CN113030109A - Microprobe system for detecting object surface - Google Patents
Microprobe system for detecting object surface Download PDFInfo
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- CN113030109A CN113030109A CN202110305225.8A CN202110305225A CN113030109A CN 113030109 A CN113030109 A CN 113030109A CN 202110305225 A CN202110305225 A CN 202110305225A CN 113030109 A CN113030109 A CN 113030109A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G01N21/88—Investigating the presence of flaws or contamination
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Abstract
The invention discloses a microprobe system for detecting the surface of an object, which comprises a double-frequency laser module, a microprobe integration module, a sample scanning platform and a data processing module, wherein the double-frequency laser module, the microprobe integration module and the sample scanning platform are sequentially and linearly arranged, the data processing module is connected with the sample scanning platform and the double-frequency laser module, the double-frequency laser module outputs double-frequency laser with orthogonal polarization, one part of the double-frequency laser, namely reference light, directly enters the data processing module, the other part of the double-frequency laser, namely detection light, enters the microprobe integration module, the laser returns to the double-frequency laser module after being reflected on the surface of a microprobe or a sample, the reference light and the detection light enter the data processing module after being combined, and. The microprobe system is simple in structure, can realize integrated detection of cracks and scratches in a micro-nano scale, and can reduce workload required by measurement and improve measurement efficiency.
Description
Technical Field
The invention relates to a surface detection technology, in particular to a microprobe system for detecting the surface of an object.
Background
Precision measurement techniques are commonly used in the fields of mechanical manufacturing, structural and performance testing of devices and materials, spatial ranging, and the like, wherein one of the important methods is to implement precision measurement by using an optical interference method: the method comprises the following steps of adjusting detection light to irradiate on a microprobe, detecting by utilizing the interference phenomenon of the detection light and reference light, and generally adopting the microprobe to perform scanning detection on cracks and scratches by a precision detection system: the microprobe is positioned on the surface of a sample in the detection work, due to the action of atomic force generated between the microprobe and the sample, the microprobe microcantilever where the microprobe is positioned is deflected, the detecting light is adjusted to irradiate the microprobe microcantilever, and the deflection quantity of the microprobe microcantilever is demodulated to obtain images of cracks and scratches.
In the control of the microprobe, the detection system is required to have a vibration source for forced vibration of the microprobe, and the distance and displacement between the microprobe and a sample can be accurately controlled, so that the acting force of the detection system on the microprobe is in a proper range. The electronic components of the detection device used at present are separated and connected complicatedly, and extremely high control precision requirements exist.
Disclosure of Invention
The present invention is directed to overcoming the disadvantages of the prior art and providing a microprobe system for detecting a surface of an object. The microprobe system is simple in structure, can realize integrated detection of cracks and scratches in a micro-nano scale, and can reduce workload required by measurement and improve measurement efficiency.
The technical scheme for realizing the purpose of the invention is as follows:
the utility model provides a little probe system for object surface detection, including the dual-frenquency laser module that the order is the straight line and places, little probe integration module and sample scanning platform and the data processing module who is connected with sample scanning platform and dual-frenquency laser module, dual-frenquency laser module output cross polarization's dual-frenquency laser, a part light is reference light and directly gets into data processing module, another part light is detection light and gets into little probe integration module, laser gets back to dual-frenquency laser module after little probe or sample surface reflection, reference light gets into data processing module with detecting the light combination light, data processing module processing data, obtain the surface morphology of the sample of being surveyed.
The dual-frequency laser module comprises a PT-1105C dual-frequency laser head, a convex lens, a 25 mu m pinhole, a concave lens, a polarization beam splitter PBS, a first 1/4 wave plate, a second 1/4 wave plate and a reflector which are sequentially connected from inside to outside in the vertical direction of the polarization beam splitter PBS, wherein the laser head outputs parallel laser with the wavelength of 632.8nm, the convex lens focuses the parallel laser on a focal point on the subsequent transmission straight line of the laser, the 25 mu m pinhole is arranged at the focal point, the 25 mu m pinhole filters stray space frequency light rays, the concave lens converts the focused light of the convex lens into the parallel light again, the polarization beam splitter PBS divides the dual-frequency laser with orthogonal polarization into transmission and reflection directions, the transmission direction passes through a first 1/4 wave plate to irradiate the microprobe integrated module, and the reflection direction passes through a second 1/4 plate to be reflected by the reflector to irradiate the data processing module, the double-frequency laser module is used for building a light path at the front end of the microprobe integrated module.
