CN113075244B - Electronic probe sheet sample stage and application method thereof - Google Patents
Electronic probe sheet sample stage and application method thereof Download PDFInfo
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- CN113075244B CN113075244B CN202110364810.5A CN202110364810A CN113075244B CN 113075244 B CN113075244 B CN 113075244B CN 202110364810 A CN202110364810 A CN 202110364810A CN 113075244 B CN113075244 B CN 113075244B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
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Abstract
The invention discloses an electronic probe sheet sample table and a use method thereof, wherein the electronic probe sheet sample table comprises a slide rail seat, a vertical plate, a base and a sample table, the bottom of the sample table is provided with a connecting part and a sliding part, the connecting part comprises a sleeve and a connecting shaft, the sample table can rotate around the connecting shaft, two symmetrically arranged limiting blocks are arranged on the sleeve, a limiting groove matched with the limiting block is arranged in the base, the connecting shaft can drive the sleeve to be close to or far from the limiting groove, and the sliding part comprises a longitudinal plate and two transverse plates; the method comprises the following steps: 1. the counter-clockwise rotation of the sample stage; 2. mounting an electronic probe sheet; 3. the sample stage is turned clockwise and reset. According to the invention, the test surface of the electronic probe sheet is downward when the electronic probe sheet is installed at the bottom of the sample table through the overturning of the sample table, so that the test surface of the electronic probe sheet is prevented from being polluted due to contact of a tester, and the electronic probe sheet can be effectively suitable for placing electronic probe sheets with different sizes, and the application range is wide.
Description
Technical Field
The invention belongs to the technical field of geological thin sheet analysis, and particularly relates to an electronic probe thin sheet sample table.
Background
The electronic probe is an analytical instrument which can be used for analyzing the chemical composition of a micro-area of a mineral in a slice, so that rock and mineral to be researched and analyzed are required to be manufactured into a slice in the geological detection process, namely the electronic probe slice, wherein the length of the electronic probe slice is generally 47-50 mm, the width of the electronic probe slice is not more than 28mm, and the thickness of the electronic probe slice is about 1 mm. The mounting area of the sheet sample stage in the electronic probe cannot be adjusted, so that a portion larger than the mounting area needs to be cut and reloaded with a diamond pen due to a small difference in the size of the sheet of the electronic probe, which may cause breakage of the sheet or destruction of the useful portion; the electronic probe sheet smaller than the mounting area needs to be fixed by using conductive adhesive, and most of the fixing modes are single-side or two sides close to each other, so that the fixing effect is poor, and the electronic probe sheet is easy to loose or fall along with the movement of a sample stage in the test process, so that electronic probe signals drift or instrument faults are caused.
In addition, currently, the electronic probe sheet is mounted on the sample stage, and the test surface of the electronic probe sheet faces upwards, so that the test surface is easily contacted by a tester and polluted in the mounting process, thereby causing inaccuracy of the test.
Therefore, a sample stage of an electronic probe sheet with reasonable design and a use method thereof are lacking at present, the test surface of the electronic probe sheet is downward when the electronic probe sheet is installed at the bottom of the sample stage by overturning the sample stage, the test surface of the electronic probe sheet is prevented from being polluted by contact of a tester, the test surface of the electronic probe sheet after overturning is upward and the top of the electronic probe sheet is flush, frequent focusing of the sample stage in the test process can be reduced, the test efficiency and the test precision are improved, and the test stage can be effectively suitable for placing electronic probe sheets with different sizes.
Disclosure of Invention
The invention aims to solve the technical problems in the prior art, and provides an electronic probe sheet sample table which is reasonable in design, the test surface of the electronic probe sheet is downward when the electronic probe sheet is installed at the bottom of the sample table through the overturning of the sample table, the test surface of the electronic probe sheet is prevented from being polluted due to contact of a tester, the test surface of the electronic probe sheet after overturning is upward and the top of the electronic probe sheet is flush, frequent focusing of the sample table in the test process can be reduced, the test efficiency and the test precision are improved, the electronic probe sheet sample table can be effectively suitable for placement of electronic probe sheets with different sizes, and the application range is wide.
In order to solve the technical problems, the invention adopts the following technical scheme: an electronic probe sheet sample stage, characterized in that: the device comprises a slide rail seat, a vertical plate arranged on the slide rail seat, a base arranged on the vertical plate and a sample table arranged on the base and parallel to the top of the slide rail seat;
the bottom of the sample table is provided with a connecting part matched with the base and a sliding part capable of sliding along the longitudinal direction of the sample table, the connecting part comprises a sleeve arranged at the bottom of the sample table and extending into the base and a connecting shaft penetrating through the sleeve, two ends of the connecting shaft extending out of the sleeve penetrate through the base, the top of the base is flush with the top of the sleeve, the sample table can rotate around the connecting shaft, two symmetrically arranged limiting blocks are arranged on the sleeve, limiting grooves matched with the limiting blocks are formed in the base, and the connecting shaft can drive the sleeve to be close to or far away from the limiting grooves;
the sliding component comprises a longitudinal plate capable of sliding transversely along the sample table and two transverse plates which are arranged in the longitudinal plate in a penetrating mode and capable of sliding longitudinally along the sample table.
The electronic probe sheet sample stage is characterized in that: the base comprises a rectangular base body and two base body lugs symmetrically arranged on the rectangular base body, wherein the two base body lugs and the rectangular base body enclose a containing cavity for the installation of the sleeve, the rectangular base body and the two base body lugs enclose a U-shaped structure, the limit groove is positioned in the rectangular base body, the length of the limit groove is smaller than the interval between the two base body lugs, and the two ends of the connecting shaft extending out of the sleeve penetrate through the base body lugs;
the sample platform is provided with a first opening and a second opening.
