CN113091906A - Chenettner spectrometer and method sharing detector - Google Patents
Chenettner spectrometer and method sharing detector Download PDFInfo
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Abstract
In the system, a first spectrometer generates an M-type optical path of a first waveband spectral range, a first incident unit is incident to first incident light, a first collimating unit is arranged opposite to the first incident unit to irradiate the first incident light to a first light splitting unit in parallel, the first light splitting unit is arranged opposite to the first collimating unit to disperse the first incident light in a light splitting mode, and a first focusing unit is arranged opposite to the first light splitting unit to focus the dispersed first incident light to a detector; the second spectrometer generates an M-type optical path in a second waveband spectral range, and the detector is opposite to the first focusing unit and the second focusing unit and is commonly used for the first spectrometer and the second spectrometer.
Description
Technical Field
The invention relates to the technical field of optical detection, in particular to a Chenettner spectrometer sharing a detector and a method thereof.
Background
The spectrometer is an important tool in the field of optical detection, can realize the detection and analysis of material structures and components, and has the advantages of high analysis precision, large measurement range, high detection speed and the like. The most common of the existing spectrometer structures is the Czerny-Turner (C-T spectrometer); the Czerny-Turner spectrometer can image incident light in a space dimension and distinguish the spectral intensity of the incident light, and is widely applied to the fields of remote sensing, food detection, medicine detection and the like. The traditional C-T spectrometer consists of a plane grating and two spherical mirrors. The signal light entering from the entrance slit is collimated by the collimating lens and diffracted by the grating, and then is focused on the detector by the focusing lens. The existing C-T spectrometer has the defects of aberration, narrow spectral band and low resolution.
The above information disclosed in the background section is only for enhancement of understanding of the background of the invention and therefore it may contain information that does not form the prior art that is well known to those of ordinary skill in the art.
Disclosure of Invention
In view of the above problems, the present invention provides a common detector chenetter spectrometer and method for overcoming the above drawbacks of the prior art, and the object of the present invention is achieved by the following technical solutions.
A common detector Chenettner spectrometer comprises,
a first spectrometer generating an M-mode optical path in a first band spectral range, the first spectrometer comprising,
a first incident unit which emits a first incident light,
a first collimating unit disposed opposite to the first incident unit to irradiate the first incident light to the first light splitting unit in parallel,
a first light splitting unit arranged with respect to the first collimating unit to spectrally disperse the first incident light,
a first focusing unit arranged with respect to the first light splitting unit to focus the dispersed first incident light to a detector;
a second spectrometer generating an M-mode optical path in a second band spectral range, the second spectrometer comprising,
a second incident unit which emits a second incident light,
a second collimating unit disposed opposite to the second incident unit to irradiate the second incident light to the second light splitting unit in parallel,
a second light splitting unit arranged with respect to the second collimating unit to spectrally disperse the second incident light,
a second focusing unit arranged with respect to the second light splitting unit to focus the dispersed second incident light to a detector;
a detector opposite the first and second focusing cells, the detector being common to the first and second spectrometers.
In the common detector Chenettner spectrometer, the first incident unit includes,
a first incident optical fiber for guiding a first incident light,
a first fiber optic adapter connecting the first incoming optical fiber,
a first focusing lens provided on the first fiber optic adapter to focus the first incident light,
a first slit provided between the first focusing lens and a first collimating unit so that the first incident light is incident to the first collimating unit in a predetermined spot shape and a predetermined luminous flux;
the second incidence unit includes a second incidence unit including,
a second incident optical fiber for guiding a second incident light,
a second fiber optic adapter connecting the second incoming optical fiber,
a second focusing lens provided on the second fiber optic adapter to focus the second incident light,
a second slit provided between the second focusing lens and the second collimating unit so that the second incident light is incident to the second collimating unit in a predetermined spot shape and a predetermined luminous flux.
In the Chenettner spectrometer sharing the detector, the first collimation unit and/or the second collimation unit comprise a collimation reflector and a collimation reflector adjusting and fixing base for supporting the collimation reflector, the aperture of the collimation reflector is 25mm to 75mm, and the curvature radius is 100 to 350.
