CN111623700A - Magnetic suspension bearing inductance type displacement sensor - Google Patents
Magnetic suspension bearing inductance type displacement sensor Download PDFInfo
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- CN111623700A CN111623700A CN202010755730.8A CN202010755730A CN111623700A CN 111623700 A CN111623700 A CN 111623700A CN 202010755730 A CN202010755730 A CN 202010755730A CN 111623700 A CN111623700 A CN 111623700A
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
Abstract
The invention discloses an inductive displacement sensor of a magnetic suspension bearing, which comprises a first probe pair, a second probe pair and a third probe pair, wherein the first probe pair comprises a first probe group and a second probe group which are arranged along a first direction, the second probe pair comprises a third probe group and a fourth probe group which are arranged along a second direction, the third probe pair comprises a fifth probe group, a sixth probe group, a seventh probe group and an eighth probe group, and the first probe group, the fifth probe group, the third probe group, the sixth probe group, the second probe group, the seventh probe group, the fourth probe group and the eighth probe group are sequentially arranged along the circumferential direction of the magnetic suspension bearing and are uniformly distributed along the circumferential direction of the magnetic suspension bearing. The inductive displacement sensor realizes the integrated design of radial displacement detection and axial displacement detection of the magnetic suspension bearing, saves the installation space of the sensor, eliminates the interference among detection channels, and further can effectively improve the detection precision of the sensor.
Description
Technical Field
The invention relates to the technical field of magnetic suspension drum bearings, in particular to an inductive displacement sensor of a magnetic suspension bearing.
Background
The traditional rotary power machinery adopts a mechanical bearing for supporting, is limited by mechanical bearing friction and rotor vibration, can only operate at a low rotating speed, and has low power density and low efficiency. In industrial application of high rotating speed, high energy density and the like, a multi-stage speed increasing mechanism is required, so that the system is huge, the energy consumption is high, the reliability is poor, and the noise pollution and the oil pollution are serious.
The high-speed rotating power machine supported by the magnetic suspension bearing eliminates friction and wear, does not need lubrication, has the rotating speed of tens of thousands of revolutions per minute, has the advantages of large power density, small volume, light weight, quick response and the like, can effectively improve the system efficiency, and has obvious energy-saving effect. The rotor displacement sensor, which is a core component of the magnetic bearing system, directly determines the performance of the magnetic bearing system.
At present, the non-contact displacement sensors commonly used in magnetic suspension bearing systems mainly include eddy current sensors, capacitive sensors and inductive sensors. The excitation signal of the eddy current sensor is an alternating current signal of 500 kHz-20 MHz, and the offset of the rotor is obtained by detecting eddy current values at different positions. However, the signal magnitude depends on the material characteristics, the material defect is misjudged as a position offset, and the material defect is sensitive to electromagnetic interference, so the detection accuracy is low. The capacitance sensor converts capacitance between the surface of the rotor and the probe into a displacement signal through detection, the sensor is very sensitive to a medium between the shaft and the probe, dust and oil stains are interference sources, and the capacitance sensor is not suitable for being applied to industrial fields with complex working conditions. In addition, in the existing inductive sensor, the radial displacement detection and the axial displacement detection both adopt a discrete structure, so that the installation space is large, the detection precision is low, and the anti-interference capability is weak.
Disclosure of Invention
In order to solve the problems in the prior art, an inductive displacement sensor of a magnetic suspension bearing is provided to solve the problems of large installation space, low detection precision and weak anti-interference capability of the sensor in the related technology.
According to one aspect of the invention, an inductive displacement sensor of a magnetic suspension bearing is provided, the inductive displacement sensor comprises a sine wave generating circuit, an induction device and a detection circuit, wherein the sine wave generating circuit and the detection circuit are electrically connected with the induction device, the sine wave generating circuit is used for generating a sine signal and transmitting the sine signal to the induction device, the induction device is used for generating a modulation signal corresponding to the displacement of the magnetic suspension bearing when the magnetic suspension bearing displaces according to the sine signal, and the detection circuit is used for inducing the modulation signal and generating a detection signal corresponding to the displacement of the magnetic suspension bearing;
the sensing device comprises a first probe pair, a second probe pair and a third probe pair, wherein the first probe pair comprises a first probe group and a second probe group which are arranged along a first direction, the first probe group and the second probe group respectively comprise at least two first probes, the second probe pair comprises a third probe group and a fourth probe group which are arranged along a second direction, the third probe group and the fourth probe group respectively comprise at least two second probes, the third probe pair comprises a fifth probe group, a sixth probe group, a seventh probe group and an eighth probe group, the fifth probe group, the sixth probe group, the seventh probe group and the eighth probe group respectively comprise at least two third probes, the at least two third probes are arranged along a third direction, the third direction is the axial direction of the magnetic suspension bearing, and the first direction, the second direction and the third direction are the axial direction of the magnetic suspension bearing, The second direction is perpendicular to the third direction, and the first probe group, the fifth probe group, the third probe group, the sixth probe group, the second probe group, the seventh probe group, the fourth probe group and the eighth probe group are sequentially arranged along the circumferential direction of the magnetic suspension bearing and are uniformly distributed along the circumferential direction of the magnetic suspension bearing.
The first probe comprises a first stator winding and a first stator framework, and the first stator winding is fixedly connected with the first stator framework; and/or the presence of a gas in the gas,
the second probe comprises a second stator winding and a second stator framework, and the second stator winding is fixedly connected with the second stator framework; and/or the presence of a gas in the gas,
the third probe comprises a third stator winding and a third stator framework, and the third stator winding is fixedly connected with the third stator framework.
The first stator winding is connected with the first stator framework in a bonding mode through epoxy resin glue; and/or the presence of a gas in the gas,
the second stator winding is connected with the second stator framework in a bonding mode through epoxy resin glue; and/or the presence of a gas in the gas,
and the third stator winding is connected with the third stator framework in a bonding manner through epoxy resin glue.
