CN113054090A - Sensor and method for manufacturing sensor - Google Patents
Sensor and method for manufacturing sensor Download PDFInfo
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- CN113054090A CN113054090A CN202110279952.1A CN202110279952A CN113054090A CN 113054090 A CN113054090 A CN 113054090A CN 202110279952 A CN202110279952 A CN 202110279952A CN 113054090 A CN113054090 A CN 113054090A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
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Abstract
The application relates to a sensor and a manufacturing method of the sensor, wherein a thermoelectric conversion layer is laid on a substrate. The first electrode and the second electrode are respectively arranged at two ends of the thermoelectric conversion layer. When the sensor is applied to human tissue organs such as artificial muscles or the like or environments such as robots and the like, the temperature of different parts of the human tissue organs such as the artificial muscles or the like or the robot arms can be greatly different during movement. The local temperature of the thermoelectric conversion layer changes, and a potential difference is formed between two ends of the thermoelectric conversion layer. The thermoelectric conversion layer generates a voltage signal carrying temperature gradient information. The voltage signal may be output through the first electrode and the second electrode. The voltage signal can represent the motion state of human tissue organs or the robot. The sensor may have a self-energizing effect. The sensor may collect energy from the environment and convert it to electrical energy. Therefore, the sensor can output voltage signals externally under the condition of not needing an external power supply, has a simple structure and has an energy-saving effect.
Description
Technical Field
The present disclosure relates to the field of sensors, and more particularly, to a sensor and a method for manufacturing the sensor.
Background
With the development of science and technology, soft robots are receiving more and more attention, and people put forward more requirements on the application of the soft robots. There are more and more kinds of sensors applied to the fields of artificial muscles and robots. However, the conventional monitoring mode requires a power supply to supply power for monitoring the sensing signal, which not only increases the composition of the system, but also increases the energy consumption of the system.
Disclosure of Invention
In view of the above, it is necessary to provide a sensor and a method for manufacturing the sensor.
A sensor, comprising:
a thermoelectric conversion layer;
the thermoelectric conversion layer is laid on the substrate; and
and the first electrode and the second electrode are respectively arranged at two ends of the thermoelectric conversion layer.
In one embodiment, the thermoelectric conversion layer includes graphene and graphene oxide.
In one embodiment, the substrate comprises a biaxially oriented polypropylene film.
In one embodiment, the first electrode and the second electrode are respectively disposed at both ends of the thermoelectric conversion layer along a length direction;
the thermoelectric conversion layer comprises a fixed frame, and the fixed frame comprises two fixed parts arranged at intervals;
in the width direction of the thermoelectric conversion layer, two opposite ends of the substrate are respectively provided with an extension part, the two fixing parts are in one-to-one correspondence with the two extension parts, and the two fixing parts are respectively fixed on the two extension parts.
In one embodiment, the fixing frame further includes a connecting portion, the connecting portion connects the two fixing portions, and the connecting portion is located on a side of the first electrode away from the second electrode.
In one embodiment, the fixing portion extends along a length direction of the thermoelectric conversion layer.
In one embodiment, the thermoelectric module further comprises an actuating portion extending from the thermoelectric conversion layer to a side of the second electrode away from the first electrode, the actuating portion being bent by heat.
In one embodiment, the thermoelectric conversion module further comprises a shielding layer, the shielding layer is located on one side of the substrate far away from the thermoelectric conversion layer, and the projection of the shielding layer on the substrate is located between the projection of the first electrode on the substrate and the projection of the second electrode on the substrate.
A method of making a sensor, comprising:
providing a substrate and a thermoelectric conversion layer;
paving a thermoelectric conversion layer on the surface of the substrate;
a first electrode and a second electrode are respectively arranged at two ends of the thermoelectric conversion layer.
In one embodiment, the method for manufacturing the thermoelectric conversion layer comprises the following steps:
providing graphene powder and graphene oxide powder;
mixing the graphene powder, the graphene oxide powder and water to form a turbid liquid;
and removing water from the turbid liquid to obtain a graphene-graphene oxide film, wherein the graphene-graphene oxide film is the thermoelectric conversion layer.