In the chenettner spectrometer with the shared detector, the collimating reflector is a spherical reflector.
In the Chenettner spectrometer with the shared detector, the first light splitting unit and/or the second light splitting unit comprise a planar reflection grating and a grating fixing base for supporting the planar reflection grating, the size of the planar reflection grating is 12.7 × 12.7mm, 25 × 25mm or 50 × 50mm, and the etching density is 300, 600, 900, 1200 or 1800.
In the Chenettner spectrometer with the shared detector, the first focusing unit and/or the second focusing unit comprise a focusing reflector and a focusing reflector adjusting and fixing base for supporting the focusing reflector, the aperture of the focusing reflector is 25mm to 75mm, and the curvature radius is 100 to 350. In the chenettner spectrometer with the shared detector, the focusing reflector is a spherical reflector.
In the Chenettner spectrometer with the shared detector, the detector comprises a CCD or CMOS sensor or a PMT or APD photoelectric detector.
In the chenettner spectrometer with the shared detector, the first band spectral range is lower than the second band spectral range.
A tuning method for a chernitor spectrometer using the common detector comprises the following steps,
the first step, based on the spectrum wave band to be detected, the two spectrometers are divided into a first spectrometer generating an M-type light path in a first wave band spectrum range and a second spectrometer generating an M-type light path in a second wave band spectrum range,
the second step, simulating the first spectrometer and the second spectrometer to determine optical parameters, building M-shaped light paths of the first spectrometer and the second spectrometer,
the third step, the first spectrometer and the second spectrometer are optimized to ensure that the image surfaces thereof are on the same horizontal plane and at the same position,
the fourth step, the first incident light enters from the first spectrometer to carry out stray light simulation analysis, the second incident light enters from the second spectrometer to carry out stray light simulation analysis, whether 0-order, -1-order and-2-order diffraction light of the grating influences the receiving of the light path is analyzed, if yes, the second step is returned to for readjustment,
and fifthly, performing tolerance analysis on the first spectrometer and the second spectrometer to finally obtain a final structure of the Chenettner spectrometer of the common detector determined by the suboptimal surfaces of the first spectrometer and the second spectrometer.
Compared with the prior art, the invention has the beneficial effects that:
the invention overcomes the problem that the detectable spectrum range is reduced when the resolution ratio of a common spectrometer is increased, under the condition that a receiving detector is expensive, two spectrometer light paths can be formed by adding collimation, light splitting and focusing units, and the two spectrometers share one detector by simulating and selecting and adjusting a proper structure, thereby enlarging the detectable spectrum range and improving the spectral resolution ratio to finish the spatial multiplexing of detection; in addition, because the composite light is separated at the light source, the light source can be controlled by synchronous or asynchronous pulses, the time multiplexing or demultiplexing of the spectrometer is completed, and another technical route is provided for the method for quickly comparing the spectral information or synthesizing the spectral information.
The above description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly apparent, and to make the implementation of the content of the description possible for those skilled in the art, and to make the above and other objects, features and advantages of the present invention more obvious, the following description is given by way of example of the specific embodiments of the present invention.
Drawings
Various other advantages and benefits of the present invention will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. It is obvious that the drawings described below are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort. Also, like parts are designated by like reference numerals throughout the drawings.
In the drawings:
FIG. 1 is a schematic diagram of a detector-shared Chenettner spectrometer according to an embodiment of the present invention;
FIG. 2 is a diagram of an optimized optical path of a second spectrometer in a detector-shared Chenettner spectrometer according to an embodiment of the present invention;
FIG. 3 is a diagram of an optimized optical path of a first spectrometer in a detector-shared Chenettner spectrometer according to an embodiment of the present invention;
FIG. 4 is a diagram of an integrated optical path structure of a detector-shared Chenettner spectrometer according to one embodiment of the present invention;
fig. 5 is a schematic diagram of a three-dimensional structure of a common detector chenettner spectrometer according to an embodiment of the present invention.
The invention is further explained below with reference to the figures and examples.
