CN113053719B

CN113053719B - Dry etching machine and using method thereof

Info

Publication number: CN113053719B
Application number: CN202110328670.6A
Authority: CN
Inventors: 邵帅
Original assignee: Jiangsu Yuetongtai Technology Co ltd
Current assignee: Jiangsu Yuetongtai Technology Co ltd
Priority date: 2021-03-26
Filing date: 2021-03-26
Publication date: 2022-12-16
Anticipated expiration: 2041-03-26
Also published as: CN113053719A

Abstract

The invention relates to the technical field of dry etching, in particular to a dry etching machine and a using method thereof. The method comprises the following steps: the sealed passageway, the right side at sealed passageway top is run through and is provided with continuous feedway, the left side of sealed passageway is provided with surface cleaning equipment, conveyer belt top equidistance fixedly connected with conveyer of sealed passageway, conveyer's top equidistance fixedly connected with placement machine constructs, both sides equidistance fixedly connected with conveying axle equalling around the conveyer inner wall, the conveying axle with conveyer's bottom overlap joint, square mouth has been seted up at sealed passageway top. The gas generated by the process gas device is conveyed into the plurality of inner cavities of the plasma isolation plates through the conveying pipe, and the two plasma isolation plates are oppositely discharged, so that the gas between the two plasma isolation plates forms a plasma cluster, the number of electron losing can be increased, and the etching quality and efficiency are further increased.

Description

Dry etching machine and using method thereof

Technical Field

The invention relates to the technical field of dry etching, in particular to a dry etching machine and a using method thereof.

Background

Dry etching is a technique of performing thin film etching using plasma. When the gas is present in the form of a plasma, it has two characteristics: on one hand, the chemical activity of the gases in the plasma is much stronger than that of the gases in the normal state, and the gases can react with the materials more quickly by selecting proper gases according to different etched materials, so that the aim of etching removal is fulfilled; on the other hand, the electric field can be used for guiding and accelerating the plasma, so that the plasma has certain energy, and when the plasma bombards the surface of the etched object, atoms of the etched object material can be knocked out, thereby achieving the purpose of etching by utilizing physical energy transfer. Thus, dry etching is a result of a balance of both physical and chemical processes on the wafer surface.

Current dry etching machine is when processing the sculpture board, carry out the feed through rotatory material loading platform, the sculpture board needs the manual work to place, like this after the sculpture is accomplished, need artifical continuous material loading, unusual complicacy, and after accomplishing the sculpture, need wash the processing to the sculpture board surface, traditional singly is equipped with the washing basin, it needs artifical the participation to wash like this, degree of mechanization is poor, the important continuity is poor, every link leaves not to leave artifical the participation, lead to machining efficiency low.

The present inventors have been made to solve the above problems.

Disclosure of Invention

In order to achieve the purpose, the invention adopts the main technical scheme that: a dry etcher comprising:

sealed passageway, the right side at sealed passageway top is run through and is provided with continuous feedway, the left side of sealed passageway is provided with surface cleaning equipment, conveyer belt top equidistance fixedly connected with conveyer of sealed passageway, conveyer's top equidistance fixedly connected with placement machine constructs, both sides equidistance fixedly connected with conveying axle all around the conveyer inner wall, the conveying axle with conveyer's bottom overlap joint, square mouth has been seted up at sealed passageway top, square mouth endotheca is equipped with radio frequency device, the front side fixedly connected with processing procedure gas device of radio frequency device inner wall, processing procedure gas device bottom are provided with the base plate.

Preferably, sealed passageway includes the square cover of cavity, the square cover top right side fixedly connected with mounting panel of cavity, the whereabouts mouth has been seted up at the top of mounting panel, movable groove and U-shaped groove one have all been seted up to the left and right sides of whereabouts mouthful inner wall, an inner chamber intercommunication in movable groove and U-shaped groove, the movable groove has the movable rod through return spring elastic connection, the outside fixedly connected with L shape pole of movable rod, the inboard fixedly connected with stopper of movable rod.

Preferably, conveyer includes plate conveyor, the equal fixedly connected with rack in both sides around the plate conveyor, plate conveyor top front side is provided with the linkage strip.

Preferably, the continuous feeding device comprises a placing box, a U-shaped groove II is arranged on the front side of the inner wall of the placing box, two plywood plates are fixedly connected on the front side of the inner wall of the transverse groove of the U-shaped groove II, opposite sides of the two plywood plates are fixedly connected through a limiting plate, a slide bar is inserted into one side of the limiting plate, one end of the slide bar is fixedly connected with a connecting frame, the other end of the slide bar is fixedly connected with a guide block, two compression springs are fixedly connected with the connecting frame and the opposite side of the limiting plate, opposite sides of the two compression springs are fixedly connected through an elastic sheet, two sides of the inner wall of the elastic sheet are fixedly connected through extrusion springs, one side of the connecting frame is fixedly connected with a U-shaped block through a connecting block, a shaft lever is movably connected in chutes formed in the upper side and the lower side of the inner wall of the U-shaped block, and a rolling shaft is sleeved on the shaft lever, a U-shaped frame is inserted into one side of the U-shaped block, an arc-shaped block is fixedly connected to one end of the U-shaped block, the arc-shaped block is fixedly connected with one side of the inner wall of the U-shaped block through an adjusting spring, a discharging cavity is arranged in the middle of the placing box, the left side and the right side of the inner cavity of the discharging cavity are hinged to clamping strips through hinge rods, a rubber plate is fixedly connected to one side of each clamping strip, the roller shaft positioned at the lowest position is in lap joint with one side of the rubber plate, the other roller shafts are spaced from the rubber plate, a vertical rod is inserted into the bottom of the two inner walls of the U-shaped groove in the placing box, a plurality of oval blocks are sleeved on the vertical rod, an inclined groove is formed in the bottom of the vertical rod, two sides of the oval block positioned at the lowest position are positioned below the two L-shaped rods, and arc-shaped grooves matched with two ends of the oval blocks are formed in the oval block, the oval blocks positioned on the L-shaped rod are positioned below the two guide blocks and are in contact with each other, and one sides of the other guide blocks are in contact with the inner bulges of the oval blocks.

When etching is prepared, the etching plates are put in from the upper part of the material placing cavity, the etching plates are stacked in the material placing cavity, the etching plate at the lowest part is positioned on the inclined planes of the two limiting blocks and limited by the inclined planes of the limiting blocks, the etching plate at the lowest part of the limiting blocks in the material placing cavity is clamped by the two rolling shafts at the lower part, the clamped etching plate is limited by extrusion, so that other etching plates are stacked in the material placing cavity, when the material is discharged, the bottom of the linkage bar is contacted with the chute which can drive the vertical bar to move upwards, meanwhile, the lowermost oval block on the vertical rod is firstly contacted with the arc-shaped grooves on the L-shaped rods, the oval block contacted with the arc-shaped grooves can extrude the two L-shaped rods to two sides to limit the etching plate at the limit block to fall into the placing mechanism, meanwhile, the vertical rod continues to rise, at the moment, the U-shaped groove II is internally provided with an oval block at the lowest part, other elliptical blocks are simultaneously separated from the adjacent two guide blocks in lap joint, so that the two guide blocks move towards opposite directions under the elastic action of the compression spring, the elastic sheet and the extrusion spring, and is separated from the contact with the oval block, the roller on the connecting frame is contacted with the rubber plate, at the moment, all the etching plates positioned in the discharging cavity are clamped tightly, when the top of the linkage bar reaches the chute, the vertical bar rises, the lowest elliptical block is contacted with the two lowest guide blocks, the guide blocks move in opposite directions, meanwhile, the two L-shaped rods are restored to the original positions, the two roller shafts at the lowest part are separated from the lower part of the rubber plate, the etching plate at the lower part enters the limiting block, and limited by the limiting block, after the series of operations are completed, the vertical rod moves downwards under the elasticity of the spring arranged at the top, and the etching plate further moves to the original position at the moment.

