CN115235626A - Method and device for acquiring light source spectrum image, computer equipment and medium - Google Patents

Method and device for acquiring light source spectrum image, computer equipment and medium Download PDF

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CN115235626A
CN115235626A CN202110434900.7A CN202110434900A CN115235626A CN 115235626 A CN115235626 A CN 115235626A CN 202110434900 A CN202110434900 A CN 202110434900A CN 115235626 A CN115235626 A CN 115235626A
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echo
curve
spectrum
peak
light source
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胡浩
王康润
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Wuhan Delisai Technology Co ltd
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Seizet Technology Shenzhen Co Ltd
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    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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    • G01J3/28Investigating the spectrum

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Abstract

The invention discloses a method for acquiring a light source spectrum image, which comprises the following steps: s1, acquiring a plurality of second-type echo spectrum images and corresponding measurement positions of a standard measurement object in a spectrum confocal system measurement width range; s2, a second-class echo peak curve corresponding to each second-class echo spectrum image is obtained, wherein each second-class echo peak curve is characterized by the combination of a corresponding characteristic value and a standard shape curve, the standard shape curve is a one-dimensional curve with a fixed shape, and the characteristic value represents the offset of each second-class echo peak curve; s3, extracting a transition region between adjacent second-class echo peak value curves, reassigning the value of the transition region, fusing the reassigned transition region and the second-class echo peak value curves to form a light source spectrum image, and acquiring a corresponding light source spectrum image according to the existing linear dispersion spectrum confocal measurement system without introducing an additional light path.

Description

Method and device for acquiring light source spectral image, computer equipment and medium
Technical Field
The invention belongs to the field of spectrum confocal measurement, and particularly relates to a method and a device for acquiring a light source spectrum image, computer equipment and a storage medium.
Background
The non-contact measurement method obtains information on the surface of an object by performing measurement by means of electromagnetism, photoelectricity, ultrasonic waves and the like without contacting the surface of the object to be measured. Optical measurement methods include structured light methods, laser triangulation methods, interferometry, spectroscopic confocal measurements, and the like. The measurement precision of the spectral confocal measurement method can reach submicron level, the method can be suitable for various materials including glass, metal and the like, and can realize the advantages of multilayer thickness measurement and the like, so the method is well developed and widely applied in recent years.
The line dispersion spectrum confocal realizes the linear close arrangement of measurable position points on the basis of the traditional single-point spectrum confocal. Similar to the single-point spectral confocal measurement principle, the line-dispersion spectral confocal method also uses the light waves projected onto the surface of the object to calculate the distance between the object and the measurement system by determining the peak wavelength in the echo signal. Ideally, the system collects the peak wavelength of the echo signal from the surface of the object directly in relation to the distance when the spectrum of the projection light source has the same intensity at each wavelength position. In practice, however, such ideal light sources do not exist, and the actual light source spectrum has different intensity responses at different wavelength positions, and the light intensity distribution of the spectrum is not uniform. Thus, the light intensity distribution curve of the echo spectrum obtained in actual measurement is not a true confocal curve, and the corresponding peak wavelength is not a confocal wavelength.
As described above, since the real echo confocal curve is modulated by the light source spectrum, normalization is performed by dividing the light intensity distribution curve of the echo spectrum by the light source spectrum distribution curve when actually calculating the distance. Therefore, the spectral distribution curve of the light source is a necessary step. In the spectral confocal implementation process, in consideration of the modulation effect of the confocal system on the light source, a light source spectral image passing through the spectral confocal system is generally obtained, and then a light source spectral distribution curve is extracted from the light source spectral image.
At present, an extra light path is usually added in a spectral confocal system to acquire a light source spectral image, so that a light source spectral distribution curve is extracted to measure the light source spectral image. Although the additional optical path is added to the spectral confocal system to measure the light source spectral image, the operation is complicated, and the accuracy of the obtained light source spectral image is affected by optical distortion, adjustment error and the like introduced by the additional optical path.
Disclosure of Invention
The invention aims to provide a method for acquiring a light source spectrum image, which acquires the light source spectrum image according to the existing line dispersion spectrum confocal measuring system under the condition of not introducing an additional light path and meets the subsequent requirements of echo position calibration and echo spectrum light intensity distribution curve normalization. The operation complexity is reduced.
In order to achieve the above object, the present invention provides a method for obtaining a light source spectrum image of a spectral confocal system by measuring a standard measurement object through the spectral confocal system, comprising the following steps:
the method comprises the following steps of S1, obtaining a plurality of second-type echo spectrum images and corresponding measuring positions of a standard measuring object in a measuring width range of a spectrum confocal system, wherein echo peak positions of the second-type echo spectrum images sequentially move along a preset direction and cover the measuring width range of the spectrum confocal system, and the preset direction is a direction perpendicular to a close arrangement direction of the spectrum confocal system;
s2, a second type echo peak value curve corresponding to each second type echo spectrum image is obtained, wherein each second type echo peak value curve is characterized by a combination of a corresponding characteristic value and a standard shape curve, and the standard shape curve is a preset curve with a fixed shape and represents the bending degree of the second type echo peak value curve; the characteristic value is related to the measuring position and represents the offset of each second type echo peak value curve;
s3, extracting a transition region between the adjacent second-class echo peak curves, reassigning the gray value of each pixel point in the transition region, and fusing the reassigned transition region and the second-class echo peak curves to form a light source spectrum image.
Preferably, in the step S2, a feature value corresponding to each second-type echo spectrum image is determined based on the measurement position corresponding to each second-type echo spectrum image and a preset fitting function, where the fitting function is a fitting relation function between the measurement position and the feature value.