The micro probe integrated module includes:
a microprobe vibration unit provided with: the micro probe is clamped by the piezoelectric vibrating block and the elastic sheet, the elastic sheet fixing piece penetrates through a fixing hole formed in the elastic sheet to fix the piezoelectric vibrating block at a groove formed in the edge end of the object carrying sheet, the groove depth of the groove is smaller than one fifth of the height of the piezoelectric vibrating block, the outline side length of the groove is equal to the side length of the piezoelectric vibrating block, a micro probe vibrating unit is externally connected with a driving device, the driving device comprises an AD9833 chip DDS signal generator based on STM32 and an LM324 signal linear amplifier, the piezoelectric vibrating block vibrates with specified waveform, resonance frequency and amplitude according to sine wave (or square wave and triangular wave) driving signals generated by the DDS signal generator, the DDS signal generator generates 1-1000kHz frequency required by the module, the output waveform volt value is 0-2V, the LM324 signal linear amplifier amplifies the voltage volt value of the waveform signal, the adjusting range is 0-20V, the vibration amplitude of the microprobe is further amplified on the basis of 0-2V, and the waveform, the frequency and the amplitude of the microprobe vibration are controlled;
a one-dimensional precession unit provided with: the flexible hinge comprises a flexible hinge base, a flexible hinge base and a flexible slide block, wherein the flexible hinge base is a metal plate, one side of the metal plate is provided with a hollowed-out compliant mechanism, the side edge of the compliant mechanism is in a semicircular bulge and is connected with one end of a piezoelectric displacement block, the other end of the piezoelectric displacement block is provided with a piezoelectric displacement block fixing piece, the piezoelectric displacement block is arranged between the compliant mechanism and the piezoelectric displacement block fixing piece, a loading piece is fixed on the flexible hinge base of a one-dimensional precession unit, and the flexible hinge base is provided with a group of first fixing holes, first adjusting holes;
a biaxial inclination table unit provided with: the double-shaft tilting table base is provided with a group of first springs, the first springs penetrate through first fixing holes and are fixedly connected with the flexible hinge base through spring bolts, the double-shaft tilting table base is also provided with a group of first blind holes and second blind holes which respectively correspond to first adjusting holes and second adjusting holes arranged on the flexible hinge base, a first adjusting screw and a second adjusting screw respectively penetrate through the first adjusting holes and the second adjusting holes on the flexible hinge base and extend into the first blind holes and the second blind holes, the double-shaft tilting table base is provided with a shaft bead which is clamped between the double-shaft tilting table base and the flexible hinge base, the center point of the shaft bead is positioned at a 90-degree included angle formed by the center point of the shaft bead and the connecting line of the axis of the first adjusting screw and the axis of the second adjusting screw on the same plane, and the structure of the shaft bead, the spring and the adjusting screw realizes the adjustment of the pitching angle of the unit of the continuously adjustable double-shaft tilting table;
a rotating table unit provided with: the rotary table unit is also provided with a second rotary sheet and a T-shaped second extension arm connected with one end of the first rotary sheet, the second rotary sheet and the second extension arm are consistent with the first rotary sheet and the first extension arm in shape, the structures of the second rotary sheet and the second extension arm are respectively consistent with the first rotary sheet and the first extension arm in shape, the second rotary sheet and the first extension arm are respectively provided with a third blind hole, a fourth fixing hole, a fifth fixing hole and a fourth adjusting hole, the first rotary sheet and the T-shaped first extension arm connected with one end of the first rotary sheet and the second extension arm connected with one end of the first rotary sheet in shape are respectively provided with a second T-shaped extension arm connected with one end of the first rotary sheet and a T-shaped second extension arm connected with one end of the first rotary sheet The extension arms are oppositely arranged, the rotating shaft penetrates through the through hole and extends into the third blind hole, two ends of the second spring respectively extend into the third fixing hole and the fourth fixing hole, two ends of the third spring respectively extend into the second fixing hole and the fifth fixing hole, the third adjusting screw rod penetrates through the fourth adjusting hole on the second extension arm and extends into the third adjusting hole on the first extension arm, the rotating table unit is connected with the three-dimensional displacement table, the three-dimensional displacement table consists of a vertical one-dimensional displacement table TSMV13-1A and a two-dimensional displacement table, the two-dimensional displacement table consists of a one-dimensional displacement table TSM25-1A which is overlapped on another one-dimensional displacement table TSM25-1A after rotating for 90 degrees in the horizontal direction, and the three-dimensional displacement table is slightly displaced in the XYZ direction in a spatial area to ensure that the microprobe in the microprobe integrated module to reach a parallel light path plane and to be adjusted in the parallel light path direction, such that the detection light is focused on the microprobes.