Detailed Description
Specific embodiments of the present invention will be described in more detail below with reference to the accompanying drawings fig. 1 to 5. While specific embodiments of the invention are shown in the drawings, it should be understood that the invention may be embodied in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
It should be noted that certain terms are used throughout the description and claims to refer to particular components. As one skilled in the art will appreciate, various names may be used to refer to a component. This specification and claims do not intend to distinguish between components that differ in name but not function. In the following description and in the claims, the terms "include" and "comprise" are used in an open-ended fashion, and thus should be interpreted to mean "include, but not limited to. The description which follows is a preferred embodiment of the invention, but is made for the purpose of illustrating the general principles of the invention and not for the purpose of limiting the scope of the invention. The scope of the present invention is defined by the appended claims.
For the purpose of facilitating understanding of the embodiments of the present invention, the following description will be made by taking specific embodiments as examples with reference to the accompanying drawings, and the drawings are not to be construed as limiting the embodiments of the present invention.
For better understanding, as shown in fig. 1 to 5, a common detector chenetter spectrometer includes,
a first spectrometer generating an M-mode optical path in a first band spectral range, the first spectrometer comprising,
a first incident unit which emits a first incident light,
a first collimating unit 4 arranged opposite to the first incident unit to irradiate the first incident light to a first light splitting unit 5 in parallel,
a first light splitting unit 5 arranged with respect to the first collimating unit 4 to spectrally disperse the first incident light,
a first focusing unit 6 arranged with respect to the first light splitting unit 5 to focus the dispersed first incident light to a detector 7;
a second spectrometer generating an M-mode optical path in a second band spectral range, the second spectrometer comprising,
a second incident unit which emits a second incident light,
a second collimating unit 11 disposed opposite to the second incident unit to irradiate the second incident light to a second light splitting unit 12 in parallel,
a second light splitting unit 12 arranged with respect to the second collimating unit 11 to spectrally disperse the second incident light,
a second focusing unit 13 arranged with respect to the second light splitting unit 12 to focus the dispersed second incident light to the detector 7;
a detector 7 opposite to the first focusing unit 6 and the second focusing unit 13, the detector 7 being common to the first spectrometer and the second spectrometer.
Light to be measured is respectively emitted into two paths of spectrometers through an incidence unit, light of each path is parallelly emitted into a light splitting unit through a collimation unit, the light splitting unit spatially disperses composite light into monochromatic light beams with different wavelengths, and then a focusing unit focuses the dispersed monochromatic light beams onto a detection unit; the first spectrometer and the second spectrometer incidence and light splitting module are respectively positioned at two sides of the common photoelectric detector 7, so that the same detector 7 respectively performs spectrum analysis on two paths of light of the first spectrometer and the second spectrometer. According to the invention, through the unique design that two M-type C-T spectrometers share the same detector 7, the aberration elimination design of the near ultraviolet to visible light wave band is realized, the analyzed spectrum band is wider, and the obtained spectrum resolution is higher.
In the preferred embodiment of the common detector Chenettner spectrometer, the first entrance unit comprises,
a first incident optical fiber for guiding a first incident light,
a first fiber optic adapter 1 to which the first incoming fiber is connected,
a first focusing lens 2 provided on the first fiber optic adapter 1 to focus the first incident light,
a first slit 3 provided between the first focusing lens 2 and the first collimating unit 4 so that the first incident light is incident to the first collimating unit 4 with a predetermined spot shape and a predetermined luminous flux;
the second incidence unit includes a second incidence unit including,
a second incident optical fiber for guiding a second incident light,
a second fiber optic adapter 8 connecting the second incoming fiber,
a second focusing lens 9 provided on the second fiber adapter 8 to focus the second incident light,
a second slit 10 provided between the second focusing lens 9 and the second collimating unit 11 so that the second incident light is incident to the second collimating unit 11 with a predetermined spot shape and a predetermined luminous flux.
In the preferred embodiment of the detector-shared chenetter spectrometer, the first collimating unit 4 and/or the second collimating unit 11 includes a collimating mirror and a collimating mirror adjusting and fixing base for supporting the collimating mirror, the aperture of the collimating mirror is 25mm to 75mm, and the radius of curvature is 100 to 350.
In a preferred embodiment of the detector-shared chenetter spectrometer, the collimating mirror is a spherical mirror.
