CN113108910B - Light source spectrum image acquisition method, device, equipment and storage medium - Google Patents
Light source spectrum image acquisition method, device, equipment and storage medium Download PDFInfo
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- 230000003595 spectral effect Effects 0.000 claims abstract description 81
- 238000005259 measurement Methods 0.000 claims abstract description 80
- 230000007704 transition Effects 0.000 claims abstract description 48
- 239000006185 dispersion Substances 0.000 claims abstract description 17
- 239000011159 matrix material Substances 0.000 claims description 25
- 238000012856 packing Methods 0.000 claims description 11
- 238000004590 computer program Methods 0.000 claims description 8
- 238000009499 grossing Methods 0.000 claims description 8
- 238000010606 normalization Methods 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000004927 fusion Effects 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000004422 calculation algorithm Methods 0.000 description 1
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- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000007499 fusion processing Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
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- 230000004044 response Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
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- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
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- G01S7/497—Means for monitoring or calibrating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J2003/283—Investigating the spectrum computer-interfaced
- G01J2003/2843—Processing for eliminating interfering spectra
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Abstract
The invention provides a light source spectral image acquisition method, which comprises the following steps: s1 echo spectrum images of a standard measurement object in a spectrum confocal system measurement width range are obtained, wherein echo peak positions of the echo spectrum images sequentially move along a preset direction and cover the spectrum confocal system measurement width range, and the preset direction is a direction perpendicular to a close arrangement direction of the spectrum confocal system; s2, acquiring an echo peak value curve corresponding to each echo spectrum image; s3, extracting a transition region between adjacent echo peak curves, reassigning the gray value of each pixel point in the transition region, and fusing the reassigned transition region and the echo peak curves to form a light source spectrum image. The method acquires the corresponding light source spectrum image according to the existing line dispersion spectrum confocal measuring system so as to meet the requirements of subsequent echo position calibration and echo spectrum light intensity distribution curve normalization and reduce the operation complexity.
Description
Technical Field
The invention belongs to the field of spectrum confocal measurement, and particularly relates to a method and a device for acquiring a light source spectrum image, computer equipment and a storage medium.
Background
The non-contact measurement method obtains information on the surface of an object by performing measurement by means of electromagnetism, photoelectricity, ultrasonic waves and the like without contacting the surface of the object to be measured. Optical measurement methods include structured light methods, laser triangulation methods, interferometry, spectroscopic confocal measurements, and the like. The measurement precision of the spectral confocal measurement method can reach submicron level, the method can be suitable for various materials including glass, metal and the like, and can realize the advantages of multilayer thickness measurement and the like, so the method is well developed and widely applied in recent years.
The line dispersion spectrum confocal realizes the linear close arrangement of measurable position points on the basis of the traditional single-point spectrum confocal. Similar to the single-point spectral confocal measurement principle, the line-dispersion spectral confocal method also uses the light waves projected onto the surface of the object to calculate the distance between the object and the measurement system by determining the peak wavelength in the echo signal. Ideally, the system collects the peak wavelength of the echo signal from the surface of the object directly in relation to the distance when the spectrum of the projection light source has the same intensity at each wavelength position. In practice, however, such ideal light sources do not exist, and the actual light source spectrum has different intensity responses at different wavelength positions, and the light intensity distribution of the spectrum is not uniform. Thus, the light intensity distribution curve of the echo spectrum obtained in actual measurement is not a real confocal curve, and the corresponding peak wavelength is not a confocal wavelength.
As mentioned above, since the real echo confocal curve is modulated by the light source spectrum, when the distance is actually calculated, the light intensity distribution curve of the echo spectrum needs to be divided by the light spectrum distribution curve of the light source for normalization, and therefore, the light spectrum distribution curve of the light source is a link that needs to be measured. In the spectrum confocal implementation process, in consideration of the modulation effect of the confocal system on the light source, a light source spectrum image passing through the spectrum confocal system is generally obtained, and then a light source spectrum distribution curve is extracted from the light source spectrum image. Although the additional optical path is added to the spectral confocal system to measure the light source spectral image, the operation is complicated, and the accuracy of the obtained light source spectral image is affected by optical distortion, adjustment error and the like introduced by the additional optical path.
