CN109405973A - Fourier transform spectrometer, interferometer - Google Patents
Fourier transform spectrometer, interferometer Download PDFInfo
- Publication number
- CN109405973A CN109405973A CN201811608754.XA CN201811608754A CN109405973A CN 109405973 A CN109405973 A CN 109405973A CN 201811608754 A CN201811608754 A CN 201811608754A CN 109405973 A CN109405973 A CN 109405973A
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- mirror
- beam splitter
- reflecting mirror
- angle
- angle mirror
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- 230000002452 interceptive effect Effects 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 9
- 230000033001 locomotion Effects 0.000 abstract description 6
- 238000009434 installation Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 4
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
Abstract
A kind of Fourier transform spectrometer, interferometer, including reflecting mirror, beam splitter, angle mirror, angle mirror linking arm, shaft, motor, laser, detector, control device etc..The present invention passes through the reflecting mirror and angle mirror of symmetric configuration light beam steering, is conducive to the accurate and easy for installation of optical path；The return of light beam is realized by angle mirror, collimation performance is more preferable；Two angle mirrors share a bearing, compact-sized, stability is higher；The movement of motor is controlled by laser alignment, accuracy is higher.The present invention has the characteristics that light path layout is simple, compact-sized, control is accurate, stability is higher.
Description
Technical field
The present invention relates to infrared spectroscopy, especially a kind of Fourier transform spectrometer, interferometer.
Background technique
The basic functional principle of Fourier Transform Infrared Spectrometer device is: being incident on by the infrared beam to be measured of collimation advanced in years
In Ke Erxun interferometer, the movement of index glass in interferometer is controlled, the interference pattern under different optical path differences is obtained, by the interference pattern of acquisition
Fourier transformation is carried out, the infrared spectrogram of light beam is just obtained.The interferometer is the core of Fourier Transform Infrared Spectrometer
Center portion part.The movement of interferometer index glass changes the optical path difference to form the two-beam of interference pattern, and the size of optical path difference is also direct
Decide the resolution ratio of spectrometer.The moving range of classical Michelson's interferometer index glass is limited, causes optical path difference shorter；Control
System is using the very fast voice coil motor of response or linear motor, and the at the uniform velocity stable motion for controlling index glass is highly difficult；Although many real
It applies in scheme and has changed the plane mirror of interferometer into pyramid, but the collimation of entire optical path still has larger difficulty.
Summary of the invention
The present invention provides a kind of Fourier transform spectrometer, interferometer, it is therefore intended that the layout for optimizing optical path provides dry
The bigger progressive error of the two-beam related to, the interferometer is simple, compact-sized with light path layout, control is accurate, stability is higher
The characteristics of.
The technical solution that the present invention uses is:
A kind of Fourier transform spectrometer, interferometer, including the first reflecting mirror, beam splitter, the second reflecting mirror, laser,
Detector, the first angle mirror, the second angle mirror, shaft, angle mirror linking arm, motor and control device, it is characterized in that:
First reflecting mirror, the second reflecting mirror are symmetrically arranged at the two sides of the beam splitter, and described first
Angle mirror, the second angle mirror are connected to form rigid entirety by pyramid linking arm, and the centre of the pyramid linking arm is fixed on described
Shaft on, first angle mirror, the second angle mirror are also symmetrically arranged at the two sides of the beam splitter, in the motor
Under driving, first angle mirror, the second angle mirror and pyramid linking arm are rotated around the shaft, three in the angle mirror
Reflecting surface is mutually perpendicular to；
Parallel main beam into interferometer is divided into reflected light and transmitted light through the beam splitter, the transmitted light according to
It is secondary to return to the beam splitter through second reflecting mirror, the first angle mirror, the second reflecting mirror, it is constituted after the beam splitter reflection
Part outgoing main beam, the reflected light is successively through described in first reflecting mirror, the second angle mirror, the return of the first reflecting mirror
Beam splitter, through the beam splitter transmission after composition part be emitted main beam；
The laser is located at the side of the described outgoing main beam, the exploring laser light beam of laser transmitting and described
Outgoing main beam it is parallel and be incident on the beam splitter, which is divided into reflected light and thoroughly for the exploring laser light beam
Light is penetrated, which successively returns to the beam splitter through second reflecting mirror, the first angle mirror, the second reflecting mirror, through this
A part of beamlet of interfering beam is constituted after beam splitter reflection, which successively passes through first reflecting mirror, second jiao
Mirror, the first reflecting mirror return to the beam splitter, and another part beamlet of interfering beam is constituted after beam splitter transmission；
The sub- beam interference of two of the interfering beam forms interference fringe, is acquired by the detector, described
The output end of detector is connected with the input terminal of the control device, the output end of the control device and the motor
Control terminal be connected.
