CN114812816A - Three-dimensional double-layer structure C-T spectrometer and method sharing detector - Google Patents

Three-dimensional double-layer structure C-T spectrometer and method sharing detector Download PDF

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CN114812816A
CN114812816A CN202210447472.6A CN202210447472A CN114812816A CN 114812816 A CN114812816 A CN 114812816A CN 202210447472 A CN202210447472 A CN 202210447472A CN 114812816 A CN114812816 A CN 114812816A
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spectrometer
detector
light
layer structure
layer
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陈和
张嘉忆
陈思颖
张寅超
邓延宝
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Beijing Institute of Technology BIT
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/04Slit arrangements slit adjustment

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Abstract

In the spectrograph, a lower layer C-T spectrograph generates a first light path in a first wavelength band spectral range, a first entrance slit is arranged relative to a first coupling lens to enter first composite light with a preset light spot shape and luminous flux, a first collimating spherical mirror is arranged relative to the first entrance slit to parallelly emit the first composite light from the first entrance slit, a first plane reflection grating is arranged relative to the first collimating spherical mirror to disperse the first composite light into first monochromatic light, and a first focusing spherical mirror is arranged relative to the first plane reflection grating to focus the first monochromatic light to a detector; the upper layer C-T spectrometer is positioned above the lower layer C-T spectrometer and generates a second light path of a second wavelength band spectral range, and the wedge-shaped mirror is arranged between the second focusing spherical mirror and the detector to deflect the second focusing spherical mirror to the detector.

Description

Three-dimensional double-layer structure C-T spectrometer and method sharing detector
Technical Field
The invention relates to the technical field of optical detection, in particular to a three-dimensional double-layer structure C-T spectrometer sharing a detector and a method thereof.
Background
The spectrometer is an optical precision instrument, is widely used in the fields of aerospace, food detection, biological detection of medicines and the like, and is an important tool in the field of optical detection. The Czerny-Turner (C-T spectrometer) has been widely used due to its simple structure, stable performance, high spectral resolution, small stray light, small curvature of spectral surface, etc. The conventional C-T spectrometer comprises a planar grating and two spherical mirrors. The signal light entering from the incident slit is collimated by the collimating lens and then diffracted by the grating, and the diffracted light is focused on the detector by the focusing lens, so that the incident light is imaged on one spatial dimension and the spectral intensity of the incident light is distinguished. The C-T spectrometer has two structures, namely a crossed structure and a non-crossed structure, the crossed structure has higher flexibility, the structure is more compact, and the space utilization rate is higher; the non-crossed structure is also called as an M-shaped structure, stray light of an unfolded light path is small, compared with the crossed structure, astigmatism is small, and spectral resolution is high.
The above information disclosed in the background section is only for enhancement of understanding of the background of the invention and therefore it may contain information that does not form the prior art that is well known to those of ordinary skill in the art.
Disclosure of Invention
In view of the above problems, the present invention provides a stereo double-layer structure C-T spectrometer and method sharing a detector, which overcome the problem of the prior art that the resolution is reduced while the detection spectral range is increased, and an optical path is added on the basis of using the same detector, thereby realizing analysis of a wider spectral band and achieving higher spectral resolution. In addition, because the two light sources are separated, the light sources can be controlled by using synchronous or asynchronous pulses, the multiplexing or demultiplexing of the spectrometer on time is realized, and higher spectral information comparison and synthesis efficiency can be obtained.
The purpose of the invention is realized by the following technical scheme.