The electronic probe sheet sample stage is characterized in that: the two seat ears are a left seat ear and a right seat ear respectively, a left waist-shaped through hole is arranged in the left seat ear, a right waist-shaped through hole is arranged in the right seat ear, the connecting shaft penetrates through the left waist-shaped through hole and the right waist-shaped through hole at two ends of the sleeve, and the connecting shaft can slide along the left waist-shaped through hole and the right waist-shaped through hole, so that the connecting shaft drives the sleeve to move close to or far away from the limiting groove.
The electronic probe sheet sample stage is characterized in that: the bottom of the sample table is provided with a left connecting lug and a right connecting lug, the sleeve is arranged between the left connecting lug and the right connecting lug, the left connecting lug and the right connecting lug are both positioned in the accommodating cavity, the outer side wall of the left connecting lug is attached to the inner side wall of one seat body lug, and the outer side wall of the right connecting lug is attached to the inner side wall of the other seat body lug;
one end of the connecting shaft extending out of the sleeve sequentially penetrates through the left waist-shaped through holes in the left connecting lug and the base, and the other end of the connecting shaft extending out of the sleeve sequentially penetrates through the right waist-shaped through holes in the right connecting lug and the base.
The electronic probe sheet sample stage is characterized in that: the two limiting blocks are a first limiting block and a second limiting block respectively, the included angle between the first limiting block and the second limiting block is 180 degrees, the length of the first limiting block and the length of the second limiting block are smaller than that of the sleeve, the first limiting block or the second limiting block can be embedded into the limiting groove, and the groove depth of the limiting groove and the width of the first limiting block and the width of the second limiting block are adaptive.
The electronic probe sheet sample stage is characterized in that: the sample table is a rectangular table top, a through hole is formed in the sample table, the through hole is divided into a plurality of installation areas by the longitudinal plate and the transverse plate, and an edge step-shaped groove is formed in the edge area, close to the through hole, of the bottom surface of the sample table;
the sample bench is characterized in that a first sliding groove for extending into and sliding one end of the vertical plate, a second sliding groove for extending into and sliding the other end of the vertical plate, a third sliding groove for extending into and sliding one end of the two transverse plates, and a fourth sliding groove for extending into and sliding the other end of the two transverse plates are arranged on the bottom surface of the sample bench, the third sliding groove and the fourth sliding groove are symmetrically arranged, and the first sliding groove, the third sliding groove, the second sliding groove and the fourth sliding groove are clockwise arranged along the through hole.
The electronic probe sheet sample stage is characterized in that: two sliding holes for the two transverse plates to move are formed in the longitudinal plate, and the length direction of the sliding holes is distributed along the length direction of the longitudinal plate;
the two opposite sides of the transverse plate are provided with a first accommodating groove and a second accommodating groove which are embedded by the electronic probe sheet, the first accommodating groove and the second accommodating groove are distributed along the length direction of the transverse plate, the edge of the bottom surface of the longitudinal plate is symmetrically provided with a first middle step-shaped groove and a second middle step-shaped groove, and the top surfaces of the edge step-shaped groove, the first accommodating groove, the first middle step-shaped groove and the second middle step-shaped groove are flush;
the first middle step-shaped groove, the edge step-shaped groove and the first accommodating groove form first installation areas, and the second middle step-shaped groove, the edge step-shaped groove and the first accommodating groove form second installation areas; the edge stepped groove, the second receiving groove of one of the cross plates, and the second receiving groove of the other cross plate form respective intermediate mounting areas.
The electronic probe sheet sample stage is characterized in that: be provided with a plurality of middle preformings on the vertical board, the sample platform bottom surface is close to be provided with a plurality of circumference preformings on the marginal zone of marginal step recess, middle preforming with the structure of circumference preforming is the same, just middle preforming with circumference preforming all includes the preforming that carries out spacingly to the electron probe thin slice of placing on each installation zone, be provided with the regulation hole on the preforming, the regulation hole is waist shape hole, the preforming passes through the screw and installs on vertical board and sample platform.
The electronic probe sheet sample stage is characterized in that: the lengths of the first sliding groove and the second sliding groove are smaller than the transverse side length of the through hole, the lengths of the third sliding groove and the fourth sliding groove are smaller than the longitudinal side length of the through hole, the end faces of the longitudinal plate and the transverse plate are arc-shaped matching parts, and the first sliding groove, the second sliding groove, the third sliding groove and the fourth sliding groove are arc-shaped grooves matched with the arc-shaped matching parts;
four strip-shaped grooves are formed in the bottom surface of the sample table and close to the edge area of the edge step-shaped groove, and the four strip-shaped grooves are distributed along the four sides of the through hole;
the arc-shaped matching part is provided with a positioning hole, and screws are arranged in the strip-shaped groove and the positioning hole in a penetrating mode.
