CN113075244A - Electronic probe sheet sample table and using method thereof - Google Patents
Electronic probe sheet sample table and using method thereof Download PDFInfo
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- CN113075244A CN113075244A CN202110364810.5A CN202110364810A CN113075244A CN 113075244 A CN113075244 A CN 113075244A CN 202110364810 A CN202110364810 A CN 202110364810A CN 113075244 A CN113075244 A CN 113075244A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Abstract
The invention discloses an electronic probe sheet sample platform and a using method thereof, and the sample platform comprises a slide rail seat, a vertical plate, a base and a sample platform, wherein the bottom of the sample platform is provided with a connecting part and a sliding part, the connecting part comprises a sleeve and a connecting shaft, the sample platform can rotate around the connecting shaft, the sleeve is provided with two limiting blocks which are symmetrically distributed, a limiting groove matched with the limiting blocks is arranged in the base, the connecting shaft can drive the sleeve to be close to or far away from the limiting groove, and the sliding part comprises a longitudinal plate and two transverse plates; the method comprises the following steps: firstly, turning over the sample table anticlockwise; secondly, mounting an electronic probe sheet; and thirdly, clockwise turning over and resetting the sample table. The electronic probe sheet is arranged at the bottom of the sample table, the test surface of the electronic probe sheet faces downwards by overturning the sample table, so that the test surface of the electronic probe sheet is prevented from being polluted by contact of a tester, the electronic probe sheet can be effectively suitable for placing electronic probe sheets with different sizes, and the application range is wide.
Description
Technical Field
The invention belongs to the technical field of geological slice analysis, and particularly relates to an electronic probe slice sample table.
Background
The electronic probe is an analytical instrument which can be used for analyzing the chemical composition of a mineral micro-area in a slice, so that rocks and minerals to be researched and analyzed need to be made into slices in the geological exploration process, namely the electronic probe slice, the length of the electronic probe slice is generally 47 mm-50 mm, the width is not more than 28mm, and the thickness is about 1 mm. The mounting area of the wafer sample stage in the electronic probe cannot be adjusted, so that due to a slight difference in the size of the electronic probe wafer, a portion larger than the mounting area needs to be cut and reloaded by a diamond pen, thereby possibly causing the wafer to be broken or a useful portion to be damaged; the electronic probe thin slice which is smaller than the installation area needs to be fixed by conductive adhesive, the fixing mode is mostly fixed by one side or two adjacent sides, the fixing effect is poor, the electronic probe thin slice is easy to loosen or fall along with the movement of the sample table in the test process, and therefore the electronic probe signal is drifted or instrument faults are caused.
In addition, in the process of mounting the electronic probe sheet on the sample table at present, because the testing surface of the electronic probe sheet faces upwards, the testing surface is easily contacted and polluted by testing personnel in the mounting process, and thus the testing is inaccurate.
Therefore, at present, an electronic probe sheet sample table with reasonable design and a use method thereof are lacked, the electronic probe sheet is turned over by the sample table so that the test surface of the electronic probe sheet faces downwards when the electronic probe sheet is installed at the bottom of the sample table, the test surface of the electronic probe sheet is prevented from being polluted due to contact of testers, the test surface of the electronic probe sheet faces upwards after the electronic probe sheet is turned over, the top of the electronic probe sheet is flush with the top of the electronic probe sheet, frequent focusing of the sample table in the test process can be reduced, the test efficiency and the test precision are improved, and the electronic probe sheet sample table can be effectively.
Disclosure of Invention
The invention aims to solve the technical problem of providing a sample table for an electronic probe sheet, which is reasonable in design, enables the test surface of the electronic probe sheet to face downwards when the electronic probe sheet is installed at the bottom of the sample table through the overturning of the sample table, prevents the test surface of the electronic probe sheet from being polluted by contact of testers, enables the test surface of the electronic probe sheet to face upwards and the top of the electronic probe sheet to be flush after the overturning, can reduce frequent focusing of the sample table in the test process, improves the test efficiency and the test precision, can effectively adapt to the placement of electronic probe sheets with different sizes, and has a wide application range.
In order to solve the technical problems, the invention adopts the technical scheme that: an electron probe thin slice sample platform which characterized in that: the device comprises a slide rail seat, a vertical plate arranged on the slide rail seat, a base arranged on the vertical plate and a sample platform which is arranged on the base and is parallel to the top of the slide rail seat;
the bottom of the sample table is provided with a connecting part matched with the base and a sliding part capable of sliding along the longitudinal and transverse directions of the sample table, the connecting part comprises a sleeve arranged at the bottom of the sample table and extending into the base and a connecting shaft penetrating through the sleeve, two ends of the connecting shaft extending out of the sleeve penetrate through the base, the top of the base is flush with the top of the sleeve, the sample table can rotate around the connecting shaft, the sleeve is provided with two limiting blocks which are symmetrically arranged, a limiting groove matched with the limiting blocks is arranged in the base, and the connecting shaft can drive the sleeve to be close to or far away from the limiting groove;
the sliding component comprises a longitudinal plate capable of sliding transversely along the sample table and two transverse plates which are arranged in the longitudinal plate in a penetrating mode and capable of sliding longitudinally along the sample table.
The electronic probe sheet sample stage is characterized in that: the base comprises a rectangular base body and two base body lugs symmetrically arranged on the rectangular base body, the two base body lugs and the rectangular base body enclose a containing cavity for mounting the sleeve, the rectangular base body and the two base body lugs enclose a U-shaped structure, the limiting groove is positioned in the rectangular base body, the length of the limiting groove is smaller than the distance between the two base body lugs, and two ends of the connecting shaft extending out of the sleeve penetrate through the base body lugs;
the sample stage is provided with a first opening and a second opening.
