CN111128557A - Multifunction device and method of manufacturing multifunction device - Google Patents

Multifunction device and method of manufacturing multifunction device Download PDF

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Publication number
CN111128557A
CN111128557A CN201911200599.2A CN201911200599A CN111128557A CN 111128557 A CN111128557 A CN 111128557A CN 201911200599 A CN201911200599 A CN 201911200599A CN 111128557 A CN111128557 A CN 111128557A
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China
Prior art keywords
composite layer
substrate
graphite paper
multifunction device
layer
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CN201911200599.2A
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CN111128557B (en
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陈鲁倬
张薇
翁明岑
段怡珉
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Fujian Normal University
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Fujian Normal University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/08Structural combinations, e.g. assembly or connection, of hybrid or EDL capacitors with other electric components, at least one hybrid or EDL capacitor being the main component
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/84Processes for the manufacture of hybrid or EDL capacitors, or components thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/13Energy storage using capacitors

Abstract

The present application relates to a multifunction device and a method of fabricating a multifunction device, the first composite layer including an actuation region and a capacitance region. The thermal expansion coefficients of the first composite layer and the substrate are different, so that in the actuating region, the first composite layer and the substrate are deformed to different degrees when heated to different degrees, and therefore actuating changes such as bending can be generated, and an actuating structure is formed. In the capacitance region, the first composite layer, the electrolyte layer, and the second composite layer constitute an ultracapacitor. The super capacitor has a greater power density and a longer cycle life. The actuating structure and the super capacitor are integrated to form an integral structure, so that the occupied space of the multifunctional device can be reduced, and the multifunctional device is convenient to carry. The actuating function or the capacitance function of the multifunctional device can be used according to the requirement, and the multifunctional device is convenient to use.

