CN113054090B - Sensor and method for manufacturing sensor - Google Patents
Sensor and method for manufacturing sensor Download PDFInfo
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- CN113054090B CN113054090B CN202110279952.1A CN202110279952A CN113054090B CN 113054090 B CN113054090 B CN 113054090B CN 202110279952 A CN202110279952 A CN 202110279952A CN 113054090 B CN113054090 B CN 113054090B
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/32—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring the deformation in a solid
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Abstract
The application relates to a sensor and a manufacturing method of the sensor, wherein a thermoelectric conversion layer is paved on a substrate. The first electrode and the second electrode are respectively arranged at two ends of the thermoelectric conversion layer. When the sensor is applied to a human tissue organ such as an artificial muscle or an environment such as a robot, there is a large difference in temperature between different parts of the human tissue organ such as the artificial muscle or the robot arm during movement. The local temperature of the thermoelectric conversion layer changes, and a potential difference is formed between both ends of the thermoelectric conversion layer. The thermoelectric conversion layer generates a voltage signal carrying temperature gradient information. The voltage signal may be output through the first electrode and the second electrode. The voltage signal can characterize the motion state of a human tissue organ or robot. The sensor may have a self-powered effect. The sensor may collect energy in the environment and convert it to electrical energy. Therefore, the sensor can output voltage signals outwards without an external power supply, has a simple structure and has the effect of energy conservation.
Description
Technical Field
The present disclosure relates to the field of sensors, and in particular, to a sensor and a method for manufacturing the sensor.
Background
With the development of scientific technology, soft robots are receiving more and more attention, and more demands are being put on the application of soft robots. The variety of sensors used in the artificial muscle and robot fields is increasing. However, the traditional monitoring mode requires power supply to monitor the sensing signals, which not only increases the composition of the system, but also increases the energy consumption of the system.
Disclosure of Invention
In view of the above, it is desirable to provide a sensor and a method of manufacturing the sensor.
A sensor, comprising:
a thermoelectric conversion layer;
the thermoelectric conversion layer is paved on the substrate; and
and a first electrode and a second electrode respectively arranged at two ends of the thermoelectric conversion layer.
In one embodiment, the thermoelectric conversion layer includes graphene and graphene oxide.
In one embodiment, the substrate comprises biaxially oriented polypropylene film.
In one embodiment, the first electrode and the second electrode are respectively disposed at both ends of the thermoelectric conversion layer in the longitudinal direction;
the thermoelectric conversion layer comprises a fixing frame, wherein the fixing frame comprises two fixing parts which are arranged at intervals;
and two opposite ends of the substrate are respectively provided with an extension part in the width direction of the thermoelectric conversion layer, the two fixing parts are in one-to-one correspondence with the two extension parts, and the two fixing parts are respectively fixed on the two extension parts.
In one embodiment, the fixing frame further comprises a connecting part, the connecting part is connected with the two fixing parts, and the connecting part is located at one side of the first electrode away from the second electrode.
In one embodiment, the fixing portion extends along a length direction of the thermoelectric conversion layer.
In one embodiment, the thermoelectric conversion layer is arranged on the first electrode, and the thermoelectric conversion layer is arranged on the second electrode.
In one embodiment, the thermoelectric conversion layer is disposed on a side of the substrate facing away from the substrate, and the projection of the thermoelectric conversion layer on the substrate is disposed between the projection of the first electrode on the substrate and the projection of the second electrode on the substrate.
A method of fabricating a sensor, comprising:
providing a substrate and a thermoelectric conversion layer;
paving a thermoelectric conversion layer on the surface of the substrate;
a first electrode and a second electrode are respectively disposed at both ends of the thermoelectric conversion layer.
In one embodiment, the method for manufacturing the thermoelectric conversion layer includes:
providing graphene powder and graphene oxide powder;
mixing the graphene powder, the graphene oxide powder and water to form a suspension;
and removing moisture from the suspension to obtain a graphene-graphene oxide film, wherein the graphene-graphene oxide film is the thermoelectric conversion layer.
