CN113117388A - Filtering liquid storage device - Google Patents
Filtering liquid storage device Download PDFInfo
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- CN113117388A CN113117388A CN201911405046.0A CN201911405046A CN113117388A CN 113117388 A CN113117388 A CN 113117388A CN 201911405046 A CN201911405046 A CN 201911405046A CN 113117388 A CN113117388 A CN 113117388A
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- 239000007788 liquid Substances 0.000 title claims abstract description 416
- 238000001914 filtration Methods 0.000 title claims abstract description 30
- 238000003860 storage Methods 0.000 title claims abstract description 28
- 239000000126 substance Substances 0.000 claims abstract description 135
- 230000004888 barrier function Effects 0.000 claims abstract description 32
- 238000012544 monitoring process Methods 0.000 claims description 33
- 230000001502 supplementing effect Effects 0.000 claims description 19
- 239000012530 fluid Substances 0.000 claims description 13
- 238000007599 discharging Methods 0.000 claims description 12
- 239000002245 particle Substances 0.000 abstract description 16
- 239000003344 environmental pollutant Substances 0.000 abstract description 13
- 231100000719 pollutant Toxicity 0.000 abstract description 13
- 238000012423 maintenance Methods 0.000 abstract description 7
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- 238000004140 cleaning Methods 0.000 description 6
- 238000011109 contamination Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
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- 230000000903 blocking effect Effects 0.000 description 2
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- 238000012986 modification Methods 0.000 description 2
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- 230000009286 beneficial effect Effects 0.000 description 1
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- 230000003749 cleanliness Effects 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
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- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D21/00—Separation of suspended solid particles from liquids by sedimentation
- B01D21/0039—Settling tanks provided with contact surfaces, e.g. baffles, particles
- B01D21/0042—Baffles or guide plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D21/00—Separation of suspended solid particles from liquids by sedimentation
- B01D21/0039—Settling tanks provided with contact surfaces, e.g. baffles, particles
- B01D21/0045—Plurality of essentially parallel plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D21/00—Separation of suspended solid particles from liquids by sedimentation
- B01D21/02—Settling tanks with single outlets for the separated liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D21/00—Separation of suspended solid particles from liquids by sedimentation
- B01D21/30—Control equipment
- B01D21/34—Controlling the feed distribution; Controlling the liquid level ; Control of process parameters
Abstract
The invention provides a filtering liquid storage device, which comprises: a tank for holding a chemical liquid; the overflow barrier is used for dividing the groove body into a first sub-groove and a second sub-groove; the height of the overflow fence is lower than that of the tank body; chemical liquid in the first sub-tank overflows to the second sub-tank through the top of the overflow fence; the liquid return pipeline is connected with the first sub-tank and used for recovering the chemical liquid and conveying the chemical liquid to the first sub-tank; and a liquid supply pipeline which is connected with the second sub-tank and is used for supplying the chemical liquid from the second sub-tank to the liquid using equipment. According to the invention, by introducing the groove body separated by the overflow fence, when the chemical liquid overflows from the top of the overflow fence, the particle pollutants spontaneously sink and are removed under the action of gravity, so that the clean chemical liquid is obtained. The filtering liquid storage device can effectively remove particle pollutants in the circulating chemical liquid, is convenient and easy to implement and maintain, reduces the load of an equipment filter, and can effectively reduce the maintenance cost of the equipment.
Description
Technical Field
The invention relates to the field of semiconductor manufacturing equipment, in particular to a filtering liquid storage device.
Background
In semiconductor processing, recycling of chemical solutions is often involved. After chemical liquid used for processes such as cleaning or polishing is used in a process cavity of the liquid using equipment, the chemical liquid is uniformly collected and reflowed to a special liquid storage tank for storage, and the liquid storage tank supplies liquid to the liquid using equipment again. The chemical liquid circularly flows between the liquid storage tank and the process cavity, so that the cyclic utilization of the chemical liquid is realized.