The electronic probe sheet sample stage is characterized in that: two the pedestal ear is left pedestal ear and right pedestal ear respectively, be provided with left waist shape through-hole in the left side pedestal ear, be provided with right waist shape through-hole in the right side pedestal ear, the connecting axle passes telescopic both ends and passes left waist shape through-hole and right waist shape through-hole, just the connecting axle can slide along left waist shape through-hole and right waist shape through-hole to make the connecting axle drive the sleeve and be close to or keep away from the spacing groove and remove.
The electronic probe sheet sample stage is characterized in that: the bottom of the sample table is provided with a left connecting lug and a right connecting lug, the sleeve is installed between the left connecting lug and the right connecting lug, the left connecting lug and the right connecting lug are both positioned in the accommodating cavity, the outer side wall of the left connecting lug is attached to the inner side wall of one seat body lug, and the outer side wall of the right connecting lug is attached to the inner side wall of the other seat body lug;
the connecting shaft stretches out telescopic one end and passes in proper order left waist shape through-hole in left engaging lug and the base, the connecting shaft stretches out telescopic other end and passes in proper order right waist shape through-hole in right engaging lug and the base.
The electronic probe sheet sample stage is characterized in that: two the stopper is first stopper and second stopper respectively, and the contained angle between first stopper and the second stopper is 180, and the length of first stopper and second stopper is less than telescopic length, in first stopper or the second stopper homoenergetic embedding spacing groove, the groove depth of spacing groove suits with the width of first stopper and second stopper.
The electronic probe sheet sample stage is characterized in that: the sample table is a rectangular table top, a through hole is formed in the sample table, the through hole is divided into a plurality of mounting areas by the longitudinal plate and the transverse plate, and an edge step-shaped groove is formed in the edge area, close to the through hole, of the bottom surface of the sample table;
the sample platform is provided with on the bottom surface of the sample platform and supplies the first groove of sliding that the longitudinal plate one end stretched into and slided and the second groove of sliding that supplies the longitudinal plate other end to stretch into and slide to and supply the third spout that the one end of two diaphragms stretched into and slided and supply the fourth spout that the other end of two diaphragms stretched into and slided, third spout and fourth spout symmetry are laid, first groove of sliding, third spout, second groove of sliding and fourth spout are followed the through-hole is laid clockwise.
The electronic probe sheet sample stage is characterized in that: the longitudinal plate is provided with two sliding holes for the two transverse plates to move respectively, and the length directions of the sliding holes are distributed along the length direction of the longitudinal plate;
the two opposite sides in the transverse plate are provided with a first accommodating groove and a second accommodating groove for embedding an electronic probe sheet, the first accommodating groove and the second accommodating groove are distributed along the length direction of the transverse plate, the edge of the bottom surface of the longitudinal plate is symmetrically provided with a first middle step-shaped groove and a second middle step-shaped groove, and the top surfaces of the edge step-shaped groove, the first accommodating groove, the first middle step-shaped groove and the second middle step-shaped groove are flush;
the first middle step-shaped groove, the edge step-shaped groove and the first accommodating groove form each first mounting area, and the second middle step-shaped groove, the edge step-shaped groove and the first accommodating groove form each second mounting area; the edge stepped recess, the second receiving groove of one cross plate and the second receiving groove of the other cross plate form respective intermediate mounting areas.
The electronic probe sheet sample stage is characterized in that: the utility model discloses a test platform, including the vertical plate, be provided with a plurality of intermediate pressing pieces on the vertical plate, sample platform bottom surface is close to be provided with a plurality of circumference pressing pieces on the marginal zone of marginal step form recess, intermediate pressing piece with the structure of circumference pressing piece is the same, just intermediate pressing piece with the circumference pressing piece all includes carries out spacing pressing piece to the electron probe thin slice of placing on each installing zone, be provided with the regulation hole on the pressing piece, the regulation hole is waist shape hole, the pressing piece passes through the mounting screw and is on vertical plate and sample platform.
The electronic probe sheet sample stage is characterized in that: the length of the first sliding groove and the length of the second sliding groove are smaller than the transverse side length of the through hole, the length of the third sliding groove and the length of the fourth sliding groove are smaller than the longitudinal side length of the through hole, the end surfaces of the longitudinal plate and the transverse plate are arc-shaped matching parts, and the first sliding groove, the second sliding groove, the third sliding groove and the fourth sliding groove are arc-shaped grooves matched with the arc-shaped matching parts;
four strip-shaped grooves are arranged in the edge area, close to the edge step-shaped groove, of the bottom surface of the sample table, and the four strip-shaped grooves are distributed along four edges of the through hole;
the arc-shaped matching part is provided with a positioning hole, and screws penetrate through the strip-shaped groove and the positioning hole.