Disclosure of Invention
The invention aims to provide a method for acquiring a light source spectrum image, which is used for acquiring the light source spectrum image according to the existing line dispersion spectrum confocal measurement system under the condition of not introducing an additional light path and meeting the subsequent requirements of echo position calibration and echo spectrum light intensity distribution curve normalization so as to solve the problems in the prior art.
In order to achieve the above object, the present invention provides a light source spectral image acquisition method, including the following steps:
s1 echo spectrum images of a standard measurement object in a spectrum confocal system measurement width range are obtained, wherein echo peak positions of the echo spectrum images sequentially move along a preset direction and cover the spectrum confocal system measurement width range, and the preset direction is a direction perpendicular to a close arrangement direction of the spectrum confocal system;
s2, acquiring an echo peak value curve corresponding to each echo spectrum image;
s3, extracting a transition region between adjacent echo peak curves, reassigning the gray value of each pixel point in the transition region, and fusing the reassigned transition region and the echo peak curves to form a light source spectrum image.
Preferably, in step S1, two adjacent echo spectrum images are partially overlapped.
The width of the overlapped part of the two echo spectrum images is smaller than the moving distance of the adjacent echo spectrum images.
Preferably, in step S1, echo spectrum images of the standard measurement object at different measurement positions in the Z-axis direction are acquired via the spectral confocal system, wherein a plurality of the measurement distances cover the Z-axis range of the spectral confocal system and the echo peak positions of the echo spectrum images formed between each measurement distance are sequentially shifted in a preset direction.
Preferably, in step S2, the acquiring of each echo peak curve includes the following steps:
s21, acquiring all pixel rows of the corresponding echo spectral image along a preset direction, and acquiring row peak pixels in each pixel row;
s22, forming a column matrix by pixel points corresponding to the row peak pixels along the close packing direction of the pixel points to form an echo peak curve;
or S21' acquires all pixel columns of the corresponding echo spectrum image along the preset direction, and acquires the column peak value pixel in each pixel column;
s22', the pixel points corresponding to the column peak pixels are formed into a row matrix along the close packing direction to form an echo peak curve.
Further, in step S22, after the column matrix/row matrix is obtained, the method further includes a step of smoothing the column matrix/row matrix to remove erroneous pixels.
Preferably, the reassigning the gray value of each pixel point of the transition region in the step S3 includes the following steps:
s31 obtaining the pixel gray value G of each pixel position on the two echo spectrum images in the overlapping area of the adjacent echo spectrum images1n、G2nAnd the distance L between each pixel and the central point position of the adjacent echo peak curve1n、L2n；
S32 is based on the pixel gray value G1n、G2nAnd L1n、L2nIs re-assigned to the gray value of each pixel in the transition region.
The invention also provides a light source spectrum image acquisition device, which comprises:
the device comprises an echo spectrum image acquisition module, a spectrum confocal system measurement width acquisition module and a spectrum confocal system measurement width acquisition module, wherein the echo spectrum image acquisition module is used for acquiring continuous echo spectrum images of a standard measurement object in a spectrum confocal system measurement width range, the echo peak positions of a plurality of echo spectrum images sequentially move along a preset direction and cover the spectrum confocal system measurement width range, and the preset direction is a direction vertical to the close arrangement direction of the spectrum confocal system;
the echo peak curve acquisition module is used for acquiring an echo peak curve corresponding to each echo spectrum image;
and the light source spectral image acquisition module is used for extracting a transition region between adjacent echo peak curves, reassigning the gray value of each pixel point in the transition region, and fusing the reassigned transition region and the echo peak curves to form a light source spectral image.
Preferably, in the echo spectrum image acquisition module, two adjacent echo spectrum images are partially overlapped.
Further, in the echo spectral image acquisition module, the width of the overlapping portion of two echo spectral images is smaller than the moving distance of the adjacent echo spectral images.
Preferably, in the echo spectral image acquisition module, echo spectral images of the standard measurement object at different measurement positions in the Z-axis direction are acquired through the spectral confocal system, wherein the plurality of measurement distances cover a Z-axis range of the spectral confocal system, and echo peak positions of the echo spectral images formed between each measurement distance sequentially move along a preset direction.