Preferably, surface cleaning equipment includes the equipment box, two cleaning heads of telescopic band fixedly connected with are passed through at the top of equipment box inner wall, the top fixedly connected with evacuating device of equipment box inner wall, two four elastic rods of the equal fixedly connected with in top of cleaning head, equal fixedly connected with diaphragm on the elastic rod of eight front and back sides, the reciprocating type lead screw of middle part fixedly connected with of diaphragm bottom, the cover is equipped with the stop collar on the reciprocating type lead screw, both sides all are provided with the gear around the square cover inner wall of cavity, rack and gear engagement, the cover is equipped with the ball cover on the gear, reciprocating type lead screw cover is established in the ball cover, it has the fine setting piece to wash first bottom inner chamber through two fine setting spring elastic connection, the bottom of fine setting piece is embedded to have servo motor, servo motor's bottom cover is equipped with the fixed disk, the bottom overlap joint of fixed disk has the washing board, wash the board with servo motor's output fixed connection, a plurality of sliding grooves have been seted up to the bottom of washing board, the round hole has been seted up to the top of sliding groove inner wall, the top of sliding groove inner wall runs through there is equipped with the ejector pin, the swash plate fixedly connected with the swash plate, arc chute is connected with the closed chute that the suction hole is connected with the suction hose all around the suction hose.

After the etched product is processed, when the product is conveyed to the surface cleaning equipment by the conveying device, because a gear on the surface cleaning equipment is in contact with a rack on the conveying device, the gear can rotate, at the moment, two reciprocating screw rods are driven by a ball sleeve to move downwards, a cleaning head moves to the top of a placing mechanism moving towards the lower part of the cleaning head and slowly enters an etching plate inside the placing mechanism, a deviation correcting rod is firstly in contact with an inclined plane of the placing mechanism and adjusts a fine adjusting block, the fine adjusting block extrudes a fine adjusting spring, so that the cleaning plate can be stably attached to the top of the etching plate, a servo motor is started, the servo motor drives the cleaning plate to slowly rotate, a sponge can clean the surface of the product, when a ventilation inclined plate is aligned with an arc chute, under the elasticity of an ejection spring, a closing plate moves upwards, at the moment, the closing plate enters a large cavity of a sliding groove, a vacuumizing device passes through a suction hole, at the moment, negative pressure is generated in the sliding cavity, and a gap between the sliding cavity and the product can suck reaction liquid generated above, so that the cleaning effect is better and the cleaning effect is faster.

Preferably, the placing mechanism comprises an installation disc, an open horn ring is sleeved at the top of the installation disc, a plurality of arc rotary grooves are formed in the surface of the open horn ring at equal intervals, an arc conveying shaft is movably connected in the arc rotary grooves, soft silica gel is arranged on the surface of the arc conveying shaft, a transmission gear is sleeved at the outer end of the arc conveying shaft, a conical fluted disc is rotatably connected in the installation disc and is positioned under the transmission gear, the conical fluted disc is meshed with the transmission gears, a driving motor is fixedly connected to the right side of the installation disc through a support plate, a driving wheel is fixedly connected to the output end of the driving motor, the driving wheel is in transmission connection with a belt groove formed in the side wall of the conical fluted disc through a transmission belt, an annular sleeve is fixedly connected to the bottom of the inner wall of the installation disc, and a placing platform is sleeved in the annular sleeve, the inner cavity of the annular sleeve is provided with three elastic strips at equal intervals, the elastic strips are provided with limiting sliding ports, positioning rods are inserted into the limiting sliding ports, the positioning rods are fixedly connected to the bottom of the inner wall of the annular sleeve, the inner wall of the annular sleeve is fixedly connected with arc-shaped strips through two back pressure springs, the arc-shaped strips are fixedly connected onto the elastic strips, one ends of the elastic strips penetrate through clamping grooves formed in the outer side of the annular sleeve and extend to the outside of the annular sleeve, one ends of the elastic strips are provided with embedded grooves, the bottom of the mounting disc is fixedly connected with an air suction pump, the air suction pump is provided with a center hole, the inner wall of the annular sleeve is embedded with first suction ports at equal intervals, the top of the placing platform is provided with second suction ports at equal intervals, and the air suction pump is communicated with the second suction ports and the first suction ports through a plurality of connecting air pipes;

wherein, suction mouth two includes the adsorption tube, the bottom intercommunication of adsorption tube has the arc tube, the arc tube passes through connecting pipe and connecting pipe intercommunication, arc tube top opposite side intercommunication has suction mouth one, the arc tube inner chamber is located suction mouth one is equipped with the sealing ring, adsorption tube inner chamber cover is equipped with the flower template, the depression bar under the top fixedly connected with of flower template, the bottom fixedly connected with soft pole of flower template, the one end of soft pole extend to in suction mouth one and with sealing plug fixed connection.

When an etching board enters a placing mechanism, the etching board firstly falls on an open horn ring, a driving wheel on a driving motor drives a conical fluted disc to rotate through a conveying belt, the conical fluted disc rotates by driving a plurality of transmission gears to rotate, at the moment, the transmission gears can enable arc transmission shafts in arc rotating grooves to rotate, the arc transmission shafts can transmit the etching board in surface contact with the arc transmission shafts to the top of an annular sleeve, and the etching board is sucked by an air pump, a suction port II and a suction port I generate negative pressure, so that the etching board enters a placing platform, meanwhile, after the etching board is contacted with an embedded groove, under the condition of suction, three elastic strips move inwards, so that after the etching board is tightly attached to the top of the placing platform, the elastic strips can clamp the etching board under the elasticity of a back pressure spring, the etching board can be transmitted and etched stably, when the etching board is contacted with the suction port II, under the condition of suction force, the etching board pushes a lower pressing rod downwards to drive the soft rod to jack up the etching board, at the moment, one-way adsorption sealing plug can be separated from the sealing ring, when the etching board is contacted with the etching board, dust can be removed, the air can be adsorbed in a one-way, and the sealing plug can be stably adsorbed on the sealing plug when the etching board is removed, and the sealing plug can be stably adsorbed by the sealing plug when the etching board.

Preferably, processing procedure gas device includes that a plurality of gases make the device, gas makes the device and is provided with a plurality of gas outlets, the gas outlet intercommunication has the conveyer pipe, the radio frequency device inner wall just is located every gas system device department and all is provided with two plasma division boards, the bottom fixedly connected with parting strip of plasma division board, the plasma division board inner chamber with the conveyer pipe intercommunication, gas outlet channel has been seted up to one side of plasma division board, gas outlet channel endotheca is equipped with the branch gas board and gives vent to anger board one and gas outlet plate two.

The gas generated by the process gas device is conveyed into the plurality of inner cavities of the plasma isolation plates through the conveying pipe, and the two plasma isolation plates are oppositely discharged, so that the gas between the two plasma isolation plates forms a plasma cluster, the number of electron losing can be increased, and the etching quality and efficiency are further increased.

Preferably, the radio frequency device comprises a mounting table, and a plurality of radio frequency machines are arranged at the bottom of the mounting table.

Preferably, the use method of the dry etching machine comprises the following steps:

firstly, when etching is prepared, an etching plate is put into the material placing cavity from the upper part of the material placing cavity, the etching plate is stacked into the material placing cavity, the etching plate at the lowest part is positioned on the inclined planes of the two limiting blocks and limited by the inclined planes of the limiting blocks, the etching plate at the lowest part of the limiting blocks in the material placing cavity is clamped by the two rolling shafts at the lower part, the clamped etching plate is limited by extrusion, so that other etching plates are stacked in the material placing cavity, when the material is discharged, the bottom of the linkage strip is contacted with the chute, the chute can drive the vertical rod to move upwards, meanwhile, the lowermost oval block on the vertical rod is firstly contacted with the arc-shaped grooves on the L-shaped rods, the oval block contacted with the arc-shaped grooves can extrude the two L-shaped rods to two sides to limit the etching plate at the limit block to fall into the placing mechanism, meanwhile, the vertical rod continues to rise, at the moment, the U-shaped groove II is internally provided with an oval block at the lowest part, other elliptical blocks are simultaneously separated from the adjacent two guide blocks in lap joint, so that the two guide blocks move towards opposite directions under the elastic action of the compression spring, the elastic sheet and the extrusion spring, and is separated from the contact with the oval block, the roller on the connecting frame is contacted with the rubber plate, at the moment, all the etching plates positioned in the discharging cavity are clamped tightly, when the top of the linkage bar reaches the chute, the vertical bar rises, the lowest elliptical block is contacted with the two lowest guide blocks, the guide blocks move in opposite directions, meanwhile, the two L-shaped rods are restored to the original positions, the two roller shafts at the lowest part are separated from the lower part of the rubber plate, the etching plate at the lower part enters the limiting block, the vertical rod moves downwards under the elasticity of a spring arranged at the top after the series of operations are finished, and the etching plate further moves to the original position at the moment;