A three-dimensional double-layer structure C-T spectrometer with a shared detector comprises,
a lower layer C-T spectrometer generating a first optical path in a first band spectral range, the lower layer C-T spectrometer comprising,
a first coupling lens that receives the first composite light;
a first entrance slit arranged opposite to the first coupling lens to enter the first composite light of a predetermined spot shape and light flux;
a first collimating spherical mirror arranged relative to the first entrance slit to parallel-out the first composite light from the first entrance slit;
a first planar reflective grating arranged relative to the first collimating spherical mirror to disperse the first composite light into first monochromatic light;
a first focusing spherical mirror arranged relative to the first planar reflective grating to focus the first monochromatic light to a detector;
an upper C-T spectrometer positioned above the lower C-T spectrometer and generating a second optical path in a second band spectral range, the upper C-T spectrometer comprising,
a second coupling lens that receives the second composite light;
a second entrance slit arranged opposite to the second coupling lens to enter the second composite light of a predetermined spot shape and light flux;
a second collimating spherical mirror disposed relative to the second entrance slit to exit the second composite light from the second entrance slit in parallel;
a second planar reflective grating arranged relative to the second collimating spherical mirror to disperse the second composite light into a second monochromatic light;
a second focusing spherical mirror arranged relative to the second planar reflection grating to focus the second monochromatic light;
a wedge mirror disposed between the second focal sphere mirror and the detector to deflect the second focal sphere mirror toward the detector.
In the three-dimensional double-layer structure C-T spectrometer sharing the detector, the lower layer C-T spectrometer and the upper layer C-T spectrometer are both M-shaped structure C-T spectrometers.
In the three-dimensional double-layer structure C-T spectrometer sharing the detector, the first collimating spherical reflector and/or the second collimating spherical reflector are/is provided with a collimating mirror adjusting and fixing base for supporting.
In the three-dimensional double-layer structure C-T spectrometer sharing the detector, the first waveband spectrum range is 480-620nm, and the second waveband spectrum range is 280-440 nm.
In the three-dimensional double-layer structure C-T spectrometer with the shared detector, the first focusing spherical reflector and/or the second focusing spherical reflector comprise an adjusting base for supporting.
In the three-dimensional double-layer structure C-T spectrometer with the shared detector, the first coupling lens and/or the second coupling lens comprise an optical fiber adapter and a focusing coupling lens.
In the three-dimensional double-layer structure C-T spectrometer sharing the detector, the shape of the preset light spot is circular.
In the three-dimensional double-layer structure C-T spectrometer sharing the detector, the detector comprises a CCD or CMOS sensor or a PMT or APD photoelectric detector.
In the three-dimensional double-layer structure C-T spectrometer sharing the detector, the spectral range of the first waveband is higher than the spectral range of the second waveband.
The method for adjusting the three-dimensional double-layer structure C-T spectrometer by utilizing the shared detector comprises the following steps,
the first step, based on the spectrum wave band to be detected, the two spectrometers are divided into a lower layer C-T spectrometer for generating the spectrum range of the first wave band and an upper layer C-T spectrometer for generating the spectrum range of the second wave band,
the second step, simulating the lower layer C-T spectrometer and the upper layer C-T spectrometer to determine optical parameters, building the lower layer C-T spectrometer and the upper layer C-T spectrometer,
the third step, adjusting the inclination angle of the second focusing spherical reflector, adding a wedge prism between the second focusing spherical reflector and the optical path of the detector to make the deflection angle of the optical path meet the mechanical condition of the upper and lower double-layer structure,
fourthly, the first composite light enters from the lower layer C-T spectrometer for stray light simulation analysis, the second composite light enters from the upper layer C-T spectrometer for stray light simulation analysis, whether 0-order, -1-order and-2-order diffraction light of the grating influences the receiving of the light path is analyzed, if yes, the second step is returned to for readjustment,
and fifthly, analyzing the lower layer C-T spectrometer and the upper layer C-T spectrometer with tolerance, and determining the three-dimensional double-layer structure C-T spectrometer sharing the detector.
Compared with the prior art, the invention has the beneficial effects that:
the invention overcomes the problem that the detectable spectrum range is reduced when the resolution ratio of a common spectrometer is increased, improves the problem of mutual interference between two optical paths of the spectrometer structure of the prior shared detector, and realizes the three-dimensional double-layer spectrometer structure which uses the same detector to perform spectral analysis on two optical signals by deflecting the optical path of the upper layer structure of the spectrometer by adding the wedge-shaped prism. In addition, the two optical paths of the double-layer structure have small space interference, the structure and the design method are not only suitable for the traditional M-type C-T structure but also suitable for the crossed C-T structure, the design flexibility is greatly improved, and the size of the spectrometer can be reduced to a certain degree.