Meanwhile, the invention also discloses a use method of the electronic probe sheet sample stage, which is reasonable in design and convenient to realize, and is characterized by comprising the following steps of:
step one, anticlockwise turning over of a sample table:
101, removing a locking nut, operating a connecting shaft to slide along a left waist-shaped through hole and a right waist-shaped through hole until a first limiting block moves out of a limiting groove, and turning a manually-operated sample table around the connecting shaft by 180 degrees anticlockwise;
102, operating the connecting shaft to be close to the left waist-shaped through hole and the right waist-shaped through hole to reversely slide until the second limiting block moves into the limiting groove, and turning the sample table by 180 degrees anticlockwise;
step two, mounting the electronic probe sheet:
step 201, adjusting the longitudinal plate to slide along a first sliding groove and a second sliding groove, and adjusting the transverse plate to slide along a third sliding groove and a fourth sliding groove;
step 202, when the electronic probe sheet is installed in each first installation area formed by the first middle step-shaped groove, the edge step-shaped groove and the first accommodating groove, the electronic probe sheet is limited and fixed through the first accommodating groove and the three pressing sheets;
when the electronic probe sheet is arranged in each second installation area formed by the second middle step-shaped groove, the edge step-shaped groove and the first accommodating groove, the electronic probe sheet is limited and fixed through the first accommodating groove and the three pressing sheets;
when the electronic probe sheet is arranged in the edge step-shaped groove, the second accommodating groove in one transverse plate and the second accommodating groove in the other transverse plate form each middle mounting area, the electronic probe sheet is fixed through the first accommodating groove, the second accommodating groove and the two pressing sheets; the longitudinal plate and the transverse plate are adjusted in place, and screws penetrate through the strip-shaped grooves and the positioning holes so as to position the longitudinal plate and the transverse plate;
step three, clockwise turning and resetting the sample table:
301, operating the connecting shaft to slide along the left waist-shaped through hole and the right waist-shaped through hole until the second limiting block moves out of the limiting groove, and turning the sample table clockwise by 180 degrees around the connecting shaft by manual operation;
and 302, operating the connecting shaft to reversely slide along the left waist-shaped through hole and the right waist-shaped through hole until the first limiting block moves into the limiting groove, and completing clockwise turning 180-degree resetting of the sample table so that the test surface of the electronic probe sheet faces upwards and the tops of the electronic probe sheet are flush.
Compared with the prior art, the invention has the following advantages:
1. simple structure, reasonable in design and simple operation, accommodation is wide.
2. The connecting part comprises a sleeve and a connecting shaft penetrating through the sleeve, and the sleeve is positioned at the bottom of the sample table and the connecting shaft penetrates through the base, so that the sample table and the base are connected; in addition, the sleeve is in clearance fit with the connecting shaft, so that the sleeve rotates around the connecting shaft conveniently, the anticlockwise 180-degree turnover of the sample table is realized, the test surface is convenient to face downwards when the electronic probe sheet is installed on the sample table, the electronic probe sheet is prevented from being polluted due to contact, the clockwise turnover 180-degree reset of the sample table ensures that the test surface of the electronic probe sheet faces upwards and the top of the electronic probe sheet is flushed mutually, and in the later test process, the sample table is not required to be frequently focused, so that the test efficiency and the test precision can be effectively improved.
3. The limiting groove is arranged, so that a limiting block is inserted into the limiting groove after the sample platform is reset, the sample platform is reset in place, and the top surface of the sample platform is parallel to the top surface of the slide rail seat; in addition, after the sample table is turned over by 180 degrees in the anticlockwise direction, another limiting block is inserted into the limiting groove, so that the sample table is ensured to be turned over by 180 degrees in the anticlockwise direction and can be supported, and the electronic probe sheet is convenient to mount.
4. The electronic probe sheet testing device is provided with the longitudinal plate and the transverse plate, and the longitudinal plate and the transverse plate divide the through hole into a plurality of mounting areas, so that a plurality of electronic probe sheets are mounted, and the testing efficiency is improved; in addition, the longitudinal plate and the transverse plate slide along the transverse direction and the longitudinal direction of the sample table, so that the size of a sheet mounting area can be effectively changed, the electronic probe sheet placing device can effectively adapt to the placement of electronic probe sheets with different sizes, and the application range is wider.
5. The use method of the electronic probe sheet sample table is simple and convenient to operate and good in use effect, the sample table is turned anticlockwise firstly, the electronic probe sheet is installed on the bottom surface of the sample table, and the sample table is turned clockwise and reset finally, so that the test surface of the electronic probe sheet faces upwards, the tops of the electronic probe sheet are flush, frequent focusing of the sample table in the test process can be reduced, and test efficiency and test precision are improved.
The technical solution of the present invention is further described in detail by the accompanying drawings and embodiments.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a rear view of fig. 1.
Fig. 3 is a schematic structural diagram of the base of the present invention.
Fig. 4 is a bottom view of the sample stage, the connecting member and the slide member of the present invention.
Fig. 5 is a schematic view of the structure of the connecting member of the present invention.
Fig. 6 is a schematic structural view of the connecting part and the base (when the limiting block extends into the limiting groove) of the invention.
Fig. 7 is a schematic structural view of the connecting part and the base (when the limiting block moves out of the limiting groove) of the invention.
FIG. 8 is a schematic view of the structure of the longitudinal and transverse plates of the present invention.
FIG. 9 is a schematic structural view of a vertical plate according to the present invention.
FIG. 10 is a block flow diagram of a method of using an electron probe sheet sample stage according to the present invention.
Description of reference numerals:
1-a slide rail seat; 2-vertical plate; 3, a base;
3-1-a rectangular base; 3-2-seat body ear; 3-a limiting groove;
3-4-left waist-shaped through hole; 3-5-right waist-shaped through hole; 3-6-a containing cavity;
4, connecting the shaft; 5, a sample stage; 5-1-a first opening;
5-2-a second opening; 5-3-step-shaped groove on edge; 6-connecting parts;
6-1-left engaging lug; 6-2-right connecting lug; 6-3-sleeve;
6-4-a first stopper; 6-5-a second limiting block; 7-longitudinal plate;
7-1 — a first sliding groove; 7-2-second sliding groove;
7-3-a first intermediate step-like recess; 7-4-a second intermediate step-shaped groove;
7-6-arc fitting part; 7-5-sliding hole; 8, a transverse plate;
8-1-third chute; 8-2-fourth chute; 8-3 — a first holding tank;
8-4-a second holding tank; 8-5-top tight hole; 9-installation area;
10, tabletting; 10-1-adjustment holes; 11-screws;
12-a strip groove; 13-positioning holes; and 14, locking the nut.