In the preferred embodiment of the detector-shared chenetter spectrometer, the first light splitting unit 5 and/or the second light splitting unit 12 includes a flat reflective grating and a grating fixing base for supporting the flat reflective grating, the size of the flat reflective grating is 12.7 × 12.7mm, 25 × 25mm or 50 × 50mm, and the scribing density is 300, 600, 900, 1200 or 1800.
In the preferred embodiment of the detector-shared chenetter spectrometer, the first focusing unit 6 and/or the second focusing unit 13 comprises a focusing mirror and a focusing mirror adjusting fixing base for supporting the focusing mirror, the aperture of the focusing mirror is 25mm to 75mm, and the radius of curvature is 100 to 350.
In a preferred embodiment of the detector-shared chenetter spectrometer, the focusing mirror is a spherical mirror.
In the preferred embodiment of the common detector Chenettner spectrometer, the detector 7 comprises a CCD or CMOS sensor, or a PMT or APD photodetector 7.
In a preferred embodiment of the common detector chenetter spectrometer, the first wavelength band spectral range is lower than the second wavelength band spectral range.
In one embodiment, the system apparatus of the present invention is designed as shown in fig. 5, and the optical fiber adapter and the focusing lens are operated to focus the composite light from the optical fiber to the entrance slit through coupling. The entrance slit functions to restrict light entering the spectrometer to be incident with a certain spot shape and a proper luminous flux. The collimating reflector is used for irradiating incident light onto the grating in parallel, and in the specific embodiment, the aperture of the collimating reflector is 50mm, and the curvature radius is 300. The planar reflection grating disperses the composite light according to the wavelength, and in the specific implementation case, the size of the grating is selected to be 50 multiplied by 50mm, and the etching density is 900. The focusing mirror focuses the dispersed light onto the detector 7, and in this embodiment, the aperture of the focusing mirror is 75mm, and the curvature radius is 300. In this embodiment, the photo-detector 7 is a Hamamatsu H7260 linear multi-anode photomultiplier.
A tuning method for a chernitor spectrometer using the common detector comprises the following steps,
the first step, based on the spectrum wave band to be detected, the two spectrometers are divided into a first spectrometer generating an M-type light path in a first wave band spectrum range and a second spectrometer generating an M-type light path in a second wave band spectrum range,
the second step, simulating the first spectrometer and the second spectrometer to determine optical parameters, building M-shaped light paths of the first spectrometer and the second spectrometer,
the third step, the first spectrometer and the second spectrometer are optimized to ensure that the image surfaces thereof are on the same horizontal plane and at the same position,
the fourth step, the first incident light enters from the first spectrometer to carry out stray light simulation analysis, the second incident light enters from the second spectrometer to carry out stray light simulation analysis, whether 0-order, -1-order and-2-order diffraction light of the grating influences the receiving of the light path is analyzed, if yes, the second step is returned to for readjustment,
and fifthly, performing tolerance analysis on the first spectrometer and the second spectrometer to finally obtain a final structure of the Chenettner spectrometer of the common detector determined by the suboptimal surfaces of the first spectrometer and the second spectrometer.
In a preferred embodiment, the adjustment method comprises,
step 1, determining system design requirements, determining the specification and the model of a photoelectric detector 7 according to the system requirements, and dividing two paths of spectrometers into two paths according to the spectral bands to be detected, wherein one path of a low-band spectral range is set as a spectrometer A, and the other path of a higher-band spectral range is set as a spectrometer B.
And 2, firstly, carrying out preliminary simulation on the spectrometer A, preliminarily selecting the specification of the element according to theoretical requirements, wherein the specification comprises the size of a grating, a grating constant, the calibers of a collimating reflector and a focusing reflector and the curvature radiuses of the collimating reflector and the focusing reflector, and then building a spectrometer optical path by utilizing optical professional software (such as ZemaxOpticStudio, Code V and other optical simulation software) to carry out preliminary simulation and model selection comparison.
And 3, determining the specification of the slit according to the resolution requirement on the basis of the previous step, then continuously changing the corresponding parameters of the grating, the collimating reflector and the focusing reflector, properly adjusting the optical path, performing simulation and preliminary optimization, and determining the specifications of the grating, the collimating reflector and the focusing reflector.