The sample scanning platform is used for loading a sample, and a piezoelectric driver on the sample scanning platform is adopted to enable the sample to carry out scanning detection in a three-dimensional direction and initial position adjustment;
the data processing module comprises a photoelectric detector PD and a digital phase meter PT-1313B, is connected with the computer and is used for processing optical signals received by the PD, and the optical signals are converted into electric signals to be processed.
The working principle of the system is as follows: the double-frequency laser module completes the light path construction at the front end of the microprobe integrated module, outputs reference light to the data processing module, outputs detection light to the microprobe integrated module, the two beams of light are mutually orthogonally polarized, wherein the detection light enters the microprobe integrated module and irradiates on the microprobe, the reflection light spot of the detection light is superposed with the base point position where the reference light spot is located through the adjustment of the double-shaft tilting table unit, the rotating table unit and the three-dimensional displacement table, in the process, the vertical component s of the reference light is reflected by the polarization beam splitter PBS9 and then passes through the second 1/4 wave plate, the polarization direction is rotated by 45 degrees, the reference light reflected by the reflector passes through the second 1/4 wave plate again, the polarization direction is rotated by 45 degrees, the final polarization direction is perpendicular to the original direction, the reference light is transmitted through the polarization beam splitter PBS and enters the data processing module, wherein the microprobe in the, therefore, in the same way as the reference light, the detection light parallel quantity p is reflected by the polarization beam splitter prism PBS, then the direction of the detection light parallel quantity p is opposite to the original direction after passing through the first 1/4 wave plate, the microprobe and the first 1/4 wave plate, the polarization angle is changed by 90 degrees, the detection light parallel quantity p is reflected by the polarization beam splitter prism PBS9 to enter the data processing module, finally the reference light and the detection light are combined to generate interference, and the beat frequency difference frequency generated by the interference is detected and deflected by the data processing module.
The sample is placed on the scanning platform, and can make vertical and horizontal movement, so that the sample can be scanned point by point in line, and the acquired data can be demodulated and imaged.
When the system works, the microprobe firstly adjusts X, Y, Z, theta X and theta Z five-axis adjustment of the microprobe under the control of a double-axis tilting table unit, a rotating table unit and a three-dimensional displacement table, the detection light is collimated, then the microprobe-sample approach is realized under the control of a one-dimensional precession unit, finally the microprobe is driven by a driving device to perform excitation of given waveform, frequency and volt value, meanwhile, a sample scanning table drives the sample to perform point-by-point in-line scanning detection, the displacement change of the microprobe can be caused by the action of atomic force generated by the microprobe-sample at a minimum distance, the optical path difference change is detected by a data processing module, and the detection work of micro-nano different scales can be realized after the detection information is demodulated.
The technical scheme is an integrated microprobe system with wide frequency band, stable frequency and good waveform, realizes the control of detecting light reflection spots and the one-dimensional control of microprobe-sample approaching by performing five-dimensional adjustment on the position of the microprobe and controlling the one-dimensional coarse motion and the fine motion when the microprobe is close to a sample, saves time during working and improves efficiency.
