CN113049183A - Pressure sensor calibration device and calibration method - Google Patents

Pressure sensor calibration device and calibration method Download PDF

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Publication number
CN113049183A
CN113049183A CN202110326060.2A CN202110326060A CN113049183A CN 113049183 A CN113049183 A CN 113049183A CN 202110326060 A CN202110326060 A CN 202110326060A CN 113049183 A CN113049183 A CN 113049183A
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Prior art keywords
pressure sensor
calibration
heating plate
pressure
temperature
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Inventor
张英坤
程煜
郝存明
任亚恒
吴立龙
姚利彬
赵航
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Institute Of Applied Mathematics Hebei Academy Of Sciences
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Institute Of Applied Mathematics Hebei Academy Of Sciences
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Priority to CN202110326060.2A priority Critical patent/CN113049183A/en
Publication of CN113049183A publication Critical patent/CN113049183A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency

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  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention provides a pressure sensor calibration device and a calibration method, which belong to the technical field of sensor calibration and comprise the following steps: the lifting driving mechanism is arranged on the base, and the lifting end of the lifting driving mechanism is connected with the lifting platform; the force measuring device is fixed on the side surface of the lifting platform and is provided with a force measuring probe facing downwards vertically; the calibration platform comprises a heating plate arranged above the base, the heating plate is externally connected with a heating module for controlling temperature, a pressure sensor corresponding to the force measuring probe is arranged on the upper surface of the heating plate, and a temperature sensor is also arranged on the heating plate; the corresponding output end of the controller is connected with the corresponding control ends of the heating module and the lifting driving mechanism, the corresponding input end of the controller is connected with the corresponding output ends of the force measuring device, the pressure sensor and the temperature sensor, and the pressure value and the voltage value of the pressure sensor at different temperatures are calibrated according to the received corresponding pressure value, voltage value and temperature value. The pressure sensor calibration device provided by the invention is simple in structure and convenient to operate.

Description

Pressure sensor calibration device and calibration method
Technical Field
The invention relates to the technical field of pressure sensor calibration, in particular to a pressure sensor calibration device and a pressure sensor calibration method.
Background
The dexterous hand is used as a terminal sensing and grasping tool of the intelligent robot, has high dexterous property, universality and adaptability, can finish various different grabbing and operating tasks, and is widely applied to the fields of dangerous environment detection, outer space exploration, logistics carrying, industrial assembly, rehabilitation, intelligent manufacturing, agricultural picking and the like.
The dexterous hand can avoid the object to be grabbed from sliding off due to too small grabbing force in grabbing operation, and also can prevent the object to be grabbed from being damaged due to too large grabbing force, so that the dexterous hand is required to stably grab the object with the minimum force. In order to be able to achieve minimum force grip, the dexterous hand must have grip force perception. One effective method is to mount the FSR pressure sensor on the finger of a dexterous hand to sense whether the finger is in contact with the object and the change in contact force during grasping. The FSR pressure sensor must be accurately calibrated for its input-output characteristics before use.
However, in the conventional calibration device, although the measurement accuracy is high, the manufacturing cost of the calibration device is high if the six-dimensional force sensor is adopted to measure the external input pressure. The calibration device measures the external input pressure by using an electronic scale, although the manufacturing cost of the calibration device is saved, the calibration result usually has mechanical errors and human errors due to the fact that manual operation is necessary. And the existing calibration device is usually only used at room temperature, and the influence of different temperatures on the input and output characteristics of the FSR pressure sensor cannot be systematically evaluated.
Disclosure of Invention
The embodiment of the invention provides a pressure sensor calibration device and a calibration method, and aims to solve the problems that the existing calibration device is high in manufacturing cost, needs manual operation, does not consider temperature influence factors and the like.
