CN113030141A - Sample position holding device for vacuum cavity - Google Patents
Sample position holding device for vacuum cavity Download PDFInfo
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- CN113030141A CN113030141A CN202110219288.1A CN202110219288A CN113030141A CN 113030141 A CN113030141 A CN 113030141A CN 202110219288 A CN202110219288 A CN 202110219288A CN 113030141 A CN113030141 A CN 113030141A
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- sample
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- vacuum chamber
- camera
- displacement stage
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
- G01N23/2273—Measuring photoelectron spectrum, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/085—Investigating materials by wave or particle radiation secondary emission photo-electron spectrum [ESCA, XPS]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/309—Accessories, mechanical or electrical features support of sample holder
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- Spectroscopy & Molecular Physics (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The application provides a sample position holding device for vacuum cavity, including vacuum cavity, connecting rod, sample platform, displacement platform and two at least cameras, the sample platform is located the one end of connecting rod, and the other end of connecting rod passes through flange joint with the displacement platform, and the vacuum cavity is configured to have at least partly visual flange window, and the camera is located the vacuum cavity outside, and the camera is configured to shoot the position of sample platform. This application combines binocular vision system and compound horizontal displacement platform, revises the position of sample platform in real time for keep the sample in the rotation center position all the time at the testing process, can use in the light source that has different size faculas, realize among the photoelectron spectroscopy experiment to the high accuracy location of sample position and can carry out temperature continuous variation's measurement.
Description
Technical Field
The application relates to the field of experimental equipment, in particular to a sample position holding device for a vacuum cavity.
Background
In conventional ultrahigh vacuum experimental equipment, such as an angle-resolved photoelectron spectrometer, high requirements are kept on the position of a sample to be measured. However, in practice, along with the temperature change of the sample stage, the sample stage in the vacuum chamber may be deformed due to the expansion and contraction effect, and then the sample carried on the sample stage and the light source may move relatively. Generally, when the temperature is changed from 4K (low temperature) to 300K (room temperature), the relative movement occurs in millimeters, which is much larger than the size of the light source spot and the sample. And this relative displacement causes the sample to be offset from the light source, making it difficult to characterize the relationship of continuous temperature changes. Since the measurement of the electron energy spectrum with respect to the angular change of the sample requires that the light source always be incident on the same position on the sample, i.e. the rotation center position, and the sample cannot be held at the rotation center position due to the temperature change, the measurement of the angular change and the temperature change of the electron energy spectrum is difficult to be performed by the whole system.
In the prior art, the method for improving the processing precision and the installation precision is mainly adopted, and the sample is positioned at the rotation center position as much as possible. When the sample stage with meter-level length generates millimeter-level relative displacement due to temperature change, the expansion with heat and contraction with cold effect of the sample stage can be reduced only by a series of complex designs in the prior art. However, the requirement of the angle-resolved photoelectron spectrometer on the position control accuracy of the sample sometimes reaches the micron level, and the design in the prior art is not only complex and high in cost, but also cannot maintain the position at the micron level when the temperature variation range is large.
Accordingly, those skilled in the art have made efforts to develop a sample position holding device for a vacuum chamber, which is capable of precisely positioning and position holding a sample in the vacuum chamber. And correcting the position of the sample in real time under different temperature conditions to ensure that the sample is always at the rotation center position, so that the light source is always focused on the same area on the sample.
Disclosure of Invention
The application provides a sample position holding device for vacuum cavity, including vacuum cavity, connecting rod, sample platform, displacement platform and camera, its characterized in that, the sample platform is located the one end of connecting rod, the displacement platform with the connecting rod other end passes through flange joint, the vacuum cavity is configured to have at least partly visual flange window, the camera is located the vacuum cavity is outside, the camera is configured to shoot the position of sample platform.
Further, the connecting rod includes a first end and a second end, the first end being located inside the vacuum chamber and the second end being located outside the vacuum chamber.
Further, the sample stage is connected with the first end, and the vertical displacement stage is connected with the second end.
Further, the displacement stage comprises a first horizontal displacement stage and a second horizontal displacement stage, and the first horizontal displacement stage and the second horizontal displacement stage are configured to control the horizontal direction movement of the sample stage.