The first stator framework comprises a first groove, and the first stator winding is wound in the first groove; and/or the presence of a gas in the gas,
the second stator framework comprises a second groove, and the second stator winding is wound in the second groove; and/or the presence of a gas in the gas,
the third stator framework comprises a third groove, and the third stator winding is wound in the third groove.
The induction device further comprises a stator iron core, the stator iron core is of a circular structure, and the first probe group, the second probe group, the third probe group, the fourth probe group, the fifth probe group, the sixth probe group, the seventh probe group and the eighth probe group are located on the inner side wall of the stator iron core.
The first probe comprises a first probe iron core, the first probe iron core is formed by inward protruding of the inner side wall of the stator iron core in the radial direction of the stator iron core, the first probe iron core is inserted into the first stator framework and in interference fit with the first stator framework, and the free end of the first probe iron core is exposed out of the inner side wall of the first stator framework; and/or the presence of a gas in the gas,
the second probe comprises a second probe iron core, the second probe iron core is formed by inward protruding of the inner side wall of the stator iron core in the radial direction of the stator iron core, the second probe iron core is inserted into the second stator framework and in interference fit with the second stator framework, and the free end of the second probe iron core is exposed out of the inner side wall of the second stator framework; and/or the presence of a gas in the gas,
the third probe comprises a third probe iron core, the third probe iron core is formed by inward protruding of the inner side wall of the stator iron core in the radial direction of the stator iron core, the third probe iron core is inserted into the third stator framework and in interference fit with the third stator framework, and the free end of the third probe iron core is exposed out of the inner side wall of the third stator framework.
The sine wave generating circuit comprises a sine wave oscillation generator and a signal amplifying circuit, and the sine wave oscillation generator is electrically connected with the sensing device through the signal amplifying circuit.
The detection circuit comprises a voltage frequency-selective amplification circuit.
The voltage frequency-selecting amplifying circuit comprises a band-pass filter, and the modulation signal enters the voltage frequency-selecting amplifying circuit through the band-pass filter.
The detection circuit further comprises a phase-sensitive detection circuit and a low-pass filter circuit, and the modulation signal sequentially passes through the voltage frequency-selective amplification circuit, the phase-sensitive detection circuit and the low-pass filter circuit to form a direct-current voltage signal corresponding to the displacement size and the moving direction of the magnetic suspension bearing.
The gas refrigeration system of the invention can realize the following beneficial effects: in the inductive displacement sensor of the magnetic suspension bearing, the plurality of probe groups are uniformly distributed along the circumferential direction of the magnetic suspension bearing, and the probes in the plurality of probe groups are connected with the sine wave generating circuit and the detection circuit, so that the integrated design of radial displacement detection and axial displacement detection of the magnetic suspension bearing is realized, the installation space of the sensor is saved, the interference among detection channels is eliminated, and the detection precision of the sensor can be effectively improved.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention. In the drawings, like reference numerals are used to indicate like elements. The drawings in the following description are directed to some, but not all embodiments of the invention. For a person skilled in the art, other figures can be derived from these figures without inventive effort.
FIG. 1 is a schematic diagram of an inductive displacement sensor of a magnetic suspension bearing according to an embodiment of the present application;
FIG. 2 is a schematic circuit diagram of a sine wave oscillation generating circuit of an inductive displacement sensor of a magnetic suspension bearing according to an embodiment of the present application;
FIG. 3 is a schematic circuit diagram of a voltage frequency-selective amplifier circuit of an inductive displacement sensor of a magnetic suspension bearing according to an embodiment of the present application;
FIG. 4 is a schematic circuit diagram of a phase sensitive detection circuit of an inductive displacement sensor of a magnetic suspension bearing according to an embodiment of the present application;
FIG. 5 is a schematic circuit diagram of a low pass filter circuit of an inductive displacement sensor of a magnetic suspension bearing according to an embodiment of the present application;
FIG. 6 is a schematic structural diagram of an inductive displacement sensor of a magnetic suspension bearing according to an embodiment of the present application.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. It should be noted that the embodiments and features of the embodiments in the present application may be arbitrarily combined with each other without conflict.
In the related art, in an inductive displacement sensor for detecting radial and axial displacements of a bearing, 5-100 kHz alternating current excitation signals are given to a stator winding to detect inductance values at different positions, and further position offset of a rotor is obtained. The inductance value of a low-frequency signal depends on air gap magnetic resistance, so that the signal frequency domain is low, but the anti-electromagnetic interference performance is excellent, the magnetic suspension bearing is suitable for a complex working condition production field, and the magnetic suspension bearing is the best non-contact detection mode. However, the radial displacement detection and the axial displacement detection of the existing inductive displacement sensor both adopt a discrete structure, so that the installation space is large, the detection precision is low, the anti-interference capability is weak, and the detection effect is not ideal.
The application provides a magnetic suspension bearing inductance type displacement sensor, through a plurality of probe groups of circumference equipartition along magnetic suspension bearing, and with the probe connection sinusoidal wave generating circuit and the detection circuitry in a plurality of above-mentioned probe groups, realized the radial displacement detection and the axial displacement detection integration design to magnetic suspension bearing, practiced thrift the installation space of sensor, eliminated the interference between each detection channel, and then can effectively improve the detection precision of sensor, realized the high accuracy non-contact detection to magnetic suspension bearing.
In an exemplary embodiment, an inductive displacement sensor for a magnetic suspension bearing is provided, and referring to fig. 1 to 5, the inductive displacement sensor includes a sine wave generating circuit, an induction device and a detection circuit, the sine wave generating circuit and the detection circuit are both electrically connected to the induction device, the sine wave generating circuit is configured to generate a sine signal and transmit the sine signal to the induction device, when the magnetic suspension bearing is displaced, the induction device generates a modulation signal corresponding to the displacement generated by the magnetic suspension bearing according to the sine signal and the displacement, and the detection circuit is configured to induce the modulation signal and generate a detection signal corresponding to the displacement generated by the magnetic suspension bearing. It should be noted that the above-mentioned sensing modulation signal includes not receiving the modulation signal, and directly generating a corresponding detection signal according to the modulation signal; the method also comprises receiving the modulation signal and then processing the modulation signal to obtain a corresponding detection signal. Specifically, the scheme of generating the detection signal according to the modulation signal generated by the sensing device can be directly implemented by the prior art, which is not described herein again.
