CN113120940A - Spherical cerium carbonate and synthesis method of cerium oxide - Google Patents
Spherical cerium carbonate and synthesis method of cerium oxide Download PDFInfo
- Publication number
- CN113120940A CN113120940A CN201911397756.3A CN201911397756A CN113120940A CN 113120940 A CN113120940 A CN 113120940A CN 201911397756 A CN201911397756 A CN 201911397756A CN 113120940 A CN113120940 A CN 113120940A
- Authority
- CN
- China
- Prior art keywords
- cerium
- solution
- carbonate
- reaction
- synthesis according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910000420 cerium oxide Inorganic materials 0.000 title claims abstract description 45
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 title claims abstract description 45
- GHLITDDQOMIBFS-UHFFFAOYSA-H cerium(3+);tricarbonate Chemical compound [Ce+3].[Ce+3].[O-]C([O-])=O.[O-]C([O-])=O.[O-]C([O-])=O GHLITDDQOMIBFS-UHFFFAOYSA-H 0.000 title claims abstract description 44
- 238000001308 synthesis method Methods 0.000 title claims description 15
- 238000006243 chemical reaction Methods 0.000 claims abstract description 40
- 238000000034 method Methods 0.000 claims abstract description 27
- 229910052684 Cerium Inorganic materials 0.000 claims abstract description 26
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims abstract description 26
- 230000005587 bubbling Effects 0.000 claims abstract description 18
- 238000001556 precipitation Methods 0.000 claims abstract description 9
- 239000011261 inert gas Substances 0.000 claims abstract description 8
- 230000002194 synthesizing effect Effects 0.000 claims abstract description 7
- 238000002156 mixing Methods 0.000 claims abstract description 6
- 239000012716 precipitator Substances 0.000 claims abstract description 6
- 238000001035 drying Methods 0.000 claims abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000001816 cooling Methods 0.000 claims abstract description 3
- 238000001914 filtration Methods 0.000 claims abstract description 3
- 238000003756 stirring Methods 0.000 claims abstract description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 19
- 238000003786 synthesis reaction Methods 0.000 claims description 19
- HSJPMRKMPBAUAU-UHFFFAOYSA-N cerium(3+);trinitrate Chemical compound [Ce+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O HSJPMRKMPBAUAU-UHFFFAOYSA-N 0.000 claims description 8
- 150000000703 Cerium Chemical class 0.000 claims description 7
- ATRRKUHOCOJYRX-UHFFFAOYSA-N Ammonium bicarbonate Chemical compound [NH4+].OC([O-])=O ATRRKUHOCOJYRX-UHFFFAOYSA-N 0.000 claims description 6
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims description 6
- 239000001099 ammonium carbonate Substances 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 235000012501 ammonium carbonate Nutrition 0.000 claims description 4
- 230000035484 reaction time Effects 0.000 claims description 4
- 229910000013 Ammonium bicarbonate Inorganic materials 0.000 claims description 2
- 235000012538 ammonium bicarbonate Nutrition 0.000 claims description 2
- VYLVYHXQOHJDJL-UHFFFAOYSA-K cerium trichloride Chemical compound Cl[Ce](Cl)Cl VYLVYHXQOHJDJL-UHFFFAOYSA-K 0.000 claims description 2
- VGBWDOLBWVJTRZ-UHFFFAOYSA-K cerium(3+);triacetate Chemical compound [Ce+3].CC([O-])=O.CC([O-])=O.CC([O-])=O VGBWDOLBWVJTRZ-UHFFFAOYSA-K 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 238000005498 polishing Methods 0.000 abstract description 26
- 239000002245 particle Substances 0.000 abstract description 21
- 239000006185 dispersion Substances 0.000 abstract description 13
- 230000000052 comparative effect Effects 0.000 description 11
- 239000000843 powder Substances 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 238000000498 ball milling Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/01—Particle morphology depicted by an image
- C01P2004/03—Particle morphology depicted by an image obtained by SEM
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/30—Particle morphology extending in three dimensions
- C01P2004/32—Spheres
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
Landscapes
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Abstract
The invention provides a method for synthesizing spherical cerium carbonate and cerium oxide, which comprises the steps of respectively dissolving a cerium source and a precipitator in water to prepare a cerium source solution and a precipitator solution; respectively carrying out bubbling treatment on the cerium source solution and the precipitant solution by using inert gas; adding the precipitant solution after bubbling treatment into the cerium source solution after bubbling treatment, and mixing to form a reaction solution; stirring the reaction solution in an inert gas environment, carrying out precipitation reaction on the reaction solution, and naturally cooling the reaction solution to room temperature after the reaction is finished; and filtering the reaction solution to obtain spherical cerium carbonate. And drying and roasting the obtained spherical cerium carbonate to obtain cerium oxide. The obtained cerium oxide particles can be applied to CMP polishing after dispersion treatment, and show good CMP polishing characteristics.