Further, the first horizontal displacement stage is configured to be automatically controlled by a stepping motor through a computer, and the second horizontal displacement stage is configured to be controlled by a stepping motor or manually.
Further, the displacement stage further comprises a vertical displacement stage connected to the second end, the vertical displacement stage configured to control vertical directional movement of the sample stage.
Further, the displacement table further comprises a polar angle rotating device, the polar angle rotating device is connected with the horizontal displacement table, and the polar angle rotating device is arranged between the first horizontal displacement table and the second horizontal displacement table.
Further, the connecting rod is hollow tubular, the connecting rod being configured to be capable of transporting liquid helium.
Further, the camera includes a first camera and a second camera configured to capture the position of the sample stage from different angles.
Further, the vacuum chamber further comprises a supplementary light source and an automatic control switch, wherein the supplementary light source is positioned outside the vacuum chamber, the supplementary light source is configured to illuminate the sample table, and the automatic control switch is configured to automatically control the on and off of the supplementary light source.
Compared with the prior art, the method has the following technical effects:
1. the binocular vision system consisting of the two cameras is arranged to realize real-time monitoring of the position change of the sample, the displacement monitoring sensitivity of the binocular vision system can reach the micron level, and the requirement of an angle-resolved photoelectron spectrometer on the position control precision of the sample can be met.
2. And controlling the movement of the sample stage in the horizontal direction by the composite XY displacement stage. The XY direction movement is carried out by controlling a stepping motor through a computer, and the precision can reach the micron level.
3. The binocular vision system is combined with the composite horizontal displacement table, and the position of the sample table is corrected in real time, so that the sample is always kept at the position of a rotation center in the test process, the method can be applied to light sources with light spots of different sizes, and the measurement of temperature continuous change in a photoelectron spectroscopy experiment is realized.
The conception, specific structure and technical effects of the present application will be further described in conjunction with the accompanying drawings to fully understand the purpose, characteristics and effects of the present application.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present application.
Detailed Description
The embodiments of the present application will be described below with reference to the accompanying drawings for clarity and understanding of technical contents. The present application may be embodied in many different forms of embodiments and the scope of the present application is not limited to only the embodiments set forth herein.
In the drawings, structurally identical elements are represented by like reference numerals, and structurally or functionally similar elements are represented by like reference numerals throughout the several views. The size and thickness of each component shown in the drawings are arbitrarily illustrated, and the size and thickness of each component are not limited in the present application. The thickness of the components may be exaggerated where appropriate in the figures to improve clarity.
As shown in fig. 1, the present embodiment includes a connecting rod 1, a vacuum chamber 2, and a sample stage 3. Wherein the vacuum chamber 2 has at least a partially visible flange window. The connecting rod 1 is connected with each displacement table through a flange. One end of the connecting rod 1 located inside the vacuum chamber 2 is referred to as a first end, and one end of the connecting rod 1 located outside the vacuum chamber 2 is referred to as a second end. The sample stage 3 is arranged on the first end, whereby the sample stage 3 is arranged inside the vacuum chamber 2. The second end of the connecting rod 1 is connected to a displacement table, specifically the displacement table in this embodiment comprises a first horizontal displacement table 41, a second horizontal displacement table 42, a vertical displacement table 43 and a polar angle rotating device 44. Wherein the vertical displacement table 43 is arranged at the end of the second end of the connecting rod 1. When the vertical displacement table 43 is controlled to move along the vertical direction manually or automatically by adopting a stepping motor, the connecting rod 1 is driven to move along the vertical direction, and meanwhile, the sample table 3 is driven by the connecting rod 1 to move along the vertical direction. A first horizontal displacement table 41 and a second horizontal displacement table 42 are also provided below the vertical displacement table 43. The first horizontal displacement stage 41 is configured as an automatic horizontal displacement stage driven by a computer-controlled stepper motor, and the second horizontal displacement stage 42 is configured as a manually driven horizontal displacement stage, or again driven by a stepper motor. In use, the second horizontal displacement stage 42 is typically used to find the position of the centre of rotation at the time of measurement, and then the first horizontal displacement stage 41 is used to find the