In an example, referring to fig. 1, a sine wave generating circuit generates a sine signal, the sine signal is transmitted to an induction device to generate an excitation magnetic flux, when the radial displacement or the axial displacement of the magnetic suspension bearing changes, the inductance value at the corresponding position of the induction device is caused to relatively change, the induction device is further caused to output a voltage signal with amplitude being proportional to the displacement, frequency being the same as the frequency of the sine signal, and phase being corresponding to the displacement direction, and the voltage signal is induced and processed by a detection circuit, so that a direct current voltage signal corresponding to the displacement and the direction of the magnetic suspension bearing is finally obtained, and the displacement condition of the magnetic suspension bearing is judged through the direct current voltage signal.
The sensing device comprises a first probe pair, a second probe pair and a third probe pair, the first probe pair comprises a first probe group and a second probe group which are arranged along a first direction, the first probe group and the second probe group respectively comprise at least two first probes 11, the second probe pair comprises a third probe group and a fourth probe group which are arranged along a second direction, the third probe group and the fourth probe group respectively comprise at least two second probes 12, the third probe pair comprises a fifth probe group, a sixth probe group, a seventh probe group and an eighth probe group, the fifth probe group, the sixth probe group, the seventh probe group and the eighth probe group respectively comprise at least two third probes 13, the at least two third probes 13 are arranged along a third direction, the third direction is the axial direction of the magnetic suspension bearing, the first direction, the second direction and the third direction are mutually perpendicular, the first probe group, the fifth probe group and the third probe group are mutually perpendicular, The third probe group, the sixth probe group, the second probe group, the seventh probe group, the fourth probe group and the eighth probe group are sequentially arranged along the circumferential direction of the magnetic suspension bearing and are uniformly distributed along the circumferential direction of the magnetic suspension bearing.
For convenience of description and clearer understanding of the technical solutions of the present application, for example, the first direction is referred to as an X direction, the second direction is referred to as a Y direction, and the third direction is referred to as a Z direction, where the X direction and the Y direction are radial directions of the magnetic suspension bearing, and the Z direction is an axial direction of the magnetic suspension bearing.
In the inductive displacement sensor, the radial and axial displacements of the magnetic suspension bearing are detected by the plurality of probe groups uniformly distributed along the circumferential direction of the magnetic suspension bearing. Specifically, the first probe pair is used for detecting the displacement of the magnetic suspension bearing in the X direction, the second probe pair is used for detecting the displacement of the magnetic suspension bearing in the Y direction, and the third probe pair is used for detecting the displacement of the magnetic suspension bearing in the Z direction, so that the integrated design of radial displacement detection and axial displacement detection of the magnetic suspension bearing is realized, the installation space of the sensor is saved, the interference among detection channels is eliminated, and the detection precision of the sensor can be effectively improved.
In one example, in consideration of installation space and cost, as shown in fig. 1, the first probe set and the second probe set include two first probes 11, respectively, the third probe set and the fourth probe set include two second probes 12, respectively, and the fifth probe set, the sixth probe set, the seventh probe set, and the eighth probe set include two third probes 13, respectively. In the fifth probe group, the sixth probe group, the seventh probe group and the eighth probe group, the two third probes 13 are arranged along the Z direction, and the fifth probe group, the sixth probe group, the seventh probe group and the eighth probe group are uniformly distributed along the circumferential direction of the magnetic suspension bearing. In first probe group and second probe group, two first probes 11 are located the both sides of X direction respectively, namely, in the coordinate plane that X direction and Y direction formed, every first probe 11 and coordinate origin's line, and the angle between the X direction is 15 to ensure that first probe group and second probe group are whole to be arranged along the X direction, can improve inductance type displacement sensor's interference killing feature through above-mentioned setting, detect the displacement of magnetic suspension bearing in the X direction more accurately. Similarly, in the third probe group and the fourth probe group, the two second probes 12 are respectively located at two sides of the Y direction, that is, in the coordinate plane formed by the X direction and the Y direction, the angle between each connecting line of the first probe 11 and the origin of coordinates and the Y direction is 15 degrees, so as to ensure that the third probe group and the fourth probe group are integrally arranged along the Y direction, the anti-interference capability of the inductive displacement sensor can be improved through the arrangement, and the displacement of the magnetic suspension bearing in the Y direction can be more accurately detected. In the circumferential direction of the magnetic suspension bearing, two first probes 11 of the first probe group, two second probes 12 of the fifth probe group, two second probes 12 of the third probe group, the sixth probe group, two first probes 11 of the second probe group, the seventh probe group, two probes of the fourth probe group and the eighth probe group are sequentially arranged along the circumferential direction of the magnetic suspension bearing and are uniformly distributed along the circumferential direction of the magnetic suspension bearing, and in addition, in the Z direction, the positions of each first probe 11 and each second probe 12 are the same, and are also the same as those of the fifth probe group, the sixth probe group, the seventh probe group and the eighth probe group, so that the space occupation of the inductive displacement sensor can be reduced, the anti-interference capability of the inductive displacement sensor can be improved, and the detection precision is improved.
In order to better ensure that the "positions of each of the first probe 11 and the second probe 12 are the same in the Z direction and the positions of the first probe group, the sixth probe group, the seventh probe group, and the eighth probe group are also the same", the two third probes 13 of each of the fifth probe group, the sixth probe group, the seventh probe group, and the eighth probe group are arranged in abutment in the Z direction, and the contact surfaces of the two third probes 13 are the same as the positions of the centers of the first probe 11 and the second probe 12 in the Z direction.