Description
Technical Field
The invention relates to a synthesis method of cerium carbonate and cerium oxide thereof, in particular to a synthesis method of spherical cerium carbonate and cerium oxide.
Background
Cerium oxide has a high polishing activity for silicon dioxide and can achieve a high polishing effect at a low solid content, and thus, it has attracted much attention as an abrasive in the field of chemical mechanical polishing solutions. Studies have shown that when cerium oxide is used as an abrasive, its own particle characteristics are critical to the polishing effect. As in STI polishing applications, there are reports in the literature that cerium oxide particle size, morphology, and the like all have a significant impact on defect generation during polishing and polishing rate selectivity.
The high-temperature roasting method is a traditional synthesis method of cerium oxide, but the synthesis method has the problems of particle sintering, agglomeration and the like, and the synthesized cerium oxide powder can meet the CMP polishing application requirement only by further performing ball milling dispersion treatment. Meanwhile, the cerium oxide product prepared by the traditional ball milling dispersion method has low purity and uneven particle size. In addition, the synthesis method of cerium oxide may be to synthesize cerium carbonate as a precursor, and further to calcine the cerium carbonate at a high temperature to obtain a target product cerium oxide powder. Generally, the morphology of the cerium carbonate precursor influences the morphology of cerium oxide prepared by subsequent roasting. However, the cerium oxide product synthesized by the conventional cerium oxide synthesis method has uneven particle size, and is difficult to meet the requirements of CMP on the characteristics of abrasive particle size, surface morphology and the like.
Disclosure of Invention
In order to solve the above problems, the present invention provides a synthesis method, which can prepare spherical cerium carbonate with uniform particle size by controlling reaction conditions, further prepare nearly spherical cerium oxide particles by using the spherical cerium carbonate as a precursor, and the obtained cerium oxide particles can be applied to CMP polishing after dispersion treatment, thereby showing good CMP polishing characteristics.
Specifically, the invention provides a method for synthesizing spherical cerium carbonate, which comprises the following steps:
(1) respectively dissolving a cerium source and a precipitator in water to prepare a cerium source solution and a precipitator solution;
(2) respectively carrying out bubbling treatment on the cerium source solution and the precipitant solution by using inert gas;
(3) adding the precipitant solution after bubbling treatment into the cerium source solution after bubbling treatment, and mixing to form a reaction solution;
(4) stirring the reaction solution in an inert gas environment, carrying out precipitation reaction on the reaction solution, and naturally cooling the reaction solution to room temperature after the reaction is finished;
(5) and filtering the reaction solution to obtain spherical cerium carbonate.
In the invention, the molar ratio of the cerium source to the precipitant is 1: 2-1: 5.
in the invention, the cerium source is soluble cerium salt; preferably, the soluble cerium salt is selected from one or more of cerium nitrate, cerium chloride and cerium acetate; preferably, the soluble cerium salt is cerium nitrate.
In the invention, the precipitant is soluble carbonate; preferably, the soluble carbonate is selected from one or more of ammonium carbonate and ammonium bicarbonate; preferably, the soluble carbonate is ammonium carbonate.