The above description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly apparent, and to make the implementation of the content of the description possible for those skilled in the art, and to make the above and other objects, features and advantages of the present invention more obvious, the following description is given by way of example of the specific embodiments of the present invention.
Drawings
Various other advantages and benefits of the present invention will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. It is obvious that the drawings described below are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort. Also, like parts are designated by like reference numerals throughout the drawings.
In the drawings:
FIG. 1 is a schematic diagram of a lower layer C-T spectrometer A of a three-dimensional double-layer structure C-T spectrometer with a shared detector according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an upper C-T spectrometer B of a three-dimensional double-layer structure C-T spectrometer with a shared detector according to an embodiment of the invention;
FIG. 3 is a schematic diagram of an optical path structure of a detector-shared three-dimensional double-layer C-T spectrometer according to an embodiment of the present invention;
FIG. 4 is a diagram of an optimized optical path of a lower layer C-T spectrometer A of a three-dimensional double-layer structure C-T spectrometer with a common detector according to an embodiment of the present invention;
FIG. 5 is a diagram of an optimized optical path of an upper C-T spectrometer B of a three-dimensional double-layer structure C-T spectrometer with a shared detector according to an embodiment of the present invention;
FIG. 6 is a diagram of an optimized optical path of a three-dimensional double-layer C-T spectrometer with a shared detector according to an embodiment of the present invention;
FIG. 7 is a schematic three-dimensional structure diagram of a detector-shared stereo two-layer structure C-T spectrometer according to an embodiment of the present invention.
The invention is further explained below with reference to the figures and examples.
Detailed Description
Specific embodiments of the present invention will be described in more detail below with reference to the accompanying drawings fig. 1 to 7. While specific embodiments of the invention are shown in the drawings, it should be understood that the invention may be embodied in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
It should be noted that certain terms are used throughout the description and claims to refer to particular components. As one skilled in the art will appreciate, various names may be used to refer to a component. This specification and claims do not intend to distinguish between components that differ in name but not function. In the following description and in the claims, the terms "include" and "comprise" are used in an open-ended fashion, and thus should be interpreted to mean "include, but not limited to. The description which follows is a preferred embodiment of the invention, but is made for the purpose of illustrating the general principles of the invention and not for the purpose of limiting the scope of the invention. The scope of the present invention is defined by the appended claims.
For the purpose of facilitating understanding of the embodiments of the present invention, the following description will be made by taking specific embodiments as examples with reference to the accompanying drawings, and the drawings are not to be construed as limiting the embodiments of the present invention.
For better understanding, as shown in fig. 1 to 7, a three-dimensional double-layer structure C-T spectrometer with a common detector includes,
a lower layer C-T spectrometer generating a first optical path in a first band spectral range, the lower layer C-T spectrometer comprising,
a first coupling lens 1 that receives the first composite light,
a first entrance slit 2 arranged opposite to the first coupling lens 1 to enter the first composite light of a predetermined spot shape and luminous flux,
a first collimating spherical mirror 3 arranged with respect to the first entrance slit 2 to emit the first multiplexed light from the first entrance slit 2 in parallel,
a first plane reflection grating 4 arranged with respect to the first collimating spherical mirror 3 to disperse the first composite light into first monochromatic light,
a first focusing spherical mirror 5 arranged with respect to the first planar reflective grating 4 to focus the first monochromatic light to a detector 6;
an upper C-T spectrometer positioned above the lower C-T spectrometer and generating a second optical path in a second band spectral range, the upper C-T spectrometer comprising,
a second coupling lens 8, which receives the second composite light,
a second entrance slit 9 arranged opposite to the second coupling lens 8 to enter the second composite light of a predetermined spot shape and luminous flux,
a second collimating spherical mirror 10 arranged with respect to said second entrance slit 9 to exit in parallel the second composite light from said second entrance slit 9,
a second planar reflection grating 11 arranged with respect to the second collimating spherical mirror 10 to disperse the second composite light into second monochromatic light,
a second focusing spherical mirror 12 arranged with respect to the second planar reflection grating 11 to focus the second monochromatic light,
a wedge mirror 7 arranged between said second focal sphere mirror 12 and the detector 6 to deflect said second focal sphere mirror 12 towards said detector 6.
