CN113063340A - Inductance type displacement sensor - Google Patents
Inductance type displacement sensor Download PDFInfo
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- CN113063340A CN113063340A CN202110344276.1A CN202110344276A CN113063340A CN 113063340 A CN113063340 A CN 113063340A CN 202110344276 A CN202110344276 A CN 202110344276A CN 113063340 A CN113063340 A CN 113063340A
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 122
- 230000001939 inductive effect Effects 0.000 claims abstract description 35
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/001—Constructional details of gauge heads
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- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention provides an inductive displacement sensor, and relates to the technical field of displacement sensors. The application provides an inductive displacement sensor, which comprises a PCB and at least one sensor coil; the PCB board comprises a circuit layer and at least one shielding layer; the circuit layer is provided with a power circuit and a displacement signal circuit, each sensor coil is electrically connected with the power circuit, and each sensor coil is electrically connected with the displacement signal circuit; the problem of take place wiring mistake easily under the prior art, because of ageing contact takes place the short circuit between the wire is solved, the inaccurate problem of circuit layer received external signal interference transmission displacement information has been solved simultaneously.
Description
Technical Field
The invention relates to the field of displacement sensors, in particular to an inductive displacement sensor.
Background
The magnetic suspension bearing suspends a rotor in the air by utilizing the action of magnetic force, so that the rotor is not in mechanical contact with a stator, and the whole rotor is suspended by utilizing the nearly unloaded shaft core to prop towards the direction of a reverse magnetic suspension line.
The existing inductive displacement sensor mainly comprises three parts, namely a sensor coil, a power supply lead and a displacement signal lead, the displacement sensor comprises a plurality of sensor coils, each sensor coil is connected with a power supply through a lead, each sensor coil can be connected with the power supply through an independent lead, or after a plurality of sensor coils are connected in series or in parallel through leads to form a sensor coil group, the sensor coil group is connected with the power supply through a lead.
The displacement signal detected by the sensor coil uses a corresponding displacement signal lead to lead out current, wherein the polarity of the sensor coil is consistent with the design requirement when the inductive displacement sensor is installed, but the power supply lead and the sensor coil are frequently in wrong lap joint due to wrong wiring during welding in actual operation, so that the polarity between the sensor coils is not in line with the requirement; and the inductive displacement sensor is internally provided with a power supply lead and a displacement signal lead, multiple wires can be contacted with each other due to installation errors or damaged coil skins, the sensor is short-circuited, the original function of the sensor is lost, and meanwhile, a magnetic field of an external environment can interfere with current in a circuit, so that the fed-back displacement signal is inaccurate, and the measurement result is influenced.
Disclosure of Invention
The invention aims to provide an inductive displacement sensor to solve the problems of excessive lead wires, complex wiring, short circuit between lead wires and inaccurate displacement information caused by external signal interference on a circuit.
The invention provides an inductive displacement sensor, which comprises a PCB (printed circuit board) and at least one sensor coil;
the PCB board comprises a circuit layer and at least one shielding layer, wherein the circuit layer is provided with a first surface and a second surface which are opposite; the first surface is covered with at least one shielding layer, and/or the second surface is covered with at least one shielding layer;
the circuit layer is provided with a power circuit and a displacement signal circuit, each sensor coil is electrically connected with the power circuit, and each sensor coil is electrically connected with the displacement signal circuit.
Furthermore, the power circuit comprises at least one branch, each branch is connected with at least one sensor coil, and each branch is connected with one displacement signal circuit.
Further, the sensor coil includes a first conductive mechanism in communication with the power circuit.
Further, the sensor coil further comprises a coil framework and an enameled wire, the enameled wire is wound on the coil framework, and the first conductive mechanism is connected with the enameled wire.
Further, the first conducting mechanism comprises a first binding post and a second binding post;
the first binding post and the second binding post are installed on the coil skeleton, the enameled wire is provided with a first end and a second end, the first end is connected with the first binding post, and the second end is connected with the second binding post.
Furthermore, a second conductive mechanism electrically connected with the power circuit is arranged on the PCB, and the sensor coil is connected with the power circuit through the matching of the first conductive structure and the second conductive structure.
Further, the second conductive structure comprises a first jack and a second jack, the first terminal is matched with the first jack, and the second terminal is matched with the second jack.
Further, a wire holder is installed on the PCB board, and the wire holder is respectively connected with the power circuit and the displacement signal circuit.
