CN113075244B - Electronic probe sheet sample stage and application method thereof - Google Patents

Abstract

The invention discloses an electronic probe sheet sample stage and a method for using the same. It includes a slide rail seat, a vertical plate, a base and a sample stage. The bottom of the sample stage is provided with a connecting part and a sliding part, and the connecting part includes a sleeve and a sliding part. The connecting shaft, the sample stage can rotate around the connecting shaft, the sleeve is provided with two symmetrically arranged limit blocks, the base is provided with a limit groove that cooperates with the limit block, and the connecting shaft can drive the sleeve close to or away from the limit The groove and the sliding part include a vertical plate and two horizontal plates; the method includes the following steps: 1. counterclockwise turning of the sample stage; 2. installation of electronic probe sheets; 3. clockwise turning and reset of the sample stage. In the present invention, the test surface of the electronic probe sheet is facing downward when the electronic probe sheet is installed on the bottom of the sample table by turning over the sample stage, so as to prevent the test surface of the electronic probe sheet from being polluted by the contact of the tester, and can effectively adapt to different sizes of electronic devices. The placement of the probe sheet is suitable for a wide range.

Description

An electron probe sheet sample stage and using method thereof

technical field

The invention belongs to the technical field of geological thin slice analysis, in particular to an electronic probe thin slice sample stage.

Background technique

Electron probe is an analytical instrument that can be used to analyze the chemical composition of mineral micro-regions in thin slices. Therefore, in the process of geological exploration, it is necessary to make thin slices of rocks and minerals to be studied and analyzed, that is, electronic probe thin slices, electronic probe thin slices The length is generally 47mm ~ 50mm, the width is not more than 28mm, and the thickness is about 1mm. The installation area of the sheet sample stage in the electronic probe cannot be adjusted, so because of the small difference in the size of the sheet of the electronic probe, the part larger than the installation area needs to be cut and reloaded with a diamond pen, which may cause the sheet to break or the useful part to be destroyed; Electron probe sheets that are smaller than the installation area need to be fixed with conductive glue. This method of fixing is mostly on one side or on both sides adjacent to each other, and the fixing effect is poor. The electronic probe sheet is easy to move with the sample stage during the test. Loose or dropped, resulting in electronic probe signal drift or cause instrument failure.

In addition, currently, when the electronic probe sheet is installed on the sample stage, because the test surface of the electronic probe sheet faces upward, the test surface is easily touched by the tester and contaminated during the installation process, resulting in inaccurate testing.

Therefore, there is a lack of a well-designed electronic probe sheet sample stage and its method of use. By flipping the sample stage, the electronic probe sheet can be installed on the bottom of the sample stage so that the test surface is facing down, avoiding the electronic probe sheet. The test surface of the tester is contaminated by the contact of the tester, and the test surface of the electronic probe sheet is facing up and the top is flush after being turned over, which can reduce the frequent focusing of the sample stage during the test process, improve the test efficiency and test accuracy, and can Efficiently adapt to the placement of electron probe sheets of different sizes.

Contents of the invention

The technical problem to be solved by the present invention is to provide an electronic probe sheet sample stage for the above-mentioned deficiencies in the prior art. The test surface is facing down to prevent the test surface of the electronic probe sheet from being contaminated by the tester, while the test surface of the electronic probe sheet is facing up and the top is flush after being turned over, which can reduce the frequent focusing of the sample stage during the test , improve the test efficiency and test accuracy, and can effectively adapt to the placement of electronic probe sheets of different sizes, with a wide range of applications.

In order to solve the above-mentioned technical problems, the technical solution adopted by the present invention is: an electronic probe sheet sample stage, which is characterized in that it includes a slide rail seat, a vertical plate arranged on the slide rail seat, and a vertical plate arranged on the vertical plate. A base and a sample stage arranged on the base and parallel to the top of the slide rail seat;

The bottom of the sample stage is provided with a connecting part that fits with the base and a sliding part that can slide along the vertical and horizontal directions of the sample stage. The connecting shaft in the sleeve, the two ends of the connecting shaft protruding from the sleeve pass through the base, the top of the base is flush with the top of the sleeve, the sample stage can rotate around the connecting shaft, the sleeve The cylinder is provided with two symmetrically arranged limiting blocks, the base is provided with a limiting groove matching the limiting blocks, and the connecting shaft can drive the sleeve close to or away from the limiting groove;

The sliding part includes a longitudinal plate that can slide laterally along the sample stage and two horizontal plates that pass through the longitudinal plate and can slide longitudinally along the sample stage.

The above-mentioned electronic probe sheet sample table is characterized in that: the base includes a rectangular seat body and two seat body ears symmetrically arranged on the rectangular seat body, and the two seat body ears and the rectangular seat body form a sleeve The accommodating chamber installed by the cylinder, the rectangular seat and the two seat ears form a U-shaped structure, the limiting groove is located in the rectangular seat, and the length of the limiting groove is less than the distance between the two seat ears , both ends of the connecting shaft protruding from the sleeve pass through the ear of the seat body;

The sample stage is provided with a first opening and a second opening.

The above-mentioned a kind of electronic probe sheet sample stage is characterized in that: the two seat ears are respectively left seat ear and right seat ear, and a left waist-shaped through hole is arranged in the left seat ear, so A right waist-shaped through hole is arranged in the ear of the right seat body, and the connecting shaft passes through the two ends of the sleeve through the left waist-shaped through hole and the right waist-shaped through hole, and the connecting shaft can pass through the left waist-shaped through hole. The hole and the right waist-shaped through hole slide, so that the connecting shaft drives the sleeve to move close to or away from the limit groove.