In the preferred embodiment of the three-dimensional double-layer structure C-T spectrometer sharing the detector, the lower layer C-T spectrometer and the upper layer C-T spectrometer are both M-type structure C-T spectrometers.
In the preferred embodiment of the three-dimensional double-layer structure C-T spectrometer with the shared detector, the first collimating spherical mirror 3 and/or the second collimating spherical mirror 10 is/are provided with a collimating mirror adjusting and fixing base for supporting.
In a preferred embodiment of the three-dimensional double-layer structure C-T spectrometer with the shared detector, the first band spectrum range is 480-620nm, and the second band spectrum range is 280-440 nm.
In the preferred embodiment of the described detector-sharing three-dimensional double-layer structure C-T spectrometer, the first focusing spherical mirror 5 and/or the second focusing spherical mirror 12 comprise an adjusting base for support.
In the preferred embodiment of the three-dimensional double-layer structure C-T spectrometer with the shared detector, the first coupling lens 1 and/or the second coupling lens 8 comprise a fiber adapter and a focusing coupling lens.
In a preferred embodiment of the three-dimensional double-layer structure C-T spectrometer with the shared detector, the predetermined light spot shape is a circle.
In the preferred embodiment of the three-dimensional double-layer structure C-T spectrometer with a common detector, the detector 6 includes a CCD or CMOS sensor, or a PMT or APD photodetector 6.
In a preferred embodiment of the three-dimensional double-layer structure C-T spectrometer with the shared detector, the first wavelength band spectral range is higher than the second wavelength band spectral range.
In an embodiment, in the stereo double-layer structure C-T spectrometer sharing the detector, the incidence and splitting module of the spectrometer is divided into A, B two paths, the two paths are of an upper and lower double-layer structure, and share one photodetector 6, and the photodetector 6 can detect the spectra from the A, B two splitting units respectively. A. The two paths of incidence and light splitting modules comprise: the device comprises an incidence unit, a collimation unit, a light splitting unit and a focusing unit. Light to be measured is respectively emitted into A, B two paths of spectrometers through the incidence unit, light of each path is parallelly emitted into the light splitting unit through the collimation unit, the light splitting unit spatially disperses the composite light into monochromatic light beams with different wavelengths, and then the dispersed monochromatic light beams are focused to the detection unit through the focusing unit; the B-path spectrometer is positioned on the upper layer of the double-layer structure, a focusing unit of the B-path spectrometer comprises a wedge-shaped prism, so that the dispersed monochromatic light beam light path is deflected and focused to the detector 6 positioned on the lower layer of the double-layer structure, and the distortion caused by the inclination of the device is improved, thereby realizing the spectral analysis of A, B two paths of light signals by using the same detector 6. The spectrometer A or the spectrometer B comprises an incidence unit, a collimation unit, a light splitting unit and a focusing unit; the incident unit comprises an incident optical fiber, an optical fiber adapter, a focusing lens and a slit; the collimation unit comprises a collimation reflector and a collimation mirror adjusting and fixing base; the light splitting unit comprises a grating and a grating fixing base; the focusing unit comprises a focusing reflector and a focusing mirror adjusting and fixing base, wherein the focusing unit of the spectrometer B comprises a wedge-shaped prism and a wedge-shaped prism adjusting and fixing base. According to the invention, through the design that two paths of M-type C-T spectrometers share the same detector 6, the time-sharing multiplexing spectrum detection function is realized, and higher spectrum information comparison and synthesis efficiency are obtained. And the light path is added on the basis of using the same detector 6, so that analysis of a wider spectral band is realized, and higher spectral resolution is achieved. The novel structure and the spectrometer design method are provided for the 6-spectrometer shared detector, stray light interference between two spectrometers can be reduced by adopting a double-layer structure, the size of the spectrometer can be reduced to a certain extent, the design flexibility is improved, and the structure and the design method can be also suitable for a cross structure.