Preferably, the echo peak curve acquiring module includes:
the line peak value pixel acquisition submodule is used for corresponding to all pixel lines of the echo spectral image along the preset direction and acquiring line peak value pixels in each pixel line;
the echo peak value curve obtaining submodule is used for forming a column matrix by pixel points corresponding to the row peak value pixels along the close packing direction of the pixel points so as to form an echo peak value curve;
or, the echo peak value curve obtaining module includes:
the column peak pixel acquisition submodule is used for acquiring all pixel columns of the corresponding echo spectral image along a preset direction and acquiring column peak pixels in each pixel column;
and the echo peak value curve acquisition submodule is used for forming a row matrix by pixel points corresponding to the column peak value pixels along the close packing direction of the pixel points so as to form an echo peak value curve.
Further, the echo peak value curve obtaining module further comprises a smoothing unit, which is used for smoothing the column matrix/row matrix to eliminate wrong pixel points.
Preferably, the light source spectrum image acquisition module includes:
a parameter obtaining submodule for obtaining the pixel gray value G of each pixel position on the two echo spectrum images in the overlapping area of the adjacent echo spectrum images1n、G2nAnd the distance L between each pixel and the central point position of the adjacent echo peak curve1n、L2n；
And a pixel determination submodule for determining the gray value G based on the pixel1n、G2nAnd L1n、L2nIs re-assigned to the gray value of each pixel in the transition region.
The invention also provides a computer device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, the processor implementing the steps of the method of any one of the preceding claims when executing the computer program.
The invention also provides a computer-readable storage medium having stored thereon a computer program which, when executed by a processor, carries out the steps of the method of any one of the preceding claims.
For a standard measuring object with higher reflectivity, the intensity of an echo spectrum image at a peak position is consistent with the intensity at a position corresponding to a light source spectrum image, when a spectrum confocal system and the standard measuring object are relatively displaced in a Z-axis direction, the peak position of the corresponding echo spectrum image is correspondingly displaced, the method, the device, the computer equipment and the storage medium for acquiring the light source spectrum image utilize the change rule of the peak position of the standard measuring object when the standard measuring object is relatively displaced with the spectrum confocal system to acquire the continuous echo spectrum images of the standard measuring object in the measuring width (namely the Z-axis measuring range of the spectrum confocal system) of the spectrum confocal system, acquire the peak position of each echo spectrum image from the echo spectrum images, and then re-fuse the extracted echo peak positions to form the light source spectrum image corresponding to the spectrum system, therefore, under the condition of not introducing an extra light path, the corresponding light source spectrum image can be obtained according to the existing line dispersion spectrum confocal measuring system, so that the requirements of subsequent echo position calibration and echo spectrum light intensity distribution curve normalization are met, and the operation complexity is reduced.
Drawings
FIG. 1 is a schematic view of a work flow of a light source spectral image acquisition method according to the present invention;
FIG. 2 is a schematic diagram of the structure of the moving device in the Z-axis relative position between the standard measurement object and the spectroscopic confocal system;
FIG. 3 is a schematic diagram of an echo spectrum image of a standard measurement;
FIG. 4 is a schematic flow chart diagram illustrating one embodiment of transition region reassignment;
FIG. 5 is a schematic diagram of light source spectral image fusion according to the present invention;
FIG. 6 is a block diagram of an embodiment of a light source spectral image acquisition device according to the present invention;
FIG. 7 is a hardware architecture of an embodiment of a computer device of the present application.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the scope of the invention in any way.
Like reference numerals refer to like elements throughout the specification. The expression "and/or" includes any and all combinations of one or more of the associated listed items. In the drawings, the thickness, size, and shape of an object have been slightly exaggerated for convenience of explanation. The figures are purely diagrammatic and not drawn to scale.
It will be further understood that the terms "comprises," "comprising," "includes," "including," "has," "includes" and/or "including," when used in this specification, specify the presence of stated features, steps, integers, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, steps, integers, operations, elements, components, and/or groups thereof.
The terms "substantially", "about" and the like as used in the specification are used as terms of approximation and not as terms of degree, and are intended to account for inherent deviations in measured or calculated values that would be recognized by one of ordinary skill in the art.
Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
As shown in fig. 1, the present invention discloses a method for obtaining a light source spectrum image, which obtains a light source spectrum image of a spectrum confocal system by measuring a standard measurement object through the spectrum confocal system, and comprises the following steps:
s1 echo spectrum images of a standard measurement object in a spectrum confocal system measurement width range are obtained, wherein echo peak positions of the echo spectrum images sequentially move along a preset direction and cover the spectrum confocal system measurement width range, and the preset direction is a direction perpendicular to a close arrangement direction of the spectrum confocal system;
s2, acquiring an echo peak value curve corresponding to each echo spectrum image;
s3, extracting a transition region between adjacent echo peak curves, reassigning the gray value of each pixel point in the transition region, and fusing the reassigned transition region and the echo peak curves to form a light source spectrum image.
For a standard measuring object with higher reflectivity, the intensity of an echo spectrum image at a peak position is consistent with the intensity of a light source spectrum image at a corresponding position, when a spectrum confocal system and the standard measuring object are relatively displaced in a Z-axis direction, the peak position of the corresponding echo spectrum image is correspondingly displaced, the invention utilizes the change rule of the peak position of the standard measuring object when the standard measuring object is relatively displaced with the spectrum confocal system to obtain the continuous echo spectrum images of the standard measuring object in the measurement width range of the spectrum confocal system (namely the Z-axis measuring range of the spectrum confocal system), and obtains the peak position extracted from each echo spectrum image, and then the echo peak positions are re-fused to form the light source spectrum image of the corresponding spectrum confocal system, so that under the condition of not introducing an additional light path, and acquiring a corresponding light source spectrum image according to the existing line dispersion spectrum confocal measuring system so as to meet the requirements of subsequent echo position calibration and echo spectrum light intensity distribution curve normalization.
The standard measuring object is a gauge block with high reflectivity and smooth and high-flatness surface, such as a standard gauge block, a reflector and a step gauge. In this embodiment, the size of the standard measurement object is not smaller than the length of the emergent light of the spectrum confocal system, so that when the echo spectrum image is acquired each time, the emergent light can be projected onto the standard measurement object and reflected into the spectrometer of the spectrum confocal system to finally acquire the echo spectrum image at the corresponding position.
S1 echo spectrum images of the standard measurement object in the spectrum confocal system measurement width range are obtained, wherein the echo peak positions of the echo spectrum images sequentially move along a preset direction and cover the spectrum confocal system measurement width range, and the preset direction is a direction perpendicular to the close arrangement direction of the spectrum confocal system.
In step S1, in order to ensure the integrity of the light source spectrum image generated by fusion, it is necessary to ensure that the obtained multiple echo spectrum images are continuous and cover the measurement width of the spectral confocal system (i.e. the first echo spectrum image and the last echo spectrum image need to be located at the leftmost end and the rightmost end of the measurement width of the spectral confocal system respectively), and as a preferred scheme, the echo spectrum images of the standard measurement object at different measurement positions in the Z-axis direction are obtained through the spectral confocal system, wherein the multiple measurement positions cover the Z-vector path of the spectral confocal system and the echo spectrum image formed between each measurement position moves according to a preset distance, and the obtained echo spectrum image is as shown in fig. 3(a) or fig. 3 (b).
In the present embodiment, the apparatus shown in fig. 2 is used to realize the relative position movement between the standard measurement object and the spectral confocal system in the Z-axis direction, in fig. 2, 1 is the spectral confocal system, 3 is the standard measurement object for acquiring the echo spectral image, 2 is the moving apparatus connected to 1 and 3, the moving apparatus 2 can realize the relative movement between the spectral confocal system 1 and the standard measurement object 3 in the Z-axis direction, 4 is the upper computer system for calculation and storage, the relative displacement control between the spectral confocal system 1 and the standard measurement object 2 is performed by the moving apparatus 2, and then the echo spectral image of the standard measurement object 3 is continuously recorded during the relative displacement between the spectral confocal system 1 and the standard measurement object 2.
For a determined spectrum confocal system, the Z-direction range is determined, in step S1, first, the moving device 2 is adjusted to reach a first designated measurement position, at this time, the position of the first echo spectrum image is located at any end point of the measurement width of the spectrum confocal system or just shifted out of the end point of the measurement width of the spectrum confocal system, then the moving device 2 controls the movement between the spectrum confocal system 1 and the standard measurement object 2 in the Z direction to reach the next measurement position and perform the next measurement, at this time, the next group of acquired echo spectrum images is shifted by a preset distance according to the preset direction; after the next group of echo spectrum images are recorded, the movement of the spectrum confocal system 1 and the standard measuring object 2 is continuously controlled through the moving device 2, and the echo spectrum image corresponding to the next position is recorded until the moving device 2 reaches the appointed end position, and at this time, the last echo spectrum image reaches the other end of the measurement width of the spectrum confocal system 1.