Description

Multifunction device and method of manufacturing multifunction device
Technical Field
The present application relates to the field of devices, and more particularly, to a multifunctional device and a method for manufacturing the multifunctional device.
Background
Currently, supercapacitors, as an important electrochemical energy storage device, have a greater power density and a longer cycle life than batteries. The actuator, as a typical energy conversion device, can convert absorbed external stimulation energy into mechanical energy to complete deformation and movement. The two have wide application scenes in the field of wearable electronics, but the existing super capacitor and the actuator are both used and carried independently, which brings inconvenience to the use.
Disclosure of Invention
Therefore, it is necessary to provide a multifunctional device and a manufacturing method of the multifunctional device, aiming at the problem that the existing super capacitor and the actuator are both used and carried separately and bring inconvenience to use.
A multifunction device, comprising:
a substrate;
the first composite layer covers the surface of the substrate and comprises an actuating area and a capacitance area, and the thermal expansion coefficients of the first composite layer and the substrate are different;
the second composite layer is positioned in the capacitor area and covers the surface, far away from the substrate, of the first composite layer; and
and the electrolyte layer is arranged in the capacitor area and is clamped between the first composite layer and the second composite layer, and the first composite layer, the electrolyte layer and the second composite layer form a capacitor structure.
In one embodiment, the first composite layer comprises:
a first graphite paper;
two first polyaniline layers respectively formed on two opposite surfaces of the first graphite paper;
the second composite layer includes:
a second graphite paper;
and the two second polyaniline layers are respectively formed on two opposite surfaces of the second graphite paper.
In one embodiment, the substrate comprises:
two support parts arranged at an interval, an
And the connecting part is connected between the two supporting parts.
In one embodiment, the second composite layer includes two second sub-composite layers respectively corresponding to surfaces of the electrolyte layer away from the two support portions.
In one embodiment, the two spaced apart supports are arranged in parallel.
In one embodiment, in the actuation zone, a surface of the substrate facing away from the first composite layer is provided with a plurality of grooves.
In one embodiment, the substrate is made of one or more of polypropylene, polyethylene, silicone rubber, fluorosilicone rubber, polymethyl methacrylate, polyethylene terephthalate, polyurethane, epoxy resin, polyethylacrylate, polybutyl acrylate, polystyrene, polybutadiene, and polyacrylonitrile.
In one embodiment, the actuation region and the capacitance region are disposed adjacent to the first composite layer, and the actuation region occupies an area that is no less than one-half of the surface area of the first composite layer.
A method of fabricating a multifunctional device, comprising:
s10, manufacturing a first composite layer and a second composite layer, wherein the first composite layer comprises a capacitance area and an actuating area;
s20, coating an electrolyte on one surface of the capacitor region of the first composite layer and one surface of the second composite layer;
s30, oppositely attaching the surfaces of the first composite layer and the second composite layer, which are coated with the electrolyte;
and S40, providing a substrate, wherein the thermal expansion coefficient of the substrate is different from that of the first composite layer, and attaching the surface of the first composite layer, which is far away from the electrolyte, to the surface of the substrate.
In one embodiment, the S10 includes:
s11, providing graphite paper, and soaking the graphite paper in hydrochloric acid solution of aniline;
s12, coating the surface of the graphite paper after soaking with ammonium persulfate aqueous solution;
s13, washing the graphite paper coated with the ammonium sulfate aqueous solution by using deionized water, ethanol and acetone;
and S14, cutting the cleaned graphite paper to obtain the first composite layer and the second composite layer.
In the multifunction device provided by the embodiments of the present application, the first composite layer includes an actuation region and a capacitance region. The thermal expansion coefficients of the first composite layer and the substrate are different, so that in the actuating region, the first composite layer and the substrate are deformed to different degrees when heated to different degrees, and therefore actuating changes such as bending can be generated, and an actuating structure is formed. In the capacitance region, the first composite layer, the electrolyte layer, and the second composite layer constitute an ultracapacitor. The super capacitor has a greater power density and a longer cycle life. The actuating structure and the super capacitor are integrated to form an integral structure, so that the occupied space of the multifunctional device can be reduced, and the multifunctional device is convenient to carry. The actuating function or the capacitance function of the multifunctional device can be used according to the requirement, and the multifunctional device is convenient to use.
Drawings
FIG. 1 is a cross-sectional view of a multifunction device provided by an embodiment of the present application;
FIG. 2 is a curved cross-sectional view of a multi-function device provided by an embodiment of the present application;
FIG. 3 is a top view of a substrate provided by an embodiment of the present application;
FIG. 4 is a top view of a multifunction device provided by an embodiment of the present application;
FIG. 5 is a wiring diagram of a multifunction device provided by an embodiment of the present application;
FIG. 6 is a wiring diagram of a multifunction device provided in another embodiment of the present application;
FIG. 7 is a wiring diagram of a multifunction device provided in another embodiment of the present application;
FIG. 8 is a wiring diagram of a multifunction device provided in another embodiment of the present application.
Description of reference numerals:
multifunction device 10
Substrate 100
Supporting part 110
Connecting part 120
Groove 130
First composite layer 200
First graphite paper 210
First polyaniline layer 220
Actuation region 230
Capacitor region 240
Second composite layer 300
Second graphite paper 310
Second polyaniline layer 320
Second sub-composite layer 330
Electrolyte layer 400
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more clearly apparent, the multifunctional device and the method for manufacturing the multifunctional device of the present application are further described in detail by the embodiments and with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
The numbering of the components as such, e.g., "first", "second", etc., is used herein only to distinguish the objects as described, and does not have any sequential or technical meaning. The term "connected" and "coupled" when used in this application, unless otherwise indicated, includes both direct and indirect connections (couplings). In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present application and for simplicity in description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be considered as limiting the present application.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
Referring to fig. 1, an embodiment of the present application provides a multifunctional device 10. The multifunction device 10 includes a substrate 100, a first composite layer 200, a second composite layer 300, and an electrolyte layer 400. The first composite layer 200 covers the surface of the substrate 100. The first composite layer 200 includes an actuation region 230 and a capacitance region 240. The first composite layer 200 and the substrate 100 have different thermal expansion coefficients. The second composite layer 300 is located in the capacitor region 240. The second composite layer 300 covers the surface of the first composite layer 200 away from the substrate 100. The electrolyte layer 400 is located in the capacitor region 240. The electrolyte layer 400 is sandwiched between the first composite layer 200 and the second composite layer 300. In the capacitor region 240, the first composite layer 200, the second composite layer 300, and the electrolyte layer 400 constitute a capacitor structure.
The substrate 100 may be used to support the first composite layer 200, the second composite layer 300, and the electrolyte layer 400. The substrate 100 may be a flexible material. The substrate 100 may be an organic material. The substrate 100 may have a rectangular shape. The actuation region 230 and the capacitance region 240 may be disposed at both sides of the substrate 100, respectively. The first composite layer 200 may be attached to the actuation zone 230 and the capacitance zone 240.
Referring to fig. 2, because the thermal expansion coefficients of the first composite layer 200 and the substrate 100 are different, the substrate 100 and the first composite layer 200 deform to different degrees when the first composite layer 200 or the substrate 100 is heated. The first composite layer 200 or the substrate 100 may be heated by light irradiation, or may be electrically powered to convert electric energy into thermal energy. The actuation zone 230 may bend. In the actuation zone 230, the substrate 100 and the first composite layer 200 constitute an actuation structure. The actuating structure can convert external energy into mechanical energy, and the actuating structure can be applied to the fields of biomedicine and wearable electronics.
In the capacitor region 240, the first composite layer 200, the electrolyte layer 400, and the second composite layer 300 are sequentially arranged to constitute the capacitor structure. The first composite layer 200 and the second composite layer 300 may have conductive and capacitive characteristics. The first composite layer 200 and the second composite layer 300 may constitute two plates of the capacitor structure. The electrolyte layer 400 may be polyvinyl alcohol-sulfuric acid (PVA-H) coated on the surfaces of the first and second composite layers 200 and 3002SO4) The solution is solidified. The capacitive structure may be a supercapacitor. The super capacitor can have the characteristic of rapid charge and discharge of the capacitor, and also can have the energy storage characteristic of a battery. The super capacitor also has flexibility, portability and high electrochemical performance, and can be widely applied to the field of wearable electronics. In the capacitance region 240, the first composite layer 200, the electrolyte layer 400, and the second composite layer 300 constitute the supercapacitor.