After the chemical liquid is used in the process chamber, particle pollutants are often doped in the recovered chemical liquid, especially tiny particles, the particle size of which is usually 5-10 μm. Contamination of the wafer surface by such particulate contaminants can affect the normal process and even cause a reduction in wafer yield. Therefore, for the chemical liquid which is recycled, a corresponding filtration and purification process is indispensable.
However, in the prior art, the used chemical liquid is generally self-returned from the process chamber to the reservoir under the action of gravity. If the filter is additionally arranged on the return pipeline, after the filter is used for a period of time, as the particulate matters trapped by the filter layer in the filter increase, the resistance to the flow of the chemical liquid increases, and the flow rate of the chemical liquid returning to the liquid storage tank is influenced. On the other hand, if the concentration of the particle pollutants in the chemical liquid provided by the liquid storage tank is too high, and the chemical liquid is filtered only by the filter configured by the liquid using equipment, the load of the filter is increased, the service life of the filter is further shortened, the maintenance period of the filter is shortened, and the maintenance cost of the equipment is increased.
Therefore, there is a need to provide a new filtering and storing device to solve the above problems.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, the present invention provides a filtering liquid storage device, which is used to solve the problem that the particle pollutants in the chemical liquid recycled in the prior art cannot be effectively filtered.
To achieve the above and other related objects, the present invention provides a filtered liquid storage device, comprising:
a tank for holding a chemical liquid;
the overflow fence is used for dividing the groove body into a first sub-groove and a second sub-groove; the height of the overflow fence is lower than that of the tank body; the chemical liquid in the first sub-tank overflows to the second sub-tank through the top of the overflow fence;
the liquid return pipeline is connected with the first sub-tank and used for recovering the chemical liquid and conveying the chemical liquid to the first sub-tank;
and a liquid supply line connected to the second sub tank for supplying the chemical liquid from the second sub tank to a liquid-using facility.
As an alternative of the present invention, the bottom surface of the first sub-tank is a slope, and the height of the area of the slope close to the overflow barrier is lower than the height of the area of the slope far from the overflow barrier.
As an alternative of the invention, the filtering and liquid storing device further comprises a liquid discharging pipeline for discharging the chemical liquid from the tank body; the liquid discharge pipeline comprises a first liquid discharge pipeline connected with the first sub-tank and a second liquid discharge pipeline connected with the second sub-tank; the first drainage pipeline is connected with the bottom surface, close to the overflow fence, of the first sub-tank.
As an alternative of the present invention, the first drain line is connected to the second drain line, and discharges the chemical liquid through the second drain line; the liquid supply pipeline is connected with the second liquid discharge pipeline and acquires the chemical liquid from the second liquid discharge pipeline; the first liquid discharge pipeline, the second liquid discharge pipeline and the liquid supply pipeline are respectively provided with a valve, and the state that the chemical liquid is supplied to liquid using equipment from the second sub-tank or the chemical liquid is discharged from the tank body is switched through the switch of the valve.
As an alternative of the invention, the position of the port of the liquid return pipeline communicated with the first sub-tank is lower than the height of the overflow fence.
As an alternative of the invention, the height of the overflow barrier ranges between one half to three quarters of the height of the trough.
As an alternative of the present invention, the filtering and storing device further includes a liquid replenishing module for replenishing the chemical liquid into the tank body.
As an alternative of the present invention, the fluid infusion module includes a fluid infusion pipeline and a fluid infusion tank; one end of the liquid supplementing pipeline is connected with the liquid supplementing groove, and the other end of the liquid supplementing pipeline is connected with the second sub-groove.
As an alternative of the present invention, the filtering and storing device further includes a liquid level monitoring module for monitoring a liquid level position of the liquid medicine.