It should be noted that, regarding the number of probes included in the probe group, it is preferable that the number of probes in each probe group is multiplied based on the number of probes in the corresponding probe group in the above example, so as to ensure the balanced arrangement of the probes in the inductive displacement sensor, thereby ensuring the accuracy of the overall detection effect and improving the detection precision.
In an exemplary embodiment, a magnetic bearing inductive displacement sensor is provided, as shown with reference to fig. 1, which is a further improvement of the probe in the above inductive displacement sensor. Specifically, the first probe 11 includes a first stator winding 112 and a first stator skeleton 111, and the first stator winding 112 is fixedly connected to the first stator skeleton 111; and/or the second probe 12 comprises a second stator winding 122 and a second stator frame 121, and the second stator winding 122 is fixedly connected with the second stator frame 121; and/or the third probe 13 comprises a third stator winding 132 and a third stator frame 131, and the third stator winding 132 is fixedly connected with the third stator frame 131. Through the fixed connection of corresponding stator winding and stator skeleton, can avoid stator winding to drop, confirm the detection effect. Further, the first stator winding 112 and the first stator framework 111 are connected through epoxy resin adhesive bonding; and/or the second stator winding 122 is connected with the second stator frame 121 through epoxy resin adhesive; and/or the third stator winding 132 and the third stator frame 131 are bonded and connected through epoxy resin glue. The reliability of connection between the stator winding and the stator framework in the corresponding probe is improved, and the anti-interference capability of the corresponding probe is improved. Further, the first stator frame 111 includes a first groove, and the first stator winding 112 is wound in the first groove; and/or the second stator frame 121 includes a second groove, and the second stator winding 122 is wound in the second groove; and/or, the third stator frame 131 includes a third groove, and the third stator winding 132 is wound in the third groove. The reliability of the connection between the corresponding stator winding and the stator framework is further improved, and the detection precision is ensured.
It should be noted that "and/or" in the above description means that the improvements of the first probe 11, the second probe 12 and the third probe 13 can be made only for a certain type of probe, and can also be made for multiple types of probes. It can be understood that if only a certain type of probe is improved, the improvement can only improve the detection effect of the type of probe.
In an exemplary embodiment, an inductive displacement sensor of a magnetic suspension bearing is provided, which is further improved on the inductive device of the inductive displacement sensor to improve the detection effect, as shown in fig. 1. Specifically, the induction device further includes a stator core 14, the stator core 14 is configured in a circular structure, for example, the stator core 14 is formed by laminating and clamping silicon steel alloy laminations. The first probe group, the second probe group, the third probe group, the fourth probe group, the fifth probe group, the sixth probe group, the seventh probe group and the eighth probe group are positioned on the inner side wall of the stator core 14. Through the arrangement, the distances between each first probe 11 and the magnetic suspension bearing can be equal, the distances between each second probe 12 and the magnetic suspension bearing are equal, and the distances between each third probe 13 and the magnetic suspension bearing are equal, so that the detection precision of the inductive displacement sensor can be improved.
Further, the first probe 11 includes a first probe core 113, in the radial direction of the stator core 14, the first probe core 113 is formed by inward protrusion of the inner side wall of the stator core 14, the first probe core 113 is inserted into the first stator frame 111 and is in interference fit with the first stator frame 111, and the free end of the first probe core 113 is exposed out of the inner side wall of the first stator frame 111; and/or the second probe 12 comprises a second probe iron core 123, in the radial direction of the stator iron core 14, the second probe iron core 123 is formed by inward protrusion of the inner side wall of the stator iron core 14, the second probe iron core 123 is inserted into the second stator framework 121 and is in interference fit with the second stator framework 121, and the free end of the second probe iron core 123 is exposed out of the inner side wall of the second stator framework 121; and/or the third probe 13 comprises a third probe core 133, the third probe core 133 is formed by inward protruding of the inner side wall of the stator core 14 in the radial direction of the stator core 14, the third probe core 133 is inserted into the third stator frame 131 and is in interference fit with the third stator frame 131, and the free end of the third probe core 133 is exposed out of the inner side wall of the third stator frame 131. On one hand, the probe iron core is arranged in the corresponding probe, and the anti-interference capability of the probe can be improved through the matching of the probe iron core and the stator winding, so that the detection precision is improved; on the other hand, the probe iron core is formed by inward protruding of the inner side wall of the stator iron core 14, and the probe iron core is in interference fit with the stator framework, so that the assembly reliability of the whole inductive displacement sensor can be improved, the reliability of a detection result can be further ensured to a certain extent, and the detection precision can also be improved.
It should be noted that the above "and/or" means that the first probe 11, the second probe 12, and the third probe 13 may be modified, and only a certain type of probe may be modified, or multiple types of probes may be modified. It can be understood that if only a certain type of probe is improved, the improvement can only improve the detection effect of the type of probe.
In an exemplary embodiment, a magnetic bearing inductive displacement sensor is provided, as shown with reference to fig. 2-5, which is a further improvement of the sine wave generation circuit and the detection circuit of the inductive displacement sensor described above.
The sine wave generating circuit comprises a sine wave oscillation generator and a signal amplifying circuit, the sine wave oscillation generator is electrically connected with the sensing device through the signal amplifying circuit, the anti-interference capacity of a sine signal generated by the sine wave generating circuit can be improved through the arrangement, the anti-interference capacity of the whole inductive displacement sensor is further improved, and the detection precision is improved. For example, the sine wave generating circuit outputs a high-frequency sine wave voltage signal by the special signal generating chip ML2035, and the high-frequency sine wave voltage signal is transmitted to a stator winding in the inductive displacement sensor through the signal amplifying circuit to provide an excitation signal for the stator winding.