In the multifunction device 10 provided in the embodiment of the present application, the first composite layer 200 includes an actuation region 230 and a capacitance region 240. The thermal expansion coefficients of the first composite layer 200 and the substrate 100 are different, so that in the actuation zone 230, the first composite layer 200 and the substrate 100 deform to different degrees when heated to different degrees, and therefore actuation changes such as bending can be generated, so as to form an actuation structure. In the capacitance region 240, the first composite layer 200, the electrolyte layer 400, and the second composite layer 300 constitute an ultracapacitor. The super capacitor has a greater power density and a longer cycle life. The actuating structure and the super capacitor are integrated to form an integral structure, so that the occupied space of the multifunctional device 10 can be reduced, and the multifunctional device is convenient to carry. The actuation function or the capacitance function of the multifunction device 10 can also be used as desired, with ease of use.
In one embodiment, the first composite layer 200 includes a first graphite paper 210 and two first polyaniline layers 220. The second composite layer 300 may include a second graphite paper 310 and two second polyaniline layers 320. The two first polyaniline layers 220 are formed on two opposite surfaces of the first graphite paper 210, respectively. The two second polyaniline layers 320 are formed on two opposite surfaces of the second graphite paper 310, respectively. The two first polyaniline layers 220 can be obtained by chemically reacting on the surface of the first graphite paper 210. The two second polyaniline layers 320 can also be obtained by chemically reacting on the surface of the second graphite paper 310. The composition of the first graphite paper 210 and the composition of the second graphite paper 310 may be the same. The first polyaniline layer 220 and the second polyaniline layer 320 may have the same composition. The graphite component in the first graphite paper 210 may be used to absorb light to deform, or when the first composite layer 200 is energized, electrical energy is converted into thermal energy, and the first graphite paper 210 is easily heat conductive, so that the first composite layer 200 is easily deformed. In the actuation zone 230, the substrate 100 is deformed by the first composite layer 200, thereby generating an actuation effect.
The polyaniline has the material characteristics of pseudo capacitance. Therefore, in the capacitance region 240, the super capacitor formed by the first composite layer 200, the electrolyte layer 400 and the second composite layer 300 has a stronger energy storage capacity and a larger power density.
Referring to fig. 3, in one embodiment, the substrate 100 includes two supporting portions 110 and two connecting portions 120 spaced apart from each other. The connection part 120 may connect between the two support parts 110. That is, both ends of the connecting portion 120 are connected to the two supporting portions 110, respectively. I.e. the substrate 100 may constitute a U-shaped structure. The first composite layer 200 formed on the surface of the U-shaped structure may also be a U-shaped structure. The actuation structure may be located at an open portion of the U-shaped structure. The actuation structure is less resistant to bending.
Referring to fig. 4, in one embodiment, the second composite layer 300 includes two second sub-composite layers 330. The two second sub-composite layers 330 are respectively attached to the surfaces of the electrolyte layer 400 away from the two support portions 110. That is, the perpendicular projections of the two second sub-composite layers 330 on the substrate 100 fall on the surfaces of the two supporting portions 110, respectively. Thus, each of the second sub-composite layers 330 and the electrolyte layer 400 and the first composite layer 200 corresponding to the second sub-composite layers 330 constitute two of the supercapacitors.
In one embodiment, the two spaced apart supports 110 are arranged in parallel. Therefore, the two super capacitors are arranged in parallel on the same plane, and the carrying and the use are convenient.
Referring to fig. 5, two ends of any one of the supporting portions 110 may be powered on to form a single super capacitor.
Referring to fig. 6, two supercapacitors connected in series can be formed by connecting two supporting parts 110 with electricity respectively.
Referring to fig. 7, two ends of the two support parts 110 arranged in parallel in the same direction may be electrically connected to form two parallel supercapacitors.