As an alternative of the present invention, the liquid level monitoring module includes a liquid level monitoring pipeline, a liquid level sensor and a liquid level control unit; the liquid level monitoring pipeline comprises a liquid receiving end and a gas receiving end, the liquid receiving end is connected with the tank body, the height of the liquid receiving end is lower than the height of the liquid level position of the chemical liquid in the tank body, and the height of the gas receiving end is higher than the height of the liquid level position of the chemical liquid in the tank body; the liquid level sensor is used for monitoring the liquid level position of the chemical liquid in the liquid level monitoring pipeline; the liquid level control unit is connected with the liquid level sensor and supplies the chemical liquid to the tank body or discharges the chemical liquid from the tank body according to a liquid level position result obtained by the liquid level sensor.
As described above, the present invention provides a filtering and storing device, which has the following beneficial effects:
according to the invention, by introducing the groove body separated by the overflow fence, when the chemical liquid overflows from the top of the overflow fence, the particle pollutants spontaneously sink and are removed under the action of gravity, so that the clean chemical liquid is obtained. The filtering liquid storage device can effectively remove particle pollutants in the circulating chemical liquid, is convenient and easy to implement and maintain, reduces the load of an equipment filter, and can effectively reduce the maintenance cost of the equipment.
Drawings
Fig. 1 is a front cross-sectional view of a filtered reservoir provided in one embodiment of the invention.
Fig. 2 is a front cross-sectional view of a filtered liquid storage device provided in a second embodiment of the invention.
Description of the element reference numerals
101 trough body
101a first sub-tank
101b second sub-slot
102 overflow fence
103 liquid return pipeline
104 liquid supply pipeline
104a liquid supply line filter
105 liquid discharge pipeline
105a first drain line
105b second drain line
106 fluid infusion module
106a fluid infusion pipeline
106b fluid infusion tank
107 liquid level monitoring module
107a liquid level monitoring pipeline
107b liquid level sensor
107c first level sensor
107d second liquid level sensor
107e third level sensor
108 first valve
109 second valve
110 third valve
200 liquid using equipment
300 particle contamination
401 tank body
401a first sub-tank
401b second sub-groove
402 overflow fence
403 liquid return pipeline
404 liquid supply line
404a supply line filter
405 liquid discharge pipeline
405a first drain line
405b second drain line
406 liquid supplementing module
406a fluid infusion pipeline
406b liquid supplementing tank
407 liquid level monitoring module
407a liquid level monitoring pipeline
407b liquid level sensor
407c first level sensor
407d second liquid level sensor
407e third level sensor
408 first valve
409 second valve
410 third valve
500 liquid using equipment
600 particle contamination
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
Please refer to fig. 1 and fig. 2. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention in a schematic manner, and the drawings only show the components related to the present invention rather than being drawn according to the number, shape and size of the components in actual implementation, and the form, quantity and proportion of each component in actual implementation may be changed arbitrarily, and the layout form of the components may be more complicated.
Example one
Referring to fig. 1, the present embodiment provides a filtering and storing device, including:
a tank 101 for containing a chemical liquid;
an overflow barrier 102 for dividing the tank body 101 into a first sub-tank 101a and a second sub-tank 101 b; the height of the overflow fence 102 is lower than that of the trough body 101; the chemical liquid in the first sub-tank 101a overflows to the second sub-tank 101b through the top of the overflow fence 102;
a liquid return line 103 connected to the first sub-tank 101a, for recovering the chemical liquid and delivering the chemical liquid to the first sub-tank 101 a;
and a liquid supply line 104 connected to the second sub tank 101b for supplying the chemical liquid from the second sub tank 101b to the liquid using facility 200.
As shown in fig. 1, the filtering and storing device provided by the present embodiment includes a tank 101 for containing chemical liquid. The trough body 101 is divided into a first sub-trough 101a on the left side and a second sub-trough 101b on the right side by the overflow barrier 102. The overflow barrier 102 is of a solid structure, and has a blocking function, and the height of the overflow barrier is lower than that of the tank body 101, that is, the chemical liquid in the first sub-tank 101a can overflow to the second sub-tank 101b through the top of the overflow barrier 102 under the condition that the chemical liquid does not overflow the tank body 101. Each arrow in fig. 1 represents a flow direction of the chemical liquid at this position, and a dotted line position represents a liquid surface position of the chemical liquid. Optionally, the height of the overflow barrier 102 ranges from one half to three quarters of the height of the trough 101. Preferably, the height of the overflow barrier 102 is two thirds of the height of the trough body 101. Through the height setting, the chemical liquid can be ensured to smoothly overflow from the top of the overflow barrier 102, so that the chemical liquid has a proper liquid supply flow rate, and the particulate pollutants 300 can be effectively deposited and blocked in the bottom area of the first sub-tank 101a through the blocking effect of the overflow barrier 102 when the chemical liquid overflows.