The microprobe system is simple in structure, can realize integrated detection of cracks and scratches in a micro-nano scale, and can reduce workload required by measurement and improve measurement efficiency.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment;
FIG. 2 is a schematic structural diagram of a dual-frequency laser module in an embodiment;
FIG. 3 is an exploded view of the vibrating unit of the microprobe in the embodiment;
FIG. 4 is a schematic structural diagram of a one-dimensional precession unit according to an embodiment;
FIG. 5 is an exploded view of the structure of a two-axis tilting table unit in the embodiment;
FIG. 6 is an exploded view of the rotary table unit in the embodiment;
fig. 7 is a schematic diagram showing the positional arrangement of the respective components in the embodiment.
In the figure, 1, a double-frequency laser module 2, a microprobe integrated module 3, a sample scanning table 4, a data processing module 5, a double-frequency laser head 6, a convex lens 7, a pinhole 8, a concave lens 9, a polarizing beam splitter PBS 10, a first 1/4 wave plate 11, a second 1/4 wave plate 12, a reflector 13, a microprobe 14, a piezoelectric vibrating block 15, an elastic sheet 16, an elastic sheet fixing piece 17, an object carrying sheet 18, a groove 19, a flexible hinge base 20, a piezoelectric displacement block 21, a piezoelectric displacement block fixing piece 22, a first fixing hole 23, a first adjusting hole 23-1, a second adjusting hole 24, a double-shaft tilting table base 25, a first spring 26, a spring bolt 27, a first blind hole 27-1, a second blind hole 28, a first adjusting screw 28-1, a second adjusting screw 29, a shaft ball 30, a first rotating sheet 31, a first extending arm 32 and a second fixing hole 32-1, third fixing hole 33, third adjusting hole 33-1, fourth adjusting hole 34, second rotary plate 35, second extension arm 36, through hole 36-1, third blind hole 37, fourth fixing hole 38, fifth fixing hole 39, rotating shaft 40, second spring 40-1, third spring 41, third adjusting screw 42, three-dimensional displacement table.
Detailed Description
The invention will be further illustrated, but not limited, by the following description of the embodiments with reference to the accompanying drawings.
Example (b):
referring to fig. 1 and 7, a microprobe system for detecting the surface of an object includes a dual-frequency laser module 1, a microprobe integration module 2, a sample scanning stage 3, and a data processing module 4 connected to the sample scanning stage 3 and the dual-frequency laser module 1, where the dual-frequency laser module 1 outputs dual-frequency laser of orthogonal polarization, a part of the light, i.e., reference light, directly enters the data processing module 4, the other part of the light, i.e., detection light, enters the microprobe integration module 2, the laser returns to the dual-frequency laser module 1 after being reflected by the microprobe or the surface of the sample, the reference light and the detection light are combined and then enter the data processing module 4, and the data processing module 4 processes data to obtain the surface morphology of the detected sample.
As shown in fig. 2, the dual-frequency laser module includes a PT-1105C dual-frequency laser head 5, a convex lens 6, a 25 μm pinhole 7, a concave lens 8, a polarization beam splitter PBS9, a first 1/4 wave plate 10, a second 1/4 wave plate 11 and a reflector 12 connected in sequence from inside to outside in the vertical direction of a polarization beam splitter PBS9, wherein the laser head outputs a parallel laser with a wavelength of 632.8nm, the convex lens 6 focuses the parallel laser on a focal point on a subsequent propagation line of the laser, the 25 μm pinhole is placed at the focal point, the 25 μm pinhole filters out light with stray spatial frequency, the concave lens 8 converts the focused light of the convex lens 6 into parallel light again, the polarization beam splitter PBS9 splits the orthogonally polarized dual-frequency laser into transmission and reflection directions, and the transmission direction passes through the first 1/4 wave plate 10 and irradiates the microprobe integrated module 2, The reflection direction passes through the second 1/4 wave plate 11 and is reflected by the reflector 12 to irradiate the data processing module 4, and the double-frequency laser module is used for building a light path at the front end of the microprobe integrated module 2.