Furthermore, the wire holder is provided with a wiring end, the wiring end is connected with a power supply outgoing line and a displacement signal outgoing line, the power supply outgoing line is communicated with an external power supply, and the displacement signal outgoing line is communicated with an external signal receiver; the power supply outgoing line is connected with the power supply circuit through the wire holder, and the displacement signal outgoing line is connected with the displacement signal circuit through the wire holder.
Further, the inductive displacement sensor further comprises a laminated stack, and the laminated stack is connected with the PCB through the sensor coil.
The inductive displacement sensor provided by the invention can produce the following beneficial effects:
according to the inductance type displacement sensor, on one hand, the PCB is provided with the power circuit to electrify the sensor coil and enter a working state, and the lead is replaced by the printed circuit with higher durability, so that the number of leads in the displacement sensor is reduced, the connection and installation times are reduced, and the production efficiency is improved; on the other hand, the displacement signal circuit is also integrated on the PCB, the power supply circuit and the displacement signal circuit are not intersected with each other, the reliability is better than that of a conducting wire, the insulating layer can be prevented from being damaged and contacted to cause short circuit, meanwhile, a shielding layer with electromagnetic signal shielding capacity is covered on the circuit, external signals can be prevented from invading into a circuit layer of the PCB, and displacement information obtained by the displacement sensor is more accurate.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a front view of a PCB circuit board provided by an embodiment of the present invention;
FIG. 2 is an enlarged view of a sensor bobbin provided by an embodiment of the present invention;
fig. 3 is a mounting diagram of an inductive displacement sensor according to an embodiment of the present invention.
Icon: 1-a PCB board; 2-a sensor coil; 3-a wire holder; 4-a first receptacle; 5-a displacement signal circuit; 6-coil framework; 7-a power supply circuit; 8-a second receptacle; 9-lamination group; 10-power supply outlet; 11-enameled wire; 12-a first terminal post; 13-a second terminal; 14-a terminal; 15-displacement signal lead-out wire; 16-a circuit layer; 17-shielding layer.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it is obvious that the described embodiments are some, not all embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
As shown in fig. 1 to 3, the present invention provides an inductive displacement sensor, comprising a PCB board 1 and at least one sensor coil 2;
the PCB board 1 comprises a circuit layer 16 and at least one shielding layer 17, wherein the circuit layer 16 is provided with a first surface and a second surface which are opposite; the first surface is covered with at least one shielding layer 17, and/or the second surface is covered with at least one shielding layer 17;
the shielding layer 17 may be disposed on the circuit layer 16 in multiple layers, and the first surface of the circuit layer 16 may be covered with one or more shielding layers 17, accordingly, when the number of the shielding layers 17 is increased, the ability of external electromagnetic signals entering the circuit area of the circuit layer 16 to interfere with displacement information in the displacement circuit is worse, so that the larger the number of the shielding layers 17 is, the stronger the anti-interference ability is, and similarly, the second surface follows the above rule, and in addition, the first surface and the second surface may also be covered with the shielding layer 17 at the same time, or only the first surface or the second surface may be covered with the shielding layer 17 alone.
The shielding layer 17 is made of copper, the circuit layer 16 is made of a conductive circuit, the shielding layer 17 is the PCB 1 with a complete copper surface and does not undergo circuit etching, and the circuit layer 16 is etched on the basis of the shielding layer 17 to form a circuit. Copper has good electric conductivity on one hand, and on the other hand, copper as a common metal external electromagnetic interference signal does not penetrate through a copper plate, so that copper is used as a material of the shielding layer.
The circuit layer 16 is provided with a power circuit 7 and a displacement signal circuit 5, each sensor coil 2 is electrically connected with the power circuit 7, and each sensor coil 2 is electrically connected with the displacement signal circuit 5.
Meanwhile, a displacement signal circuit 5 is printed on the PCB 1 in the structure and is responsible for exporting displacement information generated by the rotor in the magnetic suspension bearing and received by the sensor coil 2, the sensor coil 2 can convert the displacement information into displacement information current, and the displacement information current is exported to an external signal receiver.
It should be particularly noted that, when the power circuit 7 is designed, the PCB 1 in the inductive displacement sensor needs to connect all installed sensor coils 2 with the power circuit 7, and if a leakage occurs, the measured displacement signal current will be inaccurate, and in addition, the displacement signal circuit 5 designed on the PCB 1 must also transmit the rotor displacement information measured by all sensor coils 2 to an external signal receiving device, so as to ensure the accuracy of the displacement information.