Meanwhile, in step S1, in order to ensure the quality of the fused light source spectral image on the whole breadth and ensure that the light source spectral image generated by fusion truly and accurately reflects the true state of the light source spectrum, the positions of two adjacent echo images in the fusion process need to be close enough, that is, the two adjacent measurement positions need to be small enough, so as to avoid the occurrence of band-shaped fluctuation between bright and dark phases in the fused image, and avoid the reduction of the precision of the area image between two echo peak values, so that there is a certain requirement for the preset distance of each movement or the movement distance of the measurement position. Preferably, in this embodiment, two adjacent echo spectral images are partially overlapped to ensure the quality of the fused light source spectral image on the whole web. Furthermore, the width of the overlapping part is smaller than the moving distance setting of the adjacent echo spectrum images, namely the width of the overlapping part is smaller than the moving distance of the adjacent two echo peak values on the images.
S2, respectively acquiring an echo peak value curve corresponding to each echo spectrum image;
the echo peak curve is a set of echo peak positions of the line spectrum confocal system at a certain specific position along the close packing direction, and the echo peak curve corresponding to each echo spectrum image can be obtained by setting threshold screening, image contour extraction and other methods, and as a preferred scheme, in this embodiment, the echo peak position of each echo peak curve is obtained by the following steps:
s21, acquiring all pixel rows of the corresponding echo spectral image along a preset direction, and acquiring row peak pixels in each pixel row;
in step S21, pixels in each row in the echo spectrum image are taken out along a preset direction, that is, the moving direction of the echo spectrum image, the gray values of the pixels in each row are combined into one-dimensional data to form a pixel row, and then all the pixel rows are traversed and the row peak position in the one-dimensional data is obtained through a peak finding algorithm and the like.
S22, forming a column matrix by pixel points corresponding to the row peak pixels along the close packing direction to form an echo peak curve.
In step S22, pixel points corresponding to all the line peak positions are taken out, and the pixel positions in the column direction are combined to form a column matrix to be used as an echo peak curve of the echo spectral image. In this embodiment, further, after the column matrix is obtained in step S22, a step of smoothing the column matrix is further included to delete the pixel points that may be erroneously determined as the peak value and replace the pixel points with the correct pixel positions of the row peak value.
Of course, if the close-packed direction is shown in fig. 3(b), the row peak pixels may be associated with the row peak pixels or the column pixel peaks may be acquired, and the echo peak position of each echo peak curve may be acquired by the following steps:
s21' acquiring all pixel columns of the corresponding echo spectrum image along the preset direction, and acquiring column peak pixels in each pixel column;
s22', the pixel points corresponding to the column peak pixels are formed into a row matrix along the close packing direction to form an echo peak curve.
S3, extracting a transition region between adjacent echo peak curves, reassigning the gray value of each pixel point in the transition region, and fusing the reassigned transition region and the echo peak curves to form a light source spectrum image.
In step S3, after the peak position of each echo spectrum image is obtained, the echo peak curves and the transition regions between adjacent echo peak curves are extracted to be fused to form the light source spectrum image.
Specifically, the method comprises the following steps:
s31, obtaining each pixel of the transition area between each adjacent echo peak value curve; as shown in fig. 4, the adjacent echo spectrum images in fig. 4(a) are merged into the same coordinate system according to the respective shift distances and the transition regions between the adjacent echo peak curves are extracted, as shown in fig. 4 (b). Wherein ". times" represents the peak curve and "Δ" represents the pixels in the transition region between the adjacent echo peak curves, as shown in fig. 4 (c).
S32 reassigning the gray value of each pixel of the transition region;
as described above, the gray value at the peak position is consistent with the actual light source spectrum gray value, but the gray value in the transition region is attenuated due to defocusing of the spectrum confocal system, so that the gray value and the actual value have a deviation, and in this embodiment, it is necessary to acquire each transition region and reassign each pixel in the transition region to compensate the deviation.