secondly, when the etching plate enters the placing mechanism, the etching plate firstly falls on the open horn ring, a driving wheel on a driving motor drives a conical fluted disc to rotate through a conveying belt, the conical fluted disc drives a plurality of transmission gears to rotate in the rotating process of the conical fluted disc, the transmission gears can enable an arc transmission shaft in an arc rotating groove to rotate at the moment, the arc transmission shafts can transmit the etching plate in surface contact with the arc transmission shaft to the top of the annular sleeve, and the etching plate enters the placing platform after being sucked by an air pump, meanwhile, after the etching plate is contacted with the embedded groove, three elastic strips move inwards under the condition of suction force, so that after the etching plate is tightly attached to the top of the placing platform, the elastic strips can clamp the etching plate under the elasticity of a back pressure spring, the stability of transmission and etching of the etching plate can be ensured, when the etching plate is contacted with the suction port, the etching plate can push a lower pressure rod downwards to drive a soft top rod to lift up the etching plate under the elasticity of a back pressure spring, at the moment, the stability of the transmission and the sealing plug of the etching plate can be ensured when the etching plate is contacted with the outer part, when the air on the suction port, the sealing plug can be stably absorbed and the sealing plug under the magnetic sealing plug under the condition of air absorption and the air absorption of the etching plate can be ensured when the sealing plug under the dust removal and the sealing plug under the dust absorption when the dust absorption;

a third step; the gas generated by the process gas device is conveyed into the plurality of inner cavities of the plasma isolation plates through the conveying pipe, and the two plasma isolation plates are oppositely discharged, so that the gas between the two plasma isolation plates forms a plasma cluster, the number of lost electrons can be increased, and the etching quality and efficiency are further increased;

the fourth step; after the etched product is processed, when the product is conveyed to the surface cleaning equipment by the conveying device, because a gear on the surface cleaning equipment is in contact with a rack on the conveying device, the gear can rotate, at the moment, two reciprocating screw rods move downwards under the driving of a ball sleeve, a cleaning head moves to the top of a placing mechanism moving towards the lower part of the cleaning head and slowly enters an etching plate inside the placing mechanism, a deviation correcting rod is firstly in contact with an inclined surface of the placing mechanism and adjusts a fine adjusting block, the fine adjusting block extrudes a fine adjusting spring, the cleaning plate can be stably attached to the top of the etching plate, a servo motor is started, the servo motor drives the cleaning plate to slowly rotate, sponge can clean the surface of the product, when a ventilation inclined plate is aligned with an arc chute, under the elasticity of an ejection spring, the closing plate moves upwards and enters a large cavity of a sliding groove, a vacuumizing device passes through a suction hole, negative pressure is generated in the sliding cavity at the moment, and a gap between the sliding cavity and the product can suck reaction liquid generated above, so that the cleaning effect is better and the cleaning effect is quicker.

The invention has at least the following beneficial effects:

1. the etching plates are put in from the upper part of the material placing cavity, the etching plates are stacked and enter the material placing cavity, the etching plate at the lowest part is positioned on the inclined planes of the two limiting blocks and limited by the inclined planes of the limiting blocks, the etching plate at the lowest part of the limiting blocks in the material placing cavity is clamped by the two rolling shafts at the lower part, and the clamped etching plate is limited by extrusion, so that other etching plates are stacked in the material placing cavity, when the material placing operation is carried out, the bottom of the linkage strip is contacted with the chute, the chute can drive the vertical rod to move upwards, meanwhile, the elliptical block at the lowest part on the vertical rod is firstly contacted with the arc-shaped groove on the L-shaped rod, the elliptical block contacted with the arc-shaped groove can extrude the two L-shaped rods towards two sides, the etching plates at the limiting blocks are limited to fall in the material placing mechanism, meanwhile, the vertical rod continues to rise, and at the moment, the elliptical block at the lowest part in the U-shaped groove II is not included, other elliptical blocks are simultaneously separated from the lap joint with two adjacent guide blocks, so under the elastic action of a compression spring, an elastic sheet and an extrusion spring, the two guide blocks move towards opposite directions and are separated from contact with the elliptical blocks, the rolling shafts on the connecting frame are contacted with the rubber plate, all etching plates positioned in the discharge cavity are clamped, when the topmost part of the linkage strip reaches the chute, the vertical rod rises, the bottommost elliptical block is contacted with the bottommost two guide blocks, the guide blocks move in opposite directions, meanwhile, the two L-shaped rods return to the original positions, the bottommost two rolling shafts are separated from contact with the lower part of the rubber plate, the etching plate below enters the limiting block and is limited by the limiting block, after the series of operations are completed, the vertical rod moves downwards under the elasticity of the spring arranged at the top part, and the etching plate further moves to the original position, therefore, continuous blanking can be realized through the contact of the linkage block and the chute when the plate-type conveyor belt passes through, the blanking continuity can be increased, manual participation is not needed, and the processing efficiency is increased.

2. In the etching board gets into and places the mechanism, at first fall on uncovered horn ring, drive wheel on the driving motor passes through the conveyer belt and drives the rotation of toper fluted disc, toper fluted disc rotates in-process, toper fluted disc rotates through driving a plurality of drive gear, drive gear can make the arc conveying axle in the arc turn-around groove rotate this moment, a plurality of arc conveying axles can convey the etching board with arc conveying axle surface contact to the top of annular sheath, and under the aspiration of aspiration pump, suction port two and suction port one produce the negative pressure, make the etching board get into and place the platform, meanwhile, after the etching board contacts with the embedded groove, under the condition of suction, three elastic strip moves to the inboard, after the etching board hugs closely with the top of place the platform like this, elastic strip can be with the sculpture board chucking under the elasticity of back pressure spring, so can guarantee the stability of etching board conveying and sculpture, when the etching board contacts with suction port two, under the condition of suction force, the etching board pushes down the depression bar and drives the flexible pole, this moment breaks away from the sealing plug from the contact with the sealing plug, can get the air suction port and the stable sculpture under the air absorption when the sealing plug of the air purification is removed, thereby the sealing plug can be guaranteed to the one-way the etching board that the sealing plug is carried out the air and is in the one-way when the air purification.

3. The gas generated by the process gas device is conveyed into the plurality of inner cavities of the plasma isolation plates through the conveying pipe, and the two plasma isolation plates are oppositely discharged, so that the gas between the two plasma isolation plates forms a plasma cluster, the number of electron losing can be increased, and the etching quality and efficiency are further increased.

4. After the etched product is processed, when the product is conveyed to the surface cleaning equipment by the conveying device, because a gear on the surface cleaning equipment is in contact with a rack on the conveying device, the gear can rotate, at the moment, two reciprocating screw rods are driven by a ball sleeve to move downwards, a cleaning head moves to the top of a placing mechanism moving towards the lower part of the cleaning head and slowly enters an etching plate inside the placing mechanism, a deviation correcting rod is firstly in contact with an inclined plane of the placing mechanism and adjusts a fine adjusting block, the fine adjusting block extrudes a fine adjusting spring, so that the cleaning plate can be stably attached to the top of the etching plate, a servo motor is started, the servo motor drives the cleaning plate to slowly rotate, a sponge can clean the surface of the product, when a ventilation inclined plate is aligned with an arc chute, under the elasticity of an ejection spring, a closing plate moves upwards, at the moment, the closing plate enters a large cavity of a sliding groove, a vacuumizing device passes through a suction hole, at the moment, negative pressure is generated in the sliding cavity, and a gap between the sliding cavity and the product can suck reaction liquid generated above, so that the cleaning effect is better and the cleaning effect is faster.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:

FIG. 1 is an overall front cross-sectional view of the present invention;

FIG. 2 is a cross-sectional view of a top view of the continuous feed apparatus of the present invention as it is clamped;

FIG. 3 is a cross-sectional view of a top view of the continuous feed apparatus of the present invention when it is unclamped;

FIG. 4 is an enlarged view of FIG. 1 at C;

FIG. 5 is a side cross-sectional view of a cleaning plate of the present invention;

FIG. 6 is an enlarged view of the invention at B in FIG. 1;

FIG. 7 is a side view of a vertical post according to the present invention;

FIG. 8 is a top view of the placement mechanism of the present invention;

FIG. 9 is an enlarged view at A in FIG. 8;

FIG. 10 is a cross-sectional view of the second pumping port;

FIG. 11 is a side view of the plasma barrier plate of the present invention;

fig. 12 is an enlarged view of fig. 11 at D.

In the figure, the position of the upper end of the main shaft, 1 sealed channel, 11 hollow square sleeve, 12 return spring, 13L-shaped rod, 14 limited block, 15 mounting plate, 16U-shaped groove I, 17 movable groove, 18 movable rod, 2 continuous feeding device, 21 placing box, 22U-shaped groove II, 23 plywood, 24 limited plate, 25 sliding rod, 26 guide block, 27 connecting frame, 28 elastic sheet, 29 extrusion spring, 210 compression spring, 211 connecting block, 212U-shaped block, 213 clamping strip, 214 hinge rod, 215 rubber plate, 216 rubber plate, 217 sliding groove, 218 shaft rod, 219 roller, 220U-shaped frame, 221 arc block, 222 adjusting spring, 223 vertical rod, 224 oval block, 225 chute, 3 surface cleaning equipment, 31 equipment box, 32 telescopic belt, 33 vacuumizing device, 34 transverse plate, 35 deviation rectifying rod, 36 gear, 37 fine adjusting spring, 38 fine adjusting block, 39 spring, 310 servo motor, fine adjusting cleaning head, fixed plate, 313 cleaning plate, 314 suction hole 315 closed plate, 316 ventilating inclined plate, 317 ejecting spring, 318 ejecting rod, 319 clamping groove, 320 arc chute, 4 conveying device, 41 plate type conveying belt, 42 rack, 43 linkage bar, 5 placing mechanism, 51 mounting disc, 52 open horn ring, 53 arc rotary groove, 54 arc conveying shaft, 55 transmission gear, 56 taper fluted disc, 57 fluted belt groove, 58 carrier plate, 59 driving motor, 510 driving wheel, 511 conveying belt, 512 annular sleeve, 513 placing platform, 514 elastic bar, 515 positioning rod, 516 limit sliding port, 517 arc bar, 518 back pressure spring elastic bar, 519 suction port two, 5191 suction pipe, 5192 arc pipe, 5193 pattern plate, 5194 down pressing rod, 5195, 5196 sealing ring, 5197, 5198 connecting pipe, 520 suction port one, 521 pump, 522, 523 embedding groove, 524, 6 conveying shaft, 7 base plate, 8 process gas device, 81 gas making device, 82 gas outlet, 83 conveying pipes, 84 plasma isolation plates, 85 parting strips, 86 gas outlet channels, 87 gas distribution plates, 88 gas outlet plates I, 89 gas outlet plates II, 9 radio frequency devices, 91 mounting tables and 92 radio frequency machines.

Detailed Description

Embodiments of the present application will be described in detail with reference to the drawings and examples, so that how to implement technical means to solve technical problems and achieve technical effects of the present application can be fully understood and implemented.

As shown in fig. 1 to 12, the present invention provides a dry etcher comprising:

sealed passageway 1, the right side at sealed passageway 1 top is run through and is provided with continuous feedway 2, the left side of sealed passageway 1 is provided with surface cleaning equipment 3, conveyer belt top equidistance fixedly connected with conveyer 4 of sealed passageway 1, conveyer 4's top equidistance fixedly connected with placement machine structure 5, the impartial distance fixedly connected with conveying axle 6 in both sides around the 4 inner walls of conveyer, conveying axle 6 and conveyer 4's bottom overlap joint, square mouth has been seted up at sealed passageway 1 top, square mouth endotheca is equipped with radio frequency device 9, the front side fixedly connected with processing procedure gas device 8 of radio frequency device 9 inner wall, 8 bottoms of processing procedure gas device are provided with base plate 7.

Sealing channel 1 includes the square cover of cavity 11, the square cover of cavity 11 top right side fixedly connected with mounting panel 15, the whereabouts mouth has been seted up at mounting panel 15's top, movable groove 17 and U-shaped groove 16 have all been seted up to the left and right sides of whereabouts mouth inner wall, movable groove 17 and the 16 inner chambers of U-shaped groove communicate, movable groove 17 has movable rod 18 through 12 elastic connection of return spring, the outside fixedly connected with L shape pole 13 of movable rod 18, the inboard fixedly connected with stopper 14 of movable rod 18.

The conveying device 4 comprises a plate-type conveying belt 41, racks 42 are fixedly connected to the front side and the rear side of the plate-type conveying belt 41, and a linkage strip 43 is arranged on the front side of the top of the plate-type conveying belt 41.

The continuous feeding device 2 comprises a placing box 21, a U-shaped groove II 22 is arranged on the front side of the inner wall of the placing box 21, two plywood plates 23 are fixedly connected on the front side of the inner wall of the transverse groove of the U-shaped groove II 22, opposite sides of the two plywood plates 23 are fixedly connected through a limiting plate 24, a slide bar 25 is inserted into one side of the limiting plate 24, a connecting frame 27 is fixedly connected with one end of the slide bar 25, a guide block 26 is fixedly connected with the other end of the slide bar 25, two compression springs 210 are fixedly connected with the connecting frame 27 and the opposite side of the limiting plate 24, opposite sides of the two compression springs 210 are fixedly connected through an elastic sheet 28, two sides of the inner wall of the elastic sheet 28 are fixedly connected through an extrusion spring 29, a U-shaped block 212 is fixedly connected with one side of the connecting frame 27 through a connecting block 211, and a shaft lever 218 is movably connected in sliding grooves 217 formed in the upper side and the lower side of the inner wall of the U-shaped block 212, the shaft lever 218 is sleeved with a roller 219, one side of the U-shaped block 212 is inserted with a U-shaped frame 220, one end of the U-shaped frame 220, which is positioned on the U-shaped block 212, is fixedly connected with an arc block 221, the arc block 221 is fixedly connected with one side of the inner wall of the U-shaped block 212 through an adjusting spring 222, the middle part of the placing box 21 is provided with a material placing cavity 215, the left side and the right side of the inner cavity of the material placing cavity 215 are both hinged with clamping strips 213 through hinge rods 214, the clamping strips 213 are fixedly connected with a rubber plate 216, which is positioned on one side of the roller 219, which is positioned at the lowest part, is overlapped with one side of the rubber plate 216, the other rollers 219 are spaced from the rubber plate 216, the bottom of the inner wall of the U-shaped groove two 22 in the placing box 21 is inserted with a vertical rod 223, the vertical rod 223 is sleeved with a plurality of elliptical blocks 224, the bottom of the vertical rod 223 is provided with an inclined groove 225, two sides of the elliptical blocks 224 are positioned below the two L-shaped rods 13, and the L-shaped rods 13 are provided with arc grooves matched with two ends of the elliptical blocks 224, the oval blocks 224 on the L-shaped bar 13 are positioned below two of the indexing blocks 26 and contact each other, and one side of the other indexing block 26 contacts the inward protrusion of the oval block 224.