Further, in step S2, the obtaining of the fitting function includes the following steps:
s21, acquiring first-class echo spectrum images of a standard measurement object at different measurement positions in a measurement width range of a spectrum confocal system, wherein echo peak positions of a plurality of first-class echo spectrum images sequentially move along a preset direction in the measurement width range of the spectrum confocal system;
s22, acquiring a first-class echo peak curve corresponding to each first-class echo spectrum image;
s23, characterizing each first-type echo peak curve as a combination of a characteristic value and a standard shape curve based on a preset rule, wherein the characteristic value is related to the measurement position and represents the offset of each first-type echo peak curve, and the standard shape curve is a preset fixed-shape curve and represents the bending degree of the first-type echo peak curve;
s24, based on a plurality of characteristic values and a plurality of corresponding measurement positions, a fitting function between the characteristic values and the measurement positions is established.
Furthermore, the acquisition of the first echo peak curve includes the following steps:
s21, acquiring all pixel rows of the first-type echo spectrogram along a preset direction, and acquiring row peak pixels in each pixel row;
s22, forming a column matrix by pixel points corresponding to the row peak pixels along the close packing direction of the pixel points to form a first echo peak curve;
or S21' acquiring a first type echo spectrogram/all pixel columns along a preset direction, and acquiring column peak pixels in each pixel column;
s22', pixel points corresponding to the column peak pixels form a row matrix along the close packing direction of the pixel points to form a first echo peak curve.
Further, in the step S22/S22', after the column matrix/row matrix is obtained, a step of smoothing the column matrix/row matrix is further included to remove erroneous pixels.
Preferably, in the step S1, two adjacent second-type echo spectrum images are partially overlapped.
Further, the width of the overlapping part of the two echo spectrum images is smaller than the moving distance setting of the adjacent echo spectrum images.
Preferably, the reassigning the gray value of each pixel point of the transition region in the step S3 includes the following steps:
s31, acquiring pixel gray value G of each pixel position on two echo spectrum images in the overlapping area of adjacent echo spectrum images 1n 、G 2n And the distance L between each pixel and the central point position of the adjacent echo peak curve 1n 、L 2n
S32 based on the pixel gray value G 1n 、G 2n And L 1n 、L 2n Is re-assigned to the gray value of each pixel in the transition region.
The invention also discloses a light source spectrum image acquisition device, which comprises:
the second-type echo spectral image acquisition module is used for acquiring a plurality of second-type echo spectral images and corresponding measurement positions of a standard measurement object in a measurement width range of a spectrum confocal system, wherein the echo peak positions of the second-type echo spectral images sequentially move along a preset direction and cover the measurement width range of the spectrum confocal system, and the preset direction is a direction perpendicular to the close arrangement direction of the spectrum confocal system; a second-class echo peak curve obtaining module, configured to obtain a second-class echo peak curve corresponding to each second-class echo spectrum image, where each second-class echo peak curve is characterized by a combination of a corresponding characteristic value and a standard shape curve, and the standard shape curve is a preset curve with a fixed shape and represents a bending degree of the second-class echo peak curve; said characteristic value is associated with said measurement location and represents the offset of each of said second type of echo peak curves;
and the light source spectral image acquisition module is used for extracting a transition region between the adjacent second-type echo peak value curves, reassigning the gray value of each pixel point in the transition region, and fusing the reassigned transition region and the second-type echo peak value curves to form a light source spectral image.
Preferably, the second-type echo spectral image acquisition module includes a feature value operator module, which is configured to determine a feature value corresponding to each second-type echo spectral image based on the measurement position corresponding to each second-type echo spectral image and a preset fitting function, where the fitting function is a fitting relationship function between the measurement position and the feature value.
Further, the second-type echo spectral image obtaining module further includes a fitting function obtaining sub-module, where the fitting function obtaining sub-module includes:
the device comprises a first-class echo spectrum image acquisition unit, a second-class echo spectrum image acquisition unit and a spectrum confocal system measurement width measurement unit, wherein the first-class echo spectrum images of different measurement positions of a standard measurement object in the spectrum confocal system measurement width range are acquired, and the echo peak positions of a plurality of first-class echo spectrum images move in sequence along a preset direction in the spectrum confocal system measurement width range;
the first-class echo peak curve acquisition unit is used for acquiring a first-class echo peak curve corresponding to each first-class echo spectrum image;
a splitting unit, configured to characterize each of the first type echo peak curves as a combination of a feature value and a standard shape curve based on a preset rule, where the feature value is related to the measurement position and represents an offset of each of the first type echo peak curves, and the standard shape curve is a preset fixed-shape curve and represents a bending degree of the first type echo peak curve;
and the fitting function acquisition unit is used for establishing a fitting function between the characteristic values and the corresponding measurement positions based on the characteristic values and the corresponding measurement positions.
Furthermore, the first type of echo peak curve obtaining unit includes:
the line peak pixel acquisition subunit is used for acquiring all pixel lines of the first type of echo spectrogram along a preset direction and acquiring line peak pixels in each pixel line;
the first-class echo peak value curve acquiring subunit is used for forming a column matrix by pixel points corresponding to the line peak value pixels along the close arrangement direction of the pixel points so as to form a first-class echo peak value curve;
or the first type of echo peak curve acquiring unit comprises:
the column peak pixel acquisition subunit is used for acquiring all pixel columns of the first-class echo spectrogram/along a preset direction and acquiring column peak pixels in each pixel column;
and the first-class echo peak curve acquiring subunit is used for forming a row matrix by the pixel points corresponding to the column peak pixels along the close arrangement direction of the pixel points so as to form a first-class echo peak curve.
The first-class echo peak value curve obtaining unit further comprises a syndrome unit which is used for obtaining a column matrix/row matrix and then further comprises a step of smoothing the column matrix/row matrix so as to eliminate wrong pixel points.
In the second-type echo spectrum image acquisition module, two adjacent second-type echo spectrum images are partially overlapped.
In the second type of echo spectrum image acquisition module, the width of the overlapping part of the two echo spectrum images is smaller than the moving distance of the adjacent echo spectrum images.