Preferably, in this embodiment, S31 obtains the gray value G of each pixel on two adjacent echo spectrum images of each pixel between two adjacent echo peak curves1n、G2nAnd the distance L from each pixel to the center point of the two echo peak curves1n、L2n(ii) a S32 obtaining the gray level G of the pixel1n、G2nAnd L1n、L2nThe value of (2) is the gray value of each pixel in the transition area to be reassigned;
the evaluation method can be used for evaluating in various ways, and the evaluation method is not limited, and only the compensation deviation needs to be realized. Such as can compare L1nAnd L2nTwo of the echo light is takenThe gray value of a pixel point which is closer to the spectral image is used as assignment of a corresponding position in the light source spectrogram; or the pixels at the respective positions of the two peaks can be calculated by adopting a uniform over-interpolation mode and used as the gray value of the corresponding position of the light source spectrum image, for example, a linear interpolation method is adopted, that is, the method is that
To reassign each pixel point in the transition region, wherein g1、g2For the respective gray value, L, of the first row of the adjacent echo peak curves1、L2Respectively assigning values to the distances from a certain point in the transition region to the adjacent echo peak value curves, and G is a value of the point again; the average value of the pixel gray values on the two echo spectrum images can also be taken as the gray value of the corresponding position of the transition region.
S33, fusing all the peak curves and the transition regions after reassignment to form a light source spectrum.
As shown in fig. 5, in step S33, all peak curves and the reassigned transition regions are extracted and fused according to the corresponding coordinate positions and the corresponding gray-scale values to form a light source spectral image, which is consistent with the actual light source spectral image.
Example two
As shown in fig. 6, the present invention also provides a light source spectral image acquisition apparatus 10, including:
the echo spectrum image acquisition module 11 is configured to acquire continuous echo spectrum images of a standard measurement object in a spectrum confocal system measurement width range, where echo peak positions of a plurality of the echo spectrum images sequentially move along a preset direction and cover the spectrum confocal system measurement width range, and the preset direction is a direction perpendicular to a close arrangement direction of the spectrum confocal system;
an echo peak curve obtaining module 12, configured to obtain an echo peak curve corresponding to each echo spectrum image;
and the light source spectral image acquisition module 13 is configured to extract a transition region between adjacent echo peak curves, reassign the gray value of each pixel point in the transition region, and fuse the reassigned transition region and the echo peak curve to form a light source spectral image.
The light source spectrum image obtaining device 10 disclosed by the invention obtains continuous echo spectrum images of a standard measuring object in a spectrum confocal system measuring width (namely a spectrum confocal system Z-axis measuring range) range by utilizing a peak position change rule of the standard measuring object when the standard measuring object and the spectrum confocal system are subjected to relative displacement, obtains the peak position of each echo spectrum image from the echo spectrum images, and then re-fuses the extracted echo peak positions to form a light source spectrum image corresponding to the spectrum confocal system, so that the corresponding light source spectrum image can be obtained according to the existing line dispersion confocal spectrum measuring system under the condition of not introducing an extra light path, and the subsequent requirements of echo position calibration and echo spectrum light intensity distribution curve normalization are met.
Preferably, in the echo spectrum image acquisition module 11, two adjacent echo spectrum images are partially overlapped.
Further, in the echo spectral image acquisition module 11, the width of the overlapping portion of two echo spectral images is smaller than the moving distance of the adjacent echo spectral images.
Preferably, in the echo spectral image acquisition module 11, the echo spectral images of the standard measurement object at different measurement positions in the Z-axis direction are acquired through the spectral confocal system, wherein the plurality of measurement distances cover the Z-axis range of the spectral confocal system, and the echo peak positions of the echo spectral images formed between each measurement distance sequentially move along a preset direction.
Preferably, the echo peak curve acquiring module 12 includes:
the line peak value pixel acquisition submodule is used for corresponding to all pixel lines of the echo spectral image along the preset direction and acquiring line peak value pixels in each pixel line;
the echo peak value curve obtaining submodule is used for forming a column matrix by pixel points corresponding to the row peak value pixels along the close packing direction of the pixel points so as to form an echo peak value curve;
or, the echo peak curve obtaining module 12 includes:
the column peak pixel acquisition submodule is used for acquiring all pixel columns of the corresponding echo spectral image along a preset direction and acquiring column peak pixels in each pixel column;
and the echo peak value curve acquisition submodule is used for forming a row matrix by pixel points corresponding to the column peak value pixels along the close packing direction of the pixel points so as to form an echo peak value curve.