In order to achieve the above object, in a first aspect, the present invention provides a pressure sensor calibration apparatus, including:
a base;
the lifting driving mechanism is arranged on the base, and the lifting end of the lifting driving mechanism is connected with a lifting platform;
the force measuring device is fixed on the side surface of the lifting platform and is provided with a force measuring probe facing downwards vertically;
the calibration platform comprises a heating plate arranged above the base, the heating plate is externally connected with a heating module for controlling temperature, a pressure sensor corresponding to the force measuring probe is arranged on the upper surface of the heating plate, and a temperature sensor is also arranged on the heating plate; and
and the corresponding output end of the controller is connected with the corresponding control ends of the heating module and the lifting mechanism, the corresponding input end of the controller is connected with the corresponding output ends of the force measuring device, the pressure sensor and the temperature sensor, and the pressure value and the voltage value of the pressure sensor at different temperatures are calibrated according to the received corresponding pressure value, voltage value and temperature value.
Compared with the prior art, the scheme shown in the embodiment of the application has the advantages that in the calibration process, the force measuring device connected with the lifting platform is driven by the lifting driving mechanism, the force measuring device presses the pressure sensor and transmits a pressure value to the controller, and the pressure sensor transmits a voltage signal to the controller, so that the pressure sensor is calibrated, manual operation is not needed in the calibration process, and inaccuracy of calibration data of the sensor due to human errors is overcome. The heating plate is arranged on the calibration platform, so that the environmental temperature of the calibration test of the pressure sensor can be changed, the output characteristics of the pressure sensor at different temperatures can be obtained, and the influence of different temperatures on the output characteristics of the pressure sensor can be effectively evaluated. The pressure sensor calibration device provided by the embodiment of the application has the advantages of simple structure, convenience in operation, high calibration reliability and easiness in popularization.
With reference to the first aspect, in a possible implementation manner, the calibration table further includes a leveling plate, the leveling plate is disposed below the heating plate and connected to the heating plate through a bolt and a leveling nut, and a first elastic pad is further disposed between the leveling plate and the heating plate.
In some embodiments, the first elastic pad is disposed through the bolt.
Exemplarily, the bolt runs through base, leveling board and hot plate respectively still be equipped with between the base with leveling board wears to establish the second cushion on the bolt.
With reference to the first aspect, in a possible implementation manner, the lifting driving mechanism includes a connecting rod fixed on a base, a supporting plate fixed on an upper portion of the connecting rod, and a lead screw nut pair rotatably disposed between the base and the supporting plate, and the lifting table is fixedly connected to the lead screw nut.
Exemplarily, a stepping motor is installed on the supporting plate, and an output shaft of the stepping motor is connected with a screw rod through a coupler.
In some embodiments, the two connecting rods are symmetrically arranged, the lifting platform penetrates through the connecting rods and has a sliding freedom degree along the connecting rods, and the connecting rods are used for lifting and guiding the lifting platform.
With reference to the first aspect, in a possible implementation manner, the lifting driving mechanism is a chain driven by a stepping motor, and the chain drives the lifting table to have a degree of freedom of reciprocating up and down.
In a second aspect, the present invention further provides a calibration method of the above calibration apparatus for a pressure sensor, where the calibration method includes:
setting the test temperature of the heating plate to T1The lifting driving mechanism is pressed downwards to apply a plurality of preset pressure values F to the calibration platform respectively1-FnObtaining F measured by the force measuring device1-FnAnd the corresponding voltage value V output by the pressure sensor11-V1n
Setting the test temperature of the heating plate to TiThe lifting driving mechanism is pressed downwards and respectively aligned with the marksSet table applying a plurality of preset pressure values F1-FnObtaining F measured by the force measuring device1-FnAnd the corresponding voltage value V output by the pressure sensori1-Vin
At different temperatures TiFor the corresponding Fn-VinFitting the data to obtain the specified temperature T of the pressure sensoriA first output characteristic function of;
at different preset pressure values FnFor the corresponding Ti-VinFitting the data to obtain a pressure value F at a preset valuenUnder the action, a second output characteristic function of the pressure sensor;
wherein, TiThe temperature value set for the ith time is represented, wherein i is a natural number; fnRepresenting the preset nth pressure value at each test temperature, wherein n is a natural number; vinExpressed at a temperature TiPressure value of FnThe voltage value output by the pressure sensor.
By adopting the pressure sensor calibration device to calibrate the pressure sensor to be calibrated at different temperatures and different pressures, the whole calibration process is simple and convenient to operate, and the calibration reliability is high.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise.