The sensor and the manufacturing method of the sensor provided by the embodiment of the application comprise a thermoelectric conversion layer, a substrate, a first electrode and a second electrode. The thermoelectric conversion layer is laid on the substrate. The first electrode and the second electrode are respectively arranged at two ends of the thermoelectric conversion layer. When the sensor is applied to human tissue and organs such as artificial muscles or environments such as robots, the temperature of the human tissue and organs such as the artificial muscles or different parts of the robot arm during movement can be greatly different. When the sensor is applied to the environment, the local temperature of the thermoelectric conversion layer changes, and the two ends of the thermoelectric conversion layer form a potential difference. The thermoelectric conversion layer generates a voltage signal carrying temperature difference information. The voltage signal may be output through the first electrode and the second electrode. The voltage signal can be indicative of a motion state of a human tissue organ or a robot. The sensor may have a self-powered effect. The sensor may collect energy in the environment and convert it to electrical energy. Therefore, the sensor can output voltage signals outwards without an external power supply, has a simple structure and has the effect of energy conservation.
Drawings
In order to more clearly illustrate the technical solutions of embodiments or conventional techniques of the present application, the drawings required for the descriptions of the embodiments or conventional techniques will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person of ordinary skill in the art.
FIG. 1 is a schematic diagram of a sensor provided in an embodiment of the present application;
FIG. 2 is an exploded view of a sensor provided in another embodiment of the present application;
FIG. 3 is a schematic view of a sensor according to another embodiment of the present application;
FIG. 4 is an exploded view of a sensor provided in another embodiment of the present application;
FIG. 5 is a schematic view of a sensor according to another embodiment of the present application;
FIG. 6 is a top view of a sensor provided in one embodiment of the present application;
FIG. 7 is a schematic view of an actuator provided in an embodiment of the present application under illumination;
FIG. 8 is a schematic view of a sensor according to another embodiment of the present application;
fig. 9 is a schematic view of bending an actuating portion of another sensor provided in the present application under illumination.
Reference numerals illustrate:
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application will be further described in detail below by way of examples with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the present application.
The numbering of the components itself, e.g. "first", "second", etc., is used herein merely to distinguish between the described objects and does not have any sequential or technical meaning. The terms "coupled" and "connected," as used herein, are intended to encompass both direct and indirect coupling (coupling), unless otherwise indicated. In the description of the present application, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," etc. indicate or refer to an orientation or positional relationship based on that shown in the drawings, merely for convenience of description and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present application.
In this application, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
Referring to fig. 1, a sensor 10 is provided in an embodiment of the present application. The sensor 10 includes a thermoelectric conversion layer 100, a substrate 200, a first electrode 310, and a second electrode 320. The thermoelectric conversion layer 100 is laid on the substrate 200. The first electrode 310 and the second electrode 320 are respectively disposed at both ends of the thermoelectric conversion layer 100.
The thermoelectric conversion layer 100 may have a thermoelectric effect. The thermoelectric effect refers to a phenomenon in which current or charge is accumulated when electrons (holes) in a heated object move from a high temperature region to a low temperature region with a temperature gradient. Therefore, if the temperature of a certain region in the thermoelectric conversion layer 100 increases, electrons or holes in the region move toward a low temperature region, thereby forming a current.
In one embodiment, the thermoelectric conversion layer 100 may be one or a combination of two or more of carbon nanotubes, graphene, reduced graphene oxide, two-dimensional metal carbide nanoplatelets, fullerenes, and the like, polyacetylene, polyaniline, polypyrrole, polythiophene, polycarbazole, and poly (3, 4-ethylenedioxythiophene). The above materials may have a thermoelectric effect or a photo-thermal effect. The thermoelectric conversion layer 100 fabricated using the above materials can convert light energy into heat energy or directly receive heat energy. Thermal energy may cause the thermoelectric conversion layer 100 to form a temperature gradient. The temperature gradient formed by the thermoelectric conversion layer 100 can be converted into electric energy. By measuring the voltage signal formed by the thermoelectric conversion layer 100, the change in the location of the heat received by the thermoelectric conversion layer 100 and the magnitude of the received heat can be characterized.