As an example, as shown in fig. 1, the bottom surface of the first sub-groove 101a is a slope, and the height of the area of the slope close to the overflow barrier 102 is lower than the height of the area of the slope far from the overflow barrier 102. By the arrangement of the inclined surface, the liquid surface depth of the chemical liquid will become deeper and deeper in the flowing direction of the chemical liquid from the first sub-tank 101a to the second sub-tank 101b, which will help the particle contaminant 300 to deposit on the bottom of the first sub-tank 101a by its own weight. In the area close to the overflow barrier 102, the particulate contamination 300 will more easily deposit to the bottom of the first sub-tank 101a without affecting the overflow of clean chemical liquid from the top of the overflow barrier 102 into the second sub-tank 101 b.
In addition, the filtering and liquid storage device further comprises a liquid discharge pipeline 105 for discharging the chemical liquid from the tank body 101; the drainage pipeline 105 comprises a first drainage pipeline 105a connected with the first sub-tank 101a and a second drainage pipeline 105b connected with the second sub-tank 101 b; the first drainage pipe 105a is connected to the bottom surface of the first sub-tank 101a near the overflow barrier 102. That is, the connection position of the first drain line 105a connecting the first sub tank 101a is located at a lower position in the slope. This will help to completely drain the residual chemical liquid in the first sub-tank 101a and the particle contaminant 300 deposited therein through the first drain line 105a when the first sub-tank 101a is maintained.
As an example, as shown in fig. 1, the liquid return pipeline 103 is connected to the first sub-tank 101a, and is configured to recover the chemical liquid used in the liquid using equipment and deliver the chemical liquid to the first sub-tank 101 a. Optionally, the height of the position of the port of the return pipe 103 communicating with the first sub-tank 101a is lower than the height of the overflow barrier 102. This ensures that the chemical liquid with the particulate contaminant 300 is introduced into the lower region of the first sub-tank 101a below the height of the overflow barrier 102, and after the natural deposition of the particulate contaminant 300, the clean chemical liquid overflows from the top of the overflow barrier 102 to the second sub-tank 101b, so that the chemical liquid in the second sub-tank 101b is kept clean. Optionally, the distance between the position of the port of the liquid return pipeline 103 communicated with the first sub-tank 101a and the bottom of the first sub-tank 101a is within the range of 100-150 mm; the flow rate of the chemical liquid flowing back in the liquid return pipeline 103 is 1-4L/min. Of course, the above parameters may be adjusted according to the size of each component in the tank 101 and the property of the chemical liquid.
As an example, as shown in fig. 1, the first drain line 105a is connected to the second drain line 105b, and discharges the chemical liquid through the second drain line 105 b; the liquid supply pipeline 104 is connected with the second liquid discharge pipeline 105b, and acquires the chemical liquid from the second liquid discharge pipeline 105 b; the first liquid discharge pipeline 105a, the second liquid discharge pipeline 105b and the liquid supply pipeline 104 are respectively provided with a valve, and the state of supplying the chemical liquid from the second sub-tank 101b to the liquid using equipment 200 or discharging the chemical liquid from the tank body 101 is switched by switching the valves. In this embodiment, the liquid supply system and the liquid discharge system connected to the tank 101 have a common part. Specifically, as shown in fig. 1, one end of the second liquid discharge pipeline 105b is connected to the bottom of the second sub-tank 101b, and the other end is connected to a waste liquid collecting and processing device, not shown, for discharging the chemical liquid from the second sub-tank 101b, and a second valve 109 is disposed on the second liquid discharge pipeline 105 b; one end of the first liquid discharge pipeline 105a is connected with the first sub-tank 101a, the other end of the first liquid discharge pipeline 105a is connected with the second liquid discharge pipeline 105b, the first liquid discharge pipeline 105a is used for discharging the chemical liquid in the first sub-tank 101a into the second liquid discharge pipeline 105b, and a first valve 108 is arranged on the first liquid discharge pipeline 105 a; the liquid supply pipeline 104 is also connected to the second liquid discharge pipeline 105b, and is configured to obtain the chemical liquid for supplying liquid to the liquid consuming apparatus 200 from the second liquid discharge pipeline 105b, and a third valve 110 is disposed on the liquid supply pipeline 104.