In the invention, the molar concentration of the cerium source solution is 0.1-1.0M; preferably, the molar concentration of the cerium source solution is 0.2-0.6M.
In the invention, the molar concentration of the precipitant solution is 0.1-3.0M; preferably, the molar concentration of the precipitant solution is 0.5-1.5M.
In the present invention, the inert gas is nitrogen.
In the present invention, the cerium source solution and the precipitant solution are bubbled for 1 hour or more.
In the invention, the mixed feeding time of adding the precipitant solution after bubbling into the cerium source solution after bubbling is 10-120 minutes; preferably, the mixing and feeding time of the precipitant solution after the bubbling treatment to the cerium source solution after the bubbling treatment is 20 to 60 minutes.
In the invention, the reaction temperature of the reaction solution for precipitation reaction is 85-100 ℃.
In the invention, the reaction time of the reaction solution for precipitation reaction is 2-8 hours; preferably, the reaction time of the reaction solution for the precipitation reaction is 4-6 hours.
In addition, the invention provides a synthesis method of cerium oxide, which specifically comprises the following steps:
(1) drying the synthesized spherical cerium carbonate in an oven to obtain dried spherical cerium carbonate;
(2) and roasting the dried spherical cerium carbonate to obtain cerium oxide.
In the invention, the spherical cerium carbonate is dried in an oven at 70-120 ℃.
In the invention, the dried spherical cerium carbonate is roasted at 300-700 ℃.
In the invention, the dried spherical cerium carbonate is roasted for 1-6 hours.
Compared with the prior art, the invention has the advantages that:
(1) the spherical cerium carbonate can be synthesized by controlling reaction conditions, and the obtained spherical cerium carbonate has the particle size of 100-300 nm in a centralized manner and is uniform in particle size distribution;
(2) the cerium oxide particles further synthesized by using the spherical cerium carbonate show good CMP polishing performance after dispersion treatment.
Drawings
Fig. 1 is a scanning microscope (SEM) image of the spherical cerium carbonate synthesized in example 1.
Fig. 2 is a scanning microscope (SEM) image of the cerium oxide synthesized in example 1.
Fig. 3 is a scanning microscope (SEM) image of the cerium carbonate synthesized in comparative example 1.
Fig. 4 is a scanning microscope (SEM) image of the cerium oxide synthesized in comparative example 1.
Detailed Description
The advantages of the invention are explained in detail below with reference to the drawings and the embodiments.
TABLE 1 Synthesis conditions of spherical cerium carbonate in examples 1 to 9 and comparative examples 1 to 3
The spherical cerium carbonates synthesized in examples 1 to 9 and comparative examples 1 to 3 were washed with deionized water, and then dried at 70 ℃ for 12 hours to obtain dried spherical cerium carbonate, which was then calcined at 500 ℃ for 2 hours to obtain cerium oxide powder. Preparing cerium oxide powder into cerium oxide dispersion liquid with the mass percentage concentration of 10 wt%, and obtaining the nano cerium oxide dispersion liquid after high-speed shearing and ball milling dispersion.
The polishing solutions prepared in examples 1 to 9 and comparative examples 1 to 3 were respectively prepared as aqueous dispersions having a solid content of 1 wt% and a pH of 4.5, and the removal rates of the TEOS blank wafer were measured under different pressure conditions.
The specific polishing conditions were Mirra, IC1010 polishing pad, Platten and Carrier speeds 93rpm and 87rpm, respectively, 3psi pressure, 150mL/min polishing slurry flow rate, and 60 seconds polishing time. The measured parameters of the surface roughness of the wafer and the polishing rate of the polishing liquid are shown in Table 2.