The motor is voice coil motor.
The shaft is leaf spring shaft.
The laser interferencefringes of the detector acquisition, the calculation processing in control device are quasi- according to the data of processing
The really moving situation of control motor.
Beneficial effects of the present invention are as follows:
Two reflecting mirrors and reflecting mirror of the invention are arranged symmetrically in beam splitter two sides, stabilization simple for structure.
The device that light beam of the present invention inversely returns uses pyramid, and two pyramids are arranged symmetrically in beam splitter two sides, and and angle
Cone linking arm forms rigid entirety, moves around the shaft together, compact-sized, is conducive to the optical path difference for increasing two-beam, improves instrument
The resolution ratio of device.
The laser being arranged by the interference main beam of interferometer outgoing of the present invention issues exploring laser light beam and outgoing main beam
In parallel, reversible by beam splitter, reflecting mirror, the interference laser of pyramid and key light beam optical path, which facilitates the tune of interferometer
Examination, the precise motion of more acurrate control motor.
The present invention controls the preferred voice coil motor of motor, is swift in response and occupies little space；The preferred leaf spring shaft of shaft, itself is mentioned
For restoring force, the stability of pyramid movement is higher, improves the antivibration kinetic force and signal-to-noise ratio of instrument.
Detailed description of the invention
Fig. 1 is the light path schematic diagram of Fourier transform spectrometer, interferometer of the present invention；
Specific embodiment
The present invention will be further explained below with reference to the attached drawings, but should not be limited the scope of the invention with this.
First referring to Figure 1, Fig. 1 is the light path schematic diagram of Fourier transform spectrometer, interferometer of the present invention, as seen from the figure,
Fourier transform spectrometer, interferometer of the present invention, including the first reflecting mirror 1, beam splitter 2, the second reflecting mirror 3, laser 4, spy
Device 5, the first angle mirror 6, the second angle mirror 7, shaft 8, angle mirror linking arm 9, motor 10 and control device 11 are surveyed, it is characterized in that:
First reflecting mirror 1, the second reflecting mirror 3 are symmetrically arranged at the two sides of the beam splitter 2, and described the
One angle mirror 6, the second angle mirror 7 are connected to form rigid entirety by pyramid linking arm 9, and the centre of the pyramid linking arm 9 is solid
It being scheduled in the shaft 8, first angle mirror 6, the second angle mirror 7 are also symmetrically arranged at the two sides of the beam splitter 2,
In the case where the motor 10 drives, first angle mirror 6, the second angle mirror 7 and pyramid linking arm 9 are rotated around the shaft 8,
Three reflectings surface in the angle mirror are mutually perpendicular to；
Parallel main beam 101 into interferometer divides through the beam splitter 2 for reflected light and transmitted light, the transmission
Light successively returns to the beam splitter 2 through second reflecting mirror 3, the first angle mirror 6, the second reflecting mirror 3, through the beam splitter 2
Composition part is emitted main beam 102 after reflection, and the reflected light successively passes through first reflecting mirror 1, the second angle mirror 7, the
One reflecting mirror 1 returns to the beam splitter 2, and composition part is emitted main beam 102 after the beam splitter 2 transmission；
The laser 4 is located at the side of the outgoing main beam 102, the exploring laser light beam of the laser 4 transmitting
103 is parallel with the outgoing main beam 102 and be incident on the beam splitter 2, and the beam splitter 2 is by the exploring laser light beam
103 points are reflected light and transmitted light, which successively returns through second reflecting mirror 3, the first angle mirror 6, the second reflecting mirror 3
The beam splitter 2 is returned, a beamlet of interfering beam 104 is constituted after the beam splitter 2 reflection, the transmitted light is successively through institute
The first reflecting mirror 1, the second angle mirror 7, the first reflecting mirror 1 stated return to the beam splitter 2, constitute after the beam splitter 2 transmission
Another beamlet of interfering beam 104；
The sub- beam interference of two of the interfering beam 104 forms interference fringe, is acquired by the detector 5, institute
The output end for the detector 5 stated is connected with the input terminal of the control device 11, the output end of the control device 11 with
The control terminal of the motor 10 is connected.