The above-mentioned electronic probe sheet sample stage is characterized in that: the bottom of the sample stage is provided with a left connecting ear and a right connecting ear, the sleeve is installed between the left connecting ear and the right connecting ear, and the left connecting ear Both the connecting ear and the right connecting ear are located in the accommodating cavity, the outer wall of the left connecting ear fits with the inner wall of one seat ear, and the outer wall of the right connecting ear fits with the inner wall of the other seat ear. fit;

One end of the connecting shaft extending out of the sleeve passes through the left waist-shaped through hole in the left connecting ear and the base in turn, and the other end of the connecting shaft extending out of the sleeve passes through the right connecting ear and in the base in turn right waist via.

The above-mentioned electronic probe sheet sample stage is characterized in that: the two limit blocks are respectively the first limit block and the second limit block, and the gap between the first limit block and the second limit block The included angle is 180°, the length of the first limit block and the second limit block is less than the length of the sleeve, the first limit block or the second limit block can be embedded in the limit groove, the limit The groove depth of the groove and the width of the first limiting block and the second limiting block are adapted.

The above-mentioned a kind of electronic probe sheet sample stage is characterized in that: the sample stage is a rectangular table top, the sample stage is provided with a through hole, and the vertical plate and the horizontal plate divide the through hole into a plurality of installation areas, The edge area of the bottom surface of the sample table close to the through hole is provided with an edge stepped groove;

The bottom surface of the sample stage is provided with a first sliding groove for one end of the longitudinal plate to extend and slide, a second sliding groove for the other end of the vertical plate to extend and slide, and a second sliding groove for extending one end of the two horizontal plates. The third chute that enters and slides and the fourth chute that allows the other ends of the two horizontal plates to enter and slide, the third chute and the fourth chute are arranged symmetrically, and the first chute , the third chute, the second chute and the fourth chute are arranged clockwise along the through hole.

The above-mentioned electronic probe sheet sample stage is characterized in that: the longitudinal plate is provided with two sliding holes for the movement of the two horizontal plates respectively, and the length direction of the sliding holes is along the length direction of the longitudinal plate layout;

The opposite sides of the horizontal plate are provided with a first accommodating groove and a second accommodating groove for inserting the electronic probe sheet, the first accommodating groove and the second accommodating groove are arranged along the length direction of the horizontal plate, and the longitudinal The edge of the bottom surface of the plate is symmetrically provided with a first intermediate stepped groove and a second intermediate stepped groove, and the edge stepped groove, the first receiving groove, the first intermediate stepped groove and the second intermediate stepped groove The top surfaces of the slots are flush;

The first intermediate stepped groove, the edge stepped groove, and the first accommodation groove form each first installation area, and the second intermediate stepped groove, the edge stepped groove, and the first accommodation groove form each first installation area. Two installation areas; the edge stepped groove, the second accommodation groove of one horizontal plate and the second accommodation groove of the other horizontal plate form each intermediate installation area.

The above-mentioned electronic probe sheet sample stage is characterized in that: the longitudinal plate is provided with a plurality of intermediate pressing pieces, and the bottom surface of the sample stage is provided with a plurality of peripheral plates near the edge area of the edge stepped groove. The structure of the intermediate pressing sheet and the circumferential pressing sheet is the same, and both the intermediate pressing sheet and the circumferential pressing sheet include a positioning mechanism for limiting the electronic probe sheets placed on each installation area. The pressing piece is provided with an adjustment hole, and the adjustment hole is a waist-shaped hole, and the pressing piece is installed on the vertical plate and the sample stage through screws.

The above-mentioned electronic probe sheet sample stage is characterized in that: the length of the first sliding groove and the second sliding groove is less than the length of the lateral side of the through hole, and the third sliding groove and the fourth sliding groove The length of the slot is less than the length of the longitudinal side of the through hole, the end faces of the vertical plate and the horizontal plate are all arc-shaped matching parts, and the first sliding groove, the second sliding groove, the third sliding groove and the fourth sliding groove The chute is an arc groove matched with the arc matching part;

The bottom surface of the sample table is provided with four strip-shaped grooves near the edge region of the edge stepped groove, and the four strip-shaped grooves are arranged along the four sides of the through hole;

Positioning holes are arranged on the arc-shaped matching portion, and screws are pierced in the strip-shaped grooves and the positioning holes.

At the same time, the present invention also discloses a method for using an electronic probe sheet sample stage with reasonable design and convenient implementation, which is characterized in that the method includes the following steps:

Step 1. Turn the sample table counterclockwise:

Step 101, remove the lock nut, operate the connecting shaft to slide along the left waist-shaped through hole and the right waist-shaped through hole until the first limit block moves out of the limit groove, and manually operate the sample stage to turn 180 degrees counterclockwise around the connecting shaft;

Step 102: Operate the connecting shaft to slide in the opposite direction close to the left waist-shaped through hole and the right waist-shaped through hole until the second limit block moves into the limit groove, and the sample stage is turned 180 degrees counterclockwise;

Step 2. Installation of the electronic probe sheet:

Step 201, adjusting the vertical plate to slide along the first slide groove and the second slide groove, and adjusting the horizontal plate to slide along the third slide groove and the fourth slide groove;