Further, the echo peak value curve obtaining module further comprises a smoothing unit, which is used for smoothing the column matrix/row matrix to eliminate wrong pixel points.
Preferably, the light source spectral image acquisition module 13 includes:
a parameter obtaining submodule for obtaining the pixel gray value G of each pixel position on the two echo spectrum images in the overlapping area of the adjacent echo spectrum images1n、G2nAnd the distance L between each pixel and the central point position of the adjacent echo peak curve1n、L2n；
And a pixel determination submodule for determining the gray value G based on the pixel1n、G2nAnd L1n、L2nIs re-assigned to the gray value of each pixel in the transition region.
Furthermore, the pixel determination submodule can be assigned in various modes, the value mode is not limited in the application, and only the compensation deviation needs to be realized. Such as can compare L1nAnd L2nTaking the gray value of a pixel point with a short distance in the two echo spectrum images as the assignment of the corresponding position in the light source spectrum image; or the pixels at the respective positions of the two peaks can be calculated by adopting a uniform over-interpolation mode and used as the gray value of the corresponding position of the light source spectrum image, for example, a linear interpolation method is adopted, that is, the method is that
To reassign each pixel in the transition region, where g1、g2For the respective gray value, L, of the first row of the adjacent echo peak curves1、L2Respectively assigning values to the distances from a certain point in the transition region to the adjacent echo peak value curves, and G is a value of the point again; the average value of the pixel gray values on the two echo spectrum images can also be taken as the gray value of the corresponding position of the transition region.
EXAMPLE III
Fig. 7 is a schematic structural diagram of a computer device according to an embodiment of the present invention, such as a smart phone, a tablet computer, a notebook computer, a desktop computer, a rack server, a blade server, a tower server, or a rack server (including an independent server or a server cluster formed by multiple servers) that can execute programs. The computer device 20 of the present embodiment includes at least, but is not limited to: a memory 21, a processor 22, which may be communicatively coupled to each other via a system bus, as shown in FIG. 7. It is noted that fig. 7 only shows the computer device 20 with components 21-22, but it is to be understood that not all shown components are required to be implemented, and that more or less components may alternatively be implemented.
In this embodiment, the memory 21 (i.e., the readable storage medium) includes a Flash memory, a hard disk, a multimedia Card, a Card-type memory (e.g., SD or DX memory, etc.), a Random Access Memory (RAM), a Static Random Access Memory (SRAM), a Read Only Memory (ROM), an Electrically Erasable Programmable Read Only Memory (EEPROM), and a Programmable Read Only Memory (PROM), and the memory 21 may also be an external storage device of the computer device 20, such as a plug-in hard disk, a Smart Media Card (SMC), a Secure Digital (SD) Card, a Flash Card (Flash Card), and the like provided on the computer device 20. Of course, the memory 21 may also include both internal and external storage devices of the computer device 20. In the present embodiment, the memory 21 is generally used for storing an operating system installed in the computer device 20 and various types of application software, such as program codes of the light source spectral image acquisition apparatus in the method embodiment. Further, the memory 21 may also be used to temporarily store various types of data that have been output or are to be output.
Processor 22 may be a Central Processing Unit (CPU), controller, microcontroller, microprocessor, or other data Processing chip in some embodiments. The processor 22 is typically used to control the overall operation of the computer device 20. In the present embodiment, the processor 22 is configured to execute the program codes stored in the memory 21 or process data, for example, to operate the light source spectral image acquisition apparatus 10, so as to implement the light source spectral image acquisition method in the method embodiment.
Example four
The present application also provides a computer-readable storage medium, such as a flash memory, a hard disk, a multimedia card, a card-type memory (e.g., SD or DX memory, etc.), a Random Access Memory (RAM), a Static Random Access Memory (SRAM), a read-only memory (ROM), an electrically erasable programmable read-only memory (EEPROM), a programmable read-only memory (PROM), a magnetic memory, a magnetic disk, an optical disk, a server, an App application mall, etc., on which a computer program is stored, which when executed by a processor implements corresponding functions. The computer-readable storage medium of the present embodiment is used for storing program codes of the light source spectral image acquisition apparatus 10, and when executed by a processor, implements the light source spectral image acquisition method in the method embodiment.
It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.