TABLE 2 results of cerium oxide dispersion polishing experiments corresponding to examples 1 to 9 and comparative examples 1 to 3
As can be seen from the observation of FIG. 1, the cerium carbonate particles synthesized by the synthesis method of example 1 are spherical particles, have uniform particle shapes, and have particle diameters distributed in a concentrated manner in the range of 100 to 300 nm; as can be seen from fig. 2, the spherical cerium carbonate synthesized in example 1 was further dried and calcined to obtain cerium oxide, which also has a nearly spherical shape, uniform particles, and good dispersibility. Fig. 3 and 4 are SEM images of cerium carbonate and cerium oxide corresponding to comparative example 1, and it can be seen that cerium carbonate synthesized by the synthesis method of comparative example 1 has poor dispersibility, is not spherical particle-shaped, and has irregular morphology, and the corresponding cerium oxide has irregular morphology and poor dispersibility. Meanwhile, comparing example 5 with comparative example 1, it can be seen that increasing the content of cerium salt or decreasing the content of precipitant can affect the morphology of the synthesized product; as can be seen from comparative example 3, too low a reaction temperature also affects the morphology of the reaction product.
As can be seen from Table 2, the polishing rates of the cerium oxide dispersions prepared by the synthesis methods of examples 1 to 9 were significantly improved as compared with those of the cerium oxide dispersions prepared by comparative examples 1 to 3, thus indicating that cerium oxide prepared from spherical cerium carbonate particles had excellent polishing properties. Meanwhile, the polishing solutions of examples 1 to 9 effectively reduce the roughness of the surface of the polished wafer, which indicates that the cerium oxide particles with uniform size can effectively protect the surface morphology of the wafer during the polishing process, and further indicates that the cerium oxide dispersion prepared by the synthesis method of the present invention has excellent polishing performance.
In summary, the invention provides a method for synthesizing spherical cerium carbonate, by controlling the reaction conditions, spherical cerium carbonate particles with uniform particles and regular morphology are synthesized. By further reaction, the corresponding cerium oxide can be obtained, and the cerium oxide prepared from the spherical cerium carbonate has excellent polishing properties.
The embodiments of the present invention have been described in detail, but the embodiments are merely examples, and the present invention is not limited to the embodiments described above. Any equivalent modifications and substitutions to those skilled in the art are also within the scope of the present invention. Accordingly, equivalent changes and modifications made without departing from the spirit and scope of the present invention should be covered by the present invention.
Claims (23)
1. A method for synthesizing spherical cerium carbonate comprises the following steps,
(1) respectively dissolving a cerium source and a precipitator in water to prepare a cerium source solution and a precipitator solution;
(2) respectively carrying out bubbling treatment on the cerium source solution and the precipitant solution by using inert gas;
(3) adding the precipitant solution after bubbling treatment into the cerium source solution after bubbling treatment, and mixing to form a reaction solution;
(4) stirring the reaction solution in an inert gas environment, carrying out precipitation reaction on the reaction solution, and naturally cooling the reaction solution to room temperature after the reaction is finished;
(5) and filtering the reaction solution to obtain spherical cerium carbonate.
2. The method of synthesis according to claim 1,
the molar ratio of the cerium source to the precipitant is 1: 2-1: 5.
3. the method of synthesis according to claim 1,
the cerium source is a soluble cerium salt.
4. The method of synthesis according to claim 3,
the soluble cerium salt is selected from one or more of cerium nitrate, cerium chloride and cerium acetate.
5. The method of synthesis according to claim 3,
the soluble cerium salt is cerium nitrate.
6. The method of synthesis according to claim 1,
the precipitant is soluble carbonate.
7. The method of synthesis according to claim 6,
the soluble carbonate is selected from one or more of ammonium carbonate and ammonium bicarbonate.
8. The method of synthesis according to claim 6,
the soluble carbonate is ammonium carbonate.
9. The method of synthesis according to claim 1,
the molar concentration of the cerium source solution is 0.1-1.0M.
10. The method of synthesis according to claim 9,
the molar concentration of the cerium source solution is 0.2-0.6M.
11. The method of synthesis according to claim 1,
the molar concentration of the precipitant solution is 0.1-3.0M.
12. The method of synthesis according to claim 11,
the molar concentration of the precipitant solution is 0.5-1.5M.
13. The method of synthesis according to claim 1,
the inert gas is nitrogen.