The micro probe integrated module includes:
as shown in fig. 3, the microprobe vibration unit is provided with: the micro probe 13 is clamped by the piezoelectric vibrating block 14 and the spring plate 15, the spring plate fixing piece 16 penetrates through a fixing hole arranged on the spring plate 15 to fix the piezoelectric vibrating block 14 at a groove 18 arranged at the edge end of the object carrying sheet 17, the groove depth of the groove 18 is smaller than one fifth of the height of the piezoelectric vibrating block 14, the outline side length of the groove 18 is equal to the side length of the piezoelectric vibrating block 14, the micro probe vibrating unit is externally connected with a driving device, the driving device comprises an AD9833 chip DDS signal generator and an LM324 signal linear amplifier based on STM32, the piezoelectric vibrating block 14 vibrates in a specified waveform, a resonance frequency and a specified amplitude according to a sine wave (or square wave and triangular wave) driving signal generated by the DDS signal generator, and the DDS signal generator generates the frequency of 1-1000kHz required by the module, the output waveform voltage value is 0-2V, the LM324 signal linear amplifier amplifies the voltage value of the waveform signal, the adjusting range is 0-20V, the vibration amplitude of the microprobe is further amplified on the basis of 0-2V, and the waveform, the frequency and the amplitude of the microprobe vibration are controlled;
as shown in fig. 4, the one-dimensional precession unit is provided with: the flexible hinge comprises a flexible hinge base 19, wherein the flexible hinge base 19 is a metal plate, a hollowed-out compliant mechanism is arranged on one side of the metal plate, a semicircular bulge on the side edge of the compliant mechanism is connected with one end of a piezoelectric displacement block 20, a piezoelectric displacement block fixing piece 21 is arranged at the other end of the piezoelectric displacement block 20, the piezoelectric displacement block 20 is arranged between the compliant mechanism and the piezoelectric displacement block fixing piece 21, an object carrying sheet 17 is fixed on the flexible hinge base 19 of the one-dimensional precession unit, and a group of first fixing holes 22, first adjusting holes 23 and second adjusting holes 23-1 are formed in the flexible hinge base 19;
as shown in fig. 5, a biaxial inclination table unit provided with: a double-shaft tilting table base 24, a group of first springs 25 arranged on the double-shaft tilting table base 24, a first blind hole 27 and a second blind hole 27-1 which are respectively corresponding to the adjusting hole 23 and the second adjusting hole 23-1 arranged on the flexible hinge base 19 and are respectively arranged on the first spring 25, the first spring 25 passes through the first fixing hole 22 and is fixedly connected with the flexible hinge base 19 through a spring bolt 26, a first adjusting screw 28 and a second adjusting screw 28-1 respectively pass through the first adjusting hole 23 and the second adjusting hole 23-1 arranged on the flexible hinge base 19 and extend into the first blind hole 27 and the second blind hole 27-1, a shaft bead 29 arranged on the double-shaft tilting table base 24 and is clamped between the double-shaft tilting table base 24 and the flexible hinge base 19, and the central point of the shaft bead 29 is positioned between the central point of the shaft bead 29 and the axial line of the first adjusting screw 28, The same plane of the axis connecting line of the second adjusting screw 28-1 is at a 90-degree included angle, and the structure of the axle ball, the spring and the adjusting screw realizes the adjustment of the pitching angle of the double-axle tilting table unit;
as shown in fig. 6, the rotary table unit includes: the rotary table unit is provided with a first rotary piece 30 and a T-shaped first extension arm 31 connected with one end of the first rotary piece 30, the first rotary piece 30 is provided with a through hole 36, the outer end part of the vertical part in the middle of the T-shaped first extension arm 31 is provided with a second fixing hole 32, the center of the vertical part in the middle of the T-shaped first extension arm 31 overlapped with the transverse part of the T-shaped first extension arm 31 is provided with a third fixing hole 32-1, the outer end part of the bending part of the first extension arm 31 is provided with a third adjusting hole 33, the rotary table unit is further provided with a second rotary piece 34 and a T-shaped second extension arm 35 connected with one end of the first rotary piece 30, the structures of the second rotary piece 34 and the second