The detection circuit comprises a voltage frequency-selecting amplification circuit, the voltage frequency-selecting amplification circuit comprises a band-pass filter, and after receiving the modulation signal, the detection circuit enters the voltage frequency-selecting amplification circuit and is subjected to filtering processing through the band-pass filter, so that the anti-interference capability of the detection circuit is further improved, and the detection precision of the inductive displacement sensor is improved. The detection circuit also comprises a phase-sensitive detection circuit and a low-pass filter circuit, and a direct-current voltage signal corresponding to the displacement size and the moving direction of the magnetic suspension bearing is formed by a signal transmitted from the voltage frequency-selective amplification circuit sequentially passing through the phase-sensitive detection circuit and the low-pass filter circuit. For example, the detection circuit generates a voltage signal according to a modulation signal of the induction device, the voltage signal is subjected to useful signal selection and full-wave rectification through the voltage frequency-selective amplification circuit and the phase-sensitive detection circuit, and then a low-pass filter circuit filters out voltage signals above 30KHz in the rectified signal to obtain direct-current voltage signals corresponding to the displacement magnitude and direction.
Through the arrangement, on one hand, the anti-interference capability of the detection circuit can be further improved, and the detection precision is improved; on the other hand, the displacement condition of the magnetic suspension bearing is reflected through the direct-current voltage signal, the displacement size and the moving direction of the magnetic suspension bearing can be known more conveniently and efficiently, and the detection efficiency is improved.
The following simulation shows the magnetic bearing placed in X, Y, Z coordinate system formed by X direction, Y direction and Z direction, so as to explain the working principle of the magnetic bearing inductive displacement sensor.
The magnetic suspension bearing inductive displacement sensor consists of a sine wave generating circuit, a static induction device and a detection circuit, and works according to the electromagnetic induction principle. When the high-frequency excitation signal output by the sine wave oscillator drives the stator winding, the output end of the sine wave oscillator outputs induced electromotive force. When the rotor of the magnetic suspension bearing deviates from the balance position in the direction of the + X axis, the inductance of the stator winding in the direction of the + X axis is reduced, the inductance of the stator winding in the direction of the-X axis is increased, the alternating current impedance is correspondingly changed to generate a modulation signal, the modulation signal is sensed by the detection circuit, so that the measurement bridge of the detection circuit is out of balance, and a voltage signal with the amplitude being in direct proportion to the displacement, the frequency being the same as the frequency of the sine wave oscillator and the phase corresponding to the displacement direction of the magnetic suspension bearing is output, the voltage signal is converted into a controllable and processable direct current voltage signal after being processed by a voltage signal frequency-selecting amplifying circuit, a phase-sensitive detection circuit, a low-pass filter circuit and other subsequent processing circuits, and further, the displacement of the magnetic suspension bearing in the X-axis direction can be obtained, and a basis is provided for the control of the subsequent translational displacement of the magnetic suspension bearing in the X-axis direction. When the magnetic suspension bearing rotor deviates from the balance position in the direction of the + Y axis, the inductance of the stator winding in the direction of the + Y axis is reduced, the inductance of the stator winding in the direction of the-Y axis is increased, the alternating current impedance is correspondingly changed to generate a modulation signal, the modulation signal is sensed by the detection circuit, so that the measurement bridge of the detection circuit is out of balance, and a voltage signal with the amplitude being in direct proportion to the displacement, the frequency being the same as the frequency of the sine wave oscillator and the phase corresponding to the displacement direction of the magnetic suspension bearing is output, the voltage signal is converted into a controllable and processable direct current voltage signal after being processed by a voltage signal frequency-selecting amplifying circuit, a phase-sensitive detection circuit, a low-pass filter circuit and other subsequent processing circuits, and then the displacement of the magnetic suspension bearing in the Y-axis direction can be obtained, and a basis is provided for the control of the subsequent translational displacement of the rotor of the magnetic suspension bearing in the Y-axis direction. When the rotor of the magnetic suspension bearing deviates from the balance position in the direction of the + Z axis, the inductance of the stator winding in the direction of the + Z axis is reduced, the inductance of the stator winding in the direction of the-Z axis is increased, the alternating current impedance is correspondingly changed to generate a modulation signal, the modulation signal is sensed by the detection circuit, so that the measurement bridge of the detection circuit is out of balance, and a voltage signal with the amplitude being in direct proportion to the displacement, the frequency being the same as the frequency of the sine wave oscillator and the phase corresponding to the displacement direction of the magnetic suspension bearing is output, the voltage signal is converted into a controllable and processable direct current voltage signal after being processed by a voltage signal frequency-selecting amplifying circuit, a phase-sensitive detection circuit, a low-pass filter circuit and other subsequent processing circuits, and then the displacement of the magnetic suspension bearing in the Z-axis direction can be obtained, and a basis is provided for the control of the subsequent translational displacement of the rotor of the magnetic suspension bearing in the Z-axis direction.
The inductive displacement sensor adopts the integrated design of radial displacement detection and axial displacement detection, and compared with the existing discrete inductive displacement sensor, the inductive displacement sensor saves the installation space of the inductive displacement sensor and eliminates the interference among detection channels; the inductive displacement sensor is provided with the voltage signal frequency-selecting amplifying circuit, the voltage signal frequency-selecting amplifying circuit is formed by connecting an input circuit (a band-pass filter) and two stages of same amplifiers in series, the three stages of same bandwidths are the same, and the detection precision of the inductive displacement sensor can be effectively improved.