Step 202, when the electronic probe sheet is installed in the first installation area formed by the first intermediate stepped groove, the edge stepped groove, and the first accommodation groove, the position is limited by the first accommodation groove and three pressing pieces fixed;

When the electronic probe sheet is installed in each of the second installation areas formed by the second intermediate stepped groove, the edge stepped groove, and the first accommodation groove, the first accommodation groove and the three pressing pieces are used for limiting and fixing;

When the electronic probe sheet is installed in the edge stepped groove, the second receiving groove in one horizontal plate and the second receiving groove in the other horizontal plate to form each intermediate installation area, through the first receiving groove and the second receiving groove The slot and two pressing pieces are fixed; among them, the vertical plate and the horizontal plate are adjusted in place, and the screws are passed through the strip groove and the positioning hole to position the vertical plate and the horizontal plate;

Step 3. Turn the sample table clockwise to reset:

Step 301, operate the connecting shaft to slide along the left waist-shaped through hole and the right waist-shaped through hole until the second limit block moves out of the limit groove, and manually operate the sample stage to turn clockwise 180 degrees around the connecting shaft;

Step 302: Operate the connecting shaft to slide in reverse along the left waist-shaped through hole and the right waist-shaped through hole until the first limit block moves into the limit slot, and the sample stage is turned clockwise by 180 degrees to reset the electronic probe. The test side of the needle sheet is facing up and flush with the top.

Compared with the prior art, the present invention has the following advantages:

1. Simple structure, reasonable design, convenient operation and wide application range.

2. The connection part of the present invention includes a sleeve and a connecting shaft passing through the sleeve. Under the effect that the sleeve is located at the bottom of the sample table and the connecting shaft passes through the base, the connection between the sample table and the base is realized; in addition, the sleeve The clearance fit with the connecting shaft facilitates the rotation of the sleeve around the connecting shaft to realize the counterclockwise 180-degree flip of the sample stage, which is convenient for the test surface to face down when the electronic probe sheet is installed on the sample stage, so as to prevent it from being contacted and polluted. After the sample stage is turned 180 degrees clockwise and reset, it is ensured that the test surface of the electronic probe sheet is up and the top is flush. During the later test process, the sample stage does not need to be frequently focused, which can effectively improve the test efficiency and test accuracy.

3. The present invention sets the limit groove for the purpose of inserting a limit block into the limit groove after the sample stage is reset, so as to ensure that the sample stage is reset in place, and that the top surface of the sample stage and the top surface of the slide rail seat are aligned. Parallel; In addition, when the sample stage is turned 180 degrees counterclockwise, another limit block is inserted into the limit slot, so as to ensure that the sample stage is turned 180 degrees counterclockwise in place, and can support the sample stage, which is convenient for electronic probe sheets installation.

4. The present invention is provided with a vertical plate and a horizontal plate, and the vertical plate and the horizontal plate divide the through hole into a plurality of installation areas, thereby realizing the installation of a plurality of electronic probe sheets and improving the test efficiency; in addition, the vertical plate and the horizontal plate are along the sample The horizontal and vertical sliding of the platform can effectively change the size of the sheet installation area, thereby effectively adapting to the placement of electronic probe sheets of different sizes, and the scope of application is wider.

5. The method of using the electronic probe sheet sample stage is easy to operate and has a good effect. First, the sample stage is turned counterclockwise, followed by the installation of the electronic probe sheet on the bottom surface of the sample stage, and finally, the sample stage is rotated clockwise. Flip and reset so that the test surface of the electronic probe sheet faces upward and the top is flush, which can reduce the frequent focusing of the sample stage during the test and improve test efficiency and test accuracy.

The technical solutions of the present invention will be described in further detail below with reference to the accompanying drawings and embodiments.

Description of drawings

Fig. 1 is a structural schematic diagram of the present invention.

Fig. 2 is a rear view of Fig. 1 .

Fig. 3 is a structural schematic diagram of the base of the present invention.

Fig. 4 is a bottom view of the sample stage, connecting parts and sliding parts of the present invention.

Fig. 5 is a schematic structural view of the connection part of the present invention.

Fig. 6 is a structural schematic diagram of the connecting part and the base (when the limiting block extends into the limiting groove) of the present invention.

Fig. 7 is a schematic structural view of the connecting part and the base (when the limiting block moves out of the limiting groove) of the present invention.

Fig. 8 is a structural schematic diagram of the vertical plate and the horizontal plate of the present invention.

Fig. 9 is a schematic structural view of a longitudinal plate of the present invention.

Fig. 10 is a flow chart of the method for using the electronic probe sheet sample stage of the present invention.

Explanation of reference signs:

1—slide rail seat; 2—vertical plate; 3—base;

3-1—rectangular seat; 3-2—seat ears; 3-3—limiting groove;

3-4—left waist-shaped through hole; 3-5—right waist-shaped through hole; 3-6—accommodating cavity;

4—connecting shaft; 5—sample stage; 5-1—first opening;

5-2—second opening; 5-3—edge stepped groove; 6—connecting part;

6-1—left connecting ear; 6-2—right connecting ear; 6-3—sleeve;

6-4—the first limit block; 6-5—the second limit block; 7—longitudinal plate;

7-1—the first sliding groove; 7-2—the second sliding groove;

7-3—the first intermediate stepped groove; 7-4—the second intermediate stepped groove;

7-6—arc fitting part; 7-5—sliding hole; 8—horizontal plate;

8-1—the third chute; 8-2—the fourth chute; 8-3—the first accommodating groove;

8-4—Second receiving slot; 8-5—Tightening hole; 9—Installation area;

10—press piece; 10-1—adjustment hole; 11—screw;

12—strip groove; 13—location hole; 14—lock nut.