The laser interferencefringes that detector 5 acquires, the calculation processing in control device 11, according to the data of processing, accurately
Control the moving situation of motor 10.
The Fourier transform spectrometer, interferometer of the invention patent in specific implementation, due to structure manufacturing tolerance, is done
Optimal state, therefore 3 one of both micro-adjustment angle of optional first reflecting mirror 1 and the second reflecting mirror cannot be reached by relating to striped,
To form better interference pattern.Classical structure can be used in the mode of adjustment reflecting mirror, it may be assumed that and reflecting mirror is mounted in adjustment plate,
The adjusting screw that three ends are ball head structure is arranged in adjustment plate, is respectively set to " cone with three ball screw touching positions
The angle of reflecting mirror can be adjusted in hole ", " V-groove ", " plane ", rotary screw.The laser 4 for emitting collimation laser is also fine-tuning
Whole angle, the laser for emitting it are parallel with the main beam that interferometer is emitted.Shaft uses piece spring structure, generally uses orthogonal ten
The further improving stability of word slice spring structure.Beam splitter uses double-sided coating plane mirror, or is added using coating single side plane mirror
Compensate plane mirror mode.Two angle mirrors and angle mirror linking arm can also make integrally as needed, and it is rigid to further enhance device
Property and stability.
Experiment shows that the present invention has the characteristics that light path layout is simple, compact-sized, control is accurate, stability is high.
The description that is carried out of the present invention is only illustrated rather than in described above and explanation limited, and not departed from
Under the premise of the present invention as defined by the appended claims, various changes, deformation can be carried out to above-described embodiment or is repaired
Just.
Claims (3)
1. a kind of Fourier transform spectrometer, interferometer, including the first reflecting mirror (1), beam splitter (2), the second reflecting mirror (3),
Laser (4), detector (5), the first angle mirror (6), the second angle mirror (7), shaft (8), angle mirror linking arm (9), motor (10) and
Control device (11), it is characterised in that:
First reflecting mirror (1), the second reflecting mirror (3) are symmetrically arranged at the two sides of the beam splitter (2), described
First angle mirror (6), the second angle mirror (7) are connected to form rigid entirety by pyramid linking arm (9), the pyramid linking arm
(9) centre is fixed in the shaft (8), and first angle mirror (6), the second angle mirror (7) are also symmetrically arranged at institute
The two sides for the beam splitter (2) stated, under motor (10) driving, first angle mirror (6), the second angle mirror (7) and angle
It bores linking arm (9) to rotate around the shaft (8), three reflectings surface in the angle mirror are mutually perpendicular to；
Parallel main beam (101) into interferometer is divided into reflected light and transmitted light, the transmission through the beam splitter (2)
Light successively passes through second reflecting mirror (3), the first angle mirror (6), the second reflecting mirror (3) and returns to the beam splitter (2), through this
Beam splitter (2) reflection after composition part outgoing main beam (102), the reflected light successively pass through first reflecting mirror (1),
Second angle mirror (7), the first reflecting mirror (1) return to the beam splitter (2), and composition part is emitted after the beam splitter (2) transmission
Main beam (102)；
The laser (4) is located at the side of the outgoing main beam (102), the exploring laser light of the laser (4) transmitting
Beam (103) is parallel with the outgoing main beam and is incident on the beam splitter (2), and the beam splitter (2) is by the detection
Laser beam (103) is divided into reflected light and transmitted light, the reflected light successively pass through second reflecting mirror (3), the first angle mirror (6),
Second reflecting mirror (3) returns to the beam splitter (2), and a sub-light of interfering beam (104) is constituted after the beam splitter (2) reflection
Beam, the transmitted light successively pass through first reflecting mirror (1), the second angle mirror (7), the first reflecting mirror (1) and return to the beam splitting
Device (2) constitutes interfering beam (104) another beamlet after the beam splitter (2) transmission；
The sub- beam interference of two of the interfering beam (104) forms interference fringe, is acquired by the detector (5), institute
The output end for the detector (5) stated is connected with the input terminal of the control device (11), the control device (11) it is defeated
Outlet is connected with the control terminal of the motor (10).
2. Fourier transform spectrometer, interferometer according to claim 1, it is characterised in that the motor (10) is
Voice coil motor.