The light source spectrum image acquisition module comprises:
a parameter obtaining submodule for obtaining the pixel gray value G of each pixel position on the two echo spectrum images in the overlapping area of the adjacent echo spectrum images 1n 、G 2n And the distance L between each pixel and the central point position of the adjacent echo peak curve 1n 、L 2n
An assignment sub-module for assigning a value based on the pixel gray value G 1n 、G 2n And L 1n 、L 2n Is reassigned to the gray value of each pixel in the transition region.
The application also discloses a computer device, which comprises a memory, a processor and a computer program stored on the memory and capable of running on the processor, wherein the processor executes the computer program to realize the steps of any one of the methods.
The present application also discloses a computer-readable storage medium having stored thereon a computer program which, when executed by a processor, performs the steps of any of the methods described above.
For a standard measuring object with higher reflectivity, the intensity of the echo spectrum image at the peak position is consistent with the intensity at the corresponding position of the light source spectrum image, and when the spectrum confocal system and the standard measuring object are relatively displaced in the Z-axis direction, the peak position of the corresponding echo spectrum image is correspondingly displaced.
The invention discloses a method, a device, computer equipment and a storage medium for obtaining a light source spectrum image, which are used for obtaining continuous echo spectrum images of a standard measuring object in a spectrum confocal system measuring width range by utilizing a peak position change rule of the standard measuring object when the standard measuring object and the spectrum confocal system are subjected to relative displacement, obtaining the peak position of each echo spectrum image from the echo spectrum images, and then re-fusing the extracted echo peak positions to form the light source spectrum image of a corresponding spectrum confocal system, so that the corresponding light source spectrum image can be obtained according to the existing line dispersion confocal spectrum measuring system without introducing an extra light path. Meanwhile, according to the method for acquiring the light source spectral image, the change of the characteristic value is used for representing and quantifying the movement amount of the peak shape curve when the echo peak value curve of the second type of echo spectral image is acquired, and then the movement direction of the peak value curve along with the movement of the position is fitted without independently calculating each peak value position according to each echo spectral image, so that the time consumption of the method is reduced, and the stability is enhanced.
Drawings
FIG. 1 is a schematic view of a work flow of a light source spectral image acquisition method according to the present invention;
FIG. 2 is a schematic diagram of the structure of the moving device in the Z-axis relative position between the standard measurement object and the spectroscopic confocal system;
FIG. 3 is a schematic diagram of an echo spectrum image of a standard measurement;
FIG. 4 is a diagram showing the variation of the shape curve of the echo peak with the position shift of the standard measurement object;
FIG. 5 is a schematic diagram of another embodiment of an echo spectrum image of a standard measurement object
FIG. 6 is a schematic flow chart diagram illustrating one embodiment of transition region reassignment;
FIG. 7 is a schematic diagram of light source spectral image fusion according to the present invention;
FIG. 8 is a block diagram of an embodiment of a light source spectral image acquisition device according to the present invention;
FIG. 9 is a hardware architecture of an embodiment of a computer device of the present application.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the scope of the invention in any way.
Like reference numerals refer to like elements throughout the specification. The expression "and/or" includes any and all combinations of one or more of the associated listed items. In the drawings, the thickness, size, and shape of an object have been slightly exaggerated for convenience of explanation. The figures are purely diagrammatic and not drawn to scale.
It will be further understood that the terms "comprises," "comprising," "includes," "including," "has," "includes" and/or "including," when used in this specification, specify the presence of stated features, steps, integers, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, steps, integers, operations, elements, components, and/or groups thereof.
The terms "substantially", "about" and the like as used in the specification are used as terms of approximation and not as terms of degree, and are intended to account for inherent deviations in measured or calculated values that would be recognized by one of ordinary skill in the art.
Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.
As shown in fig. 1, the present invention discloses a method for obtaining a light source spectrum image of a spectral confocal system, which obtains a light source spectrum image of the spectral confocal system by measuring a standard measurement object through the spectral confocal system, and comprises the following steps:
the method comprises the following steps of S1, obtaining a plurality of second-type echo spectrum images and corresponding measuring positions of a standard measuring object in a measuring width range of a spectrum confocal system, wherein echo peak positions of the second-type echo spectrum images sequentially move along a preset direction and cover the measuring width range of the spectrum confocal system, and the preset direction is a direction perpendicular to a close arrangement direction of the spectrum confocal system; (ii) a
S2, a second type echo peak value curve corresponding to each second type echo spectrum image is obtained, wherein each second type echo peak value curve is characterized by the combination of a corresponding characteristic value and a standard shape curve, and the standard shape curve is a preset curve with a fixed shape and represents the bending degree of the second type echo peak value curve; the characteristic value is related to the measuring position and represents the offset of each second type echo peak value curve;
and S3, extracting a transition region between the adjacent second-class echo peak curves, reassigning the gray value of each pixel point in the transition region, and fusing the reassigned transition region and the second-class echo peak curves to form a light source spectrum image.
The method for acquiring the light source spectrum image comprises the steps of acquiring continuous echo spectrum images of a standard measuring object in a spectrum confocal system measuring width range by utilizing a peak position change rule of the standard measuring object when the standard measuring object is relatively displaced with the spectrum confocal system, acquiring the peak position of each echo spectrum image from the echo spectrum images, and then re-fusing the echo peak positions extracted by confocal to form the light source spectrum image of the corresponding spectrum confocal system, so that the corresponding light source spectrum image can be acquired according to the existing line dispersion confocal spectrum measuring system under the condition that an additional light path is not introduced. Meanwhile, according to the method for acquiring the light source spectral image, the change of the characteristic value is used for representing and quantifying the movement amount of the peak shape curve when the echo peak value curve of the second type of echo spectral image is acquired, and then the movement direction of the peak value curve along with the movement of the position is fitted without independently calculating each peak value position according to each echo spectral image, so that the time consumption of the method is reduced, and the stability is enhanced.