position at which the sample coincides with the laser at the time of measurement. In order to maintain the sample at a position where the rotation center coincides with the laser during the rotation of the sample, the first horizontal displacement stage 41 and the second horizontal displacement stage 42 are required to work together to maintain the position of the sample, and the accuracy of the rotation center can reach ten micrometers. A single stage cannot simultaneously ensure that the sample is centered in rotation and coincides with the laser, whereas two sets of compound stages can adjust the relative positions of the sample and the laser by means of the first horizontal stage 41 and the second horizontal stage 42 can ensure that the sample is centered in rotation. In the present embodiment, a polar angle rotating device 44 is further provided between the first horizontal displacement table 41 and the second horizontal displacement table 42. The polar angle rotating device 44 is respectively connected with the first horizontal displacement table 41 and the second horizontal displacement table 42, and the polar angle rotation of the sample table 3 in the measuring process is realized by integrally rotating the second horizontal displacement table 42 and the vertical displacement table 43. The two horizontal displacement stages 41, 42, the vertical displacement stage 43, and the polar angle rotation device 44 in this embodiment can control the movement and rotation of the sample stage 3 in any direction in the vacuum chamber 2 with accuracy on the order of micrometers. Meanwhile, the connecting rod 1 is configured in a hollow pipe shape, and liquid helium or other cooling gas for maintaining the temperature inside the vacuum chamber 2 can be introduced from the outside into the inside of the vacuum chamber 2 through the connecting rod 1.
The first camera 51 and the second camera 52 are disposed outside the vacuum chamber 2. The two cameras may be fixed to the outer wall of the vacuum chamber 2, or may be fixed in other ways. But it is necessary to ensure that two cameras can take a picture of the sample on the sample stage 3 from the visible flange window portion of the vacuum chamber 2. In particular, the first camera 51 and the second camera 52 take images of the sample stage 3 from two different angles, and thus the two cameras constitute a binocular vision system capable of tracking the position change of the sample. The tracking precision of the binocular vision system is in a micron level, and the position change of a sample caused by expansion with heat and contraction with cold of the sample table 3 is sufficiently resolved. The actual position coordinates of the sample in the vacuum chamber 2 are P (x, y, z), and are projected onto the image planes of the first camera 51 and the second camera 52, respectively, to obtain P1(u, v) and P2(u, v), wherein u, v are an abscissa and an ordinate on the image plane. When the actual position of the sample changes Δ x, Δ y, and Δ z, the coordinates on the image plane also change Δ u1,△v1，△u2,△v2. They satisfy the relationship:
wherein, the coefficients of A, B, C and the like can be obtained by calibration. Therefore, when the position of the sample captured by the first camera 51 and the second camera 52 changes on the image plane, the actual position change of the sample in the vacuum chamber 2 can be obtained by reverse estimation. The first camera 51, the second camera 52, and the stepping motor controlling the horizontal displacement tables 41, 42, the vertical displacement table 43, and the polar angle rotating device 44 are connected to a computer and can transmit data. The computer calculates the displacement required to be corrected according to the position change of the sample acquired by the binocular vision system consisting of the first camera 51 and the second camera 52, and the stepping motor controls the displacement table to complete the position correction so as to realize the function of keeping the sample at the rotation center position in the rotation process. The present embodiment can achieve a position holding accuracy of the order of 10 micrometers as a whole.
In this embodiment, a compensating light source 6 and an automatic control switch are further provided outside the vacuum chamber 2. The compensation light source 6 can illuminate the sample table 3 to enable the binocular vision system to shoot clearer images, the automatic control switch can automatically control the on and off of the compensation light source, and the compensation light source cannot influence the temperature in the vacuum cavity 2.
The foregoing detailed description of the preferred embodiments of the present application. It should be understood that numerous modifications and variations can be devised by those skilled in the art in light of the present teachings without departing from the inventive concepts. Therefore, the technical solutions available to those skilled in the art through logic analysis, reasoning and limited experiments based on the concepts of the present application should be within the scope of protection defined by the claims.
Claims (10)
1. A sample position holding apparatus for a vacuum chamber, comprising a vacuum chamber, a connecting rod, a sample stage, a displacement stage and a camera, wherein the sample stage is located at one end of the connecting rod, the displacement stage is connected to the other end of the connecting rod by a flange, the vacuum chamber is configured to have at least a partially visible flange window, the camera is located outside the vacuum chamber, and the camera is configured to photograph the position of the sample stage.