Referring to fig. 8, in one embodiment, the supporting portions 110 of two multifunctional devices 10 may be electrically connected in sequence, and four supercapacitors connected in series may be formed.
The two super capacitors can be connected through a lead to form a series capacitor, a parallel capacitor and other structures.
In one embodiment, in the actuation zone 230, the surface of the substrate 100 facing away from the first composite layer 200 is provided with a plurality of grooves 130. The grooves 130 may reduce the resistance to deformation of the substrate 100, thereby increasing the flexibility of deformation of the actuation structure.
In one embodiment, the actuation zone 230 and the capacitance zone 240 are disposed adjacent to the first composite layer 200. The actuation zone 230 occupies an area no less than one-half of the surface area of the first composite layer 200. The actuation region 230 and the capacitance region 240 may be both rectangular, two rectangles are adjacently disposed, and the widths of the two rectangles may be the same. The length of the rectangle as the actuation region 230 may be not less than half of the length of the first composite layer 200, and thus the area occupied by the actuation region 230 may be not less than half of the surface area of the first composite layer 200. Thus, the actuation zone 230 may have a greater magnitude of deformation after being heated, reducing the resistance to deformation of the actuation zone 230.
The embodiment of the present application further provides a manufacturing method of the multifunctional device 10. The method comprises the following steps:
s10, manufacturing a first composite layer 200 and a second composite layer 300, wherein the first composite layer 200 comprises a capacitance area 240 and an actuation area 230;
s20, coating an electrolyte on one surface of the capacitor region (240) of the first composite layer 200 and one surface of the second composite layer 300;
s30, the surfaces of the first composite layer 200 and the second composite layer 300 coated with the electrolyte are attached to each other, and the electrolyte layer 400 can be formed between the first composite layer 200 and the second composite layer 300 after the electrolyte is cured.
S40, providing a substrate 100, wherein the coefficient of thermal expansion of the substrate 100 is different from that of the first composite layer 200, and attaching the surface of the first composite layer 200 away from the electrolyte to the surface of the substrate 100.
In S10, a large composite layer may be first manufactured, and then the first composite layer 200 and the second composite layer 300 may be formed by cutting.
In one embodiment, the S10 includes:
s11, providing graphite paper, and soaking the graphite paper in hydrochloric acid solution of aniline;
s12, coating the surface of the graphite paper after soaking with ammonium persulfate aqueous solution;
s13, washing the graphite paper coated with the ammonium sulfate aqueous solution by using deionized water, ethanol and acetone;
and S14, cutting the cleaned graphite paper to obtain the first composite layer 200 and the second composite layer 300.
In S11, the graphite/polyaniline paper may be generated by reacting polyaniline in situ on the graphite paper. Firstly, the area of 25cm can be taken2Graphite paper with thickness of 25 μm is soaked in 20ml of 0.02mol L-1Aniline in hydrochloric acid solution for one hour. The mass ratio of polyaniline compounded on the graphite paper can be accurately controlled through the difference of polymerization times.
In one embodiment, the carbon material in the graphite paper may be carbon nanotubes, graphene, two-dimensional metal carbide nanoplatelets, graphite, fullerenes, derivatives thereof, and the like.
In the S12, 20ml of ammonium persulfate aqueous solution is uniformly dripped on the soaked graphite paper and placed in the environment of 0 ℃ for complete reaction for 12 hours.
And in the step S13, taking out the graphite paper from the solution, washing the graphite paper with deionized water, ethanol and acetone, drying the graphite paper in an oven at 60 ℃ for 4 hours, and taking out the graphite paper to obtain the graphite/polyaniline paper, namely, forming a polyaniline layer on the opposite surface of the graphite paper.
In S14, the first composite layer 200 and the second composite layer 300 may be formed by cutting the graphite paper having polyaniline layers formed on both sides thereof.
In one embodiment, before the step of S12, the method further comprises the step of pre-cooling the aqueous ammonium sulfate solution. The precooling step can prevent the excessive high temperature from causing the excessive high speed of the oxidation of the ammonium acid aqueous solution to generate the polyaniline.
In S40, the material of the substrate 100 may be a polymer film. The polymer film can be one or the combination of more than two of polypropylene, polyethylene, silicon rubber, fluorosilicone rubber, polymethyl methacrylate, polyethylene terephthalate, polyurethane, epoxy resin, polyethylacrylate, polybutyl acrylate, polystyrene, polybutadiene and polyacrylonitrile. Wherein the polypropylene may comprise biaxially oriented polypropylene.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present patent. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims (10)