Detailed Description
As shown in fig. 1 to 9, the electronic probe sheet sample stage of the present invention includes a slide rail seat 1, a vertical plate 2 disposed on the slide rail seat 1, a base 3 disposed on the vertical plate 2, and a sample stage 5 disposed on the base 3 and parallel to the top of the slide rail seat 1;
the bottom of the sample table 5 is provided with a connecting part 6 matched with the base 3 and a sliding part capable of sliding along the longitudinal and transverse directions of the sample table 5, the connecting part 6 comprises a sleeve 6-3 arranged at the bottom of the sample table 5 and extending into the base 3 and a connecting shaft 4 penetrating through the sleeve 6-3, two ends of the connecting shaft 4 extending out of the sleeve 6-3 penetrate through the base 3, the top of the base 3 is flush with the top of the sleeve 6-3, the sample table 5 can rotate around the connecting shaft 4, two limiting blocks symmetrically arranged are arranged on the sleeve 6-3, a limiting groove 3-3 matched with the limiting blocks is arranged in the base 3, and the connecting shaft 4 can drive the sleeve 6-3 to be close to or far away from the limiting groove 3-3;
the sliding component comprises a longitudinal plate 7 capable of sliding transversely along the sample table 5 and two transverse plates 8 which are arranged in the longitudinal plate 7 in a penetrating mode and capable of sliding longitudinally along the sample table 5.
As shown in fig. 3, in this embodiment, the base 3 includes a rectangular base body 3-1 and two base body ears 3-2 symmetrically disposed on the rectangular base body 3-1, the two base body ears 3-2 and the rectangular base body 3-1 enclose a receiving cavity 3-6 for mounting the sleeve 6-3, the rectangular base body 3-1 and the two base body ears 3-2 enclose a U-shaped structure, the limiting groove 3-3 is located in the rectangular base body 3-1, the length of the limiting groove 3-3 is smaller than the distance between the two base body ears 3-2, and both ends of the connecting shaft 4 extending out of the sleeve 6-3 penetrate through the base body ears 3-2;
the sample stage 5 is provided with a first opening 5-1 and a second opening 5-2.
In this embodiment, the two seat body lugs 3-2 are a left seat body lug and a right seat body lug respectively, a left waist-shaped through hole 3-4 is formed in the left seat body lug, a right waist-shaped through hole 3-5 is formed in the right seat body lug, the connecting shaft 4 penetrates through the left waist-shaped through hole 3-4 and the right waist-shaped through hole 3-5 at two ends of the sleeve 6-3, and the connecting shaft 4 can slide along the left waist-shaped through hole 3-4 and the right waist-shaped through hole 3-5, so that the connecting shaft 4 drives the sleeve 6-3 to move close to or far away from the limiting groove 3-3.
As shown in fig. 4, in this embodiment, the bottom of the sample stage 5 is provided with a left engaging lug 6-1 and a right engaging lug 6-2, the sleeve 6-3 is installed between the left engaging lug 6-1 and the right engaging lug 6-2, the left engaging lug 6-1 and the right engaging lug 6-2 are both located in the accommodating cavity 3-6, an outer sidewall of the left engaging lug 6-1 is attached to an inner sidewall of one seat body lug 3-2, and an outer sidewall of the right engaging lug 6-2 is attached to an inner sidewall of the other seat body lug 3-2;
one end of the connecting shaft 4 extending out of the sleeve 6-3 sequentially penetrates through the left connecting lug 6-1 and the left waist-shaped through hole 3-4 in the base 3, and the other end of the connecting shaft 4 extending out of the sleeve 6-3 sequentially penetrates through the right connecting lug 6-2 and the right waist-shaped through hole 3-5 in the base 3.
As shown in fig. 5, 6 and 7, in this embodiment, the two limit blocks are a first limit block 6-4 and a second limit block 6-5, an included angle between the first limit block 6-4 and the second limit block 6-5 is 180 °, lengths of the first limit block 6-4 and the second limit block 6-5 are smaller than that of the sleeve 6-3, the first limit block 6-4 or the second limit block 6-5 can be embedded into the limit groove 3-3, and a groove depth of the limit groove 3-3 is adapted to widths of the first limit block 6-4 and the second limit block 6-5.
In the embodiment, the sample table 5 is a rectangular table top, a through hole is formed in the sample table 5, the through hole is divided into a plurality of mounting areas 9 by the longitudinal plate 7 and the transverse plate 8, and an edge step-shaped groove 5-3 is formed in the edge area, close to the through hole, of the bottom surface of the sample table 5;
the bottom surface of the sample table 5 is provided with a first sliding groove 7-1 for one end of the longitudinal plate 7 to extend into and slide, a second sliding groove 7-2 for the other end of the longitudinal plate 7 to extend into and slide, a third sliding groove 8-1 for one ends of the two transverse plates 8 to extend into and slide, and a fourth sliding groove 8-2 for the other ends of the two transverse plates 8 to extend into and slide, wherein the third sliding groove 8-1 and the fourth sliding groove 8-2 are symmetrically arranged, and the first sliding groove 7-1, the third sliding groove 8-1, the second sliding groove 7-2 and the fourth sliding groove 8-2 are arranged clockwise along the through hole.