The sensor and the manufacturing method of the sensor provided by the embodiment of the application comprise a thermoelectric conversion layer, a substrate, a first electrode and a second electrode. The thermoelectric conversion layer is laid on the substrate. The first electrode and the second electrode are respectively arranged at two ends of the thermoelectric conversion layer. When the sensor is applied to human tissue organs such as artificial muscles or the like or environments such as robots and the like, the temperature of different parts of the human tissue organs such as the artificial muscles or the like or the robot arms can be greatly different during movement. When the sensor is applied to the environment, the local temperature of the thermoelectric conversion layer can change, and a potential difference is formed between two ends of the thermoelectric conversion layer. The thermoelectric conversion layer generates a voltage signal carrying temperature difference information. The voltage signal may be output through the first electrode and the second electrode. The voltage signal can represent the motion state of human tissue organs or the robot. The sensor may have a self-energizing effect. The sensor may collect energy from the environment and convert it to electrical energy. Therefore, the sensor can output voltage signals externally under the condition of not needing an external power supply, has a simple structure and has an energy-saving effect.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments or the conventional technologies of the present application, the drawings used in the descriptions of the embodiments or the conventional technologies will be briefly introduced below, it is obvious that the drawings in the following descriptions are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic diagram of a sensor provided in an embodiment of the present application;
FIG. 2 is an exploded view of a sensor according to another embodiment of the present application;
FIG. 3 is a schematic view of a sensor provided in accordance with another embodiment of the present application;
FIG. 4 is an exploded view of a sensor according to another embodiment of the present application;
FIG. 5 is a schematic view of a sensor provided in accordance with another embodiment of the present application;
FIG. 6 is a top view of a sensor provided in accordance with an embodiment of the present application;
FIG. 7 is a schematic view of an actuator portion provided in accordance with an embodiment of the present application under illumination;
FIG. 8 is a schematic view of a sensor provided in accordance with another embodiment of the present application;
fig. 9 is a schematic view of the bending of the actuator under illumination of another sensor provided in the present application.
Description of reference numerals:
the sensor comprises a sensor 10, a thermoelectric conversion layer 100, an actuating part 110, a substrate 200, an extending part 210, a first electrode 310, a second electrode 320, a fixed frame 400, a fixed part 410, a connecting part 420 and a shielding layer 500.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is further described in detail below by way of embodiments and with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
The numbering of the components as such, e.g., "first", "second", etc., is used herein only to distinguish the objects as described, and does not have any sequential or technical meaning. The term "connected" and "coupled" when used in this application, unless otherwise indicated, includes both direct and indirect connections (couplings). In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present application and for simplicity in description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be considered as limiting the present application.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
Referring to fig. 1, an embodiment of the present application provides a sensor 10. The sensor 10 includes a thermoelectric conversion layer 100, a substrate 200, a first electrode 310, and a second electrode 320. The thermoelectric conversion layer 100 is laid on the substrate 200. The first electrode 310 and the second electrode 320 are respectively disposed at two ends of the thermoelectric conversion layer 100.
The thermoelectric conversion layer 100 may have a thermoelectric effect. The thermoelectric effect refers to a phenomenon in which an electric current or electric charges are accumulated when electrons (holes) in a heated object move from a high temperature region to a low temperature region along with a temperature gradient. Therefore, if the temperature of a certain region in the thermoelectric conversion layer 100 increases, electrons or holes in the region move toward a low temperature region, thereby forming a current.
In one embodiment, the thermoelectric conversion layer 100 may be one or a combination of two or more of carbon nanotubes, graphene, reduced graphene oxide, two-dimensional metal carbide nanosheets, fullerene, and the like and derivatives thereof, polyacetylene, polyaniline, polypyrrole, polythiophene, polycarbazole, and poly (3, 4-ethylenedioxythiophene). The material can have thermoelectric effect and photo-thermal effect. Therefore, the thermoelectric conversion layer 100, which is made of the above-mentioned material, can convert light energy into thermal energy or directly receive thermal energy. The thermal energy may cause the thermoelectric conversion layer 100 to form a temperature gradient. The temperature gradient formed by the thermoelectric conversion layer 100 can be converted into electric energy. By measuring the voltage signal formed by the thermoelectric conversion layer 100, the change in the position and the magnitude of the heat received by the thermoelectric conversion layer 100 can be characterized.
It will be appreciated that when one end of the sensor 10 is heated by a heat source, the temperature of the heated end of the sensor 10 rises. The temperature of the end not heated remains almost unchanged. The sensor forms a temperature gradient in the length direction. Due to the thermoelectric effect, the sensor outputs a voltage signal spontaneously, and the strength of the voltage signal has a certain relation with the temperature of the heated part, so that the temperature of a heat source can be represented.
The sensor 10 may also function as a photo-thermoelectric generator, when one end of the device is illuminated with a light source, such as one end of a near-infrared light illumination device, the temperature of the illuminated portion rises and the temperature of the non-illuminated portion remains almost constant. The sensor 10 develops a temperature gradient in the longitudinal direction. Due to the thermoelectric effect, the sensor 10 outputs electrical energy through the first electrode 310 and the second electrode 320, and the intensity of the voltage has a certain relationship with the temperature of the heated portion. The magnitude of the voltage can be used to characterize the temperature change of the sensor when illuminated. The sensor also functions to generate electricity.
The substrate 200 may function to support the thermoelectric conversion layer 100. The shape of the substrate 200 may be the same as that of the electrothermal conversion layer. The substrate 200 may also be slightly larger than the thermoelectric conversion layer 100 to prevent the thermoelectric conversion layer 100 from being damaged.
In one embodiment, the material of the substrate 200 may be one or a combination of two or more of biaxially oriented polypropylene, polyethylene, silicone rubber, fluorosilicone rubber, polymethyl methacrylate, polyethylene terephthalate, polyurethane, epoxy resin, polyethyl acrylate, polybutyl acrylate, polystyrene, polybutadiene, and polyacrylonitrile. The material may have a large coefficient of thermal expansion and good flexibility.
The first electrode 310 and the second electrode 320 may be conductive materials. A signal line is connected to the first electrode 310 and the second electrode 320. When a potential difference is formed across the thermoelectric conversion layer 100, the thermoelectric conversion layer 100 generates a voltage signal affected by a temperature gradient. The voltage signal may be output through the first electrode 310 and the second electrode 320.
In one embodiment, the first electrode 310 and the second electrode 320 may be both copper foils. The shapes of the first electrode 310 and the second electrode 320 may be different. The shapes of the first electrode 310 and the second electrode 320 may be set according to a use environment.
In one embodiment, the first electrode 310 and the second electrode 320 may be embedded in the thermoelectric conversion layer 100, and thus, the firmness of the first electrode 310 and the second electrode 320 in the thermoelectric conversion layer 100 may be improved.
When the sensor 10 is applied to human tissue and organs such as artificial muscles or the like or in an environment such as a robot, the temperature of different parts of the human tissue and organs such as artificial muscles or the like or the robot arm may be greatly different during movement. When the sensor 10 is applied to the above environment, the local temperature of the thermoelectric conversion layer 100 changes, and a potential difference is formed between two ends of the thermoelectric conversion layer 100. The thermoelectric conversion layer 100 generates a voltage signal carrying temperature gradient information. The voltage signal may be output through the first electrode 310 and the second electrode 320. The voltage signal can represent the motion state of human tissue organs or the robot. The sensor 10 may have a self-energizing effect. The sensor 10 may collect energy from the environment and convert it to electrical energy. Therefore, the sensor 10 can output an electric signal to the outside without an external power supply, has a simple structure, and has an energy-saving effect.
In one embodiment, the thermoelectric conversion layer 100 includes graphene and graphene oxide. That is, the thermoelectric conversion layer 100 may be a thin film formed of the graphene and the graphene oxide.
The graphene is a thermoelectric material, has good photo-thermal conversion performance and can be used as a photo-thermal electric material. Therefore, when the thermoelectric conversion layer 100 is fabricated using graphene, the thermoelectric conversion layer 100 can convert thermal energy into electrical energy. When the sensor 10 is used in a light environment, the sensor 10 may also convert light energy into heat energy and then convert the heat energy into electrical energy. Therefore, the sensor 10 can output a voltage signal which can represent the temperature change of the sensor 10 when the light intensity is not uniform or the heating is not uniform.
Graphene oxide has rich oxygen-containing functional groups. The graphene oxide belongs to a hydrophilic material. The graphene oxide may be used as a surfactant to treat materials that are insoluble in aqueous solutions (e.g., graphite and carbon nanotubes) to prevent graphene from re-stacking in the liquid phase. The thermoelectric conversion layer 100 prepared by compounding the two can play a self-supporting role.
In one embodiment, the substrate 200 comprises a biaxially oriented polypropylene film. It is understood that the biaxially oriented polypropylene film has good flexibility. The thermoelectric conversion layer 100 made of graphene-graphene oxide may be attached to the surface of the stretched polypropylene film, so that the strength of the thermoelectric conversion layer 100 may be improved and the thermoelectric conversion layer 100 may be prevented from being broken.