The system device designed by one embodiment is shown in fig. 7, and each of the first coupling lens 1 and the second coupling lens 8 includes a fiber adapter and a focusing coupling lens, and is used for focusing the composite light accessed by the optical fiber onto the first entrance slit 2 or the second entrance slit 9 through the coupling lens. The first entrance slit 2 or the second entrance slit 9 functions to restrict light entering the spectrometer to be incident with a specific spot shape and an appropriate luminous flux. The first collimating spherical mirror 3 and the second collimating spherical mirror 10 are used for enabling divergent light passing through the slit to be emitted in parallel and irradiate the grating at a certain angle, in the specific embodiment, a collimating spherical mirror with the aperture of 50mm is selected, the curvature radius of the collimating mirror of the lower C-T spectrometer A is selected to be 200, and the curvature radius of the collimating mirror of the upper C-T spectrometer B is selected to be 120. The first plane reflection grating 4 and the second plane reflection grating 11 disperse the composite light into monochromatic light according to different angles of wavelength, and the size of the grating is 50 x 50mm in the specific embodiment, and the etching density is 1200. The first focusing spherical mirror 5 and the second focusing spherical mirror 12 focus the dispersed light onto the detector 6, and in this specific embodiment, a focusing spherical mirror with a caliber of 75mm and a curvature radius of 200 is selected. The common photodetector 6 selects the toshiba TCD1304DG line CCD. The wedge-shaped mirror 7 is used for deflecting the optical path of the monochromatic light beam dispersed by the C-T spectrometer B on the upper layer, focusing the monochromatic light beam on the detector 6 on the lower layer of the double-layer structure, and simultaneously improving the distortion caused by the inclination of the device.
A method for adjusting a three-dimensional double-layer structure C-T spectrometer by using a shared detector comprises the following steps,
the first step, based on the spectrum wave band to be detected, the two spectrometers are divided into a lower layer C-T spectrometer for generating the spectrum range of the first wave band and an upper layer C-T spectrometer for generating the spectrum range of the second wave band,
the second step, simulating the lower layer C-T spectrometer and the upper layer C-T spectrometer to determine optical parameters, building the lower layer C-T spectrometer and the upper layer C-T spectrometer,
the third step, adjusting the inclination angle of the second focusing spherical reflector 12, adding a wedge prism between the second focusing spherical reflector 12 and the optical path of the detector 6, so that the deflection angle of the optical path meets the mechanical condition of the upper and lower double-layer structure,
fourthly, the first composite light enters from the lower layer C-T spectrometer for stray light simulation analysis, the second composite light enters from the upper layer C-T spectrometer for stray light simulation analysis, whether 0-order, -1-order and-2-order diffraction light of the grating influences the receiving of the light path is analyzed, if yes, the second step is returned to for readjustment,
and fifthly, analyzing the lower layer C-T spectrometer and the upper layer C-T spectrometer with tolerance, and determining the three-dimensional double-layer structure C-T spectrometer sharing the detector.
In one embodiment, the method includes the steps of,
step 1, determining system design requirements, determining specifications and models of a photoelectric detector 6 according to spectral bands to be detected and system requirements, and determining two paths of spectrometer detection bands, wherein one path of a spectral range of a primary detection band is drawn as a spectrometer A, and one path of a spectral range of a secondary detection band is drawn as a spectrometer B.
Step 2, firstly, performing preliminary simulation on the spectrometer A, and determining the specification of a slit, the grating constant and the curvature radius of a collimating reflector and a focusing reflector according to the parameters of a selected detector 6 and the requirements of resolution; the specification of the element is preliminarily selected according to the theoretical requirements, including the size of the grating and the calibers of the collimating reflector and the focusing reflector, and then the optical path of the spectrometer is built by utilizing optical professional software, such as Zemax optical studio, Code V and other optical simulation software, so as to carry out preliminary simulation and model selection comparison.
And 3, on the basis of the previous step, continuously changing parameters corresponding to the grating, the collimating reflector and the focusing reflector, properly adjusting the light path, performing simulation and preliminary optimization, and determining the specifications of the grating, the collimating reflector and the focusing reflector.