In this embodiment, the size of the standard measurement object is not less than the length of the emergent light of the spectrum confocal system, so that each time an echo spectrum image is obtained, the emergent light can be projected onto the standard measurement object and reflected into the spectrometer of the spectrum confocal system to finally obtain the echo spectrum image at the corresponding position.
In step S1, the echo spectrum image obtained each time is as shown in fig. 3, and in order to ensure the integrity of the light source spectrum image generated by fusion, it must be ensured that the obtained multiple echo spectrum images cover the measurement width of the spectral confocal system (i.e., the first echo spectrum image and the last echo spectrum image need to be located at the leftmost end and the rightmost end of the measurement width in fig. 3, respectively).
In this embodiment, the apparatus shown in fig. 2 may be used to realize the relative position movement (i.e. the change of the measurement distance) between the standard measurement object and the spectral confocal system in the Z-axis direction, in fig. 2, 1 is the spectral confocal system, 3 is the standard measurement object for acquiring the echo spectral image, 2 is the moving apparatus connecting 1 and 3, the moving apparatus 2 can realize the relative movement between the spectral confocal system 1 and the standard measurement object 3 in the Z-axis direction, 4 is the upper computer system for calculation and storage, the relative displacement control between the spectral confocal system 1 and the standard measurement object 2 is performed by the moving apparatus 2, and then the echo spectral image of the standard measurement object 3 is continuously recorded during the relative displacement between the spectral confocal system 1 and the standard measurement object 2.
For a determined spectral confocal system, the Z-direction range is determined, in step S1, first, the moving device 2 is adjusted to reach a first specified measurement position, at this time, the position of a first echo spectral image is located at any end point of the measurement width of the spectral confocal system or just shifted out of the end point of the measurement width of the spectral confocal system, then the moving device 2 is used to control the distance between the spectral confocal system 1 and the standard measurement object 2 to move in the Z direction, so as to reach the next measurement position and perform the next measurement, at this time, the position of the echo peak of the next group of echo spectral images is shifted by a preset distance according to the preset direction; after the next group of echo spectrum images are recorded, the moving device 2 is continuously used for controlling the spectrum confocal system 1 and the standard measuring object 2 to move, the echo spectrum images corresponding to the next position are recorded until the moving device 2 reaches the appointed end position, and at the moment, the last echo spectrum image reaches the other end of the spectrum confocal system 1 for measuring the width.
Meanwhile, in step S1, in order to ensure the quality of the fused light source spectral image on the whole breadth and ensure that the light source spectral image generated by fusion truly and accurately reflects the true state of the light source spectrum, the positions of two adjacent echo images in the fusion process need to be close enough, that is, the two adjacent measurement positions need to be small enough, so as to avoid the occurrence of band-shaped fluctuation between bright and dark phases in the fused image, and simultaneously avoid the reduction of the precision of the area image between two echo peak values, so that there is a certain requirement for the preset distance of each movement or the movement distance of the measurement position. Preferably, in this embodiment, two adjacent echo spectral images are partially overlapped to ensure the quality of the fused light source spectral image on the whole web. Furthermore, the width of the overlapping part is smaller than the moving distance setting of the adjacent echo spectrum images, namely the width of the overlapping part is smaller than the moving distance of the adjacent two echo peak values on the images.
S2, acquiring a second-class echo peak value curve corresponding to each second-class echo spectrum image.
The echo peak curve is a set of echo peak positions at a certain specific position along the close arrangement direction of the linear spectrum confocal system, and the echo peak curve corresponding to each echo spectrum image can be obtained by setting threshold value screening, image contour extraction and other methods. After the second type of echo spectrum image is obtained, the corresponding echo peak curve is independently confirmed by the method, so that the operation is simple and easy to use, the algorithm level is simple to realize, and the calculation amount is large. In addition, when stray light or other coupling signals exist in the echo image, as long as the calculation of the peak value position of the primary echo is inaccurate, fusion errors occur in the local part of the fusion light source image, and the robustness is not high. Therefore, in the scheme shown in the application, the amount of movement of the second type echo peak curve is measured and quantized by using the transformation of the characteristic value, so that the peak position does not need to be recalculated every time the second type echo peak curve moves by one position.
Specifically, each second-class echo peak curve is characterized as a based on a preset rule n + C, in this embodiment, the standard shape curve C is a one-dimensional curve with a fixed shape obtained in advance and represents the echo peak curveThe degree of bending; characteristic value a n And a measuring position b n The correlation represents the offset of each of said second echo peak curves, so that with the method of characterization, as shown in fig. 4, for the second echo peak curves, the change is only related to the transformation of the characteristic values. And determining a characteristic value corresponding to each second-type echo spectrum image based on the measuring position and a preset fitting function, wherein the fitting function is a fitting relation function between the measuring position and the characteristic value.
Fitting the function f (a) as before n ,b n ) And the standard shape curve C is obtained in advance, and in the step S2, the obtaining of the fitting function and the standard shape curve C includes the following steps:
s21, acquiring first-class echo spectrum images of a standard measurement object at different measurement positions in a spectrum confocal system, wherein the echo peak positions of a plurality of first-class echo spectrum images sequentially move along a preset direction in a measurement range of a measurement width range of the spectrum confocal system;
in this embodiment, the first-type echo spectrum image and the second-type echo spectrum image are echo spectrum images formed by different measurement positions of a standard measurement object in a measurement width range of a spectrum confocal system, only the first-type echo spectrum image is used for obtaining a preset value, the moving step length between adjacent first-type echo spectrum images does not need to be particularly dense, the coverage ranges of a plurality of first-type echo spectrum images do not need to be completely covered, of course, only the second-type echo spectrum image can be collected, and then all or part of the collected second-type image is used as the first-type echo spectrum image for fitting the function f (a) n ,b n ) And acquisition of the standard shape curve C.
S22, acquiring a first-class echo peak curve corresponding to each first-class echo spectrum image;
the echo peak curve is a set of echo peak positions at a certain specific position along the close arrangement direction of the line spectrum confocal system, and the echo peak curve corresponding to each echo spectrum image can be obtained by setting threshold value screening, image contour extraction and other methods.