And 4, after the grating, the collimating reflector and the focusing reflector are determined, further optimizing the aberration to complete the optimization of the image plane, and obtaining the final structure of the spectrometer A.
And 5, performing primary optical simulation on the spectrometer B and determining the final structure of the spectrometer B as in the steps 2, 3 and 4.
And 6, integrating the two spectrometers, enabling the image surfaces of the two spectrometers to be on the same horizontal plane and basically located at the same position, damaging the optimal surfaces of the two spectrometers in the process, and continuously adjusting the structures of the two spectrometers to simulate the optimal surfaces as long as the optimal surfaces are reached.
And 7, after a better optimized structure is obtained, integrating the spectrometer A and the spectrometer B by using optical professional software (such as ZemaxOpticStaudio, Code V and other optical simulation software), building a double-M-shaped light path, and changing the plane of the detection surface into a plane mirror for simulation analysis.
And 8, when the optical path is established by using optical simulation software, enabling light to enter from the spectrometer A, carrying out stray light simulation analysis, analyzing whether 0-level, -1-level and-2-level diffraction light of the grating influences the receiving of the optical path to a great extent, and returning to the step 6 to readjust the structure if the 0-level, -1-level and-2-level diffraction light of the grating influences the receiving of the optical path to a great extent.
And 9, after the analysis of the previous step is finished, rebuilding a double-M-shaped light path in optical simulation software, enabling light to enter from the spectrometer B, carrying out stray light simulation analysis, analyzing whether 0-order, -1-order and-2-order diffraction light of the grating influences the receiving of the light path to a great extent, and returning to the step 6 to readjust the structure if the stray light simulation analysis is finished.
And step 10, after the steps 6, 7, 8 and 9, performing tolerance analysis on the two spectrometers to finally obtain the suboptimal surfaces of the two spectrometers, and determining the final structure of the double-M spectrometer.
In a preferred embodiment, according to step 1, step 2 and step 3 described in the design step, the system is determined to receive the spectrum band requirement and the spectrum resolution requirement, and further the specifications of the grating, the collimating mirror and the focusing mirror are determined, in this embodiment, the spectrum range of the spectrometer a is set to be 280-460nm, the spectrum range of the spectrometer B is set to be 420-600nm, and the resolution requirement to be achieved is 0.177 (mm/nm).
In a preferred embodiment, according to the steps 4 and 5 described in the design step, the optical circuit of the spectrometer a with the M-type C-T structure is obtained by using optical simulation software (in this specific embodiment, zemaxoptical studio2017) as shown in fig. 2, and the optical circuit of the spectrometer B with the M-type C-T structure is shown in fig. 3.
In a preferred embodiment, two M-mode spectrometers are integrated according to the design steps 6 to 10, and a dual M-mode C-T spectrometer with a common detector, which is finally designed in a specific embodiment, is shown in fig. 4.
Industrial applicability
The Chenettner spectrometer and the method sharing the detector can be manufactured and used in the field of biological aerosol particle identification.
The foregoing describes the general principles of the present application in conjunction with specific embodiments, however, it is noted that the advantages, effects, etc. mentioned in the present application are merely examples and are not limiting, and they should not be considered essential to the various embodiments of the present application. Furthermore, the foregoing disclosure of specific details is for the purpose of illustration and description and is not intended to be limiting, since the foregoing disclosure is not intended to be exhaustive or to limit the disclosure to the precise details disclosed.
The foregoing description has been presented for purposes of illustration and description. Furthermore, the description is not intended to limit embodiments of the application to the form disclosed herein. While a number of example aspects and embodiments have been discussed above, those of skill in the art will recognize certain variations, modifications, alterations, additions and sub-combinations thereof.