In the prior art, the power lines between the sensor coils 2 are connected by using wires, the connection mode is generally welding, aging and fracture can occur when welding interfaces are exposed for a long time, and meanwhile, the production efficiency is slowed down as the number of wires is too large and the number of times of manually connecting the wires is increased; after the PCB board 1 is used, the problems can be avoided because the PCB board 1 is integrally etched and formed during production.
It should be noted that the solution mentioned in the above invention includes both one sensor coil 2 and a plurality of sensor coils 2.
As shown in fig. 1 to 3, the present invention provides an inductive displacement sensor, wherein the power circuit 7 includes at least one branch, each branch is connected with at least one sensor coil 2, and each branch is connected with one displacement signal circuit 5.
What need be clear and definite when designing PCB board 1 circuit is that in order to measure the displacement volume of rotor from each angle, the cover has circular ring type PCB board 1 around the rotor, and PCB board 1 is provided with different power supply circuit 7 branches, installs sensor coil 2 on the different power supply branches, and sensor coil 2's quantity is more, and the measuring information who obtains is more accurate.
And each branch of the power circuit 7 is connected with a displacement signal circuit 5, so that displacement information measured by the sensor coil 2 on each branch of the power circuit 7 can be transmitted to an external signal receiver by displacement signal current.
It should be noted that the power supply branch according to the above invention includes a branch connected in series with the power supply, and also includes a plurality of branches connected in parallel or in series-parallel on the PCB board 1.
As shown in fig. 1-3, the present invention provides an inductive displacement sensor wherein the sensor coil 2 comprises a first conductive means in communication with the power circuit 7.
The first conductive mechanism is electrically connected with the power circuit 7 on the PCB board 1, and the reliability of welding connection is low in the prior art, so that the structural strength and the reliability are greatly improved when a rigid structure is used for connection.
As shown in fig. 1 to 3, the present invention provides an inductive displacement sensor, wherein the sensor coil 2 further includes a coil skeleton 6 and an enameled wire 11, the enameled wire 11 is wound on the coil skeleton 6, and the first conductive mechanism is connected to the enameled wire 11.
The terminal end of enameled wire 11 generally adopts welding or winding mode to connect on first electrically conductive mechanism, is connected the terminal end of enameled wire 11 directly with the power wire under prior art, and above-mentioned two kinds of wires generally adopt welded mode when connecting, and the wire makes displacement sensor inefficacy at last as a flexible construction probably splits under long-time abominable operating mode, and the utility model discloses with enameled wire 11 and first electrically conductive mechanism lug connection, first electrically conductive mechanism is the rigid structure, and the terminal end of enameled wire 11 can adopt multiple modes such as veneer, winding and welding to connect, additional strengthening's stability.
As shown in fig. 1 to 3, the present invention provides an inductive displacement sensor, wherein the first conductive mechanism includes a first terminal 12 and a second terminal 13;
the first binding post 12 and the second binding post 13 are installed on the bobbin 6, the enameled wire 11 has a first end and a second end, the first end is connected with the first binding post 12, and the second end is connected with the second binding post 13.
Since a wiring circuit introduced by the power circuit 7 needs a path of one input and one output, two binding posts are installed on the first conductive mechanism, one of the first binding post 12 and the second binding post 13 is responsible for current introduction, and the other is responsible for current derivation.
Correspondingly, two ends of the enameled wire 11 are respectively connected with the first binding post 12 and the second binding post 13, so that the current provided by the power circuit 7 flows through the sensor coil 2.
As shown in fig. 1 to fig. 3, the present invention provides an inductive displacement sensor, wherein a second conductive mechanism electrically connected to the power circuit 7 is disposed on the PCB 1, and the sensor coil 2 is connected to the power circuit 7 through the cooperation of the first conductive structure and the second conductive structure.
In the prior art, a plurality of welding points are generated when the power supply lead is connected with the sensor coil 2, and the exposed power supply lead is easy to age, so that the durability of the displacement sensor is greatly reduced.
According to the invention, the conductive paths of the sensor coil 2 and the PCB 1 are realized by using a rigid structure, the connection mode can be contact connection or plug-in connection, but the contact connection reliability is not high, the coil is easy to fall off, and the plug-in connection can fix the sensor coil 2 on the PCB 1.
As shown in fig. 1 to 3, the present invention provides an inductive displacement sensor, wherein the second conductive structure comprises a first jack 4 and a second jack 8, the first terminal 12 is matched with the first jack 4, and the second terminal 13 is matched with the second jack 8.
The cooperation purpose of using jack and terminal is convenient fixed sensor coil 2, makes its sensor coil 2 be difficult for rocking, and consequently the cartridge formula cooperation of jack and terminal will be superior to the mode that contact is connected or welded type is connected, when sensor coil 2 and the firm electricity of PCB board 1 are connected, has also promoted the reliability under abominable operating mode.