As a preferable solution, in this embodiment, the echo peak position of each echo peak curve is obtained by the following steps:
s21, acquiring all pixel rows of the corresponding echo spectral image along a preset direction, and acquiring row peak value pixels in each pixel row;
in step S21, pixels in each row in the echo spectral image are taken out along a preset direction, that is, a moving direction of the echo spectral image, gray values of pixels in each row are combined into one-dimensional data to form a pixel row, and then all pixel rows are traversed and a row peak position in the one-dimensional data is obtained through a peak searching algorithm and the like.
S22, forming a column matrix by pixel points corresponding to the row peak pixels along the close packing direction of the pixel points to form an echo peak curve.
In step S22, pixel points corresponding to all the line peak positions are taken out, and the pixel positions of the pixel points in the column direction form a column matrix to be used as an echo peak curve of the echo spectrum image. In this embodiment, further, after the column matrix is obtained in step S22, a step of smoothing the column matrix is further included to delete the pixel points that may be erroneously determined as the peak value and replace the pixel points with the correct pixel positions of the row peak value.
Of course, if the close-packed direction is shown in fig. 5, the row peak pixels may be replaced by the corresponding row peak pixels or the column pixel peaks may be obtained, and the echo peak position of each echo peak curve may be obtained by the following steps:
s21', acquiring all pixel columns of the corresponding echo spectral image along a preset direction, and acquiring column peak pixels in each pixel column;
s22', pixel points corresponding to the column peak pixels form a row matrix along the close-packed direction of the pixel points to form an echo peak curve.
And S23, characterizing each first-class echo peak curve as a combination of a characteristic value and a standard shape curve based on a preset rule, wherein the characteristic value is related to the measurement position and represents the offset of each first-class echo peak curve, and the standard shape curve is a preset fixed-shape curve and represents the bending degree of the first-class echo peak curve.
As described above, in the span range, the echo spectrum images formed at different measurement positions all have a curved bright band as shown in fig. 3, except that the bright band moves left and right at different measurement positions, but the shape of the bright band is the same regardless of the movement of the bright band. The echo peak curve follows this feature too, so in the present embodiment, for the echo peak curve of each echo spectrum image, it is expressed by decomposing it into two attributes according to a preset rule, namely: (1) position representing the magnitude of left and right movement-a characteristic value that moves with left and right movement; (2) the standard shape curve C represents the relative position of the degree of bending, and for a specific spectral confocal system, when the preset rule is determined, the shape of the standard shape curve C is determined to be unchanged, and when the preset rule is changed, the specific value of the standard shape curve C is changed, but the overall shape is still unchanged. In this characterization mode, the change in the echo peak curve is only related to the characteristic value.
The following illustrates in particular how one of the echo peak curves is characterized as a combination of characteristic values and a standard shape curve C. The echo peak curve is a one-dimensional matrix, and the value of the echo peak curve is assumed to be [90, 91, 91, 92, 93, 94, 94, …,96, 95, 94], wherein each value sequentially represents the position of the acquired peak of the row/column along the direction perpendicular to the close-packed direction;
characterizing the echo peak curve as a combination of eigenvalues and standard shape curve C comprises the steps of:
(1) Determining a peak shape curve calculation method, such as calculating a minimum value, calculating an average value, and the like, wherein the minimum value is taken as an example, and is 90;
(2) Taking the minimum value as a characteristic value, the representation of the echo peak value curve is expressed in the form of the characteristic value + an offset value, and the result is as follows:
[90+0,90+1,90+1,90+2,90+3,90+4,90+4,…,90+6,90+5,90+4]
(3) Correspondingly extracting the combination of the standard shape curve C, namely [ +0, +1, +1, +2, +3, +4, +4, …, +6, +5, +4], the value will not change with the change of the measuring position and the movement of the peak value;
if, in the step (1), the peak shape curve is calculated by taking an average value, and assuming that the average value is 92, all the corresponding values are expressed in the form of a characteristic value + an offset value, and the result is as follows: [92+ (-2), 92+ (-1), 92+0, 92+1, 92+2, …,92+4, 92+3, 92+2], the corresponding combination of extracted standard shape curves C, namely [ -2, -1, -1,0, +1, +2, +2, …, +4, +3, +2], the value does not change with the change of the measurement position and the movement of the peak value. S24, establishing a fitting function between the characteristic values and the corresponding measurement positions based on the characteristic values and the corresponding measurement positions;
a plurality of feature values a are obtained by step S23 n And a corresponding plurality of measurement positions b n Because the characteristic value is related to the measurement position, in step S24, a fitting function f (a) between the characteristic value and the measurement position is established by a method such as polynomial fitting, gaussian fitting and the like based on the known value n ,b n ) And fitting the position as an independent variable and the characteristic value as a dependent variable in the full-scale range. Alternatively, the set characteristic value may be used as an independent variable and the position may be used as a dependent variable, and the two may be fitted. And are not intended to be limiting herein.
The fitting function f (a) described above n ,b n ) After the standard shape curve C is determined, the acquisition of each second type echo peak value curve comprises the following steps:
(1) Obtaining the corresponding measuring position b of each second type echo spectrum image n
(2) Based on the fitting function f (a) n ,b n ) Determining the measurement position b n Corresponding characteristic value a n
(3) Based on the characteristic value a n And determining the echo peak value curve corresponding to each second type of echo spectrum image according to the value of the standard shape curve C.
Therefore, in actual measurement, the second echo peak value curve corresponding to each echo spectrum image is directly obtained only according to the standard peak value shape curve and the specific position of the peak value shape curve under the condition of not analyzing the peak value position of the image.
S3, extracting a transition region between adjacent echo peak value curves, reassigning the gray value of each pixel point in the transition region, and fusing the reassigned transition region and the echo peak value curves to form a light source spectrum image.