As shown in fig. 4, 8 and 9, in the present embodiment, two sliding holes 7-5 are provided in the vertical plate 7 for moving the two horizontal plates 8, respectively, and the length direction of the sliding holes 7-5 is arranged along the length direction of the vertical plate 7;
the two opposite sides of the transverse plate 8 are provided with a first accommodating groove 8-3 and a second accommodating groove 8-4 for embedding an electronic probe sheet, the first accommodating groove 8-3 and the second accommodating groove 8-4 are distributed along the length direction of the transverse plate 8, the bottom surface edge of the longitudinal plate 7 is symmetrically provided with a first middle step-shaped groove 7-3 and a second middle step-shaped groove 7-4, and the top surfaces of the edge step-shaped groove 5-3, the first accommodating groove 8-3, the first middle step-shaped groove 7-3 and the second middle step-shaped groove 7-4 are flush with each other;
the first middle step-shaped groove 7-3, the edge step-shaped groove 5-3 and the first accommodating groove 8-3 form each first mounting area, and the second middle step-shaped groove 7-4, the edge step-shaped groove 5-3 and the first accommodating groove 8-3 form each second mounting area; the edge step-like recesses 5-3, the second receiving grooves 8-4 of one cross plate 8 and the second receiving grooves 8-4 of the other cross plate 8 form respective intermediate mounting areas.
As shown in fig. 4, in this embodiment, a plurality of intermediate pressing pieces are disposed on the vertical plate 7, a plurality of circumferential pressing pieces are disposed on an edge region of the bottom surface of the sample stage 5 near the edge step-shaped groove 5-3, the intermediate pressing pieces and the circumferential pressing pieces have the same structure, each of the intermediate pressing pieces and the circumferential pressing pieces includes a pressing piece 10 for limiting an electronic probe sheet placed on each mounting area 9, an adjusting hole 10-1 is disposed on each pressing piece 10, each adjusting hole 10-1 is a kidney-shaped hole, and each pressing piece 10 is mounted on the vertical plate 7 and the sample stage 5 through a screw 11.
As shown in fig. 4, in this embodiment, the lengths of the first sliding groove 7-1 and the second sliding groove 7-2 are smaller than the lateral side length of the through hole, the lengths of the third sliding groove 8-1 and the fourth sliding groove 8-2 are smaller than the longitudinal side length of the through hole, the end surfaces of the longitudinal plate 7 and the transverse plate 8 are both arc-shaped matching portions 7-6, and the first sliding groove 7-1, the second sliding groove 7-2, the third sliding groove 8-1 and the fourth sliding groove 8-2 are all arc-shaped grooves matched with the arc-shaped matching portions 7-6;
four strip-shaped grooves 12 are arranged in the edge area, close to the edge step-shaped groove 5-3, of the bottom surface of the sample table 5, and the four strip-shaped grooves 12 are distributed along four edges of the through hole;
the arc-shaped matching parts 7-6 are provided with positioning holes 13, and screws penetrate through the strip-shaped grooves 12 and the positioning holes 13.
In this embodiment, the first opening 5-1 and the second opening 5-2 are disposed on the sample stage 5 to give way to the seat body ear 3-2, so that the seat body ear 3-2 can be effectively accommodated during the process of the sample stage 5 being turned 180 ° counterclockwise.
In this embodiment, the length of the limiting groove 3-3 is the same as the length of the first limiting block 6-4 and the second limiting block 6-5, so as to accommodate the first limiting block 6-4 and the second limiting block 6-5.
In the embodiment, the included angle between the first limiting block 6-4 and the second limiting block 6-5 is set to be 180 degrees, and when the sample platform 5 is turned clockwise by 180 degrees and reset, the first limiting block 6-4 is inserted into the limiting groove 3-3, so that the sample platform 5 is reset in place, and the top surface of the sample platform 5 is parallel to the top surface of the slide rail seat 1; in addition, after the sample table 5 is turned by 180 degrees anticlockwise, the second limiting blocks 6-5 are inserted into the limiting grooves 3-3, so that the sample table 5 is ensured to be turned by 180 degrees anticlockwise to be in place, the sample table 5 can be supported, and the electronic probe sheet is convenient to mount.
In this embodiment, the left waist-shaped through hole 3-4 and the right waist-shaped through hole 3-5 are provided, so that the connecting shaft 4 slides along the left waist-shaped through hole 3-4 and the right waist-shaped through hole 3-5, so that the connecting shaft 4 drives the sleeve 6-3 to move close to or away from the limiting groove 3-3, and in the process that the sleeve 6-3 moves close to the limiting groove 3-3, until the first limiting block 6-4 or the second limiting block 6-5 is inserted into the limiting groove 3-3 and the outer side wall of the sleeve 6-3 is attached to the side surface of the rectangular seat body 3-1, so as to realize limiting.
In this embodiment, a plurality of tightening holes 8-5 are formed in the bottom of the transverse plate 8, and the tightening holes 8-5 and the first receiving grooves 8-3 are communicated with the second receiving grooves 8-4, so as to adapt to the small thickness difference of the electronic probe sheet, and bolts are installed in the tightening holes 8-5 to tighten the bottom of the electronic probe sheet, thereby ensuring that the test surface of the electronic probe sheet faces upward and the top of the electronic probe sheet is flush with each other.
In this embodiment, in practical use, the arc-shaped matching portion 7-6 is provided, on one hand, for facilitating sliding along the first sliding groove 7-1, the second sliding groove 7-2, the third sliding groove 8-1 and the fourth sliding groove 8-2, and on the other hand, for reducing the thickness of the end portions of the vertical plate 7 and the horizontal plate 8, so that the tops of the sample table 5, the vertical plate 7 and the horizontal plate 8 are flush with each other, and the flatness of the whole top surface is improved.
In this embodiment, it should be noted that, the top surfaces of the edge stepped groove 5-3, the first receiving groove 8-3, the first middle stepped groove 7-3, and the second middle stepped groove 7-4 are turned clockwise by 180 degrees relative to the sample stage 5 to be reset, so as to ensure that the test surface of the electronic probe sheet faces upward and the top is flush, that is, the test surface of the electronic probe sheet is parallel to the slide rail seat 1.
In this embodiment, it should be noted that the first sliding groove 7-1, the second sliding groove 7-2, the third sliding groove 8-1, and the fourth sliding groove 8-2 are denoted as sliding grooves, the length of the strip groove 12 is smaller than the length of the sliding grooves, the width of the strip groove 12 is smaller than the depth of the sliding grooves, and the center of the positioning hole 13 is arranged along the center line of the width of the strip groove 12.
In this embodiment, it should be noted that the first middle step-shaped groove 7-3 and the second middle step-shaped groove 7-4 both include a middle end step-shaped groove disposed between one side of the sliding hole 7-5 and the end of the vertical plate 7 and a middle step-shaped groove disposed between the two sliding holes 7-5, so as to implement partial installation of the electronic probe sheet.
In this embodiment, it should be noted that the middle pressing sheet includes two middle end pressing sheets respectively arranged between one side of the sliding hole 7-5 and the end of the vertical plate 7 and a middle pressing sheet arranged between the two sliding holes 7-5.
In this embodiment, it should be noted that, in practical use, the top of the rectangular base 3-1 is provided with a recess to accommodate the bottom of the electronic probe sheet.
In this embodiment, the accommodating chamber 3-6 is provided not only for accommodating the sleeve 6-3 but also for facilitating the turning of the sample stage 5.
In this embodiment, the end of the connecting shaft 4 extending out of the base 3 is provided with a lock nut 14.
As shown in fig. 10, a method for using an electronic probe sheet sample stage includes the following steps:
step one, anticlockwise turning over of a sample table:
101, removing a locking nut 14, operating a connecting shaft 4 to slide along a left waist-shaped through hole 3-4 and a right waist-shaped through hole 3-5 until a first limiting block 6-4 moves out of a limiting groove 3-3, and manually operating a sample table 5 to turn 180 degrees around the connecting shaft 4 anticlockwise;
102, operating the connecting shaft 4 to be close to the left waist-shaped through hole 3-4 and the right waist-shaped through hole 3-5 to reversely slide until the second limiting block 6-5 moves into the limiting groove 3-3, and turning the sample table 5 anticlockwise by 180 degrees;
step two, mounting the electronic probe sheet:
step 201, adjusting the longitudinal plate 7 to slide along a first sliding groove 7-1 and a second sliding groove 7-2, and adjusting the transverse plate 8 to slide along a third sliding groove 8-1 and a fourth sliding groove 8-2;
step 202, when the electronic probe sheet is installed in each first installation area formed by the first middle step-shaped groove 7-3, the edge step-shaped groove 5-3 and the first accommodating groove 8-3, the electronic probe sheet is limited and fixed through the first accommodating groove 8-3 and the three pressing sheets 10;
when the electronic probe sheet is arranged in each second installation area formed by the second middle step-shaped groove 7-4, the edge step-shaped groove 5-3 and the first accommodating groove 8-3, the electronic probe sheet is limited and fixed through the first accommodating groove 8-3 and the three pressing sheets 10;
when the electronic probe sheet is arranged in the edge step-shaped groove 5-3, the second accommodating groove 8-4 in one transverse plate 8 and the second accommodating groove 8-4 in the other transverse plate 8 to form each middle mounting area, the electronic probe sheet is fixed through the first accommodating groove 8-3, the second accommodating groove 8-4 and the two pressing sheets 10; wherein, the longitudinal plate 7 and the transverse plate 8 are adjusted in place, and screws are arranged in the strip-shaped grooves 12 and the positioning holes 13 in a penetrating way so as to position the longitudinal plate 7 and the transverse plate 8;
step three, clockwise turning and resetting the sample table:
301, operating the connecting shaft 4 to slide along the left waist-shaped through hole 3-4 and the right waist-shaped through hole 3-5 until the second limiting block 6-5 is moved out of the limiting groove 3-3, and manually operating the sample table 5 to turn 180 degrees clockwise around the connecting shaft 4;
and 302, operating the connecting shaft 4 to reversely slide along the left waist-shaped through hole 3-4 and the right waist-shaped through hole 3-5 until the first limiting block 6-4 moves into the limiting groove 3-3, and completing the clockwise turning 180-degree resetting of the sample table 5 so that the test surface of the electronic probe sheet faces upwards and the tops of the electronic probe sheet are flush with each other.
In this embodiment, screws are inserted into the strip-shaped groove 12 and the positioning holes 13 until the screws contact the side wall of the sliding groove, so that the longitudinal plate 7 and the transverse plate 8 are fixed and positioned.
In conclusion, the electronic probe sheet testing device is simple in structure and reasonable in design, the testing surface of the electronic probe sheet is downward when the electronic probe sheet is installed at the bottom of the sample table through overturning the sample table, the testing surface of the electronic probe sheet is prevented from being polluted by contact of testing personnel, the testing surface of the electronic probe sheet is upward after overturning, the tops of the electronic probe sheet are flush, frequent focusing of the sample table in the testing process can be reduced, testing efficiency and testing precision are improved, the electronic probe sheet testing device can effectively adapt to placement of electronic probe sheets with different sizes, and the electronic probe sheet testing device is stable and firm to install and wide in application range.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and all simple modifications, changes and equivalent structural changes made to the above embodiment according to the technical spirit of the present invention still fall within the protection scope of the technical solution of the present invention.