When preparing for etching, an etching plate is put in from the upper part of the material placing cavity 215, the etching plate is stacked in the material placing cavity 215, the etching plate at the lowest part is positioned on the inclined planes of the two limit blocks 14 and limited by the inclined planes of the limit blocks 14, the etching plate at the lowest part of the limit blocks 14 in the material placing cavity 215 is clamped by the two rolling shafts 219 at the lower part, the clamped etching plate is extruded and limited, so that other etching plates are stacked in the material placing cavity 215, when the material placing operation is carried out, the bottom of the linkage strip 43 is contacted with the inclined groove 225, the inclined groove 225 can drive the vertical rod 223 to move upwards, meanwhile, the elliptical block 224 at the lowest part on the vertical rod 223 is firstly contacted with the arc-shaped groove on the L-shaped rod 13, the elliptical block 224 contacted with the arc-shaped groove can extrude the two L-shaped rods 13 towards the two sides, the etching plate at the limit blocks 14 is limited to fall in the material placing mechanism 5, and meanwhile, the vertical rod 223 continues to rise, at this time, the other elliptical blocks 224 in the U-shaped groove two 22 except the lowermost elliptical block 224 are simultaneously separated from the overlapping with the adjacent two guide blocks 26, so that under the elastic action of the compression spring 210, the elastic sheet 28 and the pressing spring 29, the two guide blocks 26 move towards opposite directions and are separated from contact with the elliptical blocks 224, the rollers 219 on the connecting frame 27 are in contact with the rubber sheet 216, at this time, all the etching plates located in the discharging chamber 215 are clamped, when the topmost part of the linkage bar 43 reaches the inclined groove 225, at this time, the vertical bar 223 ascends, the lowermost elliptical block 224 is in contact with the lowermost two guide blocks 26, the guide blocks 26 move in opposite directions, and at the same time, the two L-shaped rods 13 are restored to the original positions, at this time, the lowermost two rollers 219 are separated from contact with the lower part of the rubber sheet 216, at this time, the lower etching plate enters the stopper 14 and is restrained by the stopper 14, after the above series of operations are completed, the vertical rod 223 moves downward under the elasticity of the spring provided at the top, and at this time, the etching plate further moves to the original position.

The surface cleaning equipment 3 comprises an equipment box body 31, the top of the inner wall of the equipment box body 31 is fixedly connected with two cleaning heads 311 through a telescopic belt 32, the top of the inner wall of the equipment box body 31 is fixedly connected with a vacuumizing device 33, the tops of the two cleaning heads 311 are respectively fixedly connected with four elastic rods, the elastic rods on the eight front and rear sides are respectively fixedly connected with a transverse plate 34, the middle part of the bottom of the transverse plate 34 is fixedly connected with a reciprocating lead screw, the reciprocating lead screw is sleeved with a limiting sleeve 37, the front side and the rear side of the inner wall of a hollow square sleeve 11 are respectively provided with a gear 36, a rack 42 is meshed with the gear 36, the gear 36 is sleeved with a ball sleeve, the reciprocating lead screw is sleeved in the ball sleeve, the inner cavity at the bottom of the cleaning head 311 is elastically connected with a fine adjustment block 38 through two fine adjustment springs 39, and a servo motor 310 is embedded in the bottom of the fine adjustment block 38, servo motor 310's bottom pot head is equipped with fixed disk 312, fixed disk 312's bottom overlap joint has cleaning plate 313, cleaning plate 313 and servo motor 310's output fixed connection, a plurality of sliding trays have been seted up to cleaning plate 313's bottom, the round hole has been seted up to the sliding tray inner wall, ejector pin 318 has been run through at the top of sliding tray inner wall, ejector pin 318's top fixedly connected with swash plate 316 of ventilating, a plurality of arc chutes 320 have been seted up to fixed disk 312's bottom equidistance, ejector pin 318 bottom fixedly connected with closure plate 315, closure plate 315 all is provided with the sponge with cleaning plate 313 bottom, swash plate 316 of ventilating is through ejecting spring 317 and the draw-in groove 319 inner wall bottom elastic connection of cleaning plate 313, still be provided with around being provided with suction hole 314 cleaning head 311 in the arc chute 320 and rectify deviation pole 35, suction hole 314 passes through the hose intercommunication with evacuating device 33.

When the etched product is processed and is conveyed to the surface cleaning device 3 by the conveying device 4, because the gear 36 on the surface cleaning device 3 is in contact with the rack 42 on the conveying device 4, the gear 36 can rotate, at this time, the two reciprocating screw rods move downwards under the driving of the ball sleeve, the cleaning head 311 moves to the top of the placing mechanism 5 moving downwards and slowly enters the etching plate inside the placing mechanism 5, the deviation correcting rod 35 firstly contacts with the inclined surface of the placing mechanism 5 and adjusts the fine adjusting block 38, the fine adjusting block 38 extrudes the fine adjusting spring 39, so that the cleaning plate 313 can be stably attached to the top of the etching plate, the servo motor 310 is started, the servo motor 310 drives the cleaning plate 313 to slowly rotate, the sponge can clean the surface of the product, when the air-permeable inclined plate 316 is aligned with the arc-shaped chute 320, under the elasticity of the ejection spring 317, the closing plate 315 moves upwards, at this time, the closing plate 315 enters the large cavity of the sliding groove, the vacuum pumping device 33 passes through the hole 314, at this time, a negative pressure is generated by sliding, a gap between the sliding cavity and a gap between the product can be quickly pumped, and the cleaning liquid can be more quickly.

The placing mechanism 5 comprises a mounting disc 51, an open horn ring 52 is sleeved at the top of the mounting disc 51, a plurality of arc rotating grooves 53 are formed in the surface of the open horn ring 52 at equal intervals, an arc transmission shaft 54 is movably connected in each arc rotating groove 53, soft silica gel is arranged on the surface of each arc transmission shaft 54, a transmission gear 55 is sleeved at the outer end of each arc transmission shaft 54, a conical fluted disc 56 is rotatably connected in the mounting disc 51 and is positioned under the transmission gear 55, the conical fluted disc 56 is meshed with the transmission gears 55, a driving motor 59 is fixedly connected to the right side of the mounting disc 51 through a support plate 58, a driving wheel 510 is fixedly connected to the output end of the driving motor 59, the driving wheel 510 is in transmission connection with a belt groove 57 formed in the side wall of the conical fluted disc 56 through a transmission belt 511, an annular sleeve 512 is fixedly connected to the bottom of the inner wall of the mounting disc 51, and a placing platform 513 is sleeved in the annular sleeve 512, three elastic strips 514 are arranged in the inner cavity of the annular sleeve 512 at equal intervals, a limiting sliding opening 516 is formed in each elastic strip 514, a positioning rod 515 is inserted into each limiting sliding opening 516, each positioning rod 515 is fixedly connected to the bottom of the inner wall of the annular sleeve 512, the inner wall of the annular sleeve 512 is fixedly connected with an arc-shaped strip 517 through two back pressure springs 518, each arc-shaped strip 517 is fixedly connected to each elastic strip 514, one end of each elastic strip 514 penetrates through a clamping groove formed in the outer side of the annular sleeve 512 and extends to the outside of the annular sleeve, an embedded groove 523 is formed in one end of each elastic strip 514, an air suction pump 521 is fixedly connected to the bottom of the mounting disc 51, each air suction pump 521 is provided with a central hole 522, a first suction opening 520 is embedded in the inner wall of the annular sleeve 512 at equal intervals, a second suction opening 519 is formed in the top of the placing platform 513 at equal intervals, and the air suction pump 521 is communicated with the first suction opening 519 and the first suction opening 520 through a plurality of connecting air pipes;

wherein, the second suction port 519 includes an adsorption tube 5191, the bottom of the adsorption tube 5191 is communicated with an arc tube 5192, the arc tube 5192 is communicated with a connecting air tube through a connecting tube 5198, the other side of the top of the arc tube 5192 is communicated with a first suction port 520, a sealing ring 5196 is sleeved at a position where the inner cavity of the arc tube 5192 is located at the first suction port 520, a flower-shaped plate 5193 is sleeved at the inner cavity of the adsorption tube 5191, a lower compression rod 5194 is fixedly connected to the top of the flower-shaped plate 5193, a soft rod 5197 is fixedly connected to the bottom of the flower-shaped plate 5193, and one end of the soft rod 5197 is extended into the first suction port 520 and is fixedly connected with the first suction port 5195.