14. The method of synthesis according to claim 1,
the cerium source solution and the precipitant solution are subjected to bubbling treatment for 1 hour or more.
15. The method of synthesis according to claim 1,
and the mixing and feeding time of adding the precipitant solution after the bubbling treatment into the cerium source solution after the bubbling treatment is 10-120 minutes.
16. The method of synthesis according to claim 15,
and the mixing and feeding time of adding the precipitant solution after the bubbling treatment into the cerium source solution after the bubbling treatment is 20-60 minutes.
17. The method of synthesis according to claim 1,
the reaction temperature of the reaction solution for precipitation reaction is 85-100 ℃.
18. The method of synthesis according to claim 1,
the reaction time of the reaction solution for precipitation reaction is 2-8 hours.
19. The method of synthesis according to claim 18,
the reaction time of the reaction solution for precipitation reaction is 4-6 hours.
20. A synthesis method of cerium oxide comprises the following steps,
(1) drying the spherical cerium carbonate synthesized according to any one of claims 1 to 19 in an oven to obtain dried spherical cerium carbonate;
(2) and roasting the dried spherical cerium carbonate to obtain cerium oxide.
21. The method of synthesizing cerium oxide according to claim 20,
and drying the spherical cerium carbonate in an oven at 70-120 ℃.
22. The method of synthesizing cerium oxide according to claim 20,
and roasting the dried spherical cerium carbonate at the temperature of 300-700 ℃.
23. The method of synthesizing cerium oxide according to claim 20,
and roasting the dried spherical cerium carbonate for 1-6 hours.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911397756.3A CN113120940B (en) | 2019-12-30 | 2019-12-30 | Spherical cerium carbonate and synthetic method of cerium oxide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911397756.3A CN113120940B (en) | 2019-12-30 | 2019-12-30 | Spherical cerium carbonate and synthetic method of cerium oxide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113120940A true CN113120940A (en) | 2021-07-16 |
| CN113120940B CN113120940B (en) | 2024-09-17 |
Family
ID=76768012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911397756.3A Active CN113120940B (en) | 2019-12-30 | 2019-12-30 | Spherical cerium carbonate and synthetic method of cerium oxide |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113120940B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115259205A (en) * | 2022-08-25 | 2022-11-01 | 兰州兰石中科纳米科技有限公司 | Preparation method and application of nano cerium oxide |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003020224A (en) * | 2001-07-09 | 2003-01-24 | National Institute For Materials Science | Method for manufacturing ceria powder in which individual particles are separated into nanosize |
| CN1699282A (en) * | 2005-06-09 | 2005-11-23 | 江苏工业学院 | Preparation of monodisperse spherical cerium oxide and its application in high precision polishing |
| KR20060134383A (en) * | 2005-06-22 | 2006-12-28 | 주식회사 엘지화학 | Method for preparing cerium oxide nano powder |
| CN101372353A (en) * | 2008-06-12 | 2009-02-25 | 江苏工业学院 | Method for preparing nano CeO2 power by ultrasonic atomization process |
| CN102502758A (en) * | 2011-10-28 | 2012-06-20 | 包头市京瑞新材料有限公司 | Method for preparing large-particle cerium oxide |
| CN102765742A (en) * | 2012-07-17 | 2012-11-07 | 内蒙古科技大学 | Preparation method of cerium oxide microspheres |
| CN110255598A (en) * | 2019-06-28 | 2019-09-20 | 华南理工大学 | A kind of preparation method of flower-like microsphere cerous carbonate and ceria |
-
2019
- 2019-12-30 CN CN201911397756.3A patent/CN113120940B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003020224A (en) * | 2001-07-09 | 2003-01-24 | National Institute For Materials Science | Method for manufacturing ceria powder in which individual particles are separated into nanosize |