Detailed ways

As shown in Figures 1 to 9, an electronic probe sheet sample stage of the present invention includes a slide rail seat 1, a vertical plate 2 arranged on the slide rail seat 1, a base 3 arranged on the vertical plate 2 and a set A sample stage 5 on the base 3 and parallel to the top of the slide rail seat 1;

The bottom of the sample stage 5 is provided with a connecting part 6 that cooperates with the base 3 and a sliding part that can slide along the vertical and horizontal directions of the sample stage 5. The connecting part 6 includes a The inner sleeve 6-3 and the connecting shaft 4 passing through the sleeve 6-3, the two ends of the connecting shaft 4 protruding from the sleeve 6-3 pass through the base 3, the top of the base 3 and the sleeve The top of the cylinder 6-3 is flush, the sample table 5 can rotate around the connecting shaft 4, the sleeve 6-3 is provided with two symmetrically arranged limit blocks, and the base 3 is provided with a The limit groove 3-3 matched with the limit block, the connecting shaft 4 can drive the sleeve 6-3 close to or away from the limit groove 3-3;

The sliding part includes a longitudinal plate 7 that can slide laterally along the sample stage 5 and two horizontal plates 8 that pass through the longitudinal plate 7 and can slide longitudinally along the sample stage 5 .

As shown in Figure 3, in this embodiment, the base 3 includes a rectangular seat body 3-1 and two seat body ears 3-2 symmetrically arranged on the rectangular seat body 3-1, the two seat body ears 3- 2 and the rectangular seat body 3-1 form a housing cavity 3-6 for the installation of the sleeve 6-3, the rectangular seat body 3-1 and the two seat body ears 3-2 form a U-shaped structure, the limit The positioning groove 3-3 is located in the rectangular seat body 3-1, the length of the limiting groove 3-3 is smaller than the distance between the two seat body ears 3-2, and the connecting shaft 4 extends out of the sleeve 6-3 The two ends of both pass through the seat ear 3-2;

The sample stage 5 is provided with a first opening 5-1 and a second opening 5-2.

In this embodiment, the two seat ears 3-2 are respectively the left seat ear and the right seat ear, and a left waist-shaped through hole 3-4 is arranged in the left seat ear, and the right seat ear A right waist-shaped through-hole 3-5 is arranged in the ear, and the two ends of the connecting shaft 4 pass through the sleeve 6-3 through the left waist-shaped through-hole 3-4 and the right waist-shaped through-hole 3-5, and the The connecting shaft 4 can slide along the left waist-shaped through hole 3-4 and the right waist-shaped through hole 3-5, so that the connecting shaft 4 drives the sleeve 6-3 to move closer to or away from the limiting groove 3-3.

As shown in Figure 4, in this embodiment, the bottom of the sample table 5 is provided with a left connecting ear 6-1 and a right connecting ear 6-2, and the sleeve 6-3 is installed between the left connecting ear 6-1 and the right connecting ear 6-2. Between the right connecting ear 6-2, both the left connecting ear 6-1 and the right connecting ear 6-2 are located in the accommodation cavity 3-6, the outer wall of the left connecting ear 6-1 and a seat ear 3 The inner wall of -2 fits together, and the outer side wall of the right connecting ear 6-2 fits with the inner side wall of another seat body ear 3-2;

One end of the connecting shaft 4 extending out of the sleeve 6-3 passes through the left connecting ear 6-1 and the left waist-shaped through hole 3-4 in the base 3 in turn, and the connecting shaft 4 extends out of the sleeve 6-3. The other end of 3 passes through the right connecting ear 6-2 and the right waist-shaped through hole 3-5 in the base 3 in sequence.

As shown in Figures 5, 6 and 7, in this embodiment, the two limiting blocks are respectively the first limiting block 6-4 and the second limiting block 6-5, and the first limiting block 6-4 The angle between the second limit block 6-5 is 180°, the length of the first limit block 6-4 and the second limit block 6-5 is less than the length of the sleeve 6-3, the first The limiting block 6-4 or the second limiting block 6-5 can be embedded in the limiting groove 3-3, the groove depth of the limiting groove 3-3 and the first limiting block 6-4 and the second limiting The width of bit blocks 6-5 fits.

In this embodiment, the sample stage 5 is a rectangular table top, and a through hole is arranged on the sample stage 5. The vertical plate 7 and the horizontal plate 8 divide the through hole into a plurality of installation areas 9. The sample stage 5 An edge step-shaped groove 5-3 is provided on the bottom surface close to the edge area of the through hole;

The bottom surface of the sample table 5 is provided with a first sliding groove 7-1 for one end of the vertical plate 7 to slide in and a second sliding groove 7-2 for the other end of the vertical plate 7 to slide in and slide. And the third chute 8-1 for one end of the two horizontal plates 8 to stretch in and slide and the fourth chute 8-2 for the other end of the two horizontal plates 8 to stretch in and slide. The chute 8-1 and the fourth chute 8-2 are arranged symmetrically, and the first chute 7-1, the third chute 8-1, the second chute 7-2 and the fourth chute 8- 2 are arranged clockwise along the through hole.