When the etching plate enters the placing mechanism 5 and firstly falls on the open horn ring 52, the driving wheel 510 on the driving motor 59 drives the conical fluted disc 56 to rotate through the conveying belt 511, in the rotating process of the conical fluted disc 56, the conical fluted disc 56 drives the plurality of transmission gears 55 to rotate, at the moment, the transmission gears 55 can enable the arc-shaped transmission shafts 54 in the arc-shaped rotating grooves 53 to rotate, the plurality of arc-shaped transmission shafts 54 can transmit the etching plate contacted with the surface of the arc-shaped transmission shafts 54 to the top of the annular sleeve 512, and under the suction of the suction pump 521, negative pressure is generated at the suction ports 519 and the suction ports 520, so that the etching plate enters the placing platform 513, meanwhile, after the etching plate is contacted with the embedded groove 523, under the suction condition, the three elastic strips 514 move inwards, so that after the etching plate is tightly attached to the top of the placing platform 513, the elastic strip 514 can clamp the etching plate under the elasticity of the back pressure spring 518, so that the stability of conveying and etching of the etching plate can be ensured, when the etching plate is in contact with the second suction port 519, under the condition of suction force, the etching plate pushes the lower pressure rod 5194 downwards, the lower pressure rod 5194 drives the soft rod 5197 to jack up the sealing plug 5195, at the moment, the sealing plug 5195 is separated from the sealing ring 5196 to be in contact with the sealing ring 5196, at the moment, the first suction port 520 and the outside can remove dust on the etching plate, the reaction gas can be adsorbed during etching, the air in the etching cavity is ensured to be in a purification state, when the etching plate is taken down, under the gravity of the sealing plug 5195, the sealing plug 5195 and the sealing ring 5196 can be magnetically adsorbed, so that the second suction port 519 becomes a one-way negative pressure port, and the quick stabilization of the etching plate on the placing platform 513 is ensured.

The process gas device 8 comprises a plurality of gas making devices 81, the gas making devices 81 are provided with a plurality of gas outlets 82, the gas outlets 82 are communicated with a conveying pipe 83, two plasma isolation plates 84 are arranged on the inner wall of the radio frequency device 9 and located at the positions of the gas making devices 81, partition bars 85 are fixedly connected to the bottoms of the plasma isolation plates 84, inner cavities of the plasma isolation plates 84 are communicated with the conveying pipe 83, a gas outlet channel 86 is formed in one side of each plasma isolation plate 84, and a gas distribution plate 87, a gas outlet plate I88 and a gas outlet plate II 89 are sleeved in the gas outlet channel 86.

The gas generated by the process gas device 8 is delivered into the plurality of cavities of the plasma isolation plate 84 through the delivery pipe 83, and the gas is discharged from the opposite surfaces of the two plasma isolation plates 84, so that the gas between the two plasma isolation plates 84 forms plasma clusters, the number of electron losing can be increased, and the etching quality and efficiency are further increased.

The radio frequency device 9 comprises a mounting table 91, and a plurality of radio frequency machines 92 are arranged at the bottom of the mounting table 91.

The use method of the dry etching machine is characterized by comprising the following steps: the method comprises the following steps:

firstly, in preparation for etching, an etching plate is put in from the upper side of the material placing cavity 215, the etching plate is stacked in the material placing cavity 215, the lowermost etching plate is positioned on the inclined surfaces of the two limit blocks 14 and limited by the inclined surfaces of the limit blocks 14, the lowermost etching plate of the limit blocks 14 in the material placing cavity 215 is clamped by the two lower rollers 219, the clamped etching plate is pressed and limited, so that the other etching plates are stacked in the material placing cavity 215, when the material placing operation is carried out, the bottom of the linkage bar 43 is contacted with the inclined groove 225, the inclined groove 225 can drive the vertical bar 223 to move upwards, meanwhile, the lowermost elliptical block 224 on the vertical bar 223 is firstly contacted with the arc-shaped groove on the L-shaped bar 13, the elliptical block 224 contacted with the arc-shaped groove can press the two L-shaped bars 13 towards both sides, the etching plate of the limit blocks 14 falls in the placing mechanism 5, meanwhile, the vertical bar 223 continuously rises, at the moment, except for the lowermost elliptical block 224 in the U-shaped groove 22, the two adjacent guide blocks 26 are simultaneously separated from the two adjacent guide blocks 26, thus, the spring 14 is pressed and separated from the elastic connection with the spring 219, when the two lower guide blocks 13, the two upper guide blocks are separated from the elastic connection of the inclined groove 219, when the two lower guide bars 16 and the elastic guide bar 219, the elastic block 21 are separated from the elastic connection of the inclined groove, when the inclined groove 219, the inclined groove 13, the inclined groove 16, when the two lower guide bar 16, the inclined groove 21 and the elastic guide bar 21 are separated from the elastic guide bar 21, the elastic guide bar, the elastic block 21, the elastic block, when the elastic block 21 and the elastic block 21 are separated from the elastic guide bar, the elastic guide bar 21 connected with the elastic block, when the elastic block, the elastic block 16, the elastic block 21 connected with the elastic block, the elastic block 21 connected with the rubber bar 16, the rubber bar 19, the rubber bar 21 connected with the rubber bar 21, the rubber bar 21 connected with the rubber bar, the rubber bar 21, the rubber bar, when the rubber bar 19, after the series of operations are completed, the vertical rod 223 moves downwards under the elasticity of the spring arranged at the top, and at the moment, the etching plate further moves to the original position;

secondly, when the etching plate enters the placing mechanism 5, firstly falls on the open horn ring 52, the driving wheel 510 on the driving motor 59 drives the conical fluted disc 56 to rotate through the conveying belt 511, in the rotating process of the conical fluted disc 56, the conical fluted disc 56 drives the plurality of transmission gears 55 to rotate, at this time, the transmission gears 55 can enable the arc-shaped transmission shafts 54 in the arc-shaped rotating grooves 53 to rotate, the plurality of arc-shaped transmission shafts 54 can enable the etching plate contacted with the surface of the arc-shaped transmission shafts 54 to be transmitted to the top of the annular sleeve 513, and under the suction of the suction pump 521, negative pressure is generated at the suction ports 519 and 520, so that the etching plate enters the placing platform 513, meanwhile, after the etching plate is contacted with the embedded groove 523, under the condition of suction, the three elastic strips 514 move inwards, so that after the etching plate is tightly attached to the top of the placing platform 513, when the etching plate is contacted with the second suction port 519, under the condition of suction force, the etching plate pushes the lower pressing rod 5194 downwards, the lower pressing rod 5194 drives the soft rod 5197 to jack up the sealing plug 5195, at the moment, the sealing plug 5195 is separated from the sealing ring 5196 to be contacted with the outside, at the moment, the first suction port 520 and the outside can remove dust on the etching plate, and the reaction gas can be adsorbed during etching, so that the air in the etching cavity is ensured to be in a purification state;

a third step; the gas generated by the process gas device 8 is delivered into a plurality of inner cavities of the plasma isolation plates 84 through the delivery pipe 83, and the opposite surfaces of the two plasma isolation plates 84 are exhausted, so that the gas between the two plasma isolation plates 84 forms plasma clusters, the number of electron losing can be increased, and the etching quality and efficiency are further increased;

the fourth step; when the etched product is processed and is conveyed to the surface cleaning device 3 by the conveying device 4, because the gear 36 on the surface cleaning device 3 is in contact with the rack 42 on the conveying device 4, the gear 36 can rotate, at this time, the two reciprocating screw rods move downwards under the driving of the ball sleeve, the cleaning head 311 moves to the top of the placing mechanism 5 moving downwards and slowly enters the etching plate inside the placing mechanism 5, the deviation correcting rod 35 firstly contacts with the inclined surface of the placing mechanism 5 and adjusts the fine adjusting block 38, the fine adjusting block 38 extrudes the fine adjusting spring 39, so that the cleaning plate 313 can be stably attached to the top of the etching plate, the servo motor 310 is started, the servo motor 310 drives the cleaning plate 313 to slowly rotate, the sponge can clean the surface of the product, when the air-permeable inclined plate 316 is aligned with the arc-shaped chute 320, under the elasticity of the ejection spring 317, the closing plate 315 moves upwards, at this time, the closing plate 315 enters the large cavity of the sliding groove, the vacuum pumping device 33 passes through the hole 314, at this time, a negative pressure is generated by sliding, a gap between the sliding cavity and a gap between the product can be quickly pumped, and the cleaning liquid can be more quickly.