extension arm 35 are respectively consistent with the shapes of the first rotary piece 30 and the first extension arm 31, the corresponding positions of the second rotary piece 34 and the second extension arm 35, the first rotary piece 30 and the first extension arm 31 are respectively provided with a third blind hole 36-1, a fourth fixing hole 37, A fifth fixed hole 38, a fourth adjusting hole 33-1, the first rotary plate 30 and a T-shaped first extending arm 31 connected with one end of the first rotary plate 30 are oppositely arranged with a second rotary plate 34 and a T-shaped second extending arm 35 connected with one end of the first rotary plate 30, a rotating shaft 39 passes through a through hole 36 and extends into a third blind hole 36-1, two ends of a second spring 40 respectively extend into a third fixed hole 32-1 and a fourth fixed hole 37, two ends of a third spring 40-1 respectively extend into the second fixed hole 32 and a fifth fixed hole 38, a third adjusting screw 41 passes through a fourth adjusting hole 33-1 on the second extending arm 35 and extends into a third adjusting hole 33 on the first arm 31, a rotary table unit is connected with a three-dimensional displacement table 42, the three-dimensional displacement table 42 is composed of a vertical direction displacement table TSMV13-1A and a two-dimensional displacement table, the two-dimensional displacement table is composed of a one-dimensional displacement table TSM25-1A which is horizontally rotated by 90 degrees and then stacked on another one-dimensional displacement table TSM25-1A The stage TSM25-1A, the three-dimensional displacement stage 42 is configured to displace micro in XYZ directions within a spatial region, to ensure that the micro-probes in the micro-probe integrated module reach the plane of the parallel optical path and to adjust in the direction of the parallel optical path, so that the detection light is focused on the micro-probes.
The sample scanning platform is used for loading a sample, and a piezoelectric driver on the sample scanning platform is adopted to enable the sample to carry out scanning detection in a three-dimensional direction and initial position adjustment;
the data processing module comprises a photoelectric detector PD and a digital phase meter PT-1313B, is connected with the computer and is used for processing optical signals received by the PD, and the optical signals are converted into electric signals to be processed.
The working principle of the system is as follows: the dual-frequency laser module 1 completes the light path construction at the front end of the microprobe integrated module 2, outputs reference light to the data processing module 4, outputs detection light to the microprobe integrated module 2, the two beams of light are mutually orthogonally polarized, wherein the detection light enters the microprobe integrated module 2 and irradiates on a microprobe, a reflection light spot of the detection light is coincided with a base point position where the reference light spot is located through the adjustment of the double-shaft tilting table unit, the rotating table unit and the three-dimensional displacement table 42, in the process, a vertical component s of the reference light is reflected by the polarization beam splitter PBS9 and then passes through the second 1/4 wave plate 11, the polarization direction is rotated by 45 degrees, the reference light is reflected by the reflector 12 and then passes through the second 1/4 wave plate 11 again, the polarization direction is rotated by 45 degrees again, the final polarization direction is perpendicular to the original direction, the reference light is transmitted through the polarization beam splitter PBS9 and enters the data processing module 4, wherein the micropro, therefore, similar to the reference light, the detection light parallel quantity p is reflected by the polarization beam splitter PBS9, then the direction of the detection light parallel quantity p is opposite to the original direction after passing through the first 1/4 wave plate 10, the microprobe and the first 1/4 wave plate 10, the polarization angle is changed by 90 degrees, the detection light parallel quantity p is reflected by the polarization beam splitter PBS9 and enters the data processing module 4, finally the reference light and the detection light are combined to generate interference, and beat frequency difference frequency generated by the interference is analyzed and polarized by the data processing module 4.
The sample is placed on the scanning platform, and can make vertical and horizontal movement, so that the sample can be scanned point by point in line, and the acquired data can be demodulated and imaged.
When the system works, the microprobe firstly adjusts X, Y, Z, theta X and theta Z five-axis adjustment of the microprobe under the control of the double-axis tilting table unit, the rotating table unit and the three-dimensional displacement table 42, the detection light is collimated, then the microprobe-sample approach is realized under the control of the one-dimensional precession unit, finally the microprobe is driven by the driving device to perform excitation of given waveform, frequency and volt value, meanwhile, the sample scanning table 3 drives the sample to perform point-by-point in-line scanning detection, the displacement change of the microprobe can be caused by the action of atomic force generated by the microprobe-sample at a very small distance, the optical path difference change is detected by using the data processing module, and the detection work of micro-nano different scales can be realized after the detection information is demodulated.
Claims (3)
1. A microprobe system for detecting the surface of an object is characterized by comprising a double-frequency laser module, a microprobe integration module, a sample scanning platform and a data processing module, wherein the double-frequency laser module, the microprobe integration module and the sample scanning platform are sequentially and linearly arranged, the data processing module is connected with the sample scanning platform and the double-frequency laser module, the double-frequency laser module outputs double-frequency laser with orthogonal polarization, one part of light, namely reference light, directly enters the data processing module, the other part of light, namely detection light, enters the microprobe integration module, the laser returns to the double-frequency laser module after being reflected on the surface of the microprobe or the sample, the reference light and the detection light enter the data processing module after being combined, and the data processing module processes data to obtain the surface.
2. The microprobe system for detecting the surface of an object according to claim 1, wherein the dual-frequency laser module comprises a PT-1105C dual-frequency laser head, a convex lens, a 25 μm pinhole, a concave lens, a polarization splitting prism PBS, a second 1/4 wave plate and a reflecting mirror which are sequentially connected from inside to outside in the vertical direction of the first 1/4 wave plate and the polarization splitting prism PBS, wherein the laser head outputs parallel laser with the wavelength of 632.8nm, the convex lens focuses the parallel laser at a focus, and the 25 μm pinhole is placed at the focus.
3. The microprojection system for detecting the surface of an object, as defined in claim 1, wherein the microprojection assembly includes:
a microprobe vibration unit provided with: the micro probe is clamped by the piezoelectric vibrating block and the elastic sheet, the elastic sheet fixing piece penetrates through a fixing hole formed in the elastic sheet to fix the piezoelectric vibrating block at a groove formed in the edge end of the object carrying sheet, the groove depth of the groove is smaller than one fifth of the height of the piezoelectric vibrating block, the outline side length of the groove is equal to the side length of the piezoelectric vibrating block, and the micro probe vibrating unit is externally connected with a driving device;
a one-dimensional precession unit provided with: the flexible hinge comprises a flexible hinge base, a flexible hinge base and a flexible slide block, wherein the flexible hinge base is a metal plate, one side of the metal plate is provided with a hollowed-out compliant mechanism, the side edge of the compliant mechanism is in a semicircular bulge and is connected with one end of a piezoelectric displacement block, the other end of the piezoelectric displacement block is provided with a piezoelectric displacement block fixing piece, the piezoelectric displacement block is arranged between the compliant mechanism and the piezoelectric displacement block fixing piece, a loading piece is fixed on the flexible hinge base of a one-dimensional precession unit, and the flexible hinge base is provided with a group of first fixing holes, first adjusting holes;
a biaxial inclination table unit provided with: the double-shaft tilting table base is provided with a group of first springs, the first springs penetrate through first fixing holes and are fixedly connected with the flexible hinge base through spring bolts, the double-shaft tilting table base is also provided with a group of first blind holes and second blind holes which respectively correspond to first adjusting holes and second adjusting holes arranged on the flexible hinge base, a first adjusting screw and a second adjusting screw respectively penetrate through the first adjusting holes and the second adjusting holes on the flexible hinge base and extend into the first blind holes and the second blind holes, the double-shaft tilting table base is provided with a shaft bead which is clamped between the double-shaft tilting table base and the flexible hinge base, the center point of the shaft bead is positioned at a 90-degree included angle formed by the center point of the shaft bead and the connecting line of the axis of the first adjusting screw and the axis of the second adjusting screw on the same plane, and the structure of the shaft bead, the spring and the adjusting screw realizes the adjustment of the pitching angle of the unit of the continuously adjustable double-shaft tilting table;
a rotating table unit provided with: the rotary table unit is also provided with a second rotary sheet and a T-shaped second extension arm connected with one end of the first rotary sheet, the second rotary sheet and the second extension arm are consistent with the first rotary sheet and the first extension arm in shape, the structures of the second rotary sheet and the second extension arm are respectively consistent with the first rotary sheet and the first extension arm in shape, the second rotary sheet and the first extension arm are respectively provided with a third blind hole, a fourth fixing hole, a fifth fixing hole and a fourth adjusting hole, the first rotary sheet and the T-shaped first extension arm connected with one end of the first rotary sheet and the second extension arm connected with one end of the first rotary sheet in shape are respectively provided with a second T-shaped extension arm connected with one end of the first rotary sheet and a T-shaped second extension arm connected with one end of the first rotary sheet The extension arms are oppositely arranged, the rotating shaft penetrates through the through hole to extend into the third blind hole, two ends of the second spring respectively extend into the third fixing hole and the fourth fixing hole, two ends of the third spring respectively extend into the second fixing hole and the fifth fixing hole, the third adjusting screw rod penetrates through the fourth adjusting hole in the second extension arm to extend into the third adjusting hole in the first extension arm, the rotating table unit is connected with the three-dimensional displacement table, the three-dimensional displacement table is composed of a vertical one-dimensional displacement table TSMV13-1A and a two-dimensional displacement table, and the two-dimensional displacement table is composed of one-dimensional displacement table TSM25-1A which is horizontally rotated for 90 degrees and then stacked on another one-dimensional displacement table TSM 25-1A.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110305225.8A CN113030109A (en) | 2021-03-23 | 2021-03-23 | Microprobe system for detecting object surface |
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| CN202110305225.8A CN113030109A (en) | 2021-03-23 | 2021-03-23 | Microprobe system for detecting object surface |
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| CN (1) | CN113030109A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114088734A (en) * | 2021-11-18 | 2022-02-25 | 广东电网有限责任公司 | System and method for detecting internal defects of composite insulator |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010048076A1 (en) * | 1997-12-01 | 2001-12-06 | Seiko Instruments Inc. | Surface analyzing apparatus |
| CN1384334A (en) * | 2002-06-07 | 2002-12-11 | 清华大学 | Double-frequency confocal step height microscope measuring device |
| CN1670505A (en) * | 2005-04-22 | 2005-09-21 | 清华大学 | Multiple-pattern atomic force probe scanning system |
| CN101226121A (en) * | 2008-01-30 | 2008-07-23 | 赵宏伟 | Precision charger for material nano metric bending mechanical properties test |
| CN111398789A (en) * | 2020-04-28 | 2020-07-10 | 天津蓝鳍科技有限公司 | Probe card fine-tuning device, coupling device and method for photonic integrated chip test system |
-
2021
- 2021-03-23 CN CN202110305225.8A patent/CN113030109A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010048076A1 (en) * | 1997-12-01 | 2001-12-06 | Seiko Instruments Inc. | Surface analyzing apparatus |
| CN1384334A (en) * | 2002-06-07 | 2002-12-11 | 清华大学 | Double-frequency confocal step height microscope measuring device |
| CN1670505A (en) * | 2005-04-22 | 2005-09-21 | 清华大学 | Multiple-pattern atomic force probe scanning system |
| CN101226121A (en) * | 2008-01-30 | 2008-07-23 | 赵宏伟 | Precision charger for material nano metric bending mechanical properties test |
| CN111398789A (en) * | 2020-04-28 | 2020-07-10 | 天津蓝鳍科技有限公司 | Probe card fine-tuning device, coupling device and method for photonic integrated chip test system |
Non-Patent Citations (3)
| Title |
|---|
| 林浩山等: "微探针纳米尺度振动测试的实验研究", 《光学技术》 * |
| 赵坚勇: "《应用电视技术》", 31 August 2003 * |
| 赵长军等: "《山区农村人行索桁桥设计与施工手册》", 31 January 2015 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114088734A (en) * | 2021-11-18 | 2022-02-25 | 广东电网有限责任公司 | System and method for detecting internal defects of composite insulator |
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