It will be appreciated that when one end of the sensor 10 is heated by a heat source, the temperature of the heated end of the sensor 10 increases. The temperature of the unheated end remains almost unchanged. The sensor forms a temperature gradient in the length direction. Due to the thermoelectric effect, the sensor will spontaneously output a voltage signal, and the intensity of the voltage signal has a certain relation with the temperature of the heated part, and can be used for representing the temperature of the heat source.
The sensor 10 may also have a function of a photo-thermo-electric generator in which when one end of the device is irradiated with a light source, such as one end of the device is irradiated with near infrared light, the temperature of the irradiated portion increases and the temperature of the non-irradiated portion remains almost unchanged. The sensor 10 forms a temperature gradient in the length direction. The sensor 10 outputs electric power through the first electrode 310 and the second electrode 320 due to a thermoelectric effect, and the intensity of the voltage has a certain relationship with the temperature of the heated portion. The magnitude of the voltage can therefore be used to characterize the temperature change of the sensor when illuminated. The sensor also functions to generate electricity.
The substrate 200 may function to support the thermoelectric conversion layer 100. The shape of the substrate 200 may be the same as the shape of the electrothermal conversion layer. The substrate 200 may be slightly larger than the thermoelectric conversion layer 100 to avoid the thermoelectric conversion layer 100 from being damaged.
In one embodiment, the material of the substrate 200 may be one or a combination of two or more of biaxially oriented polypropylene, polyethylene, silicone rubber, fluorosilicone rubber, polymethyl methacrylate, polyethylene terephthalate, polyurethane, epoxy, polyethyl acrylate, polybutyl acrylate, polystyrene, polybutadiene, and polyacrylonitrile. The material can have a large thermal expansion coefficient and good flexibility.
The first electrode 310 and the second electrode 320 may be conductive materials. By connecting signal lines between the first electrode 310 and the second electrode 320. When a potential difference is formed across the thermoelectric conversion layer 100, the thermoelectric conversion layer 100 generates a voltage signal affected by a temperature gradient. The voltage signal may be output through the first electrode 310 and the second electrode 320.
In one embodiment, the first electrode 310 and the second electrode 320 may each be copper foil. The shapes of the first electrode 310 and the second electrode 320 may be different. The shapes of the first electrode 310 and the second electrode 320 may be set according to the use environment.
In one embodiment, the first electrode 310 and the second electrode 320 may be embedded in the thermoelectric conversion layer 100, and thus the firmness of the first electrode 310 and the second electrode 320 in the thermoelectric conversion layer 100 can be improved.
When the sensor 10 is applied to a human tissue organ such as an artificial muscle or an environment such as a robot, there is a large difference in temperature between different portions of the human tissue organ such as an artificial muscle or a robot arm during movement. When the sensor 10 is applied to the above-mentioned environment, the local temperature of the thermoelectric conversion layer 100 may change, and a potential difference may be formed between both ends of the thermoelectric conversion layer 100. The thermoelectric conversion layer 100 generates a voltage signal carrying temperature gradient information. The voltage signal may be output through the first electrode 310 and the second electrode 320. The voltage signal can be indicative of a motion state of a human tissue organ or a robot. The sensor 10 may have a self-powered effect. The sensor 10 may collect energy from the environment and convert it to electrical energy. Therefore, the sensor 10 can output an electric signal to the outside without an external power supply, has a simple structure, and has an energy-saving effect.
In one embodiment, the thermoelectric conversion layer 100 includes graphene and graphene oxide. That is, the thermoelectric conversion layer 100 may be a thin film formed of the graphene and graphene oxide.
Graphene is a thermoelectric material, has good photo-thermal conversion performance, and can be used as a photo-thermoelectric material. Therefore, when the thermoelectric conversion layer 100 is fabricated using graphene, the thermoelectric conversion layer 100 can convert thermal energy into electrical energy. When the sensor 10 is applied to a lighting environment, the sensor 10 may also convert light energy into heat energy and then convert the heat energy into electrical energy. Thus, the sensor 10 can output a voltage signal indicative of a temperature change of the sensor 10 when the light intensity is non-uniform or the heat is non-uniform.