Referring to fig. 2 and 3, in an embodiment, the first electrode 310 and the second electrode 320 are respectively disposed at two ends of the thermoelectric conversion layer 100 along a length direction. The thermoelectric conversion layer 100 includes a fixing frame 400. The fixing frame 400 can prevent the sensor 10 from being deformed during contact heating or illumination heating. It will be appreciated that if the sensor 10 is deformed when a heat source is in direct contact with the sensor 10. The position of the sensor 10 may vary and thus reduce the accuracy of the test.
The fixing frame 400 includes two fixing portions 410 disposed at an interval. In the width direction of the thermoelectric conversion layer 100, two opposite ends of the substrate 200 are respectively provided with an extension portion 210. The two fixing portions 410 correspond to the two extension portions 210 one by one, and the two fixing portions 410 are respectively fixed to the two extension portions 210.
In one embodiment, the thermoelectric conversion layer 100 may be rectangular. The first electrode 310 and the second electrode 320 may be disposed at both ends of the thermoelectric conversion layer 100 at an interval along the longitudinal direction of the thermoelectric conversion layer 100. The width direction of the thermoelectric conversion layer 100 is perpendicular to the length direction of the thermoelectric conversion layer 100. Along the width direction of the thermoelectric conversion layer 100, two ends of the substrate 200 may respectively extend out of one of the extension portions 210. The extension 210 may be integrally formed with the base 200. The extension 210 may have the same length and thickness as the base 200. One of the fixing portions 410 may be pressed on one of the extension portions 210. Therefore, the fixing frame 400 can fix the shape of the thermoelectric conversion layer 100 in the width direction. The fixing frame 400 fixes the substrate 200, so that the substrate 200 can be prevented from being deformed when being heated or illuminated unevenly, and the position sensed by the sensor 10 can be prevented from being influenced. The measurement accuracy of the sensor 10 can be improved.
In one embodiment, the fixing frame 400 further includes a connection part 420. The connecting portion 420 connects the two fixing portions 410. The connection portion 420 is located on a side of the first electrode 310 away from the second electrode 320. It is understood that the connection part 420 may not contact the first electrode 310. Therefore, the connection part 420 may be prevented from interfering with the first electrode 310. Both ends of the connection part 420 may be connected to ends of the two fixing parts 410, respectively. The connecting portion 420 and the two fixing portions 410 may form a U-shaped structure. The U-shaped structure may surround the thermoelectric conversion layer 100 when placed on the substrate 200. The fixing frame 400 has a simple structure, and can prevent the sensor 10 from being deformed. The fixing frame 400 of the U-shaped structure can play a role of preventing the sensor 10 from being deformed.
In one embodiment, the fixing portion 410 extends along a length direction of the thermoelectric conversion layer 100. The length of the fixing part 410 may be the same as that of the thermoelectric conversion layer 100 or slightly greater than that of the thermoelectric conversion layer 100. Therefore, the fixing portion 410 can prevent the substrate 200 from being deformed in the longitudinal direction.
Referring to fig. 4, 5 and 6, in one embodiment, the sensor 10 further includes an actuating portion 110. The actuator 110 extends from the thermoelectric conversion layer 100 to a side of the second electrode 320 away from the first electrode 310. The actuating portion 110 is bent by heat. It is understood that the actuator 110 may be made of a composite of materials having different thermal expansion rates. Therefore, when the actuating portion 110 is heated, the actuating portion expands to different degrees at different positions, and thus deforms and bends.
Referring to fig. 7, when the actuator 110 is illuminated or heated, the actuator 110 is bent due to the temperature rise. When irradiated by near infrared light, the irradiated portion of the actuator 110 is deformed while its temperature is increased by converting light energy into heat energy due to photothermal effect. The temperature of the portion not irradiated is almost kept constant, and the sensor 10 forms a temperature gradient in the length direction. Due to the thermoelectric effect, the sensor 10 will spontaneously output a voltage signal. The intensity of the voltage signal has a certain relation with the temperature of the heated part irradiated by light. The bending condition of the actuating part 110 has a certain relation with the temperature of the heated part heated by the light. Thus, the voltage signal may be used to characterize the deformation of the actuation portion 110.
In this embodiment, the sensor 10 may have a photo-thermal actuation function, and the actuator 110 may deform due to different expansion coefficients of different materials after the temperature is increased, so as to convert thermal energy into mechanical energy.