Fig. 1 is a schematic structural diagram of a calibration apparatus for a pressure sensor according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a pressure sensor mounted on an upper portion of a heating plate of a pressure sensor calibration device according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a temperature sensor mounted on a lower portion of a heating plate of a pressure sensor calibration device according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram illustrating a calibration process of a calibration apparatus for a pressure sensor according to an embodiment of the present invention;
in the figure: 10-a base, 20-a calibration table, 21-a heating plate, 22-a leveling plate, 23-a pressure sensor, 24-a first elastic pad, 25-a second elastic pad, 26-a leveling nut, 27-a temperature sensor, 30-a force measuring device, 31-a force measuring probe, 40-a lifting driving mechanism, 41-a lifting table, 42-a supporting plate, 43-a connecting rod, 44-a screw rod and 45-a stepping motor.
Detailed Description
In the following description, for purposes of explanation and not limitation, specific details are set forth, such as particular system structures, techniques, etc. in order to provide a thorough understanding of the embodiments of the invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced in other embodiments that depart from these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.
In order to explain the technical means of the present invention, the following description will be given by way of specific examples.
Referring to fig. 1 to fig. 4, a pressure sensor calibration device according to the present invention will now be described. The pressure sensor calibration device comprises a base 10, a lifting driving mechanism 40, a force measuring device 30, a calibration table 20 and a controller. The lifting driving mechanism 40 is installed on the base 10, and the lifting end of the lifting driving mechanism 40 is connected to a lifting platform 41, and the lifting platform 41 can move up and down under the driving of the lifting driving mechanism 40. A force measuring device 30 is fixed to the side of the elevating table 41, and the force measuring device 30 is provided with a force measuring probe 31 facing vertically downward for measuring the pressure of the pressure sensor 23. The calibration table 20 is arranged on the base 10, the calibration table 20 comprises a heating plate 21 arranged above the base 10, and the heating plate 21 changes the temperature of the heating plate 21 through an external heating module. A pressure sensor 23 to be calibrated is mounted above the heating plate 21 and directly below the load cell probe 31, and a temperature sensor 27 is mounted below the heating plate 21 for measuring the temperature of the heating plate 21. In addition, one end of the heating module is connected to the heating plate 21, and the other end is connected to a controller, and the controller controls the heating module to change the temperature of the heating plate 21. The control end of the lifting driving mechanism 40 is connected with the output end of the controller, and the controller controls the lifting platform 41 of the lifting driving mechanism 40 to move up and down. The pressure sensor 23 is connected with a data acquisition card through an external connecting resistance voltage conversion module, and the data acquisition card transmits the acquired voltage to the controller. The temperature sensor 27 is connected with the data acquisition card, transmits the acquired temperature to the controller, and the controller controls the heating module according to the temperature required to be set, so that the heating plate 21 is heated to reach the temperature required by the test. The force measuring device 30 transmits the acquired pressure signal to the controller, and the controller calibrates the pressure value and the voltage value of the pressure sensor 23 at different temperatures according to the received corresponding pressure value, voltage value and temperature value.
In the pressure sensor calibration device provided by this embodiment, the lifting platform 41 connected to the lifting driving mechanism 40 is used to drive the force measuring device 30 to move up and down, so as to transmit the pressure value of the pressure sensor 23 to the controller, and the pressure sensor 23 is connected to the data acquisition card after passing through the external resistor voltage conversion module, so as to transmit the pressure signal to the industrial personal computer through the data acquisition card, thereby realizing calibration of the pressure sensor 23. For the accuracy nature of maring, still set up hot plate 21, through setting up different temperatures to hot plate 21 to realize pressure sensor 23 under specific pressure value, the demarcation of different temperatures, can improve the accuracy that pressure sensor 23 was markd, and the pressure sensor calibration device that this embodiment provided simple structure, convenient to use, economical and practical.
