CN113137934B - Calibration system and calibration method for single-probe ray equation - Google Patents

Calibration system and calibration method for single-probe ray equation Download PDF

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CN113137934B
CN113137934B CN202110445856.XA CN202110445856A CN113137934B CN 113137934 B CN113137934 B CN 113137934B CN 202110445856 A CN202110445856 A CN 202110445856A CN 113137934 B CN113137934 B CN 113137934B
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probe
calibration
light
equation
calibration piece
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CN113137934A (en
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李成军
陶天炯
翁继东
吴建
陈龙
马鹤立
王翔
贾兴
刘盛刚
唐隆煌
陈书杨
康强
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Institute of Fluid Physics of CAEP
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration

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  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a calibration system and a calibration method of a single-probe ray equation, wherein the calibration system comprises a light source, a calibration piece, a lens, a CCD (charge coupled device) and a computer, wherein the light source is positioned in front of a probe to be calibrated, the tip of the calibration piece passes through detection light emitted by the probe, and the lens, the CCD and the computer are sequentially arranged in the light propagation direction; the calibration method disclosed by the invention is carried out based on the calibration system, linear equation parameters where the detected light rays are located are calculated by a light spot imaging method, and then the position parameters of the probe, namely the coordinates of the ray starting point, are calculated by utilizing the distance relationship between the probe and the known curved surface. The calibration method disclosed by the invention can obtain the ray equation parameters of the installed probe, calculate the profile data of the object detected by the probe by using the parameters, process or correct the detected data, and realize optical detection and detection of physical interfaces of shock waves and detonation.