In one embodiment, the fixing frame 400 may be disposed around only the thermoelectric conversion layer 100 on the substrate 200. The fixing frame 400 may not be provided to a portion of the actuating portion 110. The actuating portion 110 can be freely deformed according to temperature change. However, for the accuracy of the voltage signal output, the fixing frame 400 fixes the portion of the thermoelectric conversion layer 100, thereby ensuring that the thermoelectric conversion layer 100 is not deformed. Meanwhile, the positions of the first electrode 310 and the second electrode 320 can be ensured to be stable, so that the test precision can be improved.
In one embodiment, the actuator 110 may be a two-layer structure disposed in a stack. A layer structure may be formed by the thermoelectric conversion layer 100 extending to a side of the second electrode 320 away from the first electrode 310. That is, the thermoelectric conversion layer 100 is integrally formed with one layer of the actuating portion 110. Another layer of the actuator 110 may be formed by the substrate 200 extending to a side of the second electrode 320 away from the first electrode 310. The actuating portion 110 has a two-layer structure, one layer may be a graphene-graphene oxide film, and the other layer may be a biaxially oriented polypropylene film. The graphene-graphene oxide thin film may have a negative thermal expansion coefficient. The biaxially oriented polypropylene film may have a high coefficient of thermal expansion. Therefore, when the temperature of the actuator 110 is increased, the expansion coefficient of the biaxially oriented polypropylene film is larger, and thus the degree of deformation is higher. The actuating portion 110 is bent toward a side where the graphene-graphene oxide thin film is located. The degree of bending of the actuator 110 may have a relationship with a change in temperature of the actuator 110, and the voltage signal may be indicative of the bending of the actuator 110. Therefore, the temperature change of the actuating portion 110 can be reflected by the voltage signal.
In one embodiment, the thermoelectric conversion layer 100 and the substrate 200 have the same shape. The width of the actuating portion 110 is smaller than the width of the thermoelectric conversion layer 100 and the substrate 200. Therefore, the actuator 110 is less constrained by the substrate 200 and the thermoelectric conversion layer 100. The deformation of the actuating portion 110 is more sensitive.
Referring to fig. 8 and 9, in one embodiment, the sensor 10 further includes a shielding layer 500. The shielding layer 500 is located on the side of the substrate 200 away from the thermoelectric conversion layer 100. And the projection of the shielding layer 500 on the substrate 200 is located between the projection of the first electrode 310 on the substrate 200 and the projection of the second electrode 320 on the substrate 200. The shielding layer 500 may be an opaque material. And the shielding layer 500 can not have obvious temperature change after being stimulated by light. The shielding layer 500 does not deform significantly after a temperature change. In one embodiment, the shielding layer 500 may be a metal material. The shielding layer 500 is located on the side of the substrate 200 away from the thermoelectric conversion layer 100. Therefore, the shielding layer 500 does not affect the current in the thermoelectric conversion layer 100. The projection of the shielding layer 500 on the substrate 200 is located between the projection of the first electrode 310 on the substrate 200 and the projection of the second electrode 320 on the substrate 200. The shielding layer 500 does not increase the resistance to deformation of the actuating portion 110.
When the sensor 10 is illuminated with a light source from the direction of the shielding layer 500, the actuator 110 is not shielded by the shielding layer 500. The temperature of the actuating portion 110 increases and deformation occurs. The temperature of the portion of the sensor 10 shielded by the shielding layer 500 remains almost unchanged because it is not irradiated with light. The sensor 10 forms a temperature gradient in the longitudinal direction. Due to the thermoelectric effect, a voltage is generated in the sensor 10 and a voltage signal is emitted through the first electrode 310 and the second electrode 320. The voltage signal has a certain relationship with the temperature of the actuating portion 110. The temperature of the actuator 110 is also related to the bending of the actuator 110. Thus, the voltage signal may be used to characterize the deformation of the actuation portion 110.
It will be appreciated that the wavelength of light illuminating the sensor 10 may be selected as desired. Therefore, the wavelength of light irradiating the sensor 10 can also be judged by the deformation of the actuating portion 110.
The embodiment of the present application further provides a manufacturing method of the sensor 10. The manufacturing method comprises the following steps:
s10, providing the substrate 200 and the thermoelectric conversion layer 100;
s20, laying thermoelectric conversion layer 100 on the surface of the substrate 200;
s30, a first electrode 310 and a second electrode 320 are provided at both ends of the thermoelectric conversion layer 100, respectively.