Specifically, as shown in fig. 1, when the first valve 108 and the second valve 109 are in a closed state and the third valve 110 is in an open state, the chemical liquid is supplied from the second sub-tank 101b to the liquid using device 200 through the second liquid discharging pipe 105b and the liquid supplying pipe 104; when the first valve 108 and the second valve 109 are in an open state and the third valve 110 is in a closed state, the chemical liquid in the first sub-tank 101a and the second sub-tank 101b is discharged through the first liquid discharge pipe 105a and the second liquid discharge pipe 105b, which can drain the chemical liquid in the tank body 101 to clean the deposited particulate pollutants 300 during maintenance of the device. Alternatively, the connection position of the first drain line 105a connecting the first sub tank 101a is located at a lower position in the bottom slope so that the chemical liquid in the first sub tank 101a can be completely drained. It should be noted that, in this embodiment, a structural design that the liquid supply pipeline is communicated with the liquid discharge pipeline is adopted, so that the integration level of the device can be improved, the space layout can be effectively saved, and the cost of the device can be reduced. In other embodiments of the present invention, the first liquid discharging pipeline, the second liquid discharging pipeline and the liquid supplying pipeline may also adopt separate independent structural designs, and are directly connected to the first sub-tank or the second sub-tank, respectively, to independently implement the liquid discharging or supplying functions thereof.
As an example, as shown in fig. 1, the filtering and storing device further includes a liquid replenishing module 106 for replenishing the chemical liquid into the tank 101. Specifically, the fluid replacement module 106 includes a fluid replacement pipeline 106a and a fluid replacement tank 106 b; one end of the fluid infusion pipeline 106a is connected to the fluid infusion tank 106b, and the other end is connected to the second sub-tank 101 b. Whether the chemical liquid in the liquid supplementing tank 106b flows into the second sub-tank 101b through the liquid supplementing pipeline 106a is controlled by arranging a valve switch and the like.
As an example, as shown in fig. 1, the filtering liquid storage device further includes a liquid level monitoring module 107 for monitoring a liquid level position of the chemical liquid. Specifically, the liquid level monitoring module 107 comprises a liquid level monitoring pipeline 107a, a liquid level sensor 107b and a liquid level control unit; the liquid level monitoring pipeline 107a comprises a liquid receiving end and a gas receiving end which are connected with the tank body 101, the height of the liquid receiving end is lower than the liquid level position height of the chemical liquid in the tank body 101, and the height of the gas receiving end is higher than the liquid level position height of the chemical liquid in the tank body 101; the liquid level sensor 107b is used for monitoring the liquid level position of the chemical liquid in the liquid level monitoring pipeline 107 a; the liquid level control unit is connected with the liquid level sensor 107b, and supplements the chemical liquid to the tank body 101 or discharges the chemical liquid from the tank body 101 according to a liquid level position result obtained by the liquid level sensor 107 b. The liquid level monitoring pipeline 107a is connected with the liquid receiving end and the gas receiving end of the tank body 101, so that the liquid level in the liquid level monitoring pipeline 107a is equal to the liquid level in the tank body 101. The liquid level in the tank body 101 can be monitored in real time by observing the liquid level in the liquid level monitoring pipeline 107a, and chemical liquid is supplemented to or removed from the tank body 101 through the control of the liquid level control unit so as to keep the liquid level position at a set position all the time.