Description

Calibration system and calibration method for single-probe ray equation
Technical Field
The invention belongs to the field of optical measurement, and particularly relates to a calibration system and a calibration method for a single-probe ray equation.
Background
In non-contact type object three-dimensional profile optical detection and impact wave physics and detonation physics experimental interface detection or distance diagnosis, a laser interference distance measurement technology is generally utilized, wherein an optical fiber probe is a receiving device for detecting an exit point of signal light and reflecting the signal light in the laser interference distance measurement technology, and when the probe is used as the exit point of the detection light, the probe and the light emitted from the probe form a geometric ray. The ray equation calibration is to calculate the ray equation parameters of the emergent ray of the probe, that is, calculate the coordinates of the starting point of the probe light (the coordinates of the optical fiber probe) and the direction parameters of the probe light, if the ray equation parameters are known, then the three-dimensional space coordinate values of the points on the object can be calculated according to the position relationship between a certain point on the object and the probe, thereby realizing the measurement of the object profile, therefore, the ray equation calibration of the probe light is the key for realizing the detection of the object profile and the detection of the interface, and is also beneficial to the positioning, alignment and the correction of the probe detection experiment results, therefore, in the detection process based on the frequency domain interference technology, the ray equation calibration of the installed probe has important significance for the practical application of the laser interference distance measurement technology, and is the most important and most critical link in the detection processes of the profile, the interface and the like, and is also the key for realizing the high-precision coordinate of the detection results.
At present, the parameters of a detection light ray equation are mainly obtained in a mechanical assembly mode, namely, a mechanical axis of a probe is ensured to be vertical to an interface to be detected in the mechanical assembly mode, so that the detection light ray equation is obtained, but the method still has the following problems: 1) The optical axis of the probe light emitted from the fiber probe and the mechanical axis of the probe cannot be completely coincided; 2) In actual assembly, the vertical relation between the mechanical axis of the optical fiber probe and a reference datum plane cannot be strictly ensured; 3) In the optical test process, the best position for testing is the probe test surface with the highest collection efficiency of the probe to the signal light reflected by the test surface, which may cause the actual assembly state of the probe to ensure that the mechanical axis is perpendicular to the test surface and the optical axis of the probe light is perpendicular to the test surface. Therefore, the radiation equation of the probe under the actual assembly condition needs to be calibrated so as to obtain the radiation equation parameters of the probe in the actual installation, so as to process or correct the detection data.
Therefore, a method for calibrating equation parameters of radiation composed of the optical fiber probe and the probe light emitted by the optical fiber probe is needed, and the method is realized based on a simple calibration system and can realize high-precision calibration of the equation parameters of the probe radiation.
Disclosure of Invention
In view of this, the invention provides a calibration system and a calibration method for a single-probe ray equation, wherein the method is performed based on a simple calibration system, and can realize high-precision calibration of parameters of the probe ray equation.
In order to achieve the purpose, the invention adopts the following technical scheme: a calibration system for a single probe ray equation, the calibration system comprising: the device comprises a light source, a calibration piece, a lens, a CCD and a computer; the light source is emitted through the probe, the calibration piece is provided with a tip, the vertex of the tip of the calibration piece is located on the detection light emitted by the probe, and the lens, the CCD and the computer are sequentially arranged in the transmission direction of the detection light.
Preferably, the marker is a cone or other pointed object.
A calibration method of a single-probe ray equation comprises the following steps:
s1, sequentially placing a light source, a calibration piece, a lens, a CCD and a computer from left to right, wherein the light source is positioned in front of a probe, the light source emits probe light through the probe, the lens, the CCD and the computer are sequentially placed in the propagation direction of the probe light, and the calibration piece is positioned between the probe and the lens;
s2: adjusting the position of the calibration piece to ensure that the projection of the vertex of the calibration piece on a plane vertical to the propagation direction of the detection light coincides with the center of a projection light spot on the plane of the detection light;
s3: collecting coordinate values of a series of points on the calibration piece by using a three-coordinate measuring machine, and giving the vertex coordinates of the tip of the calibration piece through a fitting equation;
s4: enabling the calibration piece to be located at different positions, repeating the steps S2 and S3, and sequentially obtaining the coordinate values of the top points of the calibration piece at the different positions;
s5: performing space straight line fitting on the coordinate values obtained in the step S4 to obtain straight line equation parameters (a, b, c) where the detection light rays are located;
s6: determining the coordinates of the starting point of a detection light ray, irradiating detection light emitted by a probe to be detected on any curved surface with known curvature radius, assuming that the intersection point of the light ray and the curved surface is M, measuring the distance r from the probe to the intersection point M by using a frequency domain interferometric distance meter, and solving the coordinates of the probe by using a simultaneous distance formula, a probe linear equation and a surface equation of the known curved surface to obtain the coordinates of the starting point of the ray equation of the probe.
Preferably, in step S3, the coordinate system of the coordinate measuring machine coincides with the coordinate system of the probe, and the coordinate system is kept consistent during the measurement process.
The invention has the beneficial effects that: the calibration system and the calibration method of the single-probe ray equation disclosed by the invention can obtain the ray equation parameters of the probe, and the equation parameters are used for calculating the position relation between the probe and the detected surface in the actual installation of the probe and further used for processing or correcting detection data, so that the optical detection of the three-dimensional profile of an object is realized, or the calibration system and the calibration method are applied to the precise measurement and correction of interface parameters (such as speed, distance and the like) in shock wave physics and detonation physics experiments.
Drawings
FIG. 1 is a schematic diagram of the calibration principle of the direction vector parameters of the ray equation of the probe of the present invention;
FIG. 2 is a schematic diagram illustrating the calibration principle of the starting point parameters of the detecting light according to the present invention;
in the figure: 1. light source 2, optical fiber probe 3, cone 4, lens and CCD 5, computer.
Detailed Description
It will be appreciated by those of ordinary skill in the art that the embodiments described herein are intended to assist the reader in understanding the principles of the invention and are to be construed as being without limitation to such specifically recited embodiments and examples. Those skilled in the art can make various other specific changes and combinations based on the teachings of the present invention without departing from the spirit of the invention, and these changes and combinations are within the scope of the invention.
The invention is described in detail below with reference to the figures and specific embodiments.
A calibration system for the ray equation of a probe as shown in fig. 1, the calibration system comprising: the device comprises a light source 1, a calibration piece 3, a lens, a CCD4 and a computer 5; the detected probe 2 is positioned right in front of the light source 1, the light source 1 is emitted through the probe 2, the calibration piece 3 is provided with a tip, the vertex of the tip of the calibration piece 3 is positioned on a detection light emitted by the probe 2, and the lens, the CCD4 and the computer 5 are sequentially placed in the transmission direction of the detection light; light source 1 passes through probe 2 outgoing, and probe 2 is the starting point of probing light, and probing light and probe have constituteed a ray in the geometry, and calibration piece 3 pointed portion, its summit is this calibration system's calibration thing promptly, and camera lens, CCD and computer are used for the formation of image and show.
The marking member 3 may be a cone, a triangular pyramid, or other pointed objects.
The calibration principle of the system is carried out by utilizing the imaging of the detection light, the position of the calibration piece is continuously adjusted in the calibration process, the vertex of the tip of the calibration piece at different positions is always ensured to be positioned on the detection light, and the equation parameters of the straight line where the rays formed by the probe and the detection light are positioned can be calculated by measuring the vertex coordinates of the tips of the plurality of calibration pieces; then according to a distance formula, irradiating the detected light on a curved surface with a known curvature radius, measuring the distance between the probe and the curved surface, and calculating the coordinate value of the probe by combining the obtained ray equation and the curved surface equation to obtain the ray equation parameters of the probe, wherein the specific calibration method comprises the following steps:
firstly, a light source, a calibration piece, a lens, a CCD and a computer are sequentially placed from left to right, wherein the light source is positioned right in front of a probe, the light source emits probe light through the probe, the lens, the CCD and the computer are sequentially placed in the propagation direction of the probe light, and the calibration piece is positioned between the probe and the lens;
under the condition that the axis of the probe is vertical to the lens, the two-dimensional imaging of the light emitted by the probe on the CCD of the lens is usually a circular light spot, and the geometric ray formed by the probe and the emitted detection light can be represented by adding the probe to the central connecting line of the imaging light spots on a series of planes vertical to the light propagation direction.
Therefore, the position of the calibration piece is adjusted, the projection of the vertex of the tip of the calibration piece on a plane perpendicular to the propagation direction of the detection light is enabled to coincide with the center of a projection light spot on the plane of the detection light, the vertex of the tip of the calibration piece can be determined to pass through the detection light at the moment, next, a coordinate value of a series of points on the curved surface of the calibration piece is collected by using a three-coordinate measuring machine, the coordinate value of the vertex of the calibration piece is given through a fitting equation, a point coordinate value on the detection light ray is obtained, and attention needs to be paid to the fact that the coordinate system of the three-coordinate measuring machine is established on a support for mounting the probe and coincides with the coordinate system of the probe, and the coordinate system is kept consistent in the measuring process.
Sequentially adjusting the positions of the calibration piece, sequentially obtaining coordinate values of vertexes of the calibration piece at a plurality of different positions according to the operation steps, and performing space straight line fitting on the obtained coordinate values to obtain straight line equation parameters (a, b and c) where the detection light rays are located;
after the linear equation where the detection light ray is located is determined, the coordinate value of the ray starting point, namely the position coordinate (X) of the probe is also required to be determined 0 ,Y 0 ,Z 0 ) The complete ray equation parameters can be obtained. The principle of coordinate calibration of the probe starting point is shown in fig. 2, wherein the probe light emitted from the probe is irradiated on a surface with a curvature radius of R 0 Distance between probe and known curved surface on cylindrical surfaceUsually, an Optical Frequency Domain Interferometer (OFDI) is used for precise measurement, where the measured distance is r, and the intersection point of the probe light and the curved surface is M (x) 0 ,y 0 ,z 0 ) And simultaneously solving the coordinates of the starting point of the detection light ray by a distance formula and a probe linear equation shown as follows:
(X 0 -x 0 ) 2 +(Y 0 -y 0 ) 2 +(Z 0 -z 0 ) 2 =r 2
Figure BDA0003035202320000041
aX 0 +bY 0 +cZ 0 =0
ax 0 +by 0 +cz 0 =0
the final ray equation of the detected light is:
Figure BDA0003035202320000042