As shown in Figures 4, 8 and 9, in this embodiment, two sliding holes 7-5 for the movement of the two horizontal plates 8 are provided in the longitudinal plate 7, and the sliding holes 7-5 The length direction is arranged along the length direction of the longitudinal plate 7;

The opposite sides of the horizontal plate 8 are provided with a first accommodating groove 8-3 and a second accommodating groove 8-4 for the electronic probe sheet to be embedded, and the first accommodating groove 8-3 and the second accommodating groove 8 -4 is arranged along the length direction of the horizontal plate 8, and the edge of the bottom surface of the vertical plate 7 is symmetrically provided with a first intermediate stepped groove 7-3 and a second intermediate stepped groove 7-4, and the edge stepped concave The top surfaces of the groove 5-3, the first receiving groove 8-3, the first intermediate stepped groove 7-3 and the second intermediate stepped groove 7-4 are flush;

The first intermediate stepped groove 7-3, the edge stepped groove 5-3, and the first receiving groove 8-3 form each first installation area, and the second intermediate stepped groove 7-4, the edge The stepped groove 5-3 and the first receiving groove 8-3 form each second installation area; the edge stepped groove 5-3, the second receiving groove 8-4 of one horizontal plate 8 and the other horizontal plate The second receiving groove 8-4 of 8 forms each intermediate installation area.

As shown in Figure 4, in this embodiment, the longitudinal plate 7 is provided with a plurality of intermediate pressing pieces, and the bottom surface of the sample table 5 is provided with a plurality of Circumferential pressing sheet, the structure of the intermediate pressing sheet and the circumferential pressing sheet are the same, and the intermediate pressing sheet and the circumferential pressing sheet all include limiting the electronic probe sheet placed on each installation area 9. The pressing piece 10 is provided with an adjustment hole 10-1 on the pressing piece 10, and the adjusting hole 10-1 is a waist-shaped hole. The pressing piece 10 is installed on the vertical plate 7 and the sample stage 5 by screws 11 .

As shown in Figure 4, in this embodiment, the lengths of the first sliding groove 7-1 and the second sliding groove 7-2 are smaller than the lateral side length of the through hole, and the third sliding groove 8- 1 and the fourth chute 8-2 are shorter than the length of the longitudinal side of the through hole, the end faces of the vertical plate 7 and the horizontal plate 8 are both arc-shaped matching parts 7-6, and the first sliding groove 7 -1. The second sliding groove 7-2, the third sliding groove 8-1 and the fourth sliding groove 8-2 are arc grooves matched with the arc matching part 7-6;

The bottom surface of the sample table 5 is provided with four strip-shaped grooves 12 near the edge region of the edge stepped groove 5-3, and the four strip-shaped grooves 12 are arranged along the four sides of the through hole;

A positioning hole 13 is provided on the arc-shaped matching portion 7-6, and a screw is pierced in the strip-shaped groove 12 and the positioning hole 13 .

In this embodiment, the first opening 5-1 and the second opening 5-2 are provided on the sample stage 5, in order to give way to the base ear 3-2, so that the sample stage 5 can be turned counterclockwise by 180° During the process, the seat ear 3-2 is effectively accommodated.

In this embodiment, the length of the limit groove 3-3 is the same as the length of the first limit block 6-4 and the second limit block 6-5, so as to accommodate the first limit block 6-4 and the second limit block. Bit blocks 6-5.

In this embodiment, the angle between the first limiting block 6-4 and the second limiting block 6-5 is set to be 180°, and when the sample table 5 is turned clockwise by 180° and reset, the first limiting block Block 6-4 is inserted into the limit groove 3-3, so as to ensure that the sample stage 5 is reset in place, and ensure that the top surface of the sample stage 5 is parallel to the top surface of the slide rail seat 1; in addition, when the sample stage 5 is turned 180° counterclockwise so that the second limiting block 6-5 is inserted into the limiting groove 3-3, so as to ensure that the sample stage 5 is turned counterclockwise by 180° in place, and the sample stage 5 can be supported to facilitate the installation of the electronic probe sheet.

In this embodiment, the left waist-shaped through hole 3-4 and the right waist-shaped through hole 3-5 are provided for the purpose of sliding the connecting shaft 4 along the left waist-shaped through hole 3-4 and the right waist-shaped through hole 3-5, In order to make the connecting shaft 4 drive the sleeve 6-3 to move close to or away from the limit groove 3-3, when the sleeve 6-3 moves close to the limit groove 3-3, until the first limit block 6-4 or The second limiting block 6-5 is inserted into the limiting groove 3-3 and the outer side wall of the sleeve 6-3 is attached to the side of the rectangular seat body 3-1, thereby realizing the limiting.

In this embodiment, the bottom of the horizontal plate 8 is provided with a plurality of tightening holes 8-5, and the tightening holes 8-5 and the first receiving groove 8-3 communicate with the second receiving groove 8-4, In order to adapt to the slight difference in the thickness of the electronic probe sheet, bolts are installed in the tightening hole 8-5 to tighten the bottom of the electronic probe sheet to ensure that the test surface of the electronic probe sheet faces upward and the top is aligned flat.

In this embodiment, in actual use, the arc-shaped matching portion 7-6 is provided, on the one hand, for the convenience of moving along the first sliding groove 7-1, the second sliding groove 7-2, and the third sliding groove 8- 1 and the fourth chute 8-2 slide, on the other hand, in order to reduce the thickness of the ends of the vertical plate 7 and the horizontal plate 8, so that the tops of the sample table 5, the vertical plate 7 and the horizontal plate 8 are aligned Flat, improve the flatness of the overall top surface.

In this embodiment, it should be noted that the edge stepped groove 5-3, the first receiving groove 8-3, the first intermediate stepped groove 7-3 and the second intermediate stepped groove 7-4 The top surface of the sample stage 5 is turned 180 degrees clockwise and reset, so as to ensure that the test surface of the electronic probe sheet is facing upward and the top is flush, that is, the test surface of the electronic probe sheet is parallel to the slide rail seat 1 .

In this embodiment, it should be noted that the first sliding groove 7-1, the second sliding groove 7-2, the third sliding groove 8-1 and the fourth sliding groove 8-2 are referred to as sliding grooves , the length of the strip groove 12 is less than the length of the sliding groove, the width of the strip groove 12 is less than the groove depth of the sliding groove, and the center of the positioning hole 13 is arranged along the width centerline of the strip groove 12 .

In this embodiment, it should be noted that both the first intermediate stepped groove 7-3 and the second intermediate stepped groove 7-4 include The stepped groove at the middle end and the stepped groove at the middle between the two sliding holes 7-5 realize partial installation of the electronic probe sheet.

In this embodiment, it should be noted that the middle pressing piece includes two intermediate end pressing pieces arranged between the side of the sliding hole 7-5 and the end of the longitudinal plate 7 and the middle end pressing piece arranged between the two sliding The middle middle part between holes 7-5 is pressed.

In this embodiment, it should be noted that, in actual use, the top of the rectangular seat 3-1 is provided with a relief groove to accommodate the bottom of the electronic probe sheet.

In this embodiment, the accommodating cavity 3-6 is provided not only for accommodating the sleeve 6-3, but also for facilitating the turning over of the sample stage 5.

In this embodiment, the end of the connecting shaft 4 protruding from the base 3 is provided with a locking nut 14 .

As shown in Figure 10, a method for using an electron probe sheet sample stage includes the following steps:

Step 1. Turn the sample table counterclockwise:

Step 101, remove the lock nut 14, operate the connecting shaft 4 to slide along the left waist-shaped through hole 3-4 and the right waist-shaped through hole 3-5, until the first limiting block 6-4 moves out of the limiting groove 3-3 , manually operate the sample stage 5 to turn counterclockwise 180 degrees around the connecting axis 4;

Step 102, operate the connecting shaft 4 to slide in the opposite direction close to the left waist-shaped through hole 3-4 and the right waist-shaped through hole 3-5, until the second limit block 6-5 moves into the limit groove 3-3, and the completion The sample stage 5 is turned 180 degrees counterclockwise;

Step 2. Installation of the electronic probe sheet:

Step 201, adjust the vertical plate 7 to slide along the first sliding groove 7-1 and the second sliding groove 7-2, adjust the horizontal plate 8 to slide along the third sliding groove 8-1 and the fourth sliding groove 8-2 ;

Step 202, when the electronic probe sheet is installed in each first installation area formed by the first intermediate stepped groove 7-3, the edge stepped groove 5-3, and the first containing groove 8-3, pass through the first containing Groove 8-3 and three pressure pieces 10 carry out limit fixation;

When the electronic probe sheet is installed in each second installation area formed by the second intermediate stepped groove 7-4, the edge stepped groove 5-3, and the first containing groove 8-3, the first containing groove 8 -3 and three pressing sheets 10 are used for limiting and fixing;

When the electronic probe sheet is installed in the edge step-shaped groove 5-3, the second receiving groove 8-4 in one horizontal plate 8 and the second receiving groove 8-4 in the other horizontal plate 8 form each intermediate installation The area is fixed by the first receiving groove 8-3 and the second receiving groove 8-4 and two pressing pieces 10; wherein, the vertical plate 7 and the horizontal plate 8 are adjusted in place, passing through the strip groove 12 and the positioning hole 13 Screws are provided to position the vertical plate 7 and the horizontal plate 8;

Step 3. Turn the sample table clockwise to reset:

Step 301, operate the connecting shaft 4 to slide along the left waist-shaped through hole 3-4 and the right waist-shaped through hole 3-5 until the second limit block 6-5 moves out of the limit groove 3-3, and manually operate the sample stage 5 Turn clockwise 180 degrees around the connecting axis 4;

Step 302, operate the connecting shaft 4 to slide in the opposite direction along the left waist-shaped through hole 3-4 and the right waist-shaped through hole 3-5 until the first stopper 6-4 moves into the stopper slot 3-3, complete The sample stage 5 is turned clockwise by 180 degrees and reset, so that the test surface of the electronic probe sheet faces upward and the top is flush.

In this embodiment, screws are inserted in the strip groove 12 and the positioning hole 13 until the screws touch the side wall of the sliding groove, so that the vertical plate 7 and the horizontal plate 8 are fixed and positioned.

In summary, the present invention is simple in structure and reasonable in design. By flipping the sample stage, the electronic probe sheet is installed on the bottom of the sample stage so that the test surface is facing down, so as to prevent the test surface of the electronic probe sheet from being contacted by the tester. Contaminated, and after flipping, the test surface of the electronic probe sheet is facing up and the top is flush, which can reduce the frequent focusing of the sample stage during the test process, improve test efficiency and test accuracy, and can effectively adapt to different sizes of electronic probes The placement of the sheet is stable and reliable, and the application range is wide.

The above are only preferred embodiments of the present invention, and do not limit the present invention in any way. All simple modifications, changes and equivalent structural changes made to the above embodiments according to the technical essence of the present invention still belong to the technical aspects of the present invention. within the scope of protection of the scheme.