It should be noted that, in order to facilitate the insertion of the sensor coil 2 into the PCB 1 and make the shape of the terminal and the socket identical, the shape adopted by the present invention is circular, but other shapes may be used to achieve the insertion effect, such as square or triangle, and is not limited to circular.
As shown in fig. 1 to 3, the present invention provides an inductive displacement sensor, wherein a wire holder 3 is mounted on the PCB board 1, and the wire holder 3 is connected to the power circuit 7 and the displacement signal circuit 5 respectively.
The inside joint that is provided with of connection terminal 3, the one end that connects is connected in the wire with on power supply circuit 7 and the displacement signal circuit 5 respectively, and simultaneously, the other end that connects can dock with power supply lead and the displacement signal lead wire on the external terminal respectively, be provided with the buckle on the wiring end 14, be provided with the screens on the connection terminal 3, when carrying out the butt joint of wiring end 14 and connection terminal 3, fix through the cooperation of buckle with the screens, the lead wire of 14 insides of wiring end simultaneously realizes the electricity with the joint on the connection terminal 3 and is connected, and switch on with displacement signal circuit 5 and power supply circuit 7 on the PCB board 1 respectively.
The last general welding of ordinary displacement sensor has the pad, through the pad with outside wire and on-board circuit intercommunication, but this kind of connected mode reduces production efficiency easily when mass production, so the pad on the PCB board 1 of this application becomes wire holder 3, wire holder 3 with power supply circuit 7 with displacement signal circuit 5 connects and communicates respectively, and is provided with buckle and the cooperation of wiring end 14 on the wire holder 3.
The purpose of the wire holder 3 is to lead out the printed circuit in the PCB 1 to the external space, which is convenient for connecting with the power supply on the one hand and for conducting the displacement signal current generated by the sensor coil 2 to the external signal receiver on the other hand.
As shown in fig. 1 to 3, the present invention provides an inductive displacement sensor, wherein a terminal 14 is mounted on the terminal base 3, a power outlet 10 and a displacement signal outlet 15 are connected to the terminal 14, the power outlet 10 is connected to an external power source, and the displacement signal outlet 15 is connected to an external signal receiver; the power supply outgoing line 10 is connected with the power supply circuit 7 through the wire holder 3, and the displacement signal outgoing line 15 is connected with the displacement signal circuit 5 through the wire holder 3.
The application has cancelled whole wire design among the inductance type displacement sensor that provides, the lead-out wire of above-mentioned pad is replaced for wire holder 3, replace traditional pin connection through wire holder 3 and the cooperation of wiring end 14, can assemble wiring end 14 and the outside device of being connected with wiring end 14 in advance simultaneously, directly carry out once butt joint with wiring end 14 and the wiring holder 3 on the PCB when using, when other equipment of needs are connected with PCB board 1 simultaneously, only need extract wiring end 14 plug, need not weld again, only need be equipped with the same wiring end 14, make inductance type displacement sensor commonality stronger can dock different equipment like this, the flexibility is stronger.
As shown in fig. 1 to 3, the present invention provides an inductive displacement sensor wherein the inductive displacement sensor further comprises a laminated stack 9, the laminated stack 9 being connected to the PCB board 1 through the sensor coil 2.
According to the invention, the structure formed by the PCB 1 and the sensor coil 2 is arranged on the laminated sheet group 9, the laminated sheet group 9 is provided with an installation plug for being inserted and fixed with an interface on a framework of the sensor coil 2, and as the sensor coil 2 is inserted and fixed with the PCB 1 to form a stable structure, the whole structure is stable after the sensor coil 2 is fixed with the laminated sheet group 9.
It should be noted that the means for fixing the PCB 1 and the sensor coil 2 includes, but is not limited to, the lamination stack 9, and may be other structures such as brackets capable of cooperating with the sensor frame.