Meanwhile, the invention also discloses a using method of the electronic probe sheet sample table which is reasonable in design and convenient to realize, and the method is characterized by comprising the following steps:
step one, anticlockwise overturning of a sample table:
step 101, removing the lock nut, operating the connecting shaft to slide along the left kidney-shaped through hole and the right kidney-shaped through hole until the first limiting block moves out of the limiting groove, and manually operating the sample table to turn over 180 degrees anticlockwise around the connecting shaft;
step 102, operating the connecting shaft to reversely slide near the left kidney-shaped through hole and the right kidney-shaped through hole until the second limiting block moves into the limiting groove, and finishing the anticlockwise 180-degree overturning of the sample table;
step two, mounting an electronic probe sheet:
step 201, adjusting the longitudinal plate to slide along the first sliding groove and the second sliding groove, and adjusting the transverse plate to slide along the third sliding groove and the fourth sliding groove;
202, when an electronic probe sheet is installed in each first installation area formed by a first middle step-shaped groove, an edge step-shaped groove and a first containing groove, limiting and fixing are carried out through the first containing groove and three pressing sheets;
when the electronic probe sheet is arranged in each second installation area formed by the second middle step-shaped groove, the edge step-shaped groove and the first containing groove, limiting and fixing are carried out through the first containing groove and the three pressing sheets;
when the electronic probe sheet is installed in the edge step-shaped groove, the second accommodating groove in one transverse plate and the second accommodating groove in the other transverse plate, the middle installation areas are formed in the grooves, and the electronic probe sheet is fixed through the first accommodating groove, the second accommodating groove and the two pressing sheets; wherein, the longitudinal plate and the transverse plate are adjusted in place, and screws are penetrated in the strip-shaped grooves and the positioning holes so as to position the longitudinal plate and the transverse plate;
step three, clockwise turning and resetting of the sample table:
step 301, operating the connecting shaft to slide along the left kidney-shaped through hole and the right kidney-shaped through hole until the second limiting block moves out of the limiting groove, and manually operating the sample table to turn clockwise for 180 degrees around the connecting shaft;
and 302, operating the connecting shaft to reversely slide along the left kidney-shaped through hole and the right kidney-shaped through hole until the first limiting block moves into the limiting groove, and completing clockwise overturning 180-degree resetting of the sample stage so that the testing surface of the electronic probe sheet faces upwards and the top of the electronic probe sheet is flush.
Compared with the prior art, the invention has the following advantages:
1. simple structure, reasonable in design and simple operation, accommodation is wide.
2. The connecting component comprises a sleeve and a connecting shaft penetrating through the sleeve, and the connecting shaft penetrates through the base under the action that the sleeve is positioned at the bottom of the sample platform, so that the sample platform and the base are connected; in addition, the sleeve is in clearance fit with the connecting shaft, so that the sleeve can rotate around the connecting shaft conveniently, the sample stage can be turned anticlockwise by 180 degrees, the test surface can be downward conveniently when the electronic probe sheet is mounted on the sample stage, the electronic probe sheet is prevented from being polluted due to contact, the test surface of the electronic probe sheet is ensured to be upward and the top of the electronic probe sheet is flush after the sample stage is turned clockwise by 180 degrees for resetting, and in the later test process, the sample stage does not need to be focused frequently, so that the test efficiency and the test precision can be effectively improved.
3. The invention is provided with the limit groove, so that one limit block is inserted into the limit groove after the sample table is reset, thereby ensuring that the sample table is reset in place and ensuring that the top surface of the sample table is parallel to the top surface of the slide rail seat; in addition, after the sample platform is turned 180 degrees anticlockwise, the other limiting block is inserted into the limiting groove, so that the sample platform is enabled to be turned 180 degrees anticlockwise in place, the sample platform can be supported, and the electronic probe sheet is convenient to install.
4. The invention is provided with the longitudinal plate and the transverse plate, and the longitudinal plate and the transverse plate divide the through hole into a plurality of mounting areas, so that a plurality of electronic probe sheets are mounted, and the test efficiency is improved; in addition, the longitudinal plate and the transverse plate slide along the transverse direction and the longitudinal direction of the sample table, so that the size of the sheet mounting area can be effectively changed, the electronic probe sheet mounting device can be effectively suitable for placing electronic probe sheets with different sizes, and the application range is wider.
5. The using method of the adopted electronic probe sheet sample table is simple and convenient to operate and good in using effect, firstly, the sample table is turned anticlockwise, secondly, the electronic probe sheet is installed on the bottom surface of the sample table, and finally, the sample table is turned clockwise and reset, so that the testing surface of the electronic probe sheet is upward, the tops of the electronic probe sheet are flush, frequent focusing of the sample table in the testing process can be reduced, and the testing efficiency and the testing precision are improved.
The technical scheme of the invention is further described in detail through the drawings and the embodiments.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a rear view of fig. 1.
Fig. 3 is a schematic structural view of the base of the present invention.
Fig. 4 is a bottom view of the sample stage, connecting member and slide member of the present invention.
Fig. 5 is a schematic structural view of the connecting member of the present invention.
Fig. 6 is a schematic structural view of the connecting component and the base (when the limiting block stretches into the limiting groove) of the invention.
Fig. 7 is a schematic structural view of the connecting component and the base (when the limiting block moves out of the limiting groove) of the invention.
Fig. 8 is a schematic view of the structures of the longitudinal plate and the transverse plate of the present invention.
Fig. 9 is a schematic structural view of a vertical plate according to the present invention.
FIG. 10 is a flow chart of a method of using the electronic probe sheet sample stage of the present invention.
Reference numerals illustrate:
1-a slide rail seat; 2-vertical plates; 3-a base;
3-1, a rectangular base; 3-2, a seat ear; 3-3, a limit groove;
3-4-left waist-shaped through holes; 3-5-right waist-shaped through holes; 3-6, a containing cavity;
4-a connecting shaft; 5-a sample stage; 5-1-a first opening;
5-2-a second opening; 5-3-edge step grooves; 6-a connecting member;
6-1-left connecting lugs; 6-2-right connecting ear; 6-3-sleeve;
6-4, namely a first limiting block; 6-5, a second limiting block; 7-a vertical plate;
7-1, a first sliding groove; 7-2, a second sliding groove;
7-3-a first intermediate stepped recess; 7-4-a second intermediate stepped recess;
7-6, an arc-shaped matching part; 7-5-sliding holes; 8-a transverse plate;
8-1 to a third chute; 8-2 to fourth sliding grooves; 8-3-a first accommodation groove;
8-4-a second accommodation groove; 8-5-tightening the hole; 9-an installation area;
10-tabletting; 10-1-adjusting holes; 11-a screw;
12-a bar-shaped groove; 13, positioning holes; 14-lock nut.