Claims (6)

1. An electronic probe sheet sample stage, characterized in that it includes a slide rail seat (1), a vertical plate (2) arranged on the slide rail seat (1), a vertical plate (2) arranged on the vertical plate (2) A base (3) and a sample stage (5) arranged on the base (3) and parallel to the top of the slide rail seat (1); The bottom of the sample stage (5) is provided with a connecting part (6) that cooperates with the base (3) and a sliding part that can slide along the vertical and horizontal directions of the sample stage (5). The connecting part (6) includes a The bottom of the sample table (5) and the sleeve (6-3) extending into the base (3) and the connecting shaft (4) passing through the sleeve (6-3), the connecting shaft (4) extends The two ends of the sleeve (6-3) pass through the base (3), the top of the base (3) is flush with the top of the sleeve (6-3), and the sample table (5) can be connected around The shaft (4) rotates, the sleeve (6-3) is provided with two symmetrically arranged limit blocks, and the base (3) is provided with a limit groove (3- 3), the connecting shaft (4) can drive the sleeve (6-3) close to or away from the limit groove (3-3); The sliding part includes a longitudinal plate (7) that can slide laterally along the sample stage (5) and two horizontal plates (8) that pass through the longitudinal plate (7) and can slide longitudinally along the sample stage (5). ); The base (3) includes a rectangular seat (3-1) and two seat ears (3-2) symmetrically arranged on the rectangular seat (3-1), the two seat ears (3-2) and the rectangular seat body (3-1) enclose the accommodation cavity (3-6) for the installation of the sleeve (6-3), the rectangular seat body (3-1) and the two seat body ears (3-2) Enclosed in a U-shaped structure, the limiting groove (3-3) is located in the rectangular seat (3-1), and the length of the limiting groove (3-3) is shorter than the two seat ears (3-2) The two ends of the connecting shaft (4) protruding from the sleeve (6-3) pass through the seat ear (3-2); the sample stage (5) is provided with a first opening (5-1) and the second opening (5-2); The two seat ears (3-2) are respectively the left seat ear and the right seat ear, and a left waist-shaped through hole (3-4) is arranged in the left seat ear, and the right seat ear A right waist-shaped through hole (3-5) is arranged inside, and the two ends of the connecting shaft (4) passing through the sleeve (6-3) pass through the left waist-shaped through hole (3-4) and the right waist-shaped through hole respectively. through holes (3-5), and the connecting shaft (4) can slide along the left waist-shaped through hole (3-4) and the right waist-shaped through hole (3-5), so that the connecting shaft (4) drives The sleeve (6-3) moves closer to or away from the limit groove (3-3); The bottom of the sample table (5) is provided with a left connecting ear (6-1) and a right connecting ear (6-2), and the sleeve (6-3) is installed on the left connecting ear (6-1) and the right connecting ear (6-1). Between the connecting ears (6-2), the left connecting ear (6-1) and the right connecting ear (6-2) are both located in the accommodating cavity (3-6), and the left connecting ear (6-1) The outer wall of the right connecting ear (6-2) is fitted with the inner wall of one seat ear (3-2), and the outer wall of the right connecting ear (6-2) is fitted with the inner wall of the other seat ear (3-2). ; One end of the connecting shaft (4) protruding from the sleeve (6-3) passes through the left waist-shaped through hole (3-4) in the left connecting ear (6-1) and the base (3) successively, so The other end of the connecting shaft (4) protruding from the sleeve (6-3) passes through the right waist-shaped through hole (3-5) in the right connecting ear (6-2) and the base (3) in turn; The two limit blocks are respectively the first limit block (6-4) and the second limit block (6-5), the first limit block (6-4) and the second limit block (6- 5) The angle between them is 180°, the length of the first limit block (6-4) and the second limit block (6-5) is less than the length of the sleeve (6-3), the first limit block Both the position block (6-4) or the second limit block (6-5) can be embedded in the limit groove (3-3), and the depth of the limit groove (3-3) is the same as that of the first limit block (6-4) is adapted to the width of the second limit block (6-5). 2. An electronic probe sheet sample table according to claim 1, characterized in that: the sample table (5) is a rectangular table top, the sample table (5) is provided with a through hole, and the vertical plate (7), the horizontal plate (8) divides the through hole into multiple installation areas (9), and the edge area of the bottom surface of the sample table (5) close to the through hole is provided with edge stepped grooves (5-3) ; The bottom surface of the sample table (5) is provided with a first sliding groove (7-1) for one end of the longitudinal plate (7) to slide in and slide in, and a first sliding groove (7-1) for the other end of the vertical plate (7) to slide in and slide. Two sliding grooves (7-2), and the third chute (8-1) for one end of the two horizontal plates (8) to slide in and for the other end of the two horizontal plates (8) to extend in And the sliding fourth chute (8-2), the third chute (8-1) and the fourth chute (8-2) are arranged symmetrically, the first sliding chute (7-1) , the third chute (8-1), the second chute (7-2) and the fourth chute (8-2) are arranged clockwise along the through hole. 3. An electronic probe sheet sample stage according to claim 2, characterized in that: the longitudinal plate (7) is provided with two sliding holes (7) for the movement of the two horizontal plates (8) respectively -5), the length direction of the sliding hole (7-5) is arranged along the length direction of the longitudinal plate (7); The opposite sides of the horizontal plate (8) are provided with a first accommodating groove (8-3) and a second accommodating groove (8-4) for the electronic probe sheet to be embedded, and the first accommodating groove (8- 3) and the