Claims (10)
1. A Chenettner spectrometer with a shared detector is characterized by comprising,
a first spectrometer generating an M-mode optical path in a first band spectral range, the first spectrometer comprising,
a first incident unit which emits a first incident light,
a first collimating unit disposed opposite to the first incident unit to irradiate the first incident light to the first light splitting unit in parallel,
a first light splitting unit arranged with respect to the first collimating unit to spectrally disperse the first incident light,
a first focusing unit arranged with respect to the first light splitting unit to focus the dispersed first incident light to a detector;
a second spectrometer generating an M-mode optical path in a second band spectral range, the second spectrometer comprising,
a second incident unit which emits a second incident light,
a second collimating unit disposed opposite to the second incident unit to irradiate the second incident light to the second light splitting unit in parallel,
a second light splitting unit arranged with respect to the second collimating unit to spectrally disperse the second incident light,
a second focusing unit arranged with respect to the second light splitting unit to focus the dispersed second incident light to a detector;
a detector opposite the first and second focusing cells, the detector being common to the first and second spectrometers.
2. A common detector Chenettner spectrometer as in claim 1, wherein preferably the first entrance unit comprises,
a first incident optical fiber for guiding a first incident light,
a first fiber optic adapter connecting the first incoming optical fiber,
a first focusing lens provided on the first fiber optic adapter to focus the first incident light,
a first slit provided between the first focusing lens and a first collimating unit so that the first incident light is incident to the first collimating unit in a predetermined spot shape and a predetermined luminous flux;
the second incidence unit includes a second incidence unit including,
a second incident optical fiber for guiding a second incident light,
a second fiber optic adapter connecting the second incoming optical fiber,
a second focusing lens provided on the second fiber optic adapter to focus the second incident light,
a second slit provided between the second focusing lens and the second collimating unit so that the second incident light is incident to the second collimating unit in a predetermined spot shape and a predetermined luminous flux.
3. The chenettner spectrometer of claim 1 wherein the first collimating unit and/or the second collimating unit comprises a collimating mirror and a collimating mirror adjusting fixture supporting the collimating mirror, the collimating mirror having an aperture of 25mm to 75mm and a radius of curvature of 100 to 350 mm.
4. A common detector, chenettner spectrometer as in claim 3, wherein the collimating mirror is a spherical mirror.
5. The detector-shared chenetter spectrometer of claim 1 wherein the first and/or second beam splitting cells comprise a planar reflection grating having a grating size of 12.7 x 12.7mm or 25 x 25mm or 50 x 50mm and a grating mounting base supporting the planar reflection grating, and the grating density is 300, 600, 900, 1200 or 1800.
6. The detector-shared chenetter spectrometer of claim 1 wherein the first focusing unit and/or the second focusing unit comprises a focusing mirror and a focusing mirror adjusting fixture supporting said focusing mirror, the focusing mirror having an aperture of 25mm to 75mm and a radius of curvature of 100 to 350 mm.
7. The common detector Chenettner spectrometer of claim 6, wherein the focusing mirror is a spherical mirror.
8. A common detector chernitor spectrometer as in claim 1, wherein said detector comprises a CCD or CMOS sensor, or a PMT, APD photodetector.
9. A common detector chenettner spectrometer as in claim 1 wherein the first band spectral range is lower than the second band spectral range.
10. A method of tuning a Chenettner spectrometer using a common detector of any one of claims 1-9, comprising the steps of,
the first step, based on the spectrum wave band to be detected, the two spectrometers are divided into a first spectrometer generating an M-type light path in a first wave band spectrum range and a second spectrometer generating an M-type light path in a second wave band spectrum range,
the second step, simulating the first spectrometer and the second spectrometer to determine optical parameters, building M-shaped light paths of the first spectrometer and the second spectrometer,
the third step, the first spectrometer and the second spectrometer are optimized to ensure that the image surfaces thereof are on the same horizontal plane and at the same position,
the fourth step, the first incident light enters from the first spectrometer to carry out stray light simulation analysis, the second incident light enters from the second spectrometer to carry out stray light simulation analysis, whether 0-order, -1-order and-2-order diffraction light of the grating influences the receiving of the light path is analyzed, if yes, the second step is returned to for readjustment,
and fifthly, performing tolerance analysis on the first spectrometer and the second spectrometer to finally obtain a final structure of the Chenettner spectrometer of the common detector determined by the suboptimal surfaces of the first spectrometer and the second spectrometer.
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