In one embodiment, the method for manufacturing the thermoelectric conversion layer 100 includes:
s110, providing graphene powder and graphene oxide powder;
s120, mixing the graphene powder, the graphene oxide powder and water to form a suspension;
and S130, removing water from the turbid liquid to obtain a graphene-graphene oxide film, wherein the graphene-graphene oxide film is the thermoelectric conversion layer 100.
In S110, the mass ratio of the graphene powder to the graphene oxide powder may be 1: 1.
in S120, the mass ratio of 1: adding the graphene powder and the graphene oxide powder of 1 into deionized water, and carrying out ultrasonic treatment for 20 minutes to obtain a suspension formed by mixing the graphene oxide powder and water.
In S130, deionized water may be removed from the suspension by a vacuum filtration method to obtain a graphene-graphene oxide film. The graphene-graphene oxide film may be dried at 50 ℃ for 2 hours.
After S130, a biaxially oriented polypropylene film may be attached to the graphene-graphene oxide film to obtain a two-layer structure film obtained from graphene-graphene oxide and biaxially oriented polypropylene. The sensor 10 is formed of a double-layer structure film obtained by graphene-graphene oxide and biaxially oriented polypropylene.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present patent. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. A sensor, comprising:
a thermoelectric conversion layer (100);
a substrate (200) on which the thermoelectric conversion layer (100) is laid; and
and a first electrode (310) and a second electrode (320) which are respectively arranged at two ends of the thermoelectric conversion layer (100).
2. The sensor according to claim 1, wherein the thermoelectric conversion layer (100) comprises graphene and graphene oxide.
3. A sensor according to claim 2, wherein the substrate (200) comprises a biaxially oriented polypropylene film.
4. The sensor according to claim 1, wherein the first electrode (310) and the second electrode (320) are respectively disposed at both ends of the thermoelectric conversion layer (100) in a length direction;
the thermoelectric conversion layer (100) comprises a fixed frame (400), wherein the fixed frame (400) comprises two fixed parts (410) arranged at intervals;
in the width direction of the thermoelectric conversion layer (100), two opposite ends of the substrate (200) are respectively provided with an extension part (210), the two fixing parts (410) are in one-to-one correspondence with the two extension parts (210), and the two fixing parts (410) are respectively fixed on the two extension parts (210).
5. The sensor according to claim 4, wherein the holder (400) further comprises a connecting portion (420), the connecting portion (420) connecting the two fixing portions (410), the connecting portion (420) being located on a side of the first electrode (310) away from the second electrode (320).
6. The sensor according to claim 5, wherein the fixing portion (410) extends along a length direction of the thermoelectric conversion layer (100).
7. The sensor of claim 1, further comprising an actuation portion (110), the actuation portion (110) extending from the thermoelectric conversion layer (100) to a side of the second electrode (320) away from the first electrode (310), the actuation portion (110) bending upon heating.
8. The sensor according to claim 7, further comprising a shielding layer (500), wherein the shielding layer (500) is located on a side of the substrate (200) away from the thermoelectric conversion layer (100), and wherein a projection of the shielding layer (500) on the substrate (200) is located between a projection of the first electrode (310) on the substrate (200) and a projection of the second electrode (320) on the substrate (200).
9. A method of making a sensor, comprising:
providing a substrate (200) and a thermoelectric conversion layer (100);
paving a thermoelectric conversion layer (100) on the surface of the substrate (200);
a first electrode (310) and a second electrode (320) are provided at both ends of the thermoelectric conversion layer (100), respectively.
10. The method of manufacturing a sensor according to claim 9, wherein the method of manufacturing the thermoelectric conversion layer (100) comprises:
providing graphene powder and graphene oxide powder;
mixing the graphene powder, the graphene oxide powder and water to form a turbid liquid;
and removing water from the turbid liquid to obtain a graphene-graphene oxide film, wherein the graphene-graphene oxide film is the thermoelectric conversion layer (100).
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| CN210441993U (en) * | 2019-08-13 | 2020-05-01 | 怀化乐源农业开发有限公司 | Temperature detector based on thermoelectric effect |
| CN110473956A (en) * | 2019-08-21 | 2019-11-19 | 金华伏安光电科技有限公司 | A kind of optical detector based on photo-thermal electrical effect |
| CN111128557A (en) * | 2019-11-29 | 2020-05-08 | 福建师范大学 | Multifunction device and method of manufacturing multifunction device |
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