second accommodating groove (8-4) are arranged along the length direction of the horizontal plate (8), and the bottom edge of the vertical plate (7) is symmetrically provided with the first intermediate stepped groove (7-3) and the second Two intermediate stepped grooves (7-4), the edge stepped groove (5-3), the first receiving groove (8-3), the first intermediate stepped groove (7-3) and the second The top surfaces of the intermediate stepped grooves (7-4) are flush; The first intermediate stepped groove (7-3), the edge stepped groove (5-3), and the first receiving groove (8-3) form each first installation area, and the second intermediate stepped groove The groove (7-4), the edge stepped groove (5-3), and the first receiving groove (8-3) form each second installation area; the edge stepped groove (5-3), a horizontal plate The second accommodating groove (8-4) of (8) and the second accommodating groove (8-4) of another horizontal plate (8) form each intermediate installation area. 4. An electron probe sheet sample stage according to claim 2 or 3, characterized in that: the longitudinal plate (7) is provided with a plurality of intermediate pressing pieces, and the bottom surface of the sample stage (5) is close to the A plurality of circumferential pressing pieces are arranged on the edge area of the edge stepped groove (5-3), the middle pressing piece and the circumferential pressing piece have the same structure, and the middle pressing piece and the circumferential pressing piece have the same structure. Each of the pressing sheets includes a pressing sheet (10) for fixing the electronic probe sheet placed on each installation area (9), and the pressing sheet (10) is provided with an adjustment hole (10-1), and the adjustment hole (10-1) is a waist-shaped hole, and the pressing piece (10) is installed on the vertical plate (7) and the sample stage (5) through screws (11). 5. An electron probe sheet sample stage according to claim 2, characterized in that: the lengths of the first sliding groove (7-1) and the second sliding groove (7-2) are shorter than the The length of the lateral side of the through hole, the length of the third chute (8-1) and the fourth chute (8-2) is less than the length of the longitudinal side of the through hole, the length of the vertical plate (7) and the horizontal plate The end faces of (8) are all arc-shaped fitting parts (7-6), the first sliding groove (7-1), the second sliding groove (7-2), the third sliding groove (8-1) and the fourth chute (8-2) are arc-shaped grooves matched with the arc-shaped matching portion (7-6); Four bar-shaped grooves (12) are arranged on the bottom surface of the sample table (5) close to the edge area of the edge stepped groove (5-3), and the four bar-shaped grooves (12) are arranged along the Layout on four sides; A positioning hole (13) is provided on the arc-shaped fitting part (7-6), and a screw is penetrated in the strip-shaped groove (12) and the positioning hole (13). 6. a method for using the electron probe thin sheet sample stage as claimed in claim 3, is characterized in that, the method comprises the following steps: Step 1. Turn the sample table counterclockwise: Step 101. Remove the lock nut (14), operate the connecting shaft (4) to slide along the left waist-shaped through hole (3-4) and the right waist-shaped through hole (3-5) until the first stopper (6 -4) Move out of the limit slot (3-3), and manually operate the sample stage (5) to turn counterclockwise 180 degrees around the connecting shaft (4); Step 102. Operate the connecting shaft (4) to slide in the opposite direction close to the left waist-shaped through hole (3-4) and the right waist-shaped through hole (3-5) until the second limit block (6-5) moves to the limit In the position slot (3-3), the sample stage (5) is flipped 180 degrees counterclockwise; Step 2. Installation of the electronic probe sheet: Step 201. Adjust the vertical plate (7) to slide along the first sliding groove (7-1) and the second sliding groove (7-2), and adjust the horizontal plate (8) to slide along the third sliding groove (8-1) Slip with the fourth chute (8-2); Step 202, when the electronic probe sheet is installed in each first installation area formed by the first intermediate stepped groove (7-3), the edge stepped groove (5-3), and the first receiving groove (8-3) , through the first receiving groove (8-3) and three pressure pieces (10) to limit and fix; When the electronic probe sheet is installed in each second installation area formed by the second intermediate stepped groove (7-4), the edge stepped groove (5-3), and the first receiving groove (8-3), Limit and fix through the first receiving groove (8-3) and three pressing pieces (10); When the electronic probe sheet is installed in the edge stepped groove (5-3), the second receiving groove (8-4) in one horizontal plate (8) and the second receiving groove in the other horizontal plate (8) The grooves (8-4) form each intermediate installation area, and are fixed by the first accommodation groove (8-3) and the second accommodation groove (8-4) and two pressing pieces (10); among them, the vertical plate (7) and the horizontal plate (8) are adjusted in place, and the screws are passed through the strip groove (12) and the positioning hole (13) to position the vertical plate (7) and the horizontal plate (8); Step 3. Turn the sample table clockwise to reset: Step 301, operate the connecting shaft (4) to slide along the left waist-shaped through hole (3-4) and the right waist-shaped through hole (3-5) until the second limit block (6-5) moves out of the limit slot ( 3-3), manually operate the sample stage (5) to turn clockwise 180 degrees around the connecting axis (4); Step 302. Operate the connecting shaft (4) to slide in reverse along the left waist-shaped through hole (3-4) and the right waist-shaped through hole (3-5) until the first limit block (6-4) moves to the limit In the position slot (3-3), complete the reset of the sample stage (5) by turning clockwise 180 degrees, so that the test surface of the electronic probe sheet faces upward and the top is flush.

Images