As used in the specification and in the claims, certain terms are used to refer to particular components. As one skilled in the art will appreciate, manufacturers may refer to a component by different names. This specification and claims do not intend to distinguish between components that differ in name but not function. In the following description and in the claims, the terms "include" and "comprise" are used in an open-ended fashion, and thus should be interpreted to mean "include, but not limited to. "substantially" means within an acceptable error range, and a person skilled in the art can solve the technical problem within a certain error range to achieve the technical effect basically.

It should be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a good or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such good or system. Without further limitation, an element defined by the phrase "comprising a … …" does not exclude the presence of additional like elements in a commodity or system that comprises the element.

The foregoing description shows and describes several preferred embodiments of the invention, but as before, it is to be understood that the invention is not limited to the forms disclosed herein, and is not to be construed as excluding other embodiments, and that the invention is capable of use in various other combinations, modifications, and environments and is capable of changes within the scope of the inventive concept as expressed herein, commensurate with the above teachings, or the skill or knowledge of the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.

Claims

1. A dry etcher, comprising: the device comprises a sealing channel (1), wherein a continuous feeding device (2) penetrates through the right side of the top of the sealing channel (1), surface cleaning equipment (3) is arranged on the left side of the sealing channel (1), conveying devices (4) are fixedly connected to the tops of conveying belts of the sealing channel (1) at equal intervals, placing mechanisms (5) are fixedly connected to the tops of the conveying devices (4) at equal intervals, conveying shafts (6) are fixedly connected to the front side and the rear side of the inner wall of each conveying device (4) at equal intervals, the conveying shafts (6) are in lap joint with the bottoms of the conveying devices (4), a square opening is formed in the top of the sealing channel (1), a radio frequency device (9) is sleeved in the square opening, a process gas device (8) is fixedly connected to the front side of the inner wall of the radio frequency device (9), and a substrate (7) is arranged at the bottom of the process gas device (8); the sealing channel (1) comprises a hollow square sleeve (11), a mounting plate (15) is fixedly connected to the right side of the top of the hollow square sleeve (11), a falling opening is formed in the top of the mounting plate (15), movable grooves (17) and a U-shaped groove I (16) are formed in the left side and the right side of the inner wall of the falling opening, inner cavities of the movable grooves (17) and the U-shaped groove I (16) are communicated, the movable grooves (17) are elastically connected with movable rods (18) through return springs (12), L-shaped rods (13) are fixedly connected to the outer sides of the movable rods (18), and limiting blocks (14) are fixedly connected to the inner sides of the movable rods (18); the conveying device (4) comprises a plate-type conveying belt (41), racks (42) are fixedly connected to the front side and the rear side of the plate-type conveying belt (41), and a linkage strip (43) is arranged on the front side of the top of the plate-type conveying belt (41); the continuous feeding device (2) comprises a placing box (21), a U-shaped groove II (22) is arranged on the front side of the inner wall of a transverse groove of the U-shaped groove II (22), two plywood plates (23) are fixedly connected to the front side of the inner wall of the transverse groove of the U-shaped groove II (22), opposite sides of the two plywood plates (23) are fixedly connected through a limiting plate (24), a sliding rod (25) penetrates through one side of the limiting plate (24), one end of the sliding rod (25) is fixedly connected with a connecting frame (27), the other end of the sliding rod (25) is fixedly connected with a guide block (26), two compression springs (210) are fixedly connected to the opposite sides of the connecting frame (27) and the limiting plate (24), opposite sides of the two compression springs (210) are fixedly connected through an elastic sheet (28), two sides of the inner wall of the elastic sheet (28) are fixedly connected through extrusion springs (29), one side of the connecting frame (27) is fixedly connected with a U-shaped block (212) through a connecting block (211), a movable shaft rod (218) is connected to the inner side of a sliding groove (217) formed in the upper side and the lower side of the inner wall of the U-shaped block (212), a shaft rod (218) is sleeved on the inner wall of the connecting frame (220), one side of the U-shaped block (220), one U-shaped block (220) is fixedly connected with a U-shaped block (220), one end of the U-shaped block (220) and the U-shaped block (220), the arc-shaped block (221) is fixedly connected with one side of the inner wall of the U-shaped block (212) through an adjusting spring (222), a material discharging cavity (215) is arranged in the middle of the placing box (21), the left side and the right side of the inner cavity of the material discharging cavity (215) are hinged to clamping strips (213) through hinge rods (214), a rubber plate (216) is fixedly connected with one side of each roller (219), the roller (219) located at the lowest position is in lap joint with one side of the rubber plate (216), intervals are reserved between the other rollers (219) and the rubber plate (216), vertical rods (223) penetrate through the bottoms of the inner walls of the two U-shaped grooves (22) in the placing box (21), a plurality of oval blocks (224) are sleeved on the vertical rods (223), inclined grooves (225) are formed in the bottoms of the vertical rods (223), two sides of the oval blocks (224) located at the lowest position are located below the two L-shaped rods (13), the L-shaped rods (13) are provided with oval guide blocks (224) which are matched with the two ends of the oval blocks (224), and two oval blocks (224) are located at the positions of the oval guide blocks (26) and are in contact with the other oval guide blocks (224); the surface cleaning equipment (3) comprises an equipment box body (31), the top of the inner wall of the equipment box body (31) is fixedly connected with two cleaning heads (311) through a telescopic belt (32), the top of the inner wall of the equipment box body (31) is fixedly connected with a vacuumizing device (33) and is two, four elastic rods are fixedly connected with the top of each cleaning head (311), transverse plates (34) are fixedly connected on the elastic rods on eight front and back sides, reciprocating lead screws are fixedly connected with the middle parts of the bottom of the transverse plates (34), limiting sleeves (37) are sleeved on the reciprocating lead screws, gears (36) are arranged on the front and back sides of the inner wall of a hollow square sleeve (11), racks (42) are meshed with the gears (36), ball sleeves are sleeved on the gears (36), the reciprocating lead screws are sleeved in the ball sleeves, a fine adjustment block (38) is elastically connected with the inner cavity of the bottom of the cleaning heads (311) through two fine adjustment springs (39), a servo motor (310) is embedded in the bottom of the fine adjustment block (38), a fixed disk (312) is sleeved with a fixed disk (313), a plurality of round holes (310) are formed in the bottom of the cleaning plate (313) and are connected with the cleaning grooves (310), a top rod (318) penetrates through the top of the inner wall of the sliding groove, an aeration inclined plate (316) is fixedly connected to the top of the top rod (318), a plurality of arc-shaped inclined grooves (320) are formed in the bottom of the fixed disc (312) at equal intervals, a closing plate (315) is fixedly connected to the bottom of the top rod (318), sponges are arranged at the bottoms of the closing plate (315) and the cleaning plate (313), the aeration inclined plate (316) is elastically connected with the bottom of the inner wall of a clamping groove (319) of the cleaning plate (313) through an ejection spring (317), a suction hole (314) is formed in the arc-shaped inclined groove (320), deviation rectifying rods (35) are further arranged around the cleaning head (311), and the suction hole (314) is communicated with a vacuum pumping device (33) through a hose; the placing mechanism (5) comprises a mounting disc (51), an open horn ring (52) is sleeved at the top of the mounting disc (51), a plurality of arc rotating grooves (53) are formed in the surface of the open horn ring (52) at equal intervals, an arc transmission shaft (54) is movably connected in the arc rotating grooves (53), soft silica gel is arranged on the surface of the arc transmission shaft (54), a transmission gear (55) is sleeved at the outer end of the arc transmission shaft (54), a conical fluted disc (56) is rotatably connected in the mounting disc (51), the conical fluted disc (56) is positioned under the transmission gear (55), the conical fluted disc (56) is meshed with the transmission gears (55), a driving motor (59) is fixedly connected to the right side of the mounting disc (51) through a support plate (58), a driving wheel (510) is fixedly connected at the output end of the driving motor (59), the driving wheel (510) is in transmission connection with a belt groove (57) formed in the side wall of the conical fluted disc (56) through a transmission belt (511), an annular sleeve (512) is fixedly connected to the bottom of the inner wall of the mounting disc (51), an annular sleeve (513) is sleeved with an elastic strip (512), and three limiting strip (516) is arranged in the annular sliding sleeve (516), a positioning rod (515) is inserted into the limiting sliding opening (516), the positioning rod (515) is fixedly connected to the bottom of the inner wall of the annular sleeve (512), an arc-shaped strip (517) is fixedly connected to the inner wall of the annular sleeve (512) through two back pressure springs (518), the arc-shaped strip (517) is fixedly connected to the elastic strip (514), one end of the elastic strip (514) penetrates through a clamping groove formed in the outer side of the annular sleeve (512) and extends to the outside of the annular sleeve, an embedded groove (523) is formed in one end of the elastic strip (514), an air suction pump (521) is fixedly connected to the bottom of the mounting disc (51), a central hole (522) is formed in the air suction pump (521), suction openings I (520) are embedded in the inner wall of the annular sleeve (512) at equal intervals, suction openings II (519) are formed in the top of the placing platform (513) at equal intervals, and the air suction pump (521) is communicated with the suction openings II (519) and the suction openings I (520) through a plurality of connecting air pipes; the suction port II (519) comprises an adsorption pipe (5191), the bottom of the adsorption pipe (5191) is communicated with an arc pipe (5192), the arc pipe (5192) is communicated with a connecting air pipe through a connecting pipe (5198), the other side of the top of the arc pipe (5192) is communicated with a suction port I (520), a sealing ring (5196) is sleeved at the position, located at the suction port I (520), of the inner cavity of the arc pipe (5192), a flower-shaped plate (5193) is sleeved at the inner cavity of the adsorption pipe (5191), a lower compression rod (5194) is fixedly connected to the top of the flower-shaped plate (5193), a soft rod (5197) is fixedly connected to the bottom of the flower-shaped plate (5193), and one end of the soft rod (5197) extends into the suction port I (520) and is fixedly connected with a sealing plug (5195).