And 4, after the grating, the collimating reflector and the focusing reflector are determined, further optimizing the aberration to complete the optimization of the image plane, so as to obtain the final structure of the spectrometer A.
Step 5 is the same as the step 2 and the step 3, and performs preliminary optical simulation on the spectrometer B and determines the specifications of a grating, a collimating reflector and a focusing reflector of the spectrometer B.
And 6, adjusting the inclination angle of a focusing reflector of the spectrometer B, and adding a wedge-shaped prism between the focusing reflector and the optical path of the detector 6 to enable the deflection angle of the optical path to meet the mechanical conditions of an upper and a lower double-layer structures. Further optimizing the aberration to obtain the final structure of the spectrometer B
And 7, integrating the two spectrometers to enable the two image surfaces to coincide to obtain the integral spectrometer structure.
And 8, after the integral spectrometer structure is obtained, integrating the spectrometer A and the spectrometer B by using optical professional software (such as Zemax optical studio, Code V and other optical simulation software), building a double-layer light path, and changing the plane of the detection surface into a plane mirror for simulation analysis.
And 9, when the optical path is established by using optical simulation software, enabling light to enter from the spectrometer A, carrying out stray light simulation analysis, analyzing whether 0-level, -1-level and-2-level diffraction light of the grating influences the receiving of the optical path to a great extent, and returning to the step 4 to readjust the structure if the 0-level, -1-level and-2-level diffraction light of the grating influences the receiving of the optical path to a great extent.
And 10, after the last step of analysis is completed, re-establishing a double-layer light path in optical simulation software, enabling light to enter from the spectrometer B, performing stray light simulation analysis, analyzing whether 0-level, -1-level and-2-level diffraction light of the grating affects the receiving of the light path to a great extent, and returning to the step 6 to readjust the structure if the 0-level, -1-level and-2-level diffraction light of the grating affects the receiving of the light path to a great extent.
And 11, after the steps 4, 5, 6, 7, 8, 9 and 10, carrying out tolerance analysis on the two spectrometers to determine the final structure of the three-dimensional double-layer structure C-T spectrometer.
In an embodiment, according to the step 1 and the step 2 of the design step, the determination system receives the spectrum segment requirement and the spectrum resolution requirement, and selects the used photodetector 6, so as to determine the specifications of the slit, the grating, the collimating mirror and the focusing mirror, in this embodiment, the spectrum range of the spectrometer a is set to 480-.
According to the steps 3, 4, 5 and 6 of the design step, optical simulation software (Zemax 18.4 is used in this specific embodiment) is used to obtain the optical path of the spectrometer a with the M-type C-T structure as shown in fig. 4, and the optical path of the spectrometer B with the M-type C-T structure as shown in fig. 5.
According to the design steps 7 to 11, the two paths of M-type spectrometers are integrated, and a three-dimensional double-layer structure C-T spectrometer which is finally designed according to a specific embodiment and shares a detector is shown in FIG. 6.
The foregoing describes the general principles of the present application in conjunction with specific embodiments, however, it is noted that the advantages, effects, etc. mentioned in the present application are merely examples and are not limiting, and they should not be considered essential to the various embodiments of the present application. Furthermore, the foregoing disclosure of specific details is for the purpose of illustration and description and is not intended to be limiting, since the foregoing disclosure is not intended to be exhaustive or to limit the disclosure to the precise details disclosed.
The foregoing description has been presented for purposes of illustration and description. Furthermore, the description is not intended to limit embodiments of the application to the form disclosed herein. While a number of example aspects and embodiments have been discussed above, those of skill in the art will recognize certain variations, modifications, alterations, additions and sub-combinations thereof.