Claims (2)

1. a calibration method for a single-probe ray equation is characterized by comprising the following steps:
s1, building a calibration system of a single-probe ray equation, sequentially placing a light source, a calibration piece, a lens, a CCD and a computer from left to right, wherein the light source is positioned right in front of a probe, the light source emits probe light through the probe, the lens, the CCD and the computer are sequentially placed in the propagation direction of the probe light, and the calibration piece is positioned between the probe and the lens;
the calibration system of the single-probe ray equation comprises: the device comprises a light source, a calibration piece, a lens, a CCD and a computer; the light source is emitted through the probe, the calibration piece is provided with a tip and is a cone or other objects with tips, the vertex of the tip of the calibration piece is positioned on a detection light ray emitted by the probe, and the lens, the CCD and the computer are sequentially arranged in the transmission direction of the detection light ray;
s2: adjusting the position of the calibration piece to ensure that the projection of the vertex of the calibration piece on a plane vertical to the propagation direction of the detection light coincides with the center of a projection light spot on the plane of the detection light;
s3: collecting coordinate values of a series of points on the calibration piece by using a three-coordinate measuring machine, and giving out the vertex coordinates of the tip part of the calibration piece through a fitting equation;
s4: enabling the calibration piece to be located at different positions, repeating the steps S2 and S3, and sequentially obtaining coordinate values of the vertex of the tip of the calibration piece at the different positions;
s5: performing space straight line fitting on the plurality of coordinate values obtained in the step S4 to obtain direction vector parameters (a, b, c) of the detection light rays;
s6: the method comprises the steps of enabling detection light emitted by a probe to be detected to strike any curved surface with a known curvature radius of the curved surface, assuming that the intersection point of light and the curved surface is M, measuring the distance r from the probe to the intersection point M by using a frequency domain interference range finder, and solving a coordinate value of the probe by using a simultaneous distance formula, a probe linear equation and a surface equation of the known curved surface to obtain a starting point coordinate of a ray equation of the probe.
2. The method for calibrating the ray equation of the single probe according to claim 1, wherein in the step S3, the coordinate system of the three-coordinate measuring machine coincides with the coordinate system of the probe and is kept consistent during the measurement process.
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