Graphene oxide has abundant oxygen-containing functional groups. The graphene oxide belongs to a hydrophilic material. The graphene oxide may be used as a surfactant to treat materials that are insoluble in aqueous solutions (e.g., graphite and carbon nanotubes) to prevent the graphene from re-stacking in the liquid phase. The thermoelectric conversion layer 100 prepared by compounding the two can play a role of self-supporting.
In one embodiment, the substrate 200 comprises biaxially oriented polypropylene film. It is understood that the biaxially oriented polypropylene film has good flexibility. The thermoelectric conversion layer 100 made of graphene-graphene oxide may be attached to the surface of the stretched polypropylene film, so that the strength of the thermoelectric conversion layer 100 may be improved, and the thermoelectric conversion layer 100 may be prevented from being broken.
Referring to fig. 2 and 3, in one embodiment, the first electrode 310 and the second electrode 320 are disposed at both ends of the thermoelectric conversion layer 100 along the length direction, respectively. The thermoelectric conversion layer 100 includes a fixing frame 400. The fixing frame 400 can prevent the sensor 10 from being deformed during contact heating or illumination heating. It will be appreciated that if the sensor 10 is deformed when the sensor 10 is directly contacted by a heat source. The position of the sensor 10 may change, thus reducing the accuracy of the test.
The fixing frame 400 includes two fixing portions 410 disposed at intervals. One extension 210 is disposed at each of opposite ends of the substrate 200 in the width direction of the thermoelectric conversion layer 100. The two fixing portions 410 are in one-to-one correspondence with the two extending portions 210, and the two fixing portions 410 are respectively fixed to the two extending portions 210.
In one embodiment, the thermoelectric conversion layer 100 may have a rectangular shape. The first electrode 310 and the second electrode 320 may be disposed at both ends of the thermoelectric conversion layer 100 at intervals along the longitudinal direction of the thermoelectric conversion layer 100. The width direction of the thermoelectric conversion layer 100 is perpendicular to the length direction of the thermoelectric conversion layer 100. Along the width direction of the thermoelectric conversion layer 100, both ends of the substrate 200 may extend out of one of the extension portions 210, respectively. The extension 210 may be integrally formed with the base 200. The extension 210 may have the same length and thickness as the substrate 200. One of the extensions 210 may have one of the fixing portions 410 pressed thereon. Accordingly, the holder 400 may fix the form of the thermoelectric conversion layer 100 in the width direction. The fixing frame 400 fixes the substrate 200, so as to avoid deformation of the substrate 200 when heated or illuminated unevenly, and avoid influencing the sensing position of the sensor 10. The measurement accuracy of the sensor 10 can be improved.
In one embodiment, the mount 400 further includes a connection 420. The connection part 420 connects the two fixing parts 410. The connection part 420 is located at a side of the first electrode 310 away from the second electrode 320. It is understood that the connection part 420 may not be in contact with the first electrode 310. Therefore, the connection part 420 may be prevented from interfering with the first electrode 310. Both ends of the connection part 420 may be connected to the ends of the two fixing parts 410, respectively. The connection part 420 and the two fixing parts 410 may constitute a U-shaped structure. The U-shaped structure may surround the thermoelectric conversion layer 100 when placed on the substrate 200. The fixing frame 400 has a simple structure, and can avoid deformation of the sensor 10. The fixing frame 400 of the U-shaped structure can function to prevent the deformation of the sensor 10.
In one embodiment, the fixing portion 410 extends along the length direction of the thermoelectric conversion layer 100. The length of the fixing portion 410 may be the same as the length of the thermoelectric conversion layer 100 or slightly greater than the length of the thermoelectric conversion layer 100. Accordingly, the fixing portion 410 can prevent the substrate 200 from being deformed in the length direction.