2. The dry etching machine according to claim 1, wherein: process gas device (8) include that a plurality of gases make device (81), gas makes device (81) and is provided with a plurality of gas outlets (82), gas outlet (82) intercommunication has conveyer pipe (83), radio frequency device (9) inner wall just is located every gas and makes device (81) department and all is provided with two electric thick liquid division boards (84), the bottom fixedly connected with parting bead (85) of electric thick liquid division board (84), electric thick liquid division board (84) inner chamber with conveyer pipe (83) intercommunication, outlet channel (86) have been seted up to one side of electric thick liquid division board (84), outlet channel (86) endotheca is equipped with and is divided gas board (87) and outlet plate one (88) and outlet plate two (89).

3. The dry etching machine according to claim 2, wherein: the radio frequency device (9) comprises a mounting table (91), and a plurality of radio frequency machines (92) are arranged at the bottom of the mounting table (91).

4. The use method of the dry etching machine according to claim 3, characterized in that: the method comprises the following steps:

firstly, when etching is prepared, an etching plate is put in from the upper part of a material placing cavity (215), the etching plate is stacked in the material placing cavity (215), the etching plate at the lowest part is positioned on the inclined surfaces of two limit blocks (14) and limited by the inclined surfaces of the limit blocks (14), the etching plate at the lowest part of the limit blocks (14) in the material placing cavity (215) is clamped by two rollers (219) at the lower part, the clamped etching plate is limited by extrusion, so that other etching plates are stacked in the material placing cavity (215), when the material placing operation is carried out, the bottom of a linkage strip (43) is contacted with a chute (225), the chute (225) can drive a vertical rod (223) to move upwards, meanwhile, the oval block (224) at the lowest part on the vertical rod (223) is firstly contacted with an arc-shaped groove on an L-shaped rod (13), the oval block (224) contacted with the arc-shaped groove can extrude two L-shaped rods (13) towards two sides, the etching plate at the limit position that the etching plate at the limit position block (14) falls in a placing mechanism (5), meanwhile, the oval block (224) in the U-shaped groove (223) is continuously extruded towards the lower part of the two adjacent guide blocks (26), and the spring blocks (224) are separated from the adjacent spring (26), and the spring block (224) at the elastic guide block (224) at the lower part below the spring (223), the etching plate is separated from the oval block (224), the rolling shafts (219) on the connecting frame (27) are in contact with the rubber plate (216), at the moment, all etching plates located in the material discharging cavity (215) are clamped, when the topmost part of the linkage strip (43) reaches the chute (225), the vertical rod (223) ascends, the bottommost oval block (224) is in contact with the bottommost two guide blocks (26), the guide blocks (26) move in the opposite directions, meanwhile, the two L-shaped rods (13) restore to the original positions, at the moment, the two rolling shafts (219) at the bottommost part are separated from the lower part of the rubber plate (216), at the moment, the etching plate at the lower part enters the limiting block (14) and is limited by the limiting block (14), after the series of operations are completed, the vertical rod (223) moves downwards under the elasticity of the spring arranged at the top part, and at the moment, the etching plate further moves to the original position;

secondly, when the etching plate enters the placing mechanism (5), the etching plate firstly falls on the open horn ring (52), a driving wheel (510) on a driving motor (59) drives a conical fluted disc (56) to rotate through a conveying belt (511), the conical fluted disc (56) drives a plurality of transmission gears (55) to rotate in the rotating process of the conical fluted disc (56), at the moment, the transmission gears (55) can enable an arc-shaped transmission shaft (54) in an arc-shaped rotating groove (53) to rotate, the arc-shaped transmission shafts (54) can transmit the etching plate contacted with the surface of the arc-shaped transmission shaft (54) to the top of the annular sleeve (512), and under the suction of an air pump (521), a second suction port (519) and a first suction port (520) generate negative pressure to enable the etching plate to enter the placing platform (513), meanwhile, the etching plate is contacted with an embedded groove (523), under the suction condition, three elastic strips (514) move inwards, so that after the etching plate is tightly attached to the top of the placing platform (513), the elastic strips (514) push the elastic strips (5194) to be contacted with a soft etching plate (5195) and push the sealing rod (5195) to etch the etching plate (5195) and the sealing rod (95) to push the etching plate (5195) to be etched under the sealing plug (5195), at the moment, the sealing plug (5195) is separated from the sealing ring (5196), the suction port I (520) and the outside can remove dust on the etching plate, and can adsorb reaction gas during etching, so that the air in the etching cavity is ensured to be in a purified state, when the etching plate is taken down, the sealing plug (5195) and the sealing ring (5196) can be magnetically adsorbed under the gravity of the sealing plug (5195), and the suction port II (519) becomes a one-way negative pressure port, so that the etching plate is ensured to be rapidly stabilized on the placing platform (513);

a third step; gas generated by the process gas device (8) is conveyed into a plurality of inner cavities of the plasma isolation plates (84) through the conveying pipe (83), and the opposite surfaces of the two plasma isolation plates (84) are exhausted, so that the gas between the two plasma isolation plates (84) forms a plasma cluster, the number of loss electrons can be increased, and the etching quality and efficiency are further increased;

the fourth step; when the etched product is processed and is conveyed to the surface cleaning equipment (3) by the conveying device (4), as the gear (36) on the surface cleaning equipment (3) is in contact with the rack (42) on the conveying device (4), the gear (36) can rotate, at the moment, two reciprocating screw rods are driven by the ball sleeve to move downwards, the cleaning head (311) moves to the top of the placing mechanism (5) moving downwards and slowly enters the etching plate in the placing mechanism (5), the deviation correcting rod (35) is firstly in contact with the inclined surface of the placing mechanism (5) and adjusts the fine adjusting block (38), the fine adjusting block (38) extrudes the fine adjusting spring (39), so the cleaning plate (313) can be stably attached to the top of the etching plate, the servo motor (310) is started, the servo motor (310) drives the cleaning plate (313) to slowly rotate, the sponge can clean the surface of the product, when the ventilation inclined plate (316) is aligned with the arc chute (320), the elastic lower part of the spring (317) moves upwards, the elastic sliding plate (315) moves upwards to enter a closed cavity, and a large sliding gap is generated between the suction reaction plate (33) and the suction reaction device (33) and the vacuum chamber for sucking the product.