CN113108984A - Vacuum full-pressure measurement method based on SPR sensing device - Google Patents
Vacuum full-pressure measurement method based on SPR sensing device Download PDFInfo
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- CN113108984A CN113108984A CN202110386437.3A CN202110386437A CN113108984A CN 113108984 A CN113108984 A CN 113108984A CN 202110386437 A CN202110386437 A CN 202110386437A CN 113108984 A CN113108984 A CN 113108984A
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- vacuum
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- pressure measurement
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
- G01N2021/5903—Transmissivity using surface plasmon resonance [SPR], e.g. extraordinary optical transmission [EOT]
Abstract
The invention discloses a vacuum full-pressure measuring method, which relates to the technical field of vacuum full-pressure measurement and SPR sensing characteristicsrAnd combining the corresponding relation with the SPR sensing technology to obtain a vacuum full pressure measuring method. The method has small influence on the vacuum environment, can realize non-contact measurement, and has important significance for realizing the full-pressure vacuum measurement technology based on the substance intrinsic physical property reproduction vacuum magnitude.
Description
Technical Field
The invention belongs to the technical field of vacuum full-pressure measurement and SPR (surface plasmon resonance) sensing characteristics, and particularly relates to a vacuum full-pressure measurement method.
Background
The vacuum full pressure measurement is an important component of the vacuum technology, and has important significance in the aspects of nuclear physics, aerospace, industrial measurement and high-end equipment manufacturing. Currently, commonly used measurement methods include liquid vacuometers, capacitive thin film vacuometers, thermal conduction vacuometers, and ionization vacuometers. Most of the measurement methods have the defects of difficult miniaturization, high cost, no commercialization, reading lag, large influence of external temperature, need of regular calibration and the like. Compared with the traditional vacuum measurement technology, the vacuum measurement technology based on the optical method has the advantages of non-contact measurement, small influence on the vacuum environment and the like. In recent years, vacuum total pressure measurement by optical methods such as optical interference, cold atom collision loss, absorption spectroscopy, and the like is a research hotspot in this field.
Surface Plasmon Resonance (SPR) is a physical optical phenomenon, which generally occurs at a metal-dielectric interface, and when light is incident from an optically dense medium to an optically sparse medium, total internal reflection occurs at a certain incident angle to generate an evanescent wave, and a P-polarized component of the evanescent wave induces a metal Surface Plasmon Wave (SPW). When the frequency and wave number of the SPW and P-polarized light are equal and the propagation directions are the same, the SPW and P-polarized light resonate, so that the intensity of the reflected light is drastically reduced. The resonant absorption peak of the SPR curve is very sensitive to changes in the refractive index of the medium. The sensor based on the SPR technology has the excellent characteristics of high sensitivity, no mark, real-time monitoring, quick analysis and the like, and has wide application prospects in the fields of medicine, environmental monitoring, food safety and the like, but no literature report of the application of the SPR technology to vacuum full-pressure measurement exists.
Disclosure of Invention
Aiming at the defects of the existing measuring method, the invention provides a vacuum full-pressure measuring method, which aims to solve the problems that the existing method is difficult to miniaturize, is greatly influenced by the external temperature, is regularly calibrated and the like. The invention utilizes the vacuum degree P and the relative dielectric constant epsilon of the dry air obtained by the classic Clausius-Moxord equation in the dielectric theoryrThe method has good linearity and sensitivity, and has important significance for realizing the full-pressure vacuum measurement technology for reproducing the vacuum magnitude based on the intrinsic physical properties of the substances.
The purpose of the invention is realized by the following technical scheme:
vacuum degree P and relative dielectric constant epsilon of dry air obtained based on Clausines-Moxord equationrThe corresponding relation between the two is as follows:
a three-layer structure angle modulation type SPR sensing device based on a Kretschmann structure and taking a gold film as a metal medium.
In the above solution, the relation is obtained under the assumption that the air is dry air and the temperature thereof is constant (i.e. neglecting the effect of the humidity and temperature changes on the pressure), which is consistent with some practical working environment of the vacuum gauge.
In the above scheme, the obtaining process of the relation is as follows:
first, by gram-mole equation
The concept of introducing molar polarization yields a density versus dielectric constant for a defined dielectric of
B is a proportionality coefficient; rho is density;
secondly, further, introducing a gas equation under a standard state (temperature T)0273K, pressure P0101.3kPa, density of air ρ0＝1.233k/mm3Relative dielectric constant εr1.0005548), the relative dielectric constant can be obtained
In the above scheme, the corresponding relation is applicable to the range of gram-mole equation application, i.e., the range of the effective lorentz field (medium-low pressure gas dielectric).
In the above scheme, the Kretschmann structure, the three-layer structure angle modulation type P-polarized light reflectance R using the gold film as the metal medium can be expressed by the Fresnel formula:
where d is the thickness of the metal film, ω is the incident light frequency, θfRepresenting the angle of incidence.