The invention provides an inductive displacement sensor.A sensor coil 2 is inserted on a PCB (printed Circuit Board) 1; the PCB 1 is also printed with a power circuit 7 and a displacement signal circuit 5, the PCB 1 is also provided with a wire holder 3, the wire holder 3 is connected with a terminal 14, the terminal 14 is connected with a power lead-out wire 10 and a displacement signal lead-out wire 15, wherein the power lead-out wire 10 is connected with an external power supply, the power lead-out wire 10 connects a power current into the power circuit 7 on the PCB 1, each sensor coil 2 on the power circuit 7 is provided with a first jack 4, the first jack 4 is responsible for connecting the power current, a first binding post 12 is connected with the first jack 4 to lead the power current into an enameled wire 11 connected with the first binding post 12, so that the enameled wire 11 wound on the coil framework 6 is electrified to reach a working state, the current flows out to a second binding post 13 connected with the other end of the enameled wire 11, and then the current passes through the second jack 8 connected with the second binding post 13, the power supply current is led out to the power supply circuit 7 through the second jack 8, then the power supply current flows through other sensor coils 2, and finally the power supply current is led out to an external power supply through the power supply lead-out wire 10 to form a loop, and all the sensor coils 2 on the PCB 1 are electrified to achieve a working state. Meanwhile, the displacement signal circuit 5 is connected to each branch of the power supply circuit 7, in order to receive displacement signals generated by the magnetic bearing rotor and detected by all the sensor coils 2, the displacement signals form displacement currents with displacement information on the enameled wires 11, the displacement currents are led out to the displacement signal outgoing line 15 through the displacement signal circuit 5, and finally the displacement currents are conducted to an external displacement signal receiver through the displacement signal outgoing line 15.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. An inductive displacement sensor, characterized by comprising a PCB board (1) and at least one sensor coil (2);
the PCB board (1) comprises a circuit layer (16) and at least one shielding layer (17), wherein the circuit layer (16) is provided with a first surface and a second surface which are opposite; the first surface is covered with at least one shielding layer (17), and/or the second surface is covered with at least one shielding layer (17);
the sensor is characterized in that a power circuit (7) and a displacement signal circuit (5) are arranged on the circuit layer (16), each sensor coil (2) is electrically connected with the power circuit (7), and each sensor coil (2) is electrically connected with the displacement signal circuit (5).
2. An inductive displacement sensor according to claim 1, characterized in that the power supply circuit (7) comprises at least one branch, to each of which at least one sensor coil (2) is connected, and to each of which one displacement signal circuit (5) is connected.
3. An inductive displacement sensor according to claim 1, characterized in that the sensor coil (2) comprises first conductive means, which communicate with the power supply circuit (7).
4. An inductive displacement sensor according to claim 3, characterized in that the sensor coil (2) further comprises a bobbin (6) and an enameled wire (11), the enameled wire (11) is wound around the bobbin (6), and the first conductive means is connected to the enameled wire (11).
5. An inductive displacement sensor according to claim 4, characterized in that the first conducting means comprise a first terminal stud (12) and a second terminal stud (13);
the first binding post (12) is installed with the second binding post (13) on the coil skeleton (6), the enameled wire (11) has a first end and a second end, the first end with first binding post (12) is connected, the second end with second binding post (13) is connected.
6. An inductive displacement sensor according to claim 5, characterized in that the PCB (1) is provided with a second conductive means electrically connected to the power circuit (7), and the sensor coil (2) is connected to the power circuit (7) by the cooperation of the first and second conductive means.
7. An inductive displacement sensor according to claim 6, characterized in that the second conductive structure comprises a first socket (4) and a second socket (8), the first terminal stud (12) cooperating with the first socket (4) and the second terminal stud (13) cooperating with the second socket (8).
8. An inductive displacement sensor according to claim 1, characterized in that the PCB board (1) is provided with wire holders (3), the wire holders (3) being connected to the power supply circuit (7) and the displacement signal circuit (5), respectively.
9. An inductive displacement sensor according to claim 8, characterized in that the connector base (3) is provided with a terminal (14), the terminal (14) is connected with a power supply lead (10) and a displacement signal lead (15), the power supply lead (10) is connected with an external power supply, and the displacement signal lead (15) is connected with an external signal receiver; the power supply outgoing line (10) is connected with the power supply circuit (7) through the wire holder (3), and the displacement signal outgoing line (15) is connected with the displacement signal circuit (5) through the wire holder (3).
10. An inductive displacement sensor according to claim 1, characterized in that the inductive displacement sensor further comprises a laminated stack (9), the laminated stack (9) being connected to the PCB board (1) by means of the sensor coil (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110344276.1A CN113063340A (en) | 2021-03-30 | 2021-03-30 | Inductance type displacement sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110344276.1A CN113063340A (en) | 2021-03-30 | 2021-03-30 | Inductance type displacement sensor |
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| CN113063340A true CN113063340A (en) | 2021-07-02 |
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| CN202110344276.1A Pending CN113063340A (en) | 2021-03-30 | 2021-03-30 | Inductance type displacement sensor |
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