In one example, referring to fig. 6, the sensing device of the inductive displacement sensor mainly includes: stator core 14, + x stator frame 2A, + x stator frame 2B, -x stator frame 2C, -x stator frame 2D, + y stator frame 3A, + y stator frame 3B, -y stator frame 3C, -y stator frame 3D, + z stator frame 4A, -z stator frame 4B, + z stator frame 4C, -z stator frame 4D, + z stator frame 4E, -z stator frame 4F, + z stator frame 4G, -z stator frame 4H, + x stator winding 5A, + x stator winding 5B, -x stator winding 5C, -x stator winding 5D, + y stator winding 6A, + y stator winding 6B, -y stator winding 6C, -y stator winding 6D, + z stator winding 7A, -z stator winding 7B, and, A + z stator winding 7C, a-z stator winding 7D, a + z stator winding 7E, a-z stator winding 7F, a + z stator winding 7G, and a-z stator winding 7H; probe iron cores in the +/-X direction and the +/-Y direction are uniformly distributed on the left side and the right side of the X, Y axis positive and negative directions according to the clockwise direction, probe iron cores in the Z axis direction are uniformly distributed on the upper side and the lower side of an X-Y plane along the Z axis direction on a coordinate axis angular bisector of X, Y axis positive and negative directions clockwise deflected by 45 degrees, a + X stator framework 2A, a + X stator framework 2B, an-X stator framework 2C and a-X stator framework 2D are respectively installed on the probe iron cores in the +/-X direction through interference fit, a + Y stator framework 3A, a + Y stator framework 3B, a-Y stator framework 3C and a-Y stator framework 3D are respectively installed on the probe iron cores in the +/-Y direction through interference fit, a + Z stator framework 4A, a-Z stator framework 4B, a + Z stator framework 4C, a-Z stator framework 4D, a-Z stator framework, + Z stator framework 4E, -Z stator framework 4F, + Z stator framework 4G and-Z stator framework 4H are respectively installed on a probe iron core in the +/-Z direction through interference fit, and + x stator winding 5A, + x stator winding 5B, -x stator winding 5C and-x stator winding 5D are respectively wound in the grooves of + x stator framework 2A, + x stator framework 2B, -x stator framework 2C and-x stator framework 2D and are respectively cured on the + x stator framework 2A, + x stator framework 2B, -x stator framework 2C and-x stator framework 2D through epoxy resin glue, and + y stator winding 6A, + y stator winding 6B, -y stator winding 6C and-y stator winding 6D are respectively wound on the + y stator framework A3A, + y stator framework 3B, and, The y stator framework 3C and the y stator framework 3D are respectively solidified on the + y stator framework 3A, the + y stator framework 3B, the y stator framework 3C and the y stator framework 3D through epoxy resin glue, the + z stator framework 4A, the-z stator framework 4B, the + z stator framework 4C, the-z stator framework 4D, the + z stator framework 4E, the-z stator framework 4F, the + z stator framework 4G and the z stator framework 4H are respectively wound in the grooves of the + z stator framework 4A, the z stator framework 4B, the + z stator framework 4C, the z stator framework 4D, the + z stator framework 4E, the z stator framework 4F, the + z stator framework 4G and the-z stator framework 4H, and are respectively solidified on the grooves of the + z stator framework 4A, the + z stator framework 4B, the + z stator framework 4E, the +, -z stator backbone 4B, + z stator backbone 4C, -z stator backbone 4D, + z stator backbone 4E, -z stator backbone 4F, + z stator backbone 4G, and-z stator backbone 4H.
The positive x stator framework 2A, the positive x stator winding 5A and the corresponding probe iron core form a first probe, the positive x stator framework 2B, the positive x stator winding 5B and the corresponding probe iron core form a first probe, the negative x stator framework 2C, the negative x stator winding 5C and the corresponding probe iron core form a first probe, and the negative x stator framework 2D, the negative x stator winding 5D and the corresponding probe iron core form a first probe. The + y stator framework 3A, the + y stator winding 6A and the corresponding probe iron core form a second probe, the + y stator framework 3B, the + y stator winding 6B and the corresponding probe iron core form a second probe, the-y stator framework 3C, the-y stator winding 6C and the corresponding probe iron core form a second probe, and the-y stator framework 3D, the-y stator winding 6D and the corresponding probe iron core form a second probe. The + z stator framework 4A, the + z stator winding 7A and the corresponding probe iron core form a third probe, the-z stator framework 4B, the-z stator winding 7B and the corresponding probe iron core form a third probe, the + z stator framework 4C, the + z stator winding 7C and the corresponding probe iron core form a third probe, the-z stator framework 4D, the-z stator winding 7D and the corresponding probe iron core form a third probe, the + z stator framework 4E, the + z stator winding 7E and the corresponding probe iron core form a third probe, the-z stator framework 4F, the-z stator winding 7F and the corresponding probe iron core form a third probe, the + z stator framework 4G, the + z stator winding 7G and the corresponding probe iron core form a third probe, the-z stator former 4H, the-z stator winding 7H and the corresponding probe core form a third probe.
Fig. 2 is a schematic circuit diagram of a sine wave oscillation generating circuit of the inductance type displacement sensor of the magnetic suspension bearing in the invention, and referring to fig. 2, a sine signal is generated by a special signal generating chip ML2035, and the ML2035 can generate a sine signal of 0.1 Hz to 50 kHz. Wherein the frequency setting of ML2035The value is serially input through the SID pin, the data is shifted in at the rising edge of SCK, and after the 16b data all enter the shift register, the output frequency relation is latched at the falling edge of LAT1 as follows: f. ofout=fclkin*(D15:D0)DEC/223，
And the resistance value of the resistor R20 and the capacitance value of the capacitor C22 are changed to filter interference clutter, and in order to eliminate beat interference between two degrees of freedom of the invention, the stator windings on each degree of freedom select the same excitation source, namely the stator windings in each probe pair select the same excitation source.
Fig. 3 is a schematic circuit diagram of a voltage frequency-selecting amplifying circuit of an inductance type displacement sensor of an magnetic suspension bearing in the invention, in order to improve the amplitude of an output signal of a stator winding, the output signal of the stator winding needs to be amplified, but clutter signals are easily introduced in the signal amplifying process, and the detection precision of the sensor is reduced. Referring to fig. 3, the voltage signal frequency-selective amplifier circuit is formed by connecting an input circuit and two stages of same amplifiers in series, and has the same bandwidth in three stages, the high-frequency cut-off frequency of the voltage signal frequency-selective amplifier circuit is determined by the resistance value of a resistor R1 and the capacitance value of a capacitor C1, and the parallel capacitance value of a low-frequency cut-off frequency capacitor C2 and a capacitor C3.
Fig. 4 is a schematic circuit diagram of a phase-sensitive detection circuit of an inductance-type displacement sensor of an mr suspension bearing according to the present invention, in a precision measurement, various noises are often doped in the measurement circuit except for a measurement signal output by an induction device, and the measurement signal output by the induction device is generally weak, so that in order to separate the measurement signal from a signal containing noise, a certain characteristic is required to be given to the measurement signal so as to distinguish the measurement signal from the noise, and the measurement signal is usually modulated. Therefore, referring to fig. 4, the present invention specifically designs a phase-sensitive detection circuit to identify the phase of the measurement signal, so as to distinguish the direction of the measured change, and the circuit also has the frequency-selecting capability to improve the anti-interference capability of the measurement system.
Fig. 5 is a schematic circuit diagram of a low pass filter circuit of an inductive displacement sensor of an magnetic suspension bearing according to the present invention, and referring to fig. 5, the low pass filter circuit is an infinite gain multi-path feedback circuit in a butterworth low pass filter, a signal after passing through a rectifying circuit is sent to the filter, in the diagram, a series capacitance value of a capacitor C16 and a capacitor C17 is used for setting a cut-off frequency of the filter, a resistor R14 and a capacitor C18 determine a high frequency cut-off frequency of the filter, and fine tuning can be performed by a slide rheostat W4. The filter in the invention filters out high frequency signals above 30kHz, and the output voltage signal of the filter is a direct current signal consistent with the displacement magnitude and direction of the rotor.
It should be noted that, the specific connection manner of each circuit in the present application belongs to the prior art in the field, and is not described herein again.
The above-described aspects may be implemented individually or in various combinations, and such variations are within the scope of the present invention.
It is to be noted that, in this document, the terms "comprises", "comprising" or any other variation thereof are intended to cover a non-exclusive inclusion, so that an article or apparatus including a series of elements includes not only those elements but also other elements not explicitly listed or inherent to such article or apparatus. Without further limitation, an element defined by the phrase "comprising … …" does not exclude the presence of additional like elements in the article or device comprising the element.
The above embodiments are merely to illustrate the technical solutions of the present invention and not to limit the present invention, and the present invention has been described in detail with reference to the preferred embodiments. It will be understood by those skilled in the art that various modifications and equivalent arrangements may be made without departing from the spirit and scope of the present invention and it should be understood that the present invention is to be covered by the appended claims.
Claims (10)
1. An inductive displacement sensor of a magnetic suspension bearing is characterized by comprising a sine wave generating circuit, an induction device and a detection circuit, wherein the sine wave generating circuit and the detection circuit are electrically connected with the induction device, the sine wave generating circuit is used for generating a sine signal and transmitting the sine signal to the induction device, the induction device is used for generating a modulation signal corresponding to the displacement of the magnetic suspension bearing when the magnetic suspension bearing displaces according to the sine signal, and the detection circuit is used for inducing the modulation signal and generating a detection signal corresponding to the displacement of the magnetic suspension bearing;
the sensing device comprises a first probe pair, a second probe pair and a third probe pair, wherein the first probe pair comprises a first probe group and a second probe group which are arranged along a first direction, the first probe group and the second probe group respectively comprise at least two first probes, the second probe pair comprises a third probe group and a fourth probe group which are arranged along a second direction, the third probe group and the fourth probe group respectively comprise at least two second probes, the third probe pair comprises a fifth probe group, a sixth probe group, a seventh probe group and an eighth probe group, the fifth probe group, the sixth probe group, the seventh probe group and the eighth probe group respectively comprise at least two third probes, the at least two third probes are arranged along a third direction, the third direction is the axial direction of the magnetic suspension bearing, and the first direction, the second direction and the third direction are the axial direction of the magnetic suspension bearing, The second direction is perpendicular to the third direction, and the first probe group, the fifth probe group, the third probe group, the sixth probe group, the second probe group, the seventh probe group, the fourth probe group and the eighth probe group are sequentially arranged along the circumferential direction of the magnetic suspension bearing and are uniformly distributed along the circumferential direction of the magnetic suspension bearing.
2. The magnetic bearing inductive displacement sensor according to claim 1,
the first probe comprises a first stator winding and a first stator framework, and the first stator winding is fixedly connected with the first stator framework; and/or the presence of a gas in the gas,
the second probe comprises a second stator winding and a second stator framework, and the second stator winding is fixedly connected with the second stator framework; and/or the presence of a gas in the gas,
the third probe comprises a third stator winding and a third stator framework, and the third stator winding is fixedly connected with the third stator framework.
3. The magnetic bearing inductive displacement sensor according to claim 2,
the first stator winding is connected with the first stator framework in an adhesive mode through epoxy resin glue; and/or the presence of a gas in the gas,
the second stator winding is connected with the second stator framework in a bonding mode through epoxy resin glue; and/or the presence of a gas in the gas,
and the third stator winding is connected with the third stator framework in a bonding manner through epoxy resin glue.
4. The magnetic bearing inductive displacement sensor according to claim 2,
the first stator framework comprises a first groove, and the first stator winding is wound in the first groove; and/or the presence of a gas in the gas,
the second stator framework comprises a second groove, and the second stator winding is wound in the second groove; and/or the presence of a gas in the gas,
the third stator framework comprises a third groove, and the third stator winding is wound in the third groove.
5. The magnetic bearing inductive displacement sensor of claim 1, wherein the inductive device further comprises a stator core, the stator core is configured in a circular configuration, and the first, second, third, fourth, fifth, sixth, seventh and eighth probe sets are located on an inner sidewall of the stator core.
6. The magnetic bearing inductive displacement sensor according to claim 5,
the first probe comprises a first probe iron core, the first probe iron core is formed by inward protruding of the inner side wall of the stator iron core in the radial direction of the stator iron core, the first probe iron core is inserted into the first stator framework and in interference fit with the first stator framework, and the free end of the first probe iron core is exposed out of the inner side wall of the first stator framework; and/or the presence of a gas in the gas,
the second probe comprises a second probe iron core, the second probe iron core is formed by inward protruding of the inner side wall of the stator iron core in the radial direction of the stator iron core, the second probe iron core is inserted into the second stator framework and in interference fit with the second stator framework, and the free end of the second probe iron core is exposed out of the inner side wall of the second stator framework; and/or the presence of a gas in the gas,
the third probe comprises a third probe iron core, the third probe iron core is formed by inward protruding of the inner side wall of the stator iron core in the radial direction of the stator iron core, the third probe iron core is inserted into the third stator framework and in interference fit with the third stator framework, and the free end of the third probe iron core is exposed out of the inner side wall of the third stator framework.
7. The magnetic bearing inductive displacement sensor according to any one of claims 1 to 6, wherein the sine wave generating circuit comprises a sine wave oscillation generator and a signal amplifying circuit, the sine wave oscillation generator being electrically connected to the induction device through the signal amplifying circuit.
8. Magnetic bearing inductive displacement sensor according to any of claims 1 to 6, characterized in that the detection circuit comprises a voltage frequency selective amplification circuit.
9. The magnetic bearing inductive displacement sensor of claim 8, wherein the voltage-selective amplifying circuit comprises a band-pass filter through which the modulated signal enters the voltage-selective amplifying circuit.
10. The magnetic suspension bearing inductive displacement sensor according to claim 8, wherein the detection circuit further comprises a phase-sensitive detection circuit and a low-pass filter circuit, and the modulated signal sequentially passes through the voltage frequency-selective amplification circuit, the phase-sensitive detection circuit and the low-pass filter circuit to form a direct-current voltage signal corresponding to the displacement and the moving direction of the magnetic suspension bearing.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113063340A (en) * | 2021-03-30 | 2021-07-02 | 天津飞旋科技股份有限公司 | Inductance type displacement sensor |
| CN113513969A (en) * | 2021-06-04 | 2021-10-19 | 南京航空航天大学 | Self-inductance type inductance displacement sensor excitation circuit |
| CN114876954A (en) * | 2022-05-25 | 2022-08-09 | 山东明天机械集团股份有限公司 | System and method for optimizing data acquisition precision of electromagnetic bearing |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB666898A (en) * | 1949-04-20 | 1952-02-20 | Gen Electric Co Ltd | Improvements in or relating to means for measuring the eccentricity of rotary shafts |
| DE4215381A1 (en) * | 1992-05-11 | 1993-11-18 | Siemens Ag | Radial and=or axial position measurement device for shaft and magnetic bearing - contains two sensor unit pairs for detecting displacement of shaft each coupled to subtractor for formation of difference signal, which is fed to switchable input summer to form average value. |
| CN1818539A (en) * | 2006-03-17 | 2006-08-16 | 清华大学 | Method and sensor for measuring radial and axial displacement of synchronouslly rotation axis |
| CN1851389A (en) * | 2006-03-02 | 2006-10-25 | 南京航空航天大学 | Magnetic suspension bearing differential transformer type displacement sensor |
| CN107014405A (en) * | 2017-03-08 | 2017-08-04 | 北京航空航天大学 | A kind of self difference inductive displacement transducer for magnetic levitation bearing system |
| CN107448475A (en) * | 2017-07-31 | 2017-12-08 | 北京航空航天大学 | A kind of Three Degree Of Freedom magnetic bearing and current vortex sensor integral structure |
| CN109029231A (en) * | 2018-06-25 | 2018-12-18 | 深圳麦格动力技术有限公司 | A kind of current vortex sensor and its processing technology and a kind of magnetic suspension motor |
-
2020
- 2020-07-31 CN CN202010755730.8A patent/CN111623700B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB666898A (en) * | 1949-04-20 | 1952-02-20 | Gen Electric Co Ltd | Improvements in or relating to means for measuring the eccentricity of rotary shafts |
| DE4215381A1 (en) * | 1992-05-11 | 1993-11-18 | Siemens Ag | Radial and=or axial position measurement device for shaft and magnetic bearing - contains two sensor unit pairs for detecting displacement of shaft each coupled to subtractor for formation of difference signal, which is fed to switchable input summer to form average value. |
| CN1851389A (en) * | 2006-03-02 | 2006-10-25 | 南京航空航天大学 | Magnetic suspension bearing differential transformer type displacement sensor |
| CN1818539A (en) * | 2006-03-17 | 2006-08-16 | 清华大学 | Method and sensor for measuring radial and axial displacement of synchronouslly rotation axis |
| CN107014405A (en) * | 2017-03-08 | 2017-08-04 | 北京航空航天大学 | A kind of self difference inductive displacement transducer for magnetic levitation bearing system |
| CN107448475A (en) * | 2017-07-31 | 2017-12-08 | 北京航空航天大学 | A kind of Three Degree Of Freedom magnetic bearing and current vortex sensor integral structure |
| CN109029231A (en) * | 2018-06-25 | 2018-12-18 | 深圳麦格动力技术有限公司 | A kind of current vortex sensor and its processing technology and a kind of magnetic suspension motor |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113063340A (en) * | 2021-03-30 | 2021-07-02 | 天津飞旋科技股份有限公司 | Inductance type displacement sensor |
| CN113513969A (en) * | 2021-06-04 | 2021-10-19 | 南京航空航天大学 | Self-inductance type inductance displacement sensor excitation circuit |
| CN114876954A (en) * | 2022-05-25 | 2022-08-09 | 山东明天机械集团股份有限公司 | System and method for optimizing data acquisition precision of electromagnetic bearing |
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