In some embodiments, as shown in fig. 2 and 3, in order to ensure that the calibration process is not affected by other factors and ensure the reliability of calibration, a leveling plate 22 is further disposed in the calibration stage 20 during the calibration process. The leveling plate 22 is disposed below the heating plate 21 and connected thereto by bolts and leveling nuts 26, and a first elastic pad 24 is further disposed between the leveling plate 22 and the heating plate 21. Wherein, 4 leveling nuts 26 are arranged on the upper part of the leveling plate 22, the first elastic cushion 24 is arranged between the leveling plate 22 and the heating plate 21 and 4 bolts, and the compression degree of the first elastic cushion 24 is changed by adjusting the 4 leveling nuts 26, thereby leveling.
Alternatively, in order to achieve better leveling effect, a second elastic pad 25 may be mounted on the bolt between the base 10 and the leveling plate 22. Wherein the bolts penetrate through the base 10, and are connected with the second elastic pad 25, the leveling plate 22, the first elastic pad 24 and the heating plate 21, and the leveling nut 26. When the heating plate 21 is leveled, the 4 leveling nuts 26 are adjusted to change the compression degree of the first elastic pad 24 and the second elastic pad 25, so that leveling is realized, and the accuracy of pressure testing is ensured when the force measuring device 30 is used for testing the pressure of the pressure sensor 23 in a pressing mode.
It should be noted that, because the first elastic pad 24 and the second elastic pad 25 are close to the heating plate 21, the first elastic pad 24 and the second elastic pad 25 both use high temperature resistant elastic rubber, which can prolong the service life and make the leveling of the heating plate 21 easier.
Optionally, the pressure sensor 23 may be an FSR resistive film pressure sensor, and may convert pressure applied to the film area of the FSR sensor into a change in resistance value, and the pressure sensor 23 is externally connected to a resistance-to-voltage conversion module to convert the change in resistance value into a change in voltage value. And after the data acquisition card is connected with the resistance voltage conversion module, the collected voltage signals are transmitted to calibration software on the industrial personal computer.
In some embodiments, the elevating driving mechanism 40 includes, in addition to the elevating table 41 connected to the elevating end as described above, a connecting rod 43 on the base 10 and a supporting plate 42 at the other end of the connecting rod 43 in order to ensure the stability of the elevating driving mechanism 40. A rotatable screw nut pair is provided between the base 10 and the support plate 42, the elevating table 41 is provided on the screw 44, and the elevating table 41 is fixed by the screw nut. A force measuring device connecting plate is mounted on a side surface of the lifting table 41, and the force measuring device 30 is fixed to the lifting table 41 through the force measuring device connecting plate, for example, the lifting table 41 and the force measuring device connecting plate, and the force measuring device connecting plate and the force measuring device 30 may be fixed by bolts.
Specifically, a stepping motor 45 is further mounted on the support plate 42, and an output shaft of the stepping motor 45 is connected with the lead screw 44 through a coupling. It should be noted that the controller in the present application is an industrial personal computer, and a motion control card and calibration software are installed on the industrial personal computer in advance. The stepper motor 45 is connected to a stepper motor driver which is connected to a motion control card mounted on the industrial personal computer. Therefore, the calibration software installed on the industrial personal computer sends a motion command to the stepping motor 45, so as to control the lifting platform 41 to move up and down, and the force measuring probe 31 of the force measuring device 30 fixed with the lifting platform 41 can contact and detect the pressure value of the pressure sensor 23. The force measuring device 30 is connected with an industrial personal computer through a USB data line, the detected pressure value of the pressure sensor 23 is sent to the industrial personal computer, and calibration software installed on the industrial personal computer reads the measured value.
In order to improve the stability of the lifting driving mechanism 40, two connecting rods 43 may be symmetrically disposed, and the lifting platform 41 penetrates the connecting rods 43. For example, one end of the connecting rod 43 is fixedly mounted on the supporting plate 42 through a fixing seat, and the other end of the connecting rod 43 is fixedly mounted on the base 10 through a fixing seat, and the two connecting rods 43 are mounted in the same manner. Mounting holes are preset at two ends of the lifting platform 41 respectively, a group of linear bearings are mounted in the mounting holes respectively, wherein every two linear bearings are in one group, and each group of linear bearings are mounted in the mounting holes of the lifting platform 41 in an interference fit manner. The connecting rod 43 passes through the linear bearing so that the elevating table 41 can move up and down within a certain range. The lead screw 44 penetrates the middle of the elevating table 41, and fixes the elevating table 41 by a lead screw nut. The upper end of the lead screw is connected with an output shaft of the stepping motor 45 through a first coupler, the lower end of the lead screw 44 is connected with a second coupler, the lower end of the second coupler is connected with the deep groove bearing through interference fit, and the deep groove bearing is connected with the base 10 through interference fit.
In some embodiments, the lifting driving mechanism 40 may also be a chain driven by the stepping motor 45, and the chain drives the lifting platform 41 to reciprocate up and down, so that the structure of the chain is not described again.
Based on the same inventive concept, the embodiment of the application also provides a calibration method of the pressure sensor calibration device.
Firstly, it should be noted that the controller in the present application is an industrial personal computer, and a motion control card and calibration software are pre-installed on the industrial personal computer. The stepper motor 45 is connected to a stepper motor driver which is connected to a motion control card mounted on the industrial personal computer. Calibration software installed on the industrial personal computer sends a motion command to the stepping motor 45, so that the lifting platform 41 is controlled to move up and down. The force measuring device 30 is connected with an industrial personal computer through a USB data line, the detected pressure value of the pressure sensor 23 is sent to the industrial personal computer, and calibration software installed on the industrial personal computer reads the measured value. After the force measuring probe 31 of the force measuring device 30 contacts the pressure sensor 23, the output value of the force measuring device 30 is the pressure value applied to the pressure sensor 23 according to the principle of acting force and reaction force. The upper part of the heating plate 21 is provided with a pressure sensor 23, the pressure sensor 23 is connected with a resistance-voltage conversion module and then connected with a data acquisition card, the data acquisition card is connected with an industrial personal computer, the data acquisition card sends the acquired voltage value of the pressure sensor 23 to the industrial personal computer, and calibration software installed on the industrial personal computer reads the measured value. The lower part of the heating plate 21 is provided with a temperature sensor 27, the temperature sensor 27 is connected with an industrial personal computer through a data acquisition card, the data acquisition card acquires the output of the temperature sensor 27 and sends temperature data to calibration software installed on the industrial personal computer. The heating plate 21 is externally connected with an industrial personal computer through a voltage control module, and calibration software adjusts the input voltage of the heating plate 21 through the voltage control module, so that the temperature of the heating plate 21 is changed.
The calibration comprises the following steps:
firstly, at normal temperature T1Under, set up pressure measurement scope, test mode and pressure interval on the industrial computer, specifically include: setting a pressure measuring range, namely setting a maximum applied pressure value according to the product specification of the pressure sensor 23, wherein the pressure measuring range of the embodiment is 0-20N, namely F1-Fn1N, 2N, 3N, 4N, … …, 19N, 20N, N is a natural number from 1 to 20. Setting a test mode, which is divided into a boosting test mode and a voltage reduction test mode: the pressurization test mode refers to that the applied pressure is gradually increased from zero to the maximum applied pressure value in the calibration process(ii) a The decompression test mode refers to that the applied pressure is gradually reduced to zero from the maximum applied pressure value in the calibration process. Thirdly, setting a pressure interval, in the embodiment, every time the applied pressure value is increased by 1N, acquiring the output value of a group of pressure sensors 23, namely when the temperature of the heating plate is T1At a pressure value of F1-FnWhile the corresponding output voltage value is V11-V1n
In this embodiment, the boosting test mode is taken as an example to describe the test procedure. In the initial state, the initial value of the force measuring device 30 is 0.
And (3) normal temperature testing: when temperature T of the heating plate1At normal temperature, the stepping motor 45 is controlled to rotate clockwise, the lead screw drives the lifting platform 41 to move downwards, after the force measuring device 30 is contacted with the pressure sensor 23, according to the principle of acting force and reacting force, the output value of the force measuring device 30 is the pressure value borne by the pressure sensor 23, when the output value of the force measuring device 30 is 1N, the calibration software controls the stepping motor 45 to stop rotating through a stepping motor driver, and reads the voltage value V output to the industrial personal computer by the pressure sensor 23 for 10 times through the acquisition card11Calculating the average value of the voltage to obtain a group
Figure BDA0002994708960000091
Data, where F represents the pressure experienced by the pressure sensor 23,
Figure BDA0002994708960000092
representing the value of the output voltage of the pressure sensor 23 at that pressure.
And continuously controlling the stepping motor 45 to rotate clockwise, repeating the normal-temperature testing step, and sequentially recording the output voltage values of the pressure sensors 23 when the output values of the force measuring device 30 are 2N, 3N, 4N, … …, 19N and 20N by the calibration software. For the obtained 20 groups
Figure BDA0002994708960000093
And fitting the data to obtain an output characteristic function expression of the pressure sensor under the normal temperature environment. It should be noted that: the fitting can be performed using three functions, such as: linear fittingY-kx, polynomial fitting function:
Figure BDA0002994708960000094
or an exponential fit function: y (x) a ebx+c*edx. The fitting process uses an appropriate fitting function to fit according to the trend of change exhibited by the measured data.
The working range of the pressure sensor adopted in the embodiment is-20 ℃ to 60 ℃, and in order to further examine different temperatures TiThe present embodiment has 6 temperature investigation nodes, namely, 30 ℃, 35 ℃, 40 ℃, 45 ℃, 50 ℃ and 55 ℃, respectively, which have an influence on the output characteristics of the pressure sensor, namely, T2At 30 ℃ T3At 35 ℃ and T4At 40 ℃ T5At 45 ℃ and T6At 50 ℃ T7The temperature was 55 ℃. In this embodiment, the boosting test mode is still taken as an example to describe the test procedure. In the initial state, the initial value of the force measuring device 30 is 0.
Temperature characteristic testing: and controlling the stepping motor 45 to rotate clockwise, and controlling the stepping motor 45 to stop rotating when the output value of the force measuring device 30 is 1N. The industrial personal computer controls the temperature of the heating plate 21 to rise to T2Stopping heating at 30 deg.C, and reading output voltage value V of the pressure sensor for 10 times by calibration software via data acquisition card21Calculating the average value of the output voltage values to obtain a group
Figure BDA0002994708960000095
Data, where, T represents the current temperature,
Figure BDA0002994708960000096
representing the value of the output voltage of the pressure sensor at that temperature. The temperature of the heating plate 21 was continuously changed, and the above-described operation was repeated to record the output voltage values V of the pressure sensors at 35 deg.C, 40 deg.C, 45 deg.C, 50 deg.C and 55 deg.C in this orderi1For the obtained 6 groups
Figure BDA0002994708960000101
Data, then fitting, wherein the fitting process is presented according to the measured dataIs fitted with a suitable fitting function. After fitting, the different temperatures T are obtained at a pressure of 1NiThe output characteristic function expression of the pressure sensor below.
The step motor 45 is continuously controlled to rotate clockwise, the temperature characteristic testing steps are repeated, and the calibration software sequentially records the output pressure value F of the force measuring device 302At 2N, the output voltage V of the pressure sensor is 30 deg.C, 35 deg.C, 40 deg.C, 45 deg.C, 50 deg.C and 55 deg.Ci2For the obtained 6 groups
Figure BDA0002994708960000102
Figure BDA0002994708960000103
Data are then fitted to obtain different temperatures T at a pressure of 2NiThe output characteristic function expression of the pressure sensor below.
Repeating the temperature characteristic testing steps, and sequentially recording the output pressure value F of the force measuring device 30 by the calibration softwaren3N, 4N, … …, 19N, and 20N, wherein N is a natural number of 3 or more, and the output voltage V of the pressure sensor is set at 30 deg.C, 35 deg.C, 40 deg.C, 45 deg.C, 50 deg.C, and 55 deg.C respectivelyin. At each particular FnNext, all will get the corresponding 6 groups
Figure BDA0002994708960000104
Data were then fitted to give a pressure of FnAt different temperatures TiThe output characteristic function expression of the pressure sensor below.
The calibration process of the embodiment of the application does not need manual operation, and adverse effects of human errors on calibration data are overcome. And the temperature of the heating plate 21 is changed, so that the pressure sensor to be calibrated can work at different temperatures, and the influence of different temperatures on the output characteristic of the pressure sensor can be conveniently examined.
It should be understood that, the sequence numbers of the steps in the foregoing embodiments do not imply an execution sequence, and the execution sequence of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present invention; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not substantially depart from the spirit and scope of the embodiments of the present invention, and are intended to be included within the scope of the present invention.

Claims (10)

1. A pressure sensor calibration device is characterized by comprising:
a base;
the lifting driving mechanism is arranged on the base, and the lifting end of the lifting driving mechanism is connected with a lifting platform;
the force measuring device is fixed on the side surface of the lifting platform and is provided with a force measuring probe facing downwards vertically;
the calibration platform comprises a heating plate arranged above the base, the heating plate is externally connected with a heating module for controlling temperature, a pressure sensor corresponding to the force measuring probe is arranged on the upper surface of the heating plate, and a temperature sensor is also arranged on the heating plate; and
and the corresponding output end of the controller is connected with the corresponding control ends of the heating module and the lifting driving mechanism, the corresponding input end of the controller is connected with the corresponding output ends of the force measuring device, the pressure sensor and the temperature sensor, and the pressure value and the voltage value of the pressure sensor at different temperatures are calibrated according to the received corresponding pressure value, voltage value and temperature value.
2. The pressure sensor calibration device of claim 1, wherein the calibration platform further comprises a leveling plate, the leveling plate is disposed below the heating plate and connected to the heating plate through a bolt and a leveling nut, and a first elastic pad is disposed between the leveling plate and the heating plate.
3. The apparatus for calibrating a pressure sensor according to claim 2, wherein said first elastic pad is disposed through said bolt.
4. The pressure sensor calibration device according to claim 2, wherein the bolt penetrates through the base, the leveling plate and the heating plate, and a second elastic pad penetrating through the bolt is further disposed between the base and the leveling plate.
5. The apparatus for calibrating a pressure sensor according to claim 4, wherein the first elastic pad and the second elastic pad are made of high temperature resistant elastic rubber.
6. The calibration device of the pressure sensor as claimed in claim 1, wherein the lifting driving mechanism comprises a connecting rod fixed on the base, a supporting plate fixed on the upper portion of the connecting rod, and a lead screw nut pair rotatably disposed between the base and the supporting plate, and the lifting platform is fixedly connected with the lead screw nut.
7. The pressure sensor calibration device of claim 6, wherein a stepping motor is mounted on the support plate, and an output shaft of the stepping motor is connected with a lead screw through a coupling.
8. The pressure sensor calibration device according to claim 6, wherein two connecting rods are symmetrically arranged, the lifting platform penetrates through the connecting rods and has a sliding freedom along the connecting rods, and the connecting rods are used for guiding the lifting platform to lift.
9. The calibration device of the pressure sensor as claimed in claim 1, wherein the lifting driving mechanism is a chain driven by a stepping motor, and the chain drives the lifting platform to have a freedom of reciprocating up and down.
10. A calibration method for a calibration device of a pressure sensor according to any of claims 1-9, wherein the calibration method comprises:
setting the test temperature of the heating plate to T1The lifting driving mechanism is pressed downwards to apply a plurality of preset pressure values F to the calibration platform respectively1-FnObtaining F measured by the force measuring device1-FnAnd the corresponding voltage value V output by the pressure sensor11-V1n
Setting the test temperature of the heating plate to TiThe lifting driving mechanism is pressed downwards to apply a plurality of preset pressure values F to the calibration platform respectively1-FnObtaining F measured by the force measuring device1-FnAnd the corresponding voltage value V output by the pressure sensori1-Vin
At different temperatures TiFor the corresponding Fn-VinFitting the data to obtain the specified temperature T of the pressure sensoriA first output characteristic function of;
at different preset pressure values FnFor the corresponding Ti-VinFitting the data to obtain a pressure value F at a preset valuenUnder the action, a second output characteristic function of the pressure sensor;
wherein, TiThe temperature value set for the ith time is represented, wherein i is a natural number; fnRepresenting the preset nth pressure value at each test temperature, wherein n is a natural number; vinExpressed at a temperature TiPressure value of FnThe voltage value output by the pressure sensor.
CN202110326060.2A 2021-03-26 2021-03-26 Pressure sensor calibration device and calibration method Pending CN113049183A (en)

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Cited By (4)

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