1. A multifunction device, comprising:
a substrate (100);
a first composite layer (200) overlying a surface of the substrate (100) and including an actuation zone (230) and a capacitance zone (240), the first composite layer (200) and the substrate (100) having different coefficients of thermal expansion;
a second composite layer (300) located in the capacitor region (240) and covering the surface of the first composite layer (200) far away from the substrate (100); and
the electrolyte layer (400) located in the capacitor area (240) is sandwiched between the first composite layer (200) and the second composite layer (300), and the first composite layer (200), the electrolyte layer (400) and the second composite layer (300) form a capacitor structure.
2. The multifunction device of claim 1,
the first composite layer (200) comprises:
a first graphite paper (210);
two first polyaniline layers (220) respectively formed on two opposite surfaces of the first graphite paper (210);
the second composite layer (300) comprises:
a second graphite paper (310);
and two second polyaniline layers (320) formed on the two opposite surfaces of the second graphite paper (310), respectively.
3. Multifunction device according to claim 2, characterized in that the substrate (100) comprises:
two support parts (110) arranged at an interval, an
And a connecting part (120) connected between the two support parts (110).
4. A multifunctional device according to claim 3, wherein said second composite layer (300) comprises two second sub-composite layers (330), said two second sub-composite layers (330) respectively corresponding to surfaces of said electrolyte layer (400) remote from said two supports (110).
5. Multifunction device according to claim 3, characterized in that the two spaced-apart supports (110) are arranged in parallel.
6. Multifunction device according to claim 1, characterized in that in the actuation zone (230) the surface of the substrate (100) facing away from the first composite layer (200) is provided with a plurality of grooves (130).
7. Multifunction device according to claim 1, characterized in that the material of the substrate (100) is one or a combination of two or more of polypropylene, polyethylene, silicone rubber, fluorosilicone rubber, polymethyl methacrylate, polyethylene terephthalate, polyurethane, epoxy, polyethylacrylate, polybutyl acrylate, polystyrene, polybutadiene and polyacrylonitrile.
8. The multifunction device of claim 1, wherein said actuation region (230) and said capacitance region (240) are disposed adjacent said first composite layer (200), said actuation region (230) occupying an area no less than one-half of a surface area of said first composite layer (200).
9. A method of fabricating a multi-function device, comprising:
s10, making a first composite layer (200) and a second composite layer (300), the first composite layer (200) comprising a capacitance zone (240) and an actuation zone (230);
s20, coating one surface of the capacitance region (240) of the first composite layer (200) and one surface of the second composite layer (300) with an electrolyte;
s30, oppositely attaching the surfaces of the first composite layer (200) and the second composite layer (300) coated with the electrolyte;
s40, providing a substrate (100), wherein the thermal expansion coefficient of the substrate (100) is different from that of the first composite layer (200), and adhering the surface of the first composite layer (200) far away from the electrolyte to the surface of the substrate (100).
10. The method for manufacturing a multifunction device according to claim 9, wherein said S10 includes:
s11, providing graphite paper, and soaking the graphite paper in hydrochloric acid solution of aniline;
s12, coating the surface of the graphite paper after soaking with ammonium persulfate aqueous solution;
s13, washing the graphite paper coated with the ammonium sulfate aqueous solution by using deionized water, ethanol and acetone;
and S14, cutting the cleaned graphite paper to obtain the first composite layer (200) and the second composite layer (300).
CN201911200599.2A 2019-11-29 2019-11-29 Multifunction device and method of manufacturing multifunction device Active CN111128557B (en)

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CN113054090A (en) * 2021-03-16 2021-06-29 福建师范大学 Sensor and method for manufacturing sensor

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CN103608953A (en) * 2011-06-15 2014-02-26 诺基亚公司 Electrode with reversibly deformable actuating substrate and associated methods
CN107431181A (en) * 2015-02-06 2017-12-01 里兰斯坦福初级大学理事会 Multifunctional energy stores composite
CN110186600A (en) * 2019-06-18 2019-08-30 福建师范大学 Self-supporting film preparation method and pressure sensing actuator

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US20080212262A1 (en) * 2006-10-10 2008-09-04 Micallef Joseph A Piezoelectric Ultracapacitor
US20080297972A1 (en) * 2007-05-29 2008-12-04 Siemens Aktiengesellschaft Capacitor structure with variable capacitance, and use of said capacitor structure
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Publication number Priority date Publication date Assignee Title
CN113054090A (en) * 2021-03-16 2021-06-29 福建师范大学 Sensor and method for manufacturing sensor
CN113054090B (en) * 2021-03-16 2023-07-11 福建师范大学 Sensor and method for manufacturing sensor

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