Referring to fig. 4, 5 and 6, in one embodiment, the sensor 10 further includes an actuator 110. The actuating portion 110 extends from the thermoelectric conversion layer 100 to a side of the second electrode 320 remote from the first electrode 310. The actuator 110 bends when heated. It is understood that the actuating portion 110 may be made of a composite of materials having different thermal expansion coefficients. Therefore, the actuating portion 110 expands at different positions after being heated, so as to deform and bend.
Referring to fig. 7, when the actuating portion 110 is illuminated or heated, the actuating portion 110 is bent when the temperature rises. As irradiated by near infrared light, the irradiated portion of the actuating portion 110 converts light energy into heat energy due to a photo-thermal effect, resulting in a temperature rise and a deformation. The temperature of the non-irradiated part remains almost unchanged, while the sensor 10 forms a temperature gradient in the length direction. The sensor 10 will spontaneously output a voltage signal due to the thermoelectric effect. The intensity of the voltage signal has a certain relation with the temperature of the part heated by illumination. The bending condition of the actuating portion 110 also has a certain relation with the temperature of the portion heated by the light. Thus, the voltage signal may be used to characterize the deformation of the actuation portion 110.
In this embodiment, the sensor 10 may have a function of photo-thermal actuation, and the actuation portion 110 generates deformation due to the expansion coefficients of different materials after the temperature rises, so as to convert thermal energy into mechanical energy.
In one embodiment, the holder 400 may be disposed around only the thermoelectric conversion layer 100 located at the substrate 200. The portion of the actuating portion 110 may not be provided with the fixing frame 400. The actuating portion 110 is free to deform with temperature changes. However, for the accuracy of the voltage signal output, the thermoelectric conversion layer 100 is fixed by the fixing frame 400, so that the thermoelectric conversion layer 100 is ensured not to be deformed. At the same time, the positions of the first electrode 310 and the second electrode 320 can be stabilized, so that the accuracy of the test can be improved.
In one embodiment, the actuating portion 110 may be formed of a two-layered structure that is stacked. A layer structure may be formed by the thermoelectric conversion layer 100 extending to a side of the second electrode 320 remote from the first electrode 310. That is, the thermoelectric conversion layer 100 is integrally formed with one layer of the actuating portion 110. Another layer of the actuating portion 110 may be formed by the substrate 200 extending to a side of the second electrode 320 remote from the first electrode 310. The actuation portion 110 may have a two-layer structure, one layer may be a graphene-graphene oxide film, and the other layer may be a biaxially oriented polypropylene film. The graphene-graphene oxide film may have a negative coefficient of thermal expansion. The biaxially oriented polypropylene film may have a higher coefficient of thermal expansion. Therefore, when the temperature of the actuating portion 110 increases, the biaxially oriented polypropylene film has a larger expansion coefficient and thus a higher degree of deformation. The actuating portion 110 may be bent toward a side where the graphene-graphene oxide thin film is located. The degree of bending of the actuator 110 may have a relation to the temperature change of the actuator 110, and the voltage signal may be indicative of the bending of the actuator 110. The voltage signal can thus be used to respond to temperature changes of the actuator 110.
In one embodiment, the thermoelectric conversion layer 100 and the substrate 200 are the same shape. The width of the actuating portion 110 is smaller than the widths of the thermoelectric conversion layer 100 and the substrate 200. Therefore, the actuator 110 is less constrained by the substrate 200 and the thermoelectric conversion layer 100. The deformation of the actuating portion 110 is more sensitive.
Referring to fig. 8 and 9, in one embodiment, the sensor 10 further includes a barrier layer 500. The shielding layer 500 is located at a side of the substrate 200 remote from the thermoelectric conversion layer 100. And the projection of the shielding layer 500 onto the substrate 200 is located between the projection of the first electrode 310 onto the substrate 200 and the projection of the second electrode 320 onto the substrate 200. The barrier layer 500 may be an opaque material. And the shielding layer 500 may not undergo a significant temperature change after being stimulated by light. The barrier layer 500 does not deform significantly even after a temperature change. In one embodiment, the shielding layer 500 may be a metallic material. The shielding layer 500 is located at a side of the substrate 200 remote from the thermoelectric conversion layer 100. Therefore, the shielding layer 500 does not affect the current in the thermoelectric conversion layer 100. The projection of the shielding layer 500 onto the substrate 200 is between the projection of the first electrode 310 onto the substrate 200 and the projection of the second electrode 320 onto the substrate 200. The barrier layer 500 does not increase the resistance to deformation of the actuating portion 110.