In step S3, after the peak position of each echo spectrum image is obtained, each echo peak curve and a transition region between adjacent echo peak curves are extracted to be fused to form a light source spectrum image.
Specifically, the method comprises the following steps:
s31, obtaining each pixel in a transition area between every two adjacent echo peak value curves; as shown in fig. 6, the adjacent echo spectrum images in fig. 6 (a) are merged into the same coordinate system according to the respective shift distances and the transition regions between the adjacent echo peak curves are extracted as shown in fig. 6 (b). Wherein ". Times" represents the peak curve and "Δ" represents the pixels in the transition region between the adjacent echo peak curves, as shown in fig. 6 (c).
S32, reassigning the gray value of each pixel of the transition region;
as described above, the gray value at the peak position is consistent with the gray value of the spectrum of the actual light source, but the gray value in the transition region is attenuated due to the defocusing of the spectrum confocal system, so that there is a deviation between the gray value and the actual value in this portion, and in this embodiment, it is necessary to acquire each transition region and reassign each pixel in the transition region to compensate for the deviation.
Preferably, in this embodiment, S31 obtains a pixel gray value G of each pixel between adjacent echo peak curves on two adjacent echo spectrum images 1n 、G 2n And the distance L from each pixel to the center point of the two echo peak curves 1n 、L 2n (ii) a S32 according to the pixel gray value G 1n 、G 2n And L 1n 、L 2n Is of a size ofThe gray value of each pixel in the transition area is assigned again;
the evaluation method can be used for evaluating in various ways, and the evaluation method is not limited, and only the compensation deviation needs to be realized. Such as can compare L 1n And L 2n Taking the gray value of a pixel point with a short distance in the two echo spectrum images as the assignment of the corresponding position in the light source spectrum image; or the pixels at the respective positions of the two peaks can be calculated by adopting a uniform over-interpolation mode and used as the gray value of the corresponding position of the light source spectrum image, for example, a linear interpolation method is adopted, that is, the method is that
Figure BDA0003032518210000151
To reassign each pixel point in the transition region, wherein g 1 、g 2 For the respective gray value, L, of the first row of the adjacent echo peak curves 1 、L 2 Respectively obtaining the distance from a certain point in the transition region to the adjacent echo peak value curve, and G is a reassigned value of the point; the average value of the pixel gray values on the two echo spectrum images can also be taken as the gray value of the corresponding position of the transition region.
S33, fusing all the peak value curves and the transition regions after reassignment to form a light source spectrogram.
As shown in fig. 7, in step S33, all peak curves and the reassigned transition regions are extracted and fused according to the corresponding coordinate positions and the corresponding gray-scale values to form a light source spectrum image, which is consistent with the actual light source spectrum image.
Example two
As shown in fig. 8, the present invention also discloses a light source spectrum image obtaining apparatus 10, including:
the second-type echo spectral image acquisition module 11 is configured to acquire a plurality of second-type echo spectral images and corresponding measurement positions of a standard measurement object in a measurement width range of a spectral confocal system, where echo peak positions of the plurality of second-type echo spectral images sequentially move along a preset direction and cover the measurement width range of the spectral confocal system, and the preset direction is a direction perpendicular to a close-packed direction of the spectral confocal system;
a second-class echo peak curve obtaining module 12, configured to obtain a second-class echo peak curve corresponding to each second-class echo spectral image, where each second-class echo peak curve is characterized by a combination of a corresponding characteristic value and a standard shape curve, and the standard shape curve is a preset curve with a fixed shape and represents a bending degree of the second-class echo peak curve; the characteristic value is related to the measuring position and represents the offset of each second type echo peak value curve;
and the light source spectral image acquisition module 13 is configured to extract a transition region between adjacent second-type echo peak curves, reassign the gray value of each pixel point in the transition region, and fuse the reassigned transition region and the second-type echo peak curves to form a light source spectral image.
The device for acquiring the light source spectrum image utilizes the change rule of the peak position of a standard measuring object when the standard measuring object and a spectrum confocal system are subjected to relative displacement to acquire continuous echo spectrum images of the standard measuring object in the measurement width range of the spectrum confocal system, acquires the peak position of each echo spectrum image from the echo spectrum images, and then re-fuses the extracted echo peak positions to form the light source spectrum image of the corresponding spectrum confocal system, so that the corresponding light source spectrum image can be acquired according to the existing line dispersion spectrum confocal measuring system without introducing an extra light path. Meanwhile, when the light source spectral image acquisition device disclosed by the invention acquires the echo peak value curve of the second type of echo spectral image, the change quantity of the characteristic value and the movement quantity of the quantized peak value shape curve are utilized, and then the movement direction of the peak value curve along with the movement of the position is fitted without independently calculating each peak value position according to each echo spectral image, so that the time consumption of the method is simplified, and the stability is enhanced.
Preferably, in the second-type echo spectral image acquisition module 11, two adjacent second-type echo spectral images are partially overlapped.
Further, in the second type echo spectrum image obtaining module 11, the width of the overlapping portion of two echo spectrum images is smaller than the moving distance setting of the adjacent echo spectrum images.
Preferably, the second type echo peak curve acquiring module 12 includes: and the characteristic value operator module is used for determining a characteristic value corresponding to each second type echo spectrum image based on the measuring position corresponding to each second type echo spectrum image and a preset fitting function, and the fitting function is a fitting relation function between the measuring position and the characteristic value.
