CN105092095A - Temperature calibrating method and device - Google Patents
Temperature calibrating method and device Download PDFInfo
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- CN105092095A CN105092095A CN201410183275.3A CN201410183275A CN105092095A CN 105092095 A CN105092095 A CN 105092095A CN 201410183275 A CN201410183275 A CN 201410183275A CN 105092095 A CN105092095 A CN 105092095A
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Abstract
The present invention provides a method and device used for temperature calibration. The device comprises a calibration resistor possessing a resistance value relevant with the temperature; a measurement module coupled with the calibration resistor and used for acquiring the resistance value information of the calibration resistor at different temperatures and outputting the corresponding measurement values; and a data processing unit coupled with the measurement module and used for determining the corresponding relation between the resistance values of the calibration resistor and the measurement values based on the plurality of measurement values and the resistance values of the calibration resistor corresponding to the plurality of measurement values. According to the present invention, a temperature sensor and the measurement module are calibrated separately, when a fault occurs, the faulted part can be substituted directly, and then the data processing unit is utilized to modify a calibration parameter, so that the maintenance time is shorted substantially, and the maintenance cost is reduced.
Description
Technical field
The present invention relates to field of temperature measurement, especially for method and apparatus temperature sensor, measurement module being carried out to temperature calibration.
Background technology
Environment temperature monitoring is one of important module of Measurement of Semiconductors equipment, and temperature sensor is often used to Real-Time Monitoring variation of ambient temperature, and it is widely used in experiment and industrial automation equipment.Because the restriction of its inherent characteristic and equipment are to temperature accuracy requirement, use and often need to demarcate it, and the accuracy of calibration result normally can be run device measuring and has an impact.
Scaling method conventional is at present carried out as a whole at temperature sensor and measurement module, thermostat is placed in by temperature sensor, at different temperatures, the AD value collected stores and is uploaded to PC by measurement module, under PC controls, obtain many groups demarcate temperature and measurement module AD Value Data pair, in this, as tabling look-up according to or completing temperature calibration by methods such as multi-point fittings.Like this when a wherein part break down need to change time, must re-start demarcation, and calibration process often will spend certain hour, this is unallowed in Measurement of Semiconductors equipment.
Therefore, need a kind of demarcation badly accurately, temperature measurement module is convenient to replace, the temperature calibration method that servicing time is short.
Summary of the invention
In order to make up the above shortcoming of prior art, the present invention proposes a kind of method and apparatus that temperature sensor, measurement module are demarcated respectively.
According to a first aspect of the invention, provide a kind of device for temperature calibration, comprising: demarcate resistance, for the resistance value that analog temperature sensor is representative at different temperatures; Measurement module, is coupled to described demarcation resistance, for gathering the resistance information of described demarcation resistance, and exports corresponding measured value; And data processing unit, be coupled to described measurement module, for the resistance based on some described measured values and the described demarcation resistance corresponding with this some described measured value, determine the corresponding relation between the resistance of described demarcation resistance and described measured value.
Preferably, described measurement module also comprises: resistance signal converting unit, and for exporting signal corresponding to the described resistance information that collects with it, wherein, the signal that described resistance signal converting unit exports is voltage or current signal; Analog to digital converter, produces corresponding measured value for the signal exported according to described resistance signal converting unit.
Preferably, described measurement module also comprises: signal amplification unit, is coupled to described resistance signal converting unit, for amplifying the output signal of described resistance signal converting unit; Filter unit, after the output signal of the described signal amplification unit received by it is carried out filtering, exports described analog to digital converter to.
Preferably, described device also comprises: CPU (central processing unit), is sent to described data processing unit for the output signal that gathers from described analog to digital converter.
Preferably, described device also comprises: thermostatically-controlled equipment, and for providing stable temperature field for the demarcation of temperature sensor, the precision of described thermostatically-controlled equipment is greater than the measuring accuracy of described temperature sensor.
Preferably, described data processing unit, based on multiple resistance value of described temperature sensor and corresponding with the plurality of resistance value temperature preset, determines the resistance value of described temperature sensor and the corresponding relation of temperature.
The present invention proposes a kind of method for temperature calibration on the other hand, comprises the following steps: the resistance value of the temperature sensor that A. is to be calibrated under obtaining multiple temperature and the measured value of measurement module; B. based on the resistance value of described temperature sensor, the measured value of described measurement module and default temperature determine described resistance value, measured value respectively with the corresponding relation of temperature.
Preferably, also comprise in described step B: by thermostatically-controlled equipment for described temperature sensor provides predetermined temperature field, wherein, the precision of described thermostatically-controlled equipment is greater than the measuring accuracy of described temperature sensor.
Preferably, also comprise in described step B: based on multiple resistance value and the temperature preset corresponding with the plurality of resistance value of described temperature sensor, determine the resistance value of described temperature sensor and the corresponding relation of temperature.
Preferably, also comprise in described step B: based on described measurement module multiple measured value and corresponding with the plurality of measured value resistance preset, determine the measured value of described measurement module and the corresponding relation demarcating resistance.
Preferably, also comprise in described step B: according to the measured value of described measurement module and the relation of demarcating resistance, determine the resistance value corresponding with described measured value, then according to the corresponding relation of described temperature sensor resistance value and temperature, determine current temperature.
Temperature sensor and measurement module are demarcated by the present invention respectively, directly can replace faulty component when breaking down, and then utilize data processing unit to revise calibrating parameters, substantially reduce servicing time, reduce maintenance cost.
Accompanying drawing explanation
After description by reference to the specific embodiment of the present invention given by following accompanying drawing, the present invention will be understood better, and other objects of the present invention, details, feature and advantage will become more apparent.In the accompanying drawings:
Fig. 1 is the configuration diagram of measurement module being carried out to temperature calibration according to the embodiment of the present invention;
Fig. 2 is the process flow diagram of the temperature calibration method according to one embodiment of the invention.
Embodiment
Below with reference to accompanying drawings preferred implementation of the present disclosure is described in more detail.Although show preferred implementation of the present disclosure in accompanying drawing, but should be appreciated that, the disclosure can be realized in a variety of manners and not should limit by the embodiment of setting forth here.On the contrary, provide these embodiments to be to make the disclosure more thorough and complete, and complete for the scope of the present disclosure can be conveyed to those skilled in the art.
Fig. 1 is the configuration diagram of measurement module being carried out to temperature calibration according to the embodiment of the present invention.This temperature calibration device comprises: measurement module 10, demarcation resistance 20 and data processing unit 30.Wherein, resistance 20 is demarcated for providing the resistance information with temperature correlation, the resistance value that namely analog electrical resistive temperature sensor is representative at different temperatures; Measurement module 10 for gathering the resistance information of the demarcation resistance 20 under different temperatures, and communicates with data processing unit 30, and then makes data processing unit 30 can read measurement module data, and processes data, draws calibrating parameters.
Be understandable that, measurement module 10 can be communicated with data processing unit 30 by wired or wireless mode, and communication protocol also can take various protocols, such as ICP/IP protocol.
How temperature calibration is carried out to measurement module 10 to set forth better, below the framework of measurement module 10 is set forth.
Measurement module 10 comprises resistance signal converting unit 101, signal amplification unit 102, filter unit 103, analog to digital converter (ADC) 104 and CPU105.Wherein, resistance signal converting unit 101 is coupled to demarcates resistance 20, thus can obtain corresponding resistance signal.Be understandable that, this resistance signal can be the different resistance values of demarcating resistance and presenting at different temperatures.Then, resistance signal converting unit 101 produces corresponding voltage/current signals by based on the resistance signal read, and exports the signal amplification unit 102 coupled with it to.Then, signal amplification unit 102 amplifies its voltage/current signals received by according to setting, and transfers to filter unit 104, filtering high-frequency signal, thus obtains the signal that ADC104 can process.The analog voltage signal that ADC104 is received is converted to corresponding digital signal, and is sent to CPU105 and processes this digital signal for it.Then, CPU105 is communicated with data processing unit 30 by wired or wireless mode, and the digital signal after process is sent to data processing unit 30.Data processing unit 30 is by processing the data that it receives, such as multistage matching, thus obtains the relation between resistance and ADC output valve.
Optionally, temperature calibration device also comprises thermostatically-controlled equipment 40.Because resistance temperature detector is used to the real-time change of measures ambient temperature, and cause self resistance to change according to the change of its temperature, therefore, need with thermostatically-controlled equipment 40 for calibration of sensor provides stable temperature field, thus resistance temperature detector resistance value at different temperatures can be obtained exactly.Then, in the process of calibration measurements module 10, according to temperature sensor resistance value at different temperatures, demarcation resistance can be set as corresponding resistance value.
Optionally, the method that resistance signal converting unit can adopt bridge method, Method of constant flow source etc. can realize resistance precision measurement, thus realize based on resistance value, voltage signal one to one to be exported.Equally, resistance signal converting unit can adopt additive method with output current signal.
Equally, in order to demarcate accurately temperature, under needing that demarcation resistance is placed in the test environment same with temperature sensor, then measure.
In addition, in order to improve the accuracy of demarcation, measurement module uses precision calibration resistance in calibration process, namely at different demarcation temperature, chooses the precision calibration resistance that resistance is temperature sensor resistance value at demarcation temperature.For PT100 platinum resistance, its resistance 0 DEG C time is 100 Ω, then demarcate resistance and choose 100 Ω; Resistance when 54.17 DEG C is 121 Ω, then demarcate resistance and choose 121 Ω; Resistance when 96.03 DEG C is 137 Ω, then demarcate resistance and choose 137 Ω; .
Be understandable that, the precision of above-mentioned thermostatically-controlled equipment need higher than the measuring accuracy of temperature sensor.Usually, ± 0.01 DEG C can meet application requirement.Temperature sensor to be calibrated is placed in thermostatically-controlled equipment, and keeps each temperature sensor to be calibrated to be positioned at sustained height, namely each temperature sensor is positioned in same level.Then, regulating thermostatic control device, at a certain demarcation temperature, uses surveying instrument (such as multimeter) to record the resistance of now temperature sensor, counts table 1.
Table 1 temperature sensor resistance v. temperature phasing meter
| Demarcate temperature | T0 | T1 | …… | Tn |
| Actual measurement resistance | R0 | R1 | …… | Rn |
Therefore, after completing above-mentioned recording process, the resistance of temperature sensor and the corresponding relation of temperature just can be obtained.For example, after recording n time, n temperature value (that is, T0 to Tn) one_to_one corresponding can be obtained and n resistance value (that is, R0-Rn).
According to the temperature value of the resistance value determined and its correspondence, simulate the relation of resistance and temperature.For two rank polynomial expressions, demarcating temperature by setting three, correspondingly measuring 3 groups of resistance values, can multinomial coefficient be determined, namely drawing the expression formula of temperature sensor resistance and temperature:
R＝AT
2+BT+C(1)
Wherein, R is the resistance of the temperature sensor under Current Temperatures, and A, B, C are the coefficient on each rank of temperature T in this polynomial expression, therefore, set by above-mentioned the funtcional relationship that three demarcation temperature just can determine R and T, thus drawn complete " sensor temperature to be calibrated-resistance phasing meter ".
Those skilled in the art, it is understood that the relation of resistance and temperature is not only above-mentioned second order relation, can adjusts as required and select corresponding exponent number to express the relation of resistance and temperature.
Carrying out measurement module timing signal, demarcation resistance 20 is connected to the input end of measurement module 10, thus is connected with resistance signal converting unit 101, data processing unit 30 reads the output valve from ADC104 now, and counts table 2.
Table 2 measurement module temperature calibration correspondence table
| Demarcate temperature | T0 | T1 | …… | Tn |
| Precision calibration resistance | R j0 | R j1 | …… | R jn |
| ADC output valve | C r0 | C r1 | …… | C rn |
Each demarcation temperature can be specified by table 2 and/or demarcate resistance and correspond to unique measured value.Therefore, data processing unit 30 is according to the output valve of the ADC104 read and demarcate resistance, the corresponding relation that can determined this output valve by multistage matching and be demarcated between resistance.
Similar, still for two rank polynomial expressions, by determining the resistance of demarcation resistance corresponding at three demarcation temperature, and 3 groups of now corresponding ADC output valves, can multinomial coefficient be determined, draw resistance R
jwith the relation of ADC output valve Cr, shown in (2):
Wherein, R
jfor demarcating the resistance of resistance under Current Temperatures, D, E, F are the coefficient of output valve Cr on each rank of ADC in this polynomial expression.
When temperature sensor be connected to measurement module carry out temperature survey time, after data processing unit 30 collects AD output valve, in demarcating according to measurement module, the Relation Parameters of AD output valve and precision calibration resistance, just can determine corresponding resistance value.After resistance value is determined, according to the sensor resistance and Relation Parameters or " the sensor temperature to be calibrated-resistance phasing meter " of demarcating temperature, determine corresponding temperature value.
Fig. 2 is the process flow diagram of the method for the temperature calibration of the foundation embodiment of the present invention.
Perform step S21, obtain the sensor resistance to be calibrated at multiple temperature.
In this step, in order to demarcate accurately temperature sensor, measure under needing temperature sensor to be placed in stable demarcation temperature.Optionally, due to employing thermostatically-controlled equipment for calibration of sensor provides stable temperature field, thus temperature sensor resistance value at different temperatures can be obtained exactly.Being understandable that, is relation one to one between temperature and resistance value.
Then, perform step S23, determine sensor temperature-sensitivity to be calibrated.
In this step, by based on the multiple temperature obtained in step S21 and the resistance value corresponding with it, the corresponding relation of sensor temperature-resistance is determined.Optionally, as required, temperature and the resistance of suitable number can be selected, and then determines the funtcional relationship of sensor temperature-resistance.
Perform, step S22, measurement module is determined to demarcate the resistance of resistance and the relation of ADC output valve.
With similar in step S21, demarcate the resistance of resistance and the ADC output valve corresponding with it according to different at multiple temperature, determine funtcional relationship therebetween.
Then, step S24 is performed, based on ADC output valve determination Current Temperatures.
In this step, can according to the relation between the output valve of the resistance of the demarcation resistance determined in step S22, ADC, determine the resistance that the output valve of current ADC is corresponding, then according to the sensor temperature-sensitivity to be calibrated determined in S23, and then current temperature can be determined.
Be understandable that the sequencing that step S21 and S22 is not strict also first can perform step S22.
Based on this technical scheme of the present invention, temperature sensor and measurement module are demarcated respectively, therefore directly can replace faulty component when breaking down, then utilize data processing unit to revise calibrating parameters, substantially reduce servicing time, reduce maintenance cost.
Those of ordinary skill in the art it is also understood that various exemplary logical block, module, circuit and algorithm steps that the embodiment in conjunction with the application describes can be embodied as electronic hardware, computer software or the combination of the two.In order to clearly represent this interchangeability between hardware and software, all around its function, general description is carried out to various exemplary parts, block, module, circuit and step above.Be embodied as hardware as this function or be embodied as software, the design constraint depending on specific application and apply over the whole system.Those skilled in the art for often kind of application-specific, can realize described function in the mode of accommodation, but, thisly realize decision-making and should not be construed as and deviate from protection scope of the present invention.
Claims (11)
1., for a device for temperature calibration, comprising:
Demarcate resistance, for the resistance value that analog temperature sensor is representative at different temperatures;
Measurement module, is coupled to described demarcation resistance, for gathering the resistance information of described demarcation resistance, and exports corresponding measured value; And
Data processing unit, is coupled to described measurement module, for the resistance based on some described measured values and the described demarcation resistance corresponding with this some described measured value, determines the corresponding relation between the resistance of described demarcation resistance and described measured value.
2. device as claimed in claim 1, it is characterized in that, described measurement module also comprises:
Resistance signal converting unit, for exporting signal corresponding to the described resistance information that collects with it, wherein, the signal that described resistance signal converting unit exports is voltage or current signal;
Analog to digital converter, produces corresponding measured value for the signal exported according to described resistance signal converting unit.
3. device as claimed in claim 2, it is characterized in that, described measurement module also comprises:
Signal amplification unit, is coupled to described resistance signal converting unit, for amplifying the output signal of described resistance signal converting unit;
Filter unit, after the output signal of the described signal amplification unit received by it is carried out filtering, exports described analog to digital converter to.
4. device as claimed in claim 3, it is characterized in that, described device also comprises:
CPU (central processing unit), for being sent to described data processing unit by the output signal from described analog to digital converter.
5. device as claimed in claim 1, it is characterized in that, described device also comprises: thermostatically-controlled equipment, and for providing stable temperature field for temperature sensor, wherein, the precision of described thermostatically-controlled equipment is greater than the measuring accuracy of described temperature sensor.
6. device as claimed in claim 5, it is characterized in that, described data processing unit, based on multiple resistance value of described temperature sensor and corresponding with the plurality of resistance value temperature preset, determines the resistance value of described temperature sensor and the corresponding relation of temperature.
7. for a method for temperature calibration, it is characterized in that, comprise the following steps:
The resistance value of temperature sensor to be calibrated under A. obtaining multiple temperature and the measured value of measurement module;
B. based on the resistance value of described temperature sensor, the measured value of described measurement module and default temperature determine described resistance value, measured value respectively with the corresponding relation of temperature.
8. method as claimed in claim 7, it is characterized in that, also comprise in described step B: by thermostatically-controlled equipment for described temperature sensor provides predetermined temperature field, thus make described temperature sensor be in predetermined temperature field, wherein, the precision of described thermostatically-controlled equipment is greater than the measuring accuracy of described temperature sensor.
9. method as claimed in claim 7, is characterized in that, also comprise in described step B:
Based on multiple resistance value and the temperature preset corresponding with the plurality of resistance value of described temperature sensor, determine the resistance value of described temperature sensor and the corresponding relation of temperature.
10. method as claimed in claim 7, is characterized in that, also comprise in described step B:
Based on described measurement module multiple measured value and corresponding with the plurality of measured value resistance preset, determine the measured value of described measurement module and the corresponding relation demarcating resistance.
11. methods as claimed in claim 7, is characterized in that, also comprise in described step B:
According to the measured value of described measurement module and the relation of demarcating resistance, determine the resistance value corresponding with described measured value, then according to the corresponding relation of described temperature sensor resistance value and temperature, determine current temperature.
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| CN110501948A (en) * | 2019-08-23 | 2019-11-26 | 大陆汽车车身电子系统（芜湖）有限公司 | A method of the data of the acquisition resistance sensor for electronic device |
| CN110634279A (en) * | 2019-09-09 | 2019-12-31 | 浙江永贵电器股份有限公司 | Non-contact self-learning severe environment temperature collector based on AVR single chip microcomputer |
| CN110763372A (en) * | 2019-11-29 | 2020-02-07 | 孝感华工高理电子有限公司 | Method for measuring resistance-temperature relation of NTC temperature sensor |
| CN113049183A (en) * | 2021-03-26 | 2021-06-29 | 河北省科学院应用数学研究所 | Pressure sensor calibration device and calibration method |
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Cited By (9)
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| CN105352623A (en) * | 2015-12-14 | 2016-02-24 | 重庆川仪自动化股份有限公司 | Method for improving precision of thermal resistance temperature transmitter |
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| CN110501948A (en) * | 2019-08-23 | 2019-11-26 | 大陆汽车车身电子系统（芜湖）有限公司 | A method of the data of the acquisition resistance sensor for electronic device |
| CN110501948B (en) * | 2019-08-23 | 2022-05-17 | 大陆汽车车身电子系统（芜湖）有限公司 | Method for collecting data of resistance type sensor for electronic device |
| CN110634279A (en) * | 2019-09-09 | 2019-12-31 | 浙江永贵电器股份有限公司 | Non-contact self-learning severe environment temperature collector based on AVR single chip microcomputer |
| CN110763372A (en) * | 2019-11-29 | 2020-02-07 | 孝感华工高理电子有限公司 | Method for measuring resistance-temperature relation of NTC temperature sensor |
| CN113049183A (en) * | 2021-03-26 | 2021-06-29 | 河北省科学院应用数学研究所 | Pressure sensor calibration device and calibration method |
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