When the sensor 10 is illuminated from the direction of the shielding layer 500 using a light source, the actuation portion 110 is not shielded by the shielding layer 500. The temperature of the actuating portion 110 increases and deformation occurs. The temperature of the portion of the sensor 10 shielded by the shielding layer 500 remains almost unchanged since it is not irradiated with light. The sensor 10 forms a temperature gradient in the length direction. Due to the thermoelectric effect, a voltage is generated in the sensor 10 and a voltage signal is emitted through the first electrode 310 and the second electrode 320. The voltage signal has a certain relation to the temperature of the actuation portion 110. The temperature of the actuating portion 110 is also in a relationship with the bending of the actuating portion 110. Thus, the voltage signal may be used to characterize the deformation of the actuation portion 110.
It will be appreciated that the wavelength of the light illuminating the sensor 10 may be selected as desired. Therefore, the wavelength of the light irradiating the sensor 10 can also be determined by the deformation of the actuating portion 110.
The embodiment of the application also provides a manufacturing method of the sensor 10. The manufacturing method comprises the following steps:
s10, providing a substrate 200 and a thermoelectric conversion layer 100;
s20, paving a thermoelectric conversion layer 100 on the surface of the substrate 200;
s30, a first electrode 310 and a second electrode 320 are respectively disposed at both ends of the thermoelectric conversion layer 100.
In one embodiment, the method for manufacturing the thermoelectric conversion layer 100 includes:
s110, providing graphene powder and graphene oxide powder;
s120, mixing the graphene powder, the graphene oxide powder and water to form a suspension;
and S130, removing moisture from the suspension to obtain a graphene-graphene oxide film, wherein the graphene-graphene oxide film is the thermoelectric conversion layer 100.
In S110, the mass ratio of the graphene powder to the graphene oxide powder may be 1:1.
in the step S120, the mass ratio may be 1: and 1, adding the graphene powder and the graphene oxide powder into deionized water, and performing ultrasonic treatment for 20 minutes to obtain a suspension formed by mixing the graphene oxide powder and water.
In S130, deionized water may be removed from the suspension by vacuum filtration, to obtain a graphene-graphene oxide film. The graphene-graphene oxide film may be dried at 50 ℃ for 2 hours.
After S130, a biaxially oriented polypropylene film may be adhered to the graphene-graphene oxide film to obtain a film of a double-layer structure obtained from graphene-graphene oxide, biaxially oriented polypropylene. The sensor 10 is formed by a film with a double-layer structure obtained by graphene-graphene oxide and biaxially oriented polypropylene.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples only represent a few embodiments of the present application, which are described in more detail and are not to be construed as limiting the scope of the patent. It should be noted that it would be apparent to those skilled in the art that various modifications and improvements could be made without departing from the spirit of the present application, which would be within the scope of the present application. Accordingly, the scope of protection of the present application is to be determined by the claims appended hereto.
Claims (10)
1. A sensor, comprising:
a thermoelectric conversion layer (100);
a substrate (200), the thermoelectric conversion layer (100) being laid on the substrate (200); and
a first electrode (310) and a second electrode (320) that are respectively provided at both ends of the thermoelectric conversion layer (100);
the thermoelectric conversion layer (100) comprises a fixing frame (400), wherein the fixing frame (400) comprises two fixing parts (410) which are arranged at intervals;
two opposite ends of the substrate (200) are respectively provided with an extension part (210) in the width direction of the thermoelectric conversion layer (100), the two fixing parts (410) are in one-to-one correspondence with the two extension parts (210), and the two fixing parts (410) are respectively fixed on the two extension parts (210).
2. The sensor of claim 1, wherein the thermoelectric conversion layer (100) comprises graphene and graphene oxide.
3. The sensor of claim 2, wherein the substrate (200) comprises biaxially oriented polypropylene film.
4. The sensor of claim 1, wherein said extension (210) has one of said fixtures (410) pressed thereon.
5. The sensor of claim 1, wherein the holder (400) further comprises a connection portion (420), the connection portion (420) connecting the two fixing portions (410), the connection portion (420) being located at a side of the first electrode (310) remote from the second electrode (320).
6. The sensor according to claim 5, wherein the fixing portion (410) extends along a length direction of the thermoelectric conversion layer (100).
7. The sensor of claim 1, further comprising an actuation portion (110), the actuation portion (110) extending from the thermoelectric conversion layer (100) to a side of the second electrode (320) remote from the first electrode (310), the actuation portion (110) being bent upon heating.
8. The sensor of claim 7, further comprising a shielding layer (500), the shielding layer (500) being located on a side of the substrate (200) remote from the thermoelectric conversion layer (100), and a projection of the shielding layer (500) on the substrate (200) being located between a projection of the first electrode (310) on the substrate (200) and a projection of the second electrode (320) on the substrate (200).
9. A method of manufacturing a sensor, comprising:
providing a substrate (200) and a thermoelectric conversion layer (100);
paving a thermoelectric conversion layer (100) on the surface of the substrate (200);
a first electrode (310) and a second electrode (320) are respectively provided at both ends of the thermoelectric conversion layer (100);
the thermoelectric conversion layer (100) comprises a fixing frame (400), wherein the fixing frame (400) comprises two fixing parts (410) which are arranged at intervals;
two opposite ends of the substrate (200) are respectively provided with an extension part (210) in the width direction of the thermoelectric conversion layer (100), the two fixing parts (410) are in one-to-one correspondence with the two extension parts (210), and the two fixing parts (410) are respectively fixed on the two extension parts (210).
10. The method of manufacturing a sensor according to claim 9, wherein the method of manufacturing the thermoelectric conversion layer (100) includes:
providing graphene powder and graphene oxide powder;
mixing the graphene powder, the graphene oxide powder and water to form a suspension;
and removing moisture from the suspension to obtain a graphene-graphene oxide film, wherein the graphene-graphene oxide film is the thermoelectric conversion layer (100).
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150098700A (en) * | 2014-02-20 | 2015-08-31 | 인하대학교 산학협력단 | Manufacturing methods for wearable thermoelectric modules for self-development, wireless bio electrode sensor using thereof |
| CN105393097A (en) * | 2013-07-22 | 2016-03-09 | 诺基亚技术有限公司 | An apparatus for sensing |
| CN110473956A (en) * | 2019-08-21 | 2019-11-19 | 金华伏安光电科技有限公司 | A kind of optical detector based on photo-thermal electrical effect |
| CN210441993U (en) * | 2019-08-13 | 2020-05-01 | 怀化乐源农业开发有限公司 | Temperature detector based on thermoelectric effect |
| CN111128557A (en) * | 2019-11-29 | 2020-05-08 | 福建师范大学 | Multifunction device and method of manufacturing multifunction device |
-
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105393097A (en) * | 2013-07-22 | 2016-03-09 | 诺基亚技术有限公司 | An apparatus for sensing |
| KR20150098700A (en) * | 2014-02-20 | 2015-08-31 | 인하대학교 산학협력단 | Manufacturing methods for wearable thermoelectric modules for self-development, wireless bio electrode sensor using thereof |
| CN210441993U (en) * | 2019-08-13 | 2020-05-01 | 怀化乐源农业开发有限公司 | Temperature detector based on thermoelectric effect |
| CN110473956A (en) * | 2019-08-21 | 2019-11-19 | 金华伏安光电科技有限公司 | A kind of optical detector based on photo-thermal electrical effect |
| CN111128557A (en) * | 2019-11-29 | 2020-05-08 | 福建师范大学 | Multifunction device and method of manufacturing multifunction device |
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