Detailed Description
As shown in fig. 1 to 9, an electronic probe sheet sample stage of the present invention comprises a slide rail seat 1, a vertical plate 2 provided on the slide rail seat 1, a base 3 provided on the vertical plate 2, and a sample stage 5 provided on the base 3 and parallel to the top of the slide rail seat 1;
the bottom of the sample table 5 is provided with a connecting part 6 matched with the base 3 and a sliding part capable of sliding along the longitudinal and transverse directions of the sample table 5, the connecting part 6 comprises a sleeve 6-3 arranged at the bottom of the sample table 5 and extending into the base 3 and a connecting shaft 4 penetrating through the sleeve 6-3, the connecting shaft 4 extends out of two ends of the sleeve 6-3 and penetrates through the base 3, the top of the base 3 is flush with the top of the sleeve 6-3, the sample table 5 can rotate around the connecting shaft 4, two symmetrically arranged limiting blocks are arranged on the sleeve 6-3, limiting grooves 3-3 matched with the limiting blocks are arranged in the base 3, and the connecting shaft 4 can drive the sleeve 6-3 to be close to or far away from the limiting grooves 3-3;
the sliding component comprises a longitudinal plate 7 capable of sliding transversely along the sample table 5 and two transverse plates 8 penetrating the longitudinal plate 7 and capable of sliding longitudinally along the sample table 5.
In this embodiment, as shown in fig. 3, the base 3 includes a rectangular base 3-1 and two base ears 3-2 symmetrically disposed on the rectangular base 3-1, the two base ears 3-2 and the rectangular base 3-1 enclose a receiving cavity 3-6 for mounting the sleeve 6-3, the rectangular base 3-1 and the two base ears 3-2 enclose a U-shaped structure, the limit groove 3-3 is located in the rectangular base 3-1, the length of the limit groove 3-3 is smaller than the interval between the two base ears 3-2, and both ends of the connecting shaft 4 extending out of the sleeve 6-3 pass through the base ears 3-2;
the sample stage 5 is provided with a first opening 5-1 and a second opening 5-2.
In this embodiment, the two seat ears 3-2 are a left seat ear and a right seat ear, a left waist-shaped through hole 3-4 is provided in the left seat ear, a right waist-shaped through hole 3-5 is provided in the right seat ear, the connecting shaft 4 passes through the left waist-shaped through hole 3-4 and the right waist-shaped through hole 3-5 through two ends of the sleeve 6-3, and the connecting shaft 4 can slide along the left waist-shaped through hole 3-4 and the right waist-shaped through hole 3-5, so that the connecting shaft 4 drives the sleeve 6-3 to move close to or far away from the limiting groove 3-3.
In this embodiment, as shown in fig. 4, a left connecting ear 6-1 and a right connecting ear 6-2 are disposed at the bottom of the sample stage 5, the sleeve 6-3 is mounted between the left connecting ear 6-1 and the right connecting ear 6-2, the left connecting ear 6-1 and the right connecting ear 6-2 are both located in the accommodating cavity 3-6, the outer side wall of the left connecting ear 6-1 is attached to the inner side wall of one base ear 3-2, and the outer side wall of the right connecting ear 6-2 is attached to the inner side wall of the other base ear 3-2;
one end of the connecting shaft 4, which extends out of the sleeve 6-3, sequentially penetrates through the left waist-shaped through holes 3-4 in the left connecting lug 6-1 and the base 3, and the other end of the connecting shaft 4, which extends out of the sleeve 6-3, sequentially penetrates through the right waist-shaped through holes 3-5 in the right connecting lug 6-2 and the base 3.
In this embodiment, as shown in fig. 5, 6 and 7, the two limiting blocks are a first limiting block 6-4 and a second limiting block 6-5, the included angle between the first limiting block 6-4 and the second limiting block 6-5 is 180 °, the lengths of the first limiting block 6-4 and the second limiting block 6-5 are smaller than the length of the sleeve 6-3, the first limiting block 6-4 or the second limiting block 6-5 can be embedded into the limiting groove 3-3, and the groove depth of the limiting groove 3-3 and the width of the first limiting block 6-4 are adapted to the width of the second limiting block 6-5.
In this embodiment, the sample stage 5 is a rectangular table, a through hole is provided on the sample stage 5, the through hole is divided into a plurality of mounting areas 9 by the vertical plate 7 and the horizontal plate 8, and an edge stepped groove 5-3 is provided on the bottom surface of the sample stage 5 near the edge area of the through hole;
the bottom surface of the sample table 5 is provided with a first sliding groove 7-1 in which one end of the vertical plate 7 stretches into and slides, a second sliding groove 7-2 in which the other end of the vertical plate 7 stretches into and slides, a third sliding groove 8-1 in which one ends of the two transverse plates 8 stretch into and slide, and a fourth sliding groove 8-2 in which the other ends of the two transverse plates 8 stretch into and slide, the third sliding groove 8-1 and the fourth sliding groove 8-2 are symmetrically distributed, and the first sliding groove 7-1, the third sliding groove 8-1, the second sliding groove 7-2 and the fourth sliding groove 8-2 are clockwise distributed along the through holes.