Claims (10)
1. An electron probe thin slice sample platform which characterized in that: comprises a slide rail seat (1), a vertical plate (2) arranged on the slide rail seat (1), a base (3) arranged on the vertical plate (2) and a sample table (5) which is arranged on the base (3) and is parallel to the top of the slide rail seat (1);
the bottom of the sample table (5) is provided with a connecting part (6) matched with the base (3) and a sliding part which can slide along the longitudinal and transverse directions of the sample table (5), the connecting part (6) comprises a sleeve (6-3) which is arranged at the bottom of the sample table (5) and extends into the base (3) and a connecting shaft (4) which is arranged in the sleeve (6-3) in a penetrating way, the two ends of the connecting shaft (4) extending out of the sleeve (6-3) penetrate through the base (3), the top of the base (3) is flush with the top of the sleeve (6-3), the sample table (5) can rotate around the connecting shaft (4), two limiting blocks which are symmetrically arranged are arranged on the sleeve (6-3), a limiting groove (3-3) which is matched with the limiting blocks is arranged in the base (3), the connecting shaft (4) can drive the sleeve (6-3) to be close to or far away from the limiting groove (3-3);
the sliding component comprises a longitudinal plate (7) capable of sliding transversely along the sample table (5) and two transverse plates (8) which are arranged in the longitudinal plate (7) in a penetrating mode and capable of sliding longitudinally along the sample table (5).
2. An electronic probe sheet sample stage as claimed in claim 1 wherein: the base (3) comprises a rectangular base body (3-1) and two base body lugs (3-2) symmetrically arranged on the rectangular base body (3-1), the two base body lugs (3-2) and the rectangular base body (3-1) enclose a containing cavity (3-6) for installing the sleeve (6-3), the rectangular base body (3-1) and the two base body lugs (3-2) enclose a U-shaped structure, the limiting groove (3-3) is positioned in the rectangular base body (3-1), the length of the limiting groove (3-3) is smaller than the distance between the two base body lugs (3-2), and two ends of the connecting shaft (4) extending out of the sleeve (6-3) penetrate through the base body lugs (3-2);
the sample table (5) is provided with a first opening part (5-1) and a second opening part (5-2).
3. An electronic probe sheet sample stage as claimed in claim 2, wherein: the two seat body lugs (3-2) are respectively a left seat body lug and a right seat body lug, a left waist-shaped through hole (3-4) is formed in the left seat body lug, a right waist-shaped through hole (3-5) is formed in the right seat body lug, the connecting shaft (4) penetrates through two ends of the sleeve (6-3) and respectively penetrates through the left waist-shaped through hole (3-4) and the right waist-shaped through hole (3-5), and the connecting shaft (4) can slide along the left waist-shaped through hole (3-4) and the right waist-shaped through hole (3-5), so that the connecting shaft (4) drives the sleeve (6-3) to be close to or far away from the limiting groove (3-3) to move.
4. An electronic probe sheet sample stage as claimed in claim 2, wherein: the bottom of the sample table (5) is provided with a left connecting lug (6-1) and a right connecting lug (6-2), the sleeve (6-3) is installed between the left connecting lug (6-1) and the right connecting lug (6-2), the left connecting lug (6-1) and the right connecting lug (6-2) are both positioned in the accommodating cavity (3-6), the outer side wall of the left connecting lug (6-1) is attached to the inner side wall of one seat body lug (3-2), and the outer side wall of the right connecting lug (6-2) is attached to the inner side wall of the other seat body lug (3-2);
one end of the connecting shaft (4) extending out of the sleeve (6-3) sequentially penetrates through the left waist-shaped through hole (3-4) in the left connecting lug (6-1) and the base (3), and the other end of the connecting shaft (4) extending out of the sleeve (6-3) sequentially penetrates through the right waist-shaped through hole (3-5) in the right connecting lug (6-2) and the base (3).
5. An electronic probe sheet sample stage as claimed in claim 1 wherein: the two limiting blocks are respectively a first limiting block (6-4) and a second limiting block (6-5), an included angle between the first limiting block (6-4) and the second limiting block (6-5) is 180 degrees, the lengths of the first limiting block (6-4) and the second limiting block (6-5) are smaller than that of the sleeve (6-3), the first limiting block (6-4) or the second limiting block (6-5) can be embedded into the limiting groove (3-3), and the groove depth of the limiting groove (3-3) is matched with the widths of the first limiting block (6-4) and the second limiting block (6-5).
6. An electronic probe sheet sample stage as claimed in claim 1 wherein: the sample table (5) is a rectangular table surface, a through hole is formed in the sample table (5), the through hole is divided into a plurality of mounting areas (9) by the longitudinal plate (7) and the transverse plate (8), and an edge step-shaped groove (5-3) is formed in the edge area, close to the through hole, of the bottom surface of the sample table (5);
the bottom surface of the sample table (5) is provided with a first sliding groove (7-1) for one end of the longitudinal plate (7) to stretch into and slide, a second sliding groove (7-2) for the other end of the longitudinal plate (7) to stretch into and slide, a third sliding groove (8-1) for one ends of the two transverse plates (8) to stretch into and slide, and a fourth sliding groove (8-2) for the other ends of the two transverse plates (8) to stretch into and slide, wherein the third sliding groove (8-1) and the fourth sliding groove (8-2) are symmetrically arranged, and the first sliding groove (7-1), the third sliding groove (8-1), the second sliding groove (7-2) and the fourth sliding groove (8-2) are arranged clockwise along the through hole.