Optionally, as shown in fig. 1, the liquid level sensors 107b include a first liquid level sensor 107c, a second liquid level sensor 107d, and a third liquid level sensor 107 e. Wherein the first level sensor 107c is configured to monitor whether the liquid level position exceeds an allowed maximum liquid level position, the third level sensor 107e is configured to monitor whether the liquid level position is lower than an allowed minimum liquid level position, and the second level sensor 107d is configured to monitor whether the liquid level position is at a most suitable set liquid level. It should be noted that the highest liquid level position monitored by the first liquid level sensor 107c should not be higher than the height of the tank 101, so as to prevent the chemical liquid from overflowing the tank 101; the lowest liquid level position monitored by the third liquid level sensor 107e should be at least not lower than the top height of the overflow fence 102, so as to prevent the chemical liquid from overflowing to the second sub-tank 101b, or the liquid level of the second sub-tank 101b is lower than the liquid level of the first sub-tank 101a, when the chemical liquid in the first sub-tank 101a overflows, the chemical liquid in the second sub-tank 101b is impacted, on one hand, the chemical liquid in the second sub-tank 101b fluctuates, which affects the flow rate and the flow rate of the liquid supply, on the other hand, the impact easily causes the chemical liquid to generate vortex bubbles, which will cause the chemical liquid carried gas supplied by the liquid supply pipeline 104, which affects the stable operation of the process.
Optionally, in this embodiment, the liquid level monitoring module 107 is further connected to the liquid receiving and supplementing module 106 and valves of the liquid discharging pipeline 105 and the liquid supplying pipeline 104, respectively. When the first liquid level sensor 107c detects that the liquid level rises to the highest liquid level position, the liquid level control unit will control to open the first valve 108 and the second valve 109, the third valve 110 can be selectively opened or closed according to the operation state of the liquid using equipment 200, and the chemical liquid in the first sub-tank 101a and the second sub-tank 101b will be drained through the first drainage pipeline 105a and the second drainage pipeline 105b to drain the redundant chemical liquid; when the third liquid level sensor 107e monitors that the liquid level is lowered to the lowest liquid level position, the liquid level control unit controls the valve of the liquid receiving and supplementing module 106 to start supplementing the chemical liquid into the tank 101 until the liquid level is restored to the most suitable set liquid level monitored by the second liquid level sensor 107 d.
It should be noted that, in this embodiment, the liquid level sensor 107b may be an optical sensor, and the liquid level monitoring pipeline 107a is made of a transparent or translucent material at the position monitored by the liquid level sensor 107 b. In other embodiments of the present invention, the liquid level position may also be monitored by other monitoring means, for example, a magnetic suspension type, a pressure type or an acoustic liquid level sensor, and the related arrangement of the liquid level sensor 107b may also be adjusted according to different types thereof.
As an example, a liquid supply line filter 104a may be further disposed on the liquid supply line 104, and the liquid supply line filter 104a may further filter the initially filtered and cleaned chemical liquid in the second sub-tank 101b to ensure that the cleanliness of the chemical liquid supplied by the liquid supply line 104 to the liquid consuming apparatus 200 meets the process standard. Since most of the particulate pollutants 300 are deposited and filtered in the tank body 101 by the first sub-tank 101a and the second sub-tank 101b separated by the overflow barrier 102, the filtering load borne by the liquid supply pipeline filter 104a is greatly reduced, and the service life and the maintenance period are also improved.
Example two
Referring to fig. 2, the present embodiment provides a filtering liquid storage device, and compared with the scheme of arranging the sub-tanks on the left and right sides in the first embodiment, the present embodiment is different in that in the present embodiment, a tank body 401 is a cylindrical tank, an overflow barrier 402 is a cylindrical partition wall coaxial with the tank body 401, referring to fig. 2, the overflow barrier 402 divides the tank body 401 into a first sub-tank 401a located at an inner ring and a second sub-tank 401b surrounding the first sub-tank 401a, and chemical liquid overflows from the first sub-tank 401a of the inner ring to the second sub-tank 401b surrounding the first sub-tank 401a through the top of the overflow barrier 402.
