing prism (1) is symmetrical with the anti-reflecting prism (2), and the first light guiding prism (3) is symmetrical with the second light guiding prism (4).
4. The interferometer integrated mirror based on MEMS micro-mirrors of claim 1, wherein the vertical surface of the beam splitting triple prism (1) is coated with a semi-transparent and semi-reflective film, and the other vertical surface and the inclined surface are coated with an anti-reflective film; three surfaces of the anti-reflection triple prism (2) are plated with anti-reflection films; the inclined planes of the first light guide triangular prism and the second light guide triangular prism are plated with high reflection films, and the two vertical planes are plated with anti-reflection films; two mirror surfaces of the MEMS micro-mirror (5) are plated with high-reflection films.
5. The MEMS micro-mirror based interferometer integrated mirror of claim 1, wherein the incident light is collimated light including object diffuse reflected light and reference laser light; the emergent light comprises emergent reference laser and emergent object diffuse reflection light; the emergent reference laser is used for the motion position feedback of the MEMS micro-mirror (5), and the emergent object diffuse reflection light is used for calculating an object absorption spectrum.
6. The integrated MEMS micromirror based interferometer mirror of claim 5 further comprising a first dichroic beam splitter (6) for combining the incident object diffuse reflected light and the incident reference laser light to form the coaxial reference laser light and the object diffuse reflected light.
7. The MEMS micromirror based interferometer integral mirror of claim 5, further comprising a second dichroic beam splitter (7) for splitting the outgoing light of the integral mirror into outgoing reference laser light and outgoing object diffuse reflected light.
8. A MEMS micro-mirror based interferometer system comprising the MEMS micro-mirror based interferometer integral mirror of any of claims 1-7, further comprising a first photodetector and a second photodetector for receiving the outgoing object diffuse reflected light and the outgoing reference laser light, respectively.
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| JP2001264171A (en) * | 2000-03-21 | 2001-09-26 | Nippon Telegr & Teleph Corp <Ntt> | Interferometer and input/output optical system |
| CN101320126B (en) * | 2008-06-02 | 2010-08-04 | 杨庆华 | Two-sided reflection movable mirror interferometer |
| CN101329200A (en) * | 2008-08-04 | 2008-12-24 | 杨庆华 | Two-way output double-corner reflection body interferometer |
| CN101793553A (en) * | 2010-03-31 | 2010-08-04 | 中国科学院西安光学精密机械研究所 | Double-sided reflecting moving mirror interferometer |
| CN101871816B (en) * | 2010-06-03 | 2012-02-29 | 北京航空航天大学 | Modularized split Sagnac interferometer |
| CN102353325B (en) * | 2011-07-22 | 2013-08-14 | 中国科学院上海光学精密机械研究所 | Four-axial four-subdivision interferometer |
| CN103822718A (en) * | 2014-03-10 | 2014-05-28 | 李剑平 | Scanning interferometer device for measuring imaging Fourier transform spectrum |
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