Preferably, the second echo peak value curve obtaining module 12 further includes a fitting function obtaining sub-module, where the fitting function obtaining sub-module includes:
the device comprises a first-class echo spectrum image acquisition unit, a second-class echo spectrum image acquisition unit and a spectrum confocal system measurement width measurement unit, wherein the first-class echo spectrum images of different measurement positions of a standard measurement object in the spectrum confocal system measurement width range are acquired, and the echo peak positions of a plurality of first-class echo spectrum images move in sequence along a preset direction in the spectrum confocal system measurement width range;
the first-class echo peak curve acquisition unit is used for acquiring a first-class echo peak curve corresponding to each first-class echo spectrum image;
a splitting unit, configured to characterize each of the first type echo peak curves as a combination of a feature value and a standard shape curve based on a preset rule, where the feature value is related to the measurement position and represents an offset of each of the first type echo peak curves, and the standard shape curve is a preset fixed-shape curve and represents a bending degree of the first type echo peak curve;
and a fitting function obtaining unit configured to establish a fitting function between the plurality of characteristic values and the corresponding plurality of measurement positions based on the plurality of characteristic values and the corresponding plurality of measurement positions.
Furthermore, the first type of echo peak curve obtaining unit includes:
the line peak pixel acquisition subunit is used for acquiring all pixel lines of the first-class echo spectrogram along a preset direction and acquiring line peak pixels in each pixel line;
the first-class echo peak value curve acquiring subunit is used for forming a column matrix by pixel points corresponding to the line peak value pixels along the close arrangement direction of the pixel points so as to form a first-class echo peak value curve;
or the first type echo peak curve acquiring unit comprises:
the column peak pixel acquisition subunit is used for acquiring the first-type echo spectrogram/all pixel columns along the preset direction and acquiring column peak pixels in each pixel column;
and the first-class echo peak value curve acquiring subunit is used for forming a row matrix by pixel points corresponding to the column peak value pixels along the close-packed direction of the pixel points so as to form a first-class echo peak value curve.
Preferably, the first-type echo peak curve obtaining unit further includes a syndrome unit, configured to obtain a column matrix/row matrix, and then further includes a step of performing smoothing processing on the column matrix/row matrix to remove erroneous pixel points.
Preferably, the light source spectrum image obtaining module 13 includes:
a parameter obtaining submodule for obtaining the pixel gray value G of each pixel position on the two echo spectrum images in the overlapping area of the adjacent echo spectrum images 1n 、G 2n And the distance L between each pixel and the central point position of the adjacent echo peak curve 1n 、L 2n
An assignment submodule for assigning a value based on said pixel gray value G 1n 、G 2n And L 1n 、L 2n Is re-assigned to the gray value of each pixel in the transition region.
The assignment sub-module can carry out assignment in various modes, and the assignment mode is not limited in the application, and only the compensation deviation needs to be realized. Such as can compare L 1n And L 2n Taking the gray value of a pixel point with a short distance in the two echo spectrum images as the assignment of the corresponding position in the light source spectrum image; the pixel of each position of the two peak values can be taken and the uniformity can be adoptedCalculating in an excessive interpolation mode, and taking the calculated value as a gray value of a corresponding position of the light source spectrum image, for example, adopting a linear interpolation method, namely
Figure BDA0003032518210000181
To reassign each pixel point in the transition region, wherein g 1 、g 2 For the respective gray value, L, of the first row of the adjacent echo peak curves 1 、L 2 Respectively assigning values to the distances from a certain point in the transition region to the adjacent echo peak value curves, and G is a value of the point again; the average value of the pixel gray values on the two echo spectrum images can also be taken as the gray value of the corresponding position of the transition region.
EXAMPLE III
Fig. 9 is a schematic structural diagram of a computer device according to an embodiment of the present invention, for example, a smart phone, a tablet computer, a notebook computer, a desktop computer, a rack server, a blade server, a tower server, or a cabinet server (including an independent server or a server cluster formed by multiple servers) that can execute a program. The computer device 20 of the present embodiment includes at least, but is not limited to: a memory 21, a processor 22, which may be communicatively coupled to each other via a system bus, as shown in FIG. 9. It is noted that fig. 9 only shows the computer device 20 with components 21-22, but it is understood that not all shown components are required to be implemented, and that more or less components may be implemented instead.
In this embodiment, the memory 21 (i.e., the readable storage medium) includes a Flash memory, a hard disk, a multimedia Card, a Card type memory (e.g., SD or DX memory, etc.), a Random Access Memory (RAM), a Static Random Access Memory (SRAM), a Read Only Memory (ROM), an Electrically Erasable Programmable Read Only Memory (EEPROM), a Programmable Read Only Memory (PROM), and the memory 21 may also be an external storage device of the computer device 20, such as a plug-in hard disk provided on the computer device 20, a Smart Media Card (SMC), a Secure Digital (SD) Card, a Flash Card (Flash Card), and the like. Of course, the memory 21 may also include both internal and external storage units of the computer device 20. In the present embodiment, the memory 21 is generally used for storing an operating system installed in the computer device 20 and various types of application software, such as program codes of the light source spectral image acquisition apparatus in the method embodiment. Further, the memory 21 may also be used to temporarily store various types of data that have been output or are to be output.
Processor 22 may be a Central Processing Unit (CPU), controller, microcontroller, microprocessor, or other data Processing chip in some embodiments. The processor 22 generally functions to control the overall operation of the computer device 20. In the present embodiment, the processor 22 is configured to execute the program codes stored in the memory 21 or process data, for example, to operate the light source spectral image acquisition apparatus 10, so as to implement the light source spectral image acquisition method in the method embodiment.
Example four
The present application also provides a computer-readable storage medium, such as a flash memory, a hard disk, a multimedia card, a card-type memory (e.g., SD or DX memory, etc.), a Random Access Memory (RAM), a Static Random Access Memory (SRAM), a read-only memory (ROM), an electrically erasable programmable read-only memory (EEPROM), a programmable read-only memory (PROM), a magnetic memory, a magnetic disk, an optical disk, a server, an App application mall, etc., on which a computer program is stored, which when executed by a processor implements corresponding functions. The computer-readable storage medium of the present embodiment is used for storing program codes of the light source spectral image acquisition apparatus 10, and when executed by a processor, implements the light source spectral image acquisition method in the method embodiment.
The above-mentioned serial numbers of the embodiments of the present invention are merely for description and do not represent the merits of the embodiments.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.