| CN1699282A (en) * | 2005-06-09 | 2005-11-23 | 江苏工业学院 | Preparation of monodisperse spherical cerium oxide and its application in high precision polishing |
| KR20060134383A (en) * | 2005-06-22 | 2006-12-28 | 주식회사 엘지화학 | Method for preparing cerium oxide nano powder |
| CN101372353A (en) * | 2008-06-12 | 2009-02-25 | 江苏工业学院 | Method for preparing nano CeO2 power by ultrasonic atomization process |
| CN102502758A (en) * | 2011-10-28 | 2012-06-20 | 包头市京瑞新材料有限公司 | Method for preparing large-particle cerium oxide |
| CN102765742A (en) * | 2012-07-17 | 2012-11-07 | 内蒙古科技大学 | Preparation method of cerium oxide microspheres |
| CN110255598A (en) * | 2019-06-28 | 2019-09-20 | 华南理工大学 | A kind of preparation method of flower-like microsphere cerous carbonate and ceria |
Non-Patent Citations (2)
| Title |
|---|
| 左晓菲;沈明;马桂林;: "纳米CeO_2的形貌控制与表征", 中国稀土学报, no. 02 * |
| 柳召刚;李梅;史振学;胡艳宏;王觅堂;吴锦绣;: "碳酸盐沉淀法制备超细氧化铈的研究", 稀土, no. 06 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115259205A (en) * | 2022-08-25 | 2022-11-01 | 兰州兰石中科纳米科技有限公司 | Preparation method and application of nano cerium oxide |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113120940B (en) | 2024-09-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5385306B2 (en) | Ceria material and method for forming ceria material | |
| JP5213720B2 (en) | Method for producing cerium carbonate powder | |
| CN1771198B (en) | Nanoporous ultrafine alpha-alumina powders and sol-gel process of preparing the same | |
| JP5101626B2 (en) | Method for producing cerium oxide powder using organic solvent and CMP slurry containing this powder | |
| US20110045745A1 (en) | Doped Ceria Abrasives with Controlled Morphology and Preparation Thereof | |
| CN106915761B (en) | Cerium oxide preparation method and application thereof in STI (shallow trench isolation) chemical mechanical polishing | |
| JP2009508795A (en) | Cerium carbonate powder and production method, cerium oxide powder produced therefrom and production method, and CMP slurry containing the same | |
| CN115259205B (en) | Preparation method and application of nano cerium oxide | |
| JP2015110513A (en) | Crystalline cerium oxide and method for producing the same | |
| CN115403063A (en) | Cerium dioxide particles and preparation method and application thereof | |
| CN113120940B (en) | Spherical cerium carbonate and synthetic method of cerium oxide | |
| JP6371193B2 (en) | Method for producing silica-based composite particle dispersion | |
| WO2021105174A1 (en) | Cerium based particles, process for producing the same and uses thereof in polishing | |
| CN108249468A (en) | A kind of preparation method of cerium oxide crystalline and its application in chemical mechanical polishing liquid | |
| CN113120942A (en) | Synthesis method of spindle-shaped cerium carbonate and cerium oxide thereof | |
| WO2022243280A1 (en) | Liquid dispersion and powder of cerium based core-shell particles, process for producing the same and uses thereof in polishing | |
| KR100991154B1 (en) | Process for producing a cerium oxide powder | |
| WO2023125890A1 (en) | Method for synthesizing cerium oxide, cerium oxide, and chemical mechanical polishing solution | |
| JP2007186379A (en) | Method for manufacturing alpha alumina particle | |
| CN116812963A (en) | Preparation method of nanoscale cerium oxide for rough polishing of silicon substrate | |
| JP2018168063A (en) | Method for producing silica composite particle dispersion | |
| JP2023080995A (en) | Composite type ceria based composite fine particle liquid dispersion, and method of producing the same | |
| WO2023109515A1 (en) | Method for synthesizing cerium oxide and chemical mechanical polishing solution | |
| JP7215977B2 (en) | Ceria-based composite fine particle dispersion, method for producing the same, and polishing abrasive dispersion containing ceria-based composite fine particle dispersion | |
| CN116410666A (en) | Method for synthesizing cerium oxide and chemical mechanical polishing solution |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |