CN105092095B - Temperature calibration method and device - Google Patents
Temperature calibration method and device Download PDFInfo
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- CN105092095B CN105092095B CN201410183275.3A CN201410183275A CN105092095B CN 105092095 B CN105092095 B CN 105092095B CN 201410183275 A CN201410183275 A CN 201410183275A CN 105092095 B CN105092095 B CN 105092095B
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Abstract
The present invention provides a kind of method and apparatus for temperature calibration, comprising: calibration resistance has resistance value relevant to temperature；Measurement module is coupled to calibration resistance, for acquiring the resistance value information of the calibration resistance under different temperatures, and exports corresponding measured value；And data processing unit, it is coupled to measurement module, for determining the corresponding relationship between the resistance value and measured value of calibration resistance based on several measured values and the resistance value for demarcating resistance corresponding with several measured values.The present invention demarcates temperature sensor and measurement module respectively, and faulty component can be directly replaced when breaking down, and then modifies calibrating parameters using data processing unit, substantially reduces maintenance time, reduce maintenance cost.
Description
Technical field
The present invention relates to field of temperature measurement, especially for carrying out temperature calibration to temperature sensor, measurement module
Method and apparatus.
Background technique
Environment temperature monitoring is one of the important module of Measurement of Semiconductors equipment, and temperature sensor is often used to real-time monitoring
Variation of ambient temperature is widely used in experiment and industrial automation equipment.Due to the limitation and equipment pair of its inherent characteristic
Temperature accuracy requirement, using often needing to demarcate it, and the accuracy of calibration result can operate normally device measuring
It has an impact.
Currently used scaling method is to carry out temperature sensor and measurement module as a whole, i.e., by temperature sensor
It is placed in thermostat, at different temperatures, collected AD value is stored and be uploaded to PC by measurement module, is obtained under PC control
Multiple groups demarcate temperature and measurement module AD Value Data pair, complete temperature according to or by the methods of multi-point fitting in this, as tabling look-up
Calibration.In this way when a portion failure needs replacing, it is necessary to calibration is re-started, and calibration process will often be spent
Certain time, this does not allow in Measurement of Semiconductors equipment.
Therefore, it is accurate to need a kind of calibration, temperature measurement module is convenient for replacement, maintenance time short temperature calibration method.
Summary of the invention
In order to make up the disadvantage mentioned above of the prior art, the invention proposes a kind of pair of temperature sensor, measurement modules to distinguish
The method and apparatus demarcated.
According to the first aspect of the invention, a kind of device for temperature calibration is provided, comprising: calibration resistance is used
In analog temperature sensor representative resistance value at different temperatures；Measurement module is coupled to the calibration resistance, for adopting
Collect the resistance value information of the calibration resistance, and exports corresponding measured value；And data processing unit, it is coupled to the measurement mould
Block is determined for the resistance value based on several measured values and the calibration resistance corresponding with several measured values
Corresponding relationship between the resistance value and the measured value of the calibration resistance.
Preferably, the measurement module further include: resistance signal converting unit, for exporting and its collected described resistance
The corresponding signal of value information, wherein the signal of the resistance signal converting unit output is voltage or current signal；Analog-to-digital conversion
Device, the signal for being exported according to the resistance signal converting unit generate corresponding measured value.
Preferably, the measurement module further include: signal amplification unit is coupled to the resistance signal converting unit, uses
In the output signal for amplifying the resistance signal converting unit；Filter unit, by the signal amplification unit received by it
Output signal be filtered after, output is to the analog-digital converter.
Preferably, described device further include: central processing unit, for acquiring the output letter from the analog-digital converter
Number and be sent to the data processing unit.
Preferably, described device further include: thermostatically-controlled equipment, for providing stable temperature for the calibration of temperature sensor
Field is spent, the precision of the thermostatically-controlled equipment is greater than the measurement accuracy of the temperature sensor.
Preferably, multiple resistance values of the data processing unit based on the temperature sensor and with multiple resistance
It is worth corresponding preset temperature, determines the resistance value of the temperature sensor and the corresponding relationship of temperature.
Another aspect of the present invention proposes a kind of method for temperature calibration, comprising the following steps: A. obtains multiple temperature
The measured value of the resistance value of temperature sensor to be calibrated and measurement module under degree；B. the resistance based on the temperature sensor
Value, the measured value of the measurement module and preset temperature determine that the resistance value, measured value are corresponding with temperature respectively and close
System.
Preferably, in the step B further include: provide scheduled temperature by thermostatically-controlled equipment for the temperature sensor
Spend field, wherein the precision of the thermostatically-controlled equipment is greater than the measurement accuracy of the temperature sensor.
Preferably, in the step B further include: multiple resistance values based on the temperature sensor and with multiple electricity
The corresponding preset temperature of resistance value, determines the resistance value of the temperature sensor and the corresponding relationship of temperature.
Preferably, in the step B further include: multiple measured values based on the measurement module and with multiple survey
The corresponding preset resistance of magnitude determines the measured value of the measurement module and the corresponding relationship of calibration resistance.
Preferably, in the step B further include: according to the relationship of the measured value of the measurement module and calibration resistance, really
Fixed resistance value corresponding with the measured value is determined further according to the corresponding relationship of the resistance temperature sensor value and temperature
Current temperature.
The present invention demarcates temperature sensor and measurement module respectively, and failure portion can be directly replaced when breaking down
Point, calibrating parameters then are modified using data processing unit, maintenance time is substantially reduced, reduces maintenance cost.
Detailed description of the invention
After description by reference to a specific embodiment of the invention given by following drawings, it is better understood with this
Invention, and other objects of the present invention, details, features and advantages will become apparent.In the accompanying drawings:
Fig. 1 is the configuration diagram that temperature calibration is carried out to measurement module according to an embodiment of the present invention；
Fig. 2 is the flow chart of the temperature calibration method of one embodiment according to the present invention.
Specific embodiment
The preferred embodiment of the disclosure is more fully described below with reference to accompanying drawings.Although showing the disclosure in attached drawing
Preferred embodiment, however, it is to be appreciated that may be realized in various forms the disclosure without the embodiment party that should be illustrated here
Formula is limited.On the contrary, these embodiments are provided so that this disclosure will be more thorough and complete, and can be by the disclosure
Range is fully disclosed to those skilled in the art.
Fig. 1 is the configuration diagram that temperature calibration is carried out to measurement module according to an embodiment of the present invention.The temperature calibration
Device includes: measurement module 10, calibration resistance 20 and data processing unit 30.Wherein, calibration resistance 20 is for providing and temperature
Spend relevant resistance value information, i.e. artifical resistance formula temperature sensor representative resistance value at different temperatures；Measurement module 10
For acquiring the resistance value information of the calibration resistance 20 under different temperatures, and communicated with data processing unit 30, so that
Data processing unit 30 can read measurement module data, and handle data, obtain calibrating parameters.
It is understood that measurement module 10 can be led to by wired or wireless mode and data processing unit 30
Letter, communication protocol can also take various protocols, for example ICP/IP protocol.
In order to preferably illustrate how to carry out temperature calibration to measurement module 10, below to the framework of measurement module 10
It is illustrated.
Measurement module 10 includes resistance signal converting unit 101, signal amplification unit 102, filter unit 103, modulus turn
Parallel operation (ADC) 104 and CPU105.Wherein, resistance signal converting unit 101 is coupled to calibration resistance 20, so as to obtain
Corresponding resistance signal.It is understood that the resistance signal can be the electricity that different calibration resistance are presented at different temperatures
Resistance value.Then, the resistance signal based on reading is generated corresponding voltage/current signals by resistance signal converting unit 101, and defeated
Out to signal amplification unit 102 coupled with it.Then, signal amplification unit 102 will amplify received electricity according to setting
Pressure/current signal, and it is transmitted to filter unit 104, high-frequency signal is filtered out, to obtain the signal that ADC104 is capable of handling.
Received analog voltage signal is converted to corresponding digital signal by ADC104, and is sent to CPU105 so that it is to the number
Word signal is handled.Then, CPU105 is communicated by wired or wireless mode with data processing unit 30, by treated
Digital signal is sent to data processing unit 30.Data processing unit 30 is by handling received data, for example
Multistage fitting, to obtain the relationship between resistance and ADC output valve.
Optionally, temperature calibration device further includes thermostatically-controlled equipment 40.Since resistance temperature detector is for surveying
The real-time change of environment temperature is measured, and causes itself resistance value to change according to the variation of its temperature, therefore, it is necessary to use constant temperature control
Device 40 processed provides stable temperature field for calibration of sensor, exists so as to accurately obtain resistance temperature detector
Resistance value under different temperatures.It then, can be according to temperature sensor in different temperatures during demarcating measurement module 10
Under resistance value, will calibration resistance be set as corresponding resistance value.
Optionally, resistance signal converting unit can be can be realized using bridge method, Method of constant flow source etc. and be surveyed to resistance precision
The method of amount exports one-to-one voltage signal so that resistance value can be based on by realizing.Equally, resistance signal converting unit
Other methods can be used with output current signal.
Equally, in order to accurately being demarcated to temperature, need to demarcate resistance be placed in it is same as temperature sensor
Test environment under, then measure.
In addition, measurement module uses precision calibration resistance during the calibration process, i.e., not in order to improve the accuracy of calibration
At a temperature of same calibration, the precision calibration resistance that resistance value is resistance temperature sensor value at a temperature of calibration is chosen.With PT100 platinum electricity
For resistance, the resistance value at 0 DEG C is 100 Ω, then demarcates resistance and choose 100 Ω；Resistance value at 54.17 DEG C is 121 Ω, then marks
Determine resistance and chooses 121 Ω；Resistance value at 96.03 DEG C is 137 Ω, then demarcates resistance and choose 137 Ω；.
It is understood that the precision of above-mentioned thermostatically-controlled equipment need to be higher than the measurement accuracy of temperature sensor.Generally
Ground, ± 0.01 DEG C can meet application requirement.Temperature sensor to be calibrated is placed in thermostatically-controlled equipment, and keep respectively to
Calibration temperature sensor is located at sustained height, i.e., each temperature sensor is located in same level.Then, regulating thermostatic control dress
At a temperature of setting a certain calibration, the resistance of temperature sensor at this time is recorded using measuring instrument (for example multimeter), is included in table 1.
1 resistance temperature sensor of table-temperature phasing meter
| Demarcate temperature | T0 | T1 | …… | Tn |
| Survey resistance | R0 | R1 | …… | Rn |
Therefore, after completing above-mentioned recording process, the resistance of temperature sensor and the corresponding relationship of temperature can be obtained.Example
Such as, after recording n times, available n temperature value is (that is, T0 to Tn) corresponds n resistance value (that is, R0-Rn).
According to the resistance value having had determined and its corresponding temperature value, the relationship of resistance and temperature is fitted.With two
For rank multinomial, by setting three calibration temperature, 3 groups of resistance values is correspondingly measured, that is, can determine multinomial coefficient, also
It is the expression formula for obtaining resistance temperature sensor and temperature:
R=AT2+BT+C (1)
Wherein, R is the resistance value of the temperature sensor under Current Temperatures, and A, B, C are that temperature T each rank is in the multinomial
Therefore number has set three calibration temperature and can determine the functional relation of R and T by above-mentioned, to obtain completely " wait mark
Determine sensor temperature-resistance phasing meter ".
It will be appreciated to those of skill in the art that the relationship of resistance and temperature is not only above-mentioned second order relationship, it can
Corresponding order is selected with adjustment as needed to express the relationship of resistance and temperature.
When measuring module calibration, calibration resistance 20 is connected to the input terminal of measurement module 10, to believe with resistance
Number converting unit 101 is connected, and data processing unit 30 reads the output valve from ADC104 at this time, and is included in table 2.
2 measurement module temperature calibration of table corresponds to table
| Demarcate temperature | T0 | T1 | …… | Tn |
| Precision calibration resistance | Rj0 | Rj1 | …… | Rjn |
| ADC output valve | Cr0 | Cr1 | …… | Crn |
Each calibration temperature can be specified by table 2 and/or calibration resistance corresponds to unique measured value.Therefore, data
Processing unit 30 can determine the output valve by multistage fitting according to the output valve and calibration resistance of the ADC104 read
With the corresponding relationship between calibration resistance.
Similar, still by taking two rank multinomials as an example, by determining corresponding calibration resistance at a temperature of three calibration
Resistance value, and corresponding 3 groups of ADC output valves at this time, that is, can determine multinomial coefficient, obtain resistance RjWith ADC output valve Cr's
Relationship, as shown in formula (2):
Wherein, RjFor resistance value of the calibration resistance under Current Temperatures, D, E, F are that the output valve Cr of ADC in the multinomial exists
The coefficient of each rank.
When temperature sensor, which is connected to measurement module, carries out temperature measurement, data processing unit 30 collects AD output valve
Afterwards, according to measurement module demarcate in AD output valve and precision calibration resistance Relation Parameters, can determine corresponding resistance value.When
After resistance value determines, according to the Relation Parameters or " sensor temperature-resistance to be calibrated point of the sensor resistance and calibration temperature
Spend table ", determine corresponding temperature value.
Fig. 2 is the flow chart of the method for temperature calibration according to an embodiment of the present invention.
Step S21 is executed, the sensor resistance to be calibrated at multiple temperature is obtained.
In this step, it in order to accurately demarcate temperature sensor, needs to be placed in temperature sensor surely
It is measured at a temperature of fixed calibration.Optionally, stable due to using thermostatically-controlled equipment to provide for calibration of sensor
Temperature field, so as to accurately obtain the resistance value of temperature sensor at different temperatures.It is understood that temperature and electricity
It is one-to-one relationship between resistance value.
Then, step S23 is executed, determines sensor temperature-sensitivity to be calibrated.
In this step, by based on the multiple temperature and corresponding resistance value obtained in step S21, sensing is determined
The corresponding relationship of device temperature-resistance.Optionally, it can according to need, select the temperature and resistance of suitable number, and then determine
Sensor temperature-resistance functional relation.
It executes, step S22, measurement module determines the resistance value of calibration resistance and the relationship of ADC output valve.
It is similar with step S21, it is exported according to the resistance value of calibration resistance different at multiple temperature and corresponding ADC
Value, determines functional relation between the two.
Then, step S24 is executed, Current Temperatures are determined based on ADC output valve.
It in this step, can be according to the pass between the resistance value for demarcating resistance determining in step S22, the output valve of ADC
System, determine the corresponding resistance value of the output valve of current ADC, further according in S23 determine sensor temperature-sensitivity to be calibrated,
And then it can determine current temperature.
It is understood that there is no strict sequences by step S21 and S22, step S22 can also be first carried out.
Based on this technical solution of the present invention, temperature sensor and measurement module are demarcated respectively, therefore broken down
When can directly replace faulty component, then using data processing unit modify calibrating parameters, substantially reduce maintenance time,
Reduce maintenance cost.
Those of ordinary skill in the art should also understand that, the various illustrative logics described in conjunction with embodiments herein
The combination of electronic hardware, computer software or both may be implemented into block, module, circuit and algorithm steps.In order to understand earth's surface
Show this interchangeability between hardware and software, various illustrative components, block, module, circuit and step are enclosed above
General description has been carried out around its function.Hardware is implemented as this function and is also implemented as software, is depended on specific
Using and apply design constraint over the whole system.Those skilled in the art can be directed to every kind of specific application, to become
Logical mode realizes described function, and still, this realization decision should not be interpreted as causing a departure from the scope of this disclosure.
Claims (5)
1. a kind of device for temperature calibration, comprising:
Resistance is demarcated, for analog temperature sensor representative resistance value at different temperatures；
Measurement module is coupled to the calibration resistance, for acquiring the resistance value information of the calibration resistance, and exports corresponding survey
Magnitude；And
Data processing unit is coupled to the measurement module, for based on several measured values and with several surveys
The resistance value of the corresponding calibration resistance of magnitude, determines the corresponding pass between the resistance value and the measured value of the calibration resistance
System,
Wherein the resistance value of the calibration resistance changes according to the difference of temperature,
Wherein described device further include: thermostatically-controlled equipment, for providing stable temperature field for temperature sensor, wherein institute
The precision for stating thermostatically-controlled equipment is greater than the measurement accuracy of the temperature sensor, and
Wherein multiple resistance values of the data processing unit based on the temperature sensor and corresponding with multiple resistance value
Preset temperature, determine the resistance value of the temperature sensor and the corresponding relationship of temperature,
Wherein according to the relationship of the measured value of the measurement module and the calibration resistance, determination is corresponding with the measured value
Resistance value, the corresponding relationship of resistance value and temperature further according to the temperature sensor, determines current temperature.
2. device as described in claim 1, which is characterized in that the measurement module further include:
Resistance signal converting unit, for exporting signal corresponding with its collected resistance value information, wherein the resistance
The signal of signal conversion unit output is voltage or current signal；
Analog-digital converter, the signal for being exported according to the resistance signal converting unit generate corresponding measured value.
3. device as claimed in claim 2, which is characterized in that the measurement module further include:
Signal amplification unit is coupled to the resistance signal converting unit, for amplifying the defeated of the resistance signal converting unit
Signal out；
Filter unit, after the output signal of the signal amplification unit received by it is filtered, output to the mould
Number converter.
4. device as claimed in claim 3, which is characterized in that described device further include:
Central processing unit, for the output signal from the analog-digital converter to be sent to the data processing unit.
5. a kind of method for temperature calibration, which comprises the following steps:
A. the resistance value for obtaining temperature sensor to be calibrated at multiple temperature, multiple resistance values based on the temperature sensor
And preset temperature corresponding with multiple resistance value, it determines that the resistance value of the temperature sensor is corresponding with temperature and closes
System, wherein the resistance value of the temperature sensor changes according to the difference of temperature；
B. using calibration resistance simulation temperature sensor representative resistance value at different temperatures, and described in use be coupled to
The measurement module of calibration resistance acquires the resistance value information of the calibration resistance, and exports corresponding measured value, is based on the measurement
Multiple measured values of module and preset resistance corresponding with multiple measured value, determine the measured value of the measurement module with
The corresponding relationship of resistance is demarcated,
Wherein in the step A further include: scheduled temperature field is provided for the temperature sensor by thermostatically-controlled equipment, from
And the temperature sensor is made to be in scheduled temperature field, wherein the precision of the thermostatically-controlled equipment is greater than the temperature
The measurement accuracy of sensor,
Wherein according to the relationship of the measured value of the measurement module and the calibration resistance, determination is corresponding with the measured value
Resistance value, the corresponding relationship of resistance value and temperature further according to the temperature sensor, determines current temperature.
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| CN105352623B (en) * | 2015-12-14 | 2018-06-29 | 重庆川仪自动化股份有限公司 | Method for improving precision of thermal resistance temperature transmitter |
| CN106197751B (en) * | 2016-08-30 | 2019-01-11 | 中节能工程技术研究院有限公司 | A kind of thermometry and device in temperature field |
| CN110501948B (en) * | 2019-08-23 | 2022-05-17 | 大陆汽车车身电子系统（芜湖）有限公司 | Method for collecting data of resistance type sensor for electronic device |
| CN110634279B (en) * | 2019-09-09 | 2020-10-09 | 浙江永贵电器股份有限公司 | Non-contact self-learning severe environment temperature collector based on AVR single chip microcomputer |
| CN110763372A (en) * | 2019-11-29 | 2020-02-07 | 孝感华工高理电子有限公司 | Method for measuring resistance-temperature relation of NTC temperature sensor |
| CN113049183A (en) * | 2021-03-26 | 2021-06-29 | 河北省科学院应用数学研究所 | Pressure sensor calibration device and calibration method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5857777A (en) * | 1996-09-25 | 1999-01-12 | Claud S. Gordon Company | Smart temperature sensing device |
| CN201607292U (en) * | 2010-02-22 | 2010-10-13 | 西华大学 | Automatic calibration system for temperature instrument |
| CN203216630U (en) * | 2013-05-03 | 2013-09-25 | 大连测控技术研究所 | Automatic temperature detection system |
| CN103323147A (en) * | 2013-04-11 | 2013-09-25 | 青岛方石工业科技发展有限公司 | Method for calibrating PT1000 temperature sensor |
| CN103604525A (en) * | 2013-12-09 | 2014-02-26 | 张金木 | Thermal resistor temperature measuring instrument based on verification data |
| CN103674327A (en) * | 2013-12-09 | 2014-03-26 | 张金木 | Automatic thermal resistance temperature calibration instrument |
-
2014
- 2014-05-04 CN CN201410183275.3A patent/CN105092095B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5857777A (en) * | 1996-09-25 | 1999-01-12 | Claud S. Gordon Company | Smart temperature sensing device |
| CN201607292U (en) * | 2010-02-22 | 2010-10-13 | 西华大学 | Automatic calibration system for temperature instrument |
| CN103323147A (en) * | 2013-04-11 | 2013-09-25 | 青岛方石工业科技发展有限公司 | Method for calibrating PT1000 temperature sensor |
| CN203216630U (en) * | 2013-05-03 | 2013-09-25 | 大连测控技术研究所 | Automatic temperature detection system |
| CN103604525A (en) * | 2013-12-09 | 2014-02-26 | 张金木 | Thermal resistor temperature measuring instrument based on verification data |
| CN103674327A (en) * | 2013-12-09 | 2014-03-26 | 张金木 | Automatic thermal resistance temperature calibration instrument |
Non-Patent Citations (1)
| Title |
|---|
| NTC热敏电阻的标定及阻温特性研究;关奉伟等;《光机电信息》;20110725(第07期);69-73 |
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