Claims (10)

1. A three-dimensional double-layer structure C-T spectrometer with a shared detector is characterized by comprising,
a lower layer C-T spectrometer generating a first optical path in a first band spectral range, the lower layer C-T spectrometer comprising,
a first coupling lens that receives the first composite light;
a first entrance slit arranged opposite to the first coupling lens to enter the first composite light of a predetermined spot shape and luminous flux;
a first collimating spherical mirror arranged relative to the first entrance slit to parallel-out the first composite light from the first entrance slit;
a first planar reflective grating arranged relative to the first collimating spherical mirror to disperse the first composite light into first monochromatic light;
a first focusing spherical mirror arranged relative to the first planar reflective grating to focus the first monochromatic light to a detector;
an upper C-T spectrometer positioned above the lower C-T spectrometer and generating a second optical path in a second band spectral range, the upper C-T spectrometer comprising,
a second coupling lens that receives the second composite light;
a second entrance slit arranged opposite to the second coupling lens to enter the second composite light of a predetermined spot shape and light flux;
a second collimating spherical mirror disposed relative to the second entrance slit to exit the second composite light from the second entrance slit in parallel;
a second planar reflective grating arranged relative to the second collimating spherical mirror to disperse the second composite light into a second monochromatic light;
a second focusing spherical mirror arranged relative to the second planar reflection grating to focus the second monochromatic light;
a wedge mirror disposed between the second focal sphere mirror and the detector to deflect the second focal sphere mirror toward the detector.
2. The detector-shared three-dimensional double-layer structure C-T spectrometer as claimed in claim 1, wherein preferably, the lower layer C-T spectrometer and the upper layer C-T spectrometer are both M-type structure C-T spectrometers.
3. The detector-sharing three-dimensional double-layer structure C-T spectrometer as claimed in claim 1, wherein the first collimating spherical mirror and/or the second collimating spherical mirror has a collimator adjustment fixing base for supporting.
4. The three-dimensional double-layer structure C-T spectrometer as claimed in claim 1, wherein the first band spectrum range is 480-620nm and the second band spectrum range is 280-440 nm.
5. The detector-sharing three-dimensional two-layer structure C-T spectrometer of claim 1, wherein the first focusing spherical mirror and/or the second focusing spherical mirror comprises an adjustment base for supporting.
6. The detector-sharing stereoscopic double-layer structure C-T spectrometer of claim 1, wherein the first coupling lens and/or the second coupling lens comprises a fiber adapter and a focusing coupling lens.
7. The detector-shared stereo two-layer structure C-T spectrometer of claim 1, wherein the predetermined spot shape is a circle.
8. The three-dimensional double-layered structure C-T spectrometer of claim 1, wherein the detector comprises a CCD or CMOS sensor, or a PMT or APD photodetector.
9. The detector-sharing three-dimensional two-layer structure C-T spectrometer of claim 1, wherein the first band spectral range is higher than the second band spectral range.
10. A method for adjusting a three-dimensional double-layer structure C-T spectrometer using a common detector as claimed in any one of claims 1-9, comprising the steps of,
the first step, based on the spectrum wave band to be detected, the two spectrometers are divided into a lower layer C-T spectrometer for generating the spectrum range of the first wave band and an upper layer C-T spectrometer for generating the spectrum range of the second wave band,
the second step, simulating the lower layer C-T spectrometer and the upper layer C-T spectrometer to determine optical parameters, building the lower layer C-T spectrometer and the upper layer C-T spectrometer,
the third step, adjusting the inclination angle of the second focusing spherical reflector, adding a wedge prism between the second focusing spherical reflector and the optical path of the detector to make the deflection angle of the optical path meet the mechanical condition of the upper and lower double-layer structure,
fourthly, the first composite light enters from the lower layer C-T spectrometer for stray light simulation analysis, the second composite light enters from the upper layer C-T spectrometer for stray light simulation analysis, whether 0-order, -1-order and-2-order diffraction light of the grating influences the receiving of the light path is analyzed, if yes, the second step is returned to for readjustment,
and fifthly, analyzing the lower layer C-T spectrometer and the upper layer C-T spectrometer with tolerance, and determining the three-dimensional double-layer structure C-T spectrometer sharing the detector.
CN202210447472.6A 2022-04-26 2022-04-26 Three-dimensional double-layer structure C-T spectrometer and method sharing detector Pending CN114812816A (en)

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