7. An electronic probe sheet sample stage according to claim 6, wherein: two sliding holes (7-5) for the two transverse plates (8) to move are formed in the longitudinal plate (7), and the length directions of the sliding holes (7-5) are distributed along the length direction of the longitudinal plate (7);
the two opposite sides in the transverse plate (8) are provided with a first accommodating groove (8-3) and a second accommodating groove (8-4) for embedding an electronic probe sheet, the first accommodating groove (8-3) and the second accommodating groove (8-4) are distributed along the length direction of the transverse plate (8), the bottom surface edge of the longitudinal plate (7) is symmetrically provided with a first middle step-shaped groove (7-3) and a second middle step-shaped groove (7-4), and the top surfaces of the edge step-shaped groove (5-3), the first accommodating groove (8-3), the first middle step-shaped groove (7-3) and the second middle step-shaped groove (7-4) are flush with each other;
the first middle step-shaped groove (7-3), the edge step-shaped groove (5-3) and the first accommodating groove (8-3) form each first mounting area, and the second middle step-shaped groove (7-4), the edge step-shaped groove (5-3) and the first accommodating groove (8-3) form each second mounting area; the edge step-shaped grooves (5-3), the second receiving grooves (8-4) of one transverse plate (8) and the second receiving grooves (8-4) of the other transverse plate (8) form respective intermediate mounting areas.
8. An electronic probe sheet sample stage as claimed in claim 1 wherein: the device is characterized in that a plurality of middle pressing sheets are arranged on the longitudinal plate (7), a plurality of circumferential pressing sheets are arranged on the edge area, close to the edge step-shaped groove (5-3), of the bottom surface of the sample table (5), the middle pressing sheets are identical to the circumferential pressing sheets in structure, the middle pressing sheets and the circumferential pressing sheets respectively comprise pressing sheets (10) for fixing electronic probe sheets placed on each installation area (9), adjusting holes (10-1) are formed in the pressing sheets (10), the adjusting holes (10-1) are waist-shaped holes, and the pressing sheets (10) are installed on the longitudinal plate (7) and the sample table (5) through screws (11).
9. An electronic probe sheet sample stage according to claim 6, wherein: the length of the first sliding groove (7-1) and the length of the second sliding groove (7-2) are smaller than the transverse side length of the through hole, the length of the third sliding groove (8-1) and the length of the fourth sliding groove (8-2) are smaller than the longitudinal side length of the through hole, the end faces of the longitudinal plate (7) and the transverse plate (8) are arc-shaped matching parts (7-6), and the first sliding groove (7-1), the second sliding groove (7-2), the third sliding groove (8-1) and the fourth sliding groove (8-2) are arc-shaped grooves matched with the arc-shaped matching parts (7-6);
four strip-shaped grooves (12) are arranged in the edge area, close to the edge step-shaped groove (5-3), of the bottom surface of the sample table (5), and the four strip-shaped grooves (12) are distributed along four edges of the through hole;
the arc-shaped matching parts (7-6) are provided with positioning holes (13), and screws penetrate through the strip-shaped grooves (12) and the positioning holes (13).
10. The use method of the electronic probe sheet sample stage is characterized by comprising the following steps:
step one, anticlockwise turning over of a sample table:
101, removing a locking nut (14), operating a connecting shaft (4) to slide along a left waist-shaped through hole (3-4) and a right waist-shaped through hole (3-5) until a first limiting block (6-4) moves out of a limiting groove (3-3), and turning a manually-operated sample table (5) for 180 degrees anticlockwise around the connecting shaft (4);
102, operating the connecting shaft (4) to be close to the left waist-shaped through hole (3-4) and the right waist-shaped through hole (3-5) to reversely slide until the second limiting block (6-5) moves into the limiting groove (3-3), and turning the sample table (5) by 180 degrees anticlockwise;
step two, mounting the electronic probe sheet:
step 201, adjusting a longitudinal plate (7) to slide along a first sliding groove (7-1) and a second sliding groove (7-2), and adjusting a transverse plate (8) to slide along a third sliding groove (8-1) and a fourth sliding groove (8-2);
step 202, when the electronic probe sheet is arranged in each first installation area formed by the first middle step-shaped groove (7-3), the edge step-shaped groove (5-3) and the first accommodating groove (8-3), limiting and fixing are carried out through the first accommodating groove (8-3) and the three pressing sheets (10);
when the electronic probe sheet is arranged in each second installation area formed by the second middle step-shaped groove (7-4), the edge step-shaped groove (5-3) and the first accommodating groove (8-3), the electronic probe sheet is limited and fixed through the first accommodating groove (8-3) and the three pressing sheets (10);
when the electronic probe sheet is arranged in the edge step-shaped groove (5-3), the second accommodating groove (8-4) in one transverse plate (8) and the second accommodating groove (8-4) in the other transverse plate (8) to form each middle mounting area, the electronic probe sheet is fixed through the first accommodating groove (8-3), the second accommodating groove (8-4) and the two pressing sheets (10); wherein the longitudinal plate (7) and the transverse plate (8) are adjusted in place, and screws penetrate through the strip-shaped grooves (12) and the positioning holes (13) so as to position the longitudinal plate (7) and the transverse plate (8);
step three, clockwise turning and resetting the sample table:
301, operating the connecting shaft (4) to slide along the left waist-shaped through hole (3-4) and the right waist-shaped through hole (3-5) until the second limiting block (6-5) moves out of the limiting groove (3-3), and turning the manually-operated sample table (5) clockwise by 180 degrees around the connecting shaft (4);
and 302, operating the connecting shaft (4) to reversely slide along the left waist-shaped through hole (3-4) and the right waist-shaped through hole (3-5) until the first limiting block (6-4) moves into the limiting groove (3-3), and completing clockwise turning 180-degree resetting of the sample table (5) so as to enable the test surface of the electronic probe sheet to be upward and the top to be flush.
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