The above-mentioned serial numbers of the embodiments of the present invention are only for description, and do not represent the advantages and disadvantages of the embodiments.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. A light source spectrum image acquisition method is characterized by comprising the following steps:
s1, acquiring continuous echo spectrum images of a standard measurement object in a measurement width range of a linear dispersion spectrum confocal system, wherein echo peak positions of a plurality of echo spectrum images sequentially move along a preset direction and cover the measurement width range of the linear dispersion spectrum confocal system, and the preset direction is a direction perpendicular to the close arrangement direction of the linear dispersion spectrum confocal system;
s2, acquiring an echo peak value curve corresponding to each echo spectrum image;
s3, extracting a transition region between adjacent echo peak curves, reassigning the gray value of each pixel point in the transition region, and fusing the reassigned transition region and the echo peak curves to form a light source spectrum image.
2. The light source spectral image acquisition method according to claim 1, wherein in step S1, two adjacent echo spectral images are disposed to partially overlap.
3. The light source spectral image acquisition method according to claim 2, wherein a width of an overlapping portion of two of the echo spectral images is smaller than a moving distance setting of adjacent echo spectral images.
4. The light source spectral image acquisition method according to claim 1, wherein in step S1, echo spectral images of the standard measurement object at different measurement distances in the Z-axis direction are acquired via the line-dispersion spectroscopic confocal system, wherein a plurality of the measurement distances cover a Z-axis range of the line-dispersion spectroscopic confocal system and echo peak positions of the echo spectral images formed between each measurement distance are sequentially shifted in a preset direction.
5. The light source spectral image acquisition method according to claim 1, wherein in step S2, the acquisition of each of the echo peak curves includes the steps of:
s21, acquiring all pixel rows of the corresponding echo spectral image along a preset direction, and acquiring row peak pixels in each pixel row;
s22, forming a column matrix by pixel points corresponding to the row peak pixels along the close packing direction of the pixel points to form an echo peak curve;
or S21' acquires all pixel columns of the corresponding echo spectrum image along the preset direction, and acquires the column peak value pixel in each pixel column;
s22', the pixel points corresponding to the column peak pixels are formed into a row matrix along the close packing direction to form an echo peak curve.
6. The method for acquiring the light source spectral image according to claim 5, wherein in step S22, after acquiring the column matrix, the method further comprises the step of smoothing the column matrix to remove erroneous pixels;
or, in S22', after the matrix is obtained, the method further includes a step of smoothing the row matrix to remove the wrong pixel.
7. The method for acquiring the light source spectral image according to claim 1, wherein the step S3 of reassigning the gray value of each pixel point in the transition region comprises the following steps:
s31 obtaining the pixel gray value G of each pixel position on the two echo spectrum images in the overlapping area of the adjacent echo spectrum images1n、G2nAnd the distance L between each pixel and the central point position of the adjacent echo peak curve1n、L2n；
S32 is based on the pixel gray value G1n、G2nAnd L1n、L2nIs re-assigned to the gray value of each pixel in the transition region.
8. A light source spectral image acquisition apparatus, comprising:
the device comprises an echo spectrum image acquisition module, a linear dispersion spectrum confocal system measurement width range acquisition module and a linear dispersion spectrum confocal system measurement width range acquisition module, wherein the echo spectrum image acquisition module is used for acquiring continuous echo spectrum images of a standard measurement object in the linear dispersion spectrum confocal system measurement width range, the echo peak positions of a plurality of echo spectrum images sequentially move along a preset direction and cover the linear dispersion spectrum confocal system measurement width range, and the preset direction is a direction perpendicular to the close arrangement direction of the linear dispersion spectrum confocal system;
the echo peak curve acquisition module is used for acquiring an echo peak curve corresponding to each echo spectrum image;
and the light source spectral image acquisition module is used for extracting a transition region between adjacent echo peak curves, reassigning the gray value of each pixel point in the transition region, and fusing the reassigned transition region and the echo peak curves to form a light source spectral image.
9. A computer device comprising a memory, a processor, and a computer program stored on the memory and executable on the processor, wherein: the processor, when executing the computer program, realizes the steps of the method of any one of claims 1 to 7.
10. A computer-readable storage medium having stored thereon a computer program, characterized in that: the computer program when executed by a processor implements the steps of the method of any one of claims 1 to 7.
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