In the scheme, the angle modulation measurement precision can reach 1 multiplied by 10-7RIU (reactive Index Unit), relative dielectric constant obtained by corresponding relationNumbers and refractive index values are discussed within this range.
Compared with the prior art, the invention has the following advantages:
1. non-contact measurement can be realized and the influence on the vacuum environment is small.
2. The method is a high-sensitivity full-pressure vacuum measurement technology based on the reproduction vacuum magnitude of the intrinsic physical properties of the substances.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
FIG. 2 is a detailed structural view of the SPR apparatus.
FIG. 3 is an SPR plot of dry air under various pressure conditions.
Detailed Description
The technical solution of the present invention is further described below with reference to the accompanying drawings, but not limited thereto, and any modification or equivalent replacement of the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention shall be covered by the protection scope of the present invention.
The embodiment provides a vacuum full pressure measurement method based on SPR phenomenon, and the specific structure is shown in figure 1, wherein: a vacuum chamber (1); a light source (2); a polarizer (3); an SPR testing device (4); an optical fiber (5) and a Charge Coupled Device (CCD) detector (6); a computer (7).
The SPR testing device (4) is formed by placing a prism (4-1), a gold film (4-2) plated on the prism and a medium layer (4-3) to be tested on a stepping motor (4-4).
The light source (2) uses a He-Ne laser with the wavelength of 632.8nm and is used for generating light with fixed wavelength.
The prism (4-1) uses the refractive index n11.5151 BK7 glass.
The thickness of the gold film (4-2) is 50nm, and the dielectric constant is epsilonAu＝-11.740+1.26i。
The stepping motor (4-4) is used for changing the incidence angle, and the precision is 0.00001 degree.
The implementation process comprises the following steps: as shown in figure 1, light emitted by a light source (2) is changed into polarized light through a polarizer (3) and then reaches a prism (4-1), when the pressure of a vacuum chamber (1) is changed, the refractive index of dry air in a dielectric layer (4-3) to be detected is changed, further, the surface plasma resonance condition is changed, signal light is transmitted into a Charge Coupled Device (CCD) detector through an optical fiber (5), the drift condition of a transmission spectrum can be obtained through a computer (7), and non-contact high-sensitivity measurement is realized.
Claims (7)
1. A vacuum full pressure measurement method based on SPR technology is characterized in that: the method is to use SPR technology to realize vacuum full pressure measurement.
2. A method of vacuum total pressure measurement based on SPR technique according to claim 1, characterised in that the technique is implemented using SPR sensors of angle modulation type.
3. A method of vacuum total pressure measurement based on SPR technique according to claim 1, characterized in that said structure comprises: the device comprises a vacuum chamber (1), a light source (2), a polarizer (3), an SPR testing device (4), an optical fiber (5), a Charge Coupled Device (CCD) detector (6) and a computer (7).
4. A structure according to claim 3, characterized in that the light source (2) has a wavelength of 632.8 nm.
5. A structure according to claim 3, characterized in that said SPR test apparatus (4) comprises: the device comprises a prism (4-1), a gold film (4-2), a medium layer to be tested (4-3) and a stepping motor (4-4).
6. A SPR test apparatus (4) according to claim 5 wherein: the thickness of the gold film (4-2) is 50nm, and the dielectric constant is epsilonAu＝-11.740+1.26i。
7. A SPR testing apparatus (4) according to claim 3, characterised in that said stepping motors (4-4) are adapted to vary the angle of incidence to an accuracy of 0.00001 °.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107941710A (en) * | 2017-08-16 | 2018-04-20 | 四川大学 | Surface plasma resonance sensor and metal surface medium refraction index measuring method based on the weak measurement of quantum |
| CN108120382A (en) * | 2016-11-28 | 2018-06-05 | 天津大学 | For measuring the SPR differential phae measuring methods of nano level metal film thickness |
| CN109490278A (en) * | 2018-09-10 | 2019-03-19 | 桂林电子科技大学 | The rotary SPR of triangle microprism tests optical chip |
| CN111272331A (en) * | 2020-03-05 | 2020-06-12 | 西安柯莱特信息科技有限公司 | Optical fiber air pressure sensor and system based on surface plasmon resonance |
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2021
- 2021-04-12 CN CN202110386437.3A patent/CN113108984A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108120382A (en) * | 2016-11-28 | 2018-06-05 | 天津大学 | For measuring the SPR differential phae measuring methods of nano level metal film thickness |
| CN107941710A (en) * | 2017-08-16 | 2018-04-20 | 四川大学 | Surface plasma resonance sensor and metal surface medium refraction index measuring method based on the weak measurement of quantum |
| CN109490278A (en) * | 2018-09-10 | 2019-03-19 | 桂林电子科技大学 | The rotary SPR of triangle microprism tests optical chip |
| CN111272331A (en) * | 2020-03-05 | 2020-06-12 | 西安柯莱特信息科技有限公司 | Optical fiber air pressure sensor and system based on surface plasmon resonance |
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