Claims (11)

1. A light source spectrum image acquisition method for acquiring a light source spectrum image of a spectrum confocal system by measuring a standard measuring object through the spectrum confocal system comprises the following steps:
the method comprises the following steps of S1, obtaining a plurality of second-type echo spectrum images and corresponding measuring positions of a standard measuring object in a measuring width range of a spectrum confocal system, wherein echo peak positions of the second-type echo spectrum images sequentially move along a preset direction and cover the measuring width range of the spectrum confocal system, and the preset direction is a direction perpendicular to a close arrangement direction of the spectrum confocal system;
s2, a second type echo peak value curve corresponding to each second type echo spectrum image is obtained, wherein each second type echo peak value curve is characterized by the combination of a corresponding characteristic value and a standard shape curve, and the standard shape curve is a preset curve with a fixed shape and represents the bending degree of the second type echo peak value curve; the characteristic value is related to the measuring position and represents the offset of each second type echo peak value curve;
s3, extracting a transition region between the adjacent second-class echo peak curves, reassigning the gray value of each pixel point in the transition region, and fusing the reassigned transition region and the second-class echo peak curves to form a light source spectrum image.
2. The light source spectral image acquisition method according to claim 1, characterized in that: in the step S2, a feature value corresponding to each second-type echo spectral image is determined based on the measurement position corresponding to each second-type echo spectral image and a preset fitting function, where the fitting function is a fitting relationship function between the measurement position and the feature value.
3. The light source spectral image acquisition method according to claim 2, characterized in that: in step S2, the obtaining of the fitting function includes the following steps:
s21, acquiring first-class echo spectrum images of a standard measurement object at different measurement positions in a measurement width range of a spectrum confocal system, wherein echo peak positions of a plurality of first-class echo spectrum images sequentially move along a preset direction in the measurement width range of the spectrum confocal system;
s22, acquiring a first-class echo peak curve corresponding to each first-class echo spectrum image;
s23, characterizing each first-type echo peak curve as a combination of a characteristic value and a standard shape curve based on a preset rule, wherein the characteristic value is related to the measurement position and represents the offset of each first-type echo peak curve, and the standard shape curve is a preset fixed-shape curve and represents the bending degree of the first-type echo peak curve;
s24, based on a plurality of characteristic values and a plurality of corresponding measurement positions, a fitting function between the characteristic values and the measurement positions is established.
4. The light source spectral image acquisition method according to claim 3, characterized in that:
the acquisition of the first echo peak curve comprises the following steps:
s21, acquiring all pixel rows of the first-type echo spectrogram along a preset direction, and acquiring row peak pixels in each pixel row;
s22, forming a column matrix by pixel points corresponding to the row peak pixels along the close packing direction of the pixel points to form a first echo peak curve;
or S21' acquiring a first-class echo spectrogram/all pixel columns along a preset direction, and acquiring column peak pixels in each pixel column;
s22', pixel points corresponding to the column peak pixels form a row matrix along the close packing direction of the pixel points to form a first echo peak curve.
5. The method for obtaining the light source spectrum image according to claim 4, wherein in the step S22/S22', after obtaining the column matrix/row matrix, the method further comprises a step of smoothing the column matrix/row matrix to eliminate wrong pixel points.
6. The light source spectral image acquisition method according to claim 1, wherein in step S1, two adjacent second-type echo spectral images are partially overlapped.
7. The light source spectral image acquisition method according to claim 6, wherein a width of an overlapping portion of two of the echo spectral images is smaller than a moving distance setting of adjacent echo spectral images.
8. The method for acquiring the light source spectral image according to claim 1, wherein the step S3 of reassigning the gray value of each pixel point of the transition region comprises the steps of:
s31, acquiring pixel gray value G of each pixel position on two echo spectrum images in the overlapping area of adjacent echo spectrum images 1n 、G 2n And the distance L between each pixel and the central point position of the adjacent echo peak curve 1n 、L 2n
S32 based on the pixel gray value G 1n 、G 2n And L 1n 、L 2n Is reassigned to the gray value of each pixel in the transition region.
9. A light source spectral image acquisition apparatus, comprising:
the second-type echo spectral image acquisition module is used for acquiring a plurality of second-type echo spectral images and corresponding measurement positions of a standard measurement object in a measurement width range of a spectrum confocal system, wherein the echo peak positions of the second-type echo spectral images sequentially move along a preset direction and cover the measurement width range of the spectrum confocal system, and the preset direction is a direction perpendicular to the close arrangement direction of the spectrum confocal system;
a second-class echo peak curve obtaining module, configured to obtain a second-class echo peak curve corresponding to each second-class echo spectral image, where each second-class echo peak curve is characterized by a combination of a corresponding characteristic value and a standard shape curve, and the standard shape curve is a preset curve with a fixed shape and represents a bending degree of the second-class echo peak curve; the characteristic value is related to the measuring position and represents the offset of each second type echo peak value curve;
and the light source spectral image acquisition module is used for extracting a transition region between the adjacent second-type echo peak value curves, reassigning the gray value of each pixel point in the transition region, and fusing the reassigned transition region and the second-type echo peak value curves to form a light source spectral image.
10. A computer device comprising a memory, a processor, and a computer program stored on the memory and executable on the processor, wherein: the processor when executing the computer program realizes the steps of the method of any of claims 1 to 8.
11. A computer-readable storage medium having stored thereon a computer program, characterized in that: the computer program when executed by a processor implements the steps of the method of any one of claims 1 to 8.
CN202110434900.7A 2021-04-22 2021-04-22 Method and device for acquiring light source spectrum image, computer equipment and medium Pending CN115235626A (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116880907A (en) * 2023-08-30 2023-10-13 武汉精一微仪器有限公司 Real-time wavelength peak value extraction method, device, equipment and storage medium
CN116880907B (en) * 2023-08-30 2024-01-30 武汉精一微仪器有限公司 Real-time wavelength peak value extraction method, device, equipment and storage medium

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