As an example, as shown in fig. 2, a liquid return pipe 403 is disposed in a central region of the first sub-tank 401a, and has a height lower than that of the overflow fence 402. The chemical liquid discharged from the liquid return pipe 403 will complete the deposition and removal of the particulate contaminant 600 in the first sub-tank 401a, and overflow the clean chemical liquid to the peripheral second sub-tank 401 b. Alternatively, the liquid supply line 404 is connected to the second liquid discharge line 405b, and obtains the cleaning chemical liquid from the second liquid discharge line 405 b. The second liquid discharge pipe 405b and the bottom of the second sub-tank 401b have a plurality of equally spaced ports, so that the cleaning chemical liquid in the second sub-tank 401b can uniformly flow into the second liquid discharge pipe 405b and be supplied to the liquid using equipment 500 through the liquid supply pipe 404. The bottom surface of the first sub-groove 401a is a conical inclined surface. As shown in fig. 2, the height of the area of the ramp near the overflow barrier 402 is lower than the height of the area of the ramp far from the overflow barrier 402. A first drainage line 405a is connected to the bottom surface of the first sub-tank 401a, which is close to the overflow barrier 402. Optionally, the first drainage pipeline 405a and the bottom of the first sub-tank 401a have a plurality of equally spaced interfaces, so that the chemical liquid in the first sub-tank 401a can be uniformly drained into the first drainage pipeline 405 a. This enables the residual chemical liquid in the first sub-tank 401a and the particulate contaminant 600 to be completely drained away when the apparatus is maintained and cleaned.
Compared with the first embodiment, in the filtering and storing device provided by the present embodiment, the chemical liquid is removed from inside to outside, the flowing directions of the chemical liquid in the radial direction of the tank 401 are equivalent, and the filtering and cleaning of the chemical liquid are completed by the self-precipitation of the particulate contaminants, so the stability of the flowing and overflowing of the chemical liquid is very important for the cleaning effect. The groove body structure design of the embodiment can be adopted to obtain a chemical liquid cleaning process with more stable particle pollutant deposition and chemical liquid overflow processes.
Other embodiments of this example are the same as example one. For example, the filtered liquid storage device is further provided with a liquid level monitoring module 407, which comprises a liquid level monitoring pipeline 407a, a liquid level sensor 407b and a liquid level control unit. Wherein the liquid level sensor 407b comprises a first liquid level sensor 407c, a second liquid level sensor 407d and a third liquid level sensor 407 e. The filtering and liquid storing device is further provided with a liquid supplementing module 406 which comprises a liquid supplementing pipeline 406a and a liquid supplementing groove 406 b. A first valve 408 is provided on the first drain line 405a, a second valve 409 is provided on the second drain line 405b, and a third valve 410 is provided on the liquid supply line 404. A liquid supply line filter 404a is also provided in the liquid supply line 404. The functions of the above components in this embodiment are the same as those in the first embodiment, and are not described again here.