3. Fourier transform spectrometer, interferometer according to claim 1, it is characterised in that the shaft (8) is piece
Spring shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811608754.XA CN109405973A (en) | 2018-12-27 | 2018-12-27 | Fourier transform spectrometer, interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811608754.XA CN109405973A (en) | 2018-12-27 | 2018-12-27 | Fourier transform spectrometer, interferometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109405973A true CN109405973A (en) | 2019-03-01 |
Family
ID=65462257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811608754.XA Pending CN109405973A (en) | 2018-12-27 | 2018-12-27 | Fourier transform spectrometer, interferometer |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110530793A (en) * | 2019-08-21 | 2019-12-03 | 荧飒光学科技（上海）有限公司 | Integrated Fourier transformation photoluminescence spectroscopy |
| CN111562009A (en) * | 2020-04-27 | 2020-08-21 | 中国科学院西安光学精密机械研究所 | Common-path angle mirror interferometer and interference method |
| CN114136442A (en) * | 2021-11-23 | 2022-03-04 | 杭州谱育科技发展有限公司 | Interferometer based on continuous rotation and working method thereof |
| CN114136442B (en) * | 2021-11-23 | 2024-05-14 | 杭州谱育科技发展有限公司 | Interferometer based on continuous rotation and working method thereof |
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| JPH09133582A (en) * | 1995-11-10 | 1997-05-20 | Opt Res:Kk | Differential optical path interferometer and fourier transform spectrometer employing it |
| CN101520342A (en) * | 2009-03-25 | 2009-09-02 | 中国科学院上海技术物理研究所 | Infrared Fourier spectrum detector with ultrahigh spectral resolution |
| CN103712691A (en) * | 2013-12-23 | 2014-04-09 | 聚光科技(杭州)股份有限公司 | Fourier transformation spectrograph |
| CN105387935A (en) * | 2015-12-15 | 2016-03-09 | 北京雪迪龙科技股份有限公司 | Interference device and spectrometer comprising same |
| US20180113026A1 (en) * | 2015-04-16 | 2018-04-26 | Shimadzu Corporation | Fourier transform spectroscope |
| CN108519153A (en) * | 2018-04-23 | 2018-09-11 | 中国科学院光电研究院 | The parallel pendulum mirror Fourier Transform Infrared Spectrometer of binary channels |
| CN209069422U (en) * | 2018-12-27 | 2019-07-05 | 荧飒光学科技（上海）有限公司 | Fourier transform spectrometer, interferometer |
-
2018
- 2018-12-27 CN CN201811608754.XA patent/CN109405973A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09133582A (en) * | 1995-11-10 | 1997-05-20 | Opt Res:Kk | Differential optical path interferometer and fourier transform spectrometer employing it |
| CN101520342A (en) * | 2009-03-25 | 2009-09-02 | 中国科学院上海技术物理研究所 | Infrared Fourier spectrum detector with ultrahigh spectral resolution |
| CN103712691A (en) * | 2013-12-23 | 2014-04-09 | 聚光科技(杭州)股份有限公司 | Fourier transformation spectrograph |
| US20180113026A1 (en) * | 2015-04-16 | 2018-04-26 | Shimadzu Corporation | Fourier transform spectroscope |
| CN105387935A (en) * | 2015-12-15 | 2016-03-09 | 北京雪迪龙科技股份有限公司 | Interference device and spectrometer comprising same |
| CN108519153A (en) * | 2018-04-23 | 2018-09-11 | 中国科学院光电研究院 | The parallel pendulum mirror Fourier Transform Infrared Spectrometer of binary channels |
| CN209069422U (en) * | 2018-12-27 | 2019-07-05 | 荧飒光学科技（上海）有限公司 | Fourier transform spectrometer, interferometer |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110530793A (en) * | 2019-08-21 | 2019-12-03 | 荧飒光学科技（上海）有限公司 | Integrated Fourier transformation photoluminescence spectroscopy |
| CN110530793B (en) * | 2019-08-21 | 2022-06-28 | 荧飒光学科技（上海）有限公司 | Integrated Fourier transform photoluminescence spectrometer |
| CN111562009A (en) * | 2020-04-27 | 2020-08-21 | 中国科学院西安光学精密机械研究所 | Common-path angle mirror interferometer and interference method |
| CN114136442A (en) * | 2021-11-23 | 2022-03-04 | 杭州谱育科技发展有限公司 | Interferometer based on continuous rotation and working method thereof |
| CN114136442B (en) * | 2021-11-23 | 2024-05-14 | 杭州谱育科技发展有限公司 | Interferometer based on continuous rotation and working method thereof |
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