2. The sample position holding apparatus for a vacuum chamber according to claim 1, wherein the connecting rod includes a first end and a second end, the first end being located inside the vacuum chamber, the second end being located outside the vacuum chamber.
3. The sample position holding apparatus for a vacuum chamber according to claim 2, wherein said sample stage is connected to said first end and said displacement stage is connected to said second end.
4. The sample position holding apparatus for a vacuum chamber according to claim 3, wherein the displacement stage includes a first horizontal displacement stage and a second horizontal displacement stage, the first horizontal displacement stage and the second horizontal displacement stage being configured to control horizontal-direction movement of the sample stage.
5. The sample position holding apparatus for a vacuum chamber according to claim 4, wherein the first horizontal displacement stage is configured to be automatically controlled by a stepping motor through a computer, and the second horizontal displacement stage is configured to be controlled by a stepping motor or manually.
6. The sample position holding apparatus for a vacuum chamber according to claim 5, wherein the displacement stage further comprises a vertical displacement stage connected to the second end, the vertical displacement stage being configured to control vertical directional movement of the sample stage.
7. The sample position holding apparatus for a vacuum chamber according to claim 6, wherein the displacement stage further comprises a polar angle rotating means connected to the horizontal displacement stage, the polar angle rotating means being provided between the first horizontal displacement stage and the second horizontal displacement stage.
8. The sample position holding apparatus for a vacuum chamber according to claim 7, wherein the connection rod is a hollow pipe shape, and the connection rod is configured to be capable of transferring liquid helium.
9. The sample position holding apparatus for a vacuum chamber according to claim 8, wherein the camera includes a first camera and a second camera, the first camera and the second camera being configured to photograph the position of the sample stage from different angles.
10. The sample position holding apparatus for a vacuum chamber according to claim 9, further comprising a supplementary light source located outside the vacuum chamber, the supplementary light source being configured to be capable of illuminating the sample stage, and an automatic control switch configured to automatically control on and off of the supplementary light source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110219288.1A CN113030141A (en) | 2021-02-26 | 2021-02-26 | Sample position holding device for vacuum cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110219288.1A CN113030141A (en) | 2021-02-26 | 2021-02-26 | Sample position holding device for vacuum cavity |
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| Publication Number | Publication Date |
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| CN113030141A true CN113030141A (en) | 2021-06-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110219288.1A Pending CN113030141A (en) | 2021-02-26 | 2021-02-26 | Sample position holding device for vacuum cavity |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105466739A (en) * | 2014-09-10 | 2016-04-06 | 冠研（上海）企业管理咨询有限公司 | Photo electron spectroscopy equipment having sample adjustment controller |
| US20160327499A1 (en) * | 2015-05-08 | 2016-11-10 | Keisuke Kobayashi | Hard X-Ray Photoelectron Spectroscopy Apparatus |
| CN106645550A (en) * | 2016-10-11 | 2017-05-10 | 中国科学院化学研究所 | Photocatalytic in-situ characterization system |
-
2021
- 2021-02-26 CN CN202110219288.1A patent/CN113030141A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105466739A (en) * | 2014-09-10 | 2016-04-06 | 冠研（上海）企业管理咨询有限公司 | Photo electron spectroscopy equipment having sample adjustment controller |
| US20160327499A1 (en) * | 2015-05-08 | 2016-11-10 | Keisuke Kobayashi | Hard X-Ray Photoelectron Spectroscopy Apparatus |
| CN106645550A (en) * | 2016-10-11 | 2017-05-10 | 中国科学院化学研究所 | Photocatalytic in-situ characterization system |
Non-Patent Citations (3)
| Title |
|---|
| GUODONG LIU等: "Development of a vacuum ultraviolet laser-based angle-resolved photoemission", 《REVIEW OF SCIENTIFIC INSTRUMENTS》 * |
| YUANYUAN YANG等: "A time- and angle-resolved photoemission spectroscopy with probe photon energy up to 6.7 eV", 《REVIEW OF SCIENTIFIC INSTRUMENTS》 * |
| 丁莹等: "《复杂环境运动目标检测技术及应用》", 31 January 2014, 国防工业出版社 * |
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Application publication date: 20210625 |
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