In summary, the present invention provides a filtering and storing device, which includes: a tank for holding a chemical liquid; the overflow fence is used for dividing the groove body into a first sub-groove and a second sub-groove; the height of the overflow fence is lower than that of the tank body; the chemical liquid in the first sub-tank overflows to the second sub-tank through the top of the overflow fence; the liquid return pipeline is connected with the first sub-tank and used for recovering the chemical liquid and conveying the chemical liquid to the first sub-tank; and a liquid supply line connected to the second sub tank for supplying the chemical liquid from the second sub tank to a liquid-using facility. According to the invention, by introducing the groove body separated by the overflow fence, when the chemical liquid overflows from the top of the overflow fence, the particle pollutants spontaneously sink and are removed under the action of gravity, so that the clean chemical liquid is obtained. The filtering liquid storage device can effectively remove particle pollutants in the circulating chemical liquid, is convenient and easy to implement and maintain, reduces the load of an equipment filter, and can effectively reduce the maintenance cost of the equipment.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. A filtered liquid storage device, comprising:
a tank for holding a chemical liquid;
the overflow fence is used for dividing the groove body into a first sub-groove and a second sub-groove; the height of the overflow fence is lower than that of the tank body; the chemical liquid in the first sub-tank overflows to the second sub-tank through the top of the overflow fence;
the liquid return pipeline is connected with the first sub-tank and used for recovering the chemical liquid and conveying the chemical liquid to the first sub-tank;
and a liquid supply line connected to the second sub tank for supplying the chemical liquid from the second sub tank to a liquid-using facility.
2. A filtering liquid storage device according to claim 1, wherein the bottom surface of the first sub-tank is a slope, and the height of the area of the slope close to the overflow barrier is lower than the height of the area of the slope far from the overflow barrier.
3. A filtered liquid storage device according to claim 2, further comprising a liquid discharge line for discharging the chemical liquid from the tank; the liquid discharge pipeline comprises a first liquid discharge pipeline connected with the first sub-tank and a second liquid discharge pipeline connected with the second sub-tank; the first drainage pipeline is connected with the bottom surface, close to the overflow fence, of the first sub-tank.
4. A filtered liquid storage device according to claim 3, wherein the first liquid discharge line is connected to the second liquid discharge line and discharges the chemical liquid through the second liquid discharge line; the liquid supply pipeline is connected with the second liquid discharge pipeline and acquires the chemical liquid from the second liquid discharge pipeline; the first liquid discharge pipeline, the second liquid discharge pipeline and the liquid supply pipeline are respectively provided with a valve, and the state that the chemical liquid is supplied to liquid using equipment from the second sub-tank or the chemical liquid is discharged from the tank body is switched through the switch of the valve.
5. The filtering liquid storage device according to claim 1, wherein the height of the position of a port of the liquid return pipeline, which is communicated with the first sub-tank, is lower than the height of the overflow barrier.
6. A filtering reservoir as claimed in claim 1 wherein the height of the overflow barrier ranges from one half to three quarters of the height of the tank.
7. The filtering and storing device as claimed in claim 1, further comprising a liquid replenishing module for replenishing the chemical liquid into the tank body.
8. The filtering liquid storage device according to claim 7, wherein the liquid supplementing module comprises a liquid supplementing pipeline and a liquid supplementing groove; one end of the liquid supplementing pipeline is connected with the liquid supplementing groove, and the other end of the liquid supplementing pipeline is connected with the second sub-groove.
9. The filtered fluid storage device of claim 1, further comprising a fluid level monitoring module for monitoring a fluid level of the medical fluid.
10. The filtered liquid storage device of claim 9, wherein the liquid level monitoring module comprises a liquid level monitoring line, a liquid level sensor, and a liquid level control unit; the liquid level monitoring pipeline comprises a liquid receiving end and a gas receiving end, the liquid receiving end is connected with the tank body, the height of the liquid receiving end is lower than the height of the liquid level position of the chemical liquid in the tank body, and the height of the gas receiving end is higher than the height of the liquid level position of the chemical liquid in the tank body; the liquid level sensor is used for monitoring the liquid level position of the chemical liquid in the liquid level monitoring pipeline; the liquid level control unit is connected with the liquid level sensor and supplies the chemical liquid to the tank body or discharges the chemical liquid from the tank body according to a liquid level position result obtained by the liquid level sensor.
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|---|---|---|---|
| CN201911405046.0A CN113117388A (en) | 2019-12-31 | 2019-12-31 | Filtering liquid storage device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911405046.0A CN113117388A (en) | 2019-12-31 | 2019-12-31 | Filtering liquid storage device |
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| CN113117388A true CN113117388A (en) | 2021-07-16 |
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