As shown in fig. 4, 8 and 9, in this embodiment, two sliding holes 7-5 for moving two transverse plates 8 are provided in the longitudinal plate 7, and the length direction of the sliding holes 7-5 is arranged along the length direction of the longitudinal plate 7;
the two opposite sides of the transverse plate 8 are provided with a first accommodating groove 8-3 and a second accommodating groove 8-4 in which an electronic probe sheet is embedded, the first accommodating groove 8-3 and the second accommodating groove 8-4 are distributed along the length direction of the transverse plate 8, the bottom edge of the longitudinal plate 7 is symmetrically provided with a first middle step-shaped groove 7-3 and a second middle step-shaped groove 7-4, and the top surfaces of the edge step-shaped groove 5-3, the first accommodating groove 8-3, the first middle step-shaped groove 7-3 and the second middle step-shaped groove 7-4 are flush;
the first middle step-shaped groove 7-3, the edge step-shaped groove 5-3 and the first accommodating groove 8-3 form first installation areas, and the second middle step-shaped groove 7-4, the edge step-shaped groove 5-3 and the first accommodating groove 8-3 form second installation areas; the edge stepped groove 5-3, the second receiving groove 8-4 of one cross plate 8, and the second receiving groove 8-4 of the other cross plate 8 form respective intermediate mounting areas.
As shown in fig. 4, in this embodiment, a plurality of middle pressing pieces are disposed on the vertical plate 7, a plurality of circumferential pressing pieces are disposed on an edge area of the bottom surface of the sample table 5, which is close to the edge stepped groove 5-3, the middle pressing pieces and the circumferential pressing pieces have the same structure, the middle pressing pieces and the circumferential pressing pieces each include a pressing piece 10 for limiting an electronic probe sheet disposed on each mounting area 9, an adjusting hole 10-1 is disposed on the pressing piece 10, the adjusting hole 10-1 is a kidney-shaped hole, and the pressing pieces 10 are mounted on the vertical plate 7 and the sample table 5 through screws 11.
As shown in fig. 4, in this embodiment, the lengths of the first sliding groove 7-1 and the second sliding groove 7-2 are smaller than the lateral side length of the through hole, the lengths of the third sliding groove 8-1 and the fourth sliding groove 8-2 are smaller than the longitudinal side length of the through hole, the end surfaces of the longitudinal plate 7 and the transverse plate 8 are arc-shaped matching parts 7-6, and the first sliding groove 7-1, the second sliding groove 7-2, the third sliding groove 8-1 and the fourth sliding groove 8-2 are arc-shaped grooves matched with the arc-shaped matching parts 7-6;
four strip-shaped grooves 12 are formed in the bottom surface of the sample table 5 and close to the edge area of the edge step-shaped groove 5-3, and the four strip-shaped grooves 12 are distributed along the four sides of the through hole;
the arc-shaped matching part 7-6 is provided with a positioning hole 13, and screws are arranged in the strip-shaped groove 12 and the positioning hole 13 in a penetrating way.
In this embodiment, the first opening 5-1 and the second opening 5-2 are provided on the sample stage 5 to give way to the two base ears 3-2, so that the base ears 3-2 are effectively accommodated in the process of turning the sample stage 5 180 ° counterclockwise.
In this embodiment, the length of the limiting groove 3-3 and the lengths of the first limiting block 6-4 and the second limiting block 6-5 are the same, so as to accommodate the first limiting block 6-4 and the second limiting block 6-5.
In the embodiment, an included angle between the first limiting block 6-4 and the second limiting block 6-5 is set to be 180 degrees, and after the sample table 5 is turned clockwise for 180 degrees to reset, the first limiting block 6-4 is inserted into the limiting groove 3-3, so that the sample table 5 is ensured to be reset in place, and the top surface of the sample table 5 is ensured to be parallel to the top surface of the slide rail seat 1; in addition, after the sample stage 5 is turned 180 degrees anticlockwise, the second limiting block 6-5 is inserted into the limiting groove 3-3, so that the sample stage 5 is turned 180 degrees anticlockwise in place, the sample stage 5 can be supported, and the electronic probe sheet is convenient to install.
In this embodiment, the left kidney-shaped through hole 3-4 and the right kidney-shaped through hole 3-5 are provided, so that the connecting shaft 4 slides along the left kidney-shaped through hole 3-4 and the right kidney-shaped through hole 3-5, so that the connecting shaft 4 drives the sleeve 6-3 to move close to or away from the limit groove 3-3, and in the process that the sleeve 6-3 moves close to the limit groove 3-3, the first limit block 6-4 or the second limit block 6-5 is inserted into the limit groove 3-3, and the outer side wall of the sleeve 6-3 is attached to the side surface of the rectangular base body 3-1, so that the limit is realized.
In this embodiment, a plurality of tightening holes 8-5 are provided at the bottom of the transverse plate 8, and the tightening holes 8-5 and the first accommodating groove 8-3 are communicated with the second accommodating groove 8-4, so as to adapt to the small difference in thickness of the electronic probe sheet, and by installing bolts in the tightening holes 8-5, the bottom of the electronic probe sheet is tightened, so that the test surface of the electronic probe sheet is upward and the top is flush.
In this embodiment, during actual use, the arc-shaped matching portion 7-6 is provided, so as to facilitate sliding along the first sliding groove 7-1, the second sliding groove 7-2, the third sliding groove 8-1 and the fourth sliding groove 8-2, and reduce the thicknesses of the ends of the vertical plate 7 and the horizontal plate 8, so that the tops of the sample table 5, the vertical plate 7 and the horizontal plate 8 are flush, and the flatness of the overall top surface is improved.
In this embodiment, it should be noted that, the edge stepped groove 5-3, the first accommodating groove 8-3, the first middle stepped groove 7-3 and the top surface of the second middle stepped groove 7-4 are turned clockwise by 180 degrees relative to the sample stage 5 to reset, so as to ensure that the test surface of the electronic probe sheet faces upwards and the top is flush, i.e. the test surface of the electronic probe sheet is parallel to the slide rail seat 1.
In this embodiment, it should be noted that the first sliding groove 7-1, the second sliding groove 7-2, the third sliding groove 8-1 and the fourth sliding groove 8-2 are denoted as sliding grooves, the length of the bar-shaped groove 12 is smaller than the length of the sliding groove, the width of the bar-shaped groove 12 is smaller than the depth of the sliding groove, and the center of the positioning hole 13 is arranged along the width center line of the bar-shaped groove 12.
In this embodiment, it should be noted that, the first middle step-shaped groove 7-3 and the second middle step-shaped groove 7-4 each include a middle end step-shaped groove disposed between one side of the sliding hole 7-5 and an end of the vertical plate 7, and a middle step-shaped groove disposed between the two sliding holes 7-5, so as to realize partial installation of the electronic probe sheet.
In this embodiment, the middle pressing piece includes two middle end pressing pieces respectively arranged between one side of the sliding hole 7-5 and the end of the longitudinal plate 7, and a middle pressing piece arranged between the two sliding holes 7-5.
In this embodiment, it should be noted that, in actual use, the top of the rectangular base 3-1 is provided with a yielding groove to adapt to the bottom of the electronic probe sheet.
In this embodiment, the receiving chamber 3-6 is provided not only for receiving the sleeve 6-3 but also for facilitating the turning of the sample stage 5.
In this embodiment, the end of the connecting shaft 4 extending out of the base 3 is provided with a lock nut 14.
As shown in fig. 10, a method for using an electronic probe sheet sample stage includes the following steps:
step one, anticlockwise overturning of a sample table:
step 101, removing the lock nut 14, operating the connecting shaft 4 to slide along the left kidney-shaped through hole 3-4 and the right kidney-shaped through hole 3-5 until the first limiting block 6-4 moves out of the limiting groove 3-3, and manually operating the sample table 5 to turn over 180 degrees anticlockwise around the connecting shaft 4;
step 102, operating the connecting shaft 4 to reversely slide near the left kidney-shaped through hole 3-4 and the right kidney-shaped through hole 3-5 until the second limiting block 6-5 moves into the limiting groove 3-3, and finishing the anticlockwise 180-degree overturning of the sample table 5;
step two, mounting an electronic probe sheet:
step 201, the adjusting vertical plate 7 slides along the first sliding groove 7-1 and the second sliding groove 7-2, and the adjusting transverse plate 8 slides along the third sliding groove 8-1 and the fourth sliding groove 8-2;
step 202, when the electronic probe sheet is installed in each first installation area formed by the first middle step-shaped groove 7-3, the edge step-shaped groove 5-3 and the first accommodating groove 8-3, limiting and fixing are carried out through the first accommodating groove 8-3 and the three pressing sheets 10;
when the electronic probe sheet is arranged in each second installation area formed by the second middle step-shaped groove 7-4, the edge step-shaped groove 5-3 and the first accommodating groove 8-3, limiting and fixing are carried out through the first accommodating groove 8-3 and the three pressing sheets 10;
when the electronic probe sheet is mounted in the edge stepped groove 5-3, the second receiving groove 8-4 in one of the cross plates 8 and the second receiving groove 8-4 in the other cross plate 8 to form respective intermediate mounting areas, the fixing is performed by the first receiving groove 8-3 and the second receiving groove 8-4 and the two pressing pieces 10; wherein, the longitudinal plate 7 and the transverse plate 8 are adjusted in place, and screws are penetrated in the strip-shaped grooves 12 and the positioning holes 13 so as to position the longitudinal plate 7 and the transverse plate 8;
step three, clockwise turning and resetting of the sample table:
step 301, operating the connecting shaft 4 to slide along the left kidney-shaped through hole 3-4 and the right kidney-shaped through hole 3-5 until the second limiting block 6-5 moves out of the limiting groove 3-3, and manually operating the sample stage 5 to turn over 180 degrees clockwise around the connecting shaft 4;
and 302, operating the connecting shaft 4 to reversely slide along the left kidney-shaped through hole 3-4 and the right kidney-shaped through hole 3-5 until the first limiting block 6-4 moves into the limiting groove 3-3, and completing clockwise turning and 180-degree resetting of the sample stage 5 so that the test surface of the electronic probe sheet faces upwards and the top of the electronic probe sheet is flush.
In this embodiment, screws are inserted into the bar grooves 12 and the positioning holes 13 until the screws contact the side walls of the sliding grooves, so that the longitudinal plates 7 and the transverse plates 8 are fixedly positioned.
In summary, the invention has simple structure and reasonable design, the test surface of the electronic probe sheet is downward when the electronic probe sheet is installed at the bottom of the sample table by the overturning of the sample table, the test surface of the electronic probe sheet is prevented from being polluted by contact of a tester, the test surface of the electronic probe sheet after overturning is upward and the top is flush, frequent focusing of the sample table in the test process can be reduced, the test efficiency and the test precision are improved, the invention can effectively adapt to placement of electronic probe sheets with different sizes, the installation is stable and firm, and the application range is wide.
The foregoing description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and any simple modification, variation and equivalent structural changes made to the above embodiment according to the technical substance of the present invention still fall within the scope of the technical solution of the present invention.
Claims (6)
1. An electronic probe sheet sample stage, characterized in that: the device comprises a slide rail seat (1), a vertical plate (2) arranged on the slide rail seat (1), a base (3) arranged on the vertical plate (2) and a sample table (5) arranged on the base (3) and parallel to the top of the slide rail seat (1);
the bottom of the sample table (5) is provided with a connecting part (6) matched with the base (3) and a sliding part capable of sliding along the longitudinal direction and the transverse direction of the sample table (5), the connecting part (6) comprises a sleeve (6-3) arranged at the bottom of the sample table (5) and extending into the base (3) and a connecting shaft (4) penetrating through the sleeve (6-3), two ends of the connecting shaft (4) extending out of the sleeve (6-3) penetrate through the base (3), the top of the base (3) is flush with the top of the sleeve (6-3), the sample table (5) can rotate around the connecting shaft (4), two limiting blocks which are symmetrically distributed are arranged on the sleeve (6-3), limiting grooves (3-3) matched with the limiting blocks are formed in the base (3), and the connecting shaft (4) can drive the sleeve (6-3) to be close to or far away from the limiting grooves (3-3);
the sliding component comprises a longitudinal plate (7) capable of sliding transversely along the sample table (5) and two transverse plates (8) which are arranged in the longitudinal plate (7) in a penetrating manner and can slide longitudinally along the sample table (5);
the base (3) comprises a rectangular base body (3-1) and two base body lugs (3-2) symmetrically arranged on the rectangular base body (3-1), wherein the two base body lugs (3-2) and the rectangular base body (3-1) enclose a containing cavity (3-6) for installing a sleeve (6-3), the rectangular base body (3-1) and the two base body lugs (3-2) enclose a U-shaped structure, the limiting groove (3-3) is positioned in the rectangular base body (3-1), the length of the limiting groove (3-3) is smaller than the interval between the two base body lugs (3-2), and two ends of the connecting shaft (4) extending out of the sleeve (6-3) penetrate through the base body lugs (3-2); the sample table (5) is provided with a first opening part (5-1) and a second opening part (5-2);
the two seat ears (3-2) are a left seat ear and a right seat ear respectively, a left waist-shaped through hole (3-4) is arranged in the left seat ear, a right waist-shaped through hole (3-5) is arranged in the right seat ear, the connecting shaft (4) penetrates through the two ends of the sleeve (6-3) and penetrates through the left waist-shaped through hole (3-4) and the right waist-shaped through hole (3-5) respectively, and the connecting shaft (4) can slide along the left waist-shaped through hole (3-4) and the right waist-shaped through hole (3-5) so that the connecting shaft (4) drives the sleeve (6-3) to move close to or far away from the limiting groove (3-3);
the bottom of the sample table (5) is provided with a left connecting lug (6-1) and a right connecting lug (6-2), the sleeve (6-3) is arranged between the left connecting lug (6-1) and the right connecting lug (6-2), the left connecting lug (6-1) and the right connecting lug (6-2) are both positioned in the accommodating cavity (3-6), the outer side wall of the left connecting lug (6-1) is attached to the inner side wall of one seat body lug (3-2), and the outer side wall of the right connecting lug (6-2) is attached to the inner side wall of the other seat body lug (3-2);
one end of the connecting shaft (4) extending out of the sleeve (6-3) sequentially penetrates through the left waist-shaped through holes (3-4) in the left connecting lug (6-1) and the base (3), and the other end of the connecting shaft (4) extending out of the sleeve (6-3) sequentially penetrates through the right waist-shaped through holes (3-5) in the right connecting lug (6-2) and the base (3);
the two limiting blocks are a first limiting block (6-4) and a second limiting block (6-5) respectively, an included angle between the first limiting block (6-4) and the second limiting block (6-5) is 180 degrees, the lengths of the first limiting block (6-4) and the second limiting block (6-5) are smaller than those of the sleeve (6-3), the first limiting block (6-4) or the second limiting block (6-5) can be embedded into the limiting groove (3-3), and the groove depth of the limiting groove (3-3) and the width of the first limiting block (6-4) are matched with those of the second limiting block (6-5).
2. An electronic probe wafer sample stage according to claim 1, wherein: the sample table (5) is a rectangular table top, a through hole is formed in the sample table (5), the through hole is divided into a plurality of mounting areas (9) by the longitudinal plate (7) and the transverse plate (8), and an edge step-shaped groove (5-3) is formed in the bottom surface of the sample table (5) close to the edge area of the through hole;
the sample table is characterized in that a first sliding groove (7-1) for enabling one end of the vertical plate (7) to extend into and slide, a second sliding groove (7-2) for enabling the other end of the vertical plate (7) to extend into and slide, a third sliding groove (8-1) for enabling one ends of the two transverse plates (8) to extend into and slide, and a fourth sliding groove (8-2) for enabling the other ends of the two transverse plates (8) to extend into and slide are arranged on the bottom surface of the sample table (5), the third sliding groove (8-1) and the fourth sliding groove (8-2) are symmetrically arranged, and the first sliding groove (7-1), the third sliding groove (8-1), the second sliding groove (7-2) and the fourth sliding groove (8-2) are arranged clockwise along the through hole.
3. An electronic probe wafer sample stage according to claim 2, wherein: two sliding holes (7-5) for moving the two transverse plates (8) are formed in the longitudinal plate (7), and the length direction of the sliding holes (7-5) is distributed along the length direction of the longitudinal plate (7);
the two opposite sides of the transverse plate (8) are provided with a first accommodating groove (8-3) and a second accommodating groove (8-4) which are embedded by an electronic probe sheet, the first accommodating groove (8-3) and the second accommodating groove (8-4) are distributed along the length direction of the transverse plate (8), the bottom edge of the longitudinal plate (7) is symmetrically provided with a first middle step-shaped groove (7-3) and a second middle step-shaped groove (7-4), and the top surfaces of the edge step-shaped groove (5-3), the first accommodating groove (8-3), the first middle step-shaped groove (7-3) and the second middle step-shaped groove (7-4) are flush;
the first middle step-shaped groove (7-3), the edge step-shaped groove (5-3) and the first accommodating groove (8-3) form first installation areas, and the second middle step-shaped groove (7-4), the edge step-shaped groove (5-3) and the first accommodating groove (8-3) form second installation areas; the edge stepped groove (5-3), the second receiving groove (8-4) of one cross plate (8) and the second receiving groove (8-4) of the other cross plate (8) form respective intermediate mounting areas.
4. An electronic probe wafer sample stage according to claim 2 or 3, characterized in that: be provided with a plurality of middle preformings on vertical board (7), sample platform (5) bottom surface is close to be provided with a plurality of circumference preformings on the marginal zone of marginal step recess (5-3), middle preforming with the structure of circumference preforming is the same, just middle preforming with circumference preforming all includes preforming (10) that fix the electron probe thin slice of placing on each installation zone (9), be provided with regulation hole (10-1) on preforming (10), regulation hole (10-1) are waist shape hole, preforming (10) are installed on vertical board (7) and sample platform (5) through screw (11).
5. An electronic probe wafer sample stage according to claim 2, wherein: the lengths of the first sliding groove (7-1) and the second sliding groove (7-2) are smaller than the transverse side length of the through hole, the lengths of the third sliding groove (8-1) and the fourth sliding groove (8-2) are smaller than the longitudinal side length of the through hole, the end faces of the longitudinal plate (7) and the transverse plate (8) are arc-shaped matching parts (7-6), and the first sliding groove (7-1), the second sliding groove (7-2), the third sliding groove (8-1) and the fourth sliding groove (8-2) are arc-shaped grooves matched with the arc-shaped matching parts (7-6);
four strip-shaped grooves (12) are formed in the bottom surface of the sample table (5) and close to the edge area of the edge step-shaped groove (5-3), and the four strip-shaped grooves (12) are distributed along the four edges of the through hole;
the arc-shaped matching part (7-6) is provided with a positioning hole (13), and screws are arranged in the strip-shaped groove (12) and the positioning hole (13) in a penetrating mode.
6. A method of using the electronic probe sheet sample stage of claim 3, comprising the steps of:
step one, anticlockwise overturning of a sample table:
step 101, removing the lock nut (14), operating the connecting shaft (4) to slide along the left kidney-shaped through hole (3-4) and the right kidney-shaped through hole (3-5) until the first limiting block (6-4) moves out of the limiting groove (3-3), and manually operating the sample table (5) to turn over 180 degrees anticlockwise around the connecting shaft (4);
102, operating the connecting shaft (4) to reversely slide near the left kidney-shaped through hole (3-4) and the right kidney-shaped through hole (3-5) until the second limiting block (6-5) moves into the limiting groove (3-3), and completing 180-degree anticlockwise overturning of the sample table (5);
step two, mounting an electronic probe sheet:
step 201, the adjusting vertical plate (7) slides along the first sliding groove (7-1) and the second sliding groove (7-2), and the adjusting horizontal plate (8) slides along the third sliding groove (8-1) and the fourth sliding groove (8-2);
202, when an electronic probe sheet is installed in each first installation area formed by a first middle step-shaped groove (7-3), an edge step-shaped groove (5-3) and a first accommodating groove (8-3), limiting and fixing are carried out through the first accommodating groove (8-3) and three pressing sheets (10);
when the electronic probe sheet is arranged in each second installation area formed by the second middle step-shaped groove (7-4), the edge step-shaped groove (5-3) and the first accommodating groove (8-3), limiting and fixing are carried out through the first accommodating groove (8-3) and the three pressing sheets (10);
when the electronic probe sheet is mounted in the edge step-shaped groove (5-3), the second accommodating groove (8-4) in one transverse plate (8) and the second accommodating groove (8-4) in the other transverse plate (8) to form respective middle mounting areas, the electronic probe sheet is fixed through the first accommodating groove (8-3) and the second accommodating groove (8-4) and the two pressing sheets (10); wherein, the longitudinal plate (7) and the transverse plate (8) are adjusted in place, and screws are arranged in the strip-shaped grooves (12) and the positioning holes (13) in a penetrating way so as to position the longitudinal plate (7) and the transverse plate (8);
step three, clockwise turning and resetting of the sample table:
step 301, operating the connecting shaft (4) to slide along the left kidney-shaped through hole (3-4) and the right kidney-shaped through hole (3-5) until the second limiting block (6-5) moves out of the limiting groove (3-3), and manually operating the sample table (5) to turn over 180 degrees clockwise around the connecting shaft (4);
and 302, operating the connecting shaft (4) to reversely slide along the left kidney-shaped through hole (3-4) and the right kidney-shaped through hole (3-5) until the first limiting block (6-4) moves into the limiting groove (3-3), and completing clockwise overturning and 180-degree resetting of the sample stage (5) so that the test surface of the electronic probe sheet